Dedicated interferometer for removing function test
By adopting a magnetic base and axial calibration rail design on a CNC machine tool, precise positioning of the laser interferometer and reflector was achieved, solving the problem of installation error and improving detection accuracy and error compensation accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-16
- Publication Date
- 2026-03-13
AI Technical Summary
The installation angle and direction error of the laser interferometer and laser reflector affect the detection accuracy of the laser interferometer.
A dedicated interferometer for removing function testing is used, including a magnetic base. The lens mounting plate and the long rod of the reflector are fixed to the worktable and head of the CNC machine tool by the magnetic base. The lens is precisely positioned by using a splicing calibration rail and a calibration device. The design of the axial calibration rail and the splicing calibration rail ensures the accurate installation of the lens.
It improves the installation accuracy and stability of the lens, reduces installation errors, and enhances the accuracy of error function compensation for multi-axis CNC machine tools.
Smart Images

Figure CN121089562B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to laser interferometers, and more particularly to a dedicated interferometer for testing removal functions in the field of laser interferometer technology. Background Technology
[0002] A laser interferometer is an instrument that uses the principle of laser interference for precision measurement. It measures the optical path difference by observing the interference of laser beams, thereby obtaining information such as the length, shape, or position of the measured object. By detecting changes in interference fringes, it infers and compensates for errors. The laser interferometer system generates a detailed error report, which operators can input into the error compensation table of the CNC system. Subsequently, the CNC system will automatically perform reverse compensation when issuing movement commands, achieving the purpose of eliminating function errors in the CNC system. When using a laser interferometer to inspect multi-axis CNC machine tools, the laser interferometer requires complex debugging and laser calibration operations.
[0003] Currently, most debugging and calibration operations for laser interferometers are concentrated on the main unit, namely the laser emitter. For example, Chinese patent CN214470617U discloses a laser interferometer with automatic tracking camera aperture measurement function. Laser interferometers and laser reflectors are mostly directly mounted on the worktable and head of CNC machine tools using magnetic fixation, or special fixtures are used for mounting and fixing. For example, Chinese patent CN104729401A discloses an auxiliary combination fixture for laser interferometers. However, the mounting orientation of laser interferometers and laser reflectors mainly relies on the operator's work experience and visual inspection to check whether the mounting orientation of the laser interferometers and laser reflectors conforms to the movement direction of the translation axis of the CNC machine tool. This can easily cause angular errors in the laser interferometers and laser reflectors, affecting the detection accuracy of the laser interferometer. Summary of the Invention
[0004] The technical problem that this invention aims to solve in view of the above-mentioned prior art is that there are angular and directional errors when installing the laser interferometer and the laser reflector, which affect the detection accuracy of the laser interferometer.
[0005] To address the aforementioned issues, this invention provides a dedicated interferometer for removing function testing, used for geometric accuracy testing of translational axes in multi-axis CNC machine tools, comprising a laser interferometer host, an interferometer module, a reflector module, and a mirror mounting plate;
[0006] An axial calibration rail is rotatably connected to the middle of the mirror mounting plate. An interferometer rod is inserted into one end of the interferometer module. A sliding seat is fixedly connected to the bottom end of the interferometer rod. The sliding seat is slidably connected to the axial calibration rail. A reflector rod is inserted into one end of the reflector module. A calibration end is threaded to the bottom end of the reflector rod. The calibration end is slidably connected to the axial calibration rail.
[0007] The bottom of the axial calibration rail away from the interferometer module is movably connected to a telescopic shaft. One end of the telescopic shaft is fixedly connected to a rear brake block, which abuts against the outer edge of the mirror mounting plate. The top of the axial calibration rail away from the interferometer module is fixedly connected to a rail protrusion. The connection end between the rail protrusion and the axial calibration rail is curved in an arc shape, and a transmission rod is hinged between the bottom of the rail protrusion and the other end of the telescopic shaft.
[0008] In the aforementioned interferometer for removing function testing, by pre-aligning the orientation of the axial calibration rail with the movement direction of the multi-axis CNC machine tool head, the installation accuracy of the interferometer module and the reflector module is effectively improved, thereby effectively improving the accuracy of error function compensation for the multi-axis CNC machine tool.
[0009] As a further improvement of this application, a magnetic base is fixedly connected to the bottom of the mirror mounting plate and the top of the long reflector rod. The magnetic base is made of permanent magnet material. The mirror mounting plate and the long reflector rod are magnetically fixed to the worktable and head of the CNC machine tool through the magnetic base, which effectively improves the installation stability of the mirror mounting plate and the long reflector rod.
[0010] As a further improvement of this application, the cross-section of the interferometer rod is square and the cross-section of the reflector rod is circular. The square interferometer rod facilitates the orientation angle installation of the interferometer module, while the circular reflector rod facilitates the rotation and angle adjustment of the reflector module, thereby facilitating the close proximity of the reflector module and the interferometer module for angle adjustment.
[0011] As a further improvement of this application, a tightening bolt is threadedly connected to the bottom of the end of the axial calibration rail near the interferometer module. A front braking block is rotatably connected to one end of the tightening bolt. The front braking block abuts against the outer edge of the mirror mounting plate. Both the front and rear braking blocks are made of wear-resistant ceramic material. By tightening the front braking block with the tightening bolt, the front braking block is tightly in contact with the mirror mounting plate, thus fixing the axial calibration rail in a fixed state.
[0012] As a further improvement of this application, a limiting hole is provided at the end of the track tilting part, and a locking bolt is threaded to the end of the axial calibration rail away from the interferometer module. The locking bolt is inserted into the limiting hole. The track tilting part is made of spring steel sheet. After the track tilting part is flattened by the calibration end, the locking bolt is inserted into the limiting hole to fix the state of the track tilting part.
[0013] As a further improvement of this application, splicing posts are fixedly connected to both the left and right ends of the middle part of the axial calibration rail. The two splicing posts are symmetrically arranged about the center line of the axial calibration rail, and a splicing calibration rail is inserted between the tops of the two splicing posts. The splicing calibration rail is spliced with the axial calibration rail, and then the interferometer module is transferred and installed onto the splicing calibration rail to perform laser detection perpendicular to the direction of the axial calibration rail.
[0014] As a further improvement of this application, one end of the splicing calibration rail is slidably connected to the calibration end, and the other end of the splicing calibration rail is slidably connected to the sliding seat, which facilitates the axial calibration of the interferometer module and the reflector module by the splicing calibration rail.
[0015] As a further improvement of this application, a splicing groove is provided at the bottom center of the splicing calibration rail, and the splicing groove interlocks with the center of the axial calibration rail, which effectively improves the splicing stability of the splicing calibration rail and the axial calibration rail.
[0016] As a further improvement of this application, magnetic modules are fixedly embedded at the bottom of both ends of the splicing calibration rail. The magnetic modules are in magnetic contact with the lens mounting plate. The magnetic attraction between the magnetic modules and the lens mounting plate effectively improves the installation stability of the splicing calibration rail.
[0017] In summary, this invention achieves precise installation of the interferometer and reflector modules by installing a mirror mounting plate on the worktable of a multi-axis CNC machine tool, sliding the interferometer module onto the axial calibration rail, and then fixing the reflector module onto the machine head. The machine head is operated to slide the calibration end of the reflector's long rod along the axial calibration rail, aligning the orientation of the axial calibration rail with the movement direction of the machine head. This ensures accurate installation of the interferometer and reflector modules, significantly reducing installation errors compared to relying on experience. Consequently, it effectively improves the accuracy of function error compensation calculations for the multi-axis CNC machine tool. Attached Figure Description
[0018] Figure 1 This is a demonstration diagram of the assembly state of the interferometer according to the first embodiment of this application;
[0019] Figure 2 This is a three-dimensional structural diagram of the interferometer module and the reflector module in the first embodiment of this application, showing their installation state.
[0020] Figure 3 This is a bottom-view perspective view of the axial calibration rail according to the first embodiment of this application;
[0021] Figure 4 This is a top perspective view of the axial calibration rail according to the first embodiment of this application;
[0022] Figure 5This is an enlarged view of the track tilting portion according to the first embodiment of this application;
[0023] Figure 6 This is a demonstration diagram of the calibrated end pressure rail tilting portion according to the first embodiment of this application;
[0024] Figure 7 This is a demonstration diagram of the assembly state of the interferometer according to the second embodiment of this application;
[0025] Figure 8 This is a three-dimensional structural diagram of the interferometer module and the reflector module in the second embodiment of this application, showing their installation state.
[0026] Figure 9 This is a three-dimensional structural diagram of the axial calibration rail and the splicing calibration rail according to the second embodiment of this application;
[0027] Figure 10 This is a bottom-view perspective view of the splicing calibration rail according to the second embodiment of this application.
[0028] Explanation of the labels in the diagram:
[0029] 1. Laser interferometer main unit; 201. Interferometer module; 202. Reflector module; 203. Mirror mounting plate; 204. Axial calibration rail; 205. Interferometer rod; 206. Sliding seat; 207. Reflector rod; 208. Calibration end; 209. Magnetic base; 3. Telescopic shaft; 301. Rear brake block; 302. Rail lifting part; 303. Transmission rod; 304. Tightening bolt; 305. Front brake block; 306. Limiting hole; 307. Locking bolt; 4. Splicing pile; 401. Splicing calibration rail; 402. Splicing groove; 403. Magnetic module. Detailed Implementation
[0030] The two embodiments of this application will be described in detail below with reference to the accompanying drawings.
[0031] First implementation method:
[0032] Figures 1 to 4The diagram shows a dedicated interferometer for removing function testing, used for geometric accuracy testing of translational axes in multi-axis CNC machine tools. It includes a laser interferometer main unit 1, an interferometer module 201, a reflector module 202, and a mirror mounting plate 203. An axial calibration rail 204 is rotatably connected to the center of the mirror mounting plate 203. An interferometer long rod 205 is inserted into one end of the interferometer module 201, and a sliding seat 206 is fixedly connected to the bottom end of the interferometer long rod 205. The sliding seat 206 is slidably connected to the axial calibration rail 204. A reflector long rod 207 is inserted into one end of the reflector module 202, and a calibration end 208 is threaded to the bottom end of the reflector long rod 207. The calibration end 208 is slidably connected to the axial calibration rail 204. The mirror mounting plate 203... Both the bottom of the mirror mounting plate 203 and the top of the long rod 207 are fixedly connected to a magnetic base 209. The magnetic base 209 is made of permanent magnet material. The mirror mounting plate 203 and the long rod 207 are magnetically fixed to the worktable and head of the CNC machine tool through the magnetic base 209, which effectively improves the installation stability of the mirror mounting plate 203 and the long rod 207. The cross-section of the long rod 205 of the interferometer is square, and the cross-section of the long rod 207 of the interferometer is circular. The square cross-section of the long rod 205 of the interferometer facilitates the directional angle installation of the interferometer module 201, while the circular cross-section of the long rod 207 facilitates the rotation and angle adjustment of the interferometer module 202, and facilitates the close proximity of the interferometer module 202 and the interferometer module 201 for angle adjustment.
[0033] During the geometric accuracy testing of the translational axes of a multi-axis CNC machine tool, a laser interferometer host 1 is mounted externally on the multi-axis CNC machine tool. A mirror mounting plate 203 is installed on the worktable of the multi-axis CNC machine tool. The interferometer module 201 is slidably mounted onto the axial calibration rail 204 via the interferometer rod 205 and the sliding seat 206. Then, the reflector module 202 is fixedly mounted onto the head of the multi-axis CNC machine tool via the reflector rod 207. The head of the multi-axis CNC machine tool is operated to drive the calibration end 208 at the bottom of the reflector rod 207 to slide on the axial calibration rail 204, so that the orientation of the axial calibration rail 204 is consistent with the movement direction of the head of the multi-axis CNC machine tool. This achieves precise installation of the interferometer module 201 and the reflector module 202. Compared with the method of installing the interferometer module 201 and the reflector module 202 based on experience, this method effectively reduces the installation error of the interferometer module 201 and the reflector module 202, thereby effectively improving the accuracy of the function error compensation calculation of the multi-axis CNC machine tool.
[0034] Figures 4 to 6As shown, the bottom of the axial calibration rail 204 away from the interferometer module 201 is movably connected to a telescopic shaft 3. One end of the telescopic shaft 3 is fixedly connected to a rear brake block 301, which abuts against the outer edge of the mirror mounting plate 203. The top of the axial calibration rail 204 away from the interferometer module 201 is fixedly connected to a rail protrusion 302. The connection end between the rail protrusion 302 and the axial calibration rail 204 is curved in an arc shape. A transmission rod 303 is hinged between the bottom of the rail protrusion 302 and the other end of the telescopic shaft 3. The bottom of the axial calibration rail 204 near the interferometer module 201 is threadedly connected to a tightening bolt 304. One end of the tightening bolt 304 is rotatably connected to a front brake block 305. The front and rear clamping blocks 301 are both made of wear-resistant ceramic material and are connected to the outer edge of the mirror mounting plate 203. The front clamping block 305 is tightened by the tightening bolt 304 to make the front clamping block 305 fit tightly against the mirror mounting plate 203, thus fixing the state of the axial calibration rail 204. The end of the rail protrusion 302 is provided with a limiting hole 306. The end of the axial calibration rail 204 away from the interferometer module 201 is threaded with a locking bolt 307. The locking bolt 307 is inserted into the limiting hole 306. The rail protrusion 302 is made of spring steel sheet. After the rail protrusion 302 is flattened by the calibration end 208, the locking bolt 307 is inserted into the limiting hole 306 to fix the state of the rail protrusion 302.
[0035] When the calibration end 208 at the bottom of the long rod 207 of the reflector slides on the axial calibration rail 204, the calibration end 208 moves to the rail tilting part 302 and presses the rail tilting part 302 down to flatten it. At this time, the rail tilting part 302 applies a thrust to the telescopic shaft 3 through the transmission rod 303, and the rear brake block 301 is pressed tightly against the outer edge of the contact mirror mounting plate 203, thereby fixing the state of the axial calibration rail 204.
[0036] By rotating the locking bolt 307, the locking bolt 307 is inserted into the limiting hole 306 to fix the flattened rail protrusion 302. After fixing, the clamping block 301 is in a state of close contact with the mirror mounting plate 203, and it is easy for the calibration end 208 to leave the rail protrusion 302. Rotating the calibration end 208 causes the calibration end 208 to spiral up and leave the rail protrusion 302. In addition, when the axial position of the head of the multi-axis CNC machine tool is adjusted in the future, the calibration end 208 will no longer slide with the axial calibration rail 204, thereby effectively avoiding the sliding of the calibration end 208 with the axial calibration rail 204 from affecting the stability of the interferometer module 201 and the reflector module 202.
[0037] By rotating and tightening the bolt 304, the front clamping block 305 is driven to abut against the outer edge of the lens mounting plate 203, and the rear clamping block 301 is in close contact with the outer edge of the lens mounting plate 203, which effectively improves the stability of the axial calibration rail 204.
[0038] Second implementation method:
[0039] Compared to the first implementation method, the main addition is a splicing calibration rail 401, the specific new structure of which is as follows, while the rest of the structure is the same as the first implementation method.
[0040] Figures 7 to 10 As shown, splicing posts 4 are fixedly connected to both ends of the middle of the axial calibration rail 204. The two splicing posts 4 are symmetrically arranged about the center line of the axial calibration rail 204, and a splicing calibration rail 401 is inserted between the tops of the two splicing posts 4. The splicing calibration rail 401 is spliced with the axial calibration rail 204, and then the interferometer module 201 is transferred and installed onto the splicing calibration rail 401 to perform laser detection perpendicular to the axial calibration rail 204. One end of the splicing calibration rail 401 is slidably connected to the calibration end 208, and the other end of the splicing calibration rail 401 is slidably connected to the sliding seat 206 to facilitate splicing. The interferometer module 201 and the reflector module 202 are axially calibrated by the calibration rail 401. The bottom center of the splicing calibration rail 401 is provided with a splicing groove 402, which crosses and engages with the center of the axial calibration rail 204, effectively improving the splicing stability of the splicing calibration rail 401 and the axial calibration rail 204. Magnetic modules 403 are fixedly embedded at the bottom of both ends of the splicing calibration rail 401. The magnetic modules 403 are magnetically attracted to the mirror mounting plate 203. The magnetic attraction between the magnetic modules 403 and the mirror mounting plate 203 effectively improves the installation stability of the splicing calibration rail 401.
[0041] After performing a direction detection on the translational axis of a multi-axis CNC machine tool, specifically first detecting the X-axis direction of the translational axis of the multi-axis CNC machine tool, and then detecting the Y-axis direction of the translational axis of the multi-axis CNC machine tool, since the X-axis and Y-axis of the multi-axis CNC machine tool are generally perpendicular, the splicing calibration rail 401 is connected to two splicing stakes 4 to achieve vertical splicing of the splicing calibration rail 401 and the axial calibration rail 204. The interferometer module 201 is transferred and installed onto the splicing calibration rail 401, and the reflector module 202 only needs to be close to the interferometer module 201 for calibration, and then the Y-axis direction detection of the translational axis of the multi-axis CNC machine tool can begin.
[0042] Compared to the first implementation method, by installing the splicing calibration rail 401 on the axial calibration rail 204 and using the splicing calibration rail 401 to perform axial calibration of the interferometer module 201 and the reflector module 202, the axial calibration rail 204 is effectively avoided from having to perform the axial calibration operation in the first implementation method again, thereby effectively improving the detection operation efficiency of the laser interferometer.
[0043] In light of current practical needs, the above-described embodiments adopted in this application are not limited to these. Any changes made within the scope of knowledge possessed by those skilled in the art without departing from the concept of this application still fall within the protection scope of this invention.
Claims
1. A dedicated interferometer for removing function testing, used for geometric accuracy testing of translational axes in multi-axis CNC machine tools, characterized by: It includes a laser interferometer main unit (1), an interferometer module (201), a reflector module (202), and a mirror mounting plate (203). An axial calibration rail (204) is rotatably connected to the middle of the mirror mounting plate (203). An interferometer rod (205) is inserted into one end of the interferometer module (201). A sliding seat (206) is fixedly connected to the bottom end of the interferometer rod (205). The sliding seat (206) is slidably connected to the axial calibration rail (204). A mirror rod (207) is inserted into one end of the mirror module (202). A calibration end (208) is threadedly connected to the bottom end of the mirror rod (207). The calibration end (208) is slidably connected to the axial calibration rail (204). The bottom of the axial calibration rail (204) away from the interferometer module (201) is movably connected to a telescopic shaft (3). One end of the telescopic shaft (3) is fixedly connected to a rear brake block (301). The rear brake block (301) is in contact with the outer edge of the mirror mounting plate (203). The top of the axial calibration rail (204) away from the interferometer module (201) is fixedly connected to a rail protrusion (302). The connection end of the rail protrusion (302) and the axial calibration rail (204) is curved in an arc shape. A transmission rod (303) is hinged between the bottom of the rail protrusion (302) and the other end of the telescopic shaft (3).
2. The interferometer for removing function testing according to claim 1, characterized in that: The bottom of the mirror mounting plate (203) and the top of the long rod of the mirror (207) are both fixedly connected to a magnetic watch base (209), which is made of permanent magnet material.
3. The interferometer for removing function testing according to claim 1, characterized in that: The cross-section of the interference mirror rod (205) is square, and the cross-section of the reflecting mirror rod (207) is circular.
4. The interferometer for removing function testing according to claim 1, characterized in that: The bottom of the axial calibration rail (204) near the interferometer module (201) is threaded with a tightening bolt (304). One end of the tightening bolt (304) is rotatably connected to a front braking block (305). The front braking block (305) abuts against the outer edge of the mirror mounting plate (203). Both the front braking block (305) and the rear braking block (301) are made of wear-resistant ceramic material.
5. The interferometer for removing function testing according to claim 1, characterized in that: The end of the track tilting part (302) is provided with a limiting hole (306), and the end of the axial calibration rail (204) away from the interferometer module (201) is threaded with a locking bolt (307). The locking bolt (307) is inserted into the limiting hole (306), and the track tilting part (302) is made of spring steel sheet.
6. The interferometer for removing function testing according to claim 1, characterized in that: The axial calibration rail (204) has splicing piles (4) fixedly connected to both the left and right ends of the middle part. The two splicing piles (4) are symmetrically arranged about the center line of the axial calibration rail (204), and a splicing calibration rail (401) is inserted between the tops of the two splicing piles (4).
7. The interferometer for removing function testing according to claim 6, characterized in that: One end of the splicing calibration rail (401) is slidably connected to the calibration end (208), and the other end of the splicing calibration rail (401) is slidably connected to the sliding seat (206).
8. The interferometer for removing function testing according to claim 6, characterized in that: The bottom center of the splicing calibration rail (401) is provided with a splicing groove (402), which is cross-engaged with the center of the axial calibration rail (204).
9. The interferometer for removing function testing according to claim 6, characterized in that: The bottom of both ends of the splicing calibration rail (401) is fixedly inlaid with magnetic modules (403), and the magnetic modules (403) are in magnetic contact with the mirror mounting plate (203).
Citation Information
Patent Citations
Auxiliary combination fixture for laser interferometer
CN104729401A
Laser interferometer with automatic tracking camera hole measurement function
CN214470617U
Morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device
CN103528499A
Length measurement precision calibrating method and device for laser tracker
CN105157574A