Automatic packaging equipment for hafnium tetrachloride

Abstract

The automatic hafnium tetrachloride packaging equipment comprises a glove box capable of being filled with inert gas, the glove box comprises a transfer cavity and a main cavity, and the transfer cavity is an independent cavity body and is arranged at the feeding end of the main cavity; the transfer cavity sequentially comprises a vacuum cavity and a plurality of cleaning cavities in the length direction of the main cavity, and the tail end cleaning cavity communicates with the main cavity. An independent transfer cavity is arranged, the transfer cavity sequentially comprises a vacuum cavity and a plurality of cleaning cavities in the length direction of a main cavity, and a first air isolating valve, a second air isolating valve and a vacuumizing assembly are arranged, so that a multi-stage material purification buffer area is jointly constructed. A material bottle firstly enters the vacuum cavity after being fed into the transfer cavity through the first conveying piece, and a vacuumizing program is started after the second air isolating valve is closed, so that most of gas and moisture are effectively removed; and then sequentially passing through a plurality of cleaning cavities, repeating a circulating purification process of vacuumizing-inert gas filling in each stage of cavity, and gradually removing oxygen and moisture left on the surface and in the environment.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of hafnium chloride, in particular to a hafnium chloride automatic packaging equipment. BACKGROUND

[0002] Hafnium chloride (HfCl4) as a highly sensitive water oxygen to high purity material, its packaging must be carried out in the inert gas glove box which continuously isolates air. In order to realize efficient continuous production, the industry is trying to use a conveyor belt to automatically send the material bottle into the transfer cabin of the glove box. However, this automatic feeding mode puts forward the following problems to the opening and closing system of the transfer cabin door. The traditional transfer cabin door control system is usually composed of a pressure sensor, a logic controller and a pneumatic / electric actuator. Its working process is "detecting pressure-logical judgment-sending instruction-driving execution", which causes inherent delay in system response. In the scene of high frequency and fast opening and closing to match the continuous feeding of the conveyor belt, the slow response seriously restricts the production efficiency of the whole line, forming a "speed bottleneck" in the automatic process. When the conveyor belt is used to feed through the cabin, the traditional translational or lifting door body cannot form effective sealing with the moving conveyor belt and the bottle body carried thereby. There is a cooperation gap between the door body and the conveyor belt, which will become a leakage point when the transfer cabin is vacuumized and filled with inert gas, not only affecting the purification efficiency, but also causing continuous exchange of internal and external environment gas, which greatly reduces the isolation function of the transfer cabin. SUMMARY

[0003] Therefore, the present application aims at the defects of the prior art, and provides a hafnium chloride automatic packaging equipment which solves the above problems.

[0004] To achieve the above purpose, the present application adopts the following technical scheme: a hafnium chloride automatic packaging equipment, comprising a glove box which can be filled with inert gas, the glove box comprising a transfer cavity and a main cavity, the transfer cavity being an independent cavity body and being arranged at the feeding end of the main cavity; The transfer cavity comprises a vacuum cavity and a plurality of cleaning cavities along the length direction of the main cavity in sequence, the terminal cleaning cavity is communicated with the main cavity, the vacuum cavity is communicated with the outside, and the first air isolation door which can be opened and closed is arranged between the vacuum cavity and the cleaning cavity, between the plurality of cleaning cavities and between the terminal cleaning cavity and the main cavity; the second air isolation door is arranged at the communication position of the vacuum cavity and the outside; At least one vacuumizing assembly is arranged on the glove box, and one end of the vacuumizing assembly is communicated with the vacuum cavity; A first conveying member is arranged beside the glove box, and one end of the first conveying member extends into the terminal cleaning cavity; A second conveying member is arranged in the cavity of the main cavity, and a plurality of conveying members are arranged along the conveying direction of the second conveying member in sequence; The feeding assembly comprises a storage container and a feeding member at the outlet end of the storage container, and the outlet end of the feeding member corresponds to the conveying surface of the second conveying member; The upper cover machine.

[0005] Further, the second air isolation door is located below the conveying surface of the first conveying member, and the first air isolation door is located above the conveying surface of the first conveying member; the inert gas concentration in the plurality of cleaning cavities increases successively from the one closest to the vacuum cavity.

[0006] Further, the second air isolation door comprises a pneumatic drive cylinder and a door body connected with the output shaft of the pneumatic drive cylinder, and the pneumatic drive cylinder has a cavity communicating with a gas pipe, one end of the gas pipe communicates with the cavity of the vacuum cavity, and the communicating part is adjacent to the communicating part of the vacuum cavity and the vacuum assembly.

[0007] Further, the pneumatic drive cylinder comprises a cylinder body, a rod body and a piston arranged in the cavity of the cylinder body, the piston is arranged at the end of the rod body, the other end of the rod body penetrates out of the cylinder body and is connected with the door body, and the communicating part of the gas pipe and the cylinder body is located at the upper part of the piston.

[0008] Further, the communicating part of the vacuum cavity and the outside is provided with a door frame corresponding to the door body, the two inner sides of the door frame are provided with elastic locking pins, and the two sides of the door body are provided with insertion holes for the moving ends of the elastic locking pins to be inserted.

[0009] Further, the width of the door frame is greater than that of the door body, and a sealing ring is arranged between the joint surface of the door frame and the door body.

[0010] Further, the elastic locking pin comprises a cylinder body, an elastic member arranged in the cylinder body, and an insertion rod driven by the elastic member, the insertion rod is inserted and matched with the insertion hole, and the bottom wall of the cylinder body is provided with a pipeline penetrating out of the glove box and communicating with the outside.

[0011] Further, the first conveying member comprises a rack and a plurality of rotating rollers arranged radially along the length direction of the rack, each rotating roller is sleeved with a flexible sleeve, and the two adjacent flexible sleeves are tightly attached, one end of the door body away from the pneumatic drive cylinder extends to the attachment position between the two adjacent flexible sleeves, and can penetrate through the gap between the two adjacent flexible sleeves under the drive of the pneumatic drive cylinder.

[0012] Further, the rack comprises a receiving plate connected with the two ends of the rotating roller, and the end of the plurality of rotating rollers extends into the inside of the receiving plate and is provided with gears meshing with each other.

[0013] Further, the plurality of rotating rollers comprises a first rod body, a second rod body located outside the door body, and a third rod body located inside the door body, the receiving plate is provided with a sliding groove, and the end of the second rod body extends into the sliding groove.

[0014] Compared with the prior art, the present application has obvious advantages and beneficial effects, specifically, according to the above technical scheme, by arranging an independent transfer cavity, the transfer cavity sequentially comprises a vacuum cavity and a plurality of cleaning cavities along the length direction of the main cavity, and is equipped with a first air isolation door, a second air isolation door and a vacuum pumping assembly, thereby jointly constructing a multi-stage material purification buffer zone. After the material bottle is sent into the transfer cavity by the first conveying element, the material bottle first enters the vacuum cavity, the vacuum pumping program is started after the second air isolation door is closed, thereby effectively removing most of the gas and moisture; then the material bottle sequentially passes through the plurality of cleaning cavities, and the cycle purification process of "vacuum pumping-inert gas filling" is repeated in each stage cavity, thereby gradually removing the residual oxygen and moisture in the surface and environment.

[0015] After the purification is completed, the first air isolation door between the terminal cleaning cavity and the main cavity is opened, the material bottle is sent into the main cavity, thereby completely isolating the outside air from entering, providing a continuously clean environment for the core packaging process, and the material bottle entering the main cavity is carried by the second conveying element, sequentially passes through the internal transmission, automatic filling of the material conveying assembly and automatic sealing of the upper cover machine and other processes. Under the protection of inert gas, the whole process does not need manual intervention, thereby significantly improving the production efficiency.

[0016] In order to more clearly illustrate the structural features and effects of the present application, the present application will be described in detail below in combination with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a perspective view of an embodiment of the present application.

[0018] Figure 2 is a plan view of an embodiment of the present application.

[0019] Figure 3 is a sectional view of the vacuum cavity of an embodiment of the present application.

[0020] Figure 4 is a sectional view of the vacuum cavity of an embodiment of the present application. Figure 2 is an enlarged view of B of the vacuum cavity.

[0021] Figure 5 is a sectional view of the vacuum cavity of an embodiment of the present application.

[0022] Figure 6 is a sectional view of the vacuum cavity of an embodiment of the present application.

[0023] Figure 7 is a sectional view of the vacuum cavity of an embodiment of the present application. Figure 3 is an enlarged view of C of the vacuum cavity.

[0024] BRIEF DESCRIPTION OF DRAWINGS Glove box 10, transfer cavity 11, vacuum cavity 11a, cleaning cavity 11b, door frame 111, elastic lock pin 112, barrel 1121, elastic member 1122, insertion rod 1123, pipe 1124, main chamber 12; First air door 30, second air door 31, pneumatic drive cylinder 311, cylinder body 3111, rod body 3112, piston 3113, door body 312, insertion hole 3121, air pipe 313, sealing ring A; Vacuum assembly 40; First conveying member 50, rack 51, storage plate 511, chute 5111, rotating drum 52, first rod 521, second rod 522, third rod 523, flexible sleeve 53, gear 54; Second conveying member 60; Material conveying assembly 70, storage container 71, feeding member 72; Upper cover machine 80. DETAILED DESCRIPTION

[0025] Please refer to Figures 1-7 As shown in the drawings, which shows the preferred first embodiment of the specific structure of the application is a hafnium chloride automatic packaging equipment, including the inert gas can be filled in glove box 10, glove box 10 includes transfer cavity 11 and main chamber 12, transfer cavity 11 is an independent chamber, and is provided in the feed end of main chamber 12; Transfer cavity 11 along the length direction of main chamber 12 includes vacuum cavity 11a and a plurality of cleaning cavities 11b in turn, the last cleaning cavity 11b and main chamber 12 are communicated, vacuum cavity 11a is communicated with the outside, vacuum cavity 11a and cleaning cavities 11b, a plurality of cleaning cavities 11b and the last cleaning cavity 11b and main chamber 12 are provided with first air door 30 which can be opened and closed, vacuum cavity 11a and the outside are provided with second air door 31; Glove box 10 is provided with at least one vacuum assembly 40, and one end of vacuum assembly 40 is communicated with vacuum cavity 11a; Glove box 10 is provided with first conveying member 50, and one end of first conveying member 50 extends to the last cleaning cavity 11b; The inner cavity of main chamber 12 is provided with second conveying member 60, and is provided with, along the conveying direction of second conveying member 60; Material conveying assembly 70, including storage container 71, and feeding member 72 corresponding to the discharge end of storage container 71, the discharge end of feeding member 72 corresponds to the conveying surface of second conveying member 60; The upper cover machine 80. By setting an independent transfer cavity 11, which sequentially contains a vacuum cavity 11a and a plurality of cleaning cavities 11b along the length direction of the main cavity, and being equipped with a first air door 30, a second air door 31 and a vacuum pumping assembly 40, a multi-stage material purification buffer zone is jointly constructed. After the material bottle is sent into the transfer cavity by the first conveying member 50, it first enters the vacuum cavity 11a, and after the second air door 31 is closed, the vacuum pumping program is started to effectively remove most of the gas and moisture; then it sequentially passes through a plurality of cleaning cavities 11b, and repeats the cycle purification process of "vacuum pumping-inert gas filling" in each stage of the cavity, gradually removing the residual oxygen and moisture on the surface and in the environment. After purification is completed, the first air door between the last cleaning cavity and the main cavity is opened, and the material bottle is sent into the main cavity 12, so as to completely isolate the outside air from entering, and provide a continuous clean environment for the core packaging process, and the material bottle entering the main cavity 12 is carried by the second conveying member 60, and sequentially passes through multiple processes such as internal transmission, automatic filling of the material conveying assembly 70 and automatic sealing of the upper cover machine 80. Under the protection of inert gas throughout the process, the whole process does not need manual intervention, which significantly improves the production efficiency.

[0026] As shown in Figure 3 , for example, the second air door 31 is located below the conveying surface of the first conveying member 50, and the first air door 30 is located above the conveying surface of the first conveying member 50; the inert gas concentration in the plurality of cleaning cavities 11b increases from one closest to the vacuum cavity 11a. The first conveying member 50 is arranged inside the transfer cavity 11, and the material bottle is first automatically sent into the vacuum cavity 11a under the condition that the second air door 31 is opened, realizing automatic feeding of the material from the outside to the vacuum cavity 11a, instead of the traditional manual placement. And the material bottle gradually transfers in the multi-stage purification interval formed by the vacuum cavity 11a and the plurality of cleaning cavities 11b. Since the second air door 31 is located below the conveying surface of the first conveying member 50, only the narrow gap through which the conveying member passes needs to be closed, instead of the medium-large opening required for regular personnel to pass through, so that the door body structure can be miniaturized and lightened.

[0027] It should be noted that the plurality of cleaning cavities 11b maintains an increasing inert gas concentration gradient, combined with the sequence opening and closing of the first air door 30, which can form effective concentration buffering and atmosphere isolation when the material passes through the stages, further inhibiting the penetration of external air, and ensuring that the surface of the material entering the main cavity and the cavity environment are fully purified.

[0028] As shown in Figure 3As shown, the exemplary second air door 31 includes a pneumatic drive cylinder 311 and a door body 312 connected with the output shaft of the pneumatic drive cylinder 311. The inner cavity of the pneumatic drive cylinder 311 is connected with an air pipe 313, one end of which is connected with the inner cavity of the vacuum cavity 11a, and the connection part is adjacent to the connection part of the vacuum cavity 11a and the vacuum assembly 40. When the vacuum assembly 40 performs the vacuumizing operation on the vacuum cavity 11a, the negative pressure environment formed in the cavity will directly act on the piston of the pneumatic drive cylinder 311 through the connected air pipe 313. The pressure difference will be automatically converted into a mechanical driving force to drive the door body 312 to complete the locking or opening operation. At the same time, since the working power directly comes from the process itself (vacuumizing), as long as the vacuumizing operation is normally performed, there is enough driving pressure to drive the door body, and it does not depend on the electronic sensor which is easy to be disturbed and the complex control program, thereby simplifying the system architecture and reducing the risk of door body misoperation caused by circuit failure or program error.

[0029] As shown in the drawings, Figure 5 As shown, the exemplary pneumatic drive cylinder 311 includes a cylinder body 3111, a rod body 3112 and a piston 3113 arranged in the inner cavity of the cylinder body 3111. The piston 3113 is arranged at the end of the rod body 3112, the other end of the rod body 3112 penetrates through the cylinder body 3111 and is connected with the door body 312, and the connection part of the air pipe 313 and the cylinder body 3111 is located at the upper part of the piston 3113. When the vacuum assembly 40 is started, the vacuum cavity 11a and the upper cavity of the cylinder body of the pneumatic drive cylinder 311 are synchronously vacuumized through the air pipe 313. Since the connection part of the air pipe 313 is located at the upper part of the piston 3113, a negative pressure will be formed in the cavity during the vacuumizing process. At this time, the lower part of the piston 3113 still maintains the connection with the atmospheric environment, and the air pressure thereof maintains the normal atmospheric pressure. Thus, a significant pressure difference is formed between the upper and lower parts of the piston 3113, and the atmospheric pressure acting on the lower part of the piston is much greater than the vacuum pressure acting on the upper part. The pressure difference is converted into an upward net thrust, which is transmitted through the rod body 3112 and finally drives the door body 312 to realize reliable locking or opening.

[0030] It should be noted that the sealing force of the door body 312 is not provided by a constant force of a spring or a motor, but is directly provided by the pressure difference generated by the vacuumizing process. Therefore, the more thorough the vacuumizing is, the higher the vacuum degree in the cavity is, and the greater the pressure difference between the upper and lower parts of the piston is, and the greater the sealing locking force obtained by the door body is, so as to ensure that the door body 312 can be smoothly moved upward under the pushing of the rod body 3112 and close the vacuum cavity 11a.

[0031] As shown in the drawings, Figure 3As shown, the exemplary vacuum cavity 11a is provided with a door frame 111 corresponding to the door body 312, and the two inner sides of the door frame 111 are provided with elastic locking pins 112, and the two sides of the door body 312 are provided with insertion holes 3121 for the elastic locking pins 112 to move into. The elastic locking pins 112 and the insertion holes 3121 are inserted and matched, forming a mechanical interlocking mechanism. When the door body 312 is closed in place under the action of air pressure, the locking pins can be accurately inserted into the corresponding insertion holes 3121 to form a rigid connection, effectively resisting the impact on the door body caused by the pressure fluctuation inside and outside the transmission cavity (whether it is positive pressure or negative pressure), preventing the door body from being accidentally opened or displaced due to the pressure difference.

[0032] Need to be explained, the mechanical locking pin and the aforementioned "negative pressure pneumatic locking" together constitute a double insurance system. The pneumatic locking provides sealing force synchronized with the purification process, and the mechanical locking pin serves as a basic, pressure-independent physical fixation. The two work together to ensure that the door body 312 can still be reliably locked in the correct position under any working condition (such as insufficient vacuum degree, small leakage of pneumatic system, etc.), greatly enhancing the overall safety of the system.

[0033] As shown in Figure 3 As shown, the door frame 111 is wider than the door body 312, and a sealing ring A is arranged between the joint surface of the door frame 111 and the door body 312. When the inside of the transmission cavity is evacuated and the outside is atmospheric pressure, this huge pressure difference will act on the wide surface on the inside of the door body, generating a strong, inward force that will press the door body tightly against the door frame 111. This makes the sealing ring A bear more pressure, and the sealing effect is automatically enhanced with the increase of the internal and external pressure difference, achieving the self-locking effect of "the more vacuum is extracted, the tighter the sealing is" in essence.

[0034] As shown in Figure 6As shown, the exemplary elastic lock pin 112 includes a cylinder 1121, an elastic member 1122 arranged in the cylinder 1121, and a plug 1123 driven by the elastic member 1122, the plug 1123 being inserted into the insertion hole 3121, and the bottom wall of the cylinder 1121 being provided with a pipe 1124 which communicates with the outside. In the natural state, the elastic force of the elastic member 1122 keeps the plug 1123 in the retracted state and accommodated in the cylinder 1121, and at this time the door body can be freely opened and closed. When the vacuum cavity 11a performs vacuumizing, a negative pressure is formed in the cavity. Since the end surface of the plug 1123 exposed in the cavity is subjected to the pressure difference effect directed to the cavity, and the inside of the cylinder maintains the atmospheric pressure through the pipe 1124, the pressure difference generates an outward force. When this force overcomes the restoring elastic force of the elastic member 1122, the plug 1123 is driven to extend outward and automatically inserted into the insertion hole 3121 of the door body, thereby realizing locking. When the material bottle needs to be transferred to the cleaning cavity 11b, the vacuum cavity 11a needs to be "broken" (i.e. filled with inert gas to restore the atmospheric pressure), at this time, the pressure difference acting on the end surface of the plug disappears, and the elastic member 1122 drives the plug to retract, and the locking is automatically released.

[0035] It should be noted that in order to ensure system stability, a plurality of cleaning cavities 11b are designed to have an increasing inert gas concentration. The vacuum cavity 11a is filled with inert gas, and the pressure thereof only needs to be balanced with the first adjacent cleaning cavity 11b to open the first air-tight door 30, without the need to immediately rise to the atmospheric pressure. Therefore, the pressure difference between the vacuum cavity 11a and the outside can still maintain sufficient pressure difference, which continues to act on the elastic lock pin 112 to overcome the spring force, so that the lock pin continuously maintains the locked state during the material transfer process, preventing it from being reset too early, thereby ensuring the effective isolation of the transfer cavity and the continuity of the process.

[0036] As Figure 4As shown, exemplarily, the first conveyor 50 includes a frame 51 and multiple rotating rollers 52 arranged radially along the length of the frame 51. Each rotating roller 52 is fitted with a flexible sleeve 53, and two adjacent flexible sleeves 53 are tightly fitted together. The end of the door 312 away from the pneumatic drive cylinder 311 extends to the area between the two adjacent flexible sleeves 53 and can pass through the gap between the two adjacent flexible sleeves 53 under the drive of the pneumatic drive cylinder 311. When the door 312 needs to be closed, its end is not pressed against the rigid roller, but faces upward at the area where the two adjacent flexible sleeves 53 are tightly fitted. Because the flexible material (such as rubber or polyurethane) will deform under pressure, it tightly wraps the edge of the door, thereby forming an effective dynamic sealing interface between the moving conveyor belt and the stationary door. In addition, since the door 312 is inserted into the "seam" of the two flexible sleeves 53, rather than forcibly pushing the rotating roller 52 open, the driving force required for the door 312 to move upward is smaller, and the interference with the smooth operation of the conveyor belt and the bottles on it is minimized.

[0037] The frame 51 includes a receiving plate 511 connected to both ends of the rotating rollers 52. The ends of the multiple rotating rollers 52 extend into the receiving plate 511 and are equipped with meshing gears 54. By meshing the gears 54 at the ends of all the rotating rollers 52 within the enclosed receiving plate 511, a linked gear system is formed. When power drives one roller, torque is synchronously transmitted to all other rollers through this gear system, ensuring smooth transport of the bottles on them.

[0038] It should be noted that, if there is a practical need, a sealing ring can be added at the connection between the rotating roller 52 and the storage plate 511 for sealing.

[0039] like Figure 3 As shown, exemplarily, the multiple rotating rollers 52 include a first rod 521, a second rod 522 located outside the door body 312, and a third rod 523 located inside the door body 312. A groove 5111 is provided on the receiving plate 511, and the end of the second rod 522 extends into the groove 5111. When the door body 312 moves upward under the drive of the pneumatic cylinder 311 and inserts between two adjacent flexible sleeves 53, it exerts an upward compressive force on the flexible sleeves. This compressive force causes the flexible sleeves to bulge and deform locally on both sides of the door body, thus occupying more space radially. By designing the ends of the first rod 521 and the second rod 522 to be movable within the groove 5111, these two rollers can passively make slight retractions to both sides under the compressive force of the door body, preventing the material bottles on the flexible sleeves from tipping over due to the bulging of the flexible sleeves 53.

[0040] It should be noted that the movement of the first rod body 521 and the second rod body 522 at the end in the sliding groove 5111 will not cause the adjacent two gears 54 to separate.

[0041] In summary, the design focus of the present application is; 1.1 The external material bottle is sent into the equipment by the first conveying member 50. At this time, the second air isolation door 31 in communication with the outside of the vacuum cavity 11a is in an open state. The rotating drum 52 of the first conveying member 50 is linked by the gear 54 to drive the flexible sleeve 53 to stably convey the material bottle, so that the material bottle passes through the second air isolation door 31 and enters the vacuum cavity 11a; 2.1 After the material bottle completely enters the vacuum cavity 11a, the vacuum assembly 40 is started, and the negative pressure generated by vacuumizing is transmitted to the upper cavity of the pneumatic drive cylinder 311 of the second air isolation door 31 through the air pipe 313, drives the piston 3113 to drive the rod body 3112 and the door body 312 to rise. The door body 312 is inserted into the abutting position of the two adjacent flexible sleeves 53 of the first conveying member 50 to realize dynamic sealing, complete the pneumatic locking of the vacuum cavity 11a and the outside, at the same time, the negative pressure formed in the vacuum cavity 11a acts on the elastic lock pin 112, drives the insertion rod 1123 to automatically insert into the insertion hole 3121 of the door body 312, forms mechanical interlocking, further enhances the sealing reliability; 3.1 After the vacuum cavity 11a completes vacuumizing, the “inert gas filling” operation is performed, so that the pressure is balanced with the adjacent first cleaning cavity 11b. At this time, the first air isolation door 30 between the vacuum cavity 11a and the first cleaning cavity 11b is opened, and the material bottle is sent into the first cleaning cavity 11b by the first conveying member 50. In the plurality of cleaning cavities 11b, the material bottle sequentially experiences the cycle purification of “vacuumizing-inert gas filling”. Each cleaning cavity 11b maintains an increasing inert gas concentration gradient, ensuring that the material surface and the environment are gradually purified; 4.1 After purification is completed, the first air isolation door 30 between the terminal cleaning cavity 11b and the main chamber 12 is opened, and the material bottle enters the main chamber 12 and is carried by the second conveying member 60. The material bottle sequentially passes through the automatic filling of the material conveying assembly 70 (the storage container 71 is accurately fed by the feeding member 72) and the automatic capping of the capping machine 80, and the whole process is completed under the protection of inert gas without manual intervention.

[0042] The above is only a preferred embodiment of the present application, and does not limit the technical scope of the present application in any way. Therefore, any slight modification, equivalent change and modification made according to the technical essence of the present application to the above embodiment still belongs to the scope of the technical solution of the present application.

Claims

1. An automatic packaging device for hafnium tetrachloride, comprising a glove box (10) capable of being filled with inert gas, characterized in that: The glove box (10) includes a transfer chamber (11) and a main chamber (12). The transfer chamber (11) is an independent chamber body and is located at the feed end of the main chamber (12). The transfer chamber (11) includes a vacuum chamber (11a) and multiple cleaning chambers (11b) in sequence along the length of the main chamber (12). The end cleaning chamber (11b) is connected to the main chamber (12), and the vacuum chamber (11a) is connected to the outside. A first air-tight door (30) that can be opened and closed is provided between the vacuum chamber (11a) and the cleaning chamber (11b), between the multiple cleaning chambers (11b), and between the end cleaning chamber (11b) and the main chamber (12). A second air-tight door (31) is provided at the connection between the vacuum chamber (11a) and the outside. The glove box (10) is provided with at least one vacuum assembly (40), and one end of the vacuum assembly (40) is connected to the vacuum chamber (11a); A first conveyor (50) is provided on one side of the glove box (10), and one end of the first conveyor (50) extends to the end cleaning chamber (11b); The main chamber (12) is provided with a second conveying component (60), and components are arranged sequentially along the conveying direction of the second conveying component (60); The material conveying assembly (70) includes a storage container (71) and a feeder (72) at the discharge end of the storage container (71), wherein the discharge end of the feeder (72) corresponds to the conveying surface of the second conveyor (60); Top cover machine (80).

2. The automatic packaging equipment for hafnium tetrachloride according to claim 1, characterized in that: The second air-isolating door (31) is located below the conveying surface of the first conveying member (50), and the first air-isolating door (30) is located above the conveying surface of the first conveying member (50); the concentration of inert gas in the plurality of cleaning chambers (11b) increases sequentially from the one closest to the vacuum chamber (11a).

3. The automatic packaging equipment for hafnium tetrachloride according to claim 2, characterized in that: The second air-tight door (31) includes a pneumatic drive cylinder (311) and a door body (312) connected to the output shaft of the pneumatic drive cylinder (311). The inner cavity of the pneumatic drive cylinder (311) is connected to an air pipe (313). One end of the air pipe (313) is connected to the inner cavity of the vacuum chamber (11a), and the connection point is adjacent to the connection point between the vacuum chamber (11a) and the vacuum pumping assembly (40).

4. The automatic packaging equipment for hafnium tetrachloride according to claim 3, characterized in that: The pneumatic drive cylinder (311) includes a cylinder body (3111), a rod (3112) and a piston (3113) disposed in the inner cavity of the cylinder body (3111). The piston (3113) is disposed at the end of the rod (3112). The other end of the rod (3112) passes through the cylinder body (3111) and is connected to the door body (312). The air pipe (313) is connected to the cylinder body (3111) at the upper part of the piston (3113).

5. The automatic packaging equipment for hafnium tetrachloride according to claim 3, characterized in that: The vacuum chamber (11a) is connected to the outside world by a door frame (111) corresponding to the door body (312). The door frame (111) has elastic locking pins (112) on both inner sides. The door body (312) has insertion holes (3121) on both sides for the movable end of the elastic locking pins (112) to be inserted.

6. The automatic packaging equipment for hafnium tetrachloride according to claim 5, characterized in that: The door frame (111) is wider than the door body (312), and a sealing ring (A) is provided between the joint surfaces of the door frame (111) and the door body (312).

7. The automatic packaging equipment for hafnium tetrachloride according to claim 5, characterized in that: The elastic locking pin (112) includes a cylindrical body (1121), an elastic element (1122) disposed inside the cylindrical body (1121), and a plug rod (1123) driven by the elastic element (1122). The plug rod (1123) is inserted into the socket (3121). The bottom wall of the cylindrical body (1121) is provided with a pipe (1124), which extends out of the glove box (10) and communicates with the outside.

8. The automatic packaging equipment for hafnium tetrachloride according to claim 3, characterized in that: The first conveying component (50) includes a frame (51) and multiple rotating rollers (52) arranged radially along the length of the frame (51). Each rotating roller (52) is fitted with a flexible sleeve (53), and two adjacent flexible sleeves (53) are tightly fitted together. The end of the door body (312) away from the pneumatic drive cylinder (311) extends to the area between the two adjacent flexible sleeves (53) and can pass through the gap between the two adjacent flexible sleeves (53) under the drive of the pneumatic drive cylinder (311).

9. The automatic packaging equipment for hafnium tetrachloride according to claim 8, characterized in that: The frame (51) includes a storage plate (511) connected to both ends of the rotating rollers (52). The ends of the multiple rotating rollers (52) extend into the storage plate (511) and are provided with meshing gears (54).

10. An automatic packaging device for hafnium tetrachloride according to claim 9, characterized in that: The multiple rotating rollers (52) include a first rod (521), a second rod (522) located outside the door (312), and a third rod (523) located inside the door (312). The storage plate (511) is provided with a sliding groove (5111), and the end of the second rod (522) extends into the sliding groove (5111).

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