Cooling structure of a crucible rotation mechanism

Abstract

The application discloses a kind of cooling structures of crucible rotary mechanism, it is related to vacuum evaporation machine technical field, including mounting frame, the rotating shaft is rotationally connected on the mounting frame, and the upper end of rotating shaft is provided with crucible body, and the side of crucible body is connected with water inlet pipe and drain pipe, and water inlet pipe is located in the lower side of drain pipe, the inside of rotating shaft and between crucible body is provided with backflow cooling structure.The cooling structure of the crucible rotary mechanism, when cooling water body flows into cooling cavity, will impact water wheel and drive rotating rod to rotate, drive linkage shaft to rotate by the meshing transmission of first bevel gear and second bevel gear, linkage shaft drives linkage roller to rotate, linkage roller in rotating process, the contact piece on linkage roller will periodically contact the contact wheel on connecting plate, so that connecting plate drives spoiler to reciprocate, and the cooling water body is disturbed, the contact area of water body and crucible body inner wall and internal evaporation material is increased, and the cooling effect is improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum evaporation equipment technology, specifically to a cooling structure for a crucible rotation mechanism. Background Technology

[0002] Evaporation machines are mainly used to deposit thin films on substrates. The material is evaporated by heating the evaporation source (usually a crucible), and then condensed onto the substrate surface in a vacuum environment. The crucible rotation mechanism is used to make the crucible rotate evenly to ensure that the evaporated material is evenly distributed. The cooling system is used to control the crucible temperature and prevent overheating. Traditional cooling structures are not efficient enough, resulting in unstable temperature control, which affects the coating quality. In addition, unreasonable cooling channel design leads to thermal stress concentration, which affects the life of the equipment.

[0003] Prior art 1 (Chinese patent CN219385299U, published on 2023-07-21) discloses a crucible with a water-cooling structure, comprising a crucible base, a bottom cover, a partition, and a rotating shaft. The upper surface of the crucible base has a crucible groove, within which the crucible body is installed. A sealing ring is provided between the bottom cover and the crucible base, and the bottom cover and crucible base are fixedly connected to form a sealed cavity. The partition is disposed within this cavity, dividing the cavity into a water inlet section. The system includes a water inlet chamber and a water outlet chamber. A spiral flow channel wall is provided within the water inlet chamber, and a cooling flow channel is formed between two adjacent flow channel walls. The rotating shaft includes a rotating shaft sleeve and a water inlet pipe. An annular water outlet channel is formed between the rotating shaft sleeve and the water inlet pipe, and this water outlet channel is connected to the water outlet chamber. The water inlet pipe is connected to the water inlet chamber. This system features a simple structure, reasonable design, and convenient operation. It can quickly dissipate heat from multiple crucible bodies simultaneously, achieving high heat dissipation efficiency and effectively improving the efficiency of vacuum coating.

[0004] There is also a prior art (Chinese patent CN214747283U, published on 2021-11-16) of a crucible water cooling mechanism, belonging to the field of vacuum coating technology. It includes a water cooling component, which is set outside the processing hole of the crucible base for supplying water to cool the crucible base at the processing hole; and a connector, which is set at both ends of the water cooling component for introducing water from one end of the water cooling component and exporting it from the other end. By setting the water cooling component and the connector on the crucible base and cooperating with it, water is introduced into the crucible base through the connector, heated by the crucible base and then exported, that is, some heat is carried away by the water. This process is repeated to form continuous water cooling of the crucible base, ensuring the efficient and stable operation of the crucible.

[0005] While existing technologies can perform continuous water cooling operations, the distribution of water is limited, which cannot provide comprehensive and uniform cooling of the crucible body. This can easily lead to excessively high local temperatures, affecting the cooling effect and coating quality.

[0006] Therefore, we propose a cooling structure for the crucible rotation mechanism to solve the problems mentioned above. Summary of the Invention

[0007] The purpose of this invention is to provide a cooling structure for a crucible rotation mechanism to solve the problem mentioned in the background art that the distribution range of water in the current market is limited, which cannot cool the crucible body comprehensively and uniformly, easily causing local overheating and affecting the cooling effect and coating quality.

[0008] To achieve the above objectives, the present invention provides the following technical solution: a cooling structure for a crucible rotation mechanism, comprising a mounting frame, a rotating shaft rotatably connected to the mounting frame, a crucible body being disposed at the upper end of the rotating shaft, and a water inlet pipe and a water outlet pipe being connected to the side of the crucible body, with the water inlet pipe located below the water outlet pipe; a reflux cooling structure being disposed between the interior of the rotating shaft and the crucible body, the reflux cooling structure conveying cooling water through its included conveying pipe; a partition plate being fixedly connected to the inner cavity of the crucible body, and a flow-turbulence mechanism being disposed on the upper surface of the partition plate; the flow-turbulence mechanism driving the flow-turbulence plate to reciprocate and swing through the flow of cooling water, thereby achieving flow turbulence treatment of the water.

[0009] Preferably, the reflux cooling structure includes a reflux channel, which is located in the middle of the rotating shaft. The conveying pipe is fixedly connected to the center of the partition plate and is located at the center of the reflux channel. The upper output end of the conveying pipe is located above the partition plate.

[0010] Preferably, a water inlet and a drain hole are provided below the rotating shaft, the return channel is connected to the drain pipe through the drain hole, the water inlet is connected to the water inlet pipe, and the drain hole is connected to the drain pipe. The lower output end of the conveying pipe is located at the drain hole.

[0011] Preferably, the partition plate divides the inner cavity of the crucible body into upper and lower cavities, with the upper cavity being a cooling cavity and the lower cavity being a reflux cavity, and the partition plate has reflux holes on its side for water flow.

[0012] Preferably, the return channel is connected to the return cavity, and the return cavity is connected to the cooling cavity through the return hole. The cavity at the upper end of the conveying pipe is arranged in a trapezoidal structure with a narrow top and a wide bottom in cross-section, and the conveyed cooling water is guided by the trapezoidal groove.

[0013] Preferably, the turbulence-disrupting mechanism includes guide plates, which are arranged in a ring array about the center point of the partition plate, and guide plates are provided on both the upper and lower sides of the partition plate. The guide plates are arranged in an "L" shape when viewed from the side, and guide and diffuse the cooling water through the guide plates to expand the dispersion range of the cooling water.

[0014] Preferably, the turbulence mechanism further includes a rotating rod, which is rotatably mounted on the inner cavity of the crucible body and located at the center of the reflux hole. A water wheel is fixedly connected to the outer side of the rotating rod, and the water wheel drives the rotating rod to rotate under the impact of the cooling water.

[0015] Preferably, a linkage shaft is rotatably connected to the upper surface of the partition plate, and a second bevel gear is fixedly connected to one end of the linkage shaft. A first bevel gear is rotatably connected to the upper side of the rotating rod, and the first bevel gear and the second bevel gear mesh with each other. A linkage roller is fixedly connected to the other end of the linkage shaft, and an abutment piece is fixedly connected to the outer side of the linkage roller. The abutment piece is arranged with an inclined structure on both sides.

[0016] Preferably, a connecting plate is rotatably connected to the partition plate, and a torsion spring is provided between the lower surface of the connecting plate and the partition plate. A contact wheel is rotatably connected to the side of the connecting plate near the linkage roller, and a turbulence plate with turbulence holes is fixedly connected to the upper surface of the other side of the connecting plate.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] (1) A conveying pipe is set up to realize the directional conveying of cooling water inside the crucible body, so that the cooling water is conveyed to the cooling cavity set above the partition plate. At the same time, when the cooling water is conveyed to the cooling cavity through the conveying pipe, the water first contacts the tank that is narrow at the top and wide at the bottom. Through the guiding effect of the tank, the cooling water can be more evenly and smoothly dispersed into the cooling cavity, thereby improving the cooling efficiency.

[0019] (2) A guide plate is provided on the partition plate. The guide plate further guides and diffuses the cooling water flowing into the cooling cavity. Since the guide plate has an "L" shaped structure and is distributed in a ring array on the upper and lower sides of the partition plate, the cooling water will change its flow direction along the shape of the guide plate after contacting it. This not only expands the dispersion range of the cooling water in the cooling cavity, so that all parts in the cooling cavity can be more evenly affected by the cooling water, but also enhances the heat exchange effect between the cooling water and the inner wall of the crucible and the internal evaporation material. This further improves the cooling capacity of the cooling structure for the crucible and effectively avoids the problem of affecting the uniform distribution of the evaporation material and the coating quality due to excessively high local temperature.

[0020] (3) A reflux hole is provided on the cooling chamber. After the cooling water is cooled, it flows into the reflux chamber through the reflux hole and then into the reflux channel through the reflux chamber until it is discharged to the drain pipe through the drain hole, realizing the circulation of the water. The cooling water can continuously cool the crucible body, ensuring the stability and durability of the cooling effect. At the same time, the setting of the reflux hole, reflux chamber and reflux channel also optimizes the flow path of the cooling water, reduces the resistance of the water flow and improves the overall efficiency of the cooling system.

[0021] (4) The setting of the turbulence mechanism further enhances the cooling effect. When the cooling water flows into the cooling cavity, it will impact the water wheel and drive the rotating rod to rotate. Then, through the meshing transmission of the first bevel gear and the second bevel gear, the linkage shaft will rotate. The linkage shaft drives the linkage roller to rotate. During the rotation of the linkage roller, the contact plate on the linkage roller will periodically contact the contact wheel on the connecting plate, so that the connecting plate drives the turbulence plate to swing back and forth, turbulent the cooling water, increasing the contact area between the water and the inner wall of the crucible body and the internal evaporation material, thus improving the cooling effect.

[0022] (5) The turbulence plate is provided with turbulence holes, which further turbulentize the water body, break the laminar flow state of the water body, form more turbulence, improve the heat exchange efficiency, and the cooling structure can automatically adjust the turbulence intensity according to the flow of the cooling water body, thereby improving the cooling efficiency. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0024] Figure 2 This is a schematic diagram of the three-dimensional structure of the crucible body of the present invention;

[0025] Figure 3 This is a three-dimensional cross-sectional view of the present invention;

[0026] Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A in the middle;

[0027] Figure 5 For the present invention Figure 3 Enlarged structural diagram at point B;

[0028] Figure 6 This is a three-dimensional cross-sectional view of the crucible body of the present invention;

[0029] Figure 7 This is a schematic diagram of the three-dimensional structure of the partition plate of the present invention;

[0030] Figure 8 This is a schematic diagram of the three-dimensional structure of the spoiler of the present invention;

[0031] Figure 9 For the present invention Figure 6 Enlarged structural diagram at point C.

[0032] In the diagram: 1. Mounting frame; 2. Crucible body; 3. Water inlet pipe; 4. Drain pipe; 5. Rotating shaft; 6. Conveying pipe; 7. Return channel; 8. Return cavity; 9. Guide plate; 10. Divider plate; 11. Cooling cavity; 12. Water inlet hole; 13. Drain hole; 14. Return hole; 15. Baffle plate; 16. Baffle hole; 17. Water wheel; 18. Rotating rod; 19. First bevel gear; 20. Second bevel gear; 21. Abutting wheel; 22. Connecting plate; 23. Linkage shaft; 24. Linkage roller; 25. Abutting plate. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] Example 1: As Figures 1-5 The present invention provides the following technical solution: a cooling structure for a crucible rotation mechanism, wherein a rotating shaft 5 is rotatably connected to a mounting frame 1, and a crucible body 2 is provided at the upper end of the rotating shaft 5. A water inlet pipe 3 and a water outlet pipe 4 are connected to the side of the crucible body 2, with the water inlet pipe 3 located below the water outlet pipe 4. The reflux cooling structure includes a reflux channel 7, which is located in the middle of the rotating shaft 5. A conveying pipe 6 is fixedly connected to the center of a partition plate 10, and is located at the center of the reflux channel 7. The upper output end of the conveying pipe 6 is located above the partition plate 10. A water inlet hole 12 and a water outlet hole 13 are provided below the rotating shaft 5. 7 is connected to the drain pipe 4 through the drain hole 13, and the water inlet hole 12 is connected to the water inlet pipe 3. At the same time, the drain hole 13 is connected to the drain pipe 4. The lower output end of the conveying pipe 6 is located at the drain hole 13. The partition plate 10 divides the inner cavity of the crucible body 2 into upper and lower cavities. The upper cavity is the cooling cavity 11, and the lower cavity is the return cavity 8. The partition plate 10 has a return hole 14 for water flow on its side. The return channel 7 is connected to the return cavity 8, and the return cavity 8 is connected to the cooling cavity 11 through the return hole 14. The cavity at the upper end of the conveying pipe 6 is set in a trapezoidal structure with a narrow upper part and a wide lower part in cross-section. The cooling water is guided by the trapezoidal groove.

[0035] To improve the cooling efficiency of the crucible body 2, a conveying pipe 6 is provided. The conveying pipe 6 serves as a channel for the directional delivery of cooling water. During system operation, the cooling water is precisely delivered through the conveying pipe 6 to the cooling cavity 11 designed above the partition plate 10. When the cooling water arrives at the entrance area of ​​the cooling cavity 11 along the conveying pipe 6, it will first come into contact with a special trough structure that is narrow at the top and wide at the bottom. The trough guides the cooling water, allowing it to be distributed more evenly and smoothly into all corners of the cooling cavity 11. This greatly increases the contact area between the cooling water and the inner wall of the cooling cavity 11, enabling heat to be transferred from the crucible body 2 to the cooling water more quickly and efficiently, and then the heat is carried away through the circulation of the cooling water.

[0036] A return hole 14 is provided on the cooling chamber 11. After the cooling water completes its heat absorption and cooling mission on the crucible body 2 in the cooling chamber 11, it flows into the connected return chamber 8 through the return hole 14 by its own gravity and the pressure difference in the system. The return chamber 8 performs preliminary sorting and guidance of the water. The cooling water flowing out of the return chamber 8 then flows into the return channel 7. The return channel 7 is precisely discharged to the drain pipe 4 through the drain hole 13, thereby realizing the continuous circulation and renewal of the water. This allows the cooling water to always maintain a low temperature and good cooling capacity, thereby continuously cooling the crucible body 2. This provides a solid and reliable guarantee for the stable operation of the crucible body 2 and ensures the stability and durability of the cooling effect.

[0037] Example 2: Figure 3 , Figure 6 and Figure 7 The present invention provides the following technical solution: a cooling structure for a crucible rotation mechanism, wherein a reflux cooling structure is provided between the interior of the rotating shaft 5 and the crucible body 2, the reflux cooling structure conveys cooling water through the conveying pipe 6 included therein, a partition plate 10 is fixedly connected to the inner cavity of the crucible body 2, and a turbulence mechanism is provided on the upper surface of the partition plate 10, the turbulence mechanism drives the turbulence plate 15 to reciprocate through the flow of cooling water, thereby achieving turbulence treatment of the water, the turbulence mechanism includes a guide plate 9, the guide plates 9 are arranged in a ring array about the center point of the partition plate 10, and the guide plates 9 are provided on both the upper and lower sides of the partition plate 10, and the guide plates 9 are arranged in an "L" shape in side view, and the cooling water is guided and diffused through the guide plates 9 to expand the dispersion range of the cooling water.

[0038] A guide plate 9 is provided on the partition plate 10. The guide plate 9 further guides and diffuses the cooling water flowing into the cooling cavity 11. The guide plate 9 adopts an "L" shape and is distributed in a ring array on the upper and lower sides of the partition plate 10. When the cooling water rushes into the cooling cavity 11 like a turbulent stream, it will come into contact with the guide plate 9 immediately, causing the original straight flow trajectory along the guide plate 9 to change and spread out in a fan shape in all directions. This greatly expands the dispersion range of the cooling water in the cooling cavity 11. Under the action of the guide plate 9, the cooling water is evenly spread in all corners of the cooling cavity 11, so that every part in the cooling cavity 11 can be more fully and evenly affected by the cooling water, further improving the cooling capacity of the cooling structure for the crucible.

[0039] Example 3: Figure 7 , Figure 8 and Figure 9 The present invention provides the following technical solution: a cooling structure for a crucible rotation mechanism, wherein the turbulence mechanism further includes a rotating rod 18, which is rotatably disposed on the inner cavity of the crucible body 2 and located at the center of the return hole 14. A water wheel 17 is fixedly connected to the outer side of the rotating rod 18, and the water wheel 17 drives the rotating rod 18 to rotate under the impact of the cooling water. A linkage shaft 23 is rotatably connected to the upper surface of the partition plate 10, and a second bevel gear 20 is fixedly connected to one end of the linkage shaft 23. A second bevel gear 20 is rotatably connected to the upper side of the rotating rod 18. A bevel gear 19 is provided, and the first bevel gear 19 meshes with the second bevel gear 20. The other end of the linkage shaft 23 is fixedly connected to the linkage roller 24, and the outer side of the linkage roller 24 is fixedly connected to the abutment piece 25. The two sides of the abutment piece 25 are arranged in an inclined structure. A connecting plate 22 is rotatably connected to the partition plate 10, and a torsion spring is provided between the lower surface of the connecting plate 22 and the partition plate 10. An abutment wheel 21 is rotatably connected to the side of the connecting plate 22 near the linkage roller 24, and a baffle plate 15 with baffle holes 16 is fixedly connected to the upper surface of the other side of the connecting plate 22.

[0040] When cooling water flows into the cooling chamber 11, it impacts the water wheel 17 with a certain force, causing the water wheel 17 to drive the connected rotating rod 18 to rotate. The rotating rod 18, through the precise meshing of the first bevel gear 19 and the second bevel gear 20, cleverly transmits the rotational power to the linkage shaft 23, causing the linkage shaft 23 to also start rotating. The linkage shaft 23 drives the linkage roller 24 to rotate synchronously. During the rotation of the linkage roller 24, the contact plate 25 set on it periodically contacts the contact wheel 21 on the connecting plate 22, giving the connecting plate 22 a force. The contact force and the elastic force of the torsion spring work together to cause the connecting plate 22 to drive the baffle 15 to move. The reciprocating oscillation of the baffle 15 can turbulentize the cooling water, greatly increasing the contact area between the water and the inner wall of the crucible body 2 and the internal evaporation material. Under the action of the baffle 15, the water has more thorough and frequent contact with the crucible body 2 and the evaporation material, allowing heat to be transferred more quickly from the crucible body 2 and the evaporation material to the cooling water, thereby improving the cooling effect. The baffle 15 has turbulence holes 16. When the cooling water flows through the baffle 15, it will further turbulentize the water through the turbulence holes 16, creating more turbulence in the water, making the heat transfer inside the water more intense and efficient, greatly improving the heat exchange efficiency, and making the cooling process faster and more thorough.

[0041] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A cooling structure for a crucible rotation mechanism, comprising a mounting frame (1), wherein a rotating shaft (5) is rotatably connected to the mounting frame (1), and a crucible body (2) is disposed at the upper end of the rotating shaft (5), and a water inlet pipe (3) and a water outlet pipe (4) are connected to the side of the crucible body (2), and the water inlet pipe (3) is located below the water outlet pipe (4), characterized in that, A reflux cooling structure is provided between the interior of the rotating shaft (5) and the crucible body (2). The reflux cooling structure conveys cooling water through the conveying pipe (6) it contains. A partition plate (10) is fixedly connected to the inner cavity of the crucible body (2), and a turbulence mechanism is provided on the upper surface of the partition plate (10). The turbulence mechanism drives the turbulence plate (15) to swing back and forth through the flow of cooling water to achieve turbulence treatment of the water. The turbulence mechanism includes a guide plate (9), which is arranged in a ring array about the center point of the partition plate (10). The guide plate (9) is arranged on both the upper and lower sides of the partition plate (10). The guide plate (9) is arranged in an "L" shape when viewed from the side. The guide plate (9) guides and diffuses the cooling water, expanding the dispersion range of the cooling water. The turbulence mechanism also includes a rotating rod (18), which is rotatably mounted on the inner cavity of the crucible body (2), and the rotating rod (18) is located at the center of the return hole (14). A water wheel (17) is fixedly connected to the outside of the rotating rod (18), and the water wheel (17) drives the rotating rod (18) to rotate under the impact of the cooling water. The upper surface of the partition plate (10) is rotatably connected to a linkage shaft (23), and one end of the linkage shaft (23) is fixedly connected to a second bevel gear (20). The upper side of the rotating rod (18) is rotatably connected to a first bevel gear (19), and the first bevel gear (19) and the second bevel gear (20) mesh with each other. The other end of the linkage shaft (23) is fixedly connected to a linkage roller (24), and the outer side of the linkage roller (24) is fixedly connected to an abutment piece (25). At the same time, the two sides of the abutment piece (25) are arranged in an inclined structure. A connecting plate (22) is rotatably connected to the partition plate (10), and a torsion spring is provided between the lower surface of the connecting plate (22) and the partition plate (10). A contact wheel (21) is rotatably connected to the side of the connecting plate (22) near the linkage roller (24), and a baffle plate (15) with baffle holes (16) is fixedly connected to the upper surface of the other side of the connecting plate (22).

2. The cooling structure of the crucible rotation mechanism according to claim 1, characterized in that: The reflux cooling structure includes a reflux channel (7), which is located in the middle of the rotating shaft (5). The conveying pipe (6) is fixedly connected to the center of the partition plate (10), and the conveying pipe (6) is located at the center of the reflux channel (7), with the upper output end of the conveying pipe (6) located above the partition plate (10).

3. The cooling structure of the crucible rotation mechanism according to claim 2, characterized in that: The rotating shaft (5) has an inlet hole (12) and a drain hole (13) below it. The return channel (7) is connected to the drain pipe (4) through the drain hole (13). The inlet hole (12) is connected to the inlet pipe (3), and the drain hole (13) is connected to the drain pipe (4). The lower output end of the conveying pipe (6) is located at the drain hole (13).

4. The cooling structure of the crucible rotation mechanism according to claim 3, characterized in that: The partition plate (10) divides the inner cavity of the crucible body (2) into upper and lower cavities, with the upper cavity being a cooling cavity (11) and the lower cavity being a reflux cavity (8). The partition plate (10) has reflux holes (14) for water flow on its side.

5. The cooling structure of the crucible rotation mechanism according to claim 4, characterized in that: The return channel (7) is connected to the return cavity (8), and the return cavity (8) is connected to the cooling cavity (11) through the return hole (14). The cavity at the upper end of the conveying pipe (6) is set in a trapezoidal structure with a narrow top and a wide bottom, and the cooling water is guided by the trapezoidal groove.

Images