Jig for pellicle storage container, pellicle storage body, and pellicle

Abstract

A jig for a pellicle storage container, a pellicle storage body, and a pellicle, wherein the amount of release of an organic gas having 20 or less carbon atoms as evaluated under the following condition 1 is 150 [mu] g or less per 1 g of the jig. Condition 1: 1 g of the cut-off piece of the clamp is arranged in a container as a test object, 200 ml of hexane is used as an extraction solvent, and an extraction solution is obtained by a Soxhlet extraction method for 6 hours in a water bath at 80 DEG C. And analyzing the obtained extracting solution by using gas chromatography. In gas chromatography, a flame ionization detector is used as a detector, the amount of components having 20 or less carbon atoms is detected, and the total amount of the detected components having 20 or less carbon atoms is used as the outgas amount.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a jig for a protective film assembly storage container, a protective film assembly storage body, and a protective film assembly. BACKGROUND

[0002] In a technique (photolithography) in which a photosensitive substance is applied to the surface of an object such as an electronic component, a printed board, a display panel, and the like, and exposed to light to form a pattern, a transparent substrate called a mask having a pattern formed on one surface is used. In these manufacturing processes, patterning is performed by irradiating light to a photosensitive layer or the like through the mask (also referred to as an exposure original plate, an intermediate mask). At this time, if foreign matter is attached to the mask, the light is absorbed by the foreign matter, or the light is reflected at the surface of the foreign matter and bent. As a result, problems such as deformation of the formed pattern or blurring of the edge to damage the size, quality, and appearance after patterning and the like occur. In order to solve such problems, a method of mounting a protective film assembly having a protective film that transmits light on the surface of the mask to suppress the attachment of foreign matter is adopted.

[0003] In recent years, with the high performance of electronic components and the miniaturization of line widths, protective film assemblies are more easily affected by a small amount of outgassed gas and fine particles than ever before.

[0004] In order to prevent the attachment of foreign matter during transport, the protective film assembly is sometimes packaged in the order of a polycarbonate box, an inner bag, a zippered bag, and an outer bag with the opening portion clamped and fixed.

[0005] As an example of a storage container for a protective film assembly, in the case where the protective film assembly is transported while being arranged in the storage container, as a protective film assembly storage container that reduces the generation of abrasion powder due to friction, a storage container using a jig made of a polyurethane elastomer is proposed for plugging a tray and a lid of the storage container (Japanese Patent Application Publication No. 2007-128030). SUMMARY

[0006] Problems to be Solved by the Invention

[0007] As a result of intensive research by the present inventors and the like, it has been newly found that outgassed gas of a volatile organic component generated from a jig used in a packaging body that packages a protective film assembly is attached to the packaged protective film assembly, and in addition to outgassed gas of a volatile component from the material that constitutes the protective film assembly itself, outgassed gas from the jig also becomes one of the main causes of contamination of the protective film assembly.

[0008] An object of one embodiment of the present disclosure is to provide a jig for a protective film assembly storage container that reduces outgassed gas of a volatile organic component.

[0009] Another embodiment of the present disclosure is to provide a protective film assembly storage body using a protective film assembly storage container jig, which reduces the generation of outgassing of volatile organic components, and a protective film assembly which reduces the amount of outgassing due to adhesion of outgassing of volatile organic components.

[0010] Means for solving the problem

[0011] Specific means for solving the above problem include the following.

[0012] <1> A protective film assembly storage container jig, wherein the outgassing amount of an organic substance gas having 20 or less carbon atoms evaluated under Condition 1 below is 150 μg or less per 1 g of the jig.

[0013] -Condition 1-

[0014] 1 g of a cut piece of the jig was disposed as a measured object in a container, 200 ml of hexane was used as an extraction solvent, and an extraction liquid was obtained by Soxhlet extraction for 6 hours in a water bath at 80°C.

[0015] The obtained extraction liquid was analyzed using gas chromatography. In the gas chromatography, the amount of components having 20 or less carbon atoms was detected using a flame ionization detector, and the total amount of the detected components having 20 or less carbon atoms was used as the outgassing amount.

[0016] <2> A protective film assembly storage container jig, wherein the outgassing amount generated from one jig evaluated under Condition 2 below is 2.000 μg or less.

[0017] -Condition 2-

[0018] The jig was disposed as a measured object in a container, and the generated outgassing was adsorbed to 150 mg of an adsorbent material for 4 hours at 50°C. Then, 150 mg of the adsorbent material was set in a gas chromatograph mass spectrometer, and the total amount of outgassing of volatile organic components generated from the jig was measured under heating conditions of 280°C for 10 minutes.

[0019] Here, the total amount of outgassing was calculated by conversion to n-decane, and the obtained total amount was divided by the number of jigs used as measured objects to calculate the outgassing amount per jig.

[0020] <3> The protective film assembly storage container jig according to <1> or <2>, comprising at least one resin selected from the group consisting of polyurethane resin, polyethylene resin, polyethylene terephthalate resin, polyvinyl chloride resin, polyamide resin, polycarbonate resin, acrylic resin, methacrylic resin, and phenol resin.

[0021] <4> A protective film assembly storage body, comprising:

[0022] A protective film assembly, a protective film assembly storage container that stores the protective film assembly, a protective film assembly storage container jig that externally fixes the protective film assembly storage container, and a protective film assembly package that packages the protective film assembly storage container.

[0023] <5> The protective film assembly storage body according to <4>, wherein a total amount of outgassing of organic matter gas having 20 or less carbon atoms measured under Condition 3 below of the protective film assembly storage container jig that externally fixes the protective film assembly storage container is 1500 μg or less.

[0024] -Condition 3-

[0025] The jig used in the protective film assembly storage body is disposed in a container as a measured object, hexane 200 ml is used as an extraction solvent, and an extraction liquid is obtained by Soxhlet extraction for 6 hours in a water bath at 80°C.

[0026] The obtained extraction liquid is analyzed using gas chromatography. In the gas chromatography, a detector uses a flame ionization detector, the amount of components having 20 or less carbon atoms is detected, and the total amount of the detected components having 20 or less carbon atoms is used as the outgassing amount.

[0027] Further, in Condition 3 above, in the case where a cut piece obtained by cutting a portion of the jig is used as a measured object for evaluation, the total amount of outgassing can also be obtained by the following Formula I.

[0028] [(outgassing amount of the measured object) x (mass of the jig)] / (mass of the measured object) = total amount of outgassing … Formula I

[0029] <6> A protective film assembly having a protective film assembly, an original plate adhesive, a protective film assembly frame, and an outgassing amount of 2.9 μg or less when measured under Condition 4 below.

[0030] -Condition 4-

[0031] The protective film assembly is heated at 50°C for 4 hours, and the generated outgassing is adsorbed to adsorbent material 150 mg. Then, the adsorbent material 150 mg is disposed in a gas chromatograph mass spectrometer, and the total amount of outgassing of volatile organic components generated from the protective film assembly is measured under heating conditions of 280°C for 10 minutes.

[0032] Here, the total amount of outgassing is obtained by n-decane conversion.

[0033] <7> A protective film assembly includes a protective film assembly storage container for housing the protective film assembly, and a device for fixing the protective film assembly storage container from the outside. <1> ~ <3> The protective film assembly storage container clamp and the protective film assembly packaging body for packaging the protective film assembly storage container described in any one of the above-mentioned protective film assembly storage containers, wherein the protective film assembly disposed in the protective film assembly storage container has a protective film, an original adhesive, and a protective film assembly frame, and the gas release amount measured under the following condition 4 is 2.9 μg or less.

[0034] -Condition 4-

[0035] The protective membrane assembly was heated at 50°C for 4 hours, causing the generated gas to be adsorbed onto 150 mg of adsorbent material. Then, 150 mg of adsorbent material was placed in a gas chromatograph-mass spectrometer and heated at 280°C for 10 minutes to determine the total amount of volatile organic compounds released from the protective membrane assembly.

[0036] Here, the total amount of gas released is calculated using n-decane conversion.

[0037] <8> according to <6> or <7> The protective film assembly, wherein the original adhesive is a styrene-butadiene-based adhesive.

[0038] Invention Effects

[0039] According to one embodiment of this disclosure, a clamp for a protective membrane assembly storage container can be provided that reduces the release of volatile organic components.

[0040] According to another embodiment of this disclosure, a protective membrane assembly housing body that uses a clamp for a protective membrane assembly housing container can be provided, which reduces the generation of volatile organic compounds, and a protective membrane assembly that reduces the amount of gas release caused by the adhesion of volatile organic compounds. Attached Figure Description

[0041] [ Figure 1 ] Figure 1 This is a top view showing an example of a clamp for storing a protective film assembly container.

[0042] [ Figure 2A ] Figure 2A This is a side view taken from one opening of the clamp holding the protective film assembly container.

[0043] [ Figure 2B ] Figure 2B This is a side view taken from another opening of the clamp for storing the protective membrane assembly container.

[0044] [ Figure 3 ] Figure 3 It means to use Figure 1A perspective view of an example of a protective film assembly storage container with four corners sealed by clamps.

[0045] [ Figure 4 ] Figure 4 This is a schematic cross-sectional view showing an example of a protective membrane assembly. Detailed Implementation

[0046] In this disclosure, the numerical range represented by "~" refers to the range in which the values ​​recorded before and after "~" are respectively the minimum and maximum values.

[0047] In the numerical ranges described in this disclosure, the upper or lower limit value recorded in a certain numerical range can be replaced by the upper or lower limit value of other numerical ranges described in different stages. Furthermore, in the numerical ranges described in this disclosure, the upper or lower limit value recorded in a certain numerical range can also be replaced by the value shown in the embodiments.

[0048] In this disclosure, a combination of two or more preferred methods is a more preferred method.

[0049] In this disclosure, the amount of each component refers to the total amount of the multiple substances unless otherwise specified, in the case of multiple substances equivalent to each component.

[0050] In this specification, the term "process" includes not only independent processes, but also processes that can not be clearly distinguished from other processes, as long as the desired purpose of the process can be achieved.

[0051] <Clamping device for storing protective film components>

[0052] The first aspect of the clamp for the protective film assembly storage container disclosed herein is a clamp for the protective film assembly storage container in which the amount of organic gas with 20 or fewer carbon atoms released, evaluated under the following condition 1, is 150 μg or less per 1g clamp.

[0053] In addition, unless otherwise specified in this disclosure, the term "clamp" refers to "clamp for a container for receiving protective film components".

[0054] -Condition 1-

[0055] 1g of the cut piece of the fixture was placed in the container as the analyte, and 200ml of hexane was used as the extraction solvent. The extract was obtained by Soxhlet extraction in a water bath at 80℃ for 6 hours.

[0056] The obtained extract was analyzed using gas chromatography. In gas chromatography, a flame ionization detector was used to detect the amount of components with 20 or fewer carbon atoms. The total amount of components with 20 or fewer carbon atoms detected was taken as the amount of organic gas released with 20 or fewer carbon atoms.

[0057] In condition 1, the components of organic gases with 20 or fewer carbon atoms (hereinafter also referred to as specific organic gases) are determined in gas chromatography using a mixed standard solution of n-chain alkanes to identify the peak positions corresponding to the corresponding carbon atom number, based on the known concentration of nC. 20 H 42 The standard curve obtained from the standard solution by gas chromatography-GC-FID is derived.

[0058] In condition 1, the deviation in the amount of gas released from the clamps collecting the test object can also be considered. The test object is collected from multiple different clamps, and the average of their measured values ​​is taken. When the test object is collected from multiple different clamps and the average of their measured values ​​is taken, from the viewpoint of the accuracy of the amount of gas released, it is preferable to collect the cut pieces of the test object from at least 4 clamps and take the average value, and more preferably the average value of 8 clamps.

[0059] In the first embodiment of the clamp disclosed herein, the amount of specific organic gas released is 150 μg or less per 1g clamp. From the viewpoint of suppressing the release of gas from the protective membrane assembly itself, it is preferably 100 μg or less per 1g clamp, more preferably 50 μg or less per 1g clamp, even more preferably 40 μg or less per 1g clamp, particularly preferably 30 μg or less per 1g clamp, and most preferably below the detection limit or 0 μg.

[0060] Examples of specific organic gases include hydrocarbon compounds with 20 or fewer carbon atoms selected from aliphatic and aromatic hydrocarbon compounds.

[0061] Release gas refers to the gas generated by the materials that make up the fixture, such as resin.

[0062] In addition, considering the overall gas release of the protective film assembly housing, the release amount of a specific organic gas is preferably 405 μg or less per clamp, more preferably 162 μg or less, even more preferably 135 μg or less, and particularly preferably 60 μg or less.

[0063] This is because, typically, the resin clamps used in sealing the protective film assembly container preferably weigh between 2g and 5g each. Additionally, the mass of a common clamp is approximately 2.7g.

[0064] There are no particular restrictions on the shape of the clamp; as long as it can securely house the protective membrane assembly within the container and allow for sealing, a clamp with a known sealing mechanism can be appropriately selected. Examples of clamps include... Figure 1 Fasteners of the shape shown.

[0065] Figure 1 This is a top view showing an example of a fixture.

[0066] Figure 1 The clamp 20 shown is made of resin, such as Figure 1 As shown, it has a trapezoidal shape when viewed from above, and the other opening 22B is wider than the opening 22A on one side.

[0067] Figure 2A This is a side view taken from one opening of the fixture 20. Figure 2B This is a side view taken from the other opening side of the clamp 20.

[0068] like Figure 2A as well as Figure 2B As shown in the side view, the clamp 20 may also be shaped to have a protrusion 26 that engages with a recess (not shown) provided at the bottom of the protective film assembly storage container 24.

[0069] Figure 3 It means to Figure 1 The perspective view shows an example of the clamp 20 being mounted at the four corners from the outside of the protective film assembly storage container 24. Figure 3 The image shows an example of a container 24 using a protective membrane assembly that is rectangular when viewed from above. Figure 3 The illustrated protective membrane assembly storage container 24 includes a body and a lid.

[0070] Will Figure 1 The clamp 20 shown is inserted into the corners of the protective film assembly storage container 24 from the wider opening 22B (another opening) side of the clamp 20, thereby securing the body and the lid of the protective film assembly storage container 24.

[0071] like Figure 3 As shown, by using clamps 20 to fix the four corners of the protective film assembly storage container 24, which is rectangular when viewed from above, from the outside, the protrusions 26 of the clamps 20 can be fitted into the recesses provided at the bottom of the protective film assembly storage container 24. By fixing the main body and the cover of the protective film assembly storage container 24 at the four corners, the protective film assembly storage container 24 can be sealed from the outside by using four clamps 20, that is, fixed.

[0072] <Clamping device for storing protective film components>

[0073] The second aspect of the clamp for the protective membrane assembly storage container disclosed herein is a clamp for the protective membrane assembly storage container that, under the following condition 2, produces a gas release of 2.000 μg or less from a single clamp.

[0074] -Condition 2-

[0075] The fixture was placed inside the container as the analyte and heated at 50°C for 4 hours, causing the generated gas release to be adsorbed onto 150 mg of adsorbent material. Then, 150 mg of adsorbent material was placed in a gas chromatograph-mass spectrometer (hereinafter, sometimes simply referred to as GCMS) and heated at 280°C for 10 minutes to determine the total amount of volatile organic compounds released by the fixture.

[0076] Here, the total amount of gas released is calculated by converting to n-decane. The total amount is then divided by the number of fixtures used as the analyte to determine the amount of gas released from each fixture.

[0077] The GCMS measurement conditions used in this disclosure are as follows.

[0078] Measurement device name: GCMS-QP 2010plus (Shimadzu Corporation)

[0079] Column: DB-1 (Inner diameter: 0.32mm, Length: 60m, Thickness: 1.00μm)

[0080] Scanning range: 35m / Z~450m / Z

[0081] Ionization: 0.78kV

[0082] Measurement method: The amount of gas produced at 280℃ for 5 minutes was calculated by converting n-decane.

[0083] In condition 2, considering the deviation in the amount of gas released from each clamp collecting the test object, it is preferable to collect the test object from multiple different clamps and take the average of their measured values. In condition 2, from the viewpoint of the accuracy of the amount of gas released, it is preferable to collect the cut pieces of the test object from at least 4 clamps and take the average value, more preferably the average value of 8 clamps.

[0084] In this disclosure, unless otherwise specified, the total measurement of a particular organic gas is based on the average value of eight clamps.

[0085] In the second embodiment of the fixture disclosed herein, the amount of volatile organic compounds released from the fixture is 2.000 μg or less per fixture. From the viewpoint of suppressing the amount of gas released by the protective membrane assembly itself, it is preferable that the amount is 0.5 μg or less per fixture, more preferably 0.05 μg or less per fixture, even more preferably 0.04 μg or less per fixture, particularly preferably 0.03 μg or less per fixture, and most preferably below the detection limit or 0 μg.

[0086] Here, volatile organic compounds refer to organic compounds that volatilize under conditions of 25°C and 1 atm.

[0087] Examples of volatile organic compounds include aromatic hydrocarbons, aliphatic hydrocarbons, and other hydrocarbon compounds.

[0088] From the viewpoint of suppressing the release of gas from the protective membrane assembly, it is preferable that the amount of specific organic gas released under the conditions 1 specified in the first aspect of this disclosure is 150 μg or less per 1g clamp, and the amount of volatile organic components released under the conditions 2 specified in the second aspect of this disclosure is 2.000 μg or less per clamp.

[0089] The fixture disclosed herein preferably comprises a resin with a hardness of D55 to D69 according to a hardness tester.

[0090] Hardness can be measured using a D-type hardness tester in accordance with JIS K7215-1986 "Hardness Test of Plastics" as specified in Japanese Industrial Standards (JIS).

[0091] The hardness of the resin contained in the clamp is D55 or higher, thereby effectively suppressing dust generation caused by surface friction of the clamp at the contact point between the clamp and the protective film assembly storage container. The hardness of the resin contained in the clamp is D69 or lower, thereby effectively suppressing dust generation caused by surface friction of the storage container at the contact point between the clamp and the protective film assembly storage container.

[0092] The hardness of the resin contained in the fixture is preferably in the range of D55 to D69, and more preferably in the range of D58 to D64.

[0093] The clamp disclosed herein preferably comprises at least one resin selected from the group consisting of polyurethane resin, polyethylene resin, polyethylene terephthalate resin, polyvinyl chloride resin, polyamide resin, polycarbonate resin, acrylic resin, methacrylic resin and phenolic resin.

[0094] Examples of polyamide resins include PA6 and PA66.

[0095] From the viewpoint of suppressing the generation of gas release, the clamp preferably comprises at least one resin selected from the group consisting of polyethylene resin, polypropylene resin and polyurethane resin.

[0096] The fixture may contain only one type of resin or two or more types.

[0097] From the viewpoint of suppressing the release of gas from the fixture itself, heat treatment can be performed at a temperature below the softening point of the resin after manufacturing the fixture containing the above-mentioned resin.

[0098] It is believed that by heating the resin-containing fixture at the resin's softening point, for example, 50°C to 100°C, preferably 60°C to 90°C, for about 10 to 30 hours, preferably 20 to 30 hours, the volatile components contained in the resin in the fixture are reduced, which can more effectively suppress the generation of gas release and easily achieve the conditions for the release of specific organic gas measured under the above-mentioned condition 1 and the release amount of volatile organic components measured under the above-mentioned condition 2.

[0099] <Protective Film Component Storage Body>

[0100] The protective film assembly housing disclosed herein comprises: a protective film assembly; a protective film assembly storage container for storing the protective film assembly; a clamp for securing the protective film assembly storage container of the present disclosure from the outside; and a protective film assembly packaging body for packaging the protective film assembly storage container.

[0101] According to the protective film assembly package disclosed herein, the amount of gas released from the protective film assembly is reduced due to the adhesion of volatile organic components released by the clamps used in the protective film assembly housing.

[0102] "Protective film assembly storage" is used to mean that it contains the protective film assembly and the various packaging components that package the protective film assembly.

[0103] In the protective film assembly housing disclosed herein, the protective film assembly is disposed within a protective film assembly housing container made of resin such as polycarbonate. The protective film assembly housing container is clamped and fixed at its four corners, making it difficult to be affected by other packaging components. Furthermore, the clamps of this disclosure suppress the generation of specific organic gases, volatile organic components, etc., which are the cause of contamination of the protective film assembly, to a low range. Therefore, the amount of gas released from the protective film assembly caused by the adhesion of gas released from the packaging components of the protective film assembly housing is further reduced.

[0104] In addition, if there is a pressure difference between the inside and outside of the protective film assembly storage container when it is opened, it may be difficult to open and may cause failures during opening. Therefore, it is preferable that the inside of the protective film assembly storage container is not sealed.

[0105] The total amount of organic gas with 20 or fewer carbon atoms released by the clamp used in the protective film assembly housing of this disclosure, measured under the following condition 3, is preferably 648 μg or less.

[0106] -Condition 3-

[0107] The cut piece of the clamp used in the protective film assembly housing was placed in the container as the test substance, and 200 ml of hexane was used as the extraction solvent. The extract was obtained by Soxhlet extraction in a water bath at 80°C for 6 hours.

[0108] The obtained extract was analyzed using gas chromatography. In the gas chromatography, a flame ionization detector was used to detect the amount of components with 20 or fewer carbon atoms. The total amount of components with 20 or fewer carbon atoms detected was taken as the amount of gas released.

[0109] In addition, the evaluation method for condition 3 is the same as the determination method for condition 1 above, except that the test object is changed from the cut piece 1g of the fixture to the cut pieces of all fixtures used in the protective film assembly housing.

[0110] Furthermore, under condition 3 above, when the cut piece obtained by cutting off a portion of the fixture is used as the test object for evaluation, the total amount of gas released can also be calculated using the following formula I.

[0111] [(Gas release amount of the test object) × (Mass of the fixture)] / (Mass of the test object) = Total amount of gas release… Formula I

[0112] The total amount of organic gas with 20 or fewer carbon atoms released by the clamp used in the protective film assembly housing of this disclosure under the above-described condition 3 is preferably 1500 μg or less, more preferably 1000 μg or less, even more preferably 500 μg or less, particularly preferably 350 μg or less, or may be below the detection limit.

[0113] The protective film assembly storage container can use a known protective film assembly storage container.

[0114] Materials that can be used as containers for protective film components include, for example, resins such as polycarbonate, carbon nanotubes, conductive carbon black, and conductive materials such as inorganic particles.

[0115] The protective film assembly used in the protective film assembly housing can be a known protective film assembly. For example, the protective film assembly may be configured to include a protective film and a support frame supporting the protective film.

[0116] There are no particular restrictions on the shape of the container for storing the protective film components; examples include box-shaped containers.

[0117] The protective film assembly will now be described in one manner with reference to the accompanying drawings. Figure 4 This is a schematic cross-sectional view showing the protective film assembly 10. In the protective film assembly 10, the protective film 12 is bonded to the support frame 14 via a film adhesive layer 13. Ventilation holes 16 are formed in the support frame 14, and a template adhesive layer 15 is also formed thereon. Although not shown, a release sheet (e.g., a diaphragm) for protecting the template adhesive layer 15 may be further disposed on the surface of the template adhesive layer 15. The support frame 14 may also not have vent holes 16, or it may be a structure consisting of multiple layers stacked together.

[0118] The protective membrane 12 is supported by the support frame 14.

[0119] Materials that can be used as protective film 12 include transparent materials such as quartz glass, fluorinated resins, cellulose acetate, and carbon nanotubes.

[0120] Examples of materials that can be used for the support frame 14 include aluminum frames treated with acid-resistant aluminum, titanium frames, and silicon frames. From the viewpoint of preventing reflection of exposed light and facilitating the inspection of any attached foreign matter, the support frame 14 is preferably black.

[0121] The membrane adhesive layer 13 bonds the support frame to the protective membrane.

[0122] The material of the adhesive layer 13 for the membrane is not particularly limited, and examples include fluoropolymers such as acrylic resin adhesives, epoxy resin adhesives, silicone resin adhesives, and fluorinated silicone adhesives.

[0123] Alternatively, if the protective film 12 and the support frame 14 can be sealed together without the film adhesive layer 13 in between, the film adhesive layer 13 may not be required.

[0124] The original adhesive layer 15 can be formed by applying a known adhesive and drying it.

[0125] The material of the original adhesive layer 15 (hereinafter also referred to as the original adhesive) is not particularly limited, and examples include acrylic, silicone, styrene-butadiene, urethane, and olefin adhesives.

[0126] The protective film assembly in the protective film assembly housing disclosed herein contains an original adhesive, which may be a styrene-butadiene-based adhesive.

[0127] Styrene-butadiene adhesives are preferred as the material for the adhesive layer 15 for bonding the support frame 14 to the original plate because they easily suppress deformation of the original plate.

[0128] Styrene-butadiene-based adhesives are more prone to releasing gas from the protective film assembly after volatile organic compounds from the protective film assembly packaging adhere to the protective film assembly. By having the above-described configuration, the protective film assembly packaging of this disclosure reduces the amount of gas released from the protective film assembly due to the adhesion of volatile organic compounds from the protective film assembly packaging, even when a styrene-butadiene-based adhesive is used as the material for the original adhesive layer 15.

[0129] In this disclosure, "adhesive" is a concept that includes both adhesive and bonding agent.

[0130] In this disclosure, "adhesive layer" is a concept that includes both adhesive layer and bonding layer.

[0131] Materials used as release sheets include polyethylene terephthalate film and polypropylene film.

[0132] As described above, the support frame and the protective film can be bonded together without the use of the materials of the protective film 12 and the support frame 14, without the use of the film adhesive layer 13.

[0133] The protective film assembly disclosed herein comprises a protective film, an adhesive for the original, and a protective film assembly frame, and the gas release amount measured under the following condition 4 is less than 2.9 μg.

[0134] -Condition 4-

[0135] The protective membrane assembly was heated at 50°C for 4 hours, causing the generated gas release to be adsorbed onto 150 mg of adsorbent material. Then, 150 mg of adsorbent material was placed in a gas chromatograph-mass spectrometer (GCMS) and heated at 280°C for 10 minutes to determine the total amount of volatile organic compounds released from the protective membrane assembly.

[0136] Here, the total amount of gas released is calculated using n-decane conversion.

[0137] The method for determining the release of volatile organic components in Condition 4 is the same as in Condition 2, except that the analyte is replaced by a protective membrane assembly instead of a fixture. The applicable GCMS determination conditions are also the same.

[0138] The protective film assembly disclosed herein is a protective film assembly storage body comprising a protective film assembly storage container for storing the protective film assembly, a clamp for fixing the protective film assembly storage container of the present disclosure, and a protective film assembly packaging body for packaging the protective film assembly storage container. The protective film assembly disposed within the protective film assembly storage container comprises a protective film, an adhesive for the original plate, and a protective film assembly frame, and the gas release amount measured under the following condition 4 is 2.9 μg or less.

[0139] -Condition 4-

[0140] The protective membrane assembly was heated at 50°C for 4 hours, causing the generated gas to be adsorbed onto 150 mg of adsorbent material. Then, 150 mg of adsorbent material was placed in a gas chromatograph-mass spectrometer and heated at 280°C for 10 minutes to determine the total amount of volatile organic compounds released from the protective membrane assembly.

[0141] Here, the total amount of gas released is calculated using n-decane conversion.

[0142] The method for determining the release of volatile organic components in condition 4 above is the same as that in condition 2 above, except that the analyte is replaced by a protective membrane assembly instead of a fixture. The applicable GCMS determination conditions are also the same.

[0143] The protective film assembly packaging body for the aforementioned protective film assembly storage container can use a known packaging body. For example, the protective film assembly packaging body can also be a laminate containing at least two layers, including a sealing layer and a substrate layer.

[0144] From the viewpoint of strength in use, the breaking strength of the protective film component packaging body is preferably 5N or more and 50N or less, more preferably 7N or more and 45N or less, and even more preferably 10N or more and 40N or less.

[0145] The above-mentioned fracture strength was determined according to JIS-K7127-5 (1999) (corresponding to ISO527-3:1995). The fracture strength was measured at both ends of a JIS-K7127 test piece type 5 (dumbbell shape, 115 mm in total length, 6 mm in width of parallel sections, 25 mm in distance between marks, and 25 mm in width of clamping section).

[0146] There are no particular limitations on the specific method for setting the fracture strength to the above range. For example, methods such as adjusting the material and thickness of the substrate layer can be cited.

[0147] The protective film assembly packaging preferably comprises at least two layers, including a sealing layer and a substrate layer, and more preferably includes a sealing layer, an adhesive layer, and a substrate layer in sequence.

[0148] When the protective film assembly package is a laminate containing at least two layers, including a sealing layer and a substrate layer, or when the protective film assembly package is a laminate containing a sealing layer, an adhesive layer and a substrate layer in sequence, the outermost surface of the protective film assembly side may be the sealing layer, and the outermost surface of the outer peripheral side may be the substrate layer.

[0149] When the protective film assembly packaging body is composed of at least two layers, namely a sealing layer and a substrate layer, or when the protective film assembly packaging body is a laminate comprising a sealing layer, an adhesive layer, and a substrate layer in sequence, it can be considered that the release of volatile organic components from the protective film assembly packaging body is easily generated from the sealing layer. Therefore, when the outermost surface of the protective film assembly side is the sealing layer, the adhesion of volatile organic components released from the protective film assembly packaging body becomes significant. In contrast, the protective film assembly packaging body of this disclosure, by having the above-described configuration, easily maintains a low amount of gas release from the protective film assembly due to the adhesion of volatile organic components released from the protective film assembly packaging body.

[0150] (Sealing layer)

[0151] The sealing layer can be a single layer or a laminate consisting of two or more layers.

[0152] There are no particular restrictions on the material of the sealing layer; compositions containing known resins can be used.

[0153] Examples of the aforementioned resins include, for instance, polyethylene (PE) (including high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), etc.), polypropylene (PP), polybutene, polymethylpentene, and other homopolymers of polyolefin resins; copolymers of two or more olefins selected from the group consisting of ethylene, propylene, butene, methylpentene, etc.; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyethylene naphthalate, etc.; polyamide resins such as nylon-6, nylon-6,6, m-xylenediamine-adipate condensate, polymethylmethacrylamide, etc.; ethylene-vinyl alcohol copolymers; etc. The resin used in forming the sealing layer can be a single type or a combination of two or more types.

[0154] In the above, from the viewpoint of further reducing the amount of gas released from the protective film assembly due to the adhesion of volatile organic components released from the protective film assembly packaging, the material of the sealing layer preferably contains at least one selected from the group consisting of polyester resin, polyamide resin and ethylene-vinyl alcohol copolymer, more preferably contains at least one selected from the group consisting of polyester resin and ethylene-vinyl alcohol copolymer, and even more preferably contains ethylene-vinyl alcohol copolymer.

[0155] The thickness of the sealing layer (the total thickness when it is a laminated structure consisting of two or more layers) is preferably 500 μm or less, more preferably 100 μm or less, even more preferably 50 μm or less, and particularly preferably 40 μm or less.

[0156] If the thickness of the sealing layer is below the above range, the amount of gas released from the protective film assembly due to the adhesion of volatile organic components released from the protective film assembly packaging is further reduced.

[0157] From a sealing perspective, the thickness of the sealing layer (the total thickness when it is a laminated structure consisting of two or more layers) can be 3 μm or more, 5 μm or more, or 15 μm or more.

[0158] Based on the above viewpoint, the thickness of the sealing layer (the total thickness when it is a laminated structure consisting of two or more layers) can be 3 μm or more and 500 μm or less, or 3 μm or more and 40 μm or less.

[0159] As described above, when the protective film assembly packaging is considered to consist of at least two layers—a sealing layer and a substrate layer—the release of volatile organic compounds (VOCs) from the protective film assembly packaging is easily generated from the sealing layer. Therefore, as the thickness of the sealing layer increases, the adhesion of VOCs released from the protective film assembly packaging becomes more significant. In contrast, the protective film assembly packaging of this disclosure, by having the above-described structure, maintains a low amount of gas release from the protective film assembly due to the adhesion of VOCs generated from the protective film assembly packaging, even when the thickness of the sealing layer is within the aforementioned range.

[0160] (Substrate layer)

[0161] The substrate layer can be a single layer or a laminate consisting of two or more layers.

[0162] There are no particular restrictions on the material of the substrate layer; compositions containing known resins can be used.

[0163] Examples of the aforementioned resins include polyethylene (high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), etc.), ethylene-propylene copolymers, ethylene-butene copolymers, ethylene-hexene copolymers, ethylene-octene copolymers, polypropylene (PP), ethylene-vinyl acetate copolymers, ethylene-methyl methacrylate copolymers, ionomer resins, and other polyolefin resins; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; and nylon-6, nylon-6,6, and m-phenylenediamine-hexamethylene. Amide resins such as acid condensation polymers and polymethyl methacrylamide; acrylic resins such as polymethyl methacrylate; styrene-acrylonitrile resins such as polystyrene, styrene-acrylonitrile copolymers, styrene-acrylonitrile-butadiene copolymers, and polyacrylonitrile; hydrophobic cellulose resins such as cellulose triacetate and cellulose diacetate; halogenated resins such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, and Teflon (registered trademark); highly hydrogen-bonded resins such as polyvinyl alcohol, ethylene-vinyl alcohol copolymers, and cellulose derivatives; engineering plastic resins such as polycarbonate resins, polysulfone resins, polyethersulfone resins, polyetheretherketone resins, polyphenylene ether resins, polymethylene oxide resins, and liquid crystal resins; etc. Resins can be a single type or a combination of two or more types.

[0164] Of the above, from the viewpoint of preventing dust and other debris from adhering to the surface of the protective film assembly packaging, the material used as the substrate layer is preferably a material that is difficult to generate static electricity (preferably including an antistatic treated resin, more preferably a resin including either polyethylene terephthalate or polyethylene naphthalate).

[0165] The thickness of the substrate layer (the total thickness when it is a laminated structure consisting of two or more layers) is not particularly limited, but is preferably 0.1 μm or more and 500 μm or less, more preferably 1 μm or more and 100 μm or less, and even more preferably 5 μm or more and 30 μm or less.

[0166] (Adhesive layer)

[0167] The protective film assembly package disclosed herein may have an adhesive layer between the sealing layer and the substrate layer as needed.

[0168] The adhesive layer can be a single layer or a laminate consisting of two or more layers.

[0169] There are no particular restrictions on the material of the adhesive layer; compositions containing known resins can be used.

[0170] Examples of resins include polyurethane resins, polyester resins, polyether resins, and mixtures thereof.

[0171] There is no particular limitation on the thickness of the adhesive layer, but from the viewpoint of adhesive strength, it is preferably 1 μm or more, and more preferably 2 μm or more.

[0172] There is no particular limitation on the thickness of the adhesive layer. For example, from the viewpoint of shortening the curing reaction time during adhesive layer formation and reducing the proportion of unreacted substances and residual solvents during the effect reaction, it is preferably 5 μm or less, and more preferably 4 μm or less.

[0173] (Shape and properties of the protective film assembly packaging)

[0174] There are no particular restrictions on the shape of the protective film assembly packaging.

[0175] The shapes of protective film components can include, for example, sheet-like, bag-like, package-like, and box-like.

[0176] Within the scope of achieving the effects of this disclosure, the protective film assembly packaging may, as needed, include a packaging component in a portion of the packaging body that releases more than 90 ppm of volatile organic compounds under heating conditions at 100°C for 30 minutes. On the other hand, the proportion of the aforementioned packaging component in the protective film assembly packaging body with a total release of more than 90 ppm of volatile organic compounds is preferably 20% or less by mass of the entire protective film assembly packaging body, more preferably 10% or less by mass, and even more preferably 5% or less by mass. The protective film assembly packaging body preferably does not contain the aforementioned packaging component with a total release of more than 90 ppm of volatile organic compounds.

[0177] There are no particular limitations on the volume of the protective film assembly packaging; it can be appropriately set according to the size of the protective film assembly and the packaging form. For example, a preferred volume for the packaging is 2000 cm³. 3 ~70000cm 3 More preferably 4000cm 3 ~30000cm 3 More preferably 5000cm 3 ~10000cm 3 .

[0178] If the volume of the protective film assembly packaging is within the aforementioned range, the balance between the volume of the protective film assembly or the container containing the protective film assembly and the surface area of ​​the protective film assembly packaging can be easily optimized. Therefore, the proportion of volatile organic compounds released from the protective film assembly packaging becomes less, and the amount of gas released from the protective film assembly due to the adhesion of gas derived from the packaging is further reduced.

[0179] Example

[0180] The present disclosure will now be described in more detail through examples and the like, but the invention of the present disclosure is not limited to these examples.

[0181] <Experimental Examples 1 to 3 and Comparative Examples 1 to 2>

[0182] Using the fixture shown in the table, a protective film assembly housing was obtained, and the combined results of the release of volatile organic components from the fixture and the protective film assembly packaged in the housing were measured.

[0183] [Example 1]

[0184] (1) Preparation of various components as raw materials for mask adhesive

[0185] Thermoplastic elastomer (A)

[0186] Styrene-hydrogenated isoprene-styrene block copolymer (trade name "HYBRAR 7125" (manufactured by Kuraray Co., Ltd.), tanδ peak temperature: -5℃, styrene content: 20% by mass).

[0187] • Tackifying resin (B)

[0188] Hydrogenates of alicyclic petroleum resins: C9 series hydrogenated petroleum resin (trade name "ARKON P-100" (manufactured by Arakawa Chemical Industry Co., Ltd.), softening point: 100±5℃, number average molecular weight (Mn): 610), rosin ester resin (trade name "PINECRYSTAL KE-311" (manufactured by Arakawa Chemical Industry Co., Ltd.), softening point: 100±5℃)

[0189] · Softener

[0190] Polybutene (trade name "NISSAN POLYBUTENE 30N" (manufactured by Nippon Oil Co., Ltd.))

[0191] ·wax

[0192] Polypropylene pyrolytic wax (trade name "HI-WAX NP055" (manufactured by Mitsui Chemicals Co., Ltd.))

[0193] (2) Manufacturing of protective film components

[0194] 100 parts by weight of thermoplastic elastomer (A), 100 parts by weight of tackifying resin (B), and 200 parts by weight of softener were mixed in a total volume of 48g to obtain a raw material mixture. The obtained raw material mixture was then placed into a LABO PLASTOMILL (manufactured by Toyo Seiki Co., Ltd., content: 60mL) and sealed. The mixture was kneaded at 200°C and 100 rpm for 20 minutes to obtain a block-shaped mask adhesive. Approximately 10g of the mask adhesive was placed into a heating tank (tank temperature: 200°C) to melt it. Meanwhile, preparations were made as follows... Figure 4 The anodized aluminum support frame 14 shown has external dimensions of 148.77 mm × 114.9 mm, frame height H: 2.5 mm, and frame width W: 2 mm. Molten mask adhesive, extruded from a needle tip connected to a heating tank, is applied to one end face of the support frame 14 to form a master mask adhesive layer 15. The thickness of the formed master mask adhesive layer 15 is 0.6 mm. A diaphragm is disposed on the surface of the master mask adhesive layer 15. On the other end face of the support frame 14 (i.e., the side where the master mask adhesive layer 15 is not formed), a protective film assembly 10 is obtained by attaching a protective film 12 via a film adhesive layer 13 (fluoropolymer (AGC Corporation, CYTOP Type A)).

[0195] (3) Fabrication of the protective film component storage body

[0196] Place the prepared protective film assembly into the polycarbonate storage container.

[0197] Prepare four polyethylene clamps that have been heated at 90°C for 24 hours in an atmospheric atmosphere.

[0198] Each clamp weighs 2.9g.

[0199] Secure the polycarbonate storage container to the four corners using the four prepared clamps. Store the clamped polycarbonate storage container, encased in a protective film assembly, at 23°C for two months.

[0200] The protective film assembly packaging body is a laminate with polyethylene terephthalate as the base material and ethylene-vinyl alcohol copolymer as the sealing layer, with a thickness of 25μm.

[0201] (1. Evaluation of the total amount of gas released from the fixture)

[0202] For the fixture used in the protective membrane assembly housing, the total amount of gas released is determined under the following conditions 1 and 2.

[0203] The measurements were performed three times on different test samples, and the average values ​​are shown in Table 1.

[0204] -Condition 1-

[0205] 1g of the cut piece of the fixture was placed in the container as the analyte, and 200ml of hexane was used as the extraction solvent. The extract was obtained by Soxhlet extraction in a water bath at 80℃ for 6 hours.

[0206] The obtained extract was analyzed using gas chromatography. In gas chromatography, a flame ionization detector was used to detect the amount of components with 20 or fewer carbon atoms. The total amount of components with 20 or fewer carbon atoms detected was taken as the amount of organic gas released with 20 or fewer carbon atoms.

[0207] In condition 1, the composition of organic gaseous compounds with fewer than 20 carbon atoms is determined by using a mixed standard solution of n-chain alkanes, and the peak positions of the corresponding carbon atom numbers are determined in gas chromatography, based on the known concentration of nC. 20 H 42 The standard curve obtained from the standard solution by gas chromatography-GC-FID is derived.

[0208] -Condition 2-

[0209] The fixture was placed inside the container as the analyte and heated at 50°C for 4 hours, causing the generated gas release to be adsorbed onto 150 mg of adsorbent material. Then, 150 mg of adsorbent material was placed in a gas chromatograph-mass spectrometer (GCMS) and heated at 280°C for 10 minutes to determine the total amount of volatile organic compounds released from the fixture.

[0210] Here, the total amount of gas released is calculated by converting to n-decane. The obtained total amount is divided by the number of fixtures used as the test object to calculate the amount of gas released by each fixture.

[0211] The measurement conditions for GCMS used in this disclosure are as follows.

[0212] Measurement device name: GCMS-QP 2010plus (Shimadzu Corporation)

[0213] Column: DB-1 (Inner diameter: 0.32mm, Length: 60m, Thickness: 1.00μm)

[0214] Scanning range: 35m / Z~450m / Z

[0215] Ionization: 0.78kV

[0216] Measurement method: The amount of gas produced at 280℃ for 5 minutes was calculated by converting n-decane.

[0217] (2. Evaluation of the total amount of gas released from the protective membrane assembly)

[0218] The protective film assembly is stored inside the body and placed in a dust-free oven under atmospheric conditions. It is heated at 70℃~80℃ for 20 hours to perform degassing treatment.

[0219] The protective film assembly was packaged using the aforementioned packaging material and stored at 23°C for one week. After storage, the protective film assembly was removed from the packaging material and placed in an oven. The released gases generated under heating conditions at 50°C for 4 hours were then adsorbed onto Tenax (trademark, manufactured by GL Science Co., Ltd.), which was a powdered adsorbent material. Tenax was then placed in a GC-MS system and heated at 280°C for 10 minutes. The total amount (μg) of volatile organic compounds released from the protective film assembly (converted to n-decane) was measured and recorded as "total amount of released gases from the protective film assembly (μg / protective film assembly)".

[0220] Two measurements were performed on different test samples, and the average values ​​are shown in Table 1.

[0221] [Example 2]

[0222] Except that the clamp was made of the same polyethylene resin as in Example 1, and the heating conditions were set to 60°C for 24 hours, the clamp and the protective film assembly housing were made in the same manner as in Example 1, and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0223] [Example 3]

[0224] Except for using polypropylene resin to make the clamps and setting the temperature to 90°C for 24 hours, the clamps and protective film assembly housings were made in the same manner as in Example 1, and the evaluation was conducted in the same manner as in Example 1. The results are shown in Table 1.

[0225] [Comparative Example 1]

[0226] Except that the clamp was made of the same polyethylene resin as in Example 1 and no heating was performed, the clamp and the protective film assembly housing were made in the same manner as in Example 1, and the evaluation was performed in the same manner as in Example 1. The results are shown in Table 1.

[0227] [Comparative Example 2]

[0228] Except that the clamp was made of the same polypropylene resin as in Example 2 and no heating was performed, the clamp and the protective film assembly housing were made in the same manner as in Example 2, and the evaluation was performed in the same manner as in Example 1. The results are shown in Table 1.

[0229] In Table 1 below, PE represents polyethylene and PP represents polypropylene.

[0230] The hardness of the resin contained in the fixtures of Examples 1 to 3 and Comparative Examples 1 to 2, as measured by a hardness tester according to JIS K7215-1986, was in the range of D55 to D69.

[0231] [Table 1]

[0232]

[0233] As shown in Table 1, compared with the protective film assemblies packaged in the protective film assembly packaging body using the clamps of Examples 1 to 3 and the clamps of Comparative Examples 1 to 2, the amount of gas released from the protective film assembly due to the adhesion of the released volatile organic components is reduced.

[0234] [Explanation of Symbols]

[0235] 10 Protective membrane assembly, 12 Protective membrane, 13 Membrane adhesive layer, 14 Support frame,

[0236] 15 Original adhesive layer, 16 Vent holes, 20 Clamps for storing protective film components.

[0237] An opening (narrower opening) in the 22A fixture.

[0238] Another opening (wider opening) of the 22B fixture.

[0239] 24 Protective membrane assembly storage container, 26 Protrusion of clamp.

[0240] The disclosure of Japanese Patent Application 2023-95898, filed on June 9, 2023, is incorporated herein by reference.

[0241] All documents, patent applications and technical standards recorded in this disclosure are incorporated herein by reference to the same extent as those documents, patent applications and technical standards specifically described and incorporated by reference.

Claims

1. A clamp for a protective membrane assembly storage container, wherein the amount of organic gas with 20 or fewer carbon atoms released, evaluated under the following condition 1, is 150 μg or less per 1g of clamp. -Condition 1- 1g of the cut piece of the fixture was placed in the container as the analyte, and 200ml of hexane was used as the extraction solvent. The extract was obtained by Soxhlet extraction in a water bath at 80℃ for 6 hours. The obtained extract was analyzed by gas chromatography. In the gas chromatography, a flame ionization detector was used to detect the amount of components with 20 or fewer carbon atoms. The total amount of components with 20 or fewer carbon atoms detected was taken as the amount of gas released.

2. A clamp for a protective membrane assembly storage container, wherein the amount of gas released by one clamp is 2.000 μg or less, as evaluated under the following condition 2. -Condition 2- The fixture was placed inside the container as the analyte and heated at 50°C for 4 hours to allow the generated gas to be adsorbed onto 150 mg of adsorbent material. Then, 150 mg of adsorbent material was placed in a gas chromatograph-mass spectrometer and heated at 280°C for 10 minutes to determine the total amount of volatile organic compounds released by the fixture. Here, the total amount of gas released is calculated by converting to n-decane. The total amount is then divided by the number of fixtures used as the analyte to determine the amount of gas released from each fixture.

3. The clamp for the protective film assembly storage container according to claim 1 or 2, comprising at least one resin selected from the group consisting of polyurethane resin, polyethylene resin, polyethylene terephthalate resin, polyvinyl chloride resin, polyamide resin, polycarbonate resin, acrylic resin, methacrylic resin and phenolic resin.

4. A protective film assembly storage body, comprising: Protective membrane assembly; A protective film assembly storage container for storing the protective film assembly; The clamp for securing the protective film assembly storage container from the outside as described in claim 1 or 2; and The protective film assembly package is a container for storing the protective film assembly.

5. The protective film assembly housing according to claim 4, wherein, The total amount of organic gas with 20 or fewer carbon atoms released by the clamp for securing the protective membrane assembly storage container from the outside, measured under the following condition 3, is 1500 μg or less. -Condition 3- The clamp used in the protective film assembly housing was placed in the container as the test object. 200 ml of hexane was used as the extraction solvent, and the extract was obtained by Soxhlet extraction in a water bath at 80°C for 6 hours. The obtained extract was analyzed by gas chromatography. In the gas chromatography, a flame ionization detector was used to detect the amount of components with 20 or fewer carbon atoms. The total amount of components with 20 or fewer carbon atoms detected was taken as the amount of gas released.

6. A protective film assembly comprising a protective film, an adhesive for the original substrate, and a protective film assembly frame, wherein the gas release amount measured under the following condition 4 is 2.9 μg or less. -Condition 4- The protective membrane assembly was heated at 50°C for 4 hours, causing the released gas to be adsorbed onto 150 mg of adsorbent material. Then, 150 mg of adsorbent material was placed in a gas chromatograph-mass spectrometer and heated at 280°C for 10 minutes to determine the total amount of volatile organic compounds released from the protective membrane assembly. Here, the total amount of gas released is calculated using n-decane conversion.

7. A protective film assembly comprising a protective film assembly storage container for storing the protective film assembly, a clamp for securing the protective film assembly storage container from the outside as described in claim 1 or 2, and a protective film assembly packaging body for packaging the protective film assembly storage container. The protective film assembly, disposed within the protective film assembly storage container, comprises a protective film, an original adhesive, and a protective film assembly frame. The gas release amount measured under the following condition 4 was less than 2.9 μg. -Condition 4- The protective membrane assembly was heated at 50°C for 4 hours, causing the released gas to be adsorbed onto 150 mg of adsorbent material. Then, 150 mg of adsorbent material was placed in a gas chromatograph-mass spectrometer and heated at 280°C for 10 minutes to determine the total amount of volatile organic compounds released from the protective membrane assembly. Here, the total amount of gas released is calculated using n-decane conversion.

8. The protective membrane assembly according to claim 6, wherein, The adhesive used in the original version is a styrene-butadiene-based adhesive.

9. The protective film assembly according to claim 7, wherein, The adhesive used in the original version is a styrene-butadiene-based adhesive.

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