Multi-functional combination valve and working method thereof

Abstract

This invention belongs to the field of engineering component technology, specifically relating to valves, and more particularly to a multifunctional combination valve and its working method; one type of multifunctional combination valve includes: a valve body having a first valve chamber and a second valve chamber inside, and a liquid flow channel connecting the first valve chamber and the second valve chamber; a first valve core, which is vertically disposed within the first valve chamber; a support ring, which is fixed within the first valve chamber and has a plurality of flow grooves evenly distributed radially along its wall thickness, and a gap is provided between the outer wall of the support ring and the inner wall of the first valve chamber; an adjusting member, which is hinged to the outer wall of the support ring near the flow grooves, and is linked to the first valve core via a connecting rod; wherein, when liquid flows through the flow grooves to the outside of the support ring, the liquid forms a swirling flow on the side of the adjusting member opposite to the flow direction; when the first valve core moves upward, the connecting rod pushes the adjusting member to rotate outward about the hinge point as the axis, and the adjusting member squeezes the space between the outer wall of the support ring and the first valve chamber to promote the flow of liquid in the space.

Description

Technical Field

[0001] This invention belongs to the field of engineering components technology, specifically relating to valves, and more particularly to multifunctional combination valves and their working methods. Background Technology

[0002] In semiconductor equipment manufacturing processes, such as etching, cleaning, and coating, precise control of the delivery, switching, and mixing of various chemical liquids is often required. Traditionally, separate valves are configured for each liquid's on / off state or each mixing function. As process requirements increase and the types of liquids to be handled expand, the number of valves increases, and the piping system becomes exceptionally complex. This not only occupies valuable equipment space but also creates inconvenience for installation and maintenance, and increases manufacturing costs.

[0003] To simplify pipeline structures, the industry has seen the emergence of combination valves that integrate multiple functions into one unit. These valves typically feature multiple flow channels and valve chambers within a single valve body, achieving switching and combination of various flow paths by controlling the movement of different valve cores. In some existing integrated valve designs, structures such as support rings are incorporated within the valve chamber to guide the flow channels or support the valve cores. For example, to facilitate liquid flow from the inlet to a specific outlet or to a mixing channel, a support ring with multiple radially spaced flow grooves might be used. Simultaneously, to facilitate assembly and prevent jamming, a certain assembly gap is usually maintained between the outer wall of the support ring and the inner wall of the valve chamber, ensuring flow rate while supporting the valve diaphragm.

[0004] However, this structure has a significant drawback: when liquid flows through the support ring to enter the flow channel, most of the liquid flows out smoothly through the opposite flow groove, but some liquid, under pressure, enters the annular gap between the outer wall of the support ring and the inner wall of the valve cavity. When the valve core actuates and the flow path switches, this liquid retained in the gap is difficult to be flushed out by the subsequent flow path, thus forming a "residual liquid zone." When switching to another liquid in subsequent processes, this residual liquid will slowly seep out or mix with the new liquid, causing cross-contamination and posing a potential threat to the yield of semiconductor products.

[0005] Therefore, how to solve the problem of residual liquid in the dead zone inside the valve body is a technical problem that urgently needs to be solved in this field.

[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore, the above description is not considered to constitute information related to the technology. Summary of the Invention

[0007] This disclosure provides at least one multifunctional combination valve and its operating method.

[0008] In a first aspect, embodiments of this disclosure provide a multifunctional combination valve, comprising:

[0009] The valve body has a first valve chamber and a second valve chamber inside, as well as a liquid passage connecting the first valve chamber and the second valve chamber.

[0010] The first valve core is raised and lowered within the first valve cavity;

[0011] A support ring is fixed inside the first valve cavity and has several flow grooves evenly distributed radially along the wall thickness. A gap is provided between the outer wall of the support ring and the inner wall of the first valve cavity.

[0012] The adjusting component is hinged to the outer wall of the support ring near the flow groove and is linked to the first valve core via a connecting rod.

[0013] When the liquid flows through the flow channel to the outside of the support ring, the liquid forms a swirling flow on the side of the regulating member opposite to the flow direction.

[0014] When the first valve core moves upward, the connecting rod pushes the adjusting component to rotate outward around the hinge point. The adjusting component squeezes the space between the outer wall of the support ring and the first valve cavity to promote the flow of liquid in the space.

[0015] In one optional embodiment, a receiving groove is formed on the outer wall of the support ring near the flow groove, and one end of the adjusting member is hinged in the receiving groove via a rotating shaft.

[0016] In one alternative embodiment, the width of the adjusting member is greater than the opening width of the receiving groove, and a first inclined surface is formed on the inner wall of the adjusting member on the side away from the hinge axis.

[0017] In one optional embodiment, the inner wall of the receiving groove is provided with a plurality of fixing holes, and a reset spring is provided in each fixing hole, one end of the reset spring being fixed to the inner wall of the adjusting member.

[0018] In one optional embodiment, a first air chamber is formed in the valve body, and the first air chamber is located above the first valve chamber;

[0019] A piston disc is vertically mounted inside the first air chamber, and the piston disc is connected to the first valve core via a valve stem.

[0020] The inner end of the connecting rod is fixed to the outer wall of the valve stem, and the outer end of the connecting rod is provided with a second inclined surface;

[0021] When the valve stem drives the first valve core to move upward, the second inclined surface of the connecting rod pushes the adjusting member to rotate outward with the hinge point as the axis.

[0022] In one optional embodiment, a first air inlet is provided on one side of the valve body, the first air inlet is connected to the first air chamber, and the first air inlet is adapted to deliver compressed air into the first air chamber.

[0023] In one optional embodiment, a first inlet and a first outlet are provided on one side of the valve body, and both the first inlet and the first outlet are in communication with the first valve cavity;

[0024] When the first valve core moves downward, it is adapted to close the first outlet so that the first inlet is connected to the liquid flow channel;

[0025] When the first valve core moves upward, it is adapted to close the first valve chamber so that the first inlet and the first outlet are connected.

[0026] In one optional embodiment, a second inlet and a second outlet are provided on one side of the valve body, and both the second inlet and the second outlet are in communication with the second valve cavity;

[0027] A second valve core is vertically mounted inside the second valve chamber;

[0028] When the second valve core moves upward, it is adapted to open the second valve chamber so that the second inlet, the liquid flow channel and the second outlet are connected.

[0029] In one optional embodiment, a second air chamber is formed within the valve body, and the second air chamber is located above the second valve chamber;

[0030] A second air inlet is provided on one side of the valve body. The second air inlet is connected to the second air chamber and is adapted to deliver compressed air into the second air chamber.

[0031] In one optional embodiment, the valve body has a first valve chamber and a second valve chamber, and a liquid passage connecting the first valve chamber and the second valve chamber.

[0032] The valve body is provided with a first inlet and a first outlet communicating with the first valve cavity, a second inlet and a second outlet communicating with the second valve cavity, and a first air inlet and a second air inlet for controlling the rise and fall of the valve core in the first valve cavity and the second valve cavity, respectively.

[0033] Secondly, this disclosure also provides a method for operating a multifunctional combination valve, the method comprising:

[0034] When the liquid flows through the flow channel to the outside of the support ring, the liquid forms a swirling flow on the side of the regulating element opposite to the flow direction.

[0035] When the first valve core moves upward, the connecting rod pushes the adjusting component to rotate outward around the hinge point. The adjusting component squeezes the space between the outer wall of the support ring and the first valve cavity to promote the flow of liquid in the space.

[0036] The beneficial effects of this invention are that it provides a multifunctional combination valve and its working method. By hinged adjustment components to the outer wall of the support ring and the cooperation between the adjustment components and the connecting rod, the dead zone liquid residue between the outer wall of the support ring and the inner wall of the first valve cavity can be eliminated, cross-contamination can be prevented, and the purity and proportion accuracy of liquid mixing can be ensured.

[0037] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0038] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of the present invention, the drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0040] Figure 1 A perspective view of a multifunctional combination valve provided in an embodiment of this disclosure;

[0041] Figure 2 Provided for the embodiments of this disclosure Figure 1 A sectional stereoscopic view from the perspective of the middle AA (American Academy of Sciences).

[0042] Figure 3 A perspective view of the support ring provided in an embodiment of this disclosure;

[0043] Figure 4 Provided for the embodiments of this disclosure Figure 1 A sectional front view from the perspective of the middle BB (Browser and BB) section;

[0044] Figure 5 This is a top view of fluid flowing through a support ring, as provided in an embodiment of this disclosure.

[0045] In the picture:

[0046] 1. Valve body; 11. First air chamber; 12. Piston disc; 13. Valve stem; 15. Second air chamber; 16. First air inlet; 17. Second air inlet;

[0047] 2. First valve chamber; 20. First valve core; 21. First inlet; 22. First outlet;

[0048] 3. Second valve chamber; 31. Second inlet; 32. Second outlet; 33. Second valve core;

[0049] 4. Liquid flow channel;

[0050] 5. Support ring; 50. Flow groove; 51. Receiving groove; 52. Return spring;

[0051] 6. Adjusting component; 60. First inclined plane; 61. Connecting rod; 62. Second inclined plane. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0053] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0054] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify an entire column of elements when following a column of elements. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0055] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise expressly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0056] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0057] Research has revealed that, to simplify pipeline structures, the industry has developed combination valves that integrate multiple functions into one unit. These valves typically feature multiple flow channels and valve chambers within a single valve body, achieving switching and combination of various flow paths by controlling the movement of different valve cores. In some existing integrated valve designs, structures such as support rings are incorporated within the valve chamber to guide the flow channels or support the valve cores. For example, to facilitate liquid flow from the inlet to a specific outlet or to a mixing channel, a support ring with multiple radially spaced flow grooves might be used. Simultaneously, to facilitate assembly and prevent jamming, a certain assembly gap is usually maintained between the outer wall of the support ring and the inner wall of the valve chamber, ensuring flow rate while supporting the valve diaphragm.

[0058] However, this structure has a significant drawback: when liquid flows through the support ring to enter the flow channel, most of the liquid flows out smoothly through the opposite flow groove, but some liquid, under pressure, enters the annular gap between the outer wall of the support ring and the inner wall of the valve cavity. When the valve core actuates and the flow path switches, this liquid retained in the gap is difficult to be flushed out by the subsequent flow path, thus forming a "residual liquid zone." When switching to another liquid in subsequent processes, this residual liquid will slowly seep out or mix with the new liquid, causing cross-contamination. This seriously affects the purity and ratio accuracy of the mixture of different liquids, as well as the consistency of the process effect, posing a potential threat to the yield of semiconductor products.

[0059] Therefore, how to solve the problem of residual liquid in the dead zone inside the valve body is a technical problem that urgently needs to be solved in this field.

[0060] The defects in the above solutions and the reasons for their occurrence are the results of the inventors' practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventors' contributions to this disclosure.

[0061] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0062] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0063] like Figure 1 As shown, at least one embodiment provides a multi-functional combination valve, including: a valve body 1, which has a first valve chamber 2 and a second valve chamber 3, and a liquid flow channel 4 connecting the first valve chamber 2 and the second valve chamber 3; the first valve chamber 2 is connected to a first inlet 21 and a first outlet 22, and the second valve chamber 3 is connected to a second inlet 31 and a second outlet 32. This design allows the two flow channels to operate independently or be mixed for liquid supply, reducing the piping complexity of traditional multi-valve systems. In semiconductor devices, which often need to handle various chemical liquids (such as etching solutions and cleaning agents), this structure reduces the risk of contamination and maintenance costs through integration.

[0064] Reference Appendix Figure 2 A first valve core 20 is disposed within the first valve chamber 2, and its lifting mechanism is located within the first valve chamber 2. The lifting and lowering of the first valve core 20 is controlled by a first air chamber 11. The first air chamber 11 is located above the first valve chamber 2 and contains a piston disc 12 and a valve stem 13. The first air chamber 11 is connected to a first air inlet 16. When compressed air is introduced into the first air inlet 16, the air pressure pushes the piston disc 12 upward, causing the valve stem 13 and the first valve core 20 to move upward, thereby achieving flow path switching.

[0065] Reference Appendix Figure 2 and Figure 3 The support ring 5 is fixed inside the first valve cavity 2, and flow grooves 50 are evenly distributed radially along the wall thickness to guide the liquid flow. A gap is provided between the outer wall of the support ring 5 and the inner wall of the first valve cavity 2 to facilitate fixing the support ring 5 to the inner wall of the first valve cavity 2.

[0066] Continue to refer to the appendix Figure 3The adjusting component 6 is hinged to the outer wall of the support ring 5 near the flow groove 50 and linked to the first valve core 20 via a connecting rod 61. The adjusting component 6 is also hinged within the receiving groove 51 on the outer wall of the support ring 5 and linked to the valve stem 13 via the connecting rod 61. The width of the adjusting component 6 is greater than that of the receiving groove 51. One inner wall of the adjusting component 6 has a first inclined surface 60, and the outer end of the connecting rod 61 has a second inclined surface 62. When the first valve core 20 moves upward, the second inclined surface 62 of the connecting rod 61 pushes the adjusting component 6 outward, compressing the gap between the support ring 5 and the valve cavity wall, pushing residual liquid out and eliminating dead zones. A return spring 52 is installed in the receiving groove 51 to ensure that the adjusting component 6 returns to its original position without external pressure. This design directly addresses the stringent requirements of the semiconductor industry for zero residual liquid, avoiding cross-contamination. When the liquid flows through the flow channel 50 to the outside of the support ring 5, a swirling flow is formed on the side of the adjusting member 6 opposite to the flow direction. When the first valve core 20 moves upward, the connecting rod 61 pushes the adjusting member 6 to rotate outward around the hinge point. The adjusting member 6 compresses the space between the outer wall of the support ring 5 and the first valve cavity 2, creating turbulence to drive the flow of liquid within that space. Specifically, the above actions can be repeated to ensure complete flow of liquid in the space between the outer wall of the support ring 5 and the first valve cavity 2. Figure 3 In this context, F1 indicates the direction in which the liquid flows outward through each flow channel 50 after passing through the inside of the support ring 5.

[0067] Reference Appendix Figure 4 A second valve core 33 is installed in the second valve chamber 3, and its raising and lowering is controlled by the second air chamber 15. When compressed air is introduced into the second air inlet 17, the air pressure pushes the second valve core 33 upward, connecting the second inlet 31, the liquid flow channel 4, and the second outlet 32 ​​to achieve liquid mixing. This dual-valve-chamber design supports multiple operating modes, such as independent liquid supply, mixing, or switching, enhancing the adaptability of the valve. This embodiment, through the above structure, is adapted to the compact space of semiconductor equipment. The valve body adopts a modular design, which is easy to embed into the equipment, reduces external piping, and meets the cleanliness requirements of SEMI (Semiconductor Equipment and Materials International) standards.

[0068] The working principle of the multi-functional combination valve is as follows:

[0069] Initial state: No air pressure input to the first air inlet 16 and the second air inlet 17. The first valve core 20 moves downward under the action of the spring, closing the first outlet 22. Liquid flows from the first inlet 21 through the first valve chamber 2 into the liquid flow channel 4. At this time, the regulating member 6 is in the reset state. When the liquid flows through the flow groove 50, a swirling flow is formed on the back side of the regulating member 6 (e.g., Figure 5 As shown), this promotes uniform mixing of the liquid. Specifically, when the liquid passes through the regulating member 6, it is guided obliquely into the space between the support ring 5 and the first valve chamber 2 via the inclined surface of the regulating member 6, thereby guiding the liquid to swirl. Figure 5In the diagram, F1 indicates that the liquid flows from the inside to the outside through the flow channel 50; F2 indicates the direction of liquid flow along the space between the support ring 5 and the first valve chamber 2.

[0070] Flow path switching mode: When air pressure is introduced into the first air inlet 16, the first valve core 20 moves upward, closing the connection between the first valve chamber 2 and the liquid flow channel 4, and opening the first outlet 22, allowing liquid to flow directly from the first inlet 21 to the first outlet 22. Simultaneously, the connecting rod 61 pushes the adjusting member 6 outward, compressing the gap space and pushing residual liquid into the main flow channel, preventing dead zones from forming. This process solves the residue problem during liquid switching in semiconductor processes and improves purity.

[0071] Mixing mode: When air pressure is introduced into the second air inlet 17, the second valve core 33 moves upward, and the liquid in the liquid flow channel 4 enters the second valve chamber 3, mixes with the liquid in the second inlet 31, and flows out from the second outlet 32. The support ring 5 and adjusting member 6 mechanism ensure that there is no residue in the first valve chamber 2 and the mixing ratio is accurate. At least one embodiment provides a method of operating a multifunctional combination valve, the method of operating including:

[0072] When the liquid flows through the flow channel 50 to the outside of the support ring 5, the liquid forms a swirling flow on the side of the regulating member 6 opposite to the flow direction.

[0073] When the first valve core 20 moves upward, the connecting rod 61 pushes the adjusting member 6 to rotate outward around the hinge point. The adjusting member 6 squeezes the space between the outer wall of the support ring 5 and the first valve cavity 2 to promote the flow of liquid in the space.

[0074] In the description of the embodiments of the present invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the present invention based on the specific circumstances.

[0075] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as a second element, component, region, layer, or segment.

[0076] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A multifunctional combination valve, characterized in that, include: The valve body (1) has a first valve chamber (2) and a second valve chamber (3) inside, and a liquid flow channel (4) connecting the first valve chamber (2) and the second valve chamber (3); The first valve core (20) is raised and lowered within the first valve chamber (2); A support ring (5) is fixed inside the first valve chamber (2) and several flow grooves (50) are evenly distributed radially along the wall thickness. A gap is provided between the outer wall of the support ring (5) and the inner wall of the first valve chamber (2). The adjusting component (6) is hinged to the outer wall of the support ring (5) near the flow groove (50) and is linked to the first valve core (20) through the connecting rod (61); When the liquid flows through the flow channel (50) to the outside of the support ring (5), the liquid forms a swirling flow on the side of the regulating member (6) opposite to the flow direction. When the first valve core (20) moves upward, the connecting rod (61) pushes the adjusting member (6) to rotate outward with the hinge point as the axis. The adjusting member (6) squeezes the space between the outer wall of the support ring (5) and the first valve chamber (2) to promote the flow of liquid in the space. A receiving groove (51) is provided on the outer wall of the support ring (5) near the flow groove (50), and one end of the adjusting member (6) is hinged in the receiving groove (51) via a rotating shaft; The width of the adjusting member (6) is greater than the opening width of the receiving groove (51), and a first inclined surface (60) is opened on the inner wall of the adjusting member (6) away from the hinge axis. The inner wall of the receiving groove (51) is provided with a plurality of fixing holes, and a reset spring (52) is provided in each fixing hole. One end of the reset spring (52) is fixed to the inner wall of the adjusting member (6). A first air chamber (11) is provided inside the valve body (1), and the first air chamber (11) is located above the first valve chamber (2); A piston disc (12) is vertically mounted inside the first air chamber (11), and the piston disc (12) is connected to the first valve core (20) through a valve stem (13); The inner end of the connecting rod (61) is fixed to the outer wall of the valve stem (13), and the outer end of the connecting rod (61) is provided with a second inclined surface (62). When the valve stem (13) drives the first valve core (20) to move upward, the second inclined surface (62) of the connecting rod (61) pushes the adjusting member (6) to rotate outward with the hinge point as the axis. The valve body (1) has a first inlet (21) and a first outlet (22) on one side, and both the first inlet (21) and the first outlet (22) are connected to the first valve cavity (2); When the first valve core (20) moves downward, it is adapted to close the first outlet (22) so that the first inlet (21) is connected to the liquid flow channel (4); When the first valve core (20) moves upward, it is adapted to close the first valve chamber (2) so that the first inlet (21) and the first outlet (22) are connected.

2. The multifunctional combination valve as described in claim 1, characterized in that, A first air inlet (16) is provided on one side of the valve body (1). The first air inlet (16) is connected to the first air chamber (11). The first air inlet (16) is adapted to deliver compressed air into the first air chamber (11).

3. The multifunctional combination valve as described in claim 1, characterized in that, The valve body (1) is provided with a second inlet (31) and a second outlet (32) on one side, and the second inlet (31) and the second outlet (32) are both connected to the second valve cavity (3); A second valve core (33) is installed in the second valve chamber (3) in a vertical manner; When the second valve core (33) moves upward, it is suitable for opening the second valve chamber (3) so that the second inlet (31), the liquid flow channel (4), and the second outlet (32) are connected.

4. The multifunctional combination valve as described in claim 3, characterized in that, A second air chamber (15) is provided inside the valve body (1), and the second air chamber (15) is located above the second valve chamber (3); A second air inlet (17) is provided on one side of the valve body (1). The second air inlet (17) is connected to the second air chamber (15). The second air inlet (17) is adapted to deliver compressed air into the second air chamber (15).

5. A method for operating a multifunctional combination valve, characterized in that, The working method of using the multifunctional combination valve as described in any one of claims 1-4 includes: When the liquid flows through the flow channel (50) to the outside of the support ring (5), the liquid forms a swirling flow on the side of the regulating member (6) opposite to the flow direction. When the first valve core (20) moves upward, the connecting rod (61) pushes the adjusting member (6) to rotate outward with the hinge point as the axis. The adjusting member (6) squeezes the space between the outer wall of the support ring (5) and the first valve chamber (2) to promote the flow of liquid in the space.

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