Micro interdigital supercapacitor manufacturing process based on optical flow control femtosecond laser 4D printing

Abstract

The invention provides a micro interdigital supercapacitor manufacturing process based on optical flow control femtosecond laser 4D printing, and relates to the technical field of micro energy storage and advanced manufacturing, comprising: processing a micro-channel network on a silicon-based substrate, the micro-channel network comprising a sheath flow channel and a core flow channel, and constructing hydrophobic layers on the surfaces of the sheath flow channel and the core flow channel to form a micro-channel structure. According to the manufacturing process of the miniature interdigital supercapacitor based on optical flow control femtosecond laser 4D printing, the manufacturing of the miniature interdigital supercapacitor is successfully realized by processing a micro-channel network on a silicon-based substrate and combining a femtosecond laser 4D printing technology and a shape memory effect. Quantum dots and shape memory epoxy resin are mixed to form a composite filler, and two-photon polymerization curing induced by femtosecond laser is carried out to accurately construct an interdigital electrode framework, so that high performance and reversible deformation characteristics of the capacitor are ensured.

Description

Technical Field

[0001] This invention relates to the field of micro energy storage and advanced manufacturing technology, specifically to a manufacturing process for micro interdigitated supercapacitors based on optofluidic femtosecond laser 4D printing. Background Technology

[0002] With the increasing application of the Internet of Things (IoT), wearable electronic devices, and micro-sensors, higher demands are being placed on energy storage devices with miniaturization, high power density, and long cycle life. Supercapacitors, due to their fast charging and discharging speeds and good cycle stability, have attracted attention in micro-energy supply. Current methods for fabricating micro-supercapacitors mainly include photolithography, inkjet printing, and chemical vapor deposition (CVD). Photolithography can obtain high-resolution electrodes, but the process is complex, relies on masks, and has limited flexibility; inkjet printing offers some flexibility, but its resolution is limited by the printhead and ink characteristics, making it difficult to form micro / nano structures; CVD can obtain dense thin films, but it has long cycles, high costs, and is difficult to adapt to diverse substrates. In recent years, femtosecond laser processing, due to its extremely short pulse width and high peak power, has been used in the manufacture of microelectronics and energy storage devices. This technology can achieve high-precision structure construction on material surfaces through non-thermal effects, avoiding macroscopic thermal influences. Based on this, optofluidic femtosecond laser printing does not rely on masks, has flexible processes, strong adaptability, and can directly construct interdigitated electrode structures on various substrates. Related research has utilized laser etching, laser reduction, and laser-induced carbonization to prepare highly conductive electrodes, and combined them with three-dimensional stacking technology to form porous structures, providing a new method for improving the specific surface area of ​​electrodes and electrolyte wettability.

[0003] Existing technologies generally suffer from complex processes and insufficient structural consistency, making it difficult to balance microstructure precision and batch stability. The core challenge lies in the fact that micro-interdigitated supercapacitors are highly dependent on electrode geometry, while existing processes struggle to maintain overall stability while ensuring high resolution. This problem is even more pronounced in flexible electronics applications, becoming a key factor restricting development. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a manufacturing process for micro-interdigitated supercapacitors based on optofluidic femtosecond laser 4D printing. The technical problem this invention aims to solve is: how to address the issues of precision control and performance optimization of micro-interdigitated supercapacitors through optofluidic femtosecond laser 4D printing.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a manufacturing process for a micro-interdigital supercapacitor based on optofluidic femtosecond laser 4D printing, comprising: S1. A microchannel network is fabricated on a silicon substrate, the microchannel network including sheath flow channels and core flow channels, and a hydrophobic layer is constructed on the surface of the sheath flow channels and the core flow channels to form a microchannel structure; S2. Surface-modified quantum dots are mixed with shape memory epoxy resin and injected into the core flow channel to form a composite filler. The composite filler is cured by femtosecond laser-induced two-photon polymerization to form a cured composite structure. S3. Femtosecond laser 4D printing technology is used to write interdigitated electrodes into the solidified composite structure to form an interdigitated electrode skeleton; S4. Apply near-infrared laser to the interdigitated electrode skeleton to trigger shape memory effect to obtain a reversible deformable electrode; S5. MXene nanosheets are deposited on the surface of the reversible deformable electrode and ion transport channels are constructed through the deposition liquid to form an MXene functionalized electrode. The MXene functionalized electrode is then encapsulated with an electrolyte to obtain a micro interdigitated supercapacitor.

[0006] Preferably, the sheath flow channel is 200 μm wide, the core flow channel is 50 μm wide, the sheath flow channel and the core flow channel are obtained by reactive ion etching, the etching gas of the reactive ion etching is a mixture of sulfur hexafluoride and carbon tetrafluoride, the etching depth of the reactive ion etching is 50 μm ± 1 μm, the sidewall perpendicularity is ≥ 89°, the flow ratio of sulfur hexafluoride to carbon tetrafluoride is 3:1, the hydrophobic layer is a perfluorosilane hydrophobic layer, and the contact angle of the perfluorosilane hydrophobic layer is ≥ 150°.

[0007] Preferably, the quantum dots are CdSe core-ZnS shell quantum dots with a particle size of 5 nm, and the quantum dots are mixed with the shape memory epoxy resin at a ratio of 0.2 wt%.

[0008] Preferably, the threshold energy of the two-photon polymerization is ≤0.5nJ and the curing resolution is ≤1μm to ensure the molding accuracy of the composite structure at the micro-nano scale.

[0009] Preferably, the femtosecond laser 4D printing technology uses a laser wavelength of 1030nm, a pulse width of 200fs, a power of 80mW, and a scanning speed of 10mm / s.

[0010] Preferably, the geometric parameters of the interdigital electrode skeleton include a finger width of 3.0±0.1μm, a finger spacing of 1.5±0.1μm, a height of 15±0.5μm, and an aspect ratio of 5:1; the near-infrared laser wavelength is 808nm; and the deformation response time of the shape memory effect is ≤0.5s, with a curvature control accuracy of ±0.1. The shape memory effect exhibits reversible deformation cycles exceeding [number] under 405nm excitation light. .

[0011] Preferably, the MXene nanosheets are The The lateral dimension is ≤500nm, and the deposition solution includes MXene dispersion and lithium chloride electrolyte, wherein the concentration of MXene dispersion is 0.5mg / mL and the concentration of lithium chloride electrolyte is 0.1M.

[0012] Preferably, the micro interdigitated supercapacitor has an areal capacitance ≥ 80 mF / cm² and an energy density ≥ 15 μWh / cm², and the frequency response of the micro interdigitated supercapacitor meets the IEC 62391-1 standard.

[0013] This invention provides a manufacturing process for miniature interdigitated supercapacitors based on optofluidic femtosecond laser 4D printing. It offers the following advantages: This fabrication process for micro-interdigital supercapacitors based on optofluidic femtosecond laser 4D printing successfully achieved the fabrication of micro-interdigital supercapacitors by processing a microchannel network on a silicon substrate and combining femtosecond laser 4D printing technology with the shape memory effect. By mixing quantum dots with shape memory epoxy resin to form a composite filler, and then curing it through femtosecond laser-induced two-photon polymerization, the interdigital electrode framework was precisely constructed, thus ensuring the capacitor's high performance and reversible deformation characteristics.

[0014] By employing femtosecond laser 4D printing technology and near-infrared laser-triggered shape memory effect, an electrode structure with excellent reversible deformation capability was successfully realized, thereby significantly improving the performance of the capacitor. Furthermore, the deposition of MXene nanosheets on the surface and the construction of ion transport channels greatly enhanced the electrode function, effectively improving the capacitance and energy density of the capacitor, while simultaneously meeting the technical requirements for high-frequency response. Attached Figure Description

[0015] Figure 1 It is a process flow diagram for realizing an invention; Figure 2 This is a flowchart illustrating the fabrication process of an optical fluidic chip that realizes the invention. Figure 3 This is a flowchart illustrating the process of filling a quantum dot-resin composite to realize the invention. Figure 4 This is a flowchart of a femtosecond laser 4D printing process for realizing an invention. Detailed Implementation

[0016] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] Example 1 like Figure 1-4 As shown, this embodiment of the invention provides a manufacturing process for a micro-interdigitated supercapacitor based on optofluidic femtosecond laser 4D printing, including: S1. Fabricating a microchannel network on a silicon substrate. The microchannel network includes sheath flow channels and core flow channels. A hydrophobic layer is constructed on the surface of the sheath flow channels and core flow channels to form the microchannel structure. The sheath flow channels are 200 μm wide, and the core flow channels are 50 μm wide. The sheath flow channels and core flow channels are obtained by reactive ion etching. The etching gas for reactive ion etching is a mixture of sulfur hexafluoride and carbon tetrafluoride. The etching depth of reactive ion etching is 51 μm, the sidewall perpendicularity is ≥89°, the flow ratio of sulfur hexafluoride to carbon tetrafluoride is 3:1, and the hydrophobic layer is a perfluorosilane hydrophobic layer with a contact angle ≥150°.

[0018] S2. Surface-modified quantum dots are mixed with shape memory epoxy resin and injected into the core flow channel to form a composite filler. The composite filler is then cured by femtosecond laser-induced two-photon polymerization to form a cured composite structure. The quantum dots are CdSe core-ZnS shell quantum dots with a particle size of 5 nm. The quantum dots are mixed with shape memory epoxy resin at a ratio of 0.2 wt%. The threshold energy of the two-photon polymerization is ≤0.5 nJ, and the curing resolution is ≤1 μm to ensure the molding accuracy of the composite structure at the micro-nano scale.

[0019] S3. Femtosecond laser 4D printing technology is used to write interdigitated electrodes into the solidified composite structure to form an interdigitated electrode framework. The femtosecond laser 4D printing technology uses a laser wavelength of 1030nm, a pulse width of 200fs, a power of 80mW, and a scanning speed of 10mm / s.

[0020] S4. A reversible deformable electrode is obtained by applying a near-infrared laser to the interdigital electrode skeleton to trigger a shape memory effect. The geometric parameters of the interdigital electrode skeleton include a finger width of 3.1 μm, a finger spacing of 1.6 μm, a height of 15.5 μm, an aspect ratio of 5:1, a near-infrared laser wavelength of 808 nm, a shape memory effect deformation response time ≤0.5 s, and a curvature control accuracy of ±0.1 s. The shape memory effect exhibits reversible deformation cycles exceeding [number] under 405nm excitation light. .

[0021] S5. MXene nanosheets were deposited on the surface of a reversibly deformable electrode, and ion transport channels were constructed using a deposition solution to form an MXene functionalized electrode. The MXene functionalized electrode was then encapsulated with an electrolyte to obtain a micro-interdigitated supercapacitor. MXene nanosheets are... , The lateral dimension is ≤500nm. The deposition solution includes MXene dispersion and lithium chloride electrolyte, with an MXene dispersion concentration of 0.5mg / mL and a lithium chloride electrolyte concentration of 0.1M. The micro-interdigitated supercapacitor has an areal capacitance ≥80mF / cm², an energy density ≥15μWh / cm², and a frequency response that meets the IEC62391-1 standard.

[0022] The miniature interdigitated supercapacitor fabricated in this embodiment employs an etching depth of 51 μm and a relatively wide electrode structure, with a finger width of 3.1 μm and a finger spacing of 1.6 μm. This helps to increase the electrode surface area, thereby improving the capacitor's conductivity and capacitance. This design ensures the stability and reliability of the capacitor in medium-power applications.

[0023] Example 2 This invention provides a manufacturing process for a micro-interdigitated supercapacitor based on optofluidic femtosecond laser 4D printing, comprising: S1. Fabricating a microchannel network on a silicon substrate, the microchannel network including sheath flow channels and core flow channels, and constructing a hydrophobic layer on the surface of the sheath flow channels and core flow channels to form the microchannel structure. The sheath flow channels are 200 μm wide, and the core flow channels are 50 μm wide. The sheath flow channels and core flow channels are obtained by reactive ion etching. The etching gas for reactive ion etching is a mixture of sulfur hexafluoride and carbon tetrafluoride. The etching depth of reactive ion etching is 50 μm, the sidewall perpendicularity is ≥89°, the flow ratio of sulfur hexafluoride to carbon tetrafluoride is 3:1, and the hydrophobic layer is a perfluorosilane hydrophobic layer with a contact angle ≥150°.

[0024] S2. Surface-modified quantum dots are mixed with shape memory epoxy resin and injected into the core flow channel to form a composite filler. The composite filler is then cured by femtosecond laser-induced two-photon polymerization to form a cured composite structure. The quantum dots are CdSe core-ZnS shell quantum dots with a particle size of 5 nm. The quantum dots are mixed with shape memory epoxy resin at a ratio of 0.2 wt%. The threshold energy of the two-photon polymerization is ≤0.5 nJ, and the curing resolution is ≤1 μm to ensure the molding accuracy of the composite structure at the micro-nano scale.

[0025] S3. Femtosecond laser 4D printing technology is used to write interdigitated electrodes into the solidified composite structure to form an interdigitated electrode framework. The femtosecond laser 4D printing technology uses a laser wavelength of 1030nm, a pulse width of 200fs, a power of 80mW, and a scanning speed of 10mm / s.

[0026] S4. A reversible deformable electrode is obtained by applying a near-infrared laser to the interdigital electrode skeleton to trigger a shape memory effect. The geometric parameters of the interdigital electrode skeleton include a finger width of 3.0 μm, a finger spacing of 1.5 μm, a height of 15 μm, an aspect ratio of 5:1, a near-infrared laser wavelength of 808 nm, a deformation response time of ≤0.5 s for the shape memory effect, and a curvature control accuracy of ±0.1 s. The shape memory effect exhibits reversible deformation cycles exceeding [number] under 405nm excitation light. .

[0027] S5. MXene nanosheets were deposited on the surface of a reversibly deformable electrode, and ion transport channels were constructed using a deposition solution to form an MXene functionalized electrode. The MXene functionalized electrode was then encapsulated with an electrolyte to obtain a micro-interdigitated supercapacitor. MXene nanosheets are... , The lateral dimension is ≤500nm. The deposition solution includes MXene dispersion and lithium chloride electrolyte, with an MXene dispersion concentration of 0.5mg / mL and a lithium chloride electrolyte concentration of 0.1M. The micro-interdigitated supercapacitor has an areal capacitance ≥80mF / cm², an energy density ≥15μWh / cm², and a frequency response that meets the IEC62391-1 standard.

[0028] The miniature interdigitated supercapacitor manufactured in this embodiment employs an etching depth of 50 μm and optimized electrode geometry, with a finger width of 3.0 μm and a finger spacing of 1.5 μm. By optimizing the electrode structure, the capacitance and energy density of the capacitor are improved, making it suitable for applications requiring high energy storage density.

[0029] Example 3 This invention provides a manufacturing process for a micro-interdigitated supercapacitor based on optofluidic femtosecond laser 4D printing, comprising: S1. Fabricating a microchannel network on a silicon substrate, the microchannel network including sheath flow channels and core flow channels, and constructing a hydrophobic layer on the surface of the sheath flow channels and core flow channels to form the microchannel structure. The sheath flow channels are 200 μm wide, and the core flow channels are 50 μm wide. The sheath flow channels and core flow channels are obtained by reactive ion etching. The etching gas for reactive ion etching is a mixture of sulfur hexafluoride and carbon tetrafluoride. The etching depth of reactive ion etching is 49 μm, the sidewall perpendicularity is ≥89°, the flow ratio of sulfur hexafluoride to carbon tetrafluoride is 3:1, and the hydrophobic layer is a perfluorosilane hydrophobic layer with a contact angle ≥150°.

[0030] S2. Surface-modified quantum dots are mixed with shape memory epoxy resin and injected into the core flow channel to form a composite filler. The composite filler is then cured by femtosecond laser-induced two-photon polymerization to form a cured composite structure. The quantum dots are CdSe core-ZnS shell quantum dots with a particle size of 5 nm. The quantum dots are mixed with shape memory epoxy resin at a ratio of 0.2 wt%. The threshold energy of the two-photon polymerization is ≤0.5 nJ, and the curing resolution is ≤1 μm to ensure the molding accuracy of the composite structure at the micro-nano scale.

[0031] S3. Femtosecond laser 4D printing technology is used to write interdigitated electrodes into the solidified composite structure to form an interdigitated electrode framework. The femtosecond laser 4D printing technology uses a laser wavelength of 1030nm, a pulse width of 200fs, a power of 80mW, and a scanning speed of 10mm / s.

[0032] S4. A reversible deformable electrode is obtained by applying a near-infrared laser to the interdigital electrode skeleton to trigger a shape memory effect. The geometric parameters of the interdigital electrode skeleton include a finger width of 2.9 μm, a finger spacing of 1.4 μm, a height of 14.5 μm, an aspect ratio of 5:1, a near-infrared laser wavelength of 808 nm, a deformation response time of ≤0.5 s for the shape memory effect, and a curvature control accuracy of ±0.1 s. The shape memory effect exhibits reversible deformation cycles exceeding [number] under 405nm excitation light. .

[0033] S5. MXene nanosheets were deposited on the surface of a reversibly deformable electrode, and ion transport channels were constructed using a deposition solution to form an MXene functionalized electrode. The MXene functionalized electrode was then encapsulated with an electrolyte to obtain a micro-interdigitated supercapacitor. MXene nanosheets are... , The lateral dimension is ≤500nm. The deposition solution includes MXene dispersion and lithium chloride electrolyte, with an MXene dispersion concentration of 0.5mg / mL and a lithium chloride electrolyte concentration of 0.1M. The micro-interdigitated supercapacitor has an areal capacitance ≥80mF / cm², an energy density ≥15μWh / cm², and a frequency response that meets the IEC62391-1 standard.

[0034] The miniature interdigitated supercapacitor fabricated in this embodiment utilizes an etching depth of 49 μm and finer electrode geometry, with a finger width of 2.9 μm and a finger spacing of 1.4 μm. This helps to further increase the surface area of ​​the electrodes, thereby improving the capacitor's performance and offering significant advantages in high-frequency response, fast charge and discharge, and small-volume applications.

[0035] Example 4 This embodiment compares three manufacturing processes for miniature interdigitated supercapacitors based on optofluidic femtosecond laser 4D printing technology, evaluating their differences in manufacturing process, shape memory effect, and final capacitor performance. The specific implementation is as follows: Experimental conditions: Materials: All experiments used CdSe core-ZnS shell quantum dots with a particle size of 5 nm and shape memory epoxy resin, mixed at a ratio of 0.2 wt%, and the same MXene nanosheets with a lateral size ≤500 nm.

[0036] Reactive ion etching: For each experiment, a mixture of sulfur hexafluoride and carbon tetrafluoride was used to fabricate the microchannel structure at a flow rate ratio of 3:1. The hydrophobic layer was perfluorosilane with a contact angle ≥150°.

[0037] Femtosecond laser parameters: laser wavelength 1030nm, pulse width 200fs, power 80mW, scanning speed 10mm / s.

[0038] Near-infrared laser parameters: The wavelength of the near-infrared laser used to excite the shape memory effect is 808nm, the deformation response time is less than 0.5s, and the curvature control accuracy is ±0.1.

[0039] 1. Microchannel structure fabrication A microchannel network, including a 200 μm wide sheath flow channel and a 50 μm wide core flow channel, was fabricated on a silicon substrate using reactive ion etching.

[0040] Experiment A: Etching depth of 51 μm, sidewall perpendicularity ≥ 89°.

[0041] Experiment B: Etching depth of 50 μm, sidewall perpendicularity ≥ 89°.

[0042] Experiment C: Etching depth of 49 μm, sidewall perpendicularity ≥ 89°.

[0043] The microchannel structures were basically the same in the three experiments, and the slight differences in etching depth had a limited impact on current transmission performance.

[0044] 2. Curing of composite filler Quantum dots and shape memory epoxy resin are mixed at a ratio of 0.2 wt% and injected into the core flow channel, and then cured by femtosecond laser-induced two-photon polymerization.

[0045] Experiments A, B, and C: All experiments used the same two-photon polymerization parameters, with a threshold energy ≤ 0.5 nJ and a curing resolution ≤ 1 μm.

[0046] The composite structure achieved high-precision curing in all experiments, and the curing effect was the same for all three.

[0047] 3. Interdigitated electrode manufacturing Femtosecond laser 4D printing technology was used to write interdigitated electrodes into a solidified composite structure.

[0048] Experiment A: Geometric parameters of interdigital electrodes: finger width 3.1 μm, finger spacing 1.6 μm, height 15.5 μm, depth-to-width ratio 5:1.

[0049] Experiment B: Geometric parameters of interdigital electrodes: finger width 3.0 μm, finger spacing 1.5 μm, height 15 μm, depth-to-width ratio 5:1.

[0050] Experiment C: Geometric parameters of interdigital electrodes: finger width 2.9 μm, finger spacing 1.4 μm, height 14.5 μm, depth-to-width ratio 5:1.

[0051] Differences in the geometry of interdigitated electrodes can affect charge storage capacity and response speed. Experiment A has larger electrode sizes, which may result in higher capacitance; Experiment C has smaller electrode sizes, which may lead to better response speed.

[0052] 4. The shape memory effect is activated. Near-infrared laser is applied to the interdigital electrode skeleton to trigger the shape memory effect.

[0053] Experiments A, B, and C: The deformation response time of all experiments is ≤0.5s, and the curvature control accuracy is ±0.1.

[0054] The triggering effect of the shape memory effect was consistent in all three experiments, and deformation could be completed in a short time.

[0055] 5. Fabrication of MXene Functionalized Electrodes MXene nanosheets were deposited on the surface of a reversibly deformable electrode to construct ion transport channels and encapsulate the electrode and electrolyte.

[0056] Experiments A, B, and C: All experiments used the same MXene dispersion concentration and lithium chloride electrolyte concentration.

[0057] All experiments showed identical fabrication results for MXene functionalized electrodes, with capacitance and energy density parameters meeting requirements.

[0058] 6. Results and Analysis Capacitor performance: Experiment A: Due to the large electrode size, with a finger width of 3.1 μm, its capacitance is expected to be high, but the capacitor's response speed may be slow.

[0059] Experiment B: The electrode size is moderate, with a finger width of 3.0 μm, and the capacitance and response speed are relatively balanced.

[0060] Experiment C: The electrode size is the smallest, with a finger width of 2.9μm. Although the capacitance is low, the response speed is the best, making it suitable for high-frequency applications.

[0061] Energy density: All experiments had an energy density ≥15μWh / cm², meeting the design requirements. The main differences were in capacitance and frequency response.

[0062] Frequency response: The frequency responses of all experiments conformed to the IEC 62391-1 standard, with minimal differences.

[0063] Comparative analysis of experiments A, B, and C reveals that although all experiments used the same materials and processes for microchannel fabrication, composite filler curing, and MXene functionalized electrode manufacturing, the geometric differences in the interdigitated electrodes significantly impacted the final capacitor performance. Experiment A's larger electrode size resulted in higher capacitance but a slower response speed; Experiment C's smaller electrode size exhibited a faster response speed, suitable for high-frequency applications, but with lower capacitance. Experiment B achieved a relatively balanced performance between capacitance and response speed, suitable for various application scenarios. Overall, all experiments met design requirements for energy density and frequency response, indicating that the manufacturing process has good applicability and stability in capacitor design.

[0064] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A manufacturing process for micro-interdigital supercapacitors based on optofluidic femtosecond laser 4D printing, characterized in that, include: S1. A microchannel network is fabricated on a silicon substrate, the microchannel network including sheath flow channels and core flow channels, and a hydrophobic layer is constructed on the surface of the sheath flow channels and the core flow channels to form a microchannel structure; S2. Surface-modified quantum dots are mixed with shape memory epoxy resin and injected into the core flow channel to form a composite filler. The composite filler is cured by femtosecond laser-induced two-photon polymerization to form a cured composite structure. S3. Femtosecond laser 4D printing technology is used to write interdigitated electrodes into the solidified composite structure to form an interdigitated electrode skeleton; S4. Apply near-infrared laser to the interdigitated electrode skeleton to trigger shape memory effect to obtain a reversible deformable electrode; S5. MXene nanosheets are deposited on the surface of the reversible deformable electrode and ion transport channels are constructed through the deposition liquid to form an MXene functionalized electrode. The MXene functionalized electrode is then encapsulated with an electrolyte to obtain a micro interdigitated supercapacitor.

2. The manufacturing process for a micro-interdigital supercapacitor based on optofluidic femtosecond laser 4D printing according to claim 1, characterized in that: The sheath flow channel is 200 μm wide, and the core flow channel is 50 μm wide. The sheath flow channel and the core flow channel are obtained by reactive ion etching. The etching gas for reactive ion etching is a mixture of sulfur hexafluoride and carbon tetrafluoride. The etching depth of reactive ion etching is 50 μm ± 1 μm, and the sidewall perpendicularity is ≥ 89°. The flow ratio of sulfur hexafluoride to carbon tetrafluoride is 3:

1. The hydrophobic layer is a perfluorosilane hydrophobic layer, and the contact angle of the perfluorosilane hydrophobic layer is ≥ 150°.

3. The manufacturing process for a micro-interdigital supercapacitor based on optofluidic femtosecond laser 4D printing according to claim 1, characterized in that: The quantum dots are CdSe core-ZnS shell quantum dots with a particle size of 5 nm. The quantum dots are mixed with the shape memory epoxy resin at a ratio of 0.2 wt%.

4. The manufacturing process for a micro-interdigital supercapacitor based on optofluidic femtosecond laser 4D printing according to claim 1, characterized in that: The threshold energy of the two-photon polymerization is ≤0.5nJ and the curing resolution is ≤1μm.

5. The manufacturing process for a micro-interdigital supercapacitor based on optofluidic femtosecond laser 4D printing according to claim 1, characterized in that: The femtosecond laser 4D printing technology uses a laser wavelength of 1030nm, a pulse width of 200fs, a power of 80mW, and a scanning speed of 10mm / s.

6. The manufacturing process for a micro-interdigital supercapacitor based on optofluidic femtosecond laser 4D printing according to claim 1, characterized in that: The geometric parameters of the interdigital electrode skeleton include a finger width of 3.0±0.1μm, a finger spacing of 1.5±0.1μm, a height of 15±0.5μm, and an aspect ratio of 5:

1. The near-infrared laser wavelength is 808nm. The deformation response time of the shape memory effect is ≤0.5s, and the curvature control accuracy is ±0.

1. The shape memory effect can be reversibly deformed more than a certain number of times. .

7. The manufacturing process for a micro-interdigital supercapacitor based on optofluidic femtosecond laser 4D printing according to claim 1, characterized in that: The MXene nanosheets are The The lateral dimension is ≤500nm, and the deposition solution includes MXene dispersion and lithium chloride electrolyte, wherein the concentration of MXene dispersion is 0.5mg / mL and the concentration of lithium chloride electrolyte is 0.1M.

8. The manufacturing process for a micro-interdigital supercapacitor based on optofluidic femtosecond laser 4D printing according to claim 1, characterized in that: The micro interdigitated supercapacitor has an areal capacitance ≥80mF / cm² and an energy density ≥15μWh / cm². The frequency response of the micro interdigitated supercapacitor meets the IEC62391-1 standard.

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