Gas inlet device and semiconductor processing apparatus

Abstract

The application provides an air inlet device and a semiconductor processing equipment, relates to the technical field of semiconductor processing, and aims to solve the problem that gas in an air inlet base is prone to condensation. The air inlet device comprises an air inlet base, a heating belt and a tether, the air inlet base is provided with an air inlet inner pipeline, the side surface of the air inlet base is fixedly connected with the heating belt, and the heating belt is constrained by the tether at multiple points along the length direction of the heating belt to be fixed to the side surface of the air inlet base. The air inlet device can improve the heat transfer efficiency of the heating belt to the air inlet base, improve the temperature of the air inlet base, and reduce the possibility of condensation of the gas in the air inlet base.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and more specifically, to an air intake device and semiconductor processing equipment. Background Technology

[0002] As the feature size of semiconductor manufacturing processes continues to shrink, the importance of dry etching technology is becoming increasingly prominent. Dry etching includes chemical vapor deposition (CVD), a process that does not require plasma devices and allows for precise and efficient etching by directly reacting chemical reactant gases—such as HF and catalysts—with the thin film.

[0003] Taking ammonia (NH3)-hydrogen fluoride (HF) etching as an example, the process flow is as follows: After the wafer enters the chamber, NH3 gas is adsorbed on the wafer surface. Subsequently, HF mixes with NH3 to generate NH4F, which reacts with SiO2 to generate solid byproducts. After annealing, the byproducts volatilize, completing the etching process. However, HF gas is extremely sensitive to temperature and pressure, and it is prone to condensation at low temperatures, leading to fluctuations in the flow rate of the mass flow controller (MFC) and affecting process stability. Summary of the Invention

[0004] The first aspect of this application aims to provide an air intake device to solve the technical problem of easy condensation of gas in existing air intake bases.

[0005] The first aspect of this application provides an air intake device, including an air intake base, a heating belt, and a tie. The air intake base is provided with an internal air intake pipe. The heating belt is fixedly connected to the side surface of the air intake base. The heating belt is constrained at multiple points along its own length by the tie to fix it to the side of the air intake base.

[0006] The beneficial effects of the air intake device in this application are:

[0007] The heating band is constrained at multiple points along its length by a binding material. The portion directly constrained by the binding material and adjacent areas can be tightly attached to the side surface of the intake base. This means that a wider area of ​​the heating band can be tightly attached to the intake base, allowing the heating band to fit more comprehensively and tightly against the side surface of the intake base. This minimizes or even eliminates the gap between the side surface of the intake base and the heating band, thereby improving the heat transfer efficiency from the heating band to the intake base. This also helps to increase the temperature of the intake piping within the intake base and reduces the possibility of gas condensation within the intake piping.

[0008] In an optional technical solution, the heating belt is provided with a plurality of binding holes spaced apart along its own length, and the binding material is inserted into the binding holes.

[0009] In an optional technical solution, the air intake base includes a first side and a second side disposed opposite to each other, the heating band includes a first heating band and a second heating band, and the binding perforation includes a through hole and a through hole;

[0010] The first heating band has multiple through holes spaced apart along its own length, and the elastic rope is passed through the multiple through holes to constrain the first heating band at multiple points, making it tightly fixed and close to the first side.

[0011] The second heating band has multiple through holes spaced apart along its length, and the elastic rope passes through the multiple through holes to constrain the second heating band at multiple points, making it tightly fixed and close to the second side.

[0012] In an optional technical solution, the air intake base includes a third side and a fourth side located between the first side and the second side and disposed opposite to each other; the plurality of through holes from the first end to the second end of the heating band are respectively the first through hole to the Nth through hole, and the plurality of through holes from the first end to the second end are respectively the first through hole to the Nth through hole; the first end and the second end respectively correspond to the two ends of the heating band; the restraint method of the tethering object on the heating band includes:

[0013] Lateral constraint, wherein the tether passes through the Mth through hole, across the third side and through the Mth through hole, and / or, across the fourth side and through the Mth through hole; M is any value from 1 to N;

[0014] The first longitudinal constraint, along the length direction of the first heating band, is that the tether passes through the Mth through-hole and the adjacent through-hole;

[0015] The second longitudinal constraint, along the length of the second heating band, is that the tether passes through the Mth through-hole and its adjacent through-hole.

[0016] In an optional technical solution, the binding material is an elastic rope, the middle part of which constrains the heating band at multiple points, and at least one end is fixedly connected to the adjustment mechanism; the adjustment mechanism is installed on the air intake base and is used to adjust the tension of the elastic rope.

[0017] In an optional technical solution, the adjustment mechanism includes an adjustment rod extending in a direction away from the air intake base, a first limiting member passing through the adjustment rod, the first limiting member being movably and lockably connected to the adjustment rod, and the elastic rope being lockable by the first limiting member.

[0018] In an optional technical solution, the adjustment mechanism further includes an elastic element and a second limiting element. The elastic element is used to support the first limiting element in a direction away from the air intake base. The second limiting element is located on the side of the first limiting element away from the air intake base and is used to prevent the first limiting element from moving in a direction away from the air intake base.

[0019] In an optional technical solution, the adjustment mechanism further includes a guide rod, which is inserted into the first limiting member.

[0020] In an optional technical solution, the binding perforation is movably arranged relative to the heating band.

[0021] The second aspect of this application aims to provide a semiconductor processing apparatus to solve the technical problem of easy condensation of gas in the inlet base.

[0022] The semiconductor processing equipment provided in the second aspect of this application includes the aforementioned air intake device.

[0023] By incorporating the aforementioned air intake device into the semiconductor processing equipment, the semiconductor processing equipment gains all the advantages of the aforementioned air intake device, which will not be elaborated upon here. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments or background art of this application, the drawings used in the description of the embodiments or background art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the air intake device in related technologies.

[0026] Figure 2 This is a schematic diagram of the air intake device provided in Embodiment 1 of this application.

[0027] Figure 3 This is a schematic diagram of the structure of the air intake device provided in Embodiment 1 of this application, in which the fixing rope passes through two heating belts.

[0028] Figure 4 This is a schematic diagram of the adjustment mechanism in the air intake device provided in Embodiment 1 of this application.

[0029] Explanation of reference numerals in the attached figures:

[0030] 100 - First heating band; 101 - First through hole; 102 - Second through hole; 103 - Third through hole; 104 - Fourth through hole; 105 - Fifth through hole; 106 - Sixth through hole; 107 - Seventh through hole; 108 - Eighth through hole; 110 - First fixing plate;

[0031] 200 - Second heating band; 201 - First through hole; 202 - Second through hole; 203 - Third through hole; 204 - Fourth through hole; 205 - Fifth through hole; 206 - Sixth through hole; 207 - Seventh through hole; 208 - Eighth through hole; 210 - Second fixing plate;

[0032] 300 - Intake base; 310 - Components;

[0033] 400 - Adjustment mechanism; 410 - Adjustment rod; 420 - First limiting component; 430 - Second limiting component; 440 - Elastic component; 450 - Guide rod; 460 - Base plate;

[0034] 500 - Binding material; 600 - Binding perforation. Detailed Implementation

[0035] like Figure 1 As shown, in related technologies, components 310 such as the Mass Flow Controller (MFC), Pressure Transducer (PT), Pressure Regulator, Manual Valve, and Pneumatic Valve are all mounted on the intake base 300. The two opposite sides of the intake base 300 without these components are wrapped with heating tape, which is secured by fasteners. In this solution, the existing method of securing the heating tape with fasteners cannot guarantee the tightness of the fit between the heating tape and the intake base 300 after each installation. If the fit is not tight, it will directly affect the heating effect on the intake base 300, making it difficult to maintain the temperature of the gas in the intake base 300, such as HF, increasing the risk of condensation and making accurate flow control difficult.

[0036] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0037] Example 1:

[0038] Figure 2 This is a schematic diagram of the air intake device provided in Embodiment 1 of this application. Figure 3 This is a schematic diagram showing the structure of the air intake device provided in Embodiment 1 of this application, in which the fixing rope passes through two heating belts. Figures 2-3As shown, the air intake device provided in Embodiment 1 of this application includes an air intake base 300, a heating belt and a tie 500. The air intake base 300 is provided with an internal air intake pipe. The heating belt is fixedly connected to the side surface of the air intake base 300. The heating belt is constrained at multiple points along its own length direction by the tie 500 to fix it to the side of the air intake base 300.

[0039] The heating band is constrained at more than 500 points along its length by the binding material. The portion directly constrained by the binding material 500 and the adjacent area can be in close contact with the side surface of the intake base 300. That is, a wider area of ​​the heating band can be in close contact with the intake base 300. This allows the heating band to fit more comprehensively and tightly against the side surface of the intake base 300, thereby minimizing or even eliminating the gap between the side surface of the intake base 300 and the heating band. This improves the heat transfer efficiency of the heating band to the intake base 300, which is beneficial to increasing the temperature of the intake internal pipeline within the intake base 300 and reducing the possibility of gas condensation in the intake internal pipeline.

[0040] In this embodiment, the air intake base 300 is generally rectangular-cubic in shape. In this application, based on the orientation shown in the figures, the surfaces of the air intake base 300 where the heating band is located are the two opposite side surfaces of the air intake base 300, more specifically, the front and rear surfaces of the air intake base 300. The surface of the air intake base 300 where the component 310 is located is the top surface of the air intake base 300, and correspondingly, the surface opposite to the top surface is the bottom surface. The side surface of the air intake base 300 where the adjustment mechanism 400 (described later) is located is the left side surface, and correspondingly, the surface opposite to the left side surface is the right side surface.

[0041] The fastening device 500 can be a rope, line, belt, or strip that is used to tie the heating belt to the air intake base 300.

[0042] like Figure 2 and Figure 3 As shown, optionally, the heating belt is provided with a plurality of binding holes 600 arranged at intervals along its own length direction, and the binding material 500 is inserted into the binding holes 600.

[0043] By setting multiple binding holes 600 spaced apart along the length of the heating band, at the position where the binding 500 passes through the binding holes 600, the binding 500 located outside the heating band can press the heating band against the side of the air intake base 300. Moreover, since the binding holes 600 are passed through by the binding 500, at least part of the binding holes 600, the movement of the binding holes 600 in the direction perpendicular to the length of the binding 500 is restricted, which can improve the fixing effect of the heating band.

[0044] Of course, in addition to the implementation method described later, simply using a binding material 500 to tie the outer surface of the heating band can also achieve a partial fixation effect on the heating band.

[0045] like Figure 2 and Figure 3 As shown, optionally, the air intake base 300 includes a first side and a second side disposed opposite to each other, the heating band includes a first heating band 100 and a second heating band 200; the binding perforation 600 includes a through hole and a through hole.

[0046] The first heating band 100 has multiple through holes spaced apart along its own length, and the elastic rope is threaded through the multiple through holes to constrain the first heating band 100 at multiple points to be tightly fixed and attached to the first side.

[0047] The second heating band 200 has multiple through holes spaced apart along its length, and an elastic rope is threaded through the multiple through holes to constrain the second heating band 200 at multiple points so that it is tightly fixed and adheres to the second side.

[0048] This configuration allows the heating band to heat the sides of the air intake base 300 while reducing interference between the heating band and the air intake and exhaust ends of the air intake base 300, thus fully utilizing the heating capacity of the heating band. Furthermore, the first heating band 100 is constrained by through-holes along its length, and the second heating band 200 is constrained by through-holes along its length, allowing it to adhere to the corresponding sides over a larger area along its length, thereby increasing the heated area of ​​the air intake base 300 and improving the heat transfer rate.

[0049] Specifically, in this embodiment, the first side and the second side are both sides of the intake base 300 without valves installed, for example, they can be... Figure 2 The front and rear sides are shown.

[0050] Specifically, in this embodiment, eight binding perforations 600, i.e., eight through holes, are provided on the first heating belt 100. Eight binding perforations 600, i.e., eight through holes, are also provided on the second heating belt 200. The eight through holes and eight through holes are arranged correspondingly along the length direction of the heating belt, i.e., the length direction of the air intake base 300. The distribution of the binding perforations 600 along the length direction of the heating belt can be uniform or non-uniform; this application does not impose any limitation on this distribution.

[0051] like Figure 2 and Figure 3As shown, optionally, the air intake base 300 includes a third side and a fourth side located between the first side and the second side and disposed opposite to each other; a plurality of through holes from the first end to the second end of the heating band are respectively the first through hole 101 to the Nth through hole, and a plurality of through holes from the first end to the second end are respectively the first through hole 201 to the Nth through hole; the first end and the second end correspond to the two ends of the heating band respectively; the restraint method of the fastener 500 on the heating band includes:

[0052] Lateral constraint: the tie 500 passes through the Mth through hole, crosses the third side and passes through the Mth through hole, and crosses the fourth side and passes through the Mth through hole; M is any value from 1 to N;

[0053] The first longitudinal constraint, along the length direction of the first heating band 100, is that the tie 500 passes through the Mth through hole and the adjacent through hole;

[0054] The second longitudinal constraint, along the length of the second heating band 200, involves the fastener 500 passing through the Mth through hole and its adjacent through hole.

[0055] This configuration allows the heating band to be secured to the first and second sides of the intake base 300 from the outside using the tie 500. Furthermore, the first longitudinal constraint restricts the movement of the first heating band 100 towards the third and fourth sides, and even fixes it in that direction; similarly, the second longitudinal constraint restricts the movement of the second heating band 200 towards the third and fourth sides, and even fixes it in that direction. In addition, areas of the first heating band 100 not directly pressed down by the first longitudinal constraint, and areas of the second heating band 200 not directly pressed down by the second longitudinal constraint, can also be partially bound by lateral constraints, thus securing them more firmly to the intake base 300. These areas bound by lateral constraints are spaced apart along the length of the first heating band 100 and the second heating band 200.

[0056] The third side is the mounting surface of the air intake base 300 for mounting various components 310. When the components 310 are located above the air intake base 300, the third side is the top surface. The fourth side is the base surface on which the air intake base 300 is placed, i.e., the bottom surface.

[0057] Specifically, such as Figure 3 As shown, Figure 3 This diagram shows the state where the first heating band 100, the second heating band 200, and the third side are unfolded together and pass through the restraint 500. The red line in the diagram represents the restraint 500, and the purple arrows and numbers indicate the different directions of the various segments of the restraint 500 at different locations. The black ellipse represents the binding perforations 600 provided on the heating band.

[0058] Pointing to 01, pointing to 05, pointing to 09, pointing to 13, pointing to 17, pointing to 21, pointing to 25, and pointing to 29, in Figure 3 The middle indicates an upward direction. Figure 3 These pointing directions are based on Figure 2 The indicated directions correspond to rightward directions (the actual directions are the same), and the segments of the restraints 500 represented by these directions may form a first longitudinal constraint on the first heating zone 100. Points 02, 06, 10, 14, 18, 22, 26, and 30, in... Figure 3 The middle indicates a rightward direction, based on... Figure 2 The indicated directions represent the sections of the fastener 500 that bypass the third side from the Nth through hole to the Nth through hole. These directions represent sections of the fastener 500 that may form a first longitudinal constraint on the first heating band 100 and / or may form a second longitudinal constraint on the second heating band 200. The arrows next to the directions 02', 06', 10', 14', 18', 22', 26', and 30' are continuous. Figure 3 The middle indicates a leftward direction, based on... Figure 2 The indicated orientations represent the sections of the fastener 500 that bypass the fourth side from the Nth through hole to the Nth through hole. Points 03, 07, 11, 15, 19, 23, 27, and 31 are shown. Figure 3 The middle indicates a rightward direction, based on... Figure 2 The directions shown indicate downward pointing, and these directions represent segments of the restraints 500 that may form a second longitudinal constraint on the second heating zone 200. Points 04, 08, 12, 16, 18, 22, 26, and 30, in... Figure 3 The middle indicates a rightward direction. Figure 3 These pointing directions are based on Figure 2 The indicated directions correspond to upward directions (the actual directions are the same), and the segments of the restraints 500 represented by these directions may form a first longitudinal constraint on the first heating zone 100. Directions 34, 35, 36, 37, 38, 39, 40, and 41, in... Figure 3 The middle indicates a downward direction. Figure 3 These pointing directions are based on Figure 2 The directions shown correspond to leftward directions (the actual directions are the same), and the segments of the restraints 500 represented by these directions may form a second longitudinal constraint on the second heating band 200. It should be noted that in order to ensure that the restraints 500 pass through the binding perforations 600, it cannot be guaranteed that all the corresponding segments of the restraints 500 represented by the above directions will constrain the heating band from the outside of the heating band.

[0059] In this embodiment, the fixing plate includes a first fixing plate 110 and a second fixing plate 210. The first fixing plate is disposed on the first side near the first end, and the second fixing plate 210 is disposed on the second side near the first end. One end of the tether 500 is connected to the first fixing plate 110, and the other end of the tether 500 is connected to the second fixing plate 210.

[0060] like Figure 3 As shown, the fastener 500 starts from the first fixing plate 110, and along the direction indicated by 01, first passes through the first through hole 101, then along the direction indicated by 02 in the figure, bypasses the third side and the component 310 installed on the third side, passes through the first through hole 201, extends downward from the inside of the heating band, and along the direction indicated by 02', bypasses the air intake base 300 from the fourth side; as shown Figure 3 As shown, the fastener 500 comes up from the fourth side, passes through the inside of the first heating band 100 at the first through hole 101, intersects with the angle originally formed at the first through hole 101, and then extends along the direction 05.

[0061] Starting from the segment indicated by 05, the fastener 500 can repeat multiple cycles. In each cycle, the fastener 500 points in the same direction as 01, 02, 03, 02' and 04 respectively. However, the holes it passes through change from the first through hole 101 and the first through hole 201 to the second through hole 102, the second through hole 202, the third through hole 103, and the third through hole 203, and so on, until it passes through the eighth through hole 108 for the second time.

[0062] Specifically, the above multiple loops can be implemented as follows: pointing to 05, 06, 07, 06', 08, 09, 10, 11, 10', 12, 13, 14, 15, 14', 16, 17, 18, 19, 18', 20, 21, 22, 23, 22', 24, 25, 26, 27, 26', 28, 29, and 30 as shown in the diagram. Pointing to 31, pointing to 30' and pointing to 32 pass through the second via 102, the second through hole 202, the second via 102, the third via 103, the fourth through hole 204, the third via 103, the fourth via 104, the fourth through hole 204, the fourth via 104, the fifth via 105, the fifth through hole 205, the fifth via 105, the sixth via 106, the sixth through hole 206, the sixth via 106, the seventh via 107, the seventh through hole 207, the seventh via 107, the eighth via 108, the eighth through hole 208, and the eighth via 108.

[0063] After several cycles are completed, the restraint 500 begins to apply a first longitudinal constraint to the second heating band 200. Specifically, according to... Figure 3 The middle finger 33 passes through the eighth through hole 208, and then passes through the seventh through hole 207, the sixth through hole 206, the fifth through hole 205, the fourth through hole 204, the third through hole 203, the second through hole 202, and the first through hole 201 in sequence according to the direction of ...

[0064] In the above scheme, the tethering objects 500 represented by pointing to 01, 02, 05, 06, 09, 10, 13, 14, 17, 18, 21, 22, 25, 26, 29, 30, 33, 35, 37, 39 and 41 all indicate that the corresponding segments of the tethering objects 500 are located outside the heating belt, that is, on the side of the heating belt away from the air intake base 300, and apply a force to the heating belt to press it tightly onto the air intake base 300. Pointing to 03, 04, 07, 08, 11, 12, 15, 16, 19, 20, 23, 24, 27, 28, 31, 32, 34, 36, 38, and 40 indicates that the corresponding sections of the tether 500 are located inside the heating belt and pass between the heating belt and the air intake base 300.

[0065] In other words, it can also be considered that the process from passing through the first through hole 101 for the first time to passing through the eighth through hole 208 for the second time follows the following rules: from the Mth through hole to the Mth via hole, the fastener 500 passes around the third side or the device installed on the third side and the outside of the heating band; from the Mth via hole to the Mth through hole, the fastener 500 passes through the inside of the heating band and passes around the fourth side; from the Mth through hole to the M+1th through hole, the fastener 500 passes around the outside of the heating band. From the second passage through the eighth through hole 208 to the second passage through the first through hole 201, the following pattern is followed: the tie 500 alternately passes through the outside and inside of the heating band between the through holes, that is: from the eighth through hole 208 to the seventh through hole 207, the tie 500 passes through the inside of the second heating band 200; from the seventh through hole 207 to the sixth through hole 206, the tie 500 passes through the outside of the second heating band 200; from the sixth through hole 206 to the fifth through hole 205, the tie 500 passes through the inside of the second heating band 200; and so on, until the tie 500 passes through the first through hole 201 and the outside of the second heating band 200 to connect to the second fixing plate 210.

[0066] The fastening elements 500, using the above-described insertion method, ensure that at each through-hole on the first heating band 100, only one of the four intersecting fastening elements 500 passes through that through-hole. Furthermore, three of the four intersecting fastening elements 500 can be located on the outer side of the first heating band 100, while only one fastening element 500 passing through the through-hole passes through the inner side of the first heating band 100—between the first heating band 100 and the first side surface. This allows for more fastening elements 500 to restrain the first heating band 100, securing it more firmly. Moreover, this insertion method, with the fastening elements 500 intersecting at angles at each through-hole, provides a stronger and more secure restraint on the heating band.

[0067] However, in the scheme described later for adjusting the tightness of the fasteners 500 using the adjusting mechanism 400, the fasteners 500 passing through each through hole can also avoid crossing at angles. That is, the fasteners 500 directly pass through the corresponding through holes or vias and are directly constrained by the corresponding through hole or via wall. There is no cross constraint between fasteners 500 that pass through the same through hole or via multiple times. That is, no cross knot is formed between them. As a result, no friction is generated between the angles of the fasteners 500, reducing the resistance of the fasteners 500 to the movement of the heating band. When the adjusting mechanism 400 adjusts the tightness of the fasteners 500, it can affect a larger proportion of the fasteners 500, so that the tension on more fasteners 500 increases or decreases synchronously, thus providing effective constraint on the heating band as a whole.

[0068] Of course, in another implementation, the first heating band 100 and the second heating band 200 can be constrained from above the air intake base 300 in the following order: first through hole 101, first through hole 201, second through hole 202, second through hole 102, third through hole 103, third through hole 203, fourth through hole 204, fourth through hole 104, fifth through hole 105, fifth through hole 205, sixth through hole 206, sixth through hole 106, seventh through hole 107, seventh through hole 207, eighth through hole 208, and eighth through hole 108. That is, the first heating band 100 and the second heating band 200 are connected by bypassing the third side.

[0069] Then, the binding material 500 is wrapped around the first heating band 100, the air intake base 300, and the second heating band 200 again at the positions of the eighth through hole 208 and the eighth through hole 108.

[0070] Then, it passes through the eighth through hole 108, the seventh through hole 107, the seventh through hole 207, the sixth through hole 206, the sixth through hole 106, the fifth through hole 105, the fifth through hole 205, the fourth through hole 204, the fourth through hole 104, the third through hole 103, the third through hole 203, the second through hole 202, the second through hole 102, the first through hole 101, and the first through hole 201, and connects to the second fixing plate 210. In this part, each connection between the Mth through hole and the Mth through hole bypasses the fourth side. Of course, the angles of the fastener 500 passing through each through hole and each via hole can intersect, thereby improving the fixation's strength and reducing the impact on the hole walls. Specifically, before passing through the first eighth through hole 108, the fastener 500 does not pass through any through hole or via hole, but is simply laid at the corresponding positions of the first heating band 100, the second heating band 200, the air intake base 300, and the component 310. After the insertion from the eighth through hole 108 to the seventh through hole 107 begins, the newly formed angle of the fastener 500 intersects with the original angle at each through hole or through hole, thus achieving two angle intersections. Alternatively, the angles may not intersect at each through hole or through hole, so that the tension on the fastener 500 can be adjusted by the adjustment mechanism 400 described later.

[0071] Figure 4 This is a schematic diagram of the regulating mechanism in the air intake device provided in Embodiment 1 of this application. Figure 2 and Figure 4 As shown, optionally, the fastener 500 is an elastic rope, with multiple points of restraint on the heating band in the middle of the elastic rope, and at least one end is fixedly connected to the adjustment mechanism 400; the adjustment mechanism 400 is installed on the air intake base 300 and is used to adjust the tightness of the elastic rope.

[0072] By setting the adjustment mechanism 400 and using the elastic rope fastener 500, the length of the elastic rope can be adjusted, thereby changing the tension on the elastic rope. This not only accommodates intake bases 300 of slightly different sizes, but also allows for increased tension after the elastic rope has secured the heating band, thus increasing the pressure of the elastic rope on the heating band and resulting in a tighter contact between the heating band and the intake base 300.

[0073] Specifically, in this embodiment, the adjustment mechanism 400 is located at one end of the intake base 300 along its length, for example, at the first end of the intake base 300. Figure 2 The left end. This setting allows full use of the adjustment range of the adjustment mechanism 400, enabling the elastic rope to undergo a greater length change when the adjustment mechanism 400 adjusts to the same size.

[0074] like Figure 4As shown, optionally, the adjustment mechanism 400 includes an adjustment rod 410 extending in a direction away from the air intake base 300, a first limiting member 420 passing through the adjustment rod 410, the first limiting member 420 being movably and lockably connected to the adjustment rod 410, and the elastic rope being lockable by the first limiting member 420.

[0075] By setting the adjusting rod 410 to cooperate with the first limiting member 420, and by utilizing the movement of the first limiting member 420 on the adjusting rod 410 and its locking, the first limiting member 420 can be in different axial positions relative to the adjusting rod 410, thereby changing the end position of the binding 500 locked to the first limiting member 420, so as to adjust the length of the elastic rope.

[0076] Specifically, in this embodiment, the end of the tether 500 can be connected to the first limiting member 420 via a spring hook. The spring hook can be directly hung on the first limiting member 420, for example, by using the hook portion to bypass the first limiting member 420, or by providing a hole in the first limiting member 420 for the hook portion to pass through the hole. Alternatively, in the scheme of setting the guide rod 450 described later, the hook portion of the spring hook is sleeved on the guide rod 450, changing the position of the first limiting member 420 relative to the guide rod 450. For example, by moving the first limiting member 420 away from the air intake base 300, the spring hook can be pushed to slide relative to the guide rod 450 in the direction away from the air intake base 300; if the first limiting member 420 is moved closer to the air intake base 300, the spring hook slides closer to the air intake base 300 under the force of the elastic rope, so that the elastic rope is shortened and the force of the elastic rope is reduced. The part of the spring hook that connects to the elastic rope can be a spiral spring with a certain degree of elasticity. Using a spring hook to connect the elastic rope and the first limiting member 420 not only facilitates installation and disassembly, but also allows the spring to provide a certain buffer and avoid stress concentration.

[0077] like Figure 4 As shown, optionally, the adjustment mechanism 400 further includes an elastic member 440 and a second limiting member 430. The elastic member 440 is used to support the first limiting member 420 in the direction away from the air intake base 300. The second limiting member 430 is located on the side of the first limiting member 420 away from the air intake base 300. The second limiting member 430 is used to prevent the first limiting member 420 from moving in the direction away from the air intake base 300.

[0078] By setting the elastic element 440, the first limiting element 420 can be flexibly supported in the direction away from the air intake base 300. Thus, by simply adjusting the position of the second limiting element 430 relative to the adjusting rod 410, it can cooperate with the elastic element 440 to achieve the positioning of the first limiting element 420.

[0079] Specifically, in this embodiment, the elastic element 440 can be a cylindrical helical compression spring. The elastic element 440 is fitted onto the adjusting rod 410, with one end abutting against the side of the first limiting member 420 facing the air intake base 300, and the other end abutting against the base plate 460. The base plate 460 can be fixedly installed on the side of the air intake base 300 other than the first side, second side, third side, and fourth side, and the adjusting rod 410 can be fixedly set on the base plate 460. The first limiting member 420 can be a plate, and the second limiting member 430 can be a wing nut. The adjusting rod 410 is provided with an external thread, and the wing nut and the external thread are screwed together so that the second limiting member 430 can be rotated relative to the adjusting rod 410 by hand, converting the rotation into movement of the second limiting member 430 in the length direction of the adjusting rod 410, thereby changing the position of the first limiting member 420 relative to the adjusting rod 410.

[0080] Therefore, as long as the second limiting member 430 rotates relative to the adjusting rod 410 within the elastic deformation range of the elastic member 440, the nut can self-lock with the external thread. After the rotation of the second limiting member 430 ends, the elastic force on the elastic member 440 pushes the first limiting member 420 away from the intake base 300. However, the first limiting member 420 is blocked by the second limiting member 430, so the position of the first limiting member 420 relative to the adjusting rod 410 remains fixed.

[0081] like Figure 4 As shown, optionally, the adjusting mechanism 400 also includes a guide rod 450, which is inserted into the first limiting member 420.

[0082] By setting the guide rod 450, the first limiting member 420 can be further limited to prevent it from tilting. In this way, when the first limiting member 420 is connected to the end of the elastic rope at different positions, especially when the torque generated by the force exerted by the end of the elastic rope on the first limiting member 420 at multiple points is unbalanced, it can avoid deflection due to torque imbalance.

[0083] In this embodiment, the guide rod 450 includes two rods. The two ends of the first limiting member 420 are respectively fitted onto the guide rod 450, and the two ends of the elastic rope are respectively connected to the near-end region of the first limiting member 420. Specifically, they can be connected to the near-end region of the first limiting member 420 via spring hooks. If it cannot be guaranteed that the first limiting member 420 is perpendicular to the guide rod 450, that is, if it cannot be guaranteed that the first limiting member 420 is perpendicular to the length direction of the air intake base 300, then the elastic ropes connected to the two ends of the first limiting member 420 will have different deformations and different forces, potentially causing the heating element to slide. Therefore, by setting two guide rods 450 and making them symmetrically distributed relative to the adjusting rod 410, the deformation of the elastic ropes can be the same, resulting in uniform force and preventing the heating element from sliding.

[0084] like Figure 2 and Figure 3 As shown, optionally, the binding perforation 600 is movably positioned relative to the heating band.

[0085] This configuration allows the binding perforation 600 to be staggered from the components on the air intake base 300 as much as possible along the length of the heating band when the components are arranged differently on the air intake base 300. Alternatively, it can increase the angle between the fastener 500, which passes from the binding perforation 600 on one side of the heating band to the binding perforation 600 on the other side of the heating band, and the sidewall of the component, thereby reducing the lateral force on the component.

[0086] Specifically, a waist-shaped hole extending along the length of the heating belt can be provided on the heating belt. An annular sliding member is slidably connected to the waist-shaped hole. A binding hole 600 is provided on the annular sliding member. Under the action of the binding 500 or by directly pushing the annular sliding member by hand, the annular sliding member can slide relative to the waist-shaped hole, thereby changing the position of the binding hole 600 relative to the heating belt.

[0087] Example 2:

[0088] Embodiment 2 also provides a semiconductor processing apparatus, including the above-mentioned air intake device.

[0089] By incorporating the aforementioned air intake device into the semiconductor processing equipment, the semiconductor processing equipment gains all the advantages of the aforementioned air intake device, which will not be elaborated upon here.

[0090] While this application discloses the above information, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of this application; therefore, the scope of protection of this application shall be determined by the scope defined in the claims.

[0091] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0092] In the above embodiments, descriptions of directions such as "up" and "down" are based on the accompanying drawings.

[0093] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application.

[0094] Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An air intake device characterized by, It includes an air intake base (300), a heating belt and a tie (500). The air intake base (300) is provided with an air intake inner pipe. The heating belt is fixedly connected to the side surface of the air intake base (300). The heating belt is constrained at multiple points along its own length by the tie (500) to fix it to the side of the air intake base (300). The heating belt is provided with a plurality of binding holes (600) arranged at intervals along its own length direction, and the binding material (500) is inserted into the binding holes (600); The air intake base (300) includes a first side and a second side disposed opposite to each other; the heating band includes a first heating band (100) and a second heating band (200); the binding perforation (600) includes a through hole and a through hole; The first heating band (100) has a plurality of holes spaced apart along its own length direction, and the fastener (500) passes through the plurality of holes to constrain the first heating band (100) at multiple points to be tightly fixed and close to the first side. The second heating band (200) has a plurality of through holes spaced apart along its length, and the fastener (500) passes through the plurality of through holes to constrain the second heating band (200) at multiple points to ensure that it is tightly fixed and adheres to the second side.

2. The air intake device of claim 1, wherein The air intake base (300) includes a third side and a fourth side located between the first side and the second side and disposed opposite to each other; the plurality of through holes from the first end to the second end of the heating strip are respectively the first through hole (101) to the Nth through hole, and the plurality of through holes from the first end to the second end are respectively the first through hole (201) to the Nth through hole; the first end and the second end correspond to the two ends of the heating strip respectively; The restraints (500) on the heating band include the following methods: Lateral constraint, the tether (500) passes through the Mth through hole, across the third side and through the Mth through hole, and / or, across the fourth side and through the Mth through hole; M is any value from 1 to N; The first longitudinal constraint, along the length direction of the first heating band (100), is that the fastener (500) passes through the Mth through-hole and the adjacent through-hole; The second longitudinal constraint, along the length direction of the second heating band (200), is that the fastener (500) passes through the Mth through hole and the adjacent through hole.

3. The air intake device according to claim 1 or 2, characterized in that The fastening device (500) is an elastic rope, which restrains the heating band at multiple points in the middle part of the elastic rope, and at least one end is fixedly connected to the adjustment mechanism (400); the adjustment mechanism (400) is installed on the air intake base (300) and is used to adjust the tightness of the elastic rope.

4. The air intake device of claim 3, wherein The adjustment mechanism (400) includes an adjustment rod (410) extending in a direction away from the air intake base (300), a first limiting member (420) passing through the adjustment rod (410), the first limiting member (420) being movably and lockably connected to the adjustment rod (410), and the elastic rope being lockable by the first limiting member (420).

5. The air intake device of claim 4, wherein The adjustment mechanism (400) further includes an elastic element (440) and a second limiting element (430). The elastic element (440) is used to support the first limiting element (420) in a direction away from the air intake base (300). The second limiting element (430) is located on the side of the first limiting element (420) away from the air intake base (300). The second limiting element (430) is used to prevent the first limiting element (420) from moving in a direction away from the air intake base (300).

6. The air intake device of claim 4, wherein The adjustment mechanism (400) further includes a guide rod (450), which is inserted into the first limiting member (420).

7. The air intake device according to claim 1 or 2, characterized by The binding perforation (600) is movably positioned relative to the heating band.

8. A semiconductor processing apparatus, characterized by comprising: The semiconductor processing equipment includes the air intake device according to any one of claims 1-7.

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