A pumping system for a fluid jet polishing liquid

Abstract

The application discloses a jet polishing liquid pumping system, which comprises a dispersion part and a pressure stabilizing part, and the pressure stabilizing part is used for controlling the liquid flow pressure of the jet polishing liquid. The dispersion assembly comprises a cooling dispersion pipe and a joint, the cooling dispersion pipe is fixedly installed on the joint, the joint is connected to the inside of a flow channel of the jet polishing liquid, and the cooling dispersion pipe comprises a spiral pipe part which extends into the inside of the flow channel and is coaxially arranged with the flow channel. The spiral pipe of the jet polishing liquid pumping system is used for extending into the flow channel. When the polishing liquid flows through the spiral pipe, a pair of symmetrical and rotating vortexes are formed in the cross section of the pipe, the radial mixing of the polishing liquid in the pipe is enhanced, the shear damage caused by the spiral pipe starts to form the agglomeration, the movement process continuously disturbs to avoid the abrasive particles from being deposited, the dispersion of the polishing liquid is strengthened, and the deposition or stagnation at the corner of the polishing liquid joint is avoided.

Description

Technical Field

[0001] This invention relates to the field of jet polishing technology, and more particularly to a pumping system for jet polishing fluid. Background Technology

[0002] In the field of high-end optical manufacturing, the surface quality of optical components directly determines the final performance of the system. Traditional mechanical polishing methods, limited by the "tool-workpiece" contact principle, inevitably introduce subsurface damage and edge effects, making it difficult to meet the stringent requirements of λ / 100-level surface accuracy and atomic-level surface roughness. Therefore, chemical mechanical polishing (CMP) technology is increasingly widely used in my country's high-precision optical component manufacturing industry. CMP jet polishing utilizes precisely formulated jet polishing slurry, sprayed as a jet onto the surface of the optical component, to achieve deterministic removal of surface material, largely avoiding damage caused by direct contact mechanical stress. However, this process places extremely stringent requirements on the temperature stability and particle dispersibility of the polishing slurry.

[0003] To control the temperature, dispersion, and flow pressure of jet polishing slurry during use, specialized jet polishing slurry stirring and cooling devices have been developed and applied. Existing solutions typically use an open tank to collect the jet polishing slurry, relying on room temperature and cooling pipes within the tank for cooling, and employing a stirring device to achieve liquid homogenization. However, this approach has the following limitations: firstly, a large amount of jet polishing slurry is required to maintain process operation; secondly, room temperature cooling makes precise temperature control difficult; and thirdly, installing a conventional stirring device increases the overall size of the equipment and affects the efficiency of jet polishing slurry utilization. Summary of the Invention

[0004] This invention addresses the need for timely cooling, dispersion, and pressure control of jet polishing slurries in existing technologies. It proposes a jet polishing slurry pumping system by adding a cooling and dispersion system to the jet polishing slurry delivery pipeline to achieve temperature control and improved dispersion of the polishing slurry. At the same time, a pressure stabilizing section is set up to achieve precise control of the liquid flow pressure.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A jet polishing slurry pumping system includes a dispersion section, which comprises a refrigeration component and a dispersion assembly. The refrigeration component includes a compressor, a condenser, an expansion valve, and a loop pipe. The dispersion assembly is installed on the loop pipe. The dispersion assembly includes a cooling dispersion tube and a connector. The cooling dispersion tube is connected between the compressor and the expansion valve and is fixedly installed on the connector. The connector is connected to the inside of the jet polishing slurry flow path. The cooling dispersion tube includes a spiral tube section that extends into the flow path and remains coaxial with it. The spiral tube section is used to cool and disperse the jet polishing slurry inside the flow path.

[0007] Preferably, the cooling dispersion tube includes a spiral tube and a first connector and a second connector extending from the first end of the spiral tube. The first connector is fixedly connected to the first end of the spiral tube, and the second connector is fixedly connected to the second end of the spiral tube and extends from the first end of the spiral tube through the interior of the spiral tube. The axes of the first connector, the spiral tube, and the second connector are arranged parallel to each other. The first connector and the second connector are fixedly inserted into a joint. The spiral tube extends from one of the ports of the joint. The spiral tube and the port of the joint are coaxially arranged. The spiral tube is used to extend into and connect to the flow pipeline to cool and disperse the fluid inside the flow pipeline.

[0008] Preferably, the connector is a tee fitting or an L-shaped tee fitting.

[0009] Preferably, the spiral tube is installed inside the vertical direct flow pipeline used for feeding at the joint.

[0010] Preferably, the cooling medium enters the spiral tube from the first connector and exits the spiral tube from the second connector.

[0011] Preferably, it also includes a pressure stabilizing section, which includes an inlet pipe, a delivery pipe, a nozzle, and a delivery pump. The delivery pump is installed at the inlet of the delivery pipe, and the nozzle is installed at the outlet of the delivery pipe. The delivery pipe is also equipped with a pressure relief valve, an exhaust valve, a back pressure valve, and a damper. The exhaust end of the exhaust valve is connected to a vapor-liquid pipe for water vapor discharge. The pressure relief valve connects the vapor-liquid pipe to the delivery pipe. The outlet end of the vapor-liquid pipe is connected to a return pipe, and the outlet end of the return pipe extends into the polishing liquid container.

[0012] Preferably, the connection between the vapor-liquid pipe and the exhaust valve is located above the connection between the vapor-liquid pipe and the pressure relief valve.

[0013] Preferably, the nozzle is connected to the outlet end of the back pressure valve via an outlet pipe, which is a flexible hose.

[0014] Preferably, the back pressure valve is positioned higher than the nozzle in the vertical direction.

[0015] Preferably, the damper is connected between the delivery pipe and the nozzle, and the damper is connected to a pressure and temperature sensor.

[0016] Preferably, a filter screen is provided at the inlet end of the inlet pipe.

[0017] Preferably, the inlet pipe is a flexible hose with a union.

[0018] The beneficial effects of this invention are:

[0019] 1. The pumping system of this jet polishing fluid includes a dispersion section and a pressure stabilizing section. The dispersion section realizes temperature control and improves dispersion of the polishing fluid, while the pressure stabilizing section realizes precise control of fluid flow pressure, and timely cools, disperses and controls the pressure of the jet polishing fluid.

[0020] 2. The dispersion section of the pumping system for this jet polishing slurry is used to cool and disperse the jet polishing slurry during pipeline transportation. When the jet polishing slurry passes through the spiral tube, the cooling medium inside the spiral tube exchanges heat thoroughly with the jet polishing slurry, cooling it and maintaining a stable temperature for pipeline transportation and jet polishing, thus ensuring a stable jet polishing effect. The spiral tube acts as a heat exchange device to cool the polishing slurry. The spiral tube structure design increases the contact area between the polishing slurry and the cooling medium, significantly improving heat exchange efficiency and enhancing the stable cooling effect of the polishing slurry. The refrigerant flow direction design within the spiral tube helps reduce flow resistance and pressure drop, minimizing system vibration and noise.

[0021] 3. The spiral tube of the pumping system of this jet polishing slurry is installed at the joint used for fluid diversion, forming a pair of symmetrical, rotating vortices within the pipe cross-section. This enhances the radial mixing of the polishing slurry within the pipe. The radial mixing caused by the spiral tube disrupts the agglomeration formed by low-speed moving particles, and the continuous disturbance during the movement prevents abrasive particles from settling, strengthens the dispersibility of the polishing slurry, and prevents the jet polishing slurry from forming sediment or stagnating at the joint corner. This ensures smooth flow of the jet polishing slurry and maintains a stable abrasive weight ratio concentration within the jet polishing slurry, thereby ensuring a stable jet polishing effect.

[0022] 4. The dimensions of the spiral tube and the flow pipeline of the pumping system of this jet polishing slurry correspond. The dimensions of the spiral tube are calculated based on the flow velocity and flow rate of the jet polishing slurry and the dimensions of the flow pipeline to precisely control the cooling effect. At the same time, the outer edge of the spiral tube is kept close to the inner wall of the flow pipeline to improve the radial mixing of the polishing slurry in the pipeline, break the abrasive agglomeration that is initially formed, enhance the dispersion of the polishing slurry, improve the uniformity of the polishing slurry, and maintain the synergy between the fluid pressure drop and heat transfer efficiency inside the flow pipeline.

[0023] 5. The pumping system of this jet polishing slurry is equipped with a pressure relief valve, an exhaust valve, a back pressure valve, and a damper on the delivery pipe of the pressure stabilizing section. The pressure relief valve is used to regulate the liquid pressure of the polishing slurry inside the delivery pipe. The exhaust valve is used to discharge the gas inside the polishing slurry to avoid creating gas explosion pressure on the workpiece during processing. The damper is used to suppress the pressure fluctuation of the polishing slurry inside the pipe, so that the polishing slurry flows smoothly inside the pipe and ensures stable flow of the polishing slurry inside the pipe. The back pressure valve maintains a stable supply of polishing slurry pump outlet pressure to improve the pressure stability of the polishing slurry after it is sprayed out of the nozzle and improve the polishing effect of the jet. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the pumping system for the jet polishing fluid;

[0025] Figure 2This is a schematic diagram of the connection structure of the pumping system connector for this jet polishing fluid;

[0026] Figure 3 This is a schematic diagram of the connector of the pumping system for this jet polishing fluid;

[0027] Figure 4 This is a schematic diagram of the spiral tube structure of the pumping system for this jet polishing fluid;

[0028] Figure 5 This is a top view of the spiral tube structure of the pumping system for this jet polishing fluid.

[0029] In the diagram: 1. Inlet pipe; 2. Delivery pipe; 3. Outlet pipe; 4. Delivery pump; 5. Pressure relief valve; 6. Exhaust valve; 7. Vapor-liquid pipe; 8. Back pressure valve; 9. Return pipe; 10. Damper; 11. Pressure gauge; 12. Temperature and pressure sensor; 13. Nozzle; 14. Polishing fluid container; 15. Collection tank; 16. Connector; 17. Spiral tube; 18. Refrigeration component; 19. First pipe; 20. Second pipe; 161. First port; 162. Second port; 171. First connecting pipe; 172. Second connecting pipe. Detailed Implementation

[0030] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0031] Reference Figure 1 A jet polishing slurry pumping system includes a collection tank 15, an inlet pipe 1, a delivery pipe 2, an outlet pipe 3, and a nozzle 13 connected in sequence. A delivery pump 4 is installed on the delivery pipe 2. The delivery pump 4 is used to deliver the polishing slurry inside the delivery pipe 2, realizing the flow trend of the polishing slurry from the collection tank 15, the inlet pipe 1, the delivery pipe 2, the outlet pipe 3, to the nozzle 13. The delivery pump 4 is installed at the inlet of the delivery pipe 2. The delivery pump 4 is a metering pump, which can accurately control the flow rate of the pumped liquid, realize the quantitative delivery of liquid, and achieve control of the flow rate of the polishing slurry inside the pipeline.

[0032] The collection tank 15 is located below the nozzle 13 and is used to collect the jet polishing slurry ejected from the nozzle 13. The inside of the collection tank 15 is used to mount the workpiece, and the jet polishing slurry polishes the workpiece. The jet polishing slurry can be recycled and reused after processing. The jet polishing slurry pumping system includes a dispersion section and a pressure stabilizing section. The dispersion section is used to disperse the jet polishing slurry and cool it, while the pressure stabilizing section is used to control the pressure of the dispersed jet polishing slurry.

[0033] The aforementioned dispersion component includes a refrigeration assembly 18 and a dispersion assembly. The refrigeration assembly 18 includes a compressor, a condenser, an expansion valve, and a circuit pipeline. The dispersion assembly includes a cooling dispersion pipe and a connector 16. The cooling dispersion pipe connects the compressor and the expansion valve. The compressor, condenser, expansion valve, and cooling dispersion pipe are connected by pipelines. The cooling medium flows sequentially through the compressor, condenser, expansion valve, and evaporator. The compressor draws in low-temperature, low-pressure gaseous cooling medium from the cooling dispersion pipe and compresses it, converting it into high-temperature, high-pressure cooling medium vapor. The high-temperature, high-pressure cooling medium vapor discharged from the compressor enters the condenser, where it dissipates heat to the external environment through the flow of air (or water). The cooling medium itself condenses into a medium-temperature, high-pressure liquid due to cooling. The high-pressure liquid cooling medium is forced through the orifice of the expansion valve, causing its pressure to drop sharply, thus becoming a low-temperature, low-pressure mist-like liquid or gaseous mixture. After being throttled by the expansion valve, the low-temperature, low-pressure mist-like cooling medium enters the cooling dispersion pipe, which can exchange heat with external materials, thereby cooling the surrounding materials. In this embodiment, the cooling medium is a refrigerant.

[0034] Furthermore, the cooling dispersion tube is fixedly installed on the connector 16, which is connected to the inside of the flow pipeline of the jet polishing liquid. The cooling dispersion tube is a spiral tube 17, which can extend into the inside of the flow pipeline to cool and disperse the jet polishing liquid inside the flow pipeline.

[0035] For details, please refer to Figure 2 and Figure 3 The spiral pipe 17 is fixedly installed on the connector 16, which is an L-shaped pipe connector used for pipe reversal. The connector 16 is a tee fitting or an L-shaped two-way fitting. In this embodiment, the connector 16 is an L-shaped two-way fitting, and the connector 16 includes a first port 161 and a second port 162, wherein the first port 161 is used for fluid inlet and the second port 162 is used for fluid outlet.

[0036] The aforementioned cooling dispersion pipe includes a spiral tube 17, a first connecting pipe 171, and a second connecting pipe 172. The spiral tube 17 is a hollow tube extending in a spiral shape. The first connecting pipe 171 and the second connecting pipe 172 extend from the first end of the spiral tube 17. The first connecting pipe 171 is fixedly connected to the first end of the spiral tube 17 and is also in communication with the first end of the spiral tube 17. One end of the second connecting pipe 172 is fixedly connected to the second end of the spiral tube 17 and is also in communication with the second end of the spiral tube 17. The other end of the second connecting pipe 172 passes through the inner hole of the spiral tube 17 and extends out from the first end of the spiral tube 17.

[0037] The first connecting pipe 171 and the second connecting pipe 172 are used for the entry or exit of the cooling medium into or out of the spiral tube 17, respectively. In this embodiment, the first connecting pipe 171 is connected to the compressor and is used for the cooling medium to enter the spiral tube 17; the second connecting pipe 172 is connected to the expansion valve and is used for the cooling medium to exit the spiral tube 17.

[0038] Furthermore, the first connector 171 and the second connector 172 extend axially within the corresponding diameter of the inner bore of the spiral tube 17, and the axes of the first connector 171, the spiral tube 17, and the second connector 172 are arranged parallel to each other. The first connector 171 and the second connector 172 are symmetrically arranged about the extension axis of the spiral tube 17, and the first connector 171 and the second connector 172 are respectively fixedly inserted into the connector 16, with the first ends of the first connector 171 and the second connector 172 extending out from the connector 16.

[0039] In this embodiment, the first connecting pipe 171, the spiral pipe 17, and the second connecting pipe 172 are copper pipes. Copper pipes have good heat conduction and can improve the cooling effect.

[0040] In this embodiment, the first connecting pipe 171, the spiral pipe 17, and the second connecting pipe 172 are integrated, meaning that the first connecting pipe 171, the spiral pipe 17, and the second connecting pipe 172 are formed by spirally bending a single metal pipe, preferably a copper pipe. In this embodiment, the cooling dispersion pipe is made of a metal pipe with a diameter of 5 mm and a wall thickness of 1 mm, and the spiral spacing of the spiral pipe 17 is equal.

[0041] Furthermore, the spiral tube 17 is installed inside the first port 161 of the connector 16. The spiral tube 17 and the first port 161 of the connector 16 are coaxially arranged, and the outer diameter of the spiral tube 17 is smaller than the inner diameter of the port of the connector 16.

[0042] The aforementioned connector is connected inside the flow channel of the jet polishing fluid, which includes a first pipe 19 and a second pipe 20. (Reference) Figure 4 and Figure 5 In use, the pumping system of this jet polishing slurry connects the first port 161 of the connector 16 to the first pipe 19, the second end of the spiral tube 17 extends into the interior of the first pipe 19, and the second port 162 is connected to the second pipe 20. The polishing slurry flows from the first pipe 19 to the second pipe 20. When the polishing slurry passes through the spiral tube 17, it comes into direct contact with the spiral tube 17, achieving heat exchange and cooling. As the polishing slurry passes through the spiral cooling pipe, it can be radially mixed, breaking up the abrasive agglomerates that are initially forming, preventing abrasive particles from settling, and enhancing the dispersibility of the polishing slurry. The spiral tube 17 disperses suspended particles in the jet polishing slurry, preventing sedimentation or stagnation at the corner of the connector 16, maintaining smooth flow and uniformity of the jet polishing slurry.

[0043] In this embodiment, the first pipe 19 is set vertically, and the spiral axis of the spiral tube 17 is also set vertically. The polishing liquid enters the connector 16 from the upper vertical direction. In addition to the kinetic energy of the flow, the polishing liquid can also rely on its own gravity to impact the spiral tube 17, thereby enhancing the dispersion effect of suspended particles in the polishing liquid.

[0044] In this embodiment, the dimensions of the spiral tube 17 and the connector 16 are related, and dimensional calculations are required to obtain the ideal cooling effect. In this embodiment, the spiral pitch of the spiral tube is 10mm, the outer diameter of the cooling dispersion tube is 26mm, and the inner diameter of the flow pipe is 28mm.

[0045] In this embodiment, the pitch design of the spiral tube 17 includes the following calculation process:

[0046] The jet polishing slurry pumping system generates heat. ;

[0047] in, Indicates the mass of the liquid. Indicates specific heat capacity. Indicates temperature difference;

[0048] Reynolds number ;

[0049] in, Indicates the flow velocity inside the pipe. Indicates the pipe diameter. Represents the density of a fluid. Indicates the dynamic viscosity of the fluid. ;

[0050] Nusel number Trump's number ;

[0051] in, Indicates fluid dynamic viscosity, Indicates specific heat capacity. Indicates the thermal conductivity of the fluid;

[0052] De's number De = Re (d / D) 1 / 2 ;

[0053] Where Re is the Reynolds number, d is the diameter of the copper tube of the spiral tube, and D is the diameter of the spiral tube;

[0054] The length L of the spiral tube is calculated to ensure stable heat exchange. The calculation process is as follows:

[0055] ;

[0056] ; ;

[0057] Where D represents the pipe diameter, the pitch of the spiral tube is 0.5D-2D. In this embodiment, the pipe diameter D of the spiral tube is 10mm, which not only ensures the selection and balance between the pressure drop of the fluid inside the pipe and the heat transfer efficiency, but also improves the radial mixing of the polishing fluid inside the pipe during the fluid flow by increasing the number of spiral rings, ensuring the dispersion of abrasive particles inside the fluid, and also facilitating the transfer of heat from the pipe wall of the spiral tube 17 to the fluid.

[0058] Furthermore, the dispersion section is used to disperse the jet polishing slurry. The dispersed jet polishing slurry is then fed into pipe 1, enabling the recycling of the jet polishing slurry. Pipe 1 uses a flexible union to reduce the impact of vibration between the machine tool and the conveying system, minimize the entry of impurities from the polishing slurry into the delivery pump, and facilitate cleaning when connecting different polishing slurries. The inlet position of pipe 1 is higher than the outlet position, increasing the amount of polishing slurry recovered after processing, reducing polishing slurry residue when the machine stops, and improving the efficiency of polishing slurry utilization.

[0059] Furthermore, the delivery pipe 2 is also equipped with a pressure relief valve 5, an air vent valve 6, and a damper 10 to maintain a stable flow of the polishing fluid inside the pipe. In the liquid delivery system, air tends to accumulate at higher points in the pipe, creating air resistance and hindering fluid flow. The air vent valve 6 is located close to the damper 10 to remove air from the polishing fluid, ensuring smooth flow of the polishing fluid within the pipe. Simultaneously, it prevents gas inside the polishing fluid from affecting its polishing effect.

[0060] The aforementioned pressure relief valve 5 ensures that the system pressure remains within a safe range and is a safety device used to protect pipelines from overpressure damage. When the pipeline system pressure exceeds a preset limit, the pressure relief valve 5 automatically opens to release excess pressurized fluid, preventing equipment explosion, pipeline rupture, or other hazards. When the pipeline system pressure returns to a safe value, the pressure relief valve 5 automatically closes to ensure continuous and stable system operation.

[0061] In this embodiment, the exhaust end of the exhaust valve 6 is connected to a vapor-liquid pipe 7, which is used for water vapor discharge. A return pipe 9 is provided at the outlet end of the pressure relief valve 5. The outlet end of the vapor-liquid pipe 7 is connected to the return pipe 9, and the outlet end of the return pipe 9 extends into the polishing liquid container 14. When the pipeline system pressure exceeds a preset limit, the pressure relief valve 5 automatically opens, allowing the pressurized liquid inside the delivery pipe 2 to be discharged from the vapor-liquid pipe 7 and enter the polishing liquid container 14 through the return pipe 9. This prevents changes in the weight ratio concentration of the polishing liquid during processing, which could affect processing accuracy.

[0062] In this embodiment, the connection between the vapor-liquid pipe 7 and the exhaust valve 6 is located above the connection between the vapor-liquid pipe 7 and the pressure relief valve 5, so as to prevent the polishing liquid flowing out of the pressure relief valve from flowing to the exhaust valve 6 through the vapor-liquid pipe 7.

[0063] In this embodiment, the return pipe 9 is a flexible hose, which can reduce the impact of vibration of the conveying system on machine tool processing. The inlet position of the hose is higher than the outlet position, which reduces the sedimentation of polishing fluid and facilitates the collection of polishing fluid in the pipe when processing is completed.

[0064] Furthermore, a damper 10 is connected to the delivery pipe 2, and the damper 10 is equipped with a pressure gauge 11. The pipe damper 10 is used to suppress fluid pressure fluctuations in the pipe, which can improve the uniformity and consistency of the polishing fluid flow rate at the nozzle outlet and ensure the quality level of jet polishing.

[0065] Furthermore, the inlet of the aforementioned damper 10 is connected between the delivery pipe 2 and the outlet pipe 3, and the outlet of the damper 10 is connected to a temperature and pressure sensor for measuring the pressure and temperature of the polishing fluid in the damper 10. Feedback from the temperature and pressure sensor 12 allows for control of the stability of the temperature and pressure in the polishing fluid delivery system.

[0066] In this embodiment, a back pressure valve 8 is provided on the liquid outlet pipe 3. The back pressure valve 8 is used to maintain a certain pressure at the outlet of the delivery pipe 2 to ensure stable fluid delivery.

[0067] In this embodiment, the outlet end of the polishing slurry pump pressure stabilization and temperature control structure is connected to the nozzle, and the polishing slurry is sprayed from the nozzle to polish the workpiece. To maintain stable liquid output from the nozzle, the delivery pipe 2 is equipped with a pressure relief valve 5, an exhaust valve 6, and a damper 10. The pressure relief valve 5 is used to regulate the liquid pressure of the polishing slurry inside the delivery pipe, the exhaust valve 6 is used to discharge the gas inside the polishing slurry, and the damper 10 is used to suppress pipe vibration and impact, so that the polishing slurry flows smoothly inside the pipe, ensuring the flow stability of the polishing slurry and maintaining a stable supply of polishing slurry to improve the polishing effect after the polishing slurry is sprayed out.

[0068] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A jet polishing fluid pumping system comprising a dispersion section, said dispersion section comprising a refrigeration assembly and a dispersion assembly, said refrigeration assembly comprising a compressor, a condenser and an expansion valve and a circuit piping, characterized in that, The circuit pipeline is provided with a dispersion assembly, which comprises a cooling dispersion pipe and a joint, the cooling dispersion pipe is connected between the compressor and the expansion valve, and the cooling dispersion pipe is fixedly installed on the joint. The joint is connected inside the flow pipeline of the jet polishing liquid, and the cooling dispersion pipe comprises a spiral pipe part for cooling and dispersing the jet polishing liquid inside the flow pipeline. The cooling dispersion pipe comprises a spiral pipe and a first connecting pipe and a second connecting pipe extending from a first end of the spiral pipe, the first connecting pipe is fixedly connected to the first end of the spiral pipe, and the second connecting pipe is fixedly connected to a second end of the spiral pipe and extends from the first end of the spiral pipe through the inside of the spiral pipe; the first connecting pipe and the second connecting pipe are fixedly inserted into the joint, and the spiral pipe extends from one pipe opening of the joint, and the spiral pipe is arranged to be inserted into the flow pipeline and to cool and disperse the fluid inside the flow pipeline. The axes of the first connecting pipe, the spiral pipe and the second connecting pipe are arranged in parallel, the spiral pipe is arranged inside the flow pipeline and coaxially with the flow pipeline, the spiral pipe is coaxially arranged with the pipe opening of the joint, and the spiral pipe is arranged inside the vertical flow pipeline for feeding.

2. The fluid jet polishing fluid pumping system of claim 1, wherein, The joint is a tee pipe or an L-shaped two-way pipe.

3. The fluid jet polishing fluid pumping system of claim 1, wherein, The cooling medium enters the spiral pipe from the first connecting pipe and exits the spiral pipe from the second connecting pipe.

4. The fluid jet polishing fluid pumping system of claim 3, wherein, The stable pressure part comprises an inlet pipe, a conveying pipe, a nozzle and a conveying pump, the conveying pump is installed at an inlet of the conveying pipe, the nozzle is installed at an outlet of the conveying pipe, the conveying pipe is further provided with a pressure relief valve, an exhaust valve, a back pressure valve and a damper, an exhaust end of the exhaust valve is connected with a vapor-liquid pipe for discharging water vapor, the pressure relief valve connects the vapor-liquid pipe and the conveying pipe, an outlet end of the vapor-liquid pipe is connected with a return pipe, and the outlet end of the return pipe extends into the polishing liquid container.

5. The fluidic polishing fluid pumping system of claim 4, wherein, The connection between the vapor-liquid pipe and the exhaust valve is located above the connection between the vapor-liquid pipe and the pressure relief valve.

6. The fluidic polishing liquid pumping system of claim 5, wherein, The nozzle is connected to an outlet end of the back pressure valve through an outlet pipe, and the outlet pipe is a live knot hose.

7. The fluid jet polishing fluid pumping system of claim 6, wherein, The back pressure valve is located vertically higher than the nozzle.

8. The fluidic polishing liquid pumping system of claim 7, wherein, The damper is connected between the conveying pipe and the nozzle, and the damper is connected with a pressure and temperature sensor.

9. The fluidic polishing liquid pumping system of claim 4, wherein, The inlet end of the inlet pipe is provided with a filter screen.

10. The fluidic polishing fluid pumping system of claim 4, wherein, The inlet pipe is a live joint hose.

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