Optical vibration sensing device and method of fiber-based integrated super-structure grating

Abstract

The invention discloses an optical vibration sensing device and method of a fiber-based integrated super-structure grating, and belongs to the technical field of optical precision displacement measurement. The device comprises a lighting module, a vibration sensing module, a detection module and an optical fiber circulator. The vibration sensing module takes a polarization superstructure grating as a core and converts a vibration signal into emergent light polarization state change. The grating divides incident ray polarized light into left-handed and right-handed circular polarized light and deflects reversely, vibration causes phase difference change, and beam combination is carried out again through the grating after the phase difference change is reflected and returned by the quarter-wave plate and the reflector, so that emergent ray polarized light with the polarization direction linearly rotating along with displacement is formed. The detection module is used for reducing vibration signals through detection and normalization processing of two paths of phase shift signals in combination with a second-order cosine fitting algorithm, and displacement, speed, acceleration and frequency spectrum of the displacement, the speed, the acceleration and the frequency spectrum of the acceleration can be measured with high precision. The device is compact in structure, resistant to electromagnetic interference, high in sensitivity and especially suitable for low-frequency micro-vibration measurement.

Description

Technical Field

[0001] This invention belongs to the field of optical precision displacement measurement technology, specifically relating to an optical vibration sensing device and method for a fiber-based integrated meta-grating. Background Technology

[0002] Vibration sensors are devices that convert mechanical vibration quantities (such as displacement, velocity, or acceleration) into measurable signals, playing a vital role in industrial production, inertial navigation, geological exploration, earthquake monitoring, and building safety. In particular, achieving high-precision measurement of low-frequency micro-vibrations is crucial for earthquake monitoring and precision manufacturing. With technological advancements, vibration sensors are continuously evolving towards miniaturization, intelligence, and high precision.

[0003] Currently, vibration sensors are mainly divided into two categories: electrical and optical. Electrical sensors, represented by microelectromechanical systems (MEMS), have advantages such as low power consumption and easy integration, and have become a commonly used technology in vibration monitoring. However, they are susceptible to electromagnetic interference and have limitations in terms of accuracy and stability in low-frequency measurements. Optical vibration sensors mainly include distributed fiber optic sensing, fiber Bragg gratings (FBGs), and Fabry-Perot interferometers. Distributed fiber optics can monitor the spatial distribution of vibration signals, but the Rayleigh scattering principle leads to a low signal-to-noise ratio. Fiber Bragg gratings sense strain through wavelength shift, requiring extremely high speed and accuracy from the demodulation system. While the Fabry-Perot cavity approach offers high accuracy, it is highly susceptible to temperature fluctuations and presents significant manufacturing and packaging challenges.

[0004] In summary, existing vibration sensing technologies each have significant shortcomings: some are weak in anti-interference capabilities, some are complex and costly, and some struggle to balance high accuracy with low-frequency measurement performance. Therefore, the industry urgently needs to develop a new type of vibration sensing device and method that combines high accuracy, high stability, strong anti-interference capabilities, compact structure, and the ability to effectively measure low-frequency micro-vibrations. Summary of the Invention

[0005] To address the aforementioned technical problems, this invention provides an optical vibration sensing device and method based on a fiber-integrated metagrating, which features a compact structure, resistance to electromagnetic interference, and high sensitivity.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An optical vibration sensing device based on a fiber-integrated metagrating includes an illumination module, a vibration sensing module, a detection module, and a fiber optic circulator; wherein,

[0008] The illumination module is used to generate and output linearly polarized laser with stable power and controlled polarization state;

[0009] The vibration sensing module is optically connected to the illumination module through the fiber optic circulator, and is used to receive the linearly polarized laser and modulate it into signal light carrying vibration information.

[0010] The detection module is optically connected to the vibration sensing module through the fiber optic circulator. It is used to receive the signal light, extract its polarization state information by detecting two phase-shift signals, and demodulate the vibration parameters.

[0011] Furthermore, the illumination module includes a semiconductor laser, a first collimator, a polarizer, a first reflector, a second collimator, a first fiber polarization controller, a 99:1 fiber beam splitter, and a first photodiode. The light emitted from the semiconductor laser is collimated by the first collimator and polarized by the polarizer to form linearly polarized parallel light. After being reflected by the first reflector, it is coupled into the optical fiber by the second collimator. The 99:1 fiber beam splitter guides most of the optical power to the fiber circulator, and a small portion of the optical power is split off and monitored by the first photodiode.

[0012] Furthermore, the vibration sensing module includes a third collimator, a polarization meta-grating, a first quarter-wave plate, a second quarter-wave plate, a second mirror, and a third mirror. The third collimator collimates the linearly polarized light from the fiber optic circulator and projects it onto the polarization meta-grating. The polarization meta-grating splits the incident linearly polarized light into positive and negative first-order diffracted light with different circular polarization states. The positive and negative first-order diffracted light pass through the first and second quarter-wave plates, respectively, and are reflected back along their original paths by the second and third mirrors. After passing through the quarter-wave plates of their respective optical paths again, they are combined by the polarization meta-grating to form signal light.

[0013] Furthermore, the vibration sensing module includes a third collimator, a polarization meta-grating, a lens, a quarter-wave plate, and a reflector; the light output from the third collimator is split by the polarization meta-grating, collimated by the lens, then passes through the quarter-wave plate and is reflected by the reflector, returns along the original optical path, and is then combined again by the polarization meta-grating to form signal light.

[0014] Furthermore, the detection module includes a 50:50 fiber beam splitter, a second fiber polarization controller, a first fiber polarizer, a second photodiode, a third fiber polarization controller, a second fiber polarizer, and a third photodiode. The signal light from the fiber circulator is split into two paths by the 50:50 fiber beam splitter, and after polarization compensation and phase adjustment by the second and third fiber polarization controllers respectively, it is detected by the first and second fiber polarizers, and finally the light intensity signal is detected by the second and third photodiodes.

[0015] Furthermore, the polarization meta-grating is a nanostructure fabricated on a light-transmitting substrate, comprising an array of elliptical cylindrical nanoparticles arranged in a specific period, wherein the long axis of the nanoparticles rotates periodically with their position.

[0016] Furthermore, the polarization meta-grating, as a vibration-sensitive element, is directly mounted on the surface of the vibrating body to be measured, or mounted on a spring-mass system to form an inertial acceleration measurement unit.

[0017] On the other hand, the present invention provides an optical vibration sensing method based on a fiber-integrated metagrating, applied to the aforementioned device, comprising:

[0018] Linearly polarized laser with stable power and controllable polarization state is generated through an illumination module;

[0019] The linearly polarized laser is introduced into the vibration sensing module through an optical fiber circulator.

[0020] The mechanical vibration is converted into a polarization state rotation of the outgoing signal light using a polarization metagrating;

[0021] The signal light carrying vibration information is introduced into the detection module through an optical fiber circulator;

[0022] The polarization state information of the signal light is extracted by a two-channel phase-shift signal detection method;

[0023] The detected light intensity signal is normalized and subjected to second-order cosine fitting.

[0024] The vibration displacement information is recovered from the light intensity signal using a phase demodulation algorithm;

[0025] By performing differential calculations on the displacement information, vibration velocity and acceleration information are obtained.

[0026] In a second aspect, the present invention provides an electronic device, comprising: one or more processors; and a memory for storing one or more programs; wherein, when the one or more programs are executed by the one or more processors, the one or more processors implement the aforementioned optical vibration sensing method of a fiber-based integrated metagrating.

[0027] Thirdly, the present invention provides a computer-readable storage medium having executable instructions stored thereon, which, when executed by a processor, enable the processor to implement the aforementioned optical vibration sensing method of a fiber-based integrated metagrating.

[0028] The beneficial effects of this invention are as follows:

[0029] Extremely high measurement accuracy: Based on the phase modulation mechanism of polarization interference and metagrating, it achieves picometer-level displacement resolution and sub-nanog-level acceleration sensitivity, and is particularly good at capturing weak low-frequency vibration signals.

[0030] Strong anti-interference capability: The sensing core has a full optical structure, which completely eliminates electromagnetic interference. Furthermore, by using phase shift detection and light source power normalization processing, it effectively suppresses the influence of ambient light and laser power fluctuations, resulting in excellent stability.

[0031] Compact structure and easy integration: The polarization meta-grating, as the core sensing element, is small in size and can be efficiently coupled with fiber optic systems, making it easy to form quasi-distributed or multi-point sensing networks, and suitable for quasi-distributed measurements in complex scenarios.

[0032] Information-rich and versatile: A single device can simultaneously demodulate the displacement, velocity, acceleration information and their spectrum of vibrations, providing comprehensive functionality to meet various vibration analysis needs. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of the structure of an optical vibration sensing device based on a fiber-integrated metagrating according to the present invention.

[0034] Figure 2 This is a schematic diagram of the lighting module structure of the present invention;

[0035] Figure 3 This is a schematic diagram of the vibration sensing module structure of the present invention;

[0036] Figure 4 This is another structural schematic diagram of the vibration sensing module of the present invention;

[0037] Figure 5 This is a schematic diagram of the detection module structure of the present invention;

[0038] Figure 6 These are scanning electron microscope images of polarization metagratings used in embodiments of the present invention;

[0039] Figure 7 The first photodiode in this embodiment of the invention monitors the time-optical power curve of the laser;

[0040] Figure 8 The time-optical power curves of the second and third photodiodes in this embodiment of the invention under standard vibration are shown.

[0041] Figure 9 The displacement curve and its Fourier spectrum are measured under a sinusoidal driving signal with an amplitude of 2.5 μm and a frequency of 1 Hz in an embodiment of the present invention.

[0042] Figure 10 The velocity curve and its Fourier spectrum were measured under a sinusoidal driving signal with an amplitude of 2.5 μm and a frequency of 1 Hz in an embodiment of the present invention.

[0043] Figure 11The acceleration curve and its Fourier spectrum are measured under a sinusoidal driving signal with an amplitude of 2.5 μm and a frequency of 1 Hz, according to an embodiment of the present invention.

[0044] Figure label:

[0045] 1. Illumination module; 2. Vibration sensing module; 3. Detection module; 4. Fiber optic circulator;

[0046] 11. Semiconductor laser; 12. First collimator; 13. Polarizer; 14. First mirror; 15. Second collimator; 16. First fiber polarization controller; 17. 99:1 fiber beam splitter; 18. First photodiode;

[0047] 21. Third collimator; 22. Polarizing meta-grating; 23. First quarter-wave plate; 24. Second quarter-wave plate; 25. Second mirror; 26. Third mirror; 27. Lens; 28. Quarter-wave plate; 29. ​​Mirror;

[0048] 31. 50:50 fiber optic bundle splitter; 32. Second fiber optic polarization controller; 33. First fiber optic polarizer; 34. Second photodiode; 35. Third fiber optic polarization controller; 36. Second fiber optic polarizer; 37. Third photodiode. Detailed Implementation

[0049] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0050] The purpose of this invention is to provide a high-precision, high-stability precision vibration sensing device and method based on a polarization metagrating. For example... Figure 1 As shown, the device includes an illumination module 1, a vibration sensing module 2, a detection module 3, and an optical fiber circulator 4. The illumination module 1 generates and outputs a linearly polarized laser with stable power and controlled polarization state. The vibration sensing module 2 is optically connected to the illumination module 1 and receives the linearly polarized laser, modulating it into a signal light carrying vibration information. Its core is a polarization meta-grating, which can modulate mechanical vibration information into the polarization state of the emitted light. The detection module 3 is optically connected to the vibration sensing module 2 and receives the signal light, extracts its polarization state information through two phase-shift signals, and demodulates the vibration parameters. The optical fiber circulator 4 is connected between the illumination module 1, the vibration sensing module 2, and the detection module 3, guiding the illumination light path to the vibration sensing module 2 and guiding the returning signal light path to the detection module 3.

[0051] like Figure 2As shown, the illumination module 1 includes a semiconductor laser 11, a first collimator 12, a polarizer 13, a first reflector 14, a second collimator 15, a first fiber polarization controller 16, a 99:1 fiber beam splitter 17, and a first photodiode 18. The beam emitted from the semiconductor laser 11 is collimated by the first collimator 12 and the polarizer 13 to obtain linearly polarized parallel light. In this embodiment, a semiconductor laser 11 with a center wavelength of 1550 nm is used. The beam is coupled into the optical fiber by the first reflector 14 and the second collimator 15, and then the polarization change in the optical fiber is compensated by the first fiber polarization controller 16, so that the laser light is linearly polarized when it reaches the vibration sensing module 2. The beam is split by the 99:1 fiber beam splitter 17, and the incident light with 1% power is detected by the first photodiode 18 to obtain the incident light power value. ,like Figure 7 As shown; 99% power incident light enters fiber optic circulator 4;

[0052] like Figure 3 As shown, the vibration sensing module 2 includes a third collimator 21, a polarization meta-grating 22, a first quarter-wave plate 23, a second quarter-wave plate 24, a second reflector 25, and a third reflector 26. The light emitted from the fiber optic circulator 4 enters the vibration sensing module 2, and after passing through the third collimator 21, it is parallelly illuminated by the polarization meta-grating 22. The polarization meta-grating 22 diffracts the spatially uniformly distributed linearly polarized light to ±1 orders, with polarization states of left-handed and right-handed circular polarization, respectively, and a diffraction angle of θ. , λ is the incident light wavelength, and a is the structural period. The ±1st order diffracted light passes through the first quarter-wave plate 23, the second quarter-wave plate 24, the second mirror 25, and the third mirror 26, respectively, and is reflected back to the polarization meta-grating 22 with the same polarization state and incident angle. The first quarter-wave plate 23 and the second quarter-wave plate 24 adjust the circularly polarized light twice to convert it into linearly polarized light and then back into circularly polarized light, thus canceling the polarization change caused by reflection.

[0053] The polarization meta-grating 22 is a vibration sensing element that can be directly connected to the object under test or mounted on a spring system to form a non-inertial vibration displacement measurement module or an inertial acceleration measurement module. In this embodiment, the polarization meta-grating 22 is mounted on a piezoelectric platform, which generates a standard sinusoidal vibration signal.

[0054] The polarization meta-grating 22 is fabricated on a transparent substrate using electron beam lithography and inductively coupled plasma etching techniques to create a nanoscale-thickness thin film of silicon. A nanometer-precision array of elliptical cylindrical particles, arranged with their major axis rotating in the positive x-axis direction, is then fabricated on this film. The angle between the major axis and the x-axis is [value missing]. 'a' represents the structural period, and 'x' represents the spatial coordinate. In this embodiment, the structural period is 5.84 μm. The material of the columnar particles can be metal or a high refractive index medium, including but not limited to gold, silver, silicon, etc. Figure 6 An electron microscope image of polarization metagrating 22 is shown.

[0055] The reflected light is combined by the polarization meta-grating 22 to form a spatially uniformly distributed linearly polarized signal light to be measured; the signal light propagates along the optical axis, and its polarization direction makes an angle with the x-axis. The vibrational displacement of the polarization meta-grating 22 relative to the optical axis There is a linear relationship. , where a is the structural period; the emitted signal light is coupled into the fiber optic circulator 4 via the third collimator 21 and enters the detection module 3;

[0056] like Figure 4 As shown, another structure of the vibration sensing module 2 includes a third collimator 21, a polarization meta-grating 22, a lens 27, a quarter-wave plate 28, and a reflector 29. Light entering the module after exiting the fiber optic circulator 4 is converted into parallel light by the third collimator 21 and illuminates the polarization meta-grating 22. The grating diffracts the incident linearly polarized light to ±1 orders, forming left-handed and right-handed circularly polarized light, respectively. The ±1 order diffracted light is collimated by the lens 27, passes through the quarter-wave plate 28, and is reflected back along the original path by the reflector 29. During the reflection process, the quarter-wave plate 28 acts twice, first converting the circularly polarized light into linearly polarized light, and then restoring it to circularly polarized light, thereby canceling the polarization state change introduced by the reflection and ensuring that the light returns to the polarization meta-grating 22 with its original polarization state and angle.

[0057] like Figure 5 As shown, the detection module 3 includes a 50:50 fiber optic beam splitter 31, a second fiber optic polarization controller 32, a first fiber optic polarizer 33, a second photodiode 34, a third fiber optic polarization controller 35, a second fiber optic polarizer 36, and a third photodiode 37.

[0058] The 50:50 fiber optic beam splitter 31 in the detection module 3 splits the fiber optic circulator signal light into two paths; the first path of light passes through the second fiber optic polarization controller 32 and the first fiber optic polarizer 33, and the second photodiode 34 detects the optical power. The second optical path passes through the third fiber polarization controller 35 and the second fiber polarizer 36, and the optical power is detected by the third photodiode 37. The second fiber polarization controller 32 and the third fiber polarization controller 35 are used to compensate for the depolarization effect in the fiber and adjust the phase difference between the two detection signals. Ideally, the polarization analyzer basis vectors of the two detection paths are in the x-direction and the 45° direction, respectively. The formula for the light intensity measured by the power meter, obtained through Malus's law, includes:

[0059] ,

[0060] ,

[0061] Signal optical power and Subtract the pre-recorded background noise when there is no incident light. Eliminate the influence of ambient light and reflected light from the surface of optical components; then compare with the light intensity recorded by the monitoring power meter. By using a ratio to eliminate the influence of laser power jitter, the normalized signal intensity is obtained. and ,like Figure 8 As shown;

[0062] The algorithm minimizes the second-order cosine fitting error of the normalized signal; and The calibration curves are obtained by fitting the second-order cosine function curves separately. and The error function is established based on the calibration curve fitting parameters as follows:

[0063] ,

[0064] After vibrating the polarization metagrating 22 at a fixed frequency, the above steps were repeated to measure the normalized signal intensity. and Find the vibration displacement that minimizes the error function. Displacement caused by vibration of reduced polarization metagrating The displacement curve is transformed, and the displacement vibration frequency and amplitude are obtained by performing a fast Fourier transform on the displacement curve.

[0065] In this embodiment, a meta-grating is mounted on a piezoelectric platform. The platform driving signal is a sinusoidal signal with a frequency of 1 Hz and a vibration amplitude of 2.5 μm. The displacement curve and its Fourier spectrum are experimentally measured as follows: Figure 9 As shown, the measured displacement frequency was 1 Hz and the amplitude was 2.548 μm. The noise floor of the displacement measurement near 1 Hz was approximately 60 pm.

[0066] By performing first-order differential data processing on the displacement vibration curve in this embodiment, the velocity vibration curve and its Fourier spectrum can be obtained, as follows: Figure 10 As shown. The measured velocity frequency was 1 Hz, and the amplitude was 16.012 μm / s. The noise floor of the velocity measurement near 1 Hz was approximately 5 × 10⁻⁶. -4 μm / s.

[0067] By performing second-order differential data processing on the displacement vibration curves in this embodiment, the acceleration vibration curves and their Fourier spectra can be obtained, such as... Figure 11 As shown. The measured acceleration frequency was 1 Hz, and the amplitude was 100.607 μm / s². 2 The noise floor of the acceleration measurement is approximately 5 × 10⁻⁶ at around 1 Hz. -3 μm / s 2 (Approximately 0.5 ng level, where g is the acceleration due to gravity).

[0068] The optical vibration sensor device and method based on a fiber-integrated metagrating of the present invention utilizes the metagrating to control the refraction of left-handed and right-handed circularly polarized light in opposite directions and adds different phases. The deflected light returns along its original path after passing through a quarter-wave plate and a mirror, and is then passed through the metagrating a second time to be combined, achieving a rotation of the signal light's polarization direction angle depending on the vibration displacement of the metagrating. After coupling into an optical fiber, the intensity of the polarization component is measured by a detection module, realizing rapid vibration measurement. This method features high sensitivity and high stability, and can achieve vibration displacement measurement with picometer accuracy and sub-ng acceleration measurement.

[0069] In a second aspect, the present invention provides an electronic device, comprising: one or more processors; and a memory for storing one or more programs; wherein, when the one or more programs are executed by the one or more processors, the one or more processors implement the aforementioned optical vibration sensing method of a fiber-based integrated metagrating.

[0070] Thirdly, the present invention provides a computer-readable storage medium having executable instructions stored thereon, which, when executed by a processor, enable the processor to implement the aforementioned optical vibration sensing method of a fiber-based integrated metagrating.

[0071] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An optical vibration sensing device based on a fiber-integrated metagrating, characterized in that, It includes an illumination module, a vibration sensing module, a detection module, and a fiber optic circulator; among which, The illumination module is used to generate and output linearly polarized laser with stable power and controlled polarization state; The vibration sensing module is optically connected to the illumination module through the fiber optic circulator, and is used to receive the linearly polarized laser and modulate it into signal light carrying vibration information. The detection module is optically connected to the vibration sensing module through the fiber optic circulator. It is used to receive the signal light, extract its polarization state information by detecting two phase-shift signals, and demodulate the vibration parameters.

2. The optical vibration sensing device based on a fiber-integrated metagrating according to claim 1, characterized in that, The illumination module includes a semiconductor laser, a first collimator, a polarizer, a first reflector, a second collimator, a first fiber polarization controller, a 99:1 fiber beam splitter, and a first photodiode. The light emitted from the semiconductor laser is collimated by the first collimator and polarized by the polarizer to form linearly polarized parallel light. After being reflected by the first mirror, it is coupled into the optical fiber by the second collimator. Most of the optical power is guided to the optical fiber circulator by the 99:1 optical fiber beam splitter, and a small portion of the optical power is split off and monitored by the first photodiode.

3. The optical vibration sensing device based on a fiber-integrated metagrating according to claim 1, characterized in that, The vibration sensing module includes a third collimator, a polarization meta-grating, a first quarter-wave plate, a second quarter-wave plate, a second mirror, and a third mirror. The third collimator collimates the linearly polarized light from the fiber optic circulator and projects it onto the polarization meta-grating. The polarization meta-grating splits the incident linearly polarized light into positive and negative first-order diffracted light with different circular polarization states. The positive and negative first-order diffracted light pass through the first and second quarter-wave plates, respectively, and are reflected back along their original paths by the second and third mirrors. After passing through their respective quarter-wave plates again, they are combined by the polarization meta-grating to form signal light.

4. The optical vibration sensing device based on a fiber-integrated metagrating according to claim 1, characterized in that, The vibration sensing module includes a third collimator, a polarization meta-grating, a lens, a quarter-wave plate, and a mirror. The light output from the third collimator is split by the polarization meta-grating, collimated by the lens, then passes through the quarter-wave plate and is reflected by the mirror. After returning along the original optical path, it passes through the polarization meta-grating again to form a signal light.

5. The optical vibration sensing device based on a fiber-integrated metagrating according to claim 1, characterized in that, The detection module includes a 50:50 fiber beam splitter, a second fiber polarization controller, a first fiber polarizer, a second photodiode, a third fiber polarization controller, a second fiber polarizer, and a third photodiode. The signal light from the fiber circulator is split into two paths by the 50:50 fiber beam splitter. After polarization compensation and phase adjustment by the second and third fiber polarization controllers, the light is detected by the first and second fiber polarizers, and finally the light intensity signal is detected by the second and third photodiodes.

6. The optical vibration sensing device based on a fiber-integrated metagrating according to claim 3 or 4, characterized in that, The polarization meta-grating is a nanostructure fabricated on a light-transmitting substrate, comprising an array of elliptical cylindrical nanoparticles arranged in a specific period, wherein the long axis of the nanoparticles rotates periodically with their position.

7. The optical vibration sensing device based on a fiber-integrated metagrating according to claim 6, characterized in that, The polarization meta-grating serves as a vibration-sensitive element, either directly mounted on the surface of the vibrating body under test or mounted on a spring-mass system to form an inertial acceleration measurement unit.

8. An optical vibration sensing method for a fiber-based integrated metagrating, applied to the device described in any one of claims 1-7, characterized in that, include: Linearly polarized laser with stable power and controllable polarization state is generated through an illumination module; The linearly polarized laser is introduced into the vibration sensing module through an optical fiber circulator. The mechanical vibration is converted into a polarization state rotation of the outgoing signal light using a polarization metagrating; The signal light carrying vibration information is introduced into the detection module through an optical fiber circulator; The polarization state information of the signal light is extracted by a two-channel phase-shift signal detection method; The detected light intensity signal is normalized and subjected to second-order cosine fitting. The vibration displacement information is recovered from the light intensity signal using a phase demodulation algorithm; By performing differential calculations on the displacement information, vibration velocity and acceleration information are obtained.

9. An electronic device, characterized in that, include: One or more processors; Memory, used to store one or more programs; When one or more programs are executed by the one or more processors, the one or more processors implement the optical vibration sensing method of the fiber-based integrated metagrating as described in claim 8.

10. A computer-readable storage medium, characterized in that, It stores executable instructions that, when executed by a processor, enable the processor to implement the optical vibration sensing method of a fiber-based integrated metagrating as described in claim 8.

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