A compact synchrotron radiation X-ray CT imaging sample stage

Abstract

This invention discloses a compact synchrotron radiation X-ray CT imaging sample stage, comprising a circular turntable and a first and second horizontal displacement stage eccentrically mounted thereon. A circular stage concentric with the turntable is fixed above the displacement stages to support the sample. A transition plate with an eccentric hole is provided between the first and second horizontal displacement stages. By adjusting the transition plate, the projection range of the displacement stages and their driving mechanism within the plane of the circular turntable is minimized. This invention, through the synergistic design of eccentrically arranged displacement stages, centering compensation of the transition plate, and tightly integrated motor, ensures that the overall radial projection of the displacement stages and driving mechanism is completely contained within the projection range of the circular turntable. This solves the problem of excessive detector installation distance caused by the protruding motor in traditional sample stages, overcomes size limitations, significantly reduces the diameter of the circular turntable, achieves a compact structure, improves geometric magnification and photon collection efficiency, and obtains higher imaging resolution.

Description

Technical Field

[0001] This invention relates to in situ CT imaging, and more specifically to a compact synchrotron radiation X-ray CT imaging sample stage. Background Technology

[0002] Synchrotron radiation X-ray CT imaging technology, due to its ultra-high resolution, high penetration capability, and rapid dynamic imaging advantages, has become a key technology for non-destructive testing in materials science, life sciences, and high-end industries. However, this technology places extreme demands on the spatial layout and motion precision of the sample stage. Current mainstream sample stages employ a design where the upper surfaces of the rotating stage and the translation stage are concentrically stacked, with the drive motor typically protruding radially to the side of the translation stage. This "protruding motor" layout has inherent drawbacks: it significantly increases the space occupied by the sample stage in the rotational radial direction, causing the X-ray detector to be unable to be installed close to the sample due to spatial conflicts, requiring a large distance between the detector and the sample. This distance directly limits the geometric magnification of the system and increases the attenuation of X-rays in air, severely restricting further improvements in imaging resolution and photon collection efficiency. This problem is particularly prominent in space-constrained applications such as synchrotron radiation beamlines. Therefore, developing a compact, high-precision sample stage that can fundamentally optimize spatial layout and allow for infinitely close proximity of the detector is a pressing technical challenge in this field. Summary of the Invention

[0003] The purpose of this invention is to overcome the above-mentioned defects of the prior art and provide a synchrotron radiation X-ray CT imaging sample stage with an extremely compact structure that allows the detector to be brought infinitely close, thereby significantly improving the imaging resolution.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0005] A compact synchrotron radiation X-ray CT imaging sample stage includes a circular turntable serving as a rotation reference for sample rotation scanning; a turntable drive mechanism coaxially connected to the circular turntable for driving the turntable to perform rotation scanning; a mounting plate fixed above the circular turntable; a first horizontal displacement stage eccentrically mounted above the circular turntable via the mounting plate; a first displacement drive mechanism connected to the first horizontal displacement stage for driving the first horizontal displacement stage to translate along the optical path; a second horizontal displacement stage, which together with the first horizontal displacement stage forms a two-dimensional translation structure; a second displacement drive mechanism connected to the second horizontal displacement stage for driving the second horizontal displacement stage to translate along a direction perpendicular to the optical path; and a rotating stage with an eccentric hole. A connecting plate, assembled between the first and second horizontal displacement stages, is used to adjust and fix the horizontal relative position of the second horizontal displacement stage with respect to the first horizontal displacement stage, and also serves as a pad; a sample placement circular stage, fixedly assembled on the upper surface of the second horizontal displacement stage, with its geometric center coinciding with the rotation center of the circular turntable, is used to support and position the sample; photoelectric sensors, respectively disposed on the side ends of the first and second horizontal displacement stages, are used to detect the movement limit positions of the first and second horizontal displacement stages; the overall radial projection of the first horizontal displacement stage, the first displacement driving mechanism, the second horizontal displacement stage, the second displacement driving mechanism, and the photoelectric sensors is located within the outer edge of the circular turntable.

[0006] Preferably, the first displacement driving mechanism includes a first motor, a first worm and a first worm wheel, the output shaft of the first motor is connected to the first worm, the first worm meshes with the first worm wheel, and the first worm wheel is fixedly connected to the grinding screw of the first horizontal displacement stage. The second displacement driving mechanism includes a second motor, a second worm and a second worm wheel, the output shaft of the second motor is connected to the second worm, the second worm meshes with the second worm wheel, and the second worm wheel is fixedly connected to the grinding screw of the second horizontal displacement stage.

[0007] Preferably, the axial direction of the first motor is parallel to the side surface of the first horizontal displacement platform and is installed close to the side surface, and the axial direction of the second motor is parallel to the side surface of the second horizontal displacement platform and is installed close to the side surface.

[0008] Preferably, the outer shaft of the first motor is located at the bottom, and the outer shaft of the second motor is located at the top.

[0009] Preferably, the first horizontal displacement stage, the first displacement driving mechanism, and the photoelectric sensor constitute a first set of components. The outline of the first set of components is completely covered by a minimum projection circle. The minimum projection circle is determined by a point on the side end face of the first horizontal displacement stage, a point on the side end face of the first displacement driving mechanism, and a point on the side end face of the photoelectric sensor. The diameter of the minimum projection circle is smaller than the diameter of the circular turntable.

[0010] Preferably, the total length of the first group of components along the optical path direction is greater than the total length along the direction perpendicular to the optical path direction.

[0011] Preferably, the total length of the first group of components along the optical path direction is formed by superimposing the length of the first horizontal displacement stage surface, the total transmission stroke of the first horizontal displacement stage, and the side dimension of the first motor, and the total length of the first group of components along the direction perpendicular to the optical path direction is formed by superimposing the width of the first horizontal displacement stage surface and the thickness of the photoelectric sensor.

[0012] Preferably, the first motor is installed centrally along the optical path, and its side end face is on the same plane perpendicular to the optical path as the side end face of the first horizontal displacement stage and the side end face of the photoelectric sensor.

[0013] Preferably, the second horizontal displacement stage, the second displacement drive mechanism, and the photoelectric sensor constitute a second set of components. The second set of components has the same size as the first set of components, and the minimum projection circle of the second set of components is concentric with the minimum projection circle of the first set of components. After the second set of components is stacked on top of the first set of components, the overall radial projection is covered by the minimum projection circle of the first set of components.

[0014] Preferably, the eccentric direction of the eccentric hole on the adapter plate is opposite to the eccentric direction of the first horizontal displacement stage and the second horizontal displacement stage, and the eccentricity is equal, which is used to cancel the eccentricity of the first horizontal displacement stage and the second horizontal displacement stage, and ensure that the geometric center of the sample placement circular stage coincides with the rotation center of the circular turntable.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. Breakthrough in spatial layout and preservation of function: Through the coordinated design of "displacement stage eccentricity", "transfer plate centering compensation" and "motor closely embedded", the drive motor, the main space-consuming component, is cleverly housed, allowing the detector to be placed close to the outer edge of the circular turntable. This makes it possible to significantly reduce the diameter of the circular turntable while ensuring the same function, thus meeting the requirements of close-range CCD scanning.

[0017] 2. Significantly improved imaging performance: The extremely close detector distance greatly reduces the attenuation of X-rays in air and enhances the geometric magnification effect, resulting in a significant improvement in imaging resolution and photon collection efficiency.

[0018] 3. Ensures high precision and high stability: High-precision bearings and precision backlash-free transmission components are used to ensure nanometer-level positioning accuracy and smooth operation of the sample under complex motion, meeting the stringent requirements of high-resolution CT imaging.

[0019] 4. Improved ease of operation and versatility of application: The circular stage serves as a concentric reference, simplifying the initial alignment process for samples. Its compact structure allows it to flexibly adapt to various sample environments and fixtures, making it particularly suitable for in-situ dynamic experiments with stringent space requirements (such as multi-field coupling experiments involving heat, force, and electricity). Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the compact synchrotron radiation X-ray CT imaging sample stage of the present invention, wherein the worm gear sleeve is transparent.

[0021] Figure 2 This is a top view of the compact synchrotron radiation X-ray CT imaging sample stage of the present invention.

[0022] Figure 3 This is an exploded view of the compact synchrotron radiation X-ray CT imaging sample stage of the present invention, used to show the assembly relationship of the various components.

[0023] Figure 4 for Figure 3 A three-dimensional structural diagram of the first displacement drive mechanism of the first displacement stage.

[0024] Figure 5 yes Figure 4 Exploded view of the first displacement drive mechanism.

[0025] Figure 6 for Figure 3 A three-dimensional structural diagram of the second displacement drive mechanism of the second displacement stage.

[0026] Figure 7 yes Figure 6 Exploded view of the second displacement drive mechanism.

[0027] Figure 8 for Figure 3 A top-view image of the adapter plate from the axial side.

[0028] Figure 9 for Figure 3 A bottom-view image of the adapter plate from the axial side.

[0029] Figure 10 for Figure 3 The minimum projection circle top view of the circular turntable and the separate minimum projection circle view of the first displacement stage and drive mechanism. Detailed Implementation

[0030] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the invention; furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the invention, and these equivalent forms also fall within the scope defined by the appended claims.

[0031] like Figures 1 to 10 As shown, this embodiment provides a compact synchrotron radiation X-ray CT imaging sample stage.

[0032] 1. Structure and Connection Relationships

[0033] The sample stage includes a circular turntable 1, a mounting plate 2, a first horizontal displacement stage 3, a transition plate 4, a second horizontal displacement stage 5, a sample placement circular stage 6, a CCD 7, a turntable drive mechanism 8, a first displacement drive mechanism 9, a second displacement drive mechanism 10, a grinding screw 11, and a photoelectric sensor 12.

[0034] The circular turntable 1 serves as a rotation reference and is supported by air bearings or crossed roller bearings to ensure high-precision rotational movement. The turntable drive mechanism 8 is coaxially connected to the circular turntable 1 and is used to drive it to perform precise rotational scanning. The turntable drive mechanism 8 can be equipped with a high-precision 5-phase stepper motor and a reducer to improve torque and resolution.

[0035] The first horizontal displacement stage 3 is mounted eccentrically above the circular turntable 1 via the mounting plate 2.

[0036] The first horizontal displacement stage 3 and the second horizontal displacement stage 5 are stacked together. The adapter plate 4 with eccentric holes is assembled between the first horizontal displacement stage 3 and the second horizontal displacement stage 5. The core feature of the adapter plate 4 is that the mounting holes on it are designed with eccentric holes. The relative position of the second horizontal displacement stage 5 with respect to the first horizontal displacement stage 3 in the horizontal plane is adjusted through the eccentric hole groove of the adapter plate 4, and it also serves as a pad.

[0037] The sample placement circular stage 6 is fixedly installed on the top of the second horizontal displacement stage 5, i.e., on the upper surface of the second horizontal displacement stage 5, and is used to support and position the sample. The sample placement circular stage 6 is concentrically assembled with the circular turntable 1. The sample placement circular stage 6 is the core carrier for realizing the "concentric" positioning function of the present invention, ensuring that the geometric center of the sample placement circular stage 6 coincides with the rotation center of the circular turntable 1.

[0038] The first displacement driving mechanism 9 is connected to the first horizontal displacement stage 3 to provide a first displacement component, and the second displacement driving mechanism 10 is connected to the second horizontal displacement stage 5 to provide a second displacement component, for driving the sample placement circular stage 6 to perform translational movements along the optical path direction (x-axis) and perpendicular to the optical path direction (y-axis). The first displacement driving mechanism 9 is connected to the first horizontal displacement stage 3 to drive the first horizontal displacement stage 3 to translate along the optical path direction; the second displacement driving mechanism 10 is connected to the second horizontal displacement stage 5 to drive the second horizontal displacement stage 5 to translate perpendicular to the optical path direction.

[0039] The first displacement driving mechanism 9 includes a first motor 9-1, a first worm 9-2, a first worm wheel 9-3, a first worm sleeve 9-4, a first fixed bracket 9-5, and a first bearing 9-6. The first worm sleeve 9-4 is mounted through the first fixed bracket 9-5, and the first worm 9-2 is mounted inside the first worm sleeve 9-4 through the first bearing 9-6. The first worm 9-2 on the output shaft of the first motor 9-1 meshes with the first worm wheel 9-3. The first worm wheel 9-3 is fixedly connected to the grinding screw 11 of the first horizontal displacement stage 3. The first worm 9-2 is driven to rotate by the first motor 9-1, which drives the first worm wheel 9-3 and the grinding screw 11 to rotate synchronously, thereby realizing the translation of the first horizontal displacement stage 3.

[0040] The second displacement drive mechanism 10 includes a second motor 10-1, a second worm 10-2, a second worm wheel 10-3, a second worm sleeve 10-4, a second fixed bracket 10-5, and a second bearing 10-6. The second worm sleeve 10-4 is mounted through the second fixed bracket 10-5, and the second worm 10-2 is mounted inside the second worm sleeve 10-4 through the second bearing 10-6. The second worm 10-2 on the output shaft of the second motor 10-1 meshes with the second worm wheel 10-3. The second worm wheel 10-3 is fixedly connected to the grinding screw 11 of the second horizontal displacement stage 5. The second worm 10-2 is driven to rotate by the second motor 10-1, which drives the second worm wheel 10-3 and the grinding screw 11 to rotate synchronously, thereby realizing the translation of the second horizontal displacement stage 5.

[0041] The axial direction of the first motor 9-1 (i.e., the extension direction of the first worm 9-2) is parallel to the side facade of the first horizontal displacement stage 3 and is mounted close to its side facade. The axial direction of the second motor 10-1 (i.e., the extension direction of the second worm 10-2) is parallel to the side facade of the second horizontal displacement stage 5 and is mounted close to its side facade. In the prior art, the axial direction of the motor is perpendicular to the side facade of the displacement stage. This arrangement of the present invention, combined with the eccentric layout of the first horizontal displacement stage 3 and the second horizontal displacement stage 5, allows the first motor 9-1 and the second motor 10-1 to be radially recessed, with their overall projection located within the outer edge of the circular turntable 1, and not protruding beyond the boundary of the circular turntable 1.

[0042] The photoelectric sensors 12 are respectively installed on the side ends of the first horizontal displacement stage 3 and the second horizontal displacement stage 5, and are used to detect the movement limit positions of the first horizontal displacement stage 3 and the second horizontal displacement stage 5, so as to play a safety protection role.

[0043] Specifically, the outline of the first group of components (first horizontal displacement stage 3 + first displacement drive mechanism 9 + photoelectric sensor 12) is completely covered by a minimum projection circle, which can fit the area of ​​the circular turntable 1 as small as possible. Specifically, taking a point on the side end face of the first horizontal displacement stage 3, a point on the side end face of the first displacement drive mechanism 9, and a point on the side end face of the photoelectric sensor 12, these three points are exactly the "outermost edge" of the first group of components. A "circumcircle" can be drawn through these three points; this circle is the minimum projection circle O, as shown below. Figure 7 As shown, the diameter of the smallest projected circle is smaller than the diameter of the circular turntable 1.

[0044] The total length of the first group of components along the optical axis is greater than the total length along the perpendicular optical axis. In a preferred embodiment, the total length of the first group of components along the optical axis, 70mm, is composed of three parts: "40mm of the upper surface of the first horizontal displacement stage 3 + the transmission range of the first horizontal displacement stage 3 ± 5mm, i.e., the total stroke 10mm + the side-standing dimension of the first motor 9-1, 20mm". The total length along the perpendicular optical axis, 55mm, is composed of two parts: "40mm of the upper surface of the first horizontal displacement stage 3 + the thickness of the photoelectric sensor, 15mm". After the first motor 9-1 is side-standing, its dimension of 20mm along the perpendicular optical axis is much smaller than the sum of the 40mm of the first horizontal displacement stage surface and the 15mm of the photoelectric sensor (55mm), and will not protrude from other components in the perpendicular optical axis direction, ensuring that the motor does not become a factor in "expanding the projection range". The first motor 9-1 is installed centered along the optical axis (without deviating to the left or right). Its side end face (the outer edge along the direction perpendicular to the optical axis) is exactly in the same vertical optical axis plane as the side end face of the displacement stage and the side end face of the photoelectric sensor. This ensures that a point on the side end face of the first horizontal displacement stage 3, a point on the side end face of the first displacement drive mechanism 9, and a point on the side end face of the photoelectric sensor 12 encompass all radial limit positions, and no other point will exceed the contour formed by these three points.

[0045] Since the second set of components (second horizontal displacement stage 5 + second displacement drive mechanism 10 + photoelectric sensor 12) has a similar structure to the first set of components (the only difference being that the outer shaft of the first motor 9-1 is at the bottom, and the outer shaft of the second motor 10-1 is at the top) and the dimensions are exactly the same, the minimum projection circle of the second set of components is completely consistent with the minimum projection circle of the first set of components. During the design, the minimum projection circle of the second set of components is made concentric (the centers coincide) with the minimum projection circle of the first set of components. Then, the second set of components is stacked on top of the first set of components. The resulting "overall projection range" can still be covered by the minimum projection circle of the first set of components, without additionally expanding the radial space.

[0046] The center of the smallest projection circle of the first set of components does not coincide with the rotation center of the circular turntable 1, and has a fixed eccentricity, thus freeing up radial space for the first motor 9-1 and the second motor 10-1 to be built in. This eccentricity causes the first and second sets of components to shift as a whole to one side of the turntable, naturally freeing up radial space on the other side of the turntable. At this time, the first motor 9-1 and the second motor 10-1 can be installed parallel and close to the side of the displacement stage, and the motor outline can be completely recessed into the edge of the circular turntable 1, completely solving the problem of the motor protruding and competing for space with the detector.

[0047] Simply using an eccentric layout to solve the motor space problem would cause the sample mounting position to deviate from the rotation center of the circular turntable 1. During scanning, the sample would rotate around the eccentric axis, leading to functional failure. This invention uses an adapter plate 4 with an eccentric hole to counteract the eccentricity, preserving the core function of sample alignment. Specifically, the eccentric holes of the adapter plate 4 are reversed and equidistantly eccentric. The eccentricity of the first horizontal displacement stage 3 and the second horizontal displacement stage 5 is counteracted by the reverse eccentricity of the adapter plate 4, ultimately ensuring that the center of the sample placement circular stage 6 accurately returns to the rotation center of the circular turntable 1.

[0048] 2. Implementation details of key components

[0049] The synergistic effect of eccentric adjustment of the displacement stage, centering compensation of the eccentric plate, and the concentric circular stage: During assembly, the first horizontal displacement stage 3 and its first displacement drive mechanism 9 are first installed concentrically with the circular turntable 1 along the smallest projection circle. Then, the second horizontal displacement stage 5 and its second displacement drive mechanism 10 are assembled concentrically with the first horizontal displacement stage 3 and its first displacement drive mechanism 9 along the smallest projection circle. The second horizontal displacement stage 5 and its second displacement drive mechanism 10 are installed with the first horizontal displacement stage 3 and its first displacement drive mechanism 9 through the eccentric hole of the adapter plate 4. Subsequently, the precision-machined sample placement circular stage 6 is installed on the upper surface of the second horizontal displacement stage 5. In this process, the sample placement circular stage 6 serves as a high-precision concentric reference, greatly simplifying the centering process.

[0050] Transmission accuracy is guaranteed: The first worm gear 9-3 and the first worm 9-2 adopt a double-lead precision backlash-free worm gear pair, and the second worm gear 10-3 and the second worm 10-2 adopt a double-lead precision backlash-free worm gear pair, ensuring that their transmission backlash is less than 3 arc minutes respectively. The pitch accuracy of the grinding screw 11, which is fixedly connected to the first worm gear 9-3 and the second worm gear 10-3, is better than ±0.005mm, thereby ensuring the high-precision translation of the first horizontal displacement stage 3 and the second horizontal displacement stage 5.

[0051] Motion performance indicators: In this embodiment, the full-stroke rotational repeatability of the circular turntable 1 is better than 0.002°. The movement range of the first horizontal displacement stage 3 and the second horizontal displacement stage 5 is ±5mm, and their full-stroke repeatability, verified by grating ruler feedback, is better than 0.3μm. The working flatness of the sample placement circular stage 6 is better than 0.005mm, ensuring no additional error during tilt scanning of the sample.

[0052] 3. Work process and effect verification

[0053] The sample to be tested is mounted on the standard interface of the sample placement circular stage 6 using a special fixture or by directly applying hot melt adhesive. Due to the initial concentricity of the sample placement circular stage 6, the sample is already very close to the theoretical rotation center. Subsequently, fine adjustments are made by translating the first horizontal displacement stage 3 and the second horizontal displacement stage 5, so that the precise alignment of the sample center with the rotation center of the turntable can be quickly achieved.

[0054] Thanks to the coordinated design of the first horizontal displacement stage 3 and the second horizontal displacement stage 5 being eccentric, the adapter plate 4 being centered and compensated, the first motor 9-1 and the second motor 10-1 being closely integrated, and the sample placement circular stage 6 being positioned, the sample stage in this embodiment achieves an extremely compact structure. Measurements show that the overall radial projection of the first horizontal displacement stage 3 and its first displacement drive mechanism 9, the second horizontal displacement stage 5 and its second displacement drive mechanism 10, and the sample placement circular stage 6 carrying the sample is completely within the outer edge of the 98mm diameter circular turntable 1. This design allows the X-ray CCD 7 to be placed very close to the outer edge of the circular turntable 1. In this embodiment, the working distance between the detection surface of the X-ray CCD 7 and the sample center can be successfully shortened to 49mm.

[0055] To verify the improved imaging performance of this invention, a standard resolution test chart was scanned using this sample stage, and the results were compared with those of a sample stage with a conventional layout.

[0056] Photon collection efficiency is significantly improved: Because the detector is able to get extremely close to the sample, the propagation path of the X-ray beam in the air is significantly shortened. According to the Lambert-Beer law, this directly and significantly reduces the attenuation loss of X-ray photons in the air, thereby substantially increasing the effective photon flux reaching the detector and significantly improving the signal-to-noise ratio (SNR) of the image.

[0057] Breakthrough Improvement in Imaging Resolution: According to the geometric magnification formula for projection imaging, M=(SDD / SOD), where SDD is the distance from the light source to the detector and SOD is the distance from the light source to the sample, the geometric magnification of the system is significantly improved while the working distance SOD is significantly reduced and SDD remains essentially unchanged. This improvement directly translates into a substantial increase in imaging spatial resolution. Analysis of the scanned and reconstructed images confirms that this invention can resolve finer structures that are difficult to distinguish clearly under the same conditions using traditional sample stages, significantly improving the ability to identify microscopic features such as pores within nanocomposite materials, organelles in living cells, or defects in semiconductor chips.

[0058] Furthermore, this compact structure provides valuable space for integrating other in-situ experimental devices, such as heating stages and stretching stages, within the confined space of a beamline station. The standard interface design of the circular stage is key to its flexibility, allowing users to quickly and accurately replace dedicated sample clamps or in-situ experimental chambers without disassembling the entire displacement stage. This greatly expands its application breadth and efficiency in in-situ dynamic experiments such as thermo-mechanical-electrical multi-field coupling.

[0059] In summary, this invention, by introducing a sample placement circular stage 6 concentric with the circular turntable 1, and integrating it with the first horizontal displacement stage 3 and the second horizontal displacement stage 5 (eccentrically aligned and compensated by the adapter plate 4), and the first motor 9-1 and the second motor 10-1 (closely integrated), forms an organic whole. This not only achieves extreme compactness in physical space but also high efficiency and precision in operation, improved system stability, and expanded application scenarios. This fully demonstrates that the technical solution provided by this invention, while ensuring high motion accuracy, successfully solves the long-standing spatial layout bottleneck of traditional sample stages, exhibiting outstanding substantive features and significant progress.

Claims

1. A compact synchrotron radiation X-ray CT imaging sample stage, characterized in that, include: A circular turntable (1) serves as the rotation reference for sample rotation scanning; A turntable drive mechanism (8) is coaxially connected to the circular turntable (1) and is used to drive the circular turntable (1) to perform rotational scanning. Mounting plate (2), which is fixed above the circular turntable (1); The first horizontal displacement stage (3) is eccentrically mounted above the circular turntable (1) via the mounting plate (2); The first displacement driving mechanism (9) is connected to the first horizontal displacement stage (3) and is used to drive the first horizontal displacement stage (3) to translate along the optical path direction; The second horizontal displacement stage (5) together with the first horizontal displacement stage (3) constitutes a two-dimensional translation structure; The second displacement driving mechanism (10) is connected to the second horizontal displacement stage (5) and is used to drive the second horizontal displacement stage (5) to translate in a direction perpendicular to the optical path. The adapter plate (4) with an eccentric hole is assembled between the first horizontal displacement stage (3) and the second horizontal displacement stage (5) to adjust and fix the horizontal relative position of the second horizontal displacement stage (5) relative to the first horizontal displacement stage (3), and also serves as a pad. The sample is placed on a circular stage (6), which is fixedly mounted on the upper surface of the second horizontal displacement stage (5). Its geometric center coincides with the rotation center of the circular turntable (1), and it is used to support and position the sample. Photoelectric sensors (12) are respectively disposed on the side ends of the first horizontal displacement stage (3) and the second horizontal displacement stage (5) to detect the movement limit positions of the first horizontal displacement stage (3) and the second horizontal displacement stage (5). The overall radial projection of the first horizontal displacement stage (3), the first displacement driving mechanism (9), the second horizontal displacement stage (5), the second displacement driving mechanism (10), and the photoelectric sensor (12) is located within the outer edge of the circular turntable (1). The first displacement driving mechanism (9) includes a first motor (9-1), a first worm (9-2), and a first worm wheel (9-3). The output shaft of the first motor (9-1) is connected to the first worm (9-2). The first worm (9-2) meshes with the first worm wheel (9-3). The first worm wheel (9-3) is fixedly connected to the grinding screw (11) of the first horizontal displacement stage (3). The second displacement... The drive mechanism (10) includes a second motor (10-1), a second worm (10-2), and a second worm wheel (10-3). The output shaft of the second motor (10-1) is connected to the second worm (10-2). The second worm (10-2) meshes with the second worm wheel (10-3). The second worm wheel (10-3) is fixedly connected to the grinding screw (11) of the second horizontal displacement stage (5). The axial direction of the first motor (9-1) is parallel to the side surface of the first horizontal displacement stage (3) and is installed close to the side surface. The axial direction of the second motor (10-1) is parallel to the side surface of the second horizontal displacement stage (5) and is installed close to the side surface.

2. The compact synchrotron radiation X-ray CT imaging sample stage according to claim 1, characterized in that, The outer shaft of the first motor (9-1) is located at the bottom, and the outer shaft of the second motor (10-1) is located at the top.

3. The compact synchrotron radiation X-ray CT imaging sample stage according to claim 1, characterized in that, The first horizontal displacement stage (3), the first displacement drive mechanism (9), and the photoelectric sensor (12) constitute the first set of components. The outline of the first set of components is completely covered by the minimum projection circle. The minimum projection circle is determined by a point on the side end face of the first horizontal displacement stage (3), a point on the side end face of the first displacement drive mechanism (9), and a point on the side end face of the photoelectric sensor (12). The diameter of the minimum projection circle is smaller than the diameter of the circular turntable (1).

4. The compact synchrotron radiation X-ray CT imaging sample stage according to claim 3, characterized in that, The total length of the first group of components along the optical path is greater than the total length along the direction perpendicular to the optical path.

5. The compact synchrotron radiation X-ray CT imaging sample stage according to claim 4, characterized in that, The total length of the first group of components along the optical path direction is composed of the table length of the first horizontal displacement stage (3), the total transmission stroke of the first horizontal displacement stage (3), and the side dimensions of the first motor (9-1). The total length of the first group of components along the direction perpendicular to the optical path direction is composed of the table width of the first horizontal displacement stage (3) and the thickness of the photoelectric sensor (12).

6. The compact synchrotron radiation X-ray CT imaging sample stage according to claim 3, characterized in that, The first motor (9-1) is installed in the center along the optical path, and its side end face is on the same plane perpendicular to the optical path as the side end face of the first horizontal displacement stage (3) and the side end face of the photoelectric sensor (12).

7. The compact synchrotron radiation X-ray CT imaging sample stage according to claim 3, characterized in that, The second horizontal displacement stage (5), the second displacement drive mechanism (10) and the photoelectric sensor (12) constitute the second set of components. The second set of components is exactly the same size as the first set of components. The minimum projection circle of the second set of components is concentric with the minimum projection circle of the first set of components. After the second set of components is stacked on top of the first set of components, the overall radial projection is covered by the minimum projection circle of the first set of components.

8. The compact synchrotron radiation X-ray CT imaging sample stage according to claim 1, characterized in that, The eccentric direction of the eccentric hole on the adapter plate (4) is opposite to that of the first horizontal displacement stage (3) and the second horizontal displacement stage (5), and the eccentric distance is equal. This is used to counteract the eccentricity of the first horizontal displacement stage (3) and the second horizontal displacement stage (5) and ensure that the geometric center of the sample placement circular stage (6) coincides with the rotation center of the circular turntable (1).

Images