Gate valve and vacuum equipment

Abstract

The invention provides a gate valve and vacuum equipment, and relates to the technical field of vacuum equipment. The gate valve comprises a valve body, a valve element and at least two driving electric cylinders. A fluid channel is arranged in the valve body; the valve element is arranged in the valve body and used for opening or closing the fluid channel. The output ends of the at least two driving electric cylinders are connected with the valve core; and the at least two driving electric cylinders are configured to synchronously drive the valve element. The at least two driving electric cylinders are adopted to synchronously drive the valve element, so that the opening and closing stability and the sealing reliability of the gate valve are remarkably improved, the problems of unbalance loading and clamping stagnation possibly caused by single driving are avoided, the service life of equipment is prolonged, and meanwhile the response speed and precision of fluid control are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum equipment, in particular to a plug valve and a vacuum equipment. BACKGROUND

[0002] The driving mode of traditional plug valves often causes uneven stress in narrow and long rectangular openings, resulting in valve core deviation or jamming during movement, affecting the normal opening and closing of the plug valve. The present application optimizes the driving structure and uses multi-point synchronous driving technology to ensure uniform stress and smooth movement of the valve core in the narrow and long rectangular opening, effectively solving the problem of unbalanced driving. Moreover, in application scenarios requiring large thrust or long stroke, multi-cylinder driving is a common solution. However, due to factors such as passage differences and cylinder manufacturing errors, multi-cylinder often cannot be completely synchronized during operation, resulting in uncoordinated movement of the valve core and even jamming. The present application introduces a high-precision synchronous control system to monitor the movement state of each cylinder in real time and ensures high synchronization of multi-cylinder during operation through a feedback adjustment mechanism, effectively solving the problem of multi-cylinder control asynchronization.

[0003] In addition, due to the special geometry of the narrow and long rectangular opening, the valve core is prone to friction with the inner wall of the valve body during movement, especially in high temperature, high humidity or high dust working conditions, which is more likely to cause asynchronization due to jamming, leading to operational problems. The present application optimizes the matching structure of the valve core and the valve body, uses low-friction coefficient materials and surface treatment technology to reduce friction resistance during valve core movement. At the same time, a self-lubricating mechanism and regular maintenance reminder function are introduced to ensure smooth operation of the valve core in the long run, effectively solving the problem of high jamming of the valve core in the narrow and long rectangular opening. SUMMARY

[0004] Therefore, the purpose of the embodiments of the present application is to provide a plug valve and a vacuum equipment to improve the above-mentioned problems in the prior art.

[0005] In the first aspect, the plug valve provided by the embodiments of the present application comprises a valve body, a valve core and at least two driving cylinders; the valve body has a fluid passage inside; the valve core is arranged in the valve body and used to open or close the fluid passage; the output ends of the at least two driving cylinders are connected with the valve core; wherein the at least two driving cylinders are configured to synchronously drive the valve core.

[0006] In the above implementation process, by using at least two driving cylinders to synchronously drive the valve core, the opening and closing stability and sealing reliability of the plug valve are significantly improved, avoiding the problems of unbalanced load and jamming caused by single driving, prolonging the service life of the equipment, and improving the response speed and accuracy of fluid control.

[0007] Optionally, the plug valve further comprises a first connecting plate; the first connecting plate comprises a first connecting surface; the valve core comprises a plurality of arrays of connecting mechanisms; the first connecting surface is connected with the valve core; wherein the first connecting surface is provided with a first connecting part corresponding in number to the connecting mechanisms, and the plurality of connecting mechanisms are connected to the first connecting part correspondingly.

[0008] In the implementation process, the plurality of connecting mechanisms on the valve core are integrated on the same first connecting surface through the first connecting plate, and are precisely docked with the corresponding first connecting part, thereby realizing synchronous assembly and positioning of the connecting mechanisms, significantly simplifying the assembly process, improving the assembly efficiency and consistency, enhancing the structural rigidity and motion synchronism of the valve core group, and further guaranteeing the sealing performance and long-term operation reliability.

[0009] Optionally, the first connecting plate further comprises a second connecting surface; the second connecting surface is connected with the driving device; wherein the second connecting surface is provided with a second connecting part corresponding in number to the driving cylinders, and the output ends of the driving cylinders act on the corresponding second connecting parts respectively.

[0010] In the implementation process, the output ends of the driving cylinders act on the first connecting plate through the second connecting part, so that the thrust is uniformly distributed and synchronously transmitted to each connecting mechanism, thereby avoiding load deviation and stress concentration, significantly improving the stability and sealing reliability of the opening and closing process, and simplifying the transmission chain and reducing the assembly and maintenance difficulty.

[0011] Optionally, a gap is reserved between the two ends of the valve core and the inner wall of the valve body.

[0012] In the implementation process, the gap reserved between the two ends of the valve core and the inner wall of the valve body forms a self-centering floating structure, which not only compensates for thermal expansion and contraction and processing errors, but also significantly reduces friction resistance and jamming risk, making the opening and closing smoother and the sealing more durable, while reducing wear and tear, prolonging the maintenance cycle and service life.

[0013] Optionally, the plug valve further comprises a control system; the control system is in communication connection with each driving cylinder, and the control system is used for controlling synchronous operation of all driving cylinders.

[0014] In the implementation process, the control system controls all driving cylinders in real time and synchronously, ensuring that the positions, speeds and thrusts of the cylinders are always consistent, completely eliminating asynchronous deviation, and greatly improving the accuracy, response speed and sealing reliability of the plug valve opening and closing; at the same time, supporting remote monitoring and fault self-diagnosis, significantly reducing operation and maintenance cost and downtime risk.

[0015] Optionally, the valve core is movably connected with a sealing plate; the valve core is internally provided with a strutting mechanism; the strutting mechanism is configured to convert the axial movement of the valve core into the transverse movement of the sealing plate perpendicular to the fluid passage.

[0016] In the above implementation process, the strutting mechanism instantaneously converts the axial movement of the valve core into the transverse movement of the sealing plate, so that the sealing plate is vertically pressed against the valve seat after being turned off, thereby forming a uniform and compensable high specific pressure seal; both the full-range sliding wear and the sealing life are prolonged, and the reliability and maintenance economy under high-pressure and large-diameter working conditions are significantly improved.

[0017] Optionally, the drive electric cylinder comprises a motor, a second connecting plate and a push rod; the second connecting plate comprises an input end and an output end, and the output end is located in the same plane as the input end; the input end is connected with the output shaft of the motor, and the push rod is connected with the output end; the push rod is driven by the second connecting plate to move linearly.

[0018] In the above implementation process, the motor output shaft is directly connected with the second connecting plate input end in the same plane, and the output end directly drives the push rod to move linearly, thereby omitting the intermediate coupling or conversion mechanism, making the structure more compact and the transmission chain shorter, significantly reducing the return gap and cumulative error, improving the positioning accuracy and response speed, and reducing the number of parts and assembly space, facilitating the arrangement in a narrow cavity and reducing the maintenance cost.

[0019] Optionally, the push rod of the drive electric cylinder is provided with a shaft seal at the position penetrating the valve body, and the shaft seal is an oil-free seal; a static seal is arranged between the cover plate and the valve body, and the static seal is an oil-free seal. In the above implementation process, the push rod dynamic seal and the cover plate static seal both adopt an oil-free seal structure, thereby completely eliminating the pollution and explosion risk of lubricating oil to high-purity or flammable medium, meeting the clean process requirements of semiconductors, food, medicine and the like; at the same time, the maintenance and oil change are eliminated, long-period operation without lubrication is realized, and the downtime and operation and maintenance cost are significantly reduced.

[0020] Optionally, the valve body is rectangular; and at least two drive electric cylinders are arranged side by side along the long side of the valve body.

[0021] In the above implementation process, the rectangular valve body is arranged with multiple drive electric cylinders side by side along the long side, so that the transverse space can be fully utilized, the thrust force is uniformly distributed on the whole length of the valve core, and the load deformation is avoided; the layout is compact and the center of gravity is low, thereby improving the sealing stability and rigidity, facilitating the modular installation and pipeline butt joint, and significantly reducing the overall size and manufacturing cost.

[0022] In a second aspect, the embodiments of the present application provide a vacuum equipment, which comprises the plug valve.

[0023] In the implementation process, the vacuum equipment directly uses the plug-in valve, which can be connected to the vacuum system without oil, synchronously and with high sealing, saving additional modification and maintenance, and one-time improving equipment cleanliness, beat and reliability. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0025] Figure 1 The first schematic diagram of the plug-in valve provided by the embodiments of the present application; Figure 2 The second schematic diagram of the plug-in valve provided by the embodiments of the present application; Figure 3 The third schematic diagram of the plug-in valve provided by the embodiments of the present application; Figure 4 The fourth schematic diagram of the plug-in valve provided by the embodiments of the present application; Figure 5 The fifth schematic diagram of the plug-in valve provided by the embodiments of the present application.

[0026] Figure legend: 100-valve body; 110-fluid passage; 111-medium inlet; 112-medium outlet; 200-valve core; 210-first connecting plate; 211-first connecting surface; 212-second connecting surface; 220-expanding mechanism; 300-driving electric cylinder; 310-second connecting plate; 311-motor; 312-push rod; 400-connector. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0028] Firstly, please refer to Figure 1 , Figure 1 The first schematic diagram of the plug-in valve provided by the embodiments of the present application.

[0029] The plug valve provided by the embodiment of the application comprises a valve body 100, a valve core 200, and at least two drive cylinders 300; the valve body 100 has a fluid passage 110 inside; the valve core 200 is arranged in the valve body 100 and is used for opening or closing the fluid passage 110; output ends of the at least two drive cylinders 300 are connected with the valve core 200; and the at least two drive cylinders 300 are configured to synchronously drive the valve core 200.

[0030] In the implementation process, the valve core 200 of the plug valve needs to overcome various resistances such as fluid pressure and friction of a sealing ring when being closed, especially in the working condition of a large-diameter and high pressure difference, the required force is very large. A single drive cylinder 300 can not be able to provide sufficient thrust, or needs to be very large and cumbersome. The total thrust requirement is dispersed to each drive cylinder 300 by using multiple drive cylinders 300, so that each drive cylinder 300 can be selected to be a more standard and more economical model, and the overall thrust is multiplied. The valve core 200 is stably and linearly moved in the valve body 100 by the synchronous action of the at least two drive cylinders 300 on the valve core 200, so as to ensure that the opening or closing action of the fluid passage 110 is synchronously completed. If the two drive cylinders 300 are not synchronized, one is fast and the other is slow, the valve core 200 will be “stuck”, and a huge mechanical stress is generated inside. This not only sharply increases the motor load and damages the cylinder, but also can directly cause the valve core 200 to be stuck, so that the plug valve cannot be actuated. The synchronous driving mode effectively balances the radial force borne by the valve core 200, reduces the risk of sticking or eccentric wear caused by single-sided driving, improves the opening and closing reliability and sealing life of the plug valve; meanwhile, the distributed arrangement of the multiple cylinders provides a larger total driving force for the valve core 200, so that the plug valve can be rapidly opened and closed under a higher pressure difference working condition, the loads of the drive cylinders 300 are balanced, the single driving element is prevented from being overloaded and failed, and the continuous and stable operation of the entire fluid control system is ensured.

[0031] Optionally, the fluid passage 110 further comprises a medium inlet 111 and a medium outlet 112, flange plates are arranged at the medium inlet 111 and the medium outlet 112, sealing grooves are arranged on the flange plates, and rubber rings are arranged in the sealing grooves to achieve sealing effect.

[0032] In the above implementation process, the flange is a standardized connecting component in the industrial piping system, which means that the plug valve can be easily connected with the pipes, pumps or other equipment provided by different manufacturers upstream and downstream, which conforms to the same standard, greatly improving the interchangeability and integration convenience of the equipment. The two mating flanges can be fastened with bolts, which can generate a large clamping force to form a rigid and high-strength mechanical connection, which can withstand the weight of the pipe, internal medium pressure and external load (such as vibration and thermal stress), avoiding leakage or structural failure due to loose connection points. The flange connection belongs to detachable connection. When it is necessary to replace the plug valve, clean the pipe or perform other maintenance, the plug valve can be removed from the pipeline by loosening the bolts, which significantly reduces the complexity and time cost of maintenance work. Moreover, the core function of the sealing groove is to provide a precise positioning and accommodation space for the rubber ring. This ensures that during the bolt fastening process, the rubber ring will not be mistakenly squeezed into the flow channel or completely squeezed out of the contact surface, but will be limited in the groove to undergo controllable and uniform elastic deformation. The sealing groove protects the rubber ring from accidental falling off, scratching or twisting during the installation and docking process, while also reducing the direct scouring and wear of the sealing element by the medium flow, prolonging its service life.

[0033] Optionally, the valve body 100 is rectangular; and the at least two drive cylinders 300 are arranged side by side along the long side direction of the valve body 100.

[0034] In the above implementation process, the rectangular valve body 100 provides a collinear installation reference surface for the at least two drive cylinders 300 arranged side by side along the long side direction of the valve body 100, so that the thrust axis of each cylinder is parallel to the barycentric plane of the valve core 200 and is distributed equidistantly; this layout maximizes the number of drive units arranged in a limited width space, evenly covers the total thrust along the width direction of the valve core 200, eliminates the unbalanced torque caused by unilateral driving, and ensures that the valve core 200 maintains zero distortion and zero jamming in the long-stroke and large-section rectangular channel, thereby further improving the sealing reliability and structural life of the plug valve under high-pressure and large-flow conditions.

[0035] Optionally, the at least two drive cylinders 300 are symmetrically arranged along the long side direction of the valve body 100.

[0036] In the above implementation process, the at least two drive cylinders 300 are symmetrically arranged along the long side direction of the valve body 100, so that the output force of each cylinder is applied in pairs with the center line of the valve core 200 as the symmetric axis; this symmetric force system forms a self-balancing couple at any instant, completely eliminates the additional bending moment and lateral deviation of the valve core 200, ensures that the sealing plate and the sealing surface of the valve body 100 maintain a uniform compression gap, realizes low wear and zero leakage high-frequency opening and closing, and significantly improves the synchronization accuracy and operation reliability of the plug valve during the entire life cycle.

[0037] Please combine Figure 1 See Figure 2 and Figure 3 , Figure 2 This is a second schematic diagram of the slide gate valve provided in an embodiment of this application. Figure 3 This is a third schematic diagram of a slide gate valve provided in an embodiment of this application.

[0038] Optionally, the slide gate valve further includes a first connecting plate 210; the first connecting plate 210 includes a first connecting surface 211; the valve core 200 includes a plurality of arrayed connecting mechanisms; the first connecting surface 211 is connected to the valve core 200; wherein, the first connecting surface 211 is provided with a first connecting part corresponding to the number of connecting mechanisms, and the plurality of connecting mechanisms are correspondingly connected to the first connecting part.

[0039] In the above implementation process, the first connecting plate 210 is rigidly connected to the valve core 200 through its first connecting surface 211, and the first connecting part provided on the first connecting surface 211, corresponding to the number of connecting mechanisms, provides an independent and stable installation interface for each connecting mechanism. This structure enables multiple connecting mechanisms to simultaneously receive the output force from at least two drive electric cylinders 300, and achieves uniform transmission and distribution of force through the first connecting plate 210, ensuring the synchronicity and parallelism of each connecting mechanism during movement. At the same time, the first connecting plate 210, as an intermediate transition component, effectively reduces the assembly difficulty between the valve core 200 and the output end of the drive electric cylinder 300, improves the alignment accuracy and assembly reliability of the overall structure, and further ensures the sealing performance and operational stability of the slide gate valve under high-frequency opening and closing conditions.

[0040] Optionally, the first connecting plate 210 further includes a second connecting surface 212; the second connecting surface 212 is connected to the driving device; wherein, the second connecting surface 212 is provided with a second connecting part corresponding to the number of driving electric cylinders 300, and the output end of the driving electric cylinder 300 acts on the corresponding second connecting part.

[0041] In the above implementation process, the second connecting surface 212, through the second connecting part corresponding to the number of drive cylinders 300, rigidly fixes the output end of each drive cylinder 300 to the first connecting plate 210, forming a high-rigidity force transmission link between the cylinder, the connecting plate, and the valve core 200. This link allows the synchronous thrust of each drive cylinder 300 to converge via the second connecting surface 212 and then be synchronously transmitted to all valve cores 200 at once through the first connecting plate 210, ensuring that each valve core 200 is subjected to balanced force and consistent displacement throughout the opening and closing process, completely eliminating the risk of valve core 200 skewing or jamming caused by uneven thrust distribution. At the same time, the second connecting part is an independent detachable interface, which allows online maintenance or replacement of any drive cylinder 300 without disassembling the valve core 200, significantly shortening maintenance time and improving the maintainability and operational reliability of the slide gate valve in continuous production processes.

[0042] Optionally, a connector 400 may be provided on the valve body 100, which is used for external equipment to transport the slide gate valve provided in this embodiment.

[0043] In the above implementation process, the connecting piece 400 is prefabricated or integrated on the valve body 100. During transportation, operators do not need to use ropes to arbitrarily tie the valve body, avoiding serious safety accidents such as falls from heights and equipment damage caused by improper binding, unstable center of gravity, or rope compression damaging the appearance of the slide gate valve and precision components (such as push rods and flange sealing surfaces). When lifting equipment (such as cranes and forklifts) lifts the slide gate valve through the connecting piece, the slide gate valve can naturally maintain a horizontal or preset posture without tilting or overturning. This also protects any precision components (such as gates) that may exist inside the slide gate valve.

[0044] In one embodiment of this application, the connector 400 is a component that can achieve similar functions, such as a welded lifting lug, a threaded lifting eye nut hole, or a lifting rod channel that penetrates the valve body.

[0045] Optionally, please refer to Figure 4 , Figure 4 This is a fourth schematic diagram of a slide gate valve provided in an embodiment of this application.

[0046] The valve core 200 has a gap between its two ends and the inner wall of the valve body 100.

[0047] In the above implementation process, both ends of the valve core 200 are vented to avoid the problem of high-frequency jamming of the narrow and long rectangular valve core 200, thus achieving smooth operation of the valve core 200 within the slide gate valve body. A uniform circumferential gap is reserved between both ends of the valve core 200 and the inner wall of the valve body 100 to form a non-contact guiding zone. This gap provides thermal expansion and inertial offset margin for the valve core 200 under high-speed or high-frequency opening and closing conditions, preventing local interference caused by temperature gradients or transient impacts, thereby preventing the valve core 200 from jamming and ensuring that the slide gate valve maintains stable operation with low friction and low wear throughout its entire life cycle.

[0048] In one embodiment of this application, the gap may be 13 mm, with a tolerance range of 12.5 mm to 14.0 mm.

[0049] Optionally, the valve core 200 has two pre-drilled drive holes to enable simultaneous multi-point actuation, avoiding the imbalance caused by single-point actuation. Two diameter holes are symmetrically arranged along the central axis of the valve core in the middle. (For example: The driving hole has a center distance of ) (For example: 150mm). The drive rod engages with both holes simultaneously via a rigid connecting bracket.

[0050] Optionally, the slide gate valve also includes a control system; the control system is communicatively connected to each drive cylinder 300, and the control system is used to control the synchronous operation of all drive cylinders 300.

[0051] In the above implementation process, the control system establishes a real-time communication link with each drive cylinder 300 to perform closed-loop sampling and comparison of the position, speed and output force of each drive cylinder 300. Based on the synchronization deviation value, the control system dynamically adjusts the drive current or pulse signal of each drive cylinder 300 at a microsecond interval to achieve a high degree of overlap of the displacement-time curves of all drive cylinders 300, ensuring that the valve core 200 maintains a theoretical zero phase difference throughout the entire opening and closing stroke. This synchronous operation strategy not only eliminates the off-center load of the valve core 200 and wear of the sealing surface caused by the difference in cylinder response, but also triggers an alarm and performs automatic compensation or shutdown protection immediately when any cylinder shows signs of losing synchronization, thereby significantly improving the operating accuracy, sealing reliability and overall safety of the slide gate valve.

[0052] In one embodiment of this application, the drive cylinder 300 uses a servo motor 311, and the servo motor 311 digital module (program) is used for displacement control to solve the problem of asynchrony when there are multiple cylinders, so as to achieve displacement synchronization when driving multiple points. Multi-point synchronous drive is used to solve the problem of high-frequency jamming in narrow and long rectangular openings; and to realize precise control and stable operation of the gate valve opening and closing.

[0053] Optionally, a sealing plate is movably connected to the valve core 200; the valve core 200 is provided with an opening mechanism 220; the opening mechanism 220 is configured to convert the axial movement of the valve core 200 into the lateral movement of the sealing plate perpendicular to the fluid channel 110.

[0054] In the above implementation process, the sealing plate is not rigidly fixed to the valve core 200, but is movably connected to it. This means that the sealing plate has a certain degree of freedom of movement relative to the valve core 200 body within a certain range. The movable connection allows the sealing plate to adaptively conform to and press against the valve seat sealing surface when subjected to a spreading force, ensuring full contact of the sealing surface even with minor manufacturing errors, installation deviations, or thermal deformation. During most of the opening and closing stroke of the slide gate valve, the sealing plate does not need to contact the valve seat, and is only spread open and pressed tightly in the final stage of complete closure. This greatly reduces the frictional wear between the sealing pairs during the movement of the valve core 200, significantly extending the service life of the seals. The spreading mechanism 220 is built into the valve core 200, and its core function is to convert the axial (along the pipeline direction) thrust provided by the drive cylinder into the lateral (perpendicular to the fluid direction) expansion movement of the sealing plate. Using mechanisms such as inclined planes, wedge blocks, or connecting rods, the spreading mechanism can amplify the huge axial thrust and convert it into a pressing force acting on the side of the sealing plate and pointing towards the valve seat. This clamping force can be much greater than the direct thrust of the drive cylinder, thereby generating an extremely high sealing specific pressure on the sealing surface, ensuring zero leakage even under high pressure differential conditions. The axial movement of the valve core 200 is synchronously converted into the lateral movement of the sealing plate perpendicular to the fluid channel 110 by the spreading mechanism 220, so that the sealing plate quickly expands outward after the valve core 200 reaches the closed position, forming radial clamping with the sealing surface of the valve body 100. This two-step sealing path of axial positioning followed by lateral clamping avoids continuous sliding friction of the sealing plate during the stroke, significantly reducing the wear rate and opening and closing drive torque. With the mechanical force amplification effect of the spreading mechanism 220, a stable, uniform and repeatable low-leakage sealing effect can still be obtained under high flow rate or high pressure differential conditions, thereby extending the maintenance-free cycle and sealing life of the slide gate valve.

[0055] Optionally, the drive cylinder 300 includes a motor 311, a second connecting plate 310, and a push rod 312; the second connecting plate 310 includes an input end and an output end, and the output end and the input end are located in the same plane; the input end is connected to the output shaft of the motor 311, the push rod 312 is connected to the output end, and the push rod 312 is driven by the second connecting plate 310 to perform linear motion.

[0056] In the above implementation process, the rotational motion of the output shaft of the motor 311 is rigidly transmitted from the input end to the output end of the second connecting plate 310 in the same plane, and directly converted into the linear displacement of the push rod 312. This planar force transmission path eliminates the intermediate reversing or deceleration links, so that the push rod 312 and the movement axis of the valve core 200 maintain zero angular deviation, thereby outputting the torque of the motor 311 to the valve core 200 synchronously without loss or lag, significantly reducing mechanical backlash and response time, ensuring that each drive cylinder 300 maintains sub-millimeter level synchronization accuracy under high frequency opening and closing conditions, and thus ensuring the immediacy and reliability of the overall sealing of the slide gate valve.

[0057] Optionally, please refer to Figure 5 , Figure 5 This is a fifth schematic diagram of a slide gate valve provided in an embodiment of this application.

[0058] Among them, the push rod 312 of the drive cylinder 300 is provided with a shaft seal at the point where it passes through the valve body 100. The shaft seal is an oil-free seal. A static seal is provided between the cover plate of the valve body 100 and the valve body 100. The static seal is an oil-free seal. In the above implementation process, the seal is a dynamic sealing device used to prevent internal media (such as liquid or gas) from leaking along the shaft when a rotating shaft or reciprocating rod (here, the push rod 312 of the electric cylinder) passes through the container wall, while also preventing external impurities from entering the interior. An oil-free shaft seal is installed at the point where the push rod 312 of the electric cylinder 300 passes through the valve body 100, i.e., at the sealing point of the second connection. Between the electric cylinder push rod and the valve body, a shaft seal is used because it must withstand the reciprocating motion of the push rod. The oil-free seal uses a self-lubricating material, meaning the sealing element is made of a material with a low coefficient of friction and good wear resistance. The most common are polytetrafluoroethylene (PTFE, commonly known as Teflon), filled PTFE composite materials, polyetheretherketone (PEEK), or certain special thermoplastic polyurethanes (TPU), etc. These materials maintain good performance even under dry friction conditions. Through special structures such as lip seals, Glyd rings, and step seals, the sealing effect is ensured while reducing frictional resistance and wear.

[0059] Static seals refer to seals between two fixed mating surfaces with no relative movement. An oil-free static seal is installed at the mating surface between the valve body 100 cover plate and the valve body 100. A static seal is used between the valve body cover plate and the valve body because these two components are fixed. This can be an O-ring, gasket, or sealant. These two oil-free sealing structures, without the need for lubrication, still form a continuous and stable elastic compression barrier for the moving parts and static mating surfaces, preventing particles, moisture, or corrosive media in the fluid channel 110 from leaking out along the push rod 312 or the cover plate gap, while also preventing oil contamination of the fluid channel 110. This oil-free sealing solution allows the slide gate valve to be directly deployed in high-cleanliness, high-vacuum, or strong-oxidation conditions, significantly expanding the applicable process range and reducing subsequent maintenance costs and environmental risks.

[0060] Secondly, embodiments of this application provide a vacuum device, which includes the aforementioned slide gate valve.

[0061] In the above implementation process, the vacuum equipment integrates the aforementioned gate valve, connecting the valve body 100, valve core 200, at least two synchronously driven electric cylinders 300, oil-free sealing system, and closed-loop control system to the vacuum boundary as a whole. The gate valve can achieve highly reliable sealing and rapid opening and closing on the vacuum side without lubrication, avoiding oil molecule backflow and contamination of the vacuum cavity. At the same time, the symmetrical synchronous drive structure of the multi-cylinder ensures that the valve plate maintains zero twisting and zero vibration under high vacuum pressure difference, ensuring that the vacuum equipment maintains stable ultimate vacuum and controllable leakage rate throughout the entire cycle of pumping, venting, and process switching, thereby improving the overall process repeatability, product yield, and maintenance interval.

[0062] In summary, this application provides a slide gate valve and a vacuum device, relating to the field of vacuum device technology. The slide gate valve includes: a valve body 100, a valve core 200, and at least two drive cylinders 300; the valve body 100 has a fluid channel 110 inside; the valve core 200 is disposed within the valve body 100 and is used to open or close the fluid channel 110; the output ends of the at least two drive cylinders 300 are connected to the valve core 200; wherein the at least two drive cylinders 300 are configured to synchronously drive the valve core 200. By employing at least two drive cylinders 300 to synchronously drive the valve core 200, the opening and closing stability and sealing reliability of the slide gate valve are significantly improved, avoiding the off-center load and jamming problems that may be caused by single drive, extending the equipment life, and simultaneously improving the response speed and accuracy of fluid control.

[0063] In the several embodiments provided in this application, it should be understood that the disclosed device can also be implemented in other ways. The device embodiments described above are merely illustrative; for example, the block diagrams in the accompanying drawings show the possible architecture, functions, and operations of the device according to various embodiments of this application. In this regard, each block in the block diagram may represent a module, program segment, or part of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in a different order than that marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. In addition, the functional modules in the various embodiments of this application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.

[0064] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application. It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0065] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A slide gate valve, characterized in that, The slide gate valve includes: a valve body, a valve core, and at least two drive cylinders; The valve body has a fluid passage inside; the valve core is disposed in the valve body and is used to open or close the fluid passage. The outputs of at least two of the drive cylinders are connected to the valve core; wherein, at least two of the drive cylinders are configured to drive the valve core synchronously.

2. The slide gate valve according to claim 1, characterized in that, The slide valve also includes a first connecting plate; The first connecting plate includes a first connecting surface; the valve core includes multiple arrays of connecting mechanisms; The first connecting surface is connected to the valve core; wherein, the first connecting surface is provided with a first connecting part corresponding to the number of the connecting mechanisms, and the plurality of the connecting mechanisms are correspondingly connected to the first connecting part.

3. The slide gate valve according to claim 2, characterized in that, The first connecting plate also includes a second connecting surface; The second connecting surface is connected to the driving device; wherein, the second connecting surface is provided with a second connecting part corresponding to the number of driving electric cylinders, and the output end of the driving electric cylinder acts on the corresponding second connecting part.

4. The slide gate valve according to claim 1, characterized in that, A gap is reserved between the two ends of the valve core and the inner wall of the valve body.

5. The slide gate valve according to claim 1, characterized in that, The slide gate valve also includes a control system; The control system is communicatively connected to each of the drive cylinders, and the control system is used to control all drive cylinders to operate synchronously.

6. The slide gate valve according to claim 1, characterized in that, A sealing plate is movably connected to the valve core; an opening mechanism is provided inside the valve core; The opening mechanism is configured to convert the axial movement of the valve core into the lateral movement of the sealing plate perpendicular to the fluid channel.

7. The slide gate valve according to claim 1, characterized in that, The drive cylinder includes a motor, a second connecting plate, and a push rod; The second connecting plate includes an input terminal and an output terminal, and the output terminal and the input terminal are located in the same plane; The input end is connected to the output shaft of the motor, the push rod is connected to the output end, and the push rod is driven by the second connecting plate to perform linear motion.

8. The slide gate valve according to claim 7, characterized in that, in, The push rod of the drive cylinder is provided with a shaft seal at the point where it passes through the valve body. The shaft seal is an oil-free seal. A static seal is provided between the cover plate of the valve body and the valve body, and the static seal is an oil-free seal.

9. The slide gate valve according to claim 1, characterized in that, in, The valve body is rectangular; at least two of the drive cylinders are arranged side by side along the long side of the valve body.

10. A vacuum device, characterized in that, The vacuum device includes a slide gate valve as described in any one of claims 1 to 9.

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