Confocal spatial gating micro-libs technology detection method and device and system thereof

By employing a confocal spatial gating microscopic LIBS detection method, and utilizing a Gaussian fitting model and a three-dimensional micro-motion platform, the problem of unstable signal acquisition in traditional microscopic LIBS technology is solved. This enables high-precision automatic determination and real-time compensation of the focal position, thereby improving the system's detection stability and spatial resolution.

CN121186015BActive Publication Date: 2026-06-26OCEAN UNIV OF CHINA
View PDF 2 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
OCEAN UNIV OF CHINA
Filing Date
2025-10-15
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

In traditional microscopic LIBS technology, the effective aperture of single-mode optical fiber is extremely small, and the requirements for focal point position and optical axis alignment accuracy are high, which leads to unstable signal acquisition. In addition, the response speed of traditional three-dimensional micro-motion platform is limited, making it difficult to achieve real-time capture and analysis of the instantaneous evolution process of plasma.

Method used

The microscopic LIBS technique with confocal spatial gating is used to detect focal points. By acquiring multiple sets of sample data, a Gaussian fitting model of spectral intensity and Z-axis position is constructed based on a Gaussian function to achieve high-precision calibration and displacement measurement of the focal position. Combined with a three-dimensional micro-motion platform and spectral acquisition system, the focal position is determined automatically, in real time, and quantitatively, and automatic compensation is performed.

Benefits of technology

It improves the accuracy of focus determination and the stability of optical detection, ensures the quantitative correspondence between spectral intensity and object spatial position, realizes automatic compensation for the precise offset of pinholes in real-time detection, and enhances the spatial resolution and signal-to-noise ratio of the system.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN121186015B_ABST
    Figure CN121186015B_ABST
Patent Text Reader

Abstract

The application relates to the technical field of spectral detection, and discloses a confocal space gating microscopic LIBS technology detection method and a device and system thereof, wherein the method comprises the following steps: acquiring multiple groups of sample data, each group of sample data comprising the Z-axis position of a corresponding pinhole in a preset XY plane and the spectral intensity of emission light of plasma passing through the pinhole; constructing a Gaussian fitting model about the spectral intensity and the Z-axis position based on a Gaussian function to obtain a focal point position; and determining an object-side equivalent displacement according to the change amount of the spectral intensity passing through the pinhole and the focal point position in a detection process. The method introduces a Gaussian fitting model in the direction of the optical axis of the pinhole, establishes a functional relationship between the spectral response intensity and the pinhole displacement, and realizes high-precision calibration and displacement measurement of the focal point position. Compared with a traditional method, the method can realize automatic, real-time and quantitative focal point determination, and ensures the stability and reliability of the optical detection and analysis process.
Need to check novelty before this filing date? Find Prior Art