A polysilicon vertical silicon core cleaning machine

Abstract

The present application provides a kind of polycrystalline silicon vertical silicon core cleaning machine, including base, cylinder wall, machine cover, locking mechanism, cover, first magnet, spoiler frame, motor, chuck, second magnet, bearing, connecting shaft, upper silicon core support disc, middle silicon core support disc, lower silicon core support disc, impeller, input pipe, spray head, drain pipe and storage tank;Vertical silicon core cleaning machine can greatly reduce floor space, improve the space utilization of equipment;Liquid medium sprayed out can flow into corresponding liquid storage tank by lower drain pipe for classification and recycling and recycling;The whole operation process of vertical silicon core cleaning machine is carried out in a closed state, there is no acid mist overflow, the cleaning method of spraying can ensure that the acid liquid ratio is relatively constant, the quality of acid liquid will not be reduced due to volatilization or decomposition, and the cleaning effect of silicon core can be guaranteed.

Description

Technical Field

[0001] This invention relates to the field of polycrystalline silicon technology, and specifically to a vertical polycrystalline silicon core cleaning machine. Background Technology

[0002] In the modified Siemens process, silicon cores serve as carriers for polycrystalline silicon deposition in reduction furnaces. During processing, they typically undergo steps such as head and tail removal, cutting, and polishing. During this process, silicon core surfaces can become contaminated with silicon sludge, organic matter, and metal elements. Therefore, silicon cores need to be cleaned before use.

[0003] Currently, traditional horizontal silicon core cleaning machines, along with their associated high-purity water systems and waste gas treatment systems, occupy a large area, resulting in low vertical space utilization in polysilicon production plants. Furthermore, the semi-open or open design of horizontal silicon core cleaning machines causes the cleaning medium in the cleaning tank to evaporate and decompose due to reaction heat and light, thus altering the acid ratio. Simultaneously, the amount of reagents prepared and the acid consumption are large, leading to higher production costs. After cleaning, acid stains and accumulated liquid can still form at the silicon core clamping device within the cleaning machine, affecting the cleaning effect. Summary of the Invention

[0004] The purpose of this invention is to provide a vertical polycrystalline silicon core cleaning machine.

[0005] This invention is implemented by the following technical solution:

[0006] A polycrystalline silicon vertical silicon core cleaning machine includes a base, a cylinder wall, a machine cover, a locking mechanism, a support cover, a first magnet, a baffle, a motor, a chuck, a second magnet, a bearing, a connecting shaft, an upper silicon core support plate, a middle silicon core support plate, a lower silicon core support plate, an impeller, an input pipe, a nozzle, a drain pipe, and a storage tank.

[0007] A cylindrical wall is fixed to the base, and a machine cover is provided on the top of the cylindrical wall. Multiple locking mechanisms are evenly distributed between the outer surfaces of the cylindrical wall and the machine cover. A support cover is rotatably mounted on the inner side of the base. Multiple pairs of first magnets are fixedly embedded in the inner surface of the support cover. A frustum-shaped groove is formed on the top surface of the support cover, and a baffle is fixed within the frustum-shaped groove. A motor is fixed below the base, and a chuck is fixed to the output shaft of the motor. The chuck is rotatably mounted on the lower inner side of the base, and multiple pairs of first magnets are fixedly embedded in the peripheral surface of the chuck. A second magnet corresponding to the first magnet; a bearing is fixed at the bottom of the cover, the inner ring of the bearing is fixed to the top of the connecting shaft, and the connecting shaft is fixed from top to bottom with an upper silicon core support plate, a middle silicon core support plate, a lower silicon core support plate and an impeller, the impeller is rotated and placed inside the baffle frame, five input pipes are vertically arranged inside the cylinder wall, and multiple nozzles are installed on each input pipe; multiple drain pipes are connected to the bottom of the base, one end of the drain pipe is connected to the connecting hole of the base, and the other end of the base is connected to the inlet of the storage tank.

[0008] Preferably, the upper surface of the base has an annular groove, the lower surface of the base has a cylindrical groove, the side wall of the cover rotates within the annular groove, the inner side of the side wall of the cover has 20 first slots, each first slot has a first magnet fixedly embedded in it, and the chuck rotates within the cylindrical groove.

[0009] Preferably, an observation window is provided on the outer surface of the middle part of the cylinder wall.

[0010] Preferably, five first movable grooves are evenly provided on the outer edge of the top of the cylinder wall, and five second movable grooves are evenly provided on the outer edge of the bottom of the cover. The locking mechanism includes a bolt and a wing nut. One end of the bolt is hinged in the first movable groove, and the bolt rotates between the first and second movable grooves. A wing nut is threaded onto the bolt, and the wing nut is pressed against the upper surface of the edge of the cover by the threaded connection.

[0011] Preferably, a handle is fixed on the top of the cover, four hook grooves are provided on the peripheral surface of the cover, and an insertion hole is provided on the top surface of the cover, into which an exhaust pipe is fixedly connected.

[0012] Preferably, the spoiler frame has an overall shape of a "frustum" and the surface of the spoiler frame is provided with several inclined grooves.

[0013] Preferably, the connecting shaft is composed of a main shaft, a limiting shaft, and a short shaft connected sequentially from top to bottom. The top end of the main shaft is fixedly connected to the inner ring of the bearing. The main shaft is fixed with an upper silicon core support plate, a middle silicon core support plate, and a lower silicon core support plate sequentially from top to bottom. An impeller is fixed on the short shaft.

[0014] Preferably, the upper silicon core support plate and the lower silicon core support plate have the same shape. The outer sides of the upper silicon core support plate and the lower silicon core support plate are respectively provided with a first frustum-shaped insertion hole and a second frustum-shaped insertion hole. The upper silicon core support plate and the lower silicon core support plate are symmetrically fixed on the main shaft. The side with the larger diameter of the first frustum-shaped insertion hole faces upward, and the side with the larger diameter of the second frustum-shaped insertion hole faces downward. The inner sides of the first frustum-shaped insertion hole and the second frustum-shaped insertion hole are respectively provided with a first guide groove and a second guide groove.

[0015] Preferably, a limiting hole is provided on the outer side of the silicon core support disk.

[0016] Preferably, the input tube is connected to two connecting pipes.

[0017] Advantages of this invention:

[0018] I. Vertical silicon core cleaning machines can significantly reduce the floor space required and improve the space utilization of the equipment;

[0019] 2. The sprayed liquid medium can flow into the corresponding liquid storage tank through the drain pipe below for classification, recycling and reuse;

[0020] Third, the entire operation of the vertical silicon core cleaning machine is carried out in a closed state, so there will be no acid mist overflow. The spray cleaning method can ensure that the ratio of the prepared acid solution is relatively constant, and the quality of the acid solution will not be reduced due to volatilization or decomposition, thus ensuring the cleaning effect of the silicon core. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the present invention;

[0022] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0023] Figure 3 yes Figure 1 Top view;

[0024] Figure 4 yes Figure 3 Sectional view at point B;

[0025] Figure 5 yes Figure 4 Enlarged view of point C in the middle;

[0026] Figure 6 This is a partial structural diagram of the present invention. Figure 1 ;

[0027] Figure 7 yes Figure 6 Enlarged view of point D in the middle;

[0028] Figure 8 yes Figure 6 Enlarged view at point E in the middle;

[0029] Figure 9 yes Figure 6 Enlarged view at point F;

[0030] Figure 10 This is a schematic diagram of the base structure. Figure 1 ;

[0031] Figure 11 This is a schematic diagram of the base structure. Figure 2 ;

[0032] Figure 12 This is a schematic diagram of the cover structure. Figure 1 ;

[0033] Figure 13 This is a schematic diagram of the cover structure. Figure 2 ;

[0034] Figure 14 This is a schematic diagram of the structure in which the first magnet is installed inside the cover;

[0035] Figure 15 This is a schematic diagram of the spoiler installed inside the cover;

[0036] Figure 16 This is a schematic diagram of the cylinder wall structure;

[0037] Figure 17 This is a partial structural diagram of the present invention. Figure 2 ;

[0038] Figure 18 This is a schematic diagram of the chuck's structure;

[0039] Figure 19 This is a structural diagram of the hood. Figure 1 ;

[0040] Figure 20 This is a structural diagram of the hood. Figure 2 ;

[0041] Figure 21 This is a schematic diagram of the spoiler structure;

[0042] Figure 22 This is a schematic diagram of the impeller structure.

[0043] In the diagram: 1. Base; 1.1. Annular groove; 1.2. Cylindrical groove; 1.3. Connecting hole; 2. Cylinder wall; 2.1. Observation window; 2.2. First movable groove; 3. Machine cover; 3.1. Second movable groove; 3.2. Handle; 3.3. Hook groove; 3.4. Insertion hole; 4. Locking mechanism; 4.1. Bolt; 4.2. Wing nut; 5. Support cover; 5.1. Frustum groove; 5.2. First slot; 6. First magnet; 7. Spoiler frame; 7.1. Inclined groove; 8. Motor; 9. Chuck; 10. Second magnet 11. Bearing; 12. Connecting shaft; 12.1. Main shaft; 12.2. Limiting shaft; 12.3. Short shaft; 13. Upper silicon core support plate; 13.1. First frustum-shaped insertion hole; 13.11. First guide groove; 14. Middle silicon core support plate; 14.1. Limiting insertion hole; 15. Lower silicon core support plate; 15.1. Second frustum-shaped insertion hole; 15.11. Second guide groove; 16. Impeller; 17. Input pipe; 17.1. Connecting pipe; 18. Nozzle; 19. Drain pipe; 20. Storage tank; 21. Exhaust pipe. Detailed Implementation

[0044] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] like Figures 1 to 22 As shown, a polycrystalline silicon vertical silicon core cleaning machine includes a base 1, a cylinder wall 2, a machine cover 3, a locking mechanism 4, a support cover 5, a first magnet 6, a baffle 7, a motor 8, a chuck 9, a second magnet 10, a bearing 11, a connecting shaft 12, an upper silicon core support plate 13, a middle silicon core support plate 14, a lower silicon core support plate 15, an impeller 16, an input pipe 17, a nozzle 18, a drain pipe 19, and a storage tank 20.

[0046] A cylindrical wall 2 is fixed on the base 1. Five input pipes 17 are vertically arranged inside the cylindrical wall 2. Two connecting pipes 17.1 are connected to the input pipes 17. Multiple nozzles 18 are installed on the input pipes 17. The heads of the nozzles 18 can be "trumpet-shaped" to prevent salt accumulation. The input pipes 17 can be connected to cleaning media for cleaning the silicon core through the connecting pipes 17.1, or they can be connected to gas media for backflushing cleaning of the inside of the pipe, which accelerates the drying of the silicon core surface and prevents salt accumulation and blockage of the nozzles.

[0047] By combining different silicon core cleaning processes, the type, sequence, and frequency of liquid and air intake can be controlled to achieve good cleaning results. Using spray cleaning and recycling of cleaning media through liquid storage tanks can control material and production costs, while using air intake to accelerate the drying process can save time and speed up the overall cleaning cycle.

[0048] An observation window 2.1 is provided on the outer surface of the middle part of the cylinder wall 2 for observing the silicon core inside the cylinder wall 2. Multiple drain pipes 19 are connected to the bottom of the base 1. One end of each drain pipe 19 is connected to a connection hole 1.3 on the base 1, and the other end of the base 1 is connected to the inlet of the storage tank 20. The cleaned acid solution is directly discharged into the storage tank 20, which can be buried underground to fully utilize vertical space, reduce site area, and improve space utilization. Each drain pipe 19 is equipped with a valve, which can be individually controlled to open and close. This facilitates the diversion of cleaned liquid media to different storage tanks 20 by controlling the valve opening and closing when different liquid media are being cleaned, enabling classified recycling and treatment, avoiding environmental pollution from chemical agents, achieving partial recycling of the cleaning media, and reducing production costs.

[0049] The top of the cylinder wall 2 is provided with a cover 3, and a handle 3.2 is fixed on the top of the cover 3. When the silicon core cleaning machine is maintained and repaired, it is convenient for on-site personnel to move the cover 3 by holding the handle 3.2. The peripheral surface of the cover 3 is provided with four hook grooves 3.3, which are conducive to the mechanical grippers of the vertical silicon core cleaning machine to quickly clamp the cover 3 for opening and closing according to the production rhythm during normal operation. The upper surface of the top of the cover 3 is provided with an insertion hole 3.4, and an exhaust pipe 21 is fixedly connected in the insertion hole 3.4. When the equipment stops rotating, it can extract the gas or volatile acid mist from the inside of the silicon core cleaning machine.

[0050] Five first movable grooves 2.2 are evenly distributed along the outer edge of the top of the cylinder wall 2, and five second movable grooves 3.1 are evenly distributed along the outer edge of the bottom of the cover 3. Five locking mechanisms 4 are evenly distributed between the outer surfaces of the cylinder wall 2 and the cover 3. Each locking mechanism 4 includes a bolt 4.1 and a wing nut 4.2. One end of the bolt 4.1 is hinged within the first movable groove 2.2, and the bolt 4.1 rotates between the first movable groove 2.2 and the second movable groove 3.1. The wing nut 4.2 is threaded onto the bolt 4.1 and is pressed against the upper surface of the edge of the cover 3 via the threaded connection. To remove the cover 3, the five wing nuts 4.2 must be turned to allow the bolt 4.1 to be removed from the second movable groove 3.1, thus unlocking the cover and allowing it to be removed.

[0051] The upper surface of the base 1 has an annular groove 1.1, and the lower surface of the base 1 has a cylindrical groove 1.2. A cover 5 is rotatably mounted on the inner side of the base 1. Twenty first slots 5.2 are formed on the inner side wall of the cover 5. A first magnet 6 is fixedly embedded in each of the first slots 5.2. All 20 first magnets 6 rotate within the annular groove 1.1, and adjacent first magnets 6 have opposite magnetic poles. A motor 8 is fixedly mounted below the base 1. A chuck 9 is fixedly mounted on the output shaft of the motor 8. The chuck 9 rotates within the cylindrical groove 1.2. Second magnets 10, corresponding to the first magnets 6, are fixedly embedded on the peripheral surface of the chuck 9, and adjacent second magnets 10 have opposite magnetic poles.

[0052] Utilizing the principle of like magnetic poles repelling each other and unlike magnetic poles attracting each other, when the motor 8 starts, the chuck 9 drives 20 second magnets 10 to rotate, thereby driving 20 first magnets 6 to rotate synchronously. This allows the cover 5 to rotate without contact with the upper surface of the base 1, thus avoiding wear between the cover 5 and the base 1 and reducing wear. It can be used for a long time in the cleaning medium, and it has no mechanical friction, low power consumption, low noise, and does not require lubrication or sealing. This ensures that the liquid medium will not leak when cleaning the base 1 for a long time.

[0053] To achieve better cleaning of the silicon core, a frustum-shaped groove 5.1 is formed on the top surface of the cover 5. A baffle 7 is fixed inside the frustum-shaped groove 5.1. The baffle 7 is shaped like a frustum and has several inclined grooves 7.1 on its surface. An impeller 16 is installed inside the baffle 7. At the same time, a bearing 11 is fixed at the bottom of the cover 3. The inner ring of the bearing 11 is fixed to the top of the connecting shaft 12. The connecting shaft 12 is composed of a main shaft 12.1, a limiting shaft 12.2, and a short shaft 12.3 connected from top to bottom. The top of the main shaft 12.1 is fixed to the inner ring of the bearing 11. The main shaft 12.1 is fixed from top to bottom with an upper silicon core support plate 13, a middle silicon core support plate 14, and a lower silicon core support plate 15. An impeller 16 is fixed on the short shaft 12.3.

[0054] The baffle 7 rotates synchronously with the cover 5. When the baffle 7 rotates, it agitates the cleaning medium through several inclined grooves 7.1 to achieve a turbulence effect, which facilitates the rotation of the impeller 16. The rotation of the impeller 16 causes the upper silicon core support plate 13, the middle silicon core support plate 14 and the lower silicon core support plate 15 on the connecting shaft 12 to rotate synchronously. The upper silicon core support plate 13, the middle silicon core support plate 14 and the lower silicon core support plate 15 are used to fix the silicon core to be cleaned. The rotation makes the silicon core and the cleaning medium come into rapid contact.

[0055] The upper silicon core support plate 13 and the lower silicon core support plate 15 have the same shape. A first frustum-shaped insertion hole 13.1 and a second frustum-shaped insertion hole 15.1 are correspondingly provided on the outer sides of the upper silicon core support plate 13 and the lower silicon core support plate 15. The upper silicon core support plate 13 and the lower silicon core support plate 15 are symmetrically fixed on the main shaft 12.1. A limiting insertion hole 14.1 is provided on the outer side of the middle silicon core support plate 14. During silicon core cleaning, the silicon core is inserted into the first frustum-shaped insertion hole 13.1, the limiting insertion hole 14.1, and the second frustum-shaped insertion hole 15.1. The two ends of the silicon core are respectively fixed to the first frustum-shaped insertion hole 13.1 and the second frustum-shaped insertion hole 15.1 by interference fit. The larger side of the first frustum-shaped insertion hole 13.1 faces upwards, and the larger side of the second frustum-shaped insertion hole 15.1 faces downwards. This design serves two purposes: firstly, it secures the upper and lower ends of the silicon core, ensuring its vertical stability; secondly, it facilitates the downward drainage of cleaning media along the guide channels. Four first guide channels 13.11 and four second guide channels 15.11 are correspondingly formed on the inner sides of the first and second frustum-shaped insertion holes 13.1 and 15.1. During the cleaning process, the cleaning media flows downwards along the silicon core and is drained through the guide channels, preventing liquid accumulation or acid spots between the silicon core and the support plate. The limiting insertion hole 14.1 is hourglass-shaped. The silicon core does not contact the surface of the limiting insertion hole 14.1; it only serves to limit and protect the silicon core, preventing breakage or deformation in the middle and allowing the cleaning media to drain downwards through it.

[0056] When the vertical silicon core cleaning machine is working, the cover 3 can seal the machine body and keep it in a sealed state. After the silicon core cleaning is completed, the acid mist and the gas introduced can be extracted by the exhaust pipe 21 on the cover 3 of the silicon core cleaning machine to prevent the acid mist from escaping.

[0057] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A vertical polycrystalline silicon core cleaning machine, characterized in that, Includes base (1), cylinder wall (2), machine cover (3), locking mechanism (4), support cover (5), first magnet (6), baffle (7), motor (8), chuck (9), second magnet (10), bearing (11), connecting shaft (12), upper silicon core support plate (13), middle silicon core support plate (14), lower silicon core support plate (15), impeller (16), input pipe (17), nozzle (18), drain pipe (19) and storage tank (20); A cylindrical wall (2) is fixed on the base (1), and a machine cover (3) is provided on the top of the cylindrical wall (2). Multiple locking mechanisms (4) are evenly distributed between the outer surfaces of the cylindrical wall (2) and the machine cover (3). A support cover (5) is rotatably provided on the inner side of the base (1). Multiple pairs of first magnets (6) are fixedly embedded on the inner surface of the support cover (5). A frustum groove (5.1) is opened on the top surface of the support cover (5). A spoiler frame (7) is fixed in the frustum groove (5.1). A motor (8) is fixed below the base (1). A chuck (9) is fixed on the output shaft of the motor (8). The chuck (9) is rotatably located on the inner side below the base (1). A corresponding first magnet (6) is fixedly embedded on the peripheral surface of the chuck (9). The second magnet (10); a bearing (11) is fixed at the bottom of the cover (3), the inner ring of the bearing (11) is fixed to the top of the connecting shaft (12), the connecting shaft (12) is fixed with an upper silicon core support plate (13), a middle silicon core support plate (14), a lower silicon core support plate (15) and an impeller (16) from top to bottom, the impeller (16) is rotated and placed inside the baffle (7), five input pipes (17) are vertically arranged inside the cylinder wall (2), and multiple nozzles (18) are installed on each input pipe (17); multiple drain pipes (19) are connected to the bottom of the base (1), one end of the drain pipe (19) is connected to the connecting hole (1.3) of the base (1), and the other end of the base (1) is connected to the inlet of the storage tank (20).

2. The polycrystalline silicon vertical silicon core cleaning machine according to claim 1, characterized in that, The upper surface of the base (1) is provided with an annular groove (1.1), the lower surface of the base (1) is provided with a cylindrical groove (1.2), the side wall of the cover (5) rotates in the annular groove (1.1), the inner side of the side wall of the cover (5) is provided with 20 first slots (5.2), a first magnet (6) is fixedly embedded in the first slot (5.2), and the chuck (9) rotates and is placed in the cylindrical groove (1.2).

3. The polycrystalline silicon vertical silicon core cleaning machine according to claim 1, characterized in that, An observation window (2.1) is provided on the outer surface of the middle part of the cylindrical wall (2).

4. A polycrystalline silicon vertical silicon core cleaning machine according to claim 1, characterized in that, The top outer edge of the cylinder wall (2) is evenly provided with five first movable grooves (2.2), and the bottom outer edge of the cover (3) is evenly provided with five second movable grooves (3.1). The locking mechanism (4) includes a bolt (4.1) and a wing nut (4.2). One end of the bolt (4.1) is hinged in the first movable groove (2.2). The bolt (4.1) is rotatably inserted between the first movable groove (2.2) and the second movable groove (3.1). The wing nut (4.2) is threaded onto the bolt (4.1). The wing nut (4.2) is pressed against the upper surface of the edge of the cover (3) by the threaded connection.

5. A polycrystalline silicon vertical silicon core cleaning machine according to claim 1, characterized in that, A handle (3.2) is fixed on the top of the cover (3). Four hook grooves (3.3) are opened on the peripheral surface of the cover (3). An insertion hole (3.4) is opened on the top surface of the cover (3). An exhaust pipe (21) is fixedly connected in the insertion hole (3.4).

6. A polycrystalline silicon vertical silicon core cleaning machine according to claim 2, characterized in that, The spoiler frame (7) has an overall shape of a "frustum" and several inclined grooves (7.1) are provided on the surface of the spoiler frame (7).

7. A polycrystalline silicon vertical silicon core cleaning machine according to claim 1, characterized in that, The connecting shaft (12) is composed of a main shaft (12.1), a limiting shaft (12.2) and a short shaft (12.3) connected from top to bottom. The top end of the main shaft (12.1) is fixedly connected to the inner ring of the bearing (11). The main shaft (12.1) is fixed with an upper silicon core support plate (13), a middle silicon core support plate (14) and a lower silicon core support plate (15) from top to bottom. An impeller (16) is fixed on the short shaft (12.3).

8. A polycrystalline silicon vertical silicon core cleaning machine according to claim 7, characterized in that, The upper silicon core support plate (13) and the lower silicon core support plate (15) have the same shape. The outer sides of the upper silicon core support plate (13) and the lower silicon core support plate (15) are respectively provided with a first frustum-shaped insertion hole (13.1) and a second frustum-shaped insertion hole (15.1). The upper silicon core support plate (13) and the lower silicon core support plate (15) are symmetrically fixed on the main shaft (12.1). The side with the larger diameter of the first frustum-shaped insertion hole (13.1) faces upward, and the side with the larger diameter of the second frustum-shaped insertion hole (15.1) faces downward. The inner sides of the first frustum-shaped insertion hole (13.1) and the second frustum-shaped insertion hole (15.1) are respectively provided with a first guide groove (13.11) and a second guide groove (15.11).

9. A polycrystalline silicon vertical silicon core cleaning machine according to claim 7, characterized in that, The outer side of the silicon core support disk (14) has a limit hole (14.1).

10. A polycrystalline silicon vertical silicon core cleaning machine according to claim 1, characterized in that, The input tube (17) is connected to two connecting tubes (17.1).

Images