A flexible frictional nanogenerator against large deformation and a preparation method thereof

By constructing a gradient energy laser multilayer transition region and a corrugated structure in a triboelectric nanogenerator, the tearing and interface separation problems of the triboelectric nanogenerator under large deformation conditions are solved, thereby improving the durability and service life of the device.

CN121055806BActive Publication Date: 2026-04-14GUANGDONG UNIV OF TECH
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Patent Information

Application Number
CN202510954830.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-07-11
Publication Date
2026-04-14
Estimated Expiration
2045-07-11

AI Technical Summary

Technical Problem

Existing triboelectric nanogenerators are prone to tearing and interface separation under large deformation conditions, resulting in poor device durability and short service life.

Method used

A multi-layer gradient transition region is constructed between the negative friction layer and the graphene electrode using gradient energy laser. The graphene electrode is generated in situ using infrared laser to form an integrated structure. A corrugated structure is prepared on the negative friction layer, combined with a PDMS protective layer to avoid stress concentration and interface separation.

Benefits of technology

This improves the structural stability and durability of the triboelectric nanogenerator, enhances its adaptability to large deformations, and extends its service life.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of friction nanogenerators, and discloses an anti-large-deformation flexible friction nanogenerator and a preparation method thereof, which comprises a positive friction layer and a negative friction layer, a support body is arranged between the positive friction layer and the negative friction layer, a conductive copper foil electrode is arranged on the side of the positive friction layer away from the negative friction layer and is used for leading out the electric charges induced on the side of the positive friction layer, a protective layer is arranged on the side of the negative friction layer away from the positive friction layer, a graphene electrode is arranged between the protective layer and the negative friction layer and is used for leading out the electric charges induced on the side of the negative friction layer, and the graphene electrode is generated in situ by infrared laser irradiation of the negative friction layer. A gradient transition zone is generated between the negative friction layer and the graphene electrode by gradient energy laser, the Young's modulus of the transition zone is increasing, stress concentration points caused by modulus mutation can be avoided, the interface combination remains stable under repeated stretching and bending of the device, and the structural stability and durability of the generator are improved.
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Description

Technical Field

[0001] This invention relates to the field of triboelectric nanogenerator technology, specifically to a flexible triboelectric nanogenerator resistant to large deformation and its preparation method. Background Technology

[0002] Triboelectric nanogenerators (TENGs), as devices that harvest energy dissipated by human movement, are prone to deformation. Therefore, the friction layer is typically made of flexible materials such as polyimide. Polyimide (PI), due to its triboelectric sequence near the negative electrode, is often used as the negative friction layer material in TENGs. However, when worn at joints, such as during elbow movements, the TENG undergoes significant deformation. In such cases, the typical flexible friction layer cannot withstand this deformation, leading to layer failure and a substantial decrease in TENG performance. By modifying the properties of the friction layer material, its flexibility can be improved, achieving resistance to large deformations and thus extending the lifespan of the TENG.

[0003] The main existing device for harvesting energy dissipated by human movement is the triboelectric nanogenerator (TENG), which can be used in self-powered human body sensing devices. However, the electrodes in contact with the friction layer are generally conductive copper foils, which can lead to interfacial delamination with the friction layer substrate. During the operation of the TENG, i.e., during human movement, there are periodic large deformations, such as the elbow movement when walking and swinging the arms. At this time, due to the interfacial separation between the conductive copper foil and the friction layer, as the number of repetitions increases, the conductive copper foil and the friction layer will separate, thus affecting the durability of the TENG. The problem of interfacial separation can be solved by the one-piece fabrication of laser-induced graphene (LIG) electrodes directly generated from a carbon-based friction layer substrate by laser irradiation. Although directly generating the electrode can avoid the problem of interfacial separation, due to the different physical properties of the electrode and friction layer materials, and the problem that high-energy laser irradiation can cause the formation of a hard transition layer between the substrate and the electrode, after long-term operation and repeated tensile forces, the two materials will separate at the interface.

[0004] Furthermore, during the integrated electrode fabrication process, a transition layer is first generated on the tribological layer substrate material after laser irradiation, followed by the formation of the LIG electrode. This transition layer becomes brittle and hard due to the laser power and scanning speed, with a Young's modulus much higher than that of the LIG electrode and the substrate material. The abrupt change in Young's modulus causes stress concentration, leading to interfacial separation when the triboelectric nanogenerator is subjected to periodic large strains during operation, resulting in the separation of the electrode and the substrate material. Moreover, due to the inherent brittleness of the hard transition layer, cracks will be generated when subjected to large strains during operation, causing the triboelectric material of the triboelectric nanogenerator to tear. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a flexible triboelectric nanogenerator resistant to large deformation and its preparation method. This solves the problems in existing technologies where the flexible triboelectric layer is prone to tearing under large deformation, and where stress concentration caused by abrupt changes in the mechanical properties of the electrode-substrate interface leads to interface delamination and failure, ultimately resulting in poor device durability and short service life.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a flexible triboelectric nanogenerator resistant to large deformation, comprising:

[0007] A positive friction layer and a negative friction layer, wherein a support is disposed between the positive friction layer and the negative friction layer;

[0008] A conductive copper foil electrode is located on the side of the positive friction layer away from the negative friction layer, and is used to draw out the charge induced on the positive friction layer side;

[0009] A protective layer is located on the side of the negative friction layer that is away from the positive friction layer;

[0010] A graphene electrode, located between the protective layer and the negative friction layer, is used to draw out the charge induced on the negative friction layer side;

[0011] The graphene electrode is generated in situ by irradiating the negative friction layer with an infrared laser.

[0012] Preferably, the material of the negative friction layer includes: a flexible carbon-based material;

[0013] The material of the positive friction layer includes: polyoxymethylene;

[0014] The protective layer is made of PDMS.

[0015] Preferably, the graphene electrode is configured as a three-layer stacked structure, including an upper layer, a middle layer, and a lower layer;

[0016] The upper, middle, and lower layers are arranged in order of distance from the negative friction layer, from farthest to closest.

[0017] Preferably, the upper layer is a LIG layer, and the middle and lower layers are transition layers.

[0018] Preferably, the Young's modulus of the lower, middle and upper layers increases progressively.

[0019] Preferably, the cross-section of the negative friction layer has a corrugated structure.

[0020] A method for preparing a flexible triboelectric nanogenerator resistant to large deformation includes the following steps:

[0021] Step S1: Apply pre-strain to the negative friction layer;

[0022] Step S2: While maintaining the pre-strain state, graphene electrodes are generated in situ on the negative friction layer by infrared laser induction.

[0023] Step S3: Release the pre-strain to allow the negative friction layer to spring back and form a corrugated structure;

[0024] Step S4: Cover with a protective layer and heat to form;

[0025] Step S5: Assemble the negative friction layer, positive friction layer, conductive copper foil electrode and support body after the treatment in step S3.

[0026] Preferably, in step S2, the specific steps of in-situ integrated generation of graphene electrodes on the negative friction layer include:

[0027] Step S2-1: Focus the infrared laser on the middle of the negative friction layer and perform a serpentine laser scan to form the lower layer;

[0028] Step S2-2: Focus the infrared laser on the upper part of the negative friction layer and perform a serpentine laser scan to form a middle layer;

[0029] Step S2-3: Focus the infrared laser on the top of the negative friction layer and perform a serpentine laser scan to form the upper layer;

[0030] In steps S2-1, S2-2, and S2-3, the speed of the laser scanning decreases sequentially.

[0031] In steps S2-1, S2-2, and S2-3, the laser power of the laser scanning increases sequentially.

[0032] Preferably, in step S2-1, the porosity of the lower layer is greater than 50%;

[0033] In step S2-2, the porosity of the middle layer is less than 50%.

[0034] In steps S2-3, the porosity of the upper layer is less than 10%.

[0035] Preferably, in step S4, the heat forming includes:

[0036] After covering with a protective layer, bake in an oven at 80°C for 40 minutes.

[0037] This invention provides a flexible triboelectric nanogenerator resistant to large deformation and its preparation method. It has the following beneficial effects:

[0038] 1. This invention constructs a multi-layer gradient transition region between the negative friction layer and the graphene electrode using gradient energy laser, and the Young's modulus of the transition region increases progressively, which can avoid stress concentration points caused by sudden changes in modulus. This makes the interfacial bonding force remain strong even under repeated stretching and bending, greatly improving the structural stability and durability of the generator.

[0039] 2. The present invention uses a method of first stretching, then processing, and then releasing the negative friction layer. This allows the originally flat negative friction layer to self-rebound after processing, forming a macroscopic corrugated structure. Therefore, when the generator is stretched significantly, the negative friction layer will be flattened. This process absorbs most of the deformation, thereby solving the problem that the flexible friction layer breaks easily when stretched in the prior art, thus giving the generator the ability to resist large deformations.

[0040] 3. This invention uses laser in-situ induction to directly form the graphene electrode from the negative friction layer, so the two are an integral structure. Therefore, there is no physical interface between them, which avoids the phenomenon of peeling and detachment after long-term use, thus preventing the device from being scrapped. This improves the stability between the negative friction layer and the graphene electrode. Attached Figure Description

[0041] Figure 1 This is a schematic diagram illustrating the working principle of the triboelectric nanogenerator of the present invention;

[0042] Figure 2 This is a schematic diagram of the gradient energy laser layering process of the present invention. In the figure, a, b, and c are schematic diagrams of the lower, middle, and upper layers of the gradient energy laser processing, respectively.

[0043] Figure 3 This is a schematic diagram of the corrugated structure of the negative friction layer of the present invention;

[0044] Figure 4 This is a schematic diagram of the method flow of the present invention.

[0045] The components are: 1. Protective layer; 2. Graphene electrode; 201. Upper layer; 202. Middle layer; 203. Lower layer; 3. Negative friction layer; 4. Support; 5. Positive friction layer; 6. Conductive copper foil electrode. Detailed Implementation

[0046] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0047] To better understand the present invention, the above content will be described in detail below with reference to specific embodiments.

[0048] Please see the appendix Figure 1 - Appendix Figure 3 This invention provides a flexible triboelectric nanogenerator resistant to large deformation, comprising: a positive friction layer 5 and a negative friction layer 3, with a support 4 disposed between the positive friction layer 5 and the negative friction layer 3; a conductive copper foil electrode 6 located on the side of the positive friction layer 5 away from the negative friction layer 3, used to draw out the charge induced on the side of the positive friction layer 5; a protective layer 1 located on the side of the negative friction layer 3 away from the positive friction layer 5; and a graphene electrode 2 located between the protective layer 1 and the negative friction layer 3, used to draw out the charge induced on the side of the negative friction layer 3; the graphene electrode 2 is generated in situ by infrared laser irradiation of the negative friction layer 3.

[0049] In this embodiment, when the positive friction layer 5 comes into contact with the negative friction layer 3, the negative friction layer 3 will capture electrons from the surface of the positive friction layer 5 due to the different electron affinity of the two materials, thereby becoming negatively charged, while the positive friction layer 5 will become positively charged due to the loss of electrons.

[0050] When the positive friction layer 5 and the negative friction layer 3 separate, an electric field is formed pointing from the positive electrode to the negative electrode as the distance between them increases. This electric field establishes a significant potential difference between the two electrodes, namely the conductive copper foil electrode 6 and the graphene electrode 2. Subsequently, to balance this potential difference, electrons are driven to flow from the lower potential graphene electrode 2, through an external circuit, to the higher potential conductive copper foil electrode 6, thus generating a momentary current. When the positive friction layer 5 and the negative friction layer 3 approach each other again until they make contact, the potential difference decreases and eventually disappears. At this point, to achieve a new electrical balance, the electrons previously accumulated on the conductive copper foil electrode 6 flow back to the graphene electrode 2 in the opposite direction, forming a reverse current pulse.

[0051] The negative friction layer 3 is made of a flexible carbon-based material;

[0052] The material of the positive friction layer 5 includes: polyoxymethylene;

[0053] In this embodiment, the flexible carbon-based material can gain electrons and become negatively charged; while polyoxymethylene can lose electrons and become positively charged, thereby guiding the flow of electrons to form an electric current.

[0054] The material of the protective layer 1 includes PDMS.

[0055] In this embodiment, polydimethylsiloxane (PDMS) is flexible and biocompatible. It can withstand extreme tension and bending without breaking, extending the service life of the generator.

[0056] The graphene electrode 2 is configured as a three-layer stacked structure, including an upper layer 201, a middle layer 202 and a lower layer 203;

[0057] The upper layer 201, middle layer 202 and lower layer 203 are divided into upper layer 201, middle layer 202 and lower layer 203 in order of distance from the negative friction layer 3 from farthest to closest.

[0058] The upper layer 201 is a LIG layer, and the middle layer 202 and the lower layer 203 are transition layers.

[0059] The Young's modulus of the lower layer 203, the middle layer 202 and the upper layer 201 increases progressively.

[0060] The cross-section of the negative friction layer 3 has a corrugated structure.

[0061] In this embodiment, the graphene electrode 2 is configured as a three-layer stacked structure, with the upper layer 201 being a LIG layer. The Young's modulus of the lower layer 203, the middle layer 202, and the upper layer 201 increases progressively. Therefore, the lower layer 203 and the middle layer 202 together form a transition layer, connecting the soft negative friction layer 3 substrate to the rigid graphene electrode 2. Furthermore, starting from the softest negative friction layer 3 substrate, the structure sequentially passes through the lower layer 203 with a lower Young's modulus, the middle layer 202 with a medium Young's modulus, and finally reaches the upper layer 201 LIG electrode with the highest Young's modulus. Through the gradient distribution of mechanical properties, a buffer zone is formed, avoiding abrupt stress changes between material interfaces. At the same time, the cross-section of the negative friction layer 3 is a corrugated structure. The corrugated structure of the negative friction layer 3 allows it to have a wrinkled shape, enabling the entire device to adapt to deformation by unfolding the corrugations when stretched, thereby greatly improving the tensile limit of the device and protecting the micro-functional layers from damage during stretching.

[0062] Working principle: In the initial state, no charge is generated, and there is no potential difference between the two electrodes, the graphene electrode 2 and the conductive copper foil electrode 6. When an external displacement is applied, the negative friction layer 3 and the positive friction layer 5 on the two polymer surfaces come into contact. Due to the triboelectric effect, charge transfer occurs at the contact area between the two materials. According to the triboelectric sequence, electrons in the positive friction layer 5 transfer to the surface of the negative friction layer 3, thus making the surface of the negative friction layer 3 negatively charged and the surface of the positive friction layer 5 positively charged. Since these charges are confined to the surface, and the two equal amounts of charge are on the same plane, no potential difference is generated between the two electrodes.

[0063] When the negative friction layer 3 and the positive friction layer 5 separate, a potential difference is created between the two electrodes. This potential difference drives electrons from the upper graphene electrode 2 to the lower conductive copper foil electrode 6, generating a positive instantaneous current when the external force is removed. When pressure is reapplied to the generator, the distance between the negative friction layer 3 and the positive friction layer 5 decreases, making the graphene electrode 2 have a higher potential than the conductive copper foil electrode 6. This causes electrons to flow from the conductive copper foil electrode 6 back to the graphene electrode 2, reducing the induced charge on the conductive copper foil electrode 6. This process corresponds to a negative instantaneous current. When the two friction layers re-contact, all the induced charge is neutralized.

[0064] Please see the appendix Figure 4 This invention provides a method for preparing a flexible triboelectric nanogenerator resistant to large deformation, comprising the following steps:

[0065] Step S1: Apply pre-strain to the negative friction layer 3;

[0066] Step S2: While maintaining the pre-strain state, graphene electrode 2 is generated in situ on the negative friction layer 3 by infrared laser induction.

[0067] Step S3: Release the pre-strain to allow the negative friction layer 3 to spring back and form a corrugated structure;

[0068] Step S4: Cover with protective layer 1 and heat to form;

[0069] Step S5: Assemble the negative friction layer 3, which has been processed in step S3, together with the positive friction layer 5, the conductive copper foil electrode 6, and the support 4.

[0070] In step S2, the specific steps for in-situ integrated generation of the graphene electrode 2 on the negative friction layer 3 include:

[0071] Step S2-1: Focus the infrared laser on the middle of the negative friction layer 3 and perform a serpentine laser scan to form the lower layer 203;

[0072] Step S2-2: Focus the infrared laser on the upper part of the negative friction layer 3 and perform a serpentine laser scan to form the middle layer 202;

[0073] Step S2-3: Focus the infrared laser on the top of the negative friction layer 3 and perform a serpentine laser scan to form the upper layer 201;

[0074] In steps S2-1, S2-2, and S2-3, the speed of the laser scanning decreases sequentially.

[0075] In steps S2-1, S2-2, and S2-3, the laser power of the laser scanning increases sequentially.

[0076] Preferably, in step S2-1, the porosity of the lower layer 203 is greater than 50%;

[0077] In step S2-2, the porosity of the middle layer 202 is less than 50%;

[0078] In steps S2-3, the porosity of the upper layer 201 is less than 10%.

[0079] Preferably, in step S4, the heat forming includes:

[0080] After covering with protective layer 1, bake in an oven at 80°C for 40 minutes.

[0081] In this embodiment:

[0082] In step S1, a tensile force is applied to the negative friction layer 3 through an adjustable clamp to perform tensile pre-strain, which lays the foundation for the subsequent formation of the macroscopic corrugated structure.

[0083] In step S2, while the negative friction layer 3 is in a pre-strained state, an infrared laser processing step is performed to integrally generate a graphene electrode 2 with gradient properties in situ on it. Specifically, by adjusting the focal depth of the laser, the infrared laser is focused on the middle region of the negative friction layer 3 substrate. A first serpentine scan is performed using a higher scanning speed and a lower laser power. Due to the low energy density, only a loose lower layer 203 with high porosity (preferably >50%) is formed inside the substrate. Next, the laser focus is moved up to the upper-middle region of the substrate. A second serpentine scan is performed by appropriately reducing the scanning speed and increasing the laser power. At this time, the higher energy density allows for more complete carbonization, forming a relatively dense middle layer 202 with lower porosity (preferably <50%). Finally, the laser focus is precisely set on the top surface of the substrate. A third serpentine scan is performed using the lowest scanning speed and the highest laser power. The extremely high energy density ensured that the surface material was completely converted into graphene with excellent conductivity and a dense structure, forming an upper layer 201 with extremely low porosity (preferably <10%). By employing this strategy of sequentially decreasing scanning speed and sequentially increasing laser power, a gradient functional region with progressively increasing Young's modulus was successfully constructed on the substrate.

[0084] In step S3, after laser processing is completed, the fixture is released to release the previously applied pre-strain. Due to the mechanical property mismatch between the newly generated upper layer 201 and the negative friction layer 3, the entire negative friction layer 3 assembly will spontaneously spring back and buckle, thereby forming a preset, uniform corrugated structure on the cross-section.

[0085] In step S4, liquid PDMS (polydimethylsiloxane) is poured onto the surface of the graphene electrode 2 with a corrugated structure as a protective layer 1. Subsequently, it is placed in an oven for thermosetting. In a preferred embodiment, the heating conditions are baking at 80°C for 40 minutes to allow the PDMS to fully solidify.

[0086] In step S5, the negative friction layer 3 component with a corrugated structure prepared in the above steps is aligned and encapsulated with the positive friction layer 5, the conductive copper foil electrode 6, and the support 4 as a spacer, and finally assembled into a complete flexible triboelectric nanogenerator resistant to large deformation.

[0087] In another embodiment, in the above preparation steps;

[0088] Flexible materials capable of withstanding large deformations, such as corrugated structures, are obtained by applying stress to flexible materials (negative friction layer 3) using a movable fixture and simultaneously performing laser processing. When the prepared material encounters external force, its macroscopic structure is first stretched, undergoing elastic deformation. Only when the structure is straightened does plastic deformation occur due to the microstructure of the flexible material itself. This enhances the flexible material's resistance to large deformations.

[0089] In the fabrication of the lower layer 203, the middle layer 202 and the upper layer 201, the laser energy is gradually increased from low energy to high energy, and the scanning speed is simultaneously reduced from high speed to low speed.

[0090] Specifically: The fixture applies pre-strain to the negative friction layer 3, and adjusts the laser focusing position to divide it into three regions. First, the laser is focused on a short distance below the surface of the negative friction layer 3, and a low-power, fast serpentine scan is performed to generate a porous carbonized layer (porosity higher than 50%), i.e., a high-porosity transition layer, with the modulus controlled to be close to that of the negative friction layer 3. Next, the laser focal length is moved upwards, and a medium-power, medium-speed serpentine scan is performed on the middle layer to generate a medium-density (porosity lower than 50%) transition porous carbonized layer, i.e., a low-porosity transition layer, with the modulus controlled to be between that of the negative friction layer 3 and the LIG layer. Finally, the laser is focused on the surface of the negative friction layer 3, and a high-power, low-speed serpentine scan is performed to generate a dense LIG layer (porosity lower than 10%).

[0091] Introducing a mathematical model:

[0092]

[0093] H = h1 + h2 + h3;

[0094]

[0095] Where λ is the wavelength of the ripples, H is the total thickness of the three layers (hereinafter referred to as the upper three layers) on the negative friction layer 3 processed by gradient laser energy, h1, h2, and h3 correspond to the thicknesses of the upper, middle, and lower layers, respectively, and E eq These are the equivalent Young's moduli of the upper three layers, with E1, E2, and E3 corresponding to the Young's moduli of the upper, middle, and lower layers, respectively. s E is the Poisson's ratio of the negative friction layer 3, ε is the pre-strain applied by the fixture, and E s It is the Young's modulus of the substrate material, υ eq υ1, υ2, and υ3 are the equivalent Poisson ratios of the upper three layers, and υ1, υ2, and υ3 are the Young's moduli of the upper, middle, and lower layers, respectively.

[0096] Porosity P is represented by the following mathematical model:

[0097]

[0098] Where P is porosity, h is layer thickness, h0 is reference layer thickness, and E d It is the laser energy density, E th It is the threshold energy density at which the material is completely carbonized.

[0099] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A flexible triboelectric nanogenerator resistant to large deformation, characterized in that, include: A positive friction layer (5) and a negative friction layer (3) are provided, and a support (4) is provided between the positive friction layer (5) and the negative friction layer (3). A conductive copper foil electrode (6) is located on the side of the positive friction layer (5) away from the negative friction layer (3) and is used to draw out the charge induced on the side of the positive friction layer (5). A protective layer (1) is located on the side of the negative friction layer (3) away from the positive friction layer (5); A graphene electrode (2) is located between the protective layer (1) and the negative friction layer (3) to draw out the charge induced on the side of the negative friction layer (3); The graphene electrode (2) is generated in situ by infrared laser irradiation of the negative friction layer (3); The graphene electrode (2) is configured as a three-layer stacked structure, including an upper layer (201), a middle layer (202) and a lower layer (203). The upper layer (201), middle layer (202) and lower layer (203) are divided into upper layer (201), middle layer (202) and lower layer (203) in order of distance from the negative friction layer (3) from farthest to near. The upper layer (201) is a LIG layer, and the middle layer (202) and the lower layer (203) are transition layers; The Young's modulus of the lower layer (203), middle layer (202) and upper layer (201) increases layer by layer; The cross-section of the negative friction layer (3) is a corrugated structure.

2. The flexible triboelectric nanogenerator resistant to large deformation according to claim 1, characterized in that, The negative friction layer (3) is made of a flexible carbon-based material; The material of the positive friction layer (5) includes: polyoxymethylene; The material of the protective layer (1) includes PDMS.

3. A method for preparing a flexible triboelectric nanogenerator resistant to large deformation, based on the flexible triboelectric nanogenerator resistant to large deformation as described in any one of claims 1-2, characterized in that, Includes the following steps: Step S1: Apply pre-strain to the negative friction layer (3); Step S2: While maintaining the pre-strain state, graphene electrode (2) is generated in situ on the negative friction layer (3) by infrared laser induction. Step S3: Release the pre-strain to allow the negative friction layer (3) to spring back and form a corrugated structure; Step S4: Cover with protective layer (1) and heat to form; Step S5: Assemble the negative friction layer (3) processed in step S3 with the positive friction layer (5), the conductive copper foil electrode (6) and the support (4).

4. The method for preparing a flexible triboelectric nanogenerator resistant to large deformation according to claim 3, characterized in that, In step S2, the specific steps for in-situ integrated generation of graphene electrode (2) on negative friction layer (3) include: Step S2-1: Focus the infrared laser on the middle part of the negative friction layer (3) to perform a serpentine laser scan to form the lower layer (203). Step S2-2: Focus the infrared laser on the upper part of the negative friction layer (3) and perform a serpentine laser scan to form the middle layer (202). Step S2-3: Focus the infrared laser on the top of the negative friction layer (3) and perform a serpentine laser scan to form the upper layer (201). In steps S2-1, S2-2, and S2-3, the speed of the laser scanning decreases sequentially. In steps S2-1, S2-2, and S2-3, the laser power of the laser scanning increases sequentially.

5. The method for preparing a flexible triboelectric nanogenerator resistant to large deformation according to claim 4, characterized in that, In step S2-1, the porosity of the lower layer (203) is greater than >50%; In step S2-2, the porosity of the middle layer (202) is less than 50%; In steps S2-3, the porosity of the upper layer (201) is less than 10%.

6. The method for preparing a flexible triboelectric nanogenerator resistant to large deformation according to claim 3, characterized in that, In step S4, the heating and forming includes: After covering with the protective layer (1), bake in an oven at 80°C for 40 minutes.

Citation Information

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