Independent double-arm vacuum direct-drive mechanical arm

Abstract

The invention relates to a vacuum manipulator, in particular to an independent double-arm vacuum direct-drive mechanical arm. Comprising a big arm, a right arm and a left arm, an arm connector is arranged in the middle of the big arm, the left arm and the right arm are arranged at the two ends of the big arm respectively, and the left arm and the right arm move independently. The big arm comprises a big arm shell, a right big arm belt transmission mechanism and a left big arm belt transmission mechanism, wherein the right big arm belt transmission mechanism and the left big arm belt transmission mechanism are arranged in the big arm shell. The arm connector comprises an outer shaft, a middle shaft and an inner shaft which are coaxially installed and independently rotate, and the outer shaft is connected with the large arm shell and drives the large arm shell to rotate. The middle shaft is connected with the right arm through a right large arm belt transmission mechanism and drives the right arm to stretch out and draw back; the inner shaft is connected with the left arm through a left large arm belt transmission mechanism and drives the left arm to stretch out and draw back. Through the design that the left arm and the right arm share the same large arm, the large-spacing arm layout capable of meeting the requirements of the semiconductor industry is formed, the large-spacing arm layout is matched with external large-spacing parallel stations, and the wafer carrying efficiency is effectively improved.

Description

Technical Field

[0001] This invention relates to vacuum manipulators, and more particularly to an independent dual-arm vacuum direct-drive manipulator. Background Technology

[0002] In semiconductor manufacturing, vacuum robotic arms are core equipment for wafer handling, and their performance directly affects production efficiency and wafer processing accuracy. Currently, commercially available independent dual-arm vacuum direct-drive robotic arms have significant technical shortcomings: Firstly, due to structural design limitations, the distance between the left and right arms is relatively small (typically less than 800mm), making them unsuitable for handling needs at externally spaced parallel workstations. When there are two processing workstations with a large distance between them on the production line, additional auxiliary equipment or adjustments to the workstation layout are required, increasing production costs and operational complexity. Secondly, the multi-axis coaxial mechanical structure of existing equipment has extremely high requirements for the design and assembly of axial runout. Strict control of the axial dimensional accuracy of each axis is necessary; otherwise, problems such as transmission jamming and positioning deviations can easily occur, increasing manufacturing difficulty and reducing equipment stability and lifespan. Therefore, there is an urgent need to design an independent dual-arm vacuum direct-drive robotic arm that can meet the needs of large-pitch workstations and reduce reliance on assembly accuracy. Summary of the Invention

[0003] To address the aforementioned problems, the present invention aims to provide an independent dual-arm vacuum direct-drive robotic arm to solve the problems of existing equipment being unable to adapt to large-spacing workstations and high requirements for multi-axis assembly.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] The present invention provides an independent dual-arm vacuum direct-drive robotic arm, comprising a main arm, a right arm, and a left arm. The main arm has an arm interface in the middle for connecting to an external power source. The right arm and the left arm are respectively located at both ends of the main arm, and the right arm and the left arm have the same structure. The external power source drives the main arm to rotate around the central axis of the arm interface, and the external power source drives the right arm and the left arm to move independently.

[0006] The boom includes a boom housing and a right boom belt drive mechanism and a left boom belt drive mechanism disposed within the boom housing;

[0007] The arm interface includes an outer shaft, a middle shaft, and an inner shaft that are coaxially mounted and rotate independently. The outer shaft is connected to the middle of the upper arm housing and drives the upper arm housing to rotate. The middle shaft is connected to the right arm through a right upper arm belt drive mechanism and drives the right arm to move. The inner shaft is connected to the left arm through a left upper arm belt drive mechanism and drives the left arm to move.

[0008] The right boom belt drive mechanism includes a lower center wheel, a right boom steel belt, a right boom wheel, a right boom shoulder shaft, and a right wheel adapter flange. The lower center wheel is fixed on the intermediate shaft, the right boom shoulder shaft is located at the right end of the boom, the right boom wheel is rotatably mounted on the right boom shoulder shaft, and the right boom wheel is connected to the lower center wheel via the right boom steel belt. The right boom wheel is connected to the right arm via the right wheel adapter flange. When the lower center wheel rotates, the right arm rotates along with it via the right boom steel belt.

[0009] The right arm includes a right middle arm, a right forearm, and a right finger assembly that are connected in a rotatable manner from end to end.

[0010] The right middle arm includes a right middle arm housing and a right middle arm belt drive mechanism disposed within the right middle arm housing. The tail of the right middle arm housing is rotatably mounted on the right shoulder shaft of the upper arm, and the tail of the right middle arm housing is fixedly connected to the right wheel adapter flange. The right middle arm belt drive mechanism is connected between the right shoulder shaft of the upper arm and the right forearm. When the right middle arm housing rotates, the right middle arm belt drive mechanism drives the right forearm to rotate.

[0011] The right forearm includes a right forearm housing and a right forearm belt drive mechanism disposed within the right forearm housing; the tail of the right forearm housing is connected to the right forearm belt drive mechanism, and the right forearm belt drive mechanism is connected to the right finger assembly. When the right forearm housing rotates, the right forearm belt drive mechanism drives the right finger assembly to rotate.

[0012] The right middle arm belt drive mechanism includes a right middle arm large pulley, a right middle arm small pulley, a right middle arm steel belt, and a right middle arm small pulley shaft. The right middle arm large pulley is fixed to the right shoulder shaft of the large arm via a right arm expansion sleeve. The right middle arm small pulley shaft is fixed to the front end of the right middle arm housing. The right middle arm small pulley is rotatably mounted on the right middle arm small pulley shaft and is connected to the right middle arm large pulley via the right middle arm steel belt. The rear end of the right forearm housing is rotatably mounted on the right middle arm small pulley shaft and is fixedly connected to the right middle arm small pulley.

[0013] When the right middle arm housing rotates, the right middle arm steel belt drives the right middle arm small pulley to rotate around the right middle arm large pulley in a planetary motion, thereby the right middle arm small pulley drives the right forearm to rotate.

[0014] The right forearm belt drive mechanism includes a right forearm small pulley, a right forearm steel belt, and a right forearm large pulley. The right forearm small pulley is fixed on the right middle arm small pulley shaft, and the right forearm large pulley is rotatably mounted on the right forearm shoulder shaft provided at the head end of the right forearm housing. The right forearm large pulley is connected to the right forearm small pulley via the right forearm steel belt. The right finger assembly is rotatably mounted on the right forearm shoulder shaft, and the right finger assembly is fixedly connected to the right forearm large pulley.

[0015] When the right forearm housing rotates, the right forearm steel belt drives the right forearm large pulley to rotate planetarily around the right forearm small pulley, thereby causing the right forearm large pulley to drive the right finger assembly to rotate.

[0016] The diameter ratio of the large pulley of the right middle arm to the small pulley of the right middle arm is 2:1; the diameter ratio of the small pulley of the right forearm to the large pulley of the right forearm is 1:2; when the lower center wheel rotates, the right finger assembly extends horizontally.

[0017] The right finger assembly includes a right finger connecting plate and a right finger, wherein the tail end of the right finger connecting plate is fixedly connected to the right forearm pulley, and the head end of the right finger connecting plate is fixedly connected to the right finger.

[0018] The right finger is made of ceramic.

[0019] The left boom belt drive mechanism has the same structure as the right boom belt drive mechanism.

[0020] The advantages and positive effects of this invention are as follows: The independent dual-arm vacuum direct-drive robotic arm provided by this invention, through the design of the left and right arms sharing the same large arm, forms a large-pitch (greater than 800mm) arm layout that meets the needs of the semiconductor industry and is compatible with external large-pitch parallel workstations; the left and right arms have independent transmission structures, which can extend and retract independently or simultaneously in parallel, effectively improving wafer handling efficiency; in the three-axis coaxial structure connected to the column, the middle shaft and the lower center wheel, and the inner shaft and the upper center wheel are connected by expansion sleeves, which greatly reduces the dependence on the axial dimension accuracy of the column connecting shaft, simplifies the assembly process and enhances the stability of equipment operation; at the same time, the arm transmission system ensures horizontal extension and retraction through a specific pulley diameter ratio (middle arm pulley diameter ratio 2:1, forearm pulley diameter ratio 1:2), and with ceramic fingers, it can effectively prevent wafer tilting and falling or surface scratches, ensuring handling safety, and is generally adapted to the high-precision and high-efficiency wafer vacuum handling needs of the semiconductor industry.

[0021] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings.

[0022] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0023] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0024] Figure 1 This is a schematic diagram of the structure of an independent dual-arm vacuum direct-drive robotic arm according to the present invention;

[0025] Figure 2 This is a cross-sectional view of an independent dual-arm vacuum direct-drive robotic arm according to the present invention.

[0026] 1 is the upper arm; 2.1 is the right middle arm; 2.2 is the left middle arm; 3.1 is the right forearm; 3.2 is the left forearm; 4 is the right finger connecting plate; 5 is the left finger connecting plate; 6.1 is the right finger; 6.2 is the left finger; 7 is the upper arm housing; 8 is the lower center wheel expansion sleeve; 9 is the lower center wheel; 10 is the right upper arm steel belt; 11 is the right upper arm wheel; 12 is the right upper arm shoulder shaft; 13 is the right wheel adapter flange; 14 is the right middle arm large pulley; 15 is the right middle arm housing; 16 is the right arm expansion sleeve; 17 is the right middle arm small pulley; 18 is the right middle arm steel belt; 19 is the right forearm. Small pulley, 20 is the small pulley shaft of the right middle arm, 21 is the steel belt of the right forearm, 22 is the housing of the right forearm, 23 is the large pulley of the right forearm; 24 is the expansion sleeve of the upper center wheel, 25 is the upper center wheel, 26 is the steel belt of the left upper arm, 27 is the left wheel of the upper arm, 28 is the left shoulder shaft of the upper arm, 29 is the left wheel adapter flange; 30 is the large pulley of the left middle arm, 31 is the expansion sleeve of the left arm, 32 is the steel belt of the left middle arm, 33 is the small pulley shaft of the left middle arm, 34 is the small pulley of the left middle arm, 35 is the small pulley of the left forearm, 36 is the steel belt of the left forearm, 37 is the housing of the left forearm, 38 is the large pulley of the left forearm. Detailed Implementation

[0027] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0028] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0029] See Figure 1 and Figure 2 As shown, the present invention provides an independent dual-arm vacuum direct-drive robotic arm, including a large arm 1, a right arm and a left arm. The large arm 1 has an arm interface in the middle for connecting to an external power source. The right arm and the left arm are respectively located at both ends of the large arm 1, and the right arm and the left arm have the same structure. The external power source drives the large arm 1 to rotate around the central axis of the arm interface, and the external power source can drive the right arm and the left arm to move independently.

[0030] See Figure 2 As shown, in an embodiment of the present invention, the boom 1 includes a boom housing 7 and a right boom belt drive mechanism and a left boom belt drive mechanism disposed within the boom housing 7; the arm interface includes an outer shaft, an intermediate shaft, and an inner shaft that are coaxially mounted and rotate independently respectively. The outer shaft is connected to the middle part of the boom housing 7 and drives the boom housing 7 to rotate; the intermediate shaft is connected to the right arm through the right boom belt drive mechanism and drives the right arm to move; the inner shaft is connected to the left arm through the left boom belt drive mechanism and drives the left arm to move.

[0031] In an embodiment of the present invention, the right boom belt drive mechanism includes a lower center wheel 9, a right boom steel belt 10, a right boom wheel 11, a right boom shoulder shaft 12, and a right wheel adapter flange 13. The lower center wheel 9 is fixed to the intermediate shaft by a lower center wheel expansion sleeve 8. The right boom shoulder shaft 12 is located at the right end of the boom housing 7. The right boom wheel 11 is rotatably mounted on the right boom shoulder shaft 12 and is connected to the lower center wheel 9 via the right boom steel belt 10. The right boom wheel 11 is connected to the right arm via the right wheel adapter flange 13. When the lower center wheel 9 rotates, the right arm rotates along with it via the right boom steel belt 10.

[0032] In an embodiment of the present invention, the right arm includes a right middle arm 2.1, a right forearm 3.1, and a right finger assembly that are rotatably connected end to end in sequence; the right middle arm 2.1 includes a right middle arm housing 15 and a right middle arm belt drive mechanism disposed within the right middle arm housing 15, wherein the tail of the right middle arm housing 15 is rotatably mounted on the right shoulder shaft 12 of the upper arm, and the tail of the right middle arm housing 15 is fixedly connected to the right wheel adapter flange 13, and the right middle arm belt drive mechanism is connected between the right shoulder shaft 12 of the upper arm and the right forearm 3.1. When the right middle arm housing 15 rotates, the right middle arm belt drive mechanism drives the right forearm 3.1 to rotate.

[0033] The right forearm 3.1 includes a right forearm housing 22 and a right forearm belt drive mechanism disposed within the right forearm housing 22; the tail of the right forearm housing 22 is connected to the right middle arm belt drive mechanism, and the right forearm belt drive mechanism is connected to the right finger assembly; when the right forearm housing 22 rotates, the right forearm belt drive mechanism drives the right finger assembly to rotate.

[0034] Specifically, the right middle arm belt drive mechanism includes a right middle arm large pulley 14, a right middle arm small pulley 17, a right middle arm steel belt 18, and a right middle arm small pulley shaft 20. The right middle arm large pulley 14 is fixed to the right shoulder shaft 12 of the large arm via the right arm expansion sleeve 16. The right middle arm small pulley shaft 20 is fixed to the first end of the right middle arm housing 15. The right middle arm small pulley 17 is rotatably mounted on the right middle arm small pulley shaft 20 and is connected to the right middle arm large pulley 14 via the right middle arm steel belt 18. The tail end of the right forearm housing 22 is rotatably mounted on the right middle arm small pulley shaft 20 and is fixedly connected to the right middle arm small pulley 17. When the right middle arm housing 15 rotates, the right middle arm steel belt 18 drives the right middle arm small pulley 17 to rotate planetarily around the right middle arm large pulley 14, thereby driving the right forearm 3.1 to rotate.

[0035] Specifically, the right forearm belt drive mechanism includes a right forearm small pulley 19, a right forearm steel belt 21, and a right forearm large pulley 23. The right forearm small pulley 19 is fixed on the right middle arm small pulley shaft 20, and the right forearm large pulley 23 is rotatably mounted on the right forearm shoulder shaft at the head end of the right forearm housing 22. The right forearm large pulley 23 is connected to the right forearm small pulley 19 via the right forearm steel belt 21. The right finger assembly is rotatably mounted on the right forearm shoulder shaft and is fixedly connected to the right forearm large pulley 23. When the right forearm housing 22 rotates, the right forearm steel belt 21 drives the right forearm large pulley 23 to rotate planetarily around the right forearm small pulley 19, thereby driving the right finger assembly to rotate.

[0036] Furthermore, the diameters of the right middle arm large pulley 14 and the right middle arm small pulley 17 are 2:1; the diameters of the right forearm small pulley 19 and the right forearm large pulley 23 are 1:2; when the lower center wheel 9 rotates, the right finger assembly extends horizontally.

[0037] In an embodiment of the present invention, the right finger assembly includes a right finger connecting plate 4 and a right finger 6.1, wherein the tail end of the right finger connecting plate 4 is fixedly connected to the right forearm pulley 23, and the head end of the right finger connecting plate 4 is fixedly connected to the right finger 6.1. Preferably, the right finger 6.1 is made of ceramic.

[0038] In embodiments of the present invention, the left boom belt drive mechanism and the right boom belt drive mechanism have the same structure. See also Figure 2As shown, the left boom belt drive mechanism includes an upper center pulley 25, a left boom steel belt 26, a left boom wheel 27, a left boom shoulder shaft 28, and a left wheel adapter flange 29. The upper center pulley 25 is fixed to the inner shaft via an upper center pulley expansion sleeve 24. The left boom shoulder shaft 28 is fixed to the left end of the boom housing 7. The left boom wheel 27 is rotatably mounted on the left boom shoulder shaft 28 and is connected to the upper center pulley 25 via the left boom steel belt 26. The left boom wheel 27 is connected to the left arm via the left wheel adapter flange 29. When the upper center pulley 25 rotates, it drives the left arm to rotate along with it via the left boom steel belt 26.

[0039] In an embodiment of the present invention, the left arm includes a left middle arm 2.2, a left forearm 3.2, and a left finger assembly that are rotatably connected end to end in sequence; the left middle arm 2.2 includes a left middle arm housing and a left middle arm belt drive mechanism disposed within the left middle arm housing, wherein the tail of the left middle arm housing is rotatably mounted on the left shoulder shaft 28 of the upper arm, and the tail of the left middle arm housing is fixedly connected to the left wheel adapter flange 29, and the left middle arm belt drive mechanism is connected between the left shoulder shaft 28 of the upper arm and the left forearm 3.2; when the left middle arm housing rotates, the left middle arm belt drive mechanism drives the left forearm 3.2 to rotate.

[0040] The left forearm 3.2 includes a left forearm housing 37 and a left forearm belt drive mechanism disposed within the left forearm housing 37. The tail of the left forearm housing 37 is connected to the left middle arm belt drive mechanism, and the left forearm belt drive mechanism is connected to the left finger assembly. When the left forearm housing 37 rotates, the left forearm belt drive mechanism drives the left finger assembly to rotate.

[0041] Specifically, the left middle arm belt drive mechanism includes a left middle arm large pulley 30, a left middle arm steel belt 32, a left middle arm small pulley shaft 33, and a left middle arm small pulley 34. The left middle arm large pulley 30 is fixed to the left shoulder shaft 28 of the large arm via a left arm expansion sleeve 31. The left middle arm small pulley shaft 33 is fixed to the head end of the left forearm housing 37. The left middle arm small pulley 34 is rotatably mounted on the left middle arm small pulley shaft 33 and is connected to the left middle arm large pulley 30 via the left middle arm steel belt 32. The tail end of the left forearm housing 37 is rotatably connected to the left middle arm small pulley shaft 33 and is fixedly connected to the left middle arm small pulley 34. When the left middle arm housing rotates, the left middle arm steel belt 32 drives the left middle arm small pulley 34 to rotate planetarily around the left middle arm large pulley 30, thereby driving the left forearm 3.2 to rotate.

[0042] Specifically, the left forearm belt drive mechanism includes a left forearm small pulley 35, a left forearm steel belt 36, and a left forearm large pulley 38. The left forearm small pulley 35 is fixed on the left middle arm small pulley shaft 33, and the left forearm large pulley 38 is rotatably mounted on the left forearm shoulder shaft provided at the head end of the left forearm housing 37. The left forearm large pulley 38 is connected to the left forearm small pulley 35 through the left forearm steel belt 36. The left finger assembly is fixedly connected to the left forearm large pulley 38. When the left forearm housing 37 rotates, the left forearm steel belt 36 drives the left forearm large pulley 38 to perform planetary motion around the left forearm small pulley 35, thereby driving the left finger assembly to rotate.

[0043] Furthermore, the diameters of the left middle arm large pulley 30 and the left middle arm small pulley 34 are 2:1; the diameters of the left forearm small pulley 35 and the left forearm large pulley 38 are 1:2; when the upper center wheel 25 rotates, the left finger assembly extends horizontally.

[0044] In an embodiment of the present invention, the left finger assembly includes a left finger connecting plate 5 and a left finger 6.2, wherein the tail end of the left finger connecting plate 5 is fixedly connected to the left forearm pulley 38, and the head end of the right finger connecting plate 4 is fixedly connected to the left finger 6.2. Preferably, the left finger 6.2 is made of ceramic.

[0045] This invention provides an independent dual-arm vacuum direct-drive robotic arm. The left and right arms share the same main arm, forming a wide-spaced left and right arm configuration. The left and right arms can extend and retract independently or simultaneously in parallel, improving production efficiency. Specifically, the right middle arm 2.1 and right forearm 3.1 synchronously drive the right arm connecting plate 4, driving the right finger 6.1 to transport wafers. Similarly, the left middle arm 2.2 and left forearm 3.2 synchronously drive the left arm connecting plate 5, driving the left finger 6.2 to transport wafers. The left and right arms do not interfere with each other and can perform independent transport actions; that is, when the left arm goes to station A, the right arm can independently go to station B or perform other actions. The connection points with the column use expansion sleeves for the intermediate shaft and inner shaft, reducing reliance on the axial dimensional accuracy of the column connecting shaft. The drive wheels of the left and right arms are coaxial with the rotation center of the main arm, enabling simultaneous lifting and lowering of the main arm and both arms.

[0046] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A standalone dual-arm vacuum direct-drive robotic arm, characterized by, The arm includes a large arm (1), a right arm and a left arm, wherein a middle part of the large arm (1) is provided with an arm interface for connecting with an external power source, the right arm and the left arm are respectively arranged at two ends of the large arm (1), and the right arm and the left arm are the same in structure; the external power source drives the large arm (1) to rotate around a central axis of the arm interface, and the external power source drives the right arm and the left arm to independently move respectively.

2. The independent dual-arm vacuum direct-drive robotic manipulator of claim 1, wherein, The large arm (1) includes a large arm shell (7) and right and left large arm belt transmission mechanisms arranged in the large arm shell (7); The arm interface includes coaxially arranged outer, intermediate and inner shafts which are independently rotatable, the outer shaft is connected with the middle part of the large arm shell (7) and drives the large arm shell (7) to rotate, the intermediate shaft is connected with the right arm through the right large arm belt transmission mechanism and drives the right arm to move, and the inner shaft is connected with the left arm through the left large arm belt transmission mechanism and drives the left arm to move.

3. The independent dual-arm vacuum direct-drive robotic manipulator of claim 2, wherein, The right large arm belt transmission mechanism includes a lower central wheel (9), a right large arm steel belt (10), a large arm right wheel (11), a large arm right shoulder shaft (12) and a right wheel conversion flange (13), wherein the lower central wheel (9) is fixed on the intermediate shaft, the large arm right shoulder shaft (12) is arranged at the right end of the large arm (1), the large arm right wheel (11) is rotatably arranged on the large arm right shoulder shaft (12), the large arm right wheel (11) is in transmission connection with the lower central wheel (9) through the right large arm steel belt (10), and the large arm right wheel (11) is connected with the right arm through the right wheel conversion flange (13); when the lower central wheel (9) rotates, the right arm is driven to rotate by the right large arm steel belt (10).

4. The independent dual-arm vacuum direct-drive robotic manipulator of claim 3, wherein, The right arm includes a right middle arm (2.1), a right small arm (3.1) and a right finger assembly which are sequentially and rotatably connected; The right middle arm (2.1) includes a right middle arm shell (15) and a right middle arm belt transmission mechanism arranged in the right middle arm shell (15), wherein the tail part of the right middle arm shell (15) is rotatably arranged on the large arm right shoulder shaft (12), the tail part of the right middle arm shell (15) is fixedly connected with the right wheel conversion flange (13), the right middle arm belt transmission mechanism is connected between the large arm right shoulder shaft (12) and the right small arm (3.1), and the right middle arm belt transmission mechanism drives the right small arm (3.1) to rotate when the right middle arm shell (15) rotates; The right small arm (3.1) includes a right small arm shell (22) and a right small arm belt transmission mechanism arranged in the right small arm shell (22); the tail part of the right small arm shell (22) is connected with the right middle arm belt transmission mechanism, the right small arm belt transmission mechanism is connected with the right finger assembly, and the right small arm belt transmission mechanism drives the right finger assembly to rotate when the right small arm shell (22) rotates.

5. The independent dual-arm vacuum direct-drive robotic manipulator of claim 4, wherein, The right middle arm belt transmission mechanism comprises a right middle arm large pulley (14), a right middle arm small pulley (17), a right middle arm steel belt (18) and a right middle arm small pulley shaft (20), wherein the right middle arm large pulley (14) is fixed on the large arm right shoulder shaft (12) through a right hand arm expansion sleeve (16), the right middle arm small pulley shaft (20) is fixed on the head end of a right middle arm shell (15), the right middle arm small pulley (17) is rotatably installed on the right middle arm small pulley shaft (20), and the right middle arm small pulley (17) is in transmission connection with the right middle arm large pulley (14) through the right middle arm steel belt (18); the tail end of the right small arm shell (22) is rotatably installed on the right middle arm small pulley shaft (20), and the tail end of the right small arm shell (22) is fixedly connected with the right middle arm small pulley (17). When the right middle arm shell (15) rotates, the right middle arm steel belt (18) drives the right middle arm small pulley (17) to make planetary rotation around the right middle arm large pulley (14), so that the right middle arm small pulley (17) drives the right small arm (3.1) to rotate.

6. The independent dual-arm vacuum direct-drive robotic manipulator of claim 5, wherein, The right small arm belt transmission mechanism comprises a right small arm small pulley (19), a right small arm steel belt (21) and a right small arm large pulley (23), wherein the right small arm small pulley (19) is fixed on the right middle arm small pulley shaft (20), the right small arm large pulley (23) is rotatably installed on the right small arm shoulder shaft provided at the head end of the right small arm shell (22), and the right small arm large pulley (23) is in transmission connection with the right small arm small pulley (19) through the right small arm steel belt (21); the right finger assembly is rotatably installed on the right small arm shoulder shaft, and the right finger assembly is fixedly connected with the right small arm large pulley (23). When the right small arm shell (22) rotates, the right small arm steel belt (21) drives the right small arm large pulley (23) to make planetary rotation around the right small arm small pulley (19), so that the right small arm large pulley (23) drives the right finger assembly to rotate.

7. The independent dual-arm vacuum direct-drive robotic manipulator of claim 6, wherein, The diameter of the right middle arm large pulley (14) to the right middle arm small pulley (17) is 2:1; the diameter of the right small arm small pulley (19) to the right small arm large pulley (23) is 1:2; when the lower central wheel (9) rotates, the right finger assembly horizontally extends out.

8. The independent dual-arm vacuum direct-drive robotic manipulator of claim 6, wherein, The right finger assembly comprises a right finger connecting plate (4) and a right finger (6.1), wherein the tail end of the right finger connecting plate (4) is fixedly connected with the right small arm large pulley (23), and the head end of the right finger connecting plate (4) is fixedly connected with the right finger (6.1).

9. The independent dual-arm vacuum direct-drive robotic manipulator of claim 8, wherein, The material of the right finger (6.1) is ceramic.

10. The independent dual-arm vacuum direct-drive robotic manipulator of claim 3, wherein, The left large arm belt transmission mechanism is the same in structure as the right large arm belt transmission mechanism.

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