Treatment system for residual copper in copper foil production

Abstract

The invention relates to the field of surface precision purification, and discloses a treatment system for residual copper in copper foil production, which comprises a pollutant on-line preliminary screening and positioning module, an acoustic levitation excitation module, a laminar flow vortex capture module and a control unit. During working, the primary screening module generates a pollutant probability map by means of hyperspectral imaging; the acoustic levitation excitation module constructs a focusing standing wave sound field at a target position according to the map information, the pollutants are stripped and suspended in a non-contact mode, secondary discrimination is conducted by analyzing the acoustic resonance spectrum of the pollutants, and after confirmation, the sound field phase gradient is applied to actively eject the pollutants; and the ejected pollutants are efficiently captured by stable vortex airflow generated by the laminar flow vortex capturing module. And the control unit performs closed-loop feedback control on the capture flux to realize self-adaptive adjustment of the system.

Description

Technical Field

[0001] This invention relates to the field of precision surface cleaning technology, specifically a system for treating residual copper in copper foil production. Background Technology

[0002] In advanced manufacturing, especially in the production of high-precision electronic components such as lithium-ion batteries and printed circuit boards (PCBs), the surface cleanliness of copper foil, a key basic material, plays a decisive role in the performance, reliability, and safety of the final product. During production, slitting, and transportation, micron-sized particulate contaminants easily adhere to the surface of copper foil, such as residual tiny copper shavings, external dust, metal or non-metal particles from equipment wear, and fibers. Once these micron-sized contaminants remain on the copper foil surface, they can puncture the separator during subsequent coating, lamination, or winding processes, causing internal short circuits in the battery and posing serious safety hazards; or they can create defects such as open circuits and short circuits during PCB etching, leading to a decrease in product yield.

[0003] Therefore, efficient and thorough purification of copper foil surfaces is one of the core processes for ensuring product quality. However, accurately and non-destructively removing these micron-sized contaminants presents a significant challenge. On the one hand, copper foil itself is extremely thin and soft, making it highly susceptible to irreversible physical damage such as scratches, wrinkles, or deformation during cleaning. On the other hand, when the particle size decreases to the micron level, the adhesion forces, such as van der Waals forces and electrostatic adsorption forces, between the particles and the copper foil surface increase dramatically, far exceeding the particles' own weight, making them difficult to remove easily.

[0004] Existing cleaning technologies struggle to perfectly balance the two core requirements of "removal efficiency" and "non-destructive substrate treatment." Traditional contact cleaning methods, such as high-density brush cleaning or scraping, while effective for handling large particles, inevitably scratch the delicate copper foil surface due to physical contact, and may even generate more particles due to friction, causing secondary pollution. Solvent-based wet cleaning is not only complex, requiring additional drying steps and consuming significant energy, but also potentially leads to environmental problems such as chemical residues and wastewater disposal. Furthermore, liquid immersion can cause deformation of ultra-thin copper foil.

[0005] To avoid physical damage, the industry has turned to non-contact cleaning solutions, with compressed air purging or vacuum adsorption being the most common. However, the "force" exerted by these pneumatic methods is difficult to be precise. If the air pressure is too low, the resulting airflow energy is insufficient to overcome the strong adhesion of micron-sized particles; if the air pressure is significantly increased to achieve a cleaning effect, the powerful airflow will impact the ultra-thin copper foil, causing vibration and deformation, which also poses a risk of damage. More importantly, this "wide-area" purging method lacks selectivity and targeting, easily blowing contaminants from one place to another, causing secondary pollution, and its capture efficiency is difficult to guarantee. Some high-energy methods, such as laser ablation, can precisely locate contaminants, but their principle is to use high heat to vaporize contaminants, which can easily cause irreversible thermal damage to the heat-sensitive copper foil substrate, altering its surface properties. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this invention provides a system for treating residual copper in copper foil production. This system solves the problem that existing technologies cannot simultaneously achieve precise targeting, efficient removal, and non-damage to the substrate when cleaning micron-level contaminants from the surface of ultra-thin flexible substrates such as copper foil.

[0007] To achieve the above objectives, the present invention provides the following technical solution: The first aspect of this invention provides a system for treating residual copper in copper foil production, the system comprising: An online pollutant screening and location module is used to scan the surface of copper foil in operation and generate a pollutant probability map that identifies the location of potential pollutants. An acoustic levitation excitation module, connected to the output of the online pollutant screening and positioning module, is configured to construct a standing wave sound field at the location of the potential pollutant based on the pollutant probability map, so as to detach the potential pollutant from the copper foil surface and levitate it through acoustic radiation force; and A laminar vortex capture module is disposed downstream of the acoustic levitation excitation module, which is used to construct a laminar vortex field to capture and collect the potential contaminants suspended by the acoustic levitation excitation module.

[0008] In one technical solution, the online pollutant screening and localization module includes a hyperspectral scattering imaging device. The device acquires spectral data from the surface of the copper foil and generates a pollutant probability map containing the location and size information of the potential pollutants through data analysis. Correspondingly, the acoustic levitation excitation module determines the focusing region and initial energy of the constructed standing wave sound field based on the received location and size information.

[0009] In one technical solution, the acoustic levitation excitation module is further configured to perform secondary discrimination. Specifically, it determines the physical properties of the potential pollutants by analyzing the acoustic resonance spectrum generated by the suspended potential pollutants on the standing wave sound field, thereby distinguishing between high-density metal particles and low-density non-metal particles.

[0010] In one technical solution, the operating logic of the acoustic levitation excitation module is associated with the result of the secondary screening. It is configured to only actively eject the particle into the laminar vortex capture module by changing the horizontal phase gradient of the standing wave sound field to generate a transverse acoustic radiation force when the result of the secondary screening confirms that the potential contaminant is a high-density metal particle.

[0011] In one technical solution, the acoustic levitation excitation module includes an ultrasonic phased array transducer disposed above or below the copper foil. The system also includes a control unit that adjusts the emission phase or amplitude of each transducer unit in the ultrasonic phased array transducer in real time according to the potential contaminant locations identified in the contaminant probability map, in order to focus acoustic energy at the identified locations.

[0012] In one technical solution, the laminar vortex capture module includes an annular air duct and an array of miniature nozzles disposed within the air duct. The array of miniature nozzles is used to blow out sheath gas, which converges on the surface of the copper foil to form a laminar vortex field with a stable vortex core, for stably transporting the captured particles.

[0013] In one technical solution, the system further includes a closed-loop feedback control mechanism. This mechanism includes a flow sensor located downstream of the laminar vortex capture module and a control unit. The flow sensor is used to monitor the actual capture flux of the captured pollutants. The control unit is configured to dynamically adjust the operating parameters of the laminar vortex capture module based on the deviation between the actual capture flux and a predicted flux, in order to reconstruct the morphology of the laminar vortex field.

[0014] In one technical solution, the control unit is further configured to calculate the predicted flux based on the pollutant probability map generated by the online pollutant screening and positioning module. This structure achieves closed-loop feedback between the detection results at the system front end and the working status of the back-end capture module. The adjustment method involves changing the jet pressure or jet angle of the micro-nozzle in the laminar vortex capture module to minimize the deviation.

[0015] In one technical solution, the system is configured to perform a complete workflow including screening and conditional processing. Specifically, when the secondary screening confirms that the potential pollutant is a low-density non-metallic particle, the acoustic suspension excitation module stops applying energy to the particle, and the laminar vortex capture module does not capture it, thereby achieving filtration of non-target objects and reducing system energy consumption.

[0016] This invention provides a system for treating residual copper during copper foil production. It offers the following advantages: 1. This invention employs an acoustic levitation excitation module to construct a standing wave sound field on the copper foil surface, utilizing acoustic radiation force to non-contactly peel off and suspend potential contaminants. This method fundamentally avoids the physical damage to the copper foil surface caused by traditional mechanical scraping or high-pressure airflow. Simultaneously, combined with a contaminant probability map generated by an online contaminant screening and positioning module, the system can precisely focus acoustic energy on the location of contaminants, achieving targeted removal and avoiding indiscriminate treatment of the entire copper foil surface, significantly improving the accuracy of the treatment.

[0017] 2. This invention integrates a secondary screening function into the acoustic levitation excitation module, enabling the determination of the physical properties of suspended potential pollutants. Specifically, the system analyzes the acoustic resonance spectrum to distinguish between high-density metal particles and low-density non-metal particles, and only performs the subsequent active ejection and capture process on the former. This conditional processing logic based on physical properties allows the system to focus on removing truly harmful residual copper, avoiding energy consumption on harmless dust fibers, thereby improving the overall operating efficiency of the system.

[0018] 3. This invention captures particles by constructing a laminar vortex field and introduces a closed-loop feedback adjustment mechanism based on the actual capture flux. This mechanism dynamically reconstructs the vortex field morphology to adapt to changes in operating conditions by monitoring the capture effect in real time and comparing it with the predicted value given by the front-end detection module. This design ensures that the system maintains efficient and stable capture performance regardless of changes in copper foil linear velocity or contamination load, effectively preventing particle escape and secondary contamination within the equipment. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall system structure of the present invention; Figure 2 This is a schematic diagram of the pollutant probability map generation process of the present invention; Figure 3 This is a schematic diagram illustrating the acoustic levitation and targeted ejection principle of the present invention; Figure 4 This is a schematic cross-sectional view of the laminar vortex capture module of the present invention; Figure 5 This is a block diagram of the closed-loop feedback control logic of the present invention; Figure 6 This is a schematic diagram comparing the acoustic resonance spectra of the present invention. Detailed Implementation

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] See attached document Figure 1 , Figure 1 This is a schematic diagram of a system for treating residual copper in copper foil production according to an embodiment of the present invention. Along the running direction of the copper foil C, the system sequentially includes an online initial screening and positioning module for contaminants, an acoustic suspension excitation module, and a laminar vortex capture module. The system also includes a control unit electrically connected to each module for coordinating and controlling the operation of the entire system.

[0022] During system operation, the online pollutant screening and positioning module continuously scans the surface of the copper foil C moving along a predetermined path and generates a real-time updated pollutant probability map that identifies the location and size of potential pollutants. This pollutant probability map data is then sent to the control unit.

[0023] Based on the received data, the control unit sends a working command to the acoustic levitation excitation module. Following this command, the acoustic levitation excitation module constructs a high-intensity focused standing wave sound field above and / or below the location of potential pollutants identified on the pollutant probability map.

[0024] In this acoustic field, potential contaminants will be subjected to an acoustic radiation force perpendicular to the surface of copper foil C. The acoustic radiation force The size can be represented by the following formula:

[0025] ; in: The acoustic radiation force acting on the particles, The volume of the particle; The wave number of the sound wave; The average energy density of the sound field. The acoustic contrast factor, whose value depends on the density of the particles and the medium, as well as the sound velocity; Let be the axial coordinate of the particle perpendicular to the surface C of the copper foil.

[0026] When sound radiation force When the peak value exceeds the total adhesion force between the particles and the surface of copper foil C, the potential contaminant is peeled off from the surface of copper foil C and stably suspended at the pressure node of the standing wave acoustic field.

[0027] After potential pollutants are suspended, the acoustic suspension excitation module performs secondary screening to determine their physical properties. For particles identified as target residual copper by the secondary screening, the acoustic suspension-float excitation module applies a lateral thrust to actively eject them downstream.

[0028] Next, the laminar vortex capture module constructs a laminar vortex field to capture and collect the ejected target copper residue. Simultaneously, the system monitors the capture effect using sensors located downstream of the laminar vortex capture module and feeds the monitoring data back to the control unit, enabling closed-loop adaptive adjustment of the laminar vortex capture module's operating parameters. See attached document Figure 2 , Figure 2 This is a schematic diagram of the process by which the online pollutant screening and location module generates a pollutant probability map according to an embodiment of the present invention.

[0029] In one specific embodiment, the online pollutant screening and localization module includes a linear light source and a hyperspectral scattering imaging device. The linear light source, such as a halogen lamp or LED array, is configured to project a beam of illumination light uniformly distributed laterally onto the surface of the operating copper foil. The hyperspectral scattering imaging device, such as a pushbroom hyperspectral camera, is configured to acquire the reflectance spectral information of the copper foil surface under this illumination light line by line. The hyperspectral scattering imaging device operates in a spectral range covering, for example, the visible to near-infrared band from 400 nm to 1000 nm, and has preset spectral and spatial resolutions.

[0030] During system operation, as the copper foil moves, the hyperspectral scattering imaging device acquires data line by line, forming a three-dimensional hyperspectral data cube. The hyperspectral data cube contains two spatial dimensions (x, y coordinates) and one spectral dimension (wavelength). This data cube is transmitted to the control unit for processing in real time.

[0031] The control unit internally stores a standard material spectral library, which pre-loads spectral characteristic curves of the target residual copper and various common non-target contaminants (such as dust, fibers, and oil stains).

[0032] After receiving the hyperspectral data cube, the control unit performs a spectral angle matching (SAM) algorithm on the spectral vector of each pixel (x, y). This algorithm compares the spectral vector of the pixel to be measured with each standard spectral characteristic curve in the standard material spectral library and calculates the cosine value of the spectral angle between them.

[0033] The cosine value of the spectral angle can be calculated using the following formula.

[0034] ; in: The spectral angle between the spectral vector to be measured and the reference spectral vector; Let be the spectral vector of the pixel to be measured, and its elements For this pixel point at the th Reflectance values ​​for each spectral band; The reference spectral vector is retrieved from the spectral library, and its elements are... For reference material, in the section Reflectance values ​​for each spectral band; This represents the total number of spectral bands.

[0035] The closer the cosine value of the spectral angle is to 1, the higher the match between the spectrum of that pixel and the standard spectrum. The control unit converts this match value into a probability value.

[0036] By performing the above calculations on all pixels across the entire scanned area, the system ultimately generates a two-dimensional contaminant probability map. Each pixel value in this map represents the probability of a specific type of contaminant being present at that location, and by performing cluster analysis on adjacent high-probability pixels, the location and size information of the contaminants can be determined. This map is then used to guide the work of downstream modules.

[0037] See attached document Figure 3 , Figure 3 This is a schematic diagram illustrating the working principle of an acoustic levitation excitation module according to an embodiment of the present invention.

[0038] In one specific embodiment, the acoustic levitation excitation module includes one or more ultrasonic phased array transducers disposed on, below, or on both sides of a copper foil. Each ultrasonic phased array transducer consists of a two-dimensional array of piezoelectric transducer units. The module operates in a frequency range, for example, between 40 kHz and 100 kHz.

[0039] Once the control unit receives a pollutant probability map containing pollutant location and size information from the online pollutant screening and positioning module, it calculates an optimal set of phase and amplitude parameters for each identified pollutant and sends these parameters to each transducer unit in the ultrasonic phased array transducer. Each transducer unit emits ultrasonic waves with specific phase and amplitude based on the received parameters. By precisely controlling these ultrasonic waves, constructive interference occurs at the target location of the pollutant, thereby constructing a focused standing wave sound field with extremely high acoustic energy density in space, while the acoustic energy in other areas remains at a low level due to destructive interference. This process ensures that energy is precisely applied to the target pollutant, achieving targeted particle stripping.

[0040] After the pollutants are stripped away by the aforementioned acoustic radiation force and suspended at the pressure nodes of the acoustic field, the acoustic suspension excitation module enters the secondary screening process. The suspended particles, acting as acoustic resonators, generate subtle perturbations to the surrounding standing wave acoustic field. Sensors within the module (or the multiplexed transducer unit itself) acquire these perturbation signals. The control unit performs a Fast Fourier Transform (FFT) on the acquired signals to obtain the acoustic resonance spectrum of the particle.

[0041] The control unit has a pre-set database containing the correspondence between different material physical properties (such as density, sound velocity, and Young's modulus) and acoustic resonance spectrum characteristics (such as principal resonant frequency and quality factor Q). By comparing the measured acoustic resonance spectrum characteristics with this database, the control unit can determine whether the suspended particle is a high-density metal particle or a low-density non-metal particle.

[0042] After secondary screening, the system's processing logic is conditional. Active ejection is only executed when the control unit confirms the particle is the target residual copper (i.e., a high-density metal particle). This is achieved by the control unit instantaneously and dynamically applying a horizontal phase gradient to the signals driving each transducer unit. This phase gradient disrupts the symmetry of the original standing wave acoustic field, thereby generating a net acoustic radiation force in the horizontal direction. This force, acting as a precise lateral thrust, actively ejects the suspended particle along a predetermined trajectory into the capture area of ​​the downstream laminar vortex capture module.

[0043] See attached document Figure 4 , Figure 4 This is a schematic diagram of the structure of a laminar vortex capture module according to an embodiment of the present invention.

[0044] In one specific embodiment, the laminar vortex capture module includes an annular duct and an array of miniature nozzles disposed within the duct. The cross-section of the annular duct can be circular or elliptical, and its inner wall surface is smooth to reduce aerodynamic drag. The array of miniature nozzles is arranged uniformly or non-uniformly along the inner circumference of the annular duct.

[0045] Each miniature nozzle's nozzle direction is set to form a preset angle with the tangent direction of the annular air duct's inner wall. All miniature nozzles are connected to a precisely adjustable air source via piping.

[0046] During system operation, when the acoustic levitation excitation module ejects the target copper residue to the inlet region of the laminar vortex capture module, the control unit instructs the air source to supply sheath gas at a specific pressure to the micro-nozzle array. The sheath gas is then ejected at high speed from each micro-nozzle.

[0047] Due to the inclined arrangement of the miniature nozzles, the multiple streams of air ejected do not collide directly within the duct. Instead, they move tangentially along the inner wall of the duct and interact with each other, converging according to fluid dynamics principles to form a laminar vortex field with a stable vortex core and rotating overall. The central region of this vortex field is a low-pressure area, while the outer region is a high-pressure area.

[0048] When the ejected target copper residue enters the laminar vortex field, it is subjected to the combined effects of aerodynamic drag and pressure gradient forces generated by the vortex field. This force rapidly entrains the particles into the vortex field and confines them within the low-pressure vortex core region, where they are stably transported axially along the duct by the vortex airflow. This method ensures that the particles do not escape due to turbulence during transport and avoids collisions and redeposition with the inner walls of the equipment, thus achieving efficient and clean capture and collection. Finally, the airflow carrying the particles is guided to a downstream collection device, such as a collection chamber equipped with a high-efficiency particulate air (HEPA) filter.

[0049] See attached document Figure 5 , Figure 5 This is a logic block diagram of a closed-loop adaptive feedback control system according to an embodiment of the present invention.

[0050] In one specific embodiment, the system includes a closed-loop feedback control mechanism. This mechanism comprises a flow sensor located downstream of the laminar vortex capture module and a control unit. The flow sensor, for example, could be a particle counter based on the laser Doppler principle, configured to monitor the number and velocity of particles passing through its cross-section in real time, thereby calculating the actual capture flux of the captured pollutants.

[0051] The control unit is configured to perform two computational tasks in parallel. First, it receives signals from the flow sensor to obtain the actual captured flux. Second, based on the pollutant probability map initially generated by the online pollutant screening and location module, it calculates a theoretical predicted flux that the system should capture by statistically analyzing the number and estimated size of pollutants in the map.

[0052] The control unit integrates a control algorithm, such as a PID (proportional-integral-derivative) control algorithm or a fuzzy logic control model. This algorithm uses the deviation between the actual captured flux and the predicted flux as its core input variable.

[0053] When the deviation exceeds a preset threshold, the control algorithm will calculate a set of adjustment amounts for the working parameters of the laminar vortex capture module based on the magnitude, duration and trend of the deviation.

[0054] The control unit sends this adjustment amount as a command to the actuator of the micro-nozzle array air source in the laminar vortex capture module. This command specifically changes the jet pressure supplied to the micro-nozzle or fine-tunes its jet angle. In this way, the system can dynamically reconstruct the morphology of the laminar vortex field, such as enhancing the negative pressure intensity of its vortex core or adjusting its vortex range. The ultimate goal is to minimize the deviation between the actual captured flux and the predicted flux, thereby enabling the system to maintain efficient and stable capture performance under different operating conditions.

[0055] See attached document Figure 6 , Figure 6 This is a schematic diagram comparing the acoustic resonance spectra of two different particles according to an embodiment of the present invention. The horizontal axis of the graph represents frequency, and the vertical axis represents the amplitude of the acoustic response. As shown in the figure, curve A represents the typical acoustic resonance spectrum of a high-density metal particle (e.g., target copper residue). This curve presents a sharp peak at a specific resonant frequency point, with a high peak value and a narrow full width at half maximum (FWHM), indicating that it has a high quality factor Q and concentrated energy.

[0056] Curve B represents the typical acoustic resonance spectrum of low-density non-metallic particles (such as dust or fibers). This curve is characterized by a flat peak with a low peak value and a wide full width at half maximum (FWHM), or by irregular responses at multiple frequency points, indicating a low quality factor (Q) and rapid energy dissipation.

[0057] The control unit performs pattern matching between the real-time measured resonance spectrum of suspended particles and characteristic spectra stored in the database, such as curves A and B. When the characteristics of the measured spectrum (such as the position of the main resonant frequency, peak height, and Q value) closely match those of curve A, the control unit determines that the particle is the target copper residue and executes the subsequent ejection command. Conversely, if its characteristics match curve B, it is determined to be a non-target contaminant, and ejection is not performed.

[0058] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A system for treating residual copper in copper foil production, characterized in that, The system comprises: a contaminant online screening and locating module for generating a contaminant probability map identifying potential contaminant locations; a sound levitation excitation module configured to construct a standing wave field at the location of the potential contaminant according to the contaminant probability map, to levitate the potential contaminant from the copper foil surface by acoustic radiation force; and a laminar vortex trapping module for constructing a laminar vortex field to trap and collect the levitated potential contaminant. The contaminant online screening and locating module comprises a hyperspectral scattering imaging device for generating the contaminant probability map containing location and size information of the potential contaminant, and the sound levitation excitation module determines the focusing area and initial energy of the standing wave field according to the location and size information.

2. The system for processing residual copper in copper foil production according to claim 1, wherein The sound levitation excitation module is further configured to perform secondary discrimination of the physical properties of the potential contaminant by analyzing the acoustic resonance spectrum generated by the potential contaminant on the standing wave field, to distinguish high-density metal particles from low-density non-metal particles.

3. The system for processing residual copper in copper foil production according to claim 1, wherein The sound levitation excitation module is further configured to actively eject the particle into the laminar vortex trapping module by changing the horizontal phase gradient of the standing wave field to generate lateral acoustic radiation force only when the secondary discrimination confirms that the potential contaminant is a high-density metal particle.

4. The system for processing residual copper in copper foil production according to claim 1, wherein The sound levitation excitation module comprises an ultrasonic phased array transducer arranged above or below the copper foil, and a control unit configured to adjust the transmission phase or amplitude of each transducer unit in the ultrasonic phased array transducer in real time according to the location of the potential contaminant identified in the contaminant probability map, to focus acoustic energy at the location.

5. The system for processing residual copper in copper foil production according to claim 1, wherein The laminar vortex trapping module comprises a ring-shaped air duct and a micro-nozzle array arranged in the air duct, and the micro-nozzle array is used to blow sheath gas to converge the laminar vortex field with a stable vortex core on the copper foil surface.

6. The system for processing residual copper in copper foil production according to claim 1, wherein The system further comprises:

7. The system for processing residual copper in copper foil production according to claim 1, wherein a flow sensor arranged downstream of the laminar vortex trapping module for monitoring the actual trapping flux; and a control unit configured to dynamically adjust the working parameters of the laminar vortex trapping module to reconstruct the topography of the laminar vortex field according to the deviation between the actual trapping flux and the predicted flux. The control unit is further configured to calculate the predicted flux based on the contaminant probability map generated by the contaminant online screening and locating module, to realize closed-loop feedback between the front-end detection and the back-end trapping effect of the system.

8. The system for processing residual copper in copper foil production according to claim 1, wherein The control unit reconstructs the topography of the laminar vortex field by dynamically adjusting the jet pressure or jet angle of the micro-nozzles in the laminar vortex trapping module, to minimize the deviation.

9. The system for processing residual copper in copper foil production according to claim 1, wherein The system is further configured to perform a complete workflow containing discrimination and conditional processing: when the secondary discrimination confirms that the potential contaminant is a low-density non-metal particle, the sound levitation excitation module stops applying energy to it, and the laminar vortex trapping module does not trap it, to avoid unnecessary energy consumption and processing of non-target objects.

10. The system for processing residual copper in copper foil production according to claim 1, wherein ​

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