Aerosol dispersing device based on microwave induction heating and coating deposition equipment

Abstract

The invention belongs to the technical field of powder aerosol deposition, and provides an aerosol dispersing device based on microwave induction heating and coating deposition equipment, and the aerosol dispersing device comprises a tank body and a microwave generating device. The tank body is provided with a heating cavity, the tank body is provided with a feed port and a discharge port which are communicated with the heating cavity, the tank body is further provided with a microwave feed-in port, the output end of the microwave generating device is located in the microwave feed-in port, the microwave generating device emits microwaves into the heating cavity through the microwave feed-in port, and the feed port and the discharge port are symmetrically arranged. The microwave generating device emits microwaves into the heating cavity, local heating is conducted through the microwaves, dynamic depolymerization of particles in aerosol is achieved, and secondary agglomeration of the particles is avoided, so that the particles in the aerosol are dispersed more evenly, and the tamping effect when the particles impact a substrate is improved; therefore, the porosity of the formed coating is reduced, and the bonding strength of the particles and the substrate is improved.

Description

Technical Field

[0001] This invention relates to the field of powder aerosol deposition technology, specifically to an aerosol dispersion device based on microwave-induced heating, and also to a coating deposition device. Background Technology

[0002] Aerosol deposition involves mixing solid particles with gas to form an aerosol, which is then sprayed onto a substrate in a deposition chamber through a nozzle. Specifically, the aerosol in the nozzle is under high pressure, while the deposition chamber is under low pressure. The pressure difference between the two causes the particles in the aerosol in the nozzle to collide with the substrate and bond with it to form a coating.

[0003] In practice, it has been found that particles in aerosols are prone to agglomeration due to van der Waals forces, electrostatic adsorption, and other effects. The aerosols are unevenly dispersed, and the compaction effect of the agglomerated particles is weakened when they impact the substrate. Uneven dispersion leads to high porosity and low bonding strength in the resulting coating. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the present invention provides an aerosol dispersion device and coating deposition equipment based on microwave-induced heating, which can solve or at least alleviate one or more of the above-mentioned problems and other problems existing in the prior art.

[0005] This invention provides an aerosol dispersion device based on microwave-induced heating, comprising:

[0006] The tank body has a heating chamber, and the tank body has an inlet and an outlet communicating with the heating chamber. The tank body also has a microwave feed inlet.

[0007] A microwave generator, wherein the output end of the microwave generator is connected to the microwave feed inlet, and the microwave generator emits microwaves into the heating cavity through the microwave feed inlet;

[0008] The inlet and outlet are symmetrically arranged; the inlet and outlet can allow aerosols to enter and exit.

[0009] Preferably, the tank body includes: a bottom plate; an annular surrounding plate, the lower end of which is connected to the bottom plate; and a top plate, the top plate being connected to the upper end of the annular surrounding plate; the aerosol dispersion device further includes: a support column, the support column being coaxially disposed at the center of the annular surrounding plate, the support column, the bottom plate, the top plate, and the annular surrounding plate forming an annular heating chamber; and three partitions, the ends of which are all connected to the support column, the partitions being rotatable around the axis of the support column, the partitions dividing the annular heating chamber circumferentially, and the partitions being connected with arcs extending axially along the support column. The device includes a shaped push plate, with adjacent arc-shaped push plates abutting against each other; and a drive mechanism for driving the partition to rotate; the annular heating chamber has an exhaust position; the exhaust position is located on one side of the discharge port; one of the partitions is located at the exhaust position and remains stationary, while the other two partitions are symmetrically distributed radially on both sides of the support column when rotated under the drive mechanism; when the drive mechanism drives the two partitions to rotate, one of the partitions pushes away from the partition at the exhaust position and occupies the exhaust position and remains stationary, while the drive mechanism drives the partition at the original exhaust position to start rotating again.

[0010] Preferably, the support column includes: a top ring, which is fixedly connected to the top plate; a bottom ring, which is coaxial with the top ring and fixedly connected to the bottom plate; two support rings, both coaxial with the top ring and located between the top ring and the bottom ring; three mounting rings, one of which is rotatably disposed between the two support rings, and the other two are rotatably disposed between the top ring and the support ring and between the bottom ring and the support ring, respectively; a connecting rod, which extends axially along the top ring and is located inside the support ring; and four connecting blocks, one end of which is fixedly connected to the connecting rod, and the other end of which is fixedly connected to the top ring, the two support rings, and the bottom ring, respectively; and three partitions, which are fixedly connected to the outer walls of the three mounting rings.

[0011] Preferably, the top plate has a through hole; the driving mechanism includes: a docking block, three of which are respectively disposed on the inner walls of the three mounting rings, and the docking blocks can move laterally between adjacent connecting blocks; a driving shaft, which is coaxially rotatably disposed in the first hole; a motor, which is disposed on the top plate and whose output end is connected to the driving shaft; and a linkage mechanism, two of which are centrally symmetrically distributed about the axis of the driving shaft, and the linkage mechanism can be connected to or separated from the corresponding docking block.

[0012] Preferably, the linkage mechanism includes: a linkage rod, wherein multiple linkage rods are provided, one end of each linkage rod being connected to the drive shaft; a limiting post, wherein multiple limiting posts are provided, each limiting post being connected to a corresponding linkage rod; a first linkage block, wherein the length direction of the first linkage block is the same as the axial direction of the drive shaft, the first linkage block having multiple second holes distributed along its length direction, and the inner wall of each second hole slidingly engaging with the corresponding limiting post, the end of the first linkage block away from the drive block having an inclined guide surface, and the guide surface being able to abut against the connecting rod to drive the first linkage block closer to the drive shaft; and a first limiting ring. Multiple first limiting rings are provided, each connected to the inner wall of the opening of the second hole. The first limiting ring is slidably sleeved on the corresponding linkage rod, and can abut against the limiting post. Multiple first springs are provided, each sleeved on the linkage rod, with both ends abutting against the drive shaft and the first linkage block, respectively. A second linkage block is slidably disposed on the first linkage block, and can slide to the side of the docking block. The second linkage block can move closer to the drive shaft and accelerate away from the docking block by means of the first linkage block.

[0013] Preferably, the linkage mechanism further includes: a mounting block, which is fixedly connected to the drive shaft, and the mounting block and the first linkage block are respectively located on both sides of the second linkage block; a first rack, which is radially laid on the side of the mounting block facing the second linkage block along the drive shaft; a second rack, which is radially laid on the side of the second linkage block facing the mounting block along the drive shaft; and a gear, which is rotatably disposed on the first linkage block, located between the second linkage block and the mounting block, and meshing with the first rack and the second rack respectively.

[0014] Preferably, a third radial hole is formed on the inner wall of the mounting ring; a second limiting ring is connected to the inner wall of the opening of the third hole; the mating block passes through the second limiting ring and is connected to a limiting block; the limiting block can abut against the second limiting ring; a second spring is also provided in the third hole; the two ends of the second spring are respectively connected to the bottom of the third hole and the limiting block; three limiting notches are formed on the connecting rod; the end of each mating block away from the mounting ring can be rotated and enters from one side of the limiting notch and abut against the connecting rod.

[0015] The present invention also provides a coating deposition apparatus, including any of the above-mentioned aerosol dispersion devices.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] In this invention, microwaves are emitted into the heating cavity by a microwave generator. By utilizing the local heating of microwaves (difference in dielectric loss), dynamic deagglomeration of particles in the aerosol is achieved, avoiding secondary agglomeration of particles. This results in more uniform dispersion of particles in the aerosol, improves the compaction effect when particles impact the substrate, thereby reducing the porosity of the coating and increasing the bonding strength between the particles and the substrate. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0019] Figure 1 This is a perspective view of an aerosol dispersion device based on microwave-induced heating according to an embodiment of the present invention.

[0020] Figure 2 for Figure 1 Internal structure diagram;

[0021] Figure 3 for Figure 2 A three-dimensional view of the interaction between the central drive mechanism, support columns, and partitions;

[0022] Figure 4 for Figure 3 Another 3D image;

[0023] Figure 5 for Figure 3 A three-dimensional view of the coordination between the central support column and the partition plate;

[0024] Figure 6 for Figure 5 Another 3D image;

[0025] Figure 7 for Figure 6 3D view at point S in the middle;

[0026] Figure 8 for Figure 4 A three-dimensional view of the central linkage mechanism in conjunction with the docking block and connecting rod;

[0027] Figure 9 for Figure 8 Another 3D image;

[0028] Figure 10 for Figure 9 Internal view of the first linkage block;

[0029] Figure 11 for Figure 9 3D view of the mounting block in the middle;

[0030] Figure 12 Figure 11 The right-side view of the first and second linkage blocks.

[0031] Figure label:

[0032] 10. Tank body; 11. Heating chamber; 12. Feed inlet; 13. Discharge outlet; 14. Microwave feed inlet; 15. Bottom plate; 16. Annular surrounding plate; 17. Top plate; 18. First hole; 19. Exhaust position;

[0033] 20. Support column; 21. Top ring; 22. Bottom ring; 23. Support ring; 24. Mounting ring; 25. Connecting rod; 26. Connecting block; 27. Third hole; 28. Second limiting ring; 29. ​​Limiting notch;

[0034] 30. Partition; 31. Arc-shaped push plate;

[0035] 40. Drive mechanism; 41. Connecting block; 42. Drive shaft; 43. Motor; 44. Linkage mechanism; 441. Linkage rod; 442. Limiting post; 443. First linkage block; 444. Second hole; 445. First limiting ring; 446. First spring; 447. Second linkage block; 448. Mounting block; 449. First rack; 450. Second rack; 451. Gear; 46. Limiting block; 47. Second spring; 48. Guide surface. Detailed Implementation

[0036] The embodiments of the technical solution of the present invention will now be described in detail with reference to the accompanying drawings. These embodiments are merely illustrative of the technical solution of the present invention and are therefore intended to limit the scope of protection of the present invention.

[0037] It should be noted that, unless otherwise stated, the technical or scientific terms used in this application should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention pertains.

[0038] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0039] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly defined.

[0040] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0041] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0042] See Figures 1 to 12 This embodiment provides an aerosol dispersion device based on microwave-induced heating, including a tank 10 and a microwave generator (not shown).

[0043] The tank body 10 has a heating chamber 11. An inlet 12 and an outlet 13, both communicating with the heating chamber 11, are provided on the tank body 10. A microwave feed inlet 14 is also provided on the tank body 10, its inner side sealed to prevent communication with the heating chamber 11. The output end of the microwave generator is located inside the microwave feed inlet 14, through which the microwave generator emits microwaves into the heating chamber 11. The inlet 12 and outlet 13 are symmetrically arranged; specifically, the outlet 13 and inlet 12 are coaxial. Both the inlet 12 and outlet 13 allow aerosols to enter and exit. The inlet 12 is used for aerosol entry, and the outlet 13 is used for aerosol exit. Specifically, the microwave generator uses existing technology, which will not be elaborated upon here. Both the outlet 13 and inlet 12 can be connected to external pipes. An ultrasonic generator can also be connected to the pipe at the outlet 13 to emit ultrasonic waves to the aerosols within the pipe at the outlet 13, further breaking down agglomerates within the aerosols using ultrasonic waves. The 13 outlet pipes can be connected to a pressurizing device as needed to change the pressure of the aerosol in the pipes, so that when the aerosol is sprayed from the nozzle onto the substrate in the deposition chamber, a pressure difference is formed, which allows the particles in the aerosol to combine with the substrate.

[0044] In this embodiment, the aerosol enters the heating chamber 11 through the feed inlet 12 and flows out through the discharge outlet 13. Microwaves are emitted into the heating chamber 11 by a microwave generator. Local microwave heating (heating the agglomerates first due to differences in dielectric loss) dynamically deagglomerates the particles in the aerosol, preventing secondary agglomeration. This results in more uniform particle dispersion within the aerosol, improving the compaction effect when particles impact the substrate, thereby reducing the porosity of the coating and increasing the bonding strength between the particles and the substrate. Specifically, the principle behind microwave heating of the aerosol to prevent secondary particle agglomeration is as follows: Firstly, microwaves preferentially heat the interface of the agglomerates (due to differences in dielectric loss), generating a significant temperature difference at the interface and inducing thermal expansion mismatch stress. When the thermal expansion mismatch stress exceeds the particle bonding strength, it directly and mechanically peels off the agglomerated particles, blocking the secondary agglomeration path at its source, thus preventing the re-agglomeration into larger agglomerates. Secondly, the electromagnetic oscillation at a microwave frequency of 2.45 billion times per second induces micron-level vibrations in the particles, which can, to some extent, disperse weakly bonded agglomerates.

[0045] In one embodiment, the tank body 10 includes a bottom plate 15, an annular surrounding plate 16, and a top plate 17.

[0046] The lower end of the annular surrounding plate 16 is connected to the bottom plate 15. The top plate 17 is connected to the upper end of the annular surrounding plate 16.

[0047] The aerosol dispersion device also includes a support column 20, a partition plate 30, and a drive mechanism 40.

[0048] A support column 20 is coaxially positioned at the center of the annular surrounding plate 16. The support column 20, together with the bottom plate 15, top plate 17, and annular surrounding plate 16, forms an annular heating cavity 11. Three partition plates 30 are provided, each connected at its end to the support column 20. The partition plates 30 are rotatable around the axis of the support column 20, thus dividing the annular heating cavity 11 circumferentially. Arc-shaped push plates 31 extending axially along the support column 20 are connected to the partition plates 30, and adjacent arc-shaped push plates 31 can abut against each other. A drive mechanism 40 is used to drive the partition plates 30 to rotate.

[0049] The annular heating chamber 11 has an exhaust position located on one side of the discharge port 13. One of the baffles 30 is located at the exhaust position and remains stationary. The other two baffles 30 are symmetrically distributed on both sides of the support column 20 radially when rotated by the drive mechanism 40 (i.e., both baffles 30 are radially distributed and symmetrically arranged on both sides of the support column 20). When the drive mechanism 40 drives the two baffles 30 to rotate, one of the baffles 30 pushes away from the baffle 30 at the exhaust position and occupies the exhaust position, remaining stationary. Meanwhile, the drive mechanism 40 drives the baffle 30 at the original exhaust position to start rotating again. Specifically, when the baffle 30 rotates along the... Figure 2 When rotating clockwise, the clockwise direction is considered positive. The exhaust position is located in front of the discharge port 13. The partition 30 maintains a dynamic seal with the support column 20, top plate 17, bottom plate 15, and annular surrounding plate 16. The diameters of both the inlet 12 and the outlet 13 are greater than the thickness of the partition 30. This ensures that the partition will not block the inlet 12 or the outlet 13 when aerosol enters or exits the heating chamber 11, allowing aerosol to continuously flow from the inlet 12 into the heating chamber 11 and continuously flow from the outlet 13 out of the heating chamber 11, thus achieving a continuous supply of aerosol to the nozzle.

[0050] In this embodiment, it should be understood that the microwave heating of aerosols requires a certain amount of time before they are discharged. If the aerosols are heated and discharged at the same time, it will lead to uneven heating of some aerosols.

[0051] Therefore, refer to, Figure 2 Three partitions 30 are distributed in the heating chamber 11. One partition 30 is located at the exhaust position and is temporarily referred to as the first partition 30. Of the other two partitions 30 connected to the drive mechanism 40, the one closer to the first partition 30 is temporarily referred to as the second partition 30, and the remaining partition 30 is temporarily referred to as the third partition 30. The second partition 30 and the third partition 30 are in a straight line. The discharge port 13 is located between the first partition 30 and the second partition 30, and the feed port 12 and the microwave feed inlet 14 are between the second partition 30 and the third partition 30. At this time, the aerosol between the second partition 30 and the third partition 30 has been heated by microwave.

[0052] When the drive mechanism 40 drives the second and third partitions 30 connected to it to rotate clockwise, the second partition 30 gradually approaches the first partition 30. The arc-shaped push plate 31 on the second partition 30 abuts against the arc-shaped push plate 31 on the first partition 30 and pushes it away from the exhaust position. At this time, the drive mechanism 40 separates from the second partition 30 and drives the first and third partitions 30 to rotate (the third and first partitions 30 are now in a straight line). As the third partition 30 rotates, the stationary second partition 30 allows the aerosol between the third and second partitions 30 to be discharged from the outlet 13. At the same time, the third partition 30 passes through the inlet 12 and the microwave feed inlet 14. The aerosol input through the inlet 12 flows into the chamber between the first and third partitions 30, and the microwave continues to heat the aerosol flowing into the chamber. Furthermore, as the first and third partitions 30 rotate, the microwaves emitted by the microwave generator at the microwave feed inlet 14 continuously change direction within the cavity after reflection by the partitions 30, thereby uniformly heating the aerosol within the cavity until the third partition 30 rotates to... Figure 2 When the first partition 30 rotates to the position of the third partition 30 in the diagram, the drive mechanism 40 separates from the third partition 30 and drives the first and second partitions 30 to rotate. Through this arrangement, the heating chamber 11 is divided into two chambers, and the heated aerosol in one chamber is discharged from the outlet 13, while the aerosol in the other chamber is simultaneously heated, enabling continuous operation. This allows the nozzle connected to the outlet 13 via a pipe to operate continuously within the deposition chamber. Furthermore, during the rotation of the first and third partitions 30, the aerosol between them passes through the microwave feed inlet 14. The microwaves emitted by the microwave generator heat the passing aerosol, further ensuring uniform heating of the aerosol between the first and third partitions 30.

[0053] In one embodiment, the support column 20 includes a top ring 21, a bottom ring 22, a support ring 23, a mounting ring 24, a connecting rod 25, and a connecting block 26.

[0054] The top ring 21 is fixedly connected to the top plate 17. The bottom ring 22 is coaxial with the top ring 21 and fixedly connected to the bottom plate 15. Two support rings 23 are provided, both coaxial with the top ring 21, and located between the top ring 21 and the bottom ring 22. Three mounting rings 24 are coaxially provided, one of which is rotatably positioned between the two support rings 23, and the other two are rotatably positioned between the top ring 21 and the support ring 23, and between the bottom ring 22 and the support ring 23, respectively. The connecting rod 25 extends axially along the top ring 21 and is located inside the support ring 23. Four connecting blocks 26 are provided, one end of each of the four connecting blocks 26 is fixedly connected to the connecting rod 25, and the other end is fixedly connected to the top ring 21, the two support rings 23, and the bottom ring 22, respectively. Three partition plates 30 are fixedly connected to the outer walls of the three mounting rings 24, respectively. In addition, a dynamic seal is maintained between the bottom ring 22 and the mounting ring 24, a dynamic seal is maintained between the top ring 21 and the mounting ring 24, and a dynamic seal is maintained between the support ring 23 and the mounting ring 24.

[0055] In this embodiment, supported by the connecting rod 25, the top ring 21, mounting ring 24, support ring 23, and bottom ring 22 form a cylindrical support column 20. The three partitions 30 are respectively connected to the three mounting rings 24, allowing the three partitions 30 to rotate within the heating chamber 11.

[0056] In one embodiment, the top plate 17 has a through first hole 18.

[0057] The drive mechanism 40 includes a docking block 41, a drive shaft 42, a motor 43, and a linkage mechanism 44.

[0058] Three docking blocks 41 are provided, each mounted on the inner wall of one of the three mounting rings 24. The docking blocks 41 can move laterally between adjacent connecting blocks 26. A drive shaft 42 is coaxially rotatably disposed within the first hole 18, and the drive shaft 42 can dynamically seal with the first hole 18. A motor 43 is mounted on the top plate 17, and its output end is connected to the drive shaft 42. Two linkage mechanisms 44 are provided, symmetrically distributed around the axis of the drive shaft 42. The linkage mechanisms 44 can connect to or separate from their corresponding docking blocks 41.

[0059] In this embodiment, the motor 43 drives two docking blocks 41 to rotate via the drive shaft 42, thereby rotating two partition plates 30. The partition plate 30 connected to the other docking block 41 is located at the exhaust position. When the drive shaft 42 rotates to a certain angle, the linkage mechanism 44 can selectively separate from one of its docking blocks 41 and connect with the docking block 41 originally connected to the partition plate 30 at the exhaust position. The two partition plates 30 corresponding to the docking block 41 connected to the linkage mechanism 44 are aligned in a straight line.

[0060] In one embodiment, the linkage mechanism 44 includes a linkage rod 441, a limiting post 442, a first linkage block 443, a first limiting ring 445, a first spring 446, and a second linkage block 447.

[0061] Multiple linkage rods 441 are provided, one end of which is connected to the drive shaft 42. Multiple limiting posts 442 are provided, and each limiting post 442 is connected to a corresponding linkage rod 441. The length direction of the first linkage block 443 is the same as the axial direction of the drive shaft 42. Multiple second holes 444 are provided on the first linkage block 443 along its length direction, and the inner wall of the second hole 444 slides in fit with the corresponding limiting post 442. An inclined guide surface 48 is provided at the end of the first linkage block 443 away from the drive block, and the guide surface 48 can abut against the connecting rod 25 to drive the first linkage block 443 closer to the drive shaft 42. Multiple first limiting rings 445 are provided, and each first limiting ring 445 is connected to the inner wall of the opening of the second hole 444. The first limiting ring 445 is slidably sleeved on the outside of the corresponding linkage rod 441, and can abut against the limiting post 442. Multiple first springs 446 are provided, each sleeved on a linkage rod 441. The two ends of each first spring 446 abut against the drive shaft 42 and the first linkage block 443, respectively. A second linkage block 447 is slidably mounted on the first linkage block 443. The second linkage block 447 can slide to the side of the docking block 41. The second linkage block 447 can move closer to the drive shaft 42 and accelerate away from the docking block 41 by the assistance of the first linkage block 443. Specifically, both the upper and lower ends of the first linkage block 443 extend into arms towards the second linkage block 447, and each arm has a guide groove. Slider blocks are connected to the upper and lower ends of the second linkage block 447, and the sliders slide in cooperation with the corresponding guide grooves. When the first linkage block 443 approaches the inner wall of the mounting ring 24, the second linkage block 447 can accelerate towards the docking block 41.

[0062] In this embodiment, when the drive shaft 42 rotates, the first linkage block 443 rotates via the linkage rod 441. At this time, the second linkage block 447 slides on the first linkage block 443 to the side of the docking block 41 and remains stationary. Then, when the drive shaft 42 rotates, the second linkage block 447 drives the docking block 41 to rotate, thereby driving the corresponding mounting ring 24 and partition plate 30 to rotate. When the first linkage block 443 continues to rotate, the guide surface 48 on the first linkage block 443 abuts against the connecting rod 25, and the first linkage block 443 moves towards the drive shaft 42. At this time, the second linkage block 447 also moves towards the drive shaft 42. When the first linkage block 443 moves towards the drive shaft 42, its end is sufficient to pass over the connecting rod 25. At this time, the second linkage block 447 also moves backward to be sufficient to pass over the connecting rod 25. At this time, the corresponding docking block 41 moves into the space between the connecting blocks 26, while the previous docking block 41 has been pushed away. As the first linkage block 443 continues to rotate and passes the connecting block 26, under the action of the first spring 446, the first linkage block 443 moves away from the drive shaft 42 until the limiting ring abuts against the limiting post 442. At this time, the second linkage block 447 also moves away from the first linkage block 443 away from the drive shaft 42 and moves to the side of the docking block 41 that has just been pushed out from between the connecting blocks 26. As the first linkage block 443 rotates further, the second linkage block 447 drives the docking block 41 that has been pushed out to rotate.

[0063] In one embodiment, the linkage mechanism 44 further includes a mounting block 448, a first rack 449, a second rack 450, and a gear 451.

[0064] Mounting block 448 is fixedly connected to drive shaft 42. Mounting block 448 and first linkage block 443 are located on opposite sides of second linkage block 447. First rack 449 is radially mounted on the side of mounting block 448 facing second linkage block 447 along drive shaft 42. Second rack 450 is radially mounted on the side of second linkage block 447 facing mounting block 448 along drive shaft 42. Gear 451 is rotatably mounted on first linkage block 443, located between second linkage block 447 and mounting block 448, and meshes with first rack 449 and second rack 450 respectively. The axial length of gear 451 is adapted to first rack 449 and second rack 450.

[0065] In this embodiment, when the guide surface 48 of the first linkage block 443 abuts against the connecting rod 25, causing the first linkage block 443 to move backward and closer to the drive shaft 42, the first linkage block 443 drives the size to rotate on the first rack 449, thereby driving the second linkage block 447 to move further closer to the drive shaft 42 on the first linkage block 443. The second linkage block 447 moves faster than the first linkage block 443, thereby avoiding the second linkage block 447 abutting against the connecting rod 25 during the rotation of the drive shaft 42.

[0066] In one embodiment, a radially oriented third hole 27 is formed on the inner wall of the mounting ring 24. The third hole 27 has a rectangular cross-section, and the inner wall of the opening of the third hole 27 is connected to a second limiting ring 28. The mating block 41 passes through the second limiting ring 28 and is connected to a limiting block 46, which abuts against the second limiting ring 28. A second spring 47 is also provided inside the third hole 27. The two ends of the second spring 47 are respectively connected to the bottom of the third hole 27 and the limiting block 46. Three limiting notches 29 are formed on the connecting rod 25. The end of each mating block 41 away from the mounting ring 24 can be rotated and enters the limiting notch 29 from one side and abuts against the connecting rod 25. Each limiting notch 29 is located between two connecting blocks 26. The end face of the mounting block 448 facing the drive shaft 42 is an arc surface, and the inner surface of the limiting notch 29 consists of a plane and an arc surface.

[0067] In this embodiment, when the docking block 41 is rotated between two adjacent connecting blocks 26, under the action of the second spring 47, the docking block 41 abuts against the inner wall of the limiting notch 29 (the inner wall along the circumference of the drive shaft 42), that is, the end of the docking block 41 abuts against the arc surface of the limiting notch 29, thereby limiting the docking block 41 at this point. When the next partition 30 rotates to this point, the arc-shaped push block pushes the docking block 41 to move along the arc surface of the limiting notch 29, the second spring 47 is compressed, and the docking block 41 moves into the third hole 27, thereby allowing the docking block 41 to move past the connecting rod 25 from the inside. At this time, the docking block 41 can wait for the rotating second linkage block 447 to move to its side and push it, thereby realizing the connection between the docking block 41 and the linkage mechanism 44.

[0068] With the above-mentioned configuration, this device discharges heated aerosol from the outlet 13 while simultaneously introducing unheated aerosol through the inlet 12 for uniform heating, facilitating continuous operation of subsequent nozzles.

[0069] This embodiment provides a coating deposition apparatus, including any of the above-mentioned aerosol dispersion devices.

[0070] Numerous specific details are set forth in this specification. However, it will be understood that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be covered within the scope of the claims and specification of the present invention.

Claims

1. An aerosol dispersion device based on microwave-induced heating, characterized in that, include: The tank (10) has a heating chamber (11), and the tank (10) has an inlet (12) and an outlet (13) communicating with the heating chamber (11). The tank (10) also has a microwave feed inlet (14). A microwave generator, the output end of which is located inside the microwave feed inlet (14), and the microwave generator emits microwaves into the heating cavity (11) through the microwave feed inlet (14); The inlet (12) and outlet (13) are arranged symmetrically; the inlet (12) and outlet (13) can allow aerosols to enter and exit.

2. The aerosol dispersion device based on microwave-induced heating as described in claim 1, characterized in that, The tank (10) includes: Base plate (15); An annular enclosure (16), the lower end of which is connected to the base plate (15); and Top plate (17), which is connected to the upper end of the annular surrounding plate (16); The aerosol dispersion device further includes: A support column (20) is coaxially disposed at the center of the annular surrounding plate (16). The support column (20), together with the bottom plate (15), the top plate (17) and the annular surrounding plate (16), forms the annular heating cavity (11). A partition (30) is provided, wherein three partitions (30) are provided, the ends of the three partitions (30) are all connected to the support column (20), the partitions (30) are rotatable about the axis of the support column (20), the partitions (30) divide the annular heating cavity (11) circumferentially, and arc-shaped push plates (31) extending axially along the support column (20) are connected to the partitions (30), and adjacent arc-shaped push plates (31) can abut against each other; and A drive mechanism (40) is provided for driving the partition (30) to rotate. The annular heating chamber (11) has an exhaust position; the exhaust position is located on one side of the discharge port (13); one of the partitions (30) is located at the exhaust position and remains stationary, while the other two partitions (30) are symmetrically distributed on both sides of the support column (20) radially when rotated under the drive of the drive mechanism (40); when the drive mechanism (40) drives the two partitions (30) to rotate, one of the partitions (30) pushes away from the partition (30) at the exhaust position and occupies the exhaust position and remains stationary, while the drive mechanism (40) drives the partition (30) at the original exhaust position to start rotating again.

3. The aerosol dispersion device based on microwave-induced heating as described in claim 2, characterized in that, The support column (20) includes: Top ring (21), which is fixedly connected to the top plate (17); Bottom ring (22), the bottom ring (22) is coaxial with the top ring (21), and the bottom ring (22) is fixedly connected to the bottom plate (15); Support ring (23), two support rings (23) are provided, both support rings (23) are coaxial with the top ring (21), and the two support rings (23) are located between the top ring (21) and the bottom ring (22); Mounting ring (24), three mounting rings (24) are coaxially arranged. One mounting ring (24) is rotatably arranged between two support rings (23), and the other two mounting rings (24) are rotatably arranged between the top ring (21) and the support ring (23) and between the bottom ring (22) and the support ring (23), respectively. A connecting rod (25) extending axially along the top ring (21) and located inside the support ring (23); and Connecting blocks (26), four of which are provided. One end of each of the four connecting blocks (26) is fixedly connected to the connecting rod (25), and the other end of each of the four connecting blocks (26) is fixedly connected to the top ring (21), the two support rings (23) and the bottom ring (22) respectively. The three partitions (30) are respectively fixedly connected to the outer walls of the three mounting rings (24).

4. The aerosol dispersion device based on microwave-induced heating as described in claim 3, characterized in that, The top plate (17) has a through hole (18); The drive mechanism (40) includes: The docking block (41) is provided in three parts, and the three docking blocks (41) are respectively provided on the inner wall of the three mounting rings (24). The docking block (41) can be moved laterally between the adjacent connecting blocks (26). A drive shaft (42) is coaxially rotatably disposed within the first hole (18); A motor (43) is mounted on the top plate (17), and the output end of the motor (43) is connected to the drive shaft (42); and The linkage mechanism (44) is provided in two parts. The two linkage mechanisms (44) are centrally symmetrically distributed with the axis of the drive shaft (42) as the center. The linkage mechanism (44) can be connected or separated from the corresponding docking block (41).

5. The aerosol dispersion device based on microwave-induced heating as described in claim 4, characterized in that, The linkage mechanism (44) includes: Linkage rod (441), multiple linkage rods (441) are provided, and one end of the linkage rod (441) is connected to the drive shaft (42); Limiting post (442), multiple limiting posts (442) are provided, and the limiting posts (442) are connected to the corresponding linkage rods (441); The first linkage block (443) has a length direction that is the same as the axial direction of the drive shaft (42). The first linkage block (443) has a plurality of second holes (444) distributed along its length direction, and the inner wall of the second hole (444) slides with the corresponding limiting post (442). The end of the first linkage block (443) away from the drive block has an inclined guide surface (48), and the guide surface (48) can abut against the connecting rod (25) to drive the first linkage block (443) to approach the drive shaft (42). The first limiting ring (445) is provided in multiple ways. The first limiting ring (445) is connected to the inner wall of the opening of the second hole (444). The first limiting ring (445) is slidably sleeved on the corresponding linkage rod (441). The first limiting ring (445) can abut against the limiting post (442). A first spring (446), of which multiple springs (446) are provided, is sleeved on the linkage rod (441) and its two ends abut against the drive shaft (42) and the first linkage block (443) respectively; and The second linkage block (447) is slidably disposed on the first linkage block (443). The second linkage block (447) can slide to the side of the docking block (41). The second linkage block (447) can accelerate away from the docking block (41) by moving closer to the drive shaft (42) with the help of the first linkage block (443).

6. The aerosol dispersion device based on microwave-induced heating as described in claim 5, characterized in that, The linkage mechanism (44) also includes: Mounting block (448), which is fixedly connected to the drive shaft (42), and the mounting block (448) and the first linkage block (443) are respectively located on both sides of the second linkage block (447); The first rack (449) is radially laid along the drive shaft (42) on one side of the mounting block (448) facing the second linkage block (447); The second rack (450) is radially laid along the drive shaft (42) on the side of the second linkage block (447) facing the mounting block (448); and Gear (451), which is rotatably mounted on the first linkage block (443), is located between the second linkage block (447) and the mounting block (448), and meshes with the first rack (449) and the second rack (450) respectively.

7. The aerosol dispersion device based on microwave-induced heating as described in claim 6, characterized in that, The inner wall of the mounting ring (24) is provided with a radial third hole (27); the inner wall of the opening of the third hole (27) is connected to a second limiting ring (28); the docking block (41) passes through the second limiting ring (28) and is connected to a limiting block (46); the limiting block (46) can abut against the second limiting ring (28); a second spring (47) is also provided in the third hole (27); the two ends of the second spring (47) are respectively connected to the bottom of the third hole (27) and the limiting block (46); three limiting notches (29) are provided on the connecting rod (25); the end of each docking block (41) away from the mounting ring (24) can be rotated and enter the limiting notch (29) from one side and abut against the connecting rod (25).

8. A coating deposition apparatus, characterized in that, Includes the aerosol dispersion device according to any one of claims 1-7.

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