A method and system for closed-loop monitoring of the state of a galvanometer
By acquiring galvanometer system information, setting monitoring parameters, obtaining galvanometer position feedback data and target position command information, and aligning timestamps with sampling delay time, a position data mapping model is constructed. This solves the problem of insufficient accuracy and reliability in galvanometer state monitoring, realizes closed-loop monitoring of galvanometer state, and improves the accuracy and reliability of galvanometer state identification.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-04
- Publication Date
- 2026-03-13
AI Technical Summary
Existing technologies cannot accurately evaluate galvanometer systems, set appropriate monitoring parameters, accurately assess the state of galvanometers, or accurately diagnose malfunctions. They also cannot prevent product defects caused by galvanometer malfunctions. Furthermore, existing technologies cannot address the issues of insufficient accuracy and reliability in galvanometer state monitoring.
By acquiring galvanometer system information, setting monitoring parameters, obtaining galvanometer position feedback data and target position command information, and aligning the timestamp with the sampling delay time, a position data mapping model is constructed to achieve closed-loop monitoring of the galvanometer status.
This improved the accuracy and reliability of galvanometer status, enhancing the accuracy and reliability of galvanometer status identification and preventing product defects and production interruptions caused by galvanometer malfunctions.
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Figure CN121252730B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of equipment monitoring technology, specifically to a closed-loop monitoring method and system for the state of a galvanometer. Background Technology
[0002] Galvanometers, as high-precision, high-response-speed core components for beam or motion control, are widely used in high-end manufacturing and technology fields such as laser processing, 3D printing, machine vision positioning, and medical equipment (laser therapy). Their performance directly determines the operational accuracy and stability of the terminal equipment. Monitoring the galvanometer's condition can promptly identify potential faults such as motor jamming, position drift, and signal delay. This not only avoids product defects and production interruptions caused by galvanometer malfunctions but also provides data support for preventative equipment maintenance, reducing the time and cost losses from blind repairs. Simultaneously, it ensures the reliability of processes in high-precision operating scenarios, making it a key factor in improving the overall performance and lifespan of terminal equipment.
[0003] Currently, galvanometer status monitoring suffers from several drawbacks. These include the inability to accurately assess the galvanometer system, the inability to set appropriate monitoring parameters, the inability to accurately evaluate the galvanometer feedback position, and the failure of existing technologies to consider the sampling delay between target position commands and position feedback data. Directly comparing the original timestamps leads to data misalignment and misjudgment of position deviation. Furthermore, converting the swing angle into a digital value relies on a fixed conversion coefficient, ignoring individual galvanometer differences and the influence of historical operating data, resulting in significant position data conversion errors. Consequently, the technology fails to accurately reflect the true motion state, leading to insufficient accuracy and reliability in monitoring. Summary of the Invention
[0004] To address the aforementioned technical problems, this paper provides a closed-loop monitoring method and system for galvanometers. This technical solution solves the problems mentioned in the background art, such as the inability to accurately evaluate the galvanometer system, the inability to set appropriate monitoring parameters, the inability to accurately evaluate the galvanometer feedback position, and the fact that existing technologies do not consider the sampling delay between the target position command and the position feedback data, directly comparing the original timestamps, resulting in data misalignment and misjudgment of the position deviation. Furthermore, when converting the swing angle into a digital quantity, it relies on a fixed conversion coefficient, ignoring the influence of individual galvanometer differences and historical operating data, resulting in large position data conversion errors and an inability to accurately reflect the true motion state, leading to insufficient monitoring accuracy and reliability.
[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:
[0006] A method for closed-loop monitoring of the state of a galvanometer includes:
[0007] Acquire galvanometer system information, which includes galvanometer basic parameter information and galvanometer operating frequency information;
[0008] Based on the information from the galvanometer system, monitoring parameter information is obtained, including the acquisition frequency of the position signal, the sampling delay time, and the position accuracy requirements.
[0009] Based on the monitoring parameter information and the acquisition frequency of the position signal, the galvanometer position feedback data and target position command information are obtained. The galvanometer position feedback data includes the position feedback data of the galvanometer X-axis and Y-axis drive motors.
[0010] Acquire the timestamps corresponding to the galvanometer position feedback data and the target position command information;
[0011] Based on the sampling delay time, the timestamp corresponding to the target position command information is shifted backward to obtain the target position command correction timestamp;
[0012] Align the timestamp of the target position command correction with the timestamp corresponding to the galvanometer position feedback data;
[0013] Based on the target location command data and protocol parsing, the digital value of the target location is obtained;
[0014] Based on the galvanometer position feedback data and monitoring parameter information, obtain the digital value of the galvanometer feedback position;
[0015] The difference between the digital value of the galvanometer feedback position and the digital value of the target position is used as the position deviation value;
[0016] Based on the monitoring parameter information and position deviation value, determine whether the galvanometer status is abnormal. If the position deviation value exceeds the position accuracy requirement, the galvanometer status is abnormal.
[0017] Preferably, the step of obtaining monitoring parameter information based on galvanometer system information specifically includes:
[0018] Based on the galvanometer system information, obtain the basic parameters of the galvanometer, including the rated swing range and maximum operating speed of the galvanometer motor;
[0019] Based on the basic parameters of the galvanometer and the analysis of its working status, quantitative standard information of the position data is obtained.
[0020] The acquisition frequency of the position signal is determined based on the operating frequency information of the galvanometer.
[0021] Based on the information from the galvanometer system, obtain the mechanical response delay time information;
[0022] The mechanical response delay time is used as the sampling delay time;
[0023] Based on the application scenario requirements analysis of the galvanometer, position accuracy requirements information is obtained, which represents the maximum allowable position error.
[0024] Based on the location data quantification standard information, the location signal acquisition frequency, sampling delay time, and location accuracy requirements, monitoring parameter information is obtained.
[0025] Preferably, the step of obtaining position data quantification standard information based on the galvanometer's basic parameter information and galvanometer working state analysis specifically includes:
[0026] Based on the basic parameters of the galvanometer, the rated swing range information of the galvanometer motor is obtained, including the maximum negative swing angle and the maximum positive swing angle.
[0027] Acquire historical monitoring data of the galvanometer, which includes historical physical quantity data and historical digital quantity data of the location;
[0028] Based on historical location data, obtain information on the number of digits in the location data.
[0029] Based on the number of digits in the location data, the range of location data is obtained, which includes the maximum value and the minimum value of the location data.
[0030] Based on the rated swing range information and historical monitoring data of the galvanometer, the swing physical span coefficient and span correction coefficient are obtained;
[0031] Based on the position digit range information, the difference between the maximum and minimum position digit values is used as the swing digit span coefficient.
[0032] The position quantization coefficient is obtained based on the swing physical span coefficient, the swing digital span coefficient, and the span correction coefficient;
[0033] Based on the position quantization coefficient and historical monitoring data of the galvanometer, a position data mapping model is obtained;
[0034] Based on the location data mapping model, obtain the location data quantization standard information;
[0035] Specifically, the range of the location digital quantity is as follows:
[0036]
[0037] In the formula, The number of digits for a positional number;
[0038] The location quantization coefficient is specifically:
[0039]
[0040] In the formula, For location quantization coefficients, This is the span correction factor. This is the coefficient for the physical span of the swing. This refers to the swing range coefficient;
[0041] The location data mapping model is specifically as follows:
[0042]
[0043] In the formula, For positional digital quantities, For location physical quantity, The minimum swing reference angle, This represents the minimum value of the positional numeric value.
[0044] Preferably, obtaining the swing physical span coefficient and span correction coefficient based on the rated swing range information and historical monitoring data of the galvanometer specifically includes:
[0045] The swing span coefficient is obtained based on the historical position data in the historical monitoring data of the galvanometer.
[0046] Based on the rated swing range information, the difference between the maximum positive swing angle and the maximum negative swing angle is used as the rated swing span coefficient.
[0047] The ratio of the rated swing span coefficient to the swing digital span coefficient is used as the basic quantization coefficient;
[0048] By mapping the historical physical quantity data of the galvanometer to the historical digital quantity data of the galvanometer, a historical monitoring dataset of the galvanometer is obtained. Each sub-item in the historical monitoring dataset of the galvanometer represents the physical quantity and digital quantity of the position corresponding to the swing position of the same motor.
[0049] Based on the historical monitoring dataset of the galvanometer, the sway physical span coefficient and span correction coefficient are obtained.
[0050] Preferably, obtaining the sway physical span coefficient and span correction coefficient based on the historical monitoring dataset of the galvanometer specifically includes:
[0051] Based on any sub-item in the historical monitoring dataset of the galvanometer, the difference between the historical location digital value corresponding to the sub-item and the minimum value of the location digital value is taken as the location feature digital value.
[0052] The product of the location feature digital value corresponding to each sub-item and the basic quantization coefficient is used as the location physical mapping value;
[0053] The difference between the historical location physical quantity and the location physical mapping quantity corresponding to each sub-item is used as the location mapping deviation coefficient;
[0054] Based on the historical monitoring dataset of the galvanometer, the mean value of the position mapping deviation coefficient is used as the minimum swing reference angle;
[0055] The difference between the historical position physical quantity corresponding to each sub-item in the galvanometer historical monitoring dataset and the minimum swing reference angle is taken as the position swing deviation value.
[0056] The ratio of the positional oscillation deviation value corresponding to each sub-item to the positional feature digital quantity is used as the feature quantization coefficient;
[0057] The product of the characteristic quantization coefficient and the swing digital span coefficient is used as the swing physical deviation value;
[0058] The average value of the swing physical deviation is used as the swing physical span coefficient, and the sum of the swing physical span coefficient and the minimum swing reference angle is used as the maximum swing reference angle.
[0059] Wherein, if the minimum swing reference angle is less than the negative maximum swing angle, the negative maximum swing angle is taken as the minimum swing reference angle; if the maximum swing reference angle is greater than the positive maximum swing angle, the positive maximum swing angle is taken as the maximum swing reference angle.
[0060] Based on the swing physical span coefficient, obtain the span correction coefficient.
[0061] Preferably, obtaining the span correction coefficient based on the swing physical span coefficient specifically includes:
[0062] The ratio of the rated swing span coefficient to the swing physical span coefficient is used as the swing characteristic deviation coefficient;
[0063] Based on the historical positional physical quantity data in the historical monitoring data of the galvanometer, the historical maximum positive swing angle and the historical maximum negative swing angle are obtained;
[0064] Based on the historical monitoring dataset of the galvanometer, the minimum value of the position mapping deviation coefficient is taken as the minimum swing characteristic angle;
[0065] The difference between the historical maximum positive swing angle and the minimum swing reference angle is used as the first swing physical coefficient;
[0066] The difference between the historical position digital value corresponding to the historical maximum positive swing angle and the minimum value of the position digital value is used as the historical first swing digital coefficient.
[0067] The ratio of the physical coefficient of the first historical swing to the digital coefficient of the first historical swing is used as the first quantization coefficient.
[0068] The difference between the historical negative maximum swing angle and the minimum swing characteristic angle is used as the historical second swing physical coefficient.
[0069] The difference between the historical position value corresponding to the historical maximum negative swing angle and the minimum value of the position value is used as the historical second swing value coefficient.
[0070] The ratio of the physical coefficient of the second historical swing to the digital coefficient of the second historical swing is used as the second quantization coefficient;
[0071] The ratio of the second quantization coefficient to the first quantization coefficient is used as the span deviation coefficient;
[0072] If the span deviation coefficient is greater than the swing characteristic deviation coefficient, then the swing characteristic deviation coefficient shall be used as the span deviation coefficient.
[0073] Furthermore, a closed-loop monitoring system for the state of a galvanometer is proposed to implement the monitoring method described above. The system includes a power interface, a power management module, an FPGA chip module, a communication module, a communication interface, an FPGA clock module, a DSP chip module, a DSP clock module, a DSP JTAG interface, an FPGA JTAG interface, an X-axis ADC module, a Y-axis ADC module, a motor interface, an RS422 receiver, a controller interface, a state interface, and a state output interface.
[0074] The power management module is used to provide the power required by the system. The FPGA chip module is used to acquire the position signals of the X-axis and Y-axis motors of the galvanometer in real time. The DSP chip module is communicatively connected to the FPGA chip module and is used to process the motor position data and generate control commands.
[0075] Optionally, the FPGA chip module further includes:
[0076] The position data receiving and decoding unit is used to receive and decode the position feedback data of the X-axis and Y-axis drive motors;
[0077] The ADC control unit is used to control the sampling frequency and delay time of the X-axis ADC module and the Y-axis ADC module.
[0078] Optionally, the DSP chip module further includes:
[0079] The threshold parsing unit is used to receive and parse the position accuracy requirement information;
[0080] A real-time monitoring and comparison unit is used to monitor the feedback positions of the X-axis and Y-axis motors in real time and compare them with the position accuracy requirement information.
[0081] The status feedback unit is used to report the status of the galvanometer system through the communication module.
[0082] Optionally, the X-axis ADC module and the Y-axis ADC module are respectively connected to the FPGA chip module to convert the galvanometer position feedback data into digital values of the galvanometer feedback position and output them to the FPGA chip module.
[0083] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0084] This invention proposes a closed-loop monitoring method and system for galvanometer status. By shifting the timestamp corresponding to the target position command information backward through sampling delay time, the target position command and galvanometer position feedback data are accurately aligned, laying a spatiotemporal synchronization foundation for the accurate calculation of subsequent position deviation values. By constructing a position data mapping model, the accurate conversion between the physical quantity and digital quantity of the galvanometer position is realized. By comparing the digital quantity of the galvanometer feedback position with the digital quantity of the target position, closed-loop monitoring of the galvanometer status is achieved, improving the accuracy and reliability of galvanometer status identification. Attached Figure Description
[0085] Figure 1 This is a flowchart of a closed-loop monitoring method for the state of a galvanometer proposed in this invention;
[0086] Figure 2 This is a flowchart of the monitoring parameter information acquisition process in this invention;
[0087] Figure 3 This is a flowchart illustrating the acquisition of location data quantization standard information in this invention.
[0088] Figure 4 This is a flowchart illustrating the process of obtaining the swing physical span coefficient and span correction coefficient in this invention.
[0089] Figure 5 This is a structural block diagram of a closed-loop monitoring system for the state of a galvanometer proposed in this invention. Detailed Implementation
[0090] The following description is intended to disclose the invention and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.
[0091] Reference Figure 1 - Figure 4 As shown, an embodiment of the present invention provides a closed-loop monitoring method for the state of a galvanometer, comprising:
[0092] Acquire galvanometer system information, which includes galvanometer basic parameter information and galvanometer operating frequency information;
[0093] Based on the information from the galvanometer system, monitoring parameter information is obtained, including the acquisition frequency of the position signal, the sampling delay time, and the position accuracy requirements.
[0094] Specifically, based on the galvanometer system information, the monitoring parameter information is obtained, including:
[0095] Based on the galvanometer system information, obtain the basic parameters of the galvanometer, including the rated swing range and maximum operating speed of the galvanometer motor;
[0096] Based on the basic parameters of the galvanometer and the analysis of its working status, quantitative standard information of the position data is obtained.
[0097] The acquisition frequency of the position signal is determined based on the operating frequency information of the galvanometer.
[0098] Based on the information from the galvanometer system, obtain the mechanical response delay time information;
[0099] The mechanical response delay time is used as the sampling delay time;
[0100] Based on the application scenario requirements analysis of the galvanometer, position accuracy requirements information is obtained, which represents the maximum allowable position error.
[0101] Based on the location data quantification standard information, the location signal acquisition frequency, sampling delay time, and location accuracy requirements, monitoring parameter information is obtained.
[0102] In this solution, the basic parameters of the galvanometer (rated swing range, maximum operating speed) are obtained and used as the basis for setting monitoring parameters to ensure that the monitoring parameters do not exceed the hardware limits of the equipment. Combined with the analysis of the galvanometer's working status, it is ensured that the subsequent position data capture can cover the fastest movement rhythm of the equipment, preventing monitoring distortion caused by parameters deviating from hardware characteristics (such as misjudgment of position data due to quantification standards exceeding the rated range). This lays the foundation for the "hardware adaptability" of the monitoring data. The quantification standard of position data is obtained based on the analysis of the galvanometer's basic parameters (such as rated swing range) and working status. Essentially, it is to establish a unique mapping basis for each galvanometer of "physical quantity (swing angle) - digital quantity (feedback signal)". Traditional monitoring often uses industry-standard fixed conversion factors (e.g., 1° corresponds to 100 digital quantities), ignoring individual differences in galvanometers (e.g., deviations between actual oscillations and digital quantities caused by motor assembly precision and aging). This step, however, derives quantization standards from the equipment's own basic parameters and calculates suitable quantization factors, ensuring that the position data conversion accurately reflects the equipment's true physical state. This significantly reduces conversion errors caused by "fixed conversion factors" and provides highly reliable digital data support for subsequent position deviation calculations.
[0103] In this embodiment, based on the Nyquist sampling theorem, twice the operating frequency of the galvanometer is used as the acquisition frequency of the position signal to achieve dynamic adaptation. For example, when the galvanometer is used for laser welding (operating frequency 1kHz, high-speed oscillation), the acquisition frequency is set to 2kHz to capture every rapid position change; when used for ordinary visual positioning (operating frequency 100Hz, low-speed oscillation), the acquisition frequency is set to 200Hz to avoid data redundancy and achieve a balance between monitoring accuracy and resource efficiency. According to the position accuracy requirements, the initial error judgment threshold is set to 200LSB (1LSB=4.9μrad, corresponding to a maximum permissible error of 980μrad).
[0104] Specifically, based on the galvanometer's basic parameter information and the analysis of its working state, quantitative standard information for position data is obtained, including:
[0105] Based on the basic parameters of the galvanometer, the rated swing range information of the galvanometer motor is obtained, including the maximum negative swing angle and the maximum positive swing angle.
[0106] Acquire historical monitoring data of the galvanometer, which includes historical physical quantity data and historical digital quantity data of the location;
[0107] Based on historical location data, obtain information on the number of digits in the location data.
[0108] Based on the number of digits in the location data, the range of location data is obtained, which includes the maximum value and the minimum value of the location data.
[0109] Based on the rated swing range information and historical monitoring data of the galvanometer, the swing physical span coefficient and span correction coefficient are obtained;
[0110] Based on the position digit range information, the difference between the maximum and minimum position digit values is used as the swing digit span coefficient.
[0111] The position quantization coefficient is obtained based on the swing physical span coefficient, the swing digital span coefficient, and the span correction coefficient;
[0112] Based on the position quantization coefficient and historical monitoring data of the galvanometer, a position data mapping model is obtained;
[0113] Based on the location data mapping model, obtain the location data quantization standard information;
[0114] Specifically, the range of the location digital quantity is as follows:
[0115]
[0116] In the formula, The number of digits for a positional number;
[0117] The location quantization coefficient is specifically:
[0118]
[0119] In the formula, For location quantization coefficients, This is the span correction factor. This is the coefficient for the physical span of the swing. This refers to the swing range coefficient;
[0120] The location data mapping model is specifically as follows:
[0121]
[0122] In the formula, For positional digital quantities, For location physical quantity, The minimum swing reference angle, This represents the minimum value of the positional numeric value.
[0123] This solution combines the rated swing range of the galvanometer (maximum swing angles in the negative and positive directions) with historical monitoring data (physical and digital quantities) to obtain the swing physical span coefficient, digital span coefficient, and span correction coefficient. Then, the position quantization coefficient k is calculated, achieving a precise and personalized mapping between the physical quantity (swing angle) and digital quantity of the galvanometer position. This solves the conversion error problem caused by traditional fixed conversion coefficients ignoring individual differences in the galvanometer (such as motor aging and assembly precision), providing a highly reliable digital basis for position deviation calculation. By introducing a span correction coefficient to dynamically adjust the position quantization coefficient, dynamic self-calibration of the position quantization standard is achieved, solving the long-term distortion problem caused by equipment wear and environmental interference in traditional fixed quantization standards. This ensures the accuracy of position data quantization throughout the galvanometer's entire lifecycle, providing a guarantee for the long-term reliability of closed-loop status monitoring.
[0124] Specifically, based on the rated swing range information and historical monitoring data of the galvanometer, the swing physical span coefficient and span correction coefficient are obtained, including:
[0125] The swing span coefficient is obtained based on the historical position data in the historical monitoring data of the galvanometer.
[0126] Based on the rated swing range information, the difference between the maximum positive swing angle and the maximum negative swing angle is used as the rated swing span coefficient.
[0127] The ratio of the rated swing span coefficient to the swing digital span coefficient is used as the basic quantization coefficient;
[0128] By mapping the historical physical quantity data of the galvanometer to the historical digital quantity data of the galvanometer, a historical monitoring dataset of the galvanometer is obtained. Each sub-item in the historical monitoring dataset of the galvanometer represents the physical quantity and digital quantity of the position corresponding to the swing position of the same motor.
[0129] Based on the historical monitoring dataset of the galvanometer, the sway physical span coefficient and span correction coefficient are obtained.
[0130] In this solution, a basic quantization coefficient is calculated using the rated swing span coefficient (the physical swing range of the galvanometer hardware design) and the swing digital span coefficient (the fluctuation range of historical digital data). This establishes an initial correlation between the physical swing capability and digital feedback of the galvanometer at the hardware design level, providing a precise design benchmark for the conversion between physical and digital positional quantities. Through the historical monitoring dataset of the galvanometer (where physical and digital quantities correspond one-to-one at the same swing position), empirical evidence is provided for obtaining the swing physical span coefficient and span correction coefficient, providing a data foundation for the dynamic optimization of the quantization model and ensuring that the position quantization standard continuously adapts to changes in equipment status. Based on the swing physical span coefficient and span correction coefficient obtained from the dataset, the impact of individual galvanometer differences (such as motor assembly precision and mechanical wear) on the physical-digital mapping can be accurately captured, replacing the traditional approach of "uniform industry coefficients." For example, the actual swing range of an aging galvanometer may shrink due to mechanical wear; this step allows for real-time adjustment of the quantization coefficient, ensuring that the position quantization standard of each galvanometer accurately matches its current actual performance, avoiding quantization distortion caused by individual differences, and improving the personalized adaptability of condition monitoring.
[0131] Specifically, based on the historical monitoring dataset of the galvanometer, the sway physical span coefficient and span correction coefficient are obtained, including:
[0132] Based on any sub-item in the historical monitoring dataset of the galvanometer, the difference between the historical location digital value corresponding to the sub-item and the minimum value of the location digital value is taken as the location feature digital value.
[0133] The product of the location feature digital value corresponding to each sub-item and the basic quantization coefficient is used as the location physical mapping value;
[0134] The difference between the historical location physical quantity and the location physical mapping quantity corresponding to each sub-item is used as the location mapping deviation coefficient;
[0135] Based on the historical monitoring dataset of the galvanometer, the mean value of the position mapping deviation coefficient is used as the minimum swing reference angle;
[0136] The difference between the historical position physical quantity corresponding to each sub-item in the galvanometer historical monitoring dataset and the minimum swing reference angle is taken as the position swing deviation value.
[0137] The ratio of the positional oscillation deviation value corresponding to each sub-item to the positional feature digital quantity is used as the feature quantization coefficient;
[0138] The product of the characteristic quantization coefficient and the swing digital span coefficient is used as the swing physical deviation value;
[0139] The average value of the swing physical deviation is used as the swing physical span coefficient, and the sum of the swing physical span coefficient and the minimum swing reference angle is used as the maximum swing reference angle.
[0140] Wherein, if the minimum swing reference angle is less than the negative maximum swing angle, the negative maximum swing angle is taken as the minimum swing reference angle; if the maximum swing reference angle is greater than the positive maximum swing angle, the positive maximum swing angle is taken as the maximum swing reference angle.
[0141] Based on the swing physical span coefficient, obtain the span correction coefficient.
[0142] In this scheme, the minimum swing reference angle is obtained by calculating the position mapping deviation coefficient and taking the average value, which can quantify the system-level deviation of the galvanometer caused by assembly errors, mechanical wear, etc. Traditional quantification models often assume that physical quantities and digital quantities have an ideal linear correspondence, ignoring such system deviations, resulting in fixed distortions in the quantification results. This step refines the capture of position-level deviations and achieves accurate adaptation to individual differences. By calculating the position swing deviation value and characteristic quantization coefficient of each sub-item, and then deriving the swing physical deviation value and physical span coefficient, the individual dynamic differences of the galvanometer can be captured position by position.
[0143] Specifically, based on the swing physical span coefficient, the span correction coefficient is obtained, which includes:
[0144] The ratio of the rated swing span coefficient to the swing physical span coefficient is used as the swing characteristic deviation coefficient;
[0145] Based on the historical positional physical quantity data in the historical monitoring data of the galvanometer, the historical maximum positive swing angle and the historical maximum negative swing angle are obtained;
[0146] Based on the historical monitoring dataset of the galvanometer, the minimum value of the position mapping deviation coefficient is taken as the minimum swing characteristic angle;
[0147] The difference between the historical maximum positive swing angle and the minimum swing reference angle is used as the first swing physical coefficient;
[0148] The difference between the historical position digital value corresponding to the historical maximum positive swing angle and the minimum value of the position digital value is used as the historical first swing digital coefficient.
[0149] The ratio of the physical coefficient of the first historical swing to the digital coefficient of the first historical swing is used as the first quantization coefficient.
[0150] The difference between the historical negative maximum swing angle and the minimum swing characteristic angle is used as the historical second swing physical coefficient.
[0151] The difference between the historical position value corresponding to the historical maximum negative swing angle and the minimum value of the position value is used as the historical second swing value coefficient.
[0152] The ratio of the physical coefficient of the second historical swing to the digital coefficient of the second historical swing is used as the second quantization coefficient;
[0153] The ratio of the second quantization coefficient to the first quantization coefficient is used as the span deviation coefficient;
[0154] If the span deviation coefficient is greater than the swing characteristic deviation coefficient, then the swing characteristic deviation coefficient shall be used as the span deviation coefficient.
[0155] In this scheme, the swing characteristic deviation coefficient is calculated by the ratio of the rated swing span coefficient to the swing physical span coefficient. This quantifies the degree to which the physical performance of the galvanometer deviates from the rated value due to aging, wear, etc., into a calculable coefficient. This overcomes the limitation of traditional methods that ignore the actual changes in the equipment's state, providing a deviation benchmark for the dynamic calibration of the subsequent quantification model. It captures the bidirectional swing asymmetry and improves the mechanical fit of the quantification model. The first and second quantification coefficients are calculated separately, and a refined analysis is performed on the difference between the physical and digital mapping of the positive and negative swing of the galvanometer. The deviation range is dynamically constrained to ensure the physical rationality of the correction coefficient. Through the constraint logic that "the span deviation coefficient does not exceed the swing characteristic deviation coefficient", the correction coefficient is prevented from deviating excessively from the actual characteristics of the equipment due to data fluctuations or errors during the calculation process, ensuring that the final span deviation coefficient is always within the reasonable deviation range of the galvanometer hardware performance.
[0156] Understandably, when evaluating the actual swing angle range of a galvanometer based on historical data, the obtained actual swing angle range is often smaller than the true swing angle range because the motor does not consistently operate at its maximum swing angle in historical data. Therefore, it is necessary to correct the actual swing angle range to ensure its accuracy and reliability.
[0157] Based on the monitoring parameter information and the acquisition frequency of the position signal, the galvanometer position feedback data and target position command information are obtained. The galvanometer position feedback data includes the position feedback data of the galvanometer X-axis and Y-axis drive motors.
[0158] Acquire the timestamps corresponding to the galvanometer position feedback data and the target position command information;
[0159] Based on the sampling delay time, the timestamp corresponding to the target position command information is shifted backward to obtain the target position command correction timestamp;
[0160] Align the timestamp of the target position command correction with the timestamp corresponding to the galvanometer position feedback data;
[0161] Based on the target location command data and protocol parsing, the digital value of the target location is obtained;
[0162] Based on the galvanometer position feedback data and monitoring parameter information, obtain the digital value of the galvanometer feedback position;
[0163] The difference between the digital value of the galvanometer feedback position and the digital value of the target position is used as the position deviation value;
[0164] Based on the monitoring parameter information and position deviation value, determine whether the galvanometer status is abnormal. If the position deviation value exceeds the position accuracy requirement, the galvanometer status is abnormal.
[0165] In this scheme, analog signals, i.e., galvanometer position feedback data, are substituted into the position data mapping model through digital-to-analog conversion and converted into digital quantized values to obtain the digital quantity of galvanometer feedback position.
[0166] Reference Figure 5 As shown, further, in conjunction with the above-mentioned closed-loop monitoring method for galvanometer status, a closed-loop monitoring system for galvanometer status is proposed, including a power interface, a power management module, an FPGA chip module, a communication module, a communication interface, an FPGA clock module, a DSP chip module, a DSP clock module, a DSP JTAG interface, an FPGA JTAG interface, an X-axis ADC module, a Y-axis ADC module, a motor interface, an RS422 receiver, a controller interface, a status interface, and a status output interface;
[0167] The power management module is used to provide the power required by the system. The FPGA chip module is used to acquire the position signals of the X-axis and Y-axis motors of the galvanometer in real time. The DSP chip module is communicatively connected to the FPGA chip module and is used to process the motor position data and generate control commands.
[0168] The FPGA chip module also includes:
[0169] The position data receiving and decoding unit is used to receive and decode the position feedback data of the X-axis and Y-axis drive motors;
[0170] The ADC control unit is used to control the sampling frequency and delay time of the X-axis ADC module and the Y-axis ADC module.
[0171] The DSP chip module also includes:
[0172] The threshold parsing unit is used to receive and parse the position accuracy requirement information;
[0173] A real-time monitoring and comparison unit is used to monitor the feedback positions of the X-axis and Y-axis motors in real time and compare them with the position accuracy requirement information.
[0174] The status feedback unit is used to report the status of the galvanometer system through the communication module.
[0175] The X-axis ADC module and the Y-axis ADC module are respectively connected to the FPGA chip module to convert the galvanometer position feedback data into digital values of the galvanometer feedback position and output them to the FPGA chip module.
[0176] In this embodiment, the X-axis ADC module and the Y-axis ADC module are used to convert the analog position signals of the X-axis and Y-axis motors into digital signals;
[0177] A communication module, including an RS422 receiver, is used to communicate with an external controller. The communication module supports the RS422 protocol and communicates with external devices through the controller interface.
[0178] Motor interface, used to connect the X-axis and Y-axis drive motors of the galvanometer;
[0179] The status interface and status output interface are used to monitor and provide feedback on the status of the galvanometer system. The status of the galvanometer system includes the operating status of the two axial drive motors, the communication link status, and the power status. The operating status, communication link status, and power status are monitored by the corresponding sensors.
[0180] An FPGA clock module is used to provide clock signals to the FPGA chip module;
[0181] A DSP clock module is used to provide a clock signal to the DSP chip module.
[0182] The FPGA JTAG interface and the DSP JTAG interface are used for debugging the FPGA chip module and the DSP chip module, respectively.
[0183] Specifically, the FPGA chip module receives and parses the target position data of the X / Y axis motors sent by the XY2-100 protocol galvanometer controller, converts it into signed 16-bit parallel data, and simultaneously receives the X / Y axis motor feedback position data after ADC conversion, generating two sets of raw position data.
[0184] The DSP chip module reads two sets of raw position data, stores them in four RAM storage areas, and calculates the difference between the target position and feedback position of the motor at the same time based on the preset or real-time received judgment threshold and comparison delay time. Finally, it compares the difference with the error threshold. If the error exceeds the threshold, an abnormal alarm is generated; otherwise, it is normal.
[0185] In this solution, the motor operating status and communication link status are monitored through the status interface, and reported to external devices through the status output interface. It is understood that monitoring the motor operating status and communication link status is a conventional technical means in this field, so it will not be described in detail here.
[0186] In summary, the advantages of this invention are as follows: by shifting the timestamp corresponding to the target position command information backward through sampling delay time, the precise alignment of the target position command and the galvanometer position feedback data is achieved, laying a spatiotemporal synchronization foundation for the accurate calculation of subsequent position deviation values; by constructing a position data mapping model, the precise conversion between the physical quantity and digital quantity of the galvanometer position is achieved; and by using the digital quantity of the galvanometer feedback position and the digital quantity of the target position, closed-loop monitoring of the galvanometer state is achieved, improving the accuracy and reliability of galvanometer state identification.
[0187] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention. The scope of protection claimed by the appended claims and their equivalents is defined.
Claims
1. A method for state closed loop monitoring of a galvanometer, characterized in that, The method comprises the following steps: acquiring galvanometer system information, the galvanometer system information comprising galvanometer basic parameter information and galvanometer working frequency information; acquiring monitoring parameter information according to the galvanometer system information, the monitoring parameter information comprising position signal acquisition frequency, sampling delay time and position precision requirement information; acquiring galvanometer position feedback data and target position instruction information based on the position signal acquisition frequency according to the monitoring parameter information, the galvanometer position feedback data comprising position feedback data of X-axis and Y-axis galvanometer drive motors; acquiring time stamps corresponding to the galvanometer position feedback data and the target position instruction information; offsetting the time stamps corresponding to the target position instruction information backward based on the sampling delay time to acquire target position instruction correction time stamps; aligning the target position instruction correction time stamps with the time stamps corresponding to the galvanometer position feedback data; acquiring target position digital quantity based on protocol analysis according to the target position instruction data; acquiring galvanometer feedback position digital quantity according to the galvanometer position feedback data and the monitoring parameter information; taking the difference between the galvanometer feedback position digital quantity and the target position digital quantity as a position deviation value; judging whether the galvanometer state is abnormal according to the monitoring parameter information and the position deviation value, and if the position deviation value exceeds the position precision requirement, the galvanometer state is abnormal; The method further comprises the following steps: acquiring galvanometer basic parameter information according to the galvanometer system information, the galvanometer basic parameter information comprising rated swing range and maximum running speed of the galvanometer motor; acquiring position data quantization standard information based on galvanometer working state analysis according to the galvanometer basic parameter information; determining the position signal acquisition frequency according to the galvanometer working frequency information; acquiring mechanical response delay time information according to the galvanometer system information; taking the mechanical response delay time as the sampling delay time; acquiring position precision requirement information based on galvanometer application scenario requirement analysis, the position precision requirement information representing the maximum position error allowed; acquiring the monitoring parameter information according to the position data quantization standard information, the position signal acquisition frequency, the sampling delay time and the position precision requirement information; The method further comprises the following steps: acquiring rated swing range information of the galvanometer motor according to the galvanometer basic parameter information, the rated swing range information comprising negative maximum swing angle and positive maximum swing angle; acquiring galvanometer historical monitoring data, the galvanometer historical monitoring data comprising historical position physical quantity data and historical position digital quantity data; acquiring position digital quantity bit information based on the historical position digital quantity data; acquiring position digital quantity range information according to the position digital quantity bit information, the position digital quantity range comprising position digital quantity maximum value and position digital quantity minimum value; acquiring swing physical span coefficient and span correction coefficient according to the rated swing range information and the galvanometer historical monitoring data; taking the difference between the position digital quantity maximum value and the position digital quantity minimum value as the swing digital span coefficient according to the position digital quantity range information; According to the swing physical span coefficient, the swing digital span coefficient and the span correction coefficient, the position quantization coefficient is obtained; Based on the position quantization coefficient and the galvanometer historical monitoring data, the position data mapping model is obtained; According to the position data mapping model, the position data quantization standard information is obtained; The position digital quantity range is specifically: ; wherein is the number of digits of the position in digital form; The position quantization coefficient is specifically: ; wherein is a position quantization coefficient, is a span correction coefficient, is a swing physical span coefficient, is a swing digital span coefficient; The position data mapping model is specifically: ; wherein is a position digital quantity, is a position physical quantity, is a minimum swing reference angle, is a position digital quantity minimum value.
2. The state closed loop monitoring method for a galvanometer according to claim 1, wherein, According to the rated swing range information and the galvanometer historical monitoring data, the swing physical span coefficient and the span correction coefficient are obtained, specifically including: According to the historical position digital quantity data in the galvanometer historical monitoring data, the swing digital span coefficient is obtained; According to the rated swing range information, the difference between the positive maximum swing angle and the negative maximum swing angle is taken as the rated swing span coefficient; The ratio of the rated swing span coefficient to the swing digital span coefficient is taken as the basic quantization coefficient; The historical position physical quantity data and the historical position digital quantity data in the galvanometer historical monitoring data are corresponded to obtain a galvanometer historical monitoring data set, each sub-item in the galvanometer historical monitoring data set representing the position physical quantity and the position digital quantity corresponding to the same motor swing position; According to the galvanometer historical monitoring data set, the swing physical span coefficient and the span correction coefficient are obtained.
3. The state closed loop monitoring method for a galvanometer according to claim 2, wherein, According to the galvanometer historical monitoring data set, the swing physical span coefficient and the span correction coefficient are obtained, specifically including: Taking any sub-item in the galvanometer historical monitoring data set as the basis, the difference between the historical position digital quantity corresponding to the sub-item and the minimum position digital quantity is taken as the position characteristic digital quantity; The product of the position characteristic digital quantity corresponding to each sub-item and the basic quantization coefficient is taken as the position physical mapping quantity; The difference between the historical position physical quantity corresponding to each sub-item and the position physical mapping quantity is taken as the position mapping deviation coefficient; According to the galvanometer historical monitoring data set, the mean value of the position mapping deviation coefficient is taken as the minimum swing reference angle; The difference between the historical position physical quantity corresponding to each sub-item in the galvanometer historical monitoring data set and the minimum swing reference angle is taken as the position swing deviation value; The ratio of the position swing deviation value corresponding to each sub-item to the position characteristic digital quantity is taken as the characteristic quantization coefficient; The product of the characteristic quantization coefficient and the swing digital span coefficient is taken as the swing physical deviation value; The mean value of the swing physical deviation value is taken as the swing physical span coefficient, and the sum of the swing physical span coefficient and the minimum swing reference angle is taken as the maximum swing reference angle; If the minimum swing reference angle is less than the negative maximum swing angle, the negative maximum swing angle is taken as the minimum swing reference angle, and if the maximum swing reference angle is greater than the positive maximum swing angle, the positive maximum swing angle is taken as the maximum swing reference angle; According to the swing physical span coefficient, the span correction coefficient is obtained.
4. The state closed loop monitoring method for a galvanometer according to claim 3, wherein, According to the swing physical span coefficient, the span correction coefficient is obtained, specifically including: The ratio of the rated swing span coefficient to the swing physical span coefficient is taken as the swing characteristic deviation coefficient; According to the historical position physical quantity data in the galvanometer historical monitoring data, the historical positive maximum swing angle and the historical negative maximum swing angle are obtained; According to the historical monitoring data set of the galvanometer, the minimum value of the position mapping deviation coefficient is taken as the minimum swing feature angle; The difference between the historical positive maximum swing angle and the minimum swing reference angle is taken as the first swing physical coefficient; The difference between the historical position digital quantity corresponding to the historical positive maximum swing angle and the minimum position digital quantity is taken as the historical first swing digital coefficient; The ratio of the historical first swing physical coefficient to the historical first swing digital coefficient is taken as the first quantization coefficient; The difference between the historical negative maximum swing angle and the minimum swing feature angle is taken as the historical second swing physical coefficient; The difference between the historical position digital quantity corresponding to the historical negative maximum swing angle and the minimum position digital quantity is taken as the historical second swing digital coefficient; The ratio of the historical second swing physical coefficient to the historical second swing digital coefficient is taken as the second quantization coefficient; The ratio of the second quantization coefficient to the first quantization coefficient is taken as the span deviation coefficient; If the span deviation coefficient is greater than the swing feature deviation coefficient, the swing feature deviation coefficient is taken as the span deviation coefficient.
5. A state closed loop monitoring system for a galvanometer for implementing the monitoring method according to any one of claims 1 to 4, characterized in that, The power supply interface, the power management module, the FPGA chip module, the communication module, the communication interface, the FPGA clock module, the DSP chip module, the DSP clock module, the DSP JTAG interface, the FPGA JTAG interface, the X-axis ADC module, the Y-axis ADC module, the motor interface, the RS422 receiver, the controller interface, the state interface, and the state output interface are included. The power management module is configured to provide power required by the system, and the FPGA chip module is configured to collect position signals of X-axis and Y-axis motors of the galvanometer in real time. The DSP chip module is in communication connection with the FPGA chip module and is configured to process motor position data and generate control instructions.
6. A state closed loop monitoring system for a galvanometer as claimed in claim 5, wherein, The FPGA chip module further includes: a position data receiving and decoding unit configured to receive and decode position feedback data of X-axis and Y-axis driving motors; an ADC control unit configured to control sampling frequency and delay time of the X-axis ADC module and the Y-axis ADC module.
7. A state closed loop monitoring system for a galvanometer as claimed in claim 5, wherein, The DSP chip module further includes: a threshold analysis unit configured to receive and analyze position accuracy requirement information; a real-time monitoring and comparison unit configured to monitor feedback positions of the X-axis and Y-axis motors in real time and compare the feedback positions with the position accuracy requirement information; a state feedback unit configured to report a state of the galvanometer system through the communication module.
8. A state closed loop monitoring system for a galvanometer as claimed in claim 5, wherein, The X-axis ADC module and the Y-axis ADC module are respectively connected to the FPGA chip module and are configured to convert galvanometer position feedback data into galvanometer feedback position digital quantity and output the galvanometer feedback position digital quantity to the FPGA chip module.
Citation Information
Patent Citations
Laser scanning microscope and control method
JP2011154312A