Equipment management method and device, equipment and storage medium

Abstract

The invention relates to an equipment management method and device, equipment and a storage medium, and relates to the field of database management and application. The method comprises the steps that first fault information of fault equipment is acquired, target equipment is determined from a fault database according to the first fault information, the fault database comprises multiple pieces of equipment and historical fault information of each piece of equipment, the multiple pieces of equipment comprise the target equipment, and the historical fault information of the target equipment is matched with the first fault information of the fault equipment; and based on the historical fault information, determining the fault processing duration and the fault level of the fault equipment, and based on the fault processing duration and the fault level of the fault equipment, adjusting the operation time of the fault equipment.

Description

Technical Field

[0001] This application relates to the field of database management and application, and more particularly to the field of semiconductor process shared databases, specifically to a device management method, apparatus, device, and storage medium. Background Technology

[0002] With the development of the manufacturing industry, more and more automated equipment is being applied to the production process, and a production line consists of multiple automated devices. As a result, frequent malfunctions of automated equipment occur during the production process.

[0003] In related technologies, when facing equipment failures during the production process, experienced maintenance professionals typically rely on their expertise to repair and troubleshoot the equipment. However, when equipment failure occurs, the entire production line containing that equipment will cease to function properly. If the equipment failure is not obvious and staff cannot resolve it quickly, it will prevent the equipment from operating normally, impacting production capacity. Therefore, how to flexibly allocate equipment operation based on different equipment failures is a pressing issue that needs to be addressed. Summary of the Invention

[0004] This application provides an equipment management method, apparatus, device, and storage medium to at least solve the technical problem in the related art where equipment failure causes equipment shutdown and subsequent production line paralysis. The technical solution of this application is as follows:

[0005] According to a first aspect of this application, a device management method is provided, comprising: acquiring first fault information of a faulty device; determining a target device from a fault database based on the first fault information, the fault database including multiple devices and historical fault information of each device, the multiple devices including the target device; matching the historical fault information of the target device with the first fault information of the faulty device; determining the fault handling time and fault level of the faulty device based on the historical fault information; and adjusting the running time of the faulty device based on the fault handling time and fault level of the faulty device.

[0006] Based on the aforementioned technical means, after discovering a faulty device, this application compares the first fault information of the faulty device with multiple historical fault information stored in the fault database to determine the historical fault information that matches the first fault information, providing reference data for the subsequent repair of the faulty device. Then, based on the historical fault information, it determines the fault handling time and fault level required to repair the faulty device, and can flexibly adjust the running time of the faulty device based on the fault handling time and fault level, avoiding stopping the device when a low-level fault occurs that does not affect the normal operation of the device, thereby ensuring the normal operation of the device as much as possible and improving production capacity.

[0007] In one possible implementation, the first fault information includes the device model and fault code, the historical fault information includes the device model and fault code, and the step of determining the target device from the fault database based on the first fault information includes: first determining at least one device of the same model from the fault database based on the device model, and then determining the target device with the same fault code from the at least one device based on the fault code.

[0008] Based on the above-mentioned technical means, this application improves the accuracy of identifying the target equipment by utilizing the equipment model and fault code of the faulty equipment.

[0009] In one possible implementation, the first fault information further includes a fault phenomenon, and the historical fault information further includes a fault phenomenon and a fault handling time. The process of determining the fault handling time of the faulty device based on the historical fault information includes: calculating the similarity between the fault phenomenon of the target device and the fault phenomenon of the faulty device, and determining the fault handling time of the faulty device based on the similarity and the fault handling time of the target device.

[0010] Based on the above-mentioned technical means, this application can predict the fault handling time of the faulty device by combining the similarity between the faulty device's fault phenomenon and the target device's fault phenomenon with the fault handling time of the target device, thereby improving the accuracy of predicting the fault handling time.

[0011] In one possible implementation, determining the fault handling time of the faulty device based on the similarity and the fault handling time of the target device includes: when the similarity is greater than or equal to a preset similarity, determining the fault handling time of the faulty device as the product of the similarity and the fault handling time of the target device.

[0012] Based on the above technical means, this application can determine the fault handling time of the faulty device based on the fault handling time of the target device when the similarity between the target device and the faulty device is high, thereby ensuring the effectiveness of the determined fault handling time of the faulty device.

[0013] In one possible implementation, adjusting the running time of a faulty device based on its fault handling time and fault level includes: continuing to run the faulty device when its fault level is less than a preset level, and stopping the operation of the faulty device within its fault handling time when its fault level is greater than or equal to the preset level.

[0014] Based on the aforementioned technical means, this application can flexibly adjust whether to stop the operation of faulty equipment according to the severity of the fault, avoiding the equipment from stopping even when a low-level fault occurs, thereby ensuring that the equipment can operate normally.

[0015] In one possible implementation, the aforementioned historical fault information also includes fault handling steps, and the aforementioned equipment management method further includes: repairing the faulty equipment according to the fault handling steps in the historical fault information of the target equipment.

[0016] Based on the above-mentioned technical means, after identifying the target device, this application can directly repair the faulty device by following the fault handling steps for repairing the target device, without having to re-analyze the cause of the fault, thus improving the efficiency of repairing the faulty device.

[0017] According to a second aspect of this application, an equipment management device is provided, comprising: an acquisition unit, a determination unit, and a processing unit, wherein: the acquisition unit is configured to acquire first fault information of a faulty device; the determination unit is configured to determine a target device from a fault database based on the first fault information acquired by the acquisition unit, the fault database including multiple devices and historical fault information of each device, the multiple devices including the target device, and the historical fault information of the target device matching the first fault information of the faulty device; the determination unit is further configured to determine the fault handling time and fault level of the faulty device based on the historical fault information; and the processing unit is configured to adjust the operating time of the faulty device based on the fault handling time and fault level of the faulty device determined by the determination unit.

[0018] In one possible implementation, the first fault information includes the device model and fault code, the historical fault information includes the device model and fault code, and the determining unit is specifically used to: determine at least one device with the same model as the device model from the fault database according to the device model, and determine the target device from the at least one device according to the fault code, wherein the fault code of the target device is the same as the fault code of the fault device.

[0019] In one possible implementation, the first fault information further includes a fault phenomenon, and the historical fault information further includes a fault phenomenon and a fault handling time. The determining unit is specifically used to: calculate the similarity between the fault phenomenon of the target device and the fault phenomenon of the faulty device, and determine the fault handling time of the faulty device based on the similarity and the fault handling time of the target device.

[0020] In one possible implementation, the determining unit is specifically used to: when the similarity is greater than or equal to a preset similarity, determine the product of the similarity and the fault handling time of the target device as the fault handling time of the faulty device.

[0021] In one possible implementation, the processing unit is specifically used to: continue running the faulty device when the fault level of the faulty device is less than a preset level; and stop running the faulty device within the fault handling time when the fault level of the faulty device is greater than or equal to the preset level.

[0022] In one possible implementation, the aforementioned historical fault information further includes fault handling steps, and the aforementioned processing unit is further configured to repair the faulty device according to the fault handling steps in the historical fault information of the target device.

[0023] According to a third aspect provided in this application, an electronic device is provided, comprising: a processor; a memory for storing processor-executable instructions; wherein the processor is configured to execute instructions to implement the method of the first aspect described above and any possible implementation thereof.

[0024] According to a fourth aspect provided in this application, a computer-readable storage medium is provided that, when the instructions in the computer-readable storage medium are executed by a processor of an electronic device, enables the electronic device to perform the methods described in the first aspect and any possible implementation thereof.

[0025] According to the fifth aspect provided in this application, a computer program product is provided, the computer program product including computer instructions, which, when executed on an electronic device, cause the electronic device to perform the method described in the first aspect and any possible implementation thereof.

[0026] Therefore, the above-mentioned technical features of this application have the following beneficial effects:

[0027] (1) The operating time of faulty equipment can be flexibly adjusted based on the fault handling time and fault level, so as to avoid stopping the equipment when a low-level fault occurs that does not affect the normal operation of the equipment, thereby ensuring the normal operation of the equipment as much as possible and improving production capacity.

[0028] (2) The target device can be identified by using the equipment model and fault code of the faulty device, which further improves the accuracy of identifying the target device.

[0029] (3) Based on the similarity between the fault phenomena of the faulty equipment and the fault phenomena of the target equipment, and combined with the fault handling time of the target equipment, the fault handling time of the faulty equipment can be predicted, thereby improving the accuracy of the prediction of the fault handling time.

[0030] (4) When the similarity between the target device and the faulty device is high, the fault handling time of the faulty device can be determined based on the fault handling time of the target device, so as to ensure the effectiveness of the determined fault handling time of the faulty device.

[0031] (5) Depending on the severity of the fault, the system can flexibly adjust whether to stop the operation of the faulty equipment to avoid stopping the equipment even when a low-level fault occurs, thereby ensuring that the equipment can operate normally.

[0032] (6) After the target device is identified, the faulty device can be repaired directly according to the fault handling steps of the target device without re-analyzing the cause of the fault, thus improving the efficiency of repairing the faulty device.

[0033] It should be noted that the technical effects of any of the implementation methods in aspects two through five can be found in the technical effects of the corresponding implementation methods in aspect one, and will not be repeated here.

[0034] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0035] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application, and do not constitute an undue limitation of this application.

[0036] Figure 1 This is an architecture diagram of a device management system according to an exemplary embodiment;

[0037] Figure 2 This is a flowchart illustrating a device management method according to an exemplary embodiment;

[0038] Figure 3 This is a flowchart illustrating yet another device management method according to an exemplary embodiment;

[0039] Figure 4 This is a flowchart illustrating a device downtime handling process according to an exemplary embodiment;

[0040] Figure 5 This is a flowchart illustrating a process for handling abnormal production quality of equipment, according to an exemplary embodiment.

[0041] Figure 6 This is a schematic diagram illustrating a fault database architecture according to an exemplary embodiment;

[0042] Figure 7 This is a flowchart illustrating the construction process of a fault database according to an exemplary embodiment;

[0043] Figure 8 This is a schematic diagram illustrating yet another fault database according to an exemplary embodiment;

[0044] Figure 9This is a block diagram illustrating a device management apparatus according to an exemplary embodiment;

[0045] Figure 10 This is a block diagram illustrating an electronic device according to an exemplary embodiment. Detailed Implementation

[0046] To enable those skilled in the art to better understand the technical solutions of this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0047] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0048] In the description of this application, unless otherwise stated, "multiple" means two or more. "At least one of the following or similar expressions" refers to any combination of these items, including any combination of single or multiple items. For example, at least one of a, b and / or c can represent: a, b, c, ab, ac, bc, or abc, where a, b, and c can be single or multiple.

[0049] In the embodiments of this application, the words "exemplarily" or "for example" are used to indicate examples, illustrations, or explanations. Any embodiment or design described as "exemplarily" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design solutions. Specifically, the use of the words "exemplarily" or "for example" is intended to present the relevant concepts in a specific manner to facilitate understanding.

[0050] In addition, the use of “based on” implies openness and inclusivity, because processes, steps, calculations or other actions “based on” one or more of the stated conditions or values ​​may in practice be based on additional conditions or values ​​beyond those stated.

[0051] In recent years, with the rapid development of the semiconductor industry, semiconductor companies have begun to continuously establish production bases and expand production capacity, which has led to a series of problems such as quality abnormalities and equipment failures in the semiconductor production process.

[0052] Currently, only a few important cases of equipment failures and quality anomalies in semiconductor manufacturing equipment are documented, and the information is incomplete. This makes it difficult for staff to effectively refer to historical cases when facing new equipment problems, forcing them to troubleshoot and repair equipment after stopping operation. This method is also ineffective when dealing with minor faults that do not affect equipment operation, leading to equipment malfunctions and impacting production capacity.

[0053] To address the problem in related technologies where equipment operation plans cannot be flexibly adjusted based on different equipment failures, this application provides an equipment management method. This method compares the first failure information of the faulty equipment with multiple historical failure information stored in the failure database to determine the historical failure information that matches the first failure information, providing reference data for the subsequent repair of the faulty equipment. Based on the historical failure information, the method determines the fault handling time and fault level required to repair the faulty equipment. Based on the fault handling time and fault level, the method can flexibly adjust the operating time of the faulty equipment, avoiding stopping the equipment when a low-level failure occurs that does not affect the normal operation of the equipment, thereby ensuring the normal operation of the equipment as much as possible and improving production capacity.

[0054] like Figure 1 The diagram shown is a structural schematic of a device management system provided in an embodiment of this application. The device management system 100 may include a main server, multiple sub-servers (such as sub-server 1, sub-server 2, and sub-server 3), and multiple devices (such as device 1, device 2, device 3, device 4, device 5, and device 6).

[0055] The main server can connect to multiple sub-servers, and each sub-server connects to a subset of devices from a set of devices. For example, the main server connects to sub-server 1, sub-server 2, and sub-server 3; sub-server 1 connects to devices 1 and 2; sub-server 2 connects to devices 3 and 4; and sub-server 3 connects to devices 4 and 5.

[0056] In this embodiment, the main server stores basic information about important devices among multiple sub-servers, as well as fault information after an important device fails. Sub-servers store basic information about all devices connected to them, as well as fault information after each device sends a fault. When a device sends a fault, it can access the sub-servers connected to it via protocol A to filter fault information of other devices matching its own fault information. Alternatively, the device can access the sub-servers connected to it via protocol A, and then the sub-servers can access the main server connected to them via protocol B to filter fault information of other devices matching its own fault information. Based on the filtered fault information of other devices, the device can also determine its own fault handling time and fault level, and then adjust its own running time accordingly.

[0057] For ease of understanding, the equipment management method provided in this application will be described in detail below with reference to the accompanying drawings.

[0058] Figure 2 This is a flowchart illustrating a device management method according to an exemplary embodiment, the method being applied to Figure 1 The device shown can be the main body that performs the steps of the method, or it can be a device / module in the device, such as an integrated circuit or a chip. This application does not specifically limit this.

[0059] For example, such as Figure 2 As shown, the device management method provided in this application embodiment may include the following steps:

[0060] S201. Obtain the first fault information of the faulty device.

[0061] In the embodiments of this application, the device in this application can be a production device in the semiconductor field.

[0062] For example, production equipment may include a cleaning machine (PPCL), a coating machine, a VCD player, an HPCP, an oven, an exposure machine (EXPO), a development machine (DEVP), a sputtering coating machine, etc.

[0063] In this embodiment, the fault types of the faulty equipment can be divided into two categories: equipment downtime and abnormal equipment production quality. The first fault information includes the equipment model, fault code, and fault phenomenon.

[0064] In one optional implementation, when the fault type of the faulty device is device downtime, the first fault information can be called the first downtime information, the fault code in the first fault information can also be called the downtime code, and the fault phenomenon can also be called the downtime phenomenon.

[0065] The crash code is an automatically generated prompt message when the device crashes. Different crashes correspond to different crash codes. Crash phenomena can include image perception abnormalities, position perception abnormalities, adsorption abnormalities, pressure perception abnormalities, etc.

[0066] Optionally, the first downtime information may also include equipment information and production information. Equipment information may include the equipment name and manufacturer; production information may include the product model produced when the equipment was down, the material information at the time of the downtime, and the operating status of the equipment at the time of the downtime.

[0067] The product model can include 32-inch, 55-inch, etc.; the material information can include PR status, developer status, exposure lamp status, etc.; the operating status can include normal production status, standby status, etc.

[0068] For example, the device model and crash code in the first crash information can be automatically obtained by the device; the crash phenomenon in the first crash information can be obtained by the device receiving uploads from staff.

[0069] In another optional implementation, when the fault type of the faulty equipment is abnormal equipment production quality, the first fault information can be called the first quality abnormality information, the equipment model in the first fault information can also be called the product model, and the fault phenomenon in the first fault information can also be called the quality abnormality phenomenon.

[0070] Product models may include Mobile, TV, NB, etc.; quality abnormalities may include coating abnormalities, Mura, horizontal lines in development, scratches on the back, missing mask, foreign matter on the surface, etc.

[0071] Optionally, the first quality anomaly information may also include the product process. The product process may include 6FHT08, 6FHT09, etc.

[0072] For example, the product model in the first quality anomaly information can be automatically obtained by the equipment; the quality anomaly phenomenon in the first quality anomaly information can be obtained by the equipment receiving uploads from staff.

[0073] S202. Based on the first fault information, determine the target device from the fault database.

[0074] Among them, the historical fault information of the target device is matched with the first fault information of the faulty device.

[0075] In this embodiment, the fault database may include a database of equipment downtime cases and a database of equipment production quality anomalies. The fault database includes multiple devices and historical fault information for each device. The historical fault information includes: device model, fault code, fault phenomenon, fault handling time, fault level, and fault handling steps.

[0076] The fault handling time refers to the time required to repair downed equipment or to fix quality abnormalities. For example, the fault handling time can be 5 hours, 2 days, 1 week, etc.

[0077] Fault level refers to the level of impact of equipment downtime on equipment operation, or the level of impact of abnormal equipment production quality on product quality. For example, fault levels can include minor fault, moderate fault, and severe fault.

[0078] Troubleshooting steps refer to the operations performed to repair malfunctioning equipment or to address abnormal production quality issues caused by the equipment. For example, troubleshooting steps may include replacing materials, adjusting equipment parameters, replacing equipment hardware, and adjusting equipment processes.

[0079] Optionally, in this embodiment of the application, the historical fault information may further include: fault cause.

[0080] In this embodiment of the application, when the historical fault information is downtime information, the fault cause can be referred to as the downtime cause, which may include: hardware damage, software abnormality, improper operation, unreasonable device threshold setting, etc.

[0081] In this embodiment of the application, when the historical fault information is quality abnormality information, the fault cause can be called the quality abnormality cause. The quality abnormality cause can include: material abnormality (such as PR glue abnormality, substrate incoming material abnormality, etc.), equipment abnormality (such as air leakage, voltage and current abnormality, etc.), operation abnormality (such as equipment parameter setting abnormality, etc.), product abnormality, process abnormality, etc.

[0082] In one alternative implementation, if the first fault information is a first downtime information, the target device can be determined from the device downtime case library.

[0083] In another optional implementation, if the first fault information is a first quality anomaly information, the target equipment can be determined from the equipment production quality anomaly case library.

[0084] In this embodiment of the application, the first fault information can be matched with the historical fault information in the fault database to obtain the similarity between the first fault information and each historical fault information, and the device with the highest similarity can be determined as the target device.

[0085] For example, consider a fault database containing historical fault information for five devices (device 1, device 2, device 3, device 4, and device 5). If the similarity between the first fault information and the historical fault information of the five devices is as follows: device 1 (80%), device 2 (62%), device 3 (88%), device 4 (96%), and device 5 (92%), then device 4 will be identified as the target device.

[0086] S203. Based on historical fault information, determine the fault handling time and fault level of the faulty equipment.

[0087] In one optional implementation, after the target device is identified, the historical fault information of the target device, including the fault handling time and fault level, can be directly determined as the fault handling time and fault level of the faulty device.

[0088] For example, if the determined fault handling time of the target device is 10 hours and the fault level is minor, then the fault handling time of the target device of 10 hours and the fault level of minor fault can be determined as the fault handling time and fault level of the faulty device.

[0089] In another alternative implementation, after identifying the target device, the similarity between the fault symptoms of the target device and the fault symptoms of the faulty device can be calculated first, and then the fault handling time of the faulty device can be determined based on the similarity and the fault handling time of the target device.

[0090] For example, taking the above-mentioned fault phenomenon as an abnormal pressure sensing condition as an example. If the abnormal pressure sensing condition of the faulty device is 90 and the abnormal pressure sensing condition of the target device is 85, then the similarity between the fault phenomenon of the faulty device and the fault phenomenon of the target device is 95%. If the fault handling time of the target device is 10 hours, then based on the calculated similarity of 95%, the fault handling time of the faulty device can be determined to be 9.5 hours.

[0091] Further optionally, in the embodiments of this application, if the similarity is greater than or equal to a preset similarity, the product of the similarity and the fault handling time of the target device can be determined as the fault handling time of the faulty device.

[0092] In this embodiment of the application, the preset similarity can be a value set manually. The preset similarity can be flexibly adjusted according to the actual scenario. For example, the preset similarity can be 60% or 70%.

[0093] For example, taking the aforementioned preset similarity of 60% and the fault phenomenon as pressure sensing abnormality as an example. If the pressure sensing abnormality of the faulty device is 90 and the pressure sensing abnormality of the target device is 80, then the similarity between the fault phenomenon of the faulty device and the fault phenomenon of the target device is 90%. In this case, if the fault handling time of the target device is 10 hours, then based on the calculated similarity of 90%, the fault handling time of the faulty device can be determined to be 10 * 90% = 9 hours.

[0094] Thus, by combining the similarity between the fault symptoms of the faulty device and the fault symptoms of the target device with the fault handling time of the target device, the fault handling time of the faulty device can be predicted, which can further improve the accuracy of determining the fault handling time of the faulty device.

[0095] S204. Adjust the running time of the faulty equipment based on the fault handling time and fault level.

[0096] In this embodiment of the application, running time refers to the time during which the equipment performs normal production.

[0097] For example, the operating time of faulty equipment can be flexibly adjusted by pausing equipment operation, stopping equipment operation, or maintaining equipment operation.

[0098] Furthermore, in the embodiments of this application, the running time of the faulty device can be adjusted based on the following two implementation methods.

[0099] Method 1: Continue to run the faulty device if the fault level of the faulty device is less than the preset level.

[0100] In this embodiment, the preset level can be a manually set level, which can be flexibly adjusted according to the actual scenario. For example, different preset levels can be set for different devices.

[0101] For example, the predicted level could be a moderate fault.

[0102] For example, consider a fault with a preset level of medium. If the fault level of the faulty device is a minor fault, the fault does not affect the normal operation of the device, and the faulty device continues to operate.

[0103] Method 2: If the fault level of the faulty equipment is greater than or equal to the preset level, stop the operation of the faulty equipment within the fault handling time.

[0104] For example, let's take a moderate fault as an example. If the fault level of the faulty equipment is severe and the fault handling time is 5 hours, then because the fault will affect the normal production of the equipment, the faulty equipment will stop operating within the next 5 hours.

[0105] Based on the above Figure 2 The technical solution provided in this application, the equipment management method, compares the first fault information of the faulty equipment with multiple historical fault information stored in the fault database, determines the historical fault information that matches the first fault information, provides reference data for the subsequent repair of the faulty equipment, and then determines the fault handling time and fault level required to repair the faulty equipment based on the historical fault information. Based on the fault handling time and fault level, the running time of the faulty equipment can be flexibly adjusted to avoid stopping the equipment when a low-level fault occurs that does not affect the normal operation of the equipment, thereby ensuring the normal operation of the equipment as much as possible and improving production capacity.

[0106] In some embodiments, to improve the accuracy of identifying the target device, such as Figure 3 As shown, step S202 above may include the following steps:

[0107] S202a. Based on the equipment model, identify at least one device with the same model number from the fault database.

[0108] In this embodiment of the application, the fault database contains multiple devices with the same device model. For example, there are 5 devices with device model number 01.

[0109] For example, taking the faulty device model 05 as an example, 10 devices with model 05 can be filtered from the fault database.

[0110] S202b. Based on the fault code, identify the target device from at least one device.

[0111] The fault code of the target device is the same as the fault code of the faulty device.

[0112] In the embodiments of this application, the fault code indicated when the device experiences the same fault is uniquely determined.

[0113] For example, taking fault code 0004 of a faulty device as an example. After identifying 10 devices with the above device model number 05, the device with fault code 0004 can be selected from these 10 devices as the target device.

[0114] In this way, by utilizing the equipment model and fault code of the faulty equipment, the accuracy of identifying the target equipment is further improved.

[0115] In some embodiments, this application may also repair the faulty device to ensure its subsequent reactivation.

[0116] An alternative implementation method is to repair the faulty device according to the fault handling steps in the historical fault information of the target device.

[0117] In this embodiment of the application, after the target device is identified, the fault handling steps of the target device can be obtained from the historical fault information of the target device, and then the maintenance personnel can handle the faulty device according to the fault handling steps.

[0118] For example, taking the fault handling steps of the target device as an example of device parameter adjustment, when repairing the faulty device, the device parameters of the faulty device can be adjusted directly according to the device parameter adjustment steps of the target device to repair the faulty device.

[0119] In this way, once the target device is identified, the faulty device can be repaired directly by following the troubleshooting steps for repairing the target device, without having to reanalyze the cause of the fault, thus improving the efficiency of repairing the faulty device.

[0120] Another alternative approach is to repair the faulty equipment according to the repair instructions given by the maintenance personnel.

[0121] In this embodiment of the application, if the target device is not identified, it indicates that the fault database does not store historical fault information that is similar to or the same as the first fault information of the faulty device. In this case, the maintenance personnel need to input repair instructions based on their experience to repair the faulty device.

[0122] In addition, after maintenance personnel successfully repair the faulty equipment, they can also upload the fault repair steps and fault information of the equipment to the fault database.

[0123] The following provides an illustrative example of the handling procedures for the two types of faults included in the aforementioned faulty equipment:

[0124] For example, such as Figure 4 As shown, when the fault type of the above-mentioned faulty equipment is equipment downtime, if equipment downtime is detected, the maintenance personnel will first determine whether they can repair it themselves. If so, production will be restored after the repair is completed. If not, the downtime information will be uploaded, and it will be determined whether there are similar downtime cases in the downtime case library. If not, the equipment after-sales personnel will be contacted for repair. If so, the repair time will be estimated based on similar downtime cases, and the equipment production plan will be adjusted according to the repair time. After the repair is completed, production will be restored, and the maintenance personnel will upload the downtime case.

[0125] For example, such as Figure 5As shown, when the fault type of the aforementioned faulty equipment is abnormal production quality, if a quality abnormality is detected, the engineer first determines whether it can be repaired independently. If so, the engineer determines whether the abnormality has disappeared. If so, production is resumed, and the engineer uploads the quality abnormality case. If not, the engineer determines whether production can proceed with the abnormality. If so, production is resumed. If not, the engineer processes the abnormality and determines whether it has disappeared. If the equipment cannot be repaired independently, the engineer uploads the quality abnormality information and determines whether there are similar quality abnormality cases in the quality abnormality case library. If not, the engineer processes the abnormality and determines whether it has disappeared. If so, the engineer determines whether the quality abnormality is an inherent product defect. If so, production is resumed. If not, the engineer searches for similar quality abnormality cases, processes them, and determines whether the abnormality has disappeared.

[0126] The following provides a detailed description of the fault database involved in the embodiments of this application.

[0127] like Figure 6 The diagram shown illustrates the fault database architecture. This architecture includes production base equipment 601, communication system protocol 602, production base server 603, production base database 604, communication system protocol 605, main server 606, and main database 607.

[0128] Among them, production base equipment 601 is connected to production base server 603 via communication system protocol 602; production base server 603 is connected to main server 606 via communication system protocol 605. Production base equipment 601 is the aforementioned... Figure 1 The equipment mentioned above, specifically server 603 in the production base, is... Figure 1 The sub-servers in the above-mentioned total server 606 are the sub-servers mentioned above. Figure 1 The central server.

[0129] In this embodiment, both the production base database 604 and the total database 607 contain: a downtime case database, a quality anomaly case database, an operational improvement case database, and a process improvement case database. Specifically, the production base database 604 stores all cases related to equipment A, B, C, D, and E; the total database 607 stores important cases from each production base database.

[0130] For example, the above-mentioned case library for improving operations may include equipment information, product information, improvement plans, and quality impact.

[0131] The equipment information may include: equipment name, equipment model, and equipment manufacturer; the product information may include: product model and product process; the improvement plan may include: production line equipment modification, equipment parameter adjustment (such as reducing exposure), and production process adjustment (such as adjusting color gamut and reducing film thickness); the quality impact may include: acceptable quality abnormalities and unacceptable quality abnormalities.

[0132] For example, the above-mentioned process improvement case library may include equipment information, product information, optimization schemes, and optimization effects.

[0133] The equipment information may include: equipment name, equipment model, and equipment manufacturer; the product information may include: product model and product process; the optimization plan may include: equipment structure optimization (such as adjusting the pin position), equipment parameter optimization (such as adjusting the development time and adjusting the film coating amount of the Coater equipment), and equipment management optimization (such as unified management of equipment Reice, etc.); the optimization effect may include: improving product quality, improving product utilization rate, and improving lean management.

[0134] like Figure 7 The diagram shown is a flowchart of the fault database construction process. This fault database is built based on the access module 701, management module 702, statistics module 703, and application module 704.

[0135] In this embodiment of the application, the access module 701 can receive the registration request of the staff, generate a registration account for each staff member, and configure permissions such as account points, case upload, case viewing, and case fuzzy search for the staff member.

[0136] In this embodiment of the application, the management module 702 can perform case review, case value assessment, and case reward on the cases uploaded by the access module.

[0137] Case review refers to determining whether a case uploaded by a staff member is genuine based on the supporting materials provided. If a case is found to be fraudulent, the staff member's account points will be deducted. For example, the first deduction is 10% of the total points, the second is 30%, and the third is 60%.

[0138] Case value assessment refers to evaluating the value of a case from four dimensions: information completeness, reference index, novelty, and page views, and accumulating points for staff members' accounts.

[0139] Information completeness refers to the comprehensiveness of the case description. The information completeness coefficient δ can be divided into three levels: 0.7-0.4 (very comprehensive), 0.3-0.2 (relatively comprehensive), and 0.1-0 (not comprehensive).

[0140] The reference index refers to the index determined based on the number of page views of a case study. The reference index is divided into three levels: 2 (top 10% of page views), 1.7 (top 10%-70% of page views), and 1 (bottom 70% of page views).

[0141] Novelty refers to the degree of similarity between the current case and cases in the fault database. The novelty coefficient σ is divided into three levels. For example: 1-0.6 (similarity of 0-30%), 0.6-0.3 (similarity of 30-60%), 0.3-0 (similarity of 60-100%).

[0142] Case reward refers to the following: a case score value Φ = δ × з × σ is calculated by combining the information completeness coefficient δ, the reference index з, and the novelty coefficient σ. Points are then awarded to the account based on this case score value Φ. For example: Φ < 0.1, 1 point; 0.1 < Φ ≤ 0.27, 2 points; 0.27 < Φ ≤ 0.37, 3 points; 0.37 < Φ, 4 points.

[0143] In the embodiments of this application, such as Figure 8 As shown, the statistics module 703 can link data from the downtime case library, quality anomaly case library, capacity improvement case library, and process improvement case library, and use a big data statistical model to achieve key information statistics. For example, it can statistically obtain the top 10 failure types of each piece of equipment, the top 7 equipment with the highest failure rate in each production base, the top case of capacity improvement, and the top case of process improvement, etc.

[0144] In this embodiment of the application, the application module 704 can retrieve similar cases from the fault database based on the keywords entered by the staff.

[0145] In this way, by integrating various types of failure cases, a comprehensive shared case library of equipment downtime, quality anomalies, capacity improvement, and process optimization can be established, thereby achieving resource sharing and promoting the development of the semiconductor industry.

[0146] The foregoing mainly describes the solutions provided by the embodiments of this application from a methodological perspective. To achieve the above functions, the device management device or electronic device includes hardware structures and / or software modules corresponding to the execution of each function. Those skilled in the art should readily recognize that, based on the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein, this application can be implemented in hardware or a combination of hardware and computer software. Whether a function is executed in hardware or by computer software driving hardware depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0147] This application embodiment can, according to the above method, exemplarily divide a device management device or electronic device into functional modules. For example, the device management device or electronic device may include functional modules corresponding to each functional division, or two or more functions may be integrated into one processing module. The integrated module can be implemented in hardware or as a software functional module. It should be noted that the module division in this application embodiment is illustrative and only represents one logical functional division; in actual implementation, there may be other division methods.

[0148] Figure 9 This is a block diagram illustrating a device management apparatus according to an exemplary embodiment. (Refer to...) Figure 9 The device management device 900 includes: an acquisition unit 901, a determination unit 902, and a processing unit 903.

[0149] Wherein: the acquisition unit 901 is used to acquire first fault information of the faulty device; the determination unit 902 is used to determine the target device from the fault database based on the first fault information acquired by the acquisition unit 901, the fault database including multiple devices and historical fault information of each device, the multiple devices including the target device, the historical fault information of the target device matching the first fault information of the faulty device; the determination unit 902 is also used to determine the fault handling time and fault level of the faulty device based on the historical fault information; the processing unit 903 is used to adjust the running time of the faulty device based on the fault handling time and fault level of the faulty device determined by the determination unit 902.

[0150] In some embodiments, the first fault information includes the device model and fault code, the historical fault information includes the device model and fault code, and the determining unit 902 is specifically used to: determine at least one device with the same model as the device model from the fault database according to the device model, and determine a target device from the at least one device according to the fault code, wherein the fault code of the target device is the same as the fault code of the fault device.

[0151] In some embodiments, the first fault information further includes a fault phenomenon, and the historical fault information further includes a fault phenomenon and a fault handling time. The determining unit 902 is specifically used to: calculate the similarity between the fault phenomenon of the target device and the fault phenomenon of the faulty device, and determine the fault handling time of the faulty device based on the similarity and the fault handling time of the target device.

[0152] In some embodiments, the determining unit 902 is specifically used to: determine the fault handling time of the faulty device by multiplying the similarity by the fault handling time of the target device when the similarity is greater than or equal to a preset similarity.

[0153] In some embodiments, the processing unit 903 is specifically configured to: continue running the faulty device when the fault level of the faulty device is less than a preset level; and stop running the faulty device within the fault handling time when the fault level of the faulty device is greater than or equal to the preset level.

[0154] In some embodiments, the aforementioned historical fault information further includes fault handling steps, and the aforementioned processing unit 903 is further configured to repair the faulty device according to the fault handling steps in the historical fault information of the target device.

[0155] In the equipment management device provided in this application embodiment, after a faulty device is detected, the device compares the first fault information of the faulty device with multiple historical fault information stored in the fault database to determine the historical fault information that matches the first fault information. This provides reference data for the subsequent repair of the faulty device. Based on the historical fault information, the device determines the fault handling time and fault level required to repair the faulty device. The device can flexibly adjust the running time of the faulty device based on the fault handling time and fault level to avoid stopping the device when a low-level fault occurs that does not affect the normal operation of the device. This ensures the normal operation of the device as much as possible and improves production capacity.

[0156] Regarding the apparatus in the above embodiments, the specific manner in which each module performs its operation has been described in detail in the embodiments related to the method, and will not be elaborated upon here.

[0157] Figure 10 This is a block diagram illustrating an electronic device according to an exemplary embodiment. Figure 10 As shown, the electronic device 1000 includes, but is not limited to, a processor 1001 and a memory 1002.

[0158] The memory 1002 described above is used to store the executable instructions of the processor 1001. It is understood that the processor 1001 is configured to execute instructions to implement the device management method described in the above embodiments.

[0159] It should be noted that those skilled in the art will understand that Figure 10 The electronic device structure shown does not constitute a limitation on the electronic device; the electronic device may include, but is not limited to, other electronic devices. Figure 10 This may indicate more or fewer components, or combinations of certain components, or different component arrangements.

[0160] The processor 1001 is the control center of the electronic device. It connects various parts of the electronic device via various interfaces and lines. By running or executing software programs and / or modules stored in the memory 1002, and by calling data stored in the memory 1002, it performs various functions and processes data, thereby providing overall monitoring of the electronic device. The processor 1001 may include one or more processing units. Optionally, the processor 1001 may integrate an application processor and a modem processor. The application processor mainly handles the operating system, user interface, and applications, while the modem processor mainly handles wireless communication. It is understood that the modem processor may not be integrated into the processor 1001.

[0161] The memory 1002 can be used to store software programs and various data. The memory 1002 may primarily include a program storage area and a data storage area. The program storage area may store the operating system, application programs required by at least one functional module (such as a determination unit, processing unit, etc.), etc. Furthermore, the memory 1002 may include high-speed random access memory, and may also include non-volatile memory, such as at least one disk storage device, flash memory device, or other volatile solid-state storage device.

[0162] In an exemplary embodiment, a computer-readable storage medium including instructions is also provided, such as a memory 1002 including instructions, which can be executed by a processor 1001 of an electronic device 1000 to implement the device management method in the above embodiments.

[0163] In actual implementation, Figure 9 The functions of the acquisition unit 901, the determination unit 902, and the processing unit 903 can all be provided by... Figure 10 The processor 1001 calls the computer program stored in the memory 1002 to implement the process. The specific execution process can be found in the description of the method section in the previous embodiment, and will not be repeated here.

[0164] Optionally, the computer-readable storage medium may be a non-transitory computer-readable storage medium, such as a read-only memory (ROM), random access memory (RAM), CD-ROM, magnetic tape, floppy disk, and optical data storage device.

[0165] In an exemplary embodiment, this application also provides a computer program product including one or more instructions, which can be executed by the processor 1001 of an electronic device to complete the device management method described above.

[0166] It should be noted that when one or more instructions in the computer-readable storage medium or computer program product are executed by the processor of an electronic device, they implement the various processes of the above method embodiments and achieve the same technical effect as the above method. To avoid repetition, they will not be described again here.

[0167] Through the above description of the embodiments, those skilled in the art can clearly understand that, for the sake of convenience and brevity, only the division of the above functional modules is used as an example. In actual applications, the above functions can be assigned to different functional modules as needed, that is, the internal structure of the device can be divided into different functional modules to complete all or part of the functions described above.

[0168] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of modules or units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another device, or some features may be ignored or not executed. Furthermore, the mutual coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between devices or units may be electrical, mechanical, or other forms.

[0169] The units described as separate components may or may not be physically separate. A component shown as a unit can be one or more physical units; that is, it can be located in one place or distributed in multiple different locations. Some or all of the classified units can be selected to achieve the purpose of this embodiment, depending on actual needs.

[0170] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0171] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a readable storage medium. Based on this understanding, the technical solution of the embodiments of this application, essentially, or the part that contributes to the prior art, or a complete or partial classification of the technical solution, can be embodied in the form of a software product. This software product is stored in a storage medium and includes several instructions to cause a device (which may be a microcontroller, chip, etc.) or processor to execute all or part of the steps of the methods of the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, ROM, RAM, magnetic disks, or optical disks.

[0172] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for managing equipment, characterized in that, The method includes: Obtain the first fault information of the faulty device; Based on the first fault information, a target device is determined from the fault database, which includes multiple devices and historical fault information of each device. The multiple devices include the target device, and the historical fault information of the target device is matched with the first fault information of the fault device. Based on the historical fault information, the fault handling time and fault level of the faulty equipment are determined; Based on the fault handling time and fault level of the faulty equipment, the running time of the faulty equipment is adjusted.

2. The method according to claim 1, characterized in that, The first fault information includes the device model and fault code, the historical fault information includes the device model and fault code, and the step of determining the target device from the fault database based on the first fault information includes: Based on the equipment model, at least one device of the same model as the equipment model is identified from the fault database; Based on the fault code, the target device is determined from the at least one device, wherein the fault code of the target device is the same as the fault code of the faulty device.

3. The method according to claim 1 or 2, characterized in that, The first fault information also includes the fault phenomenon, and the historical fault information also includes the fault phenomenon and the fault handling time. Determining the fault handling time of the faulty device based on the historical fault information includes: Calculate the similarity between the fault symptoms of the target device and the fault symptoms of the faulty device; The fault handling time of the faulty device is determined based on the similarity and the fault handling time of the target device.

4. The method according to claim 3, characterized in that, The step of determining the fault handling time of the faulty device based on the similarity and the fault handling time of the target device includes: If the similarity is greater than or equal to a preset similarity, the product of the similarity and the fault handling time of the target device is determined as the fault handling time of the faulty device.

5. The method according to claim 1 or 2, characterized in that, The step of adjusting the operating time of the faulty equipment based on its fault handling time and fault level includes: If the fault level of the faulty device is less than a preset level, the faulty device shall continue to operate. If the fault level of the faulty device is greater than or equal to the preset level, the faulty device shall be shut down within the fault handling time of the faulty device.

6. The method according to claim 1 or 2, characterized in that, The historical fault information also includes fault handling steps, and the method further includes: Repair the faulty device according to the fault handling steps in the historical fault information of the target device.

7. An equipment management device, characterized in that, The device includes: an acquisition unit, a determination unit, and a processing unit, wherein: The acquisition unit is used to acquire the first fault information of the faulty device; The determining unit is configured to determine a target device from a fault database based on the first fault information obtained by the acquiring unit. The fault database includes multiple devices and historical fault information of each device. The multiple devices include the target device. The historical fault information of the target device is matched with the first fault information of the fault device. The determining unit is further configured to determine the fault handling time and fault level of the faulty equipment based on the historical fault information; The processing unit is used to adjust the running time of the faulty device based on the fault handling time and fault level of the faulty device determined by the determining unit.

8. An electronic device, characterized in that, include: processor; Memory used to store the processor's executable instructions; The processor is configured to execute the instructions to implement the method as described in any one of claims 1 to 6.

9. A computer-readable storage medium, characterized in that, When the computer-executable instructions stored in the computer-readable storage medium are executed by the processor of the electronic device, the electronic device is capable of performing the method as described in any one of claims 1 to 6.

10. A computer program product, characterized in that, The computer program product includes instructions that, when executed on a computer, cause the computer to perform the method as described in any one of claims 1 to 6.

Images