Apparatus and method for inspecting a lamp

Abstract

Examples disclosed herein relate to methods and apparatus for inspecting lamp dimensions. The method includes determining an actual measurement of the lamp. The lamp is configured to heat a substrate in a substrate processing apparatus. A window having a width and a height is generated. The window is based on a target measurement of the lamp. The method further includes generating a deviation based on a difference between the image of the actual measurement and the window. The deviation is compared to a first threshold. If the deviation exceeds a first threshold, the lamp is rejected.

Description

[0001] This application is a divisional application of the invention patent application filed on March 12, 2021, with application number 202180027350.5 and title "Apparatus and Method for Inspecting Lamps". background Technical Field

[0002] The examples disclosed in this article relate to methods and apparatus for checking lamp dimensions. Background Technology

[0003] In substrate processing chambers such as epitaxial deposition chambers, the quality of the deposited material is particularly dependent on the uniformity of substrate temperature. Control of heat sources is one way to influence the heat distribution across the substrate temperature. Dimensions such as the size, shape, and angle of the heat sources are parameters that affect the quality of the heat distribution. When multiple heat sources are used in the processing chamber, control over the size, shape, and angle of the heat sources directly corresponds to the heat distribution, and therefore to the quality of the material deposited on the substrate.

[0004] During routine maintenance of the processing chamber, individual heat sources can be replaced. Maintaining a consistent heat distribution across the substrate allows for greater uniformity of material deposited on the substrate between routine maintenance processes.

[0005] New or replacement heat sources must be qualified before they can be used in the processing chamber. The quality of a given heat source can be assessed by visual inspection or testing. If a heat source fails visual inspection or the measurement results do not meet acceptable tolerances, it can be discarded. When using these quality assurance techniques, a small sample of a batch of heat sources is inspected to qualify the entire batch. Based on the sample results, the entire batch can be discarded or determined to be acceptable. Accordingly, unsampled heat sources in a qualified batch may contain heat sources exceeding acceptable tolerances. When non-compliant heat sources are accepted, they can be introduced into the processing chamber and negatively impact the thermal uniformity distribution across the substrate. Consequently, material deposition is negatively affected.

[0006] Therefore, there is a need for improved quality assurance techniques for heat sources used in processing chambers. Summary of the Invention

[0007] The examples disclosed herein relate to methods and apparatus for inspecting lamps. The method includes determining an actual measurement result of the lamp. The lamp is configured to heat a substrate in a substrate processing apparatus. A window with a width and a height is generated. The window is based on the target measurement result of the lamp. The method further includes generating a deviation based on the difference between an image of the actual measurement result and the window. The deviation is compared to the first threshold. If the deviation exceeds the first threshold, the lamp is rejected.

[0008] In another example, an image processing apparatus including a camera is provided. The camera has at least one lens and a controller. The controller is configured to perform a method for identifying a lamp. The method includes determining an actual measurement result of the lamp's filament. The lamp is configured to heat a substrate in a substrate processing apparatus. The method further includes generating a window having a width and a height. The window is based on a target measurement result of the filament. The method further includes generating a deviation based on the difference between the image of the actual measurement result and the window. The deviation is compared with the first threshold. If the deviation exceeds the first threshold, the lamp is rejected.

[0009] Examples in this document also include a non-volatile computer-readable medium configured to store instructions. When executed by a processor, the instructions cause an execution of a lamp inspection process. The process includes determining actual measurements of the lamp's filament. The lamp is configured to heat a substrate in a substrate processing apparatus. The process further includes generating a window having a width and a height. The window is based on a target measurement of the filament. The process includes generating a deviation based on the difference between an image of the actual measurement and the window. The deviation is compared to a first threshold. If the deviation exceeds the first threshold, the lamp is rejected. Attached Figure Description

[0010] This document discloses methods and apparatus for measuring and testing the lamp dimensions of filaments in 3D printed lamps. A more detailed description of the above-briefly summarized features of this disclosure can be obtained by referring to the examples illustrated herein, some of which are shown in the accompanying drawings. However, it should be noted that the drawings are merely illustrative and should not be considered as limiting the scope of this disclosure. Accordingly, the drawings allow for other equivalent examples.

[0011] Figure 1A-Figure 1B A schematic cross-sectional view of an exemplary processing chamber is shown.

[0012] Figures 2A to 2B The illustration can be found Figure 1A-Figure 1B A front view of an exemplary lamp used as a heat source in the processing chamber.

[0013] Figure 2C It is a measurement Figures 2A-2B The diagram shows the dimensions of the lamp in the front view plan.

[0014] Figure 3A yes Figure 2A The example lamp shown is a side view plan.

[0015] Figure 3B It is a measurement Figure 3A The diagram shows the dimensions of the lamp in a side view plan.

[0016] Figures 4A to 4B The diagram is suitable for use in Figures 2A-2B and Figure 3A A portion of the filament used in an exemplary lamp.

[0017] Figure 5 An example filament edge and Figures 4A-4B The cross-sectional view of the planes intersecting the central axes shown.

[0018] Figure 6 Another exemplary filament along with Figures 4A-4B The cross-sectional view of the planes intersecting the central axes shown.

[0019] Figure 7 This is yet another exemplary filament edge and Figures 4A-4B The cross-sectional view of the planes intersecting the central axes shown.

[0020] Figure 8 It is suitable for fixing Figures 2A-2B and Figure 3A The diagram shows a plan view of an exemplary lamp holding structure for the lamp.

[0021] Figure 9 It can support Figure 8 A top plan view of an exemplary support structure for the lamp retaining structure.

[0022] Figure 10 It is a schematic block diagram of an image processing device configured as an inspection lamp.

[0023] Figure 11 It is used for utilization Figure 10 A flowchart of an exemplary method for inspecting a lamp using an image processing device.

[0024] For ease of understanding, the same reference numerals have been used as much as possible to represent the same elements as common features. It is understood that the elements and features of one example can be beneficially incorporated into other examples without further elaboration. Detailed Implementation

[0025] Epitaxy is a technique that deposits material onto a substrate using a reaction in a processing chamber. The processing chamber uses a heating lamp controlled by variable electrical power to heat the substrate. The lamp can provide radiation in the visible to near-infrared range. The substrate absorbs the radiation from the lamp, thereby increasing the substrate temperature and its suitability for deposited materials. The lamp includes a filament made of a material that radiates light and heat when an electric current passes through it. The lamp can be placed in a gaseous environment designed to extend the filament's lifespan.

[0026] The cross-section of the filament coil used in the lamps disclosed herein can be generally rhomboidal (e.g., diamond-shaped), pentagonal, or hexagonal. The cross-section of the lamp wire contributes to increasing the radiation per square meter (W / m²). 2 The cross-sectional shape of the filament coil increases its surface area and thus increases the lamp's lifespan. Compared to conventional lamps, the evaporated molecules in the filament are redeposited back into the filament coil, as detailed below. Additionally, the overall geometry or cross-section of the filament coil reduces light reflected from the inner surface of the lamp bulb towards the filament coil. This reduces the frequency of lamp replacements in the processing chamber, thereby reducing the need for routine maintenance. By reducing the frequency of routine maintenance, downtime in the processing chamber is reduced, and higher throughput can be achieved per processing chamber.

[0027] The uniformity of material deposited on a substrate is related to the thermal uniformity across the substrate surface. Since the lamp radiates heat, the lamp's uniformity is related to the uniformity of the thermal gradient across the substrate. By controlling the thermal gradient across the substrate, the uniformity of the material deposited on the substrate can be controlled.

[0028] This document discloses a method and apparatus for measuring and testing lamp dimensions suitable for use in a processing chamber. The method includes an automated visual inspection that acquires images of lamps configured for use in the processing chamber. The acquired images of the lamps are transmitted to a computer for further processing, or the acquired images of the lamps are processed in an image processing device. The computer or image processing device compares a predetermined dimension with the actual dimension of the lamp measured by the image processing device. Unacceptable lamps (i.e., lamps exceeding a tolerance threshold) are rejected. Lamps conforming to the predetermined dimensions are also appropriately marked (i.e., qualified) and separated from unacceptable lamps.

[0029] The uniformity of material deposited on a substrate is related to the temperature uniformity across the substrate surface. Since lamps radiate heat across the substrate surface, the uniformity of qualified lamps is related to the uniformity of the thermal gradient across the substrate. By controlling the thermal gradient across the substrate thickness, the material deposited on the substrate can be more precisely controlled. Advantageously, by utilizing qualified lamps, the center-to-edge uniformity of the deposited material on the substrate can be improved.

[0030] Figure 1AThis is a schematic cross-sectional view of a processing chamber 100a having a plurality of heat sources 102a. The processing chamber 100a has a chamber body 105. The chamber body 105 includes sidewalls 136, a bottom 106, and a cover 130 defining a shell 109 of the chamber body 105. An upper dome 128, a lower dome 114, and a gasket 163 are disposed within the shell 109. The gasket 163 is fixed to the sidewall 136. The internal volume 101 of the chamber body 105 is defined by the upper dome 128, the lower dome 114, and the gasket 163. The internal volume 101 includes a processing volume 111 and a purification volume 113.

[0031] A process gas inlet 174 is formed through the sidewall 136 of the processing chamber 100a. The process gas inlet 174 is also formed through the gasket 163 and provides a path for the process gas to flow into the processing volume 111. The process gas flows from the gas source 172 through the process gas inlet 174 and across the substrate support 104, which is disposed within the internal volume 101 of the processing chamber 100a.

[0032] A purified gas inlet 164 is formed through the sidewall 136 of the processing chamber 100a. The purified gas inlet 164 is also formed through the liner 163 and provides a path for the purified gas to flow into the purified volume 113. The purified gas flows from the purified gas source 162 through the purified gas inlet 164 and into the purified space 113 of the processing chamber 100a.

[0033] Gas outlet 178 is disposed through sidewall 136 and gasket 163. Gas outlet 178 is generally opposite process gas inlet 174 in the internal volume 101 of processing chamber 100a. Gas outlet 178 allows process gas in processing volume 111 of internal volume 101 to be discharged from processing chamber 100a. Purified gas in purification volume 113 of internal volume 101 is also discharged from processing chamber 100a through gas outlet 178. Vacuum source 180 is coupled to gas outlet 178 to discharge process gas and purified gas from internal volume 101 of processing chamber 100a.

[0034] A substrate support 104 is configured to support a substrate 108 during processing operations in a processing chamber 100a, the substrate 108 being disposed on an upper surface 110 of the substrate support 104. The substrate support 104 can rotate the substrate 108 during processing to improve the uniformity of material deposited on the substrate 108. An upper dome 128 is disposed above the substrate support 104 and, together with the upper surface 110 of the substrate support 104 and the pad 163, further defines a processing volume 111. A cleanup volume 113 is further defined by a lower dome 114, a bottom surface (not numbered) of the substrate support 104, and the pad 163.

[0035] The heat shield assembly 160 surrounds the substrate support 104. The heat shield assembly 160 is a ring-shaped structure concentric with the substrate support 104. The heat shield assembly 160 includes an annular preheating member 167 and a heat shield member 168. The annular preheating member 167 is annular.

[0036] The heating module 145 provides heat to the processing chamber 100a during processing. The heating module 145 can be positioned above or below the substrate support 104, or both. Figure 1A In the processing chamber 100a shown, a heating module 145 is provided below a substrate support 104. The heating module 145 may include optical elements 115, such as lenses, light guides, or other reflective and refractive elements. The heating module 145 includes a plurality of heat sources 102. The heat sources 102 are disposed within a lower dome 114. The heat sources 102 may be any one or a combination of lamps, light-emitting diodes (LEDs), and lasers. The reflective and refractive elements are shaped to direct the energy emitted by the heat sources 102 toward the substrate support 104. The heat from the heating module 145 heats the substrate support 104, and the substrate support 104 conducts heat to the substrate 108 where it contacts the substrate support 104. In some cases, such as where the substrate 108 does not contact the substrate support 104, heat may also be transferred by radiation. In one example, the heat source 102 is a lamp. Further discussion of heat source 102 will concern a lamp with a filament configured to radiate heat on substrate 108 for processing within processing chamber 100a.

[0037] Figure 1B This is a schematic cross-sectional view of another processing chamber 100b configured to deposit material on substrate 108. Figure 1BBackground content is provided regarding the use of an alternative heat source 102b in the heating module 145 to heat the substrate 108 in the processing chamber 100b. In one example, the processing chamber 100b is configured as a rapid thermal processing (RTP) chamber. It should be understood that the processing chamber 100b depicted herein is for illustrative purposes, and the concepts of this disclosure can be beneficial to any thermal process chamber using a light source such as heat source 102 to emit radiant energy to heat the substrate 108 for processing. Although heat source 102b is shown disposed in lamp tube 134 (located adjacent to the processing volume 111 above the substrate 108), heat source 102b may alternatively be positioned below, above, and below the substrate 108 in the processing chamber 100b. A plurality of lamp tubes 134 are disposed within the processing volume 111 of the processing chamber 100b. The processing volume 111 is generally a space surrounded by the side walls and body (shown but not numbered) of the processing chamber 100b, and is separated from the lamp 134 and heat source 102b by the window 138. The processing volume 111 can be maintained at a pressure below atmospheric pressure.

[0038] A plurality of lamps 134 are disposed in a heating module 145. The heating module 145 covers a window 138, and the window 138 separates the heating module 145 from the processing volume 111. The substrate handling device 144 includes a rotor 146 disposed within a rotor channel 148, and a support cylinder 150 disposed on or otherwise coupled to the rotor 146. The support cylinder 150 may be coated with silicon quartz. The rotor 146 may be magnetically levitated. An edge ring 152 is disposed on the support cylinder 150. The edge ring 152 may be made of silicon carbide coated with silicon. The edge ring 152 is configured to circumscribe and support at least a portion of the substrate 108 during processing.

[0039] Heating module 145 includes a lamp tube 134 and a heat source 102b. As shown, a heat source 102b is disposed at one end of a corresponding lamp tube 134. The lamp tube 134 is configured to be inserted into a lamp receiving tube 154. Alternatively, more than one heat source 102b may be housed in a corresponding lamp receiving tube within the lamp receiving tube 154. Each lamp receiving tube 154 may include a reflective inner surface, which may be coated with silver or gold. The lamp receiving tube 154 may be lined with a specular reflector 166. In one example, the heat source 102b is a radiation-emitting light bulb, such as a tungsten halogen lamp.

[0040] The atmosphere of the processing chamber 100b and the heating module 145 can be controlled. For example, a first vacuum pump 156 is provided to control (e.g., reduce) the pressure in the heating module 145 via a first channel 158, which is in fluid communication with the heating module 145, as shown in FIG1. ​​A second vacuum pump 170 is provided to control (e.g., reduce) the pressure in the heating module 145 via a second channel 176. In one embodiment, to prevent the specular reflector 166 from losing its shine, the atmosphere around the heat source 102b is controlled to substantially minimize the amount of material forming sulfides or catalytic sulfides on the silver used on the specular reflector 166. One way to prevent the specular reflector 166 from losing its shine is to ensure that the atmosphere is substantially free of H2S and moisture (H2O). For example, by allowing helium to flow through the first channel 158, atmospheric air can be substantially prevented from entering the area around the heat source 102b. In another example, a filter and / or getter may be provided in the first channel 158 to remove H2S and moisture from the atmosphere surrounding the heat source 102b. For example, a sulfide getter comprising a metal oxide such as iron oxide substantially prevents atmospheric air from entering the area surrounding the heat source 102b.

[0041] Figure 2A It is possible Figure 1A The image shows a front plan view of an exemplary lamp 200a serving as a heat source 102a in the processing chamber 100a. The lamp 200a has a base 204 and a dome 220. The dome 220 has a tip 222 at one end. In some examples, the dome 220 is made of quartz. A first pin 208 and a second pin 210 are connected to the base 204. Each of the first pin 208 and the second pin 210 has an upper portion 212 and a lower portion 216. The first pin 208 and the second pin 210 are configured to be detachably mounted to a heating module 145 (in...). Figure 1A (As shown in the diagram). Additionally, the program establishes the first pin line 330 of the first pin 208 (in... Figure 2C (As shown in the diagram), the first pin line 330 passes through the center of the first pin 208 along the y-direction 350 in the length direction. The second pin 210 has a second pin line 332 (in the diagram). Figure 2C (As shown in the figure), the second pin line 332 passes through the center of the second pin 210 along the y-direction 350 in the length direction.

[0042] Attached to the bottom of the dome 220 is a support member 224. The support member 224 has a hole 226 configured to receive a first connector 244 and a second connector 256. The hole 226 has contact electrodes that electrically couple a first pin 208 and a second pin 210 to the first connector 244 and the second connector 256, respectively.

[0043] A filament 248 with an outer diameter of 264 is disposed within a dome 220. The filament 248 has a winding section 252. The filament 248 is formed of wire 408 (as shown in Figure 4). A portion of the wire 408 of the filament 248 (shown in Figure 4) may be wound or wrapped around a stub 240. The stub 240 is disposed close to the top of the dome 220. A substantially identical stub 240 is disposed close to the bottom of the dome 220. A ground wire 260 is electrically coupled to the filament 248 and extends along the vertical length of the filament 248 (i.e., in the y-direction 350).

[0044] The first connector 244 is formed by a portion of the ground wire 260. The first connector 244 couples the ground wire 260 to the first pin 208. The second connector 256 electrically couples the second pin 210 to the filament 248. Therefore, the current entering the second pin 210 reaches the filament 248 via the second connector 256 before returning via the ground wire 260 and the first connector 244 and flowing out from the first pin 208.

[0045] In operation, an electric current is applied to filament 248, causing filament 248 to radiate light and heat. In some examples of this disclosure, the filament is made of tungsten. Tungsten filaments can radiate infrared radiation at temperatures up to about 3,422°C. It should be understood that other metals may be used without departing from the scope of this disclosure. Dome 220 (e.g., a quartz bulb) is filled with a gas configured to extend the life of filament 248. The gas may have low levels of reactivity and may be any or a combination of halogen gases (e.g., fluorine (F), chlorine (Cl), bromine (Br), iodine (I), astatine (At), and tennessine (Ts)). In one example, dome 220 is filled with one or more halogen gases. According to the halogen cycle, when an electric current is applied to filament 248, vapor is formed in dome 220. The vapor includes evaporated tungsten molecules. Halogenates (halides) can form with tungsten molecules. Accordingly, some halide molecules are redeposited onto filament 248. In this way, the lifespan of filament 248 and lamp 200a is extended.

[0046] The program can establish a dividing plane 274, which orthogonally passes through the first pin 208 and the second pin 210 at the intersection of the upper portion 212 and the lower portion 216. Dividing plane 274 extends in the x-direction 340 and the z-direction 360. The z-direction 360 is orthogonal to the x-direction 340 and the y-direction 350. Centerline 228 intersects with the first pin line 330 and the second pin line 332 (in... Figure 2C(As shown in the diagram) Equidistant. First pin line 330 passes through first pin 208, and second pin line 332 passes through second pin 210. Center line 228 extends vertically in the y-direction 35°. Center line 228 may pass through the middle of dome 220 and support member 224, i.e., the center. First length 272 of the lamp extends from the top of dome 220 (excluding tip 222) to dividing plane 274, which extends between the upper portion 212 and the lower portion 216 of first pin 208 and second pin 210. Dividing plane 274 is generally orthogonal to center line 228. Second length 276 of lamp 200a extends from the top of dome 220 (excluding tip 222) to the peak of tip 222. Therefore, second length 276 is a measure of tip 222 of dome 220. First pin line 330 and second pin line 332 may be referred to herein as first pin reference and second pin reference, respectively. Center line 228 may be referred to as reference center axis.

[0047] Center point 280 is defined by the intersection of center line 228 and dividing plane 274. Viewed from the front view of lamp 200a (e.g.) Figure 2A As shown), the first deviation point 284 is the first coil box 320 (i.e., Figure 2C The geometric center of the first window shown. The first coil frame 320 is the two-dimensional outline of the filament 248. Viewed from the front plan, the outer diameter 264 is equal to the width of the first coil frame 320. The length 304 of the winding section 252 of the filament 248 (in...) Figure 3A (As shown in the diagram) is equal to the length of the first coil frame 320. The first deviation line 232 passes through the center point 280 and the first deviation point 284. The first deviation angle 268 is defined by the angle between the center line 228 and the first deviation line 232. It should be understood that the lamp 200a is not drawn to scale, and the relationship between the center point 280 and the first deviation point 284 has been exaggerated to illustrate the features of this disclosure.

[0048] Figure 2B It is possible Figure 1B The image shows a front plan view of an exemplary heat source 102b used in the processing chamber 100b. The heat source 102b has a base 204, a dome 220, and a lead section 214. In one example, the dome 220 may be a generally cylindrical dome, with one end of the cylinder having a hemispherical end. The heat source 102b may also have a pointed tip 222 at one end of the dome 220. In some examples, the dome 220 is made of quartz or other suitable material.

[0049] The heat source 102b includes a filament 248 disposed within the dome 220. The filament 248 has an outer diameter 264. The filament 248 is composed of wire 408 (in... Figures 4A-4B(As shown in the diagram) The filament 248 includes a wound section 252 extending in the y-direction 270 within the internal volume of the dome 220. In other words, the wound section 252 of the filament 248 extends in the y-direction 270 aligned with the long axis of the heat source 102b. The wound section 252 is generally helical, but may have other shapes. The filament 248 is attached to the grounding wire 260.

[0050] Pin segment 214 includes a first pin 234 and a second pin 238. The first pin 234 and the second pin 238 are configured to be coupled to electrodes (not shown) disposed within the lamp housing tube 154. Base 204 may include electrodes, circuitry, and other components required to couple the filament 248 and / or the ground wire 260 to the first pin 234 and the second pin 238.

[0051] A first length 272 of heat source 102b is defined between the distal end of tip 222 and the bottom of pin section 214 (excluding pins 234, 238). The first length 272 of heat source 102b is between approximately 120 mm and 135 mm. In one example, the first length 272 is approximately 125 mm. The width 246 between the first pin 234 and the second pin 238 is between approximately 6 mm and approximately 8 mm. Dome 220 has an outer diameter 250 between approximately 11 mm and approximately 17 mm. The outer diameter 264 of the winding section 252 of filament 248 is between approximately 3 mm and approximately 7 mm. Other geometries may be considered for specific applications.

[0052] In operation, an electric current is applied to the filament 248, causing it to radiate light and heat. In some examples of this disclosure, the filament is made of tungsten or other suitable conductors. Tungsten filaments radiate infrared radiation at temperatures up to about 3,422°C. It should be understood that other metals may be used without departing from the scope of this disclosure. The dome 220 (e.g., a quartz bulb) is filled with at least one gas configured to extend the lifespan of the filament 248. The gas may have a low level of reactivity, such as one or more rare gases. Other gases may also be present in the bulb. The gas reduces the rate of decomposition of the filament 248, thus extending the lifespan of the heat source 102b.

[0053] Figure 2C It is a measurement Figure 2A The diagram illustrates the dimensions of the front view of lamp 200a. It should be understood that although the following discussion pertains to lamp 200a, the methods disclosed herein can also be applied to lamp 200b. As discussed, filament 248 is disposed within the dome 220 of lamp 200b. Center point 280 is determined by the intersection of centerline 228 and dividing plane 274. This can be achieved, for example, by... Figure 2AThe front view shown establishes the edge of the winding section 252 of the filament 248 to determine the first deviation point 284. The digital representation of the filament 248 has at least two horizontal edges 326 extending in the x-direction 340 and two vertical edges 325 extending in the y-direction 350. The two horizontal edges 326 extend in the x-direction 340 until they intersect with the two vertical edges 325 extending in the y-direction 350. The first horizontal edge 326 intersects with the two parallel vertical edges 325 at first point 316 and second point 317. Third point 318 and fourth point 319 are the intersection points of the second horizontal edge 326 and the two parallel vertical edges 325. A first coil frame 320 is formed by connecting the four points 316-319 with two sets of parallel lines. The coil centerline 328 extends generally parallel to the centerline 228 in the y-direction 350. The first deviation point 284 is the intersection of the diagonal line (not shown) extending from the first point 316 to the third point 318 and another diagonal line (not shown) extending from the second point 317 to the fourth point 319. Therefore, the first deviation point 284 is the vertical and horizontal center point of the first coil frame 320. The coil centerline 328 passes through the first deviation point 284. The width is determined by the distance between two parallel points in the x-direction 340. The length is determined by the distance between two parallel points in the y-direction 350.

[0054] from Figure 2A From the side view, the outer diameter 264 of the filament 248 is determined based on the distance between the first point 316 and the second point 317. Alternatively, the outer diameter 264 can be determined based on the distance between the third point 318 and the fourth point 319. The first length 272 can be measured by determining the distance between the center point 280 and the fifth point 321 located at the top of the dome 220. Figure 2A (As shown in the figure). The second length 276 is the distance between the sixth point 322 and the fifth point 321, where the sixth point 322 indicates the tip 222 of the dome 220.

[0055] Figure 3A yes Figure 2A The exemplary lamp 200a shown is a side plan view. Figure 2A The lamp 200a shown in Figure 3A Rotate 90 degrees in the middle. For simplicity, in Figure 3A Grounding 260 is not depicted. The length 304 of the winding section 252 of filament 248 is determined from this side plan view. Dividing plane 274 is located at either the first pin 208 or the second pin 210 (in...). Figure 2AThe upper portion 212 and the lower portion 216 (shown in the diagram) extend in the z-direction 360. The vertical distance 308 of the filament 248 is determined by measuring the distance from the dividing plane 274 to the starting point of the winding section 252. The second deviation angle 312 is determined in a similar manner to the first deviation angle 268. Specifically, the second deviation angle 312 is the angle between the center line 228 and the second deviation line 313 passing through the center point 280 and the second deviation point 314. When from Figure 3A When observing the side view of lamp 200a, the second deviation point 314 is the second coil frame 370 (i.e., Figure 3B The geometric center of the second window shown in the diagram. From Figure 3A Viewed from the side plan view, the second coil frame 370 is the two-dimensional outline of the filament 248. The outer diameter 264 is equal to the width of the second coil frame 370. The length 304 of the winding section 252 of the filament 248 is equal to the length of the second coil frame 370. As described, the center point 280 is the intersection of the center line 228 and the dividing plane 274. When viewed from... Figure 3A When viewed from the position of lamp 200a shown, the second deviation point 314 is the geometric center of the two-dimensional representation of filament 248. As described above, when lamp 200a moves from... Figure 2A When the position shown is rotated 90 degrees, the second deviation angle 312 is measured.

[0056] The first radius of curvature 327 and the second radius of curvature 329 can be determined in substantially the same manner. For example, the first radius of curvature 327 can be determined after the image processing device 1000 acquires an image of the lamp 200a. The first radius of curvature 327 can be calculated by using image processing techniques to determine the gradient, slope, or edges of the dome 220. It should be understood that other image processing techniques can be used to determine the dimensions disclosed herein without departing from the scope of this disclosure.

[0057] like Figure 3A As shown, the gap distance 331 is measured vertically from the bottom point 333 of the dome 220 to a point on the surface of the support member 224. The surface of the support member 224 is generally perpendicular to the z-direction 360. The gap distance 331 is shown as being close to the second radius of curvature 329. However, the gap distance 331 may also be close to the first radius of curvature 327. Thus, regardless of whether the gap distance 331 is determined to be close to the first radius of curvature 327 or the second radius of curvature 329, the size of the gap distance 331 can be the same value. However, in other examples, the size of the gap distance 331 can have different values ​​depending on whether the gap distance 331 is determined to be close to the first radius of curvature 327 or the second radius of curvature 329.

[0058] Figure 3B It is a measurement Figure 3AThe illustration shows the side plan view dimensions of lamp 200a or lamp 200b. The foregoing discussion pertains to lamp 200a, and the methods disclosed herein can also be applied to lamp 200b. As discussed, filament 248 is disposed within the dome 220 of lamps 200a and 200b. Center point 280 is determined by the intersection of centerline 228 and dividing plane 274. This can be achieved, for example, by... Figure 3A The side view shown establishes the edge of the winding section 252 of the filament 248 to determine the second deviation point 314. The filament 248 has at least two horizontal edges 356 extending in the z-direction 360 and two vertical edges 355 extending in the y-direction 350. The two horizontal edges 356 extend in the z-direction 360 until they intersect with the two vertical edges 325 extending in the y-direction 350. The intersection of the first horizontal edge 356 with the two parallel vertical edges 355 intersects at a first point 351 and a second point 352. A third point 353 and a fourth point 354 are the intersection points of the second horizontal edge 356 with the two parallel vertical edges 355. A second coil frame 370 is formed by connecting the four points 351-354 with two sets of parallel lines. The coil centerline 358 extends generally parallel to the centerline 228 in the y-direction 350. The second deviation point 314 is the intersection of the diagonal line (not shown) extending from the first point 351 to the third point 353 and the other diagonal line extending from the second point 352 to the fourth point 354. Therefore, the second deviation point 314 is the vertical and horizontal center point of the second coil frame 370. The coil centerline 358 passes through the second deviation point 314.

[0059] Figure 4A Is Figures 2A-2B and Figure 3A A portion of the filament 248 used in lamp 200a or lamp 200b shown. A portion of the filament 248 has a span gradient 424. Considering an imaginary line (not shown) extending parallel to the central axis 401, the span is defined as the center-to-center distance from a first point 403 on line 408 intersecting the imaginary line to a second point 405 on line 408 intersecting the imaginary line. The second point 405 on line 408 is approximately 360 degrees from the first point 403 along the spiral circumference of line 408. The span is defined as the difference between two adjacent points (e.g., the first point 403 and the second point 405). The span gradient 430 is defined as the difference between three or more points, such as the difference between the first point 403 and the second point 405, and the difference between the second point 405 and the third point 407. Along the circumference of line 408, the third point 407 is approximately 360 degrees from the second point 405 and approximately 720 degrees from the first point 403. It is understandable that the other point is about 360 degrees away from its adjacent point on line 408.

[0060] The first span 414 is defined as the distance between the first point 403 and the second point 405. The second span 416 is defined as the distance between the second point 405 and the third point 407. The third span 418 is defined as the distance between the third point 407 and the fourth point 409. Similarly, the fourth span 420 and the fifth span 422 are defined as the distances between adjacent points 409-413. In the example shown, the first span 414 is less than the second span 416, and the second span 416 is less than the third span 418. Accordingly, the span gradient 424 of the filament 248 increases in the direction extending from the first point 403 to the sixth point 413. Correspondingly, the span gradient 424 increases from the first span 414 to the fifth span 422, such that each adjacent span increases in the direction of the span gradient 424. The span gradient 424 can be linear or non-linear.

[0061] In one example, the span gradient 424 of the filament 248 increases in the direction of gravity. The first point 403 is closer to the base 204 than the tip 222 of the dome 220. Conversely, the sixth point 413 is closer to the tip 222 of the dome 220 than the base 204. When the filament 248 is positioned in the lamp 200b, the first span 414 is adjacent to the base 204 and smaller than the second span 416, and the second span 416 is smaller than the third span 418. The third span 418 is closer to the tip 222 than the first span 414. Advantageously, when the lamp 200a or lamp 200b is mounted in the heating module 145, the span gradient 424 allows the filament 248 to maintain the integrity of the winding section 252. In some examples, the integrity of the winding section 252 is maintained for approximately 20 percent longer than that of a conventional lamp (not shown).

[0062] After thousands of process runs, the heating and cooling of wire 408 can cause deformation of the winding section 252 of filament 248. In conventional lamps, gravity exacerbates this deformation during the heating and cooling of the material in wire 408, resulting in greater deformation. This repeated deformation of conventional filaments caused by temperature changes and gravitational pull on the wire mass leads to the failure of conventional lamps. Advantageously, the span gradient 424 prevents deformation caused by repeated stress from the heating and cooling of filament 248, thereby allowing filament 248 to maintain its integrity. In one example, after approximately 20,000 to approximately 25,000 process runs, the first span 414, the second span 416, and the third span 418 may be substantially equal. In another example, after approximately 20,000 to approximately 25,000 process runs, the first span 414 to the fifth span 422 are substantially equal.

[0063] As previously described, the span gradient 424 increases in the direction of gravity. Accordingly, when the filament 248 is installed in the lamp 200a of the processing chamber 100a, the first point 403 is closer to the tip 222 of the dome 220 than the second point 405. Correspondingly, the first span 414 is closer to the substrate support 104 or the substrate 108 than the second span 416 or subsequent spans 418-422. Conversely, when the filament 248 is installed in the lamp 200b of the processing chamber 100b, the first point 403 is farther from the tip 222 of the dome 220 than the second point 405. Accordingly, the first span 414 is farther from the substrate 108 than the second span 416 and subsequent spans 418-422.

[0064] In one example, the ratio between the last span and the first span in spans 414-424 is between approximately 2.0 and approximately 2.3, such as between approximately 2.05 and approximately 2.25. In another example, the ratio is between approximately 2.1 and approximately 2.15. In yet another example, with point 403 closest to base 204 and point 413 closest to tip 222, span 414 is between approximately 1.0 mm and approximately 1.5 mm, and span 422 is between approximately 2.0 mm and approximately 3.45 mm. In one example, span 416 is approximately 1.125 times the length of span 414. Accordingly, span gradient 424 is greater than zero (0). In one example, span gradient 424 is defined as: 0.005 mm < {(P n+2 -P n+1 )-(P n+1 -P n )}>0.125mm, where n is a given point, and n+1 is the nearest neighbor point, with point n being closer to base 204. In another example, the span gradient 424 is constrained to: 0.005mm<{(P n+2 -P n+1 )-(P n+1 -P n )}>0.166mm. For example, P n It can be a span of 414, P n+1 It is a span of 416, P n+2 The span is 418, and the initial point can be point 403.

[0065] In yet another example, the gradient span 424 can be incremented such that, given a span P n= P0 + (n*s), where n is the number of given spans in a given span group, P0 is the first span in the span sequence, and s is the step size. The step size can be between approximately 0.005 mm and approximately 0.166 mm, such as approximately 0.0156 mm, 0.020 mm, or approximately 0.125 mm. In yet another example, the step size can be equal to the initial span P0. In this example, P0 can be equal to the span 414, and P... n It can be any of the spans 414-422. As mentioned above, the span gradient 424 increases in the direction of gravity. Advantageously, the filament 248 with the span gradient 424 can have a duty cycle 20 percent longer than that of a conventional filament, thereby extending the service life of lamps 200a and 200b.

[0066] Figure 4B Is Figures 2A-2B and Figure 3A A portion of the filament 248 used in the exemplary lamps 200a or 200b is shown. Only a segment 404 of the filament 248 is illustrated herein. It should be understood that any discussion of segment 404 necessarily includes the filament 248, and any discussion of the filament 248 is also based on segment 404. As shown, segment 404 of the filament is made of wire 408, which is positioned at a generally constant radial distance 412 from the axis of the central axis 401. However, it should be understood that the constant radial distance 412 can be increased or decreased without departing from the disclosure herein. The central axis 401 is generally helical, such that as segment 404 extends to the length 304 of the filament 248, a wound segment 252 of the filament 248 is formed by wire 408 (in... Figure 2A , Figure 2B and Figure 3A (as shown in the image). Figure 4B The span gradient 424 of filament 248 is approximately zero (0). Accordingly, the span gradient 414-422 ( Figure 4B (not shown in the image) are roughly equal, therefore there is roughly no gradient.

[0067] exist Figures 5-7The filaments described herein can be manufactured using additive manufacturing or other suitable techniques such as extrusion. In one example, the filaments are manufactured using 3D printing technology. The cross-section discussed below reduces the shear between the grain boundaries of filament 500-700. Reducing the shear between the grain boundaries of filament 500-700 increases the lifespan of filament 500-700, thereby increasing the lifespan of lamp 200. By increasing the lifespan of lamp 200a or lamp 200b, downtime for routine maintenance and processing chamber 100 can also be reduced, thereby increasing the total output of processing chamber 100. It should be understood that the discussion of certain properties of polygons such as rhombuses, hexagons, and pentagons discussed herein is not exhaustive. The discussion of these geometries does not exclude properties not explicitly expressed.

[0068] Figure 5 An exemplary filament 500 along with Figure 4A The diagram shows a cross-sectional view of the planes intersecting the central axis 401. The filament 500 is made of wire 508, which is positioned at a radial distance 412 from the central axis 401. The cross-section 504 of wire 508 is generally diamond-shaped or elongated rhomboid, and has four sides 506. The cross-section 504 of the filament 500 has two adjacent sides 506 of equal length. The opposite sides 506 of the cross-section 504 can be generally parallel. An angle 512 is formed between the two adjacent sides 506. Another angle opposite to angle 512 is generally equal in size. Angle 512 can be approximately 90 degrees. However, angle 512 is not limited to 90 degrees and can have any size, as long as the sum of each interior angle is 360 degrees.

[0069] Figure 6 Another exemplary filament 600 along with Figure 4A The diagram shows a cross-sectional view of the planes intersecting the central axis 401. The filament 600 is made of wire 608, which is positioned at a constant radial distance 412 from the central axis 401. The cross-section 604 of wire 608 is generally hexagonal, having six sides 606. An angle 612 is formed between two adjacent sides 606. In this example, the angle is 120 degrees, but angle 612 is not limited to this. Angle 612 can be any angle such that the sum of all interior angles is 720 degrees.

[0070] Figure 7 An exemplary filament 700 along with Figure 4AThe diagram shows a cross-sectional view of the planes intersecting the central axis 401. The filament 700 is made of wire 708, which is a constant radial distance 412 from the central axis 401. The cross-section 704 of wire 708 is generally pentagonal, having five sides 706. An angle 712 is formed between two adjacent sides 706. This angle can be approximately 108 degrees. The angle 712 is not limited to this angle and can have any size, as long as the sum of each interior angle is 540 degrees.

[0071] Figure 8 It is suitable for fixing Figure 2A , Figure 2B and Figure 3A The diagram shows a plan view of an exemplary lamp holding structure 800 for the lamp 200. The lamp holding structure 800 has a support structure 832, a frame 804, and a base 808. The base 204 of the lamp 200 can be held between the frame 804 and the base 808 of the lamp holding structure 800. According to the apparatus and methods disclosed herein, the frame 804 and the base 808 are configured to secure the lamp 200 during dimensional measurements. The frame 804 and the base 808 have substantially equal dimensions, with a top surface 820 at either end of the base 808. A recessed surface 816 is disposed at the center of the base 808. An angled surface 824 is disposed between the top surface 820 and the recessed surface 816. The recessed surface 816 is substantially parallel to the top surface 820. A wall 828 is substantially perpendicular to the top surface 820. The angled surface 824 is connected to the top surface 820 via the wall 828. The width 826 of the base 808, measured in a direction parallel to the top surface 820, is greater than the height 822 of the base 808. As shown, the height 822 is measured between the support structure 832 and the top surface 820 in a direction generally perpendicular to the top surface 820.

[0072] A through-hole 812 extends through the top surface 820 of the base 808 and is aligned with another through-hole 812 in the top surface 820 of the frame 804. In some examples, the lamp retaining structure 800 is supplemented with a support structure 832. A through-hole 840 in the support structure 832 is substantially aligned with the through-holes 812 in the frame 804 and the base 808. A fastener 836 passes through the through-hole 840 in the support structure 832. The fastener 836 passes through the through-holes 812 in the frame 804 and the base 808. In one configuration of the lamp retaining structure 800, the fastener 836 passes only through the through-holes 812 in the frame 804 and the base 808. The fastener 836 is configured to secure the frame 804 to the base 808. When the support structure 832 is used, the fastener 836 secures the frame 804, the base 808, and the support structure 832 to each other. Fastener 836 can be a bolt, pin, welding rod, threaded screw, or any other suitable connecting device. It should be understood that the lamp retaining structure 800 can have more than one through hole similar to through hole 812 and fasteners for balancing the clamping forces on the lamp. The lamp retaining structure 800 can be made of any one or a combination of plastic, metal (such as aluminum and steel), quartz, or wood.

[0073] Figure 9 It is used for support Figure 8 The image shows a top plan view of an exemplary support structure 832 of the lamp holder structure 800. The support structure 832 has a first leg 904 and a second leg 906 connected by a connecting member 908. The first leg 904 and the second leg 906 are generally parallel to each other. The connecting member 908 is generally perpendicular to the first leg 904 and the second leg 906.

[0074] Each of the first leg 904 and the second leg 906 has a length 922 that is longer than the width 924. A connecting member 908 extends the distance 928 between the first leg 904 and the second leg 906. The connecting member 908 has a thickness 930. The total width 926 of the support structure 832 is equal to the width of the first leg 904, the width 924 of the second leg 906, and the distance 928 between the first leg 904 and the second leg 906.

[0075] Figure 10 It is used for measurement Figures 2A-2B and Figure 3A The image processing device 1000, showing the dimensions of the lamp 200, is illustrated in plan view. The lamp holding structure 800 can be used to position the lamp within the field of view of the camera and lens. Positioning the lamp within the field of view of the camera and lens enables the capture of an image of the lamp. The controller 1016 processes the actual measurement results of the lamp based on the image captured by the camera and lens.

[0076] Image processing device 1000 includes a camera 1001 coupled to a controller 1016. The controller 1016 includes a processor 1004, a memory 1008, and support circuitry 1012 coupled to each other. The controller 1016 may be part of the camera 1001, or, in an alternative example, may be part of a remote device (not shown) that receives images from the camera 1001. The camera 1001 has at least one lens 1002 configured to acquire images from a lamp 200, as disclosed herein.

[0077] The image processing device 1000 includes an input control unit, such as a power supply, clock circuit, cache, and input / output (I / O) circuitry, which is coupled to various components of the image processing device 1000 to assist in the control of said components. Optionally, the image processing device 1000 may include a display unit (not shown). The processor 1004 may be any form of general-purpose microprocessor or general-purpose central processing unit (CPU), each of which can be used in industrial environments, such as a programmable logic controller (PLC).

[0078] Memory 1008 is non-transitory and may be one or more readily available memories, such as random access memory (RAM), read-only memory (ROM), or any other form of digital storage, local or remote. Memory 1008 contains instructions that, when executed by processor 1004, contribute to the operation of image processing device 1000. The instructions in memory 1008 are in the form of a program product (such as a program) that implements the methods of this disclosure. The program code of the program product may conform to any of several different programming languages. The illustrative computer-readable storage medium includes (but is not limited to): (1) a non-writable storage medium (e.g., a read-only memory device within a computer, such as a CD-ROM disc readable by a CD-ROM drive), flash memory, ROM chip, or any type of solid-state non-volatile semiconductor memory) on which information is permanently stored; and (2) a writable storage medium (e.g., a floppy disk or hard disk drive within a floppy disk drive, or any type of solid-state random access semiconductor memory) on which changeable information is stored. Such a computer-readable storage medium, when carrying computer-readable instructions instructing the function of the methods described herein, is an example of the content of this disclosure.

[0079] In one example, this disclosure may be implemented as a program product stored on a computer-readable storage medium (e.g., 1008) for use with a computer system (not shown). The program product defines the functionality of the disclosure described herein. The program / instructions include image processing algorithms configured to detect edges in an image of a lamp 200 (shown in Figures 2-3) acquired through lens 1002. These algorithms include, but are not limited to, Canny edge detection, Gaussian filtering, gradient magnitude filtering, Hough transform, hysteresis thresholding, Roberts operator, Sobel operator, Pewitt operator, Laplacian operator, first and second derivatives, and other edge detection techniques using any one or a combination of these techniques, including those not explicitly mentioned above.

[0080] Figure 11 It is to utilize Figure 10 A flowchart of an exemplary method 1100 for inspecting a lamp using an image processing apparatus is provided. Method 1100 may be stored in memory 1008. At block 1104, an image of lamp 200 is acquired. At block 1108, the deviation between the actual measurement result and the ideal measurement result of lamp 200 is determined. The actual measurement result can be acquired by the image processing apparatus 1000 disclosed above. In another example, image processing apparatus 1000 may receive the actual measurement result from a measuring device (not shown). The ideal measurement result may be stored in memory 1008 and compared with the actual measurement result by a program installed in memory 1008 of controller 1016. Measurements include, but are not limited to, the following parameters: outer diameter of filament 264, first deviation angle 268 of filament 248, first length 272 of lamp 200, second length 276 of lamp 200, length 304 of filament 248, vertical distance 308 of filament 248, and second deviation angle 312. It should be understood that additional measurements, including those disclosed above, may be determined. Figure 2C and Figure 3B As shown, method 1100 generates a window, either a first coil frame 320 or a second coil frame 370, to determine the mentioned parameters. It should also be understood that method 1100 includes methods for making... Figure 2C and Figure 3BEach feature in the diagram represents the process achievable. At box 1112, lamp 200 is rejected if the deviation exceeds a threshold. In other words, if any of the above parameters deviates from the ideal measurement result by more than the allowed threshold, lamp 200 can be marked or identified by the image processing device 1000 as rejected. The parameter is the measured (i.e., determined) size or dimensions of lamp 200. If the deviation of lamp 200 is less than or equal to the threshold, lamp 200 is marked as qualified at box 1116 and can be included in the qualified lamp list. At box 1120, images of different lamps 200 are acquired, and at step 1124, method 1100 returns to box 1108. Boxes 1108-1124 are repeated until no new images are acquired, or method 1100 is interrupted by the user. Lamps 200 that are not rejected (i.e. qualified) can be separated from lamps 200 that are rejected (i.e. unqualified).

[0081] The above discloses a method and apparatus for measuring and testing the lamp dimensions of 3D printed filaments. While the foregoing is directed to specific examples, other examples may be designed without departing from the basic scope of the foregoing, the scope of which is defined by the claims.

Claims

1. A lamp comprising: A light bulb filled with gas; and A filament disposed within the light bulb, the filament comprising a plurality of coils, the plurality of coils comprising: The first coil with the first point, The second coil with the second point, and A third coil having a third point, wherein the first point, the second point, and the third point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point The second span between the third point and the second point, the second point being 360 degrees away from the first point, and the third point being 360 degrees away from the second point, and The difference between the size of the first span and the size of the second span, wherein the second span is greater than the first span.

2. The lamp of claim 1, wherein the plurality of coils further comprises: A fourth coil having a fourth point, wherein a third span is between the third point and the fourth point, and the fourth point is 360 degrees away from the third point.

3. The lamp of claim 2, wherein the plurality of coils further comprises: A fifth coil having a fifth point, wherein a fourth span is between the fourth point and the fifth point, and the fifth point is 360 degrees away from the fourth point.

4. The lamp of claim 3, wherein the span gradient is further defined by the difference between the size of the second span and the size of the third span and the difference between the size of the third span and the size of the fourth span, wherein the third span is greater than the second span and the fourth span is greater than the third span.

5. The lamp of claim 1, further comprising: Electrodes electrically coupled to the filament; and A pin pair electrically coupled to the electrode, the pin pair being configured to transfer energy to the filament.

6. The lamp of claim 1, wherein the lamp has a length between about 120 nm and about 135 nm.

7. The lamp of claim 2, wherein the span gradient increases between about 2 percent and about 6 percent between consecutive spans including the first span, the second span and the third span.

8. The lamp of claim 1, wherein the span gradient increases with a continuous span, the continuous span being determined by P. n =P0+(n*s) is a constraint, where n is the number of given spans in a given span group, P0 is the first span, and s is the step size, which is a positive real number.

9. The lamp of claim 1, wherein the filament has a polygonal cross-section.

10. A processing chamber, comprising: A lamp, configured to provide heat to the interior volume of the processing chamber, the lamp comprising: A light bulb filled with gas; and A filament disposed within the light bulb, the filament comprising a plurality of coils, the plurality of coils comprising: The first coil with the first point, The second coil with the second point, and A third coil having a third point, wherein the first point, the second point, and the third point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point The second span between the third point and the second point, the second point being 360 degrees away from the first point, and the third point being 360 degrees away from the second point, and The difference between the size of the first span and the size of the second span, wherein the second span is greater than the first span.

11. The processing chamber of claim 10, wherein the plurality of coils further comprises: A fourth coil having a fourth point, a third span between the third point and the fourth point, and the fourth point being 360 degrees away from the third point.

12. The processing chamber of claim 11, wherein the plurality of coils further comprises: A fifth coil having a fifth point, a fourth span between the fourth point and the fifth point, and the fifth point being 360 degrees away from the fourth point.

13. The processing chamber of claim 12, wherein the span gradient is further defined by the difference between the size of the second span and the size of the third span and the difference between the size of the third span and the size of the fourth span, wherein the third span is greater than the second span and the fourth span is greater than the third span.

14. The processing chamber of claim 10, further comprising: Electrodes electrically coupled to the filament; and A pin pair electrically coupled to the electrode, the pin pair being configured to transfer energy to the filament.

15. The processing chamber of claim 11, wherein the span gradient increases between about 2 percent and about 6 percent between consecutive spans comprising the first span, the second span, and the third span.

16. A method for manufacturing a filament for a lamp, the method comprising: A filament is formed for placement within a gas-filled dome, the filament comprising a plurality of coils, the plurality of coils comprising: The first coil with the first point, The second coil with the second point, and A third coil having a third point, wherein the first point, the second point, and the third point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point The second span between the third point and the second point, the second point being 360 degrees away from the first point, and the third point being 360 degrees away from the second point, and The difference between the size of the first span and the size of the second span, wherein the second span is greater than the first span.

17. The method of claim 16, wherein forming the filament comprises one or more of additive manufacturing, extrusion, or three-dimensional (3D) printing.

18. A method for manufacturing a filament for a lamp, the method comprising: A filament is formed for placement in a gas-filled light bulb, the filament comprising multiple coils and having a polygonal cross-section.

19. The method of claim 18, wherein the cross-section is rhomboid, hexagonal, or pentagonal.

20. The method of claim 18, wherein the plurality of coils comprises: The first coil with the first point, The second coil with the second point, and A third coil having a third point, wherein the first point, the second point, and the third point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point The second span between the third point and the second point, the second point being 360 degrees away from the first point, and the third point being 360 degrees away from the second point, and The difference between the size of the first span and the size of the second span, wherein the second span is greater than the first span.

21. The method of claim 18, wherein forming the filament comprises one or more of additive manufacturing, extrusion, or three-dimensional (3D) printing.

22. A lamp comprising: A light bulb filled with gas; and A filament disposed within the light bulb, the filament comprising a plurality of coils, the plurality of coils comprising: The first coil with the first point, The second coil with the second point, The third coil with the third point, and A fourth coil having a fourth point, wherein the first point, the second point, the third point, and the fourth point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point The second span between the third point and the second point is greater than the first span; the second point is 360 degrees away from the first point; and the third point is 360 degrees away from the second point. The third span between the third point and the fourth point, and the fourth point being 360 degrees away from the third point, and The difference between the size of the second span and the size of the third span, wherein the third span is greater than the second span.

23. The lamp of claim 22, wherein the plurality of coils further comprises: A fifth coil having a fifth point, wherein a fourth span is between the fourth point and the fifth point, and the fifth point is 360 degrees away from the fourth point.

24. The lamp of claim 23, wherein the span gradient is further defined by the difference between the magnitude of the third span and the magnitude of the fourth span, wherein the fourth span is greater than the third span.

25. A lamp comprising: A light bulb filled with gas; and A filament disposed within the light bulb, the filament comprising a plurality of coils, the plurality of coils comprising: The first coil with the first point, The second coil with the second point, and A third coil having a third point, wherein the first point, the second point, and the third point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point, and The second span between the third point and the second point, wherein the second span is greater than the first span, the second point is 360 degrees away from the first point, and the third point is 360 degrees away from the second point. The span gradient increases between approximately 2% and approximately 6% between consecutive spans including the first span and the second span.

26. The lamp of claim 25, wherein the plurality of coils further comprises: A fourth coil having a fourth point, wherein a third span between the third point and the fourth point is greater than a second span, and the fourth point is 360 degrees away from the third point.

27. The lamp of claim 26, wherein the continuous span further includes the third span.

28. A lamp comprising: A light bulb filled with gas; and A filament disposed within the light bulb, the filament comprising a plurality of coils, the plurality of coils comprising: The first coil with the first point, The second coil with the second point, and A third coil having a third point, wherein the first point, the second point, and the third point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point, and The second span between the third point and the second point, wherein the second span is greater than the first span, the second point is 360 degrees away from the first point, and the third point is 360 degrees away from the second point. The span gradient increases with a continuous span, the continuous span being P n =P0+(n*s) is a constraint, where n is the number of given spans in a given span group, P0 is the first span, and s is the step size, which is a positive real number.

29. A processing chamber, comprising: A lamp, configured to provide heat to the interior volume of the processing chamber, the lamp comprising: A light bulb filled with gas; and A filament disposed within the light bulb, the filament comprising a plurality of coils, the plurality of coils comprising: The first coil with the first point, The second coil with the second point, The third coil with the third point, and A fourth coil having a fourth point, wherein the first point, the second point, the third point, and the fourth point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point The second span between the third point and the second point is greater than the first span; the second point is 360 degrees away from the first point; and the third point is 360 degrees away from the second point. The third span between the third point and the fourth point, and the fourth point being 360 degrees away from the third point, and The difference between the size of the second span and the size of the third span, wherein the third span is greater than the second span.

30. The lamp of claim 29, wherein the plurality of coils further comprises: A fifth coil having a fifth point, a fourth span between the fourth point and the fifth point, and the fifth point being 360 degrees away from the fourth point.

31. The lamp of claim 30, wherein the span gradient is further defined by the difference between the magnitude of the third span and the magnitude of the fourth span, wherein the fourth span is greater than the third span.

32. A processing chamber, comprising: A lamp, configured to provide heat to the interior volume of the processing chamber, the lamp comprising: A light bulb filled with gas; and A filament disposed within the light bulb, the filament comprising a plurality of coils, the plurality of coils comprising: The first coil with the first point, The second coil with the second point, and A third coil having a third point, wherein the first point, the second point, and the third point form a span gradient, the span gradient being defined by the following: The first span between the second point and the first point The second span between the third point and the second point, wherein the second span is greater than the first span, the second point is 360 degrees away from the first point, and the third point is 360 degrees away from the second point. The span gradient increases between approximately 2% and approximately 6% between consecutive spans including the first span and the second span.

33. The processing chamber of claim 32, wherein the plurality of coils further comprises: A fourth coil having a fourth point, a third span between the third point and the fourth point being greater than the second span, and the fourth point being 360 degrees away from the third point.

34. The processing chamber of claim 33, wherein the continuous span further includes the third span.

Images