Bellows assembly and industrial plant

Abstract

This application provides a bellows assembly and industrial equipment. It includes a first bellows, a second bellows, a first connector, and a second connector. The first bellows includes a first end and a third end, and has a first cavity. The second bellows is located outside the first bellows, and includes a second end and a fourth end, with the second end being farther away from the first end relative to the fourth end. The second bellows has a second cavity, and the cross-sectional area of ​​the first cavity is the same as the cross-sectional area of ​​the second cavity. The first connector connects the first end and the second end; the second connector connects the third end and the fourth end; at least one of the first connector and the second connector has an air passage that connects the first cavity and the second cavity. The technical solution of this application can avoid generating large tensile forces on the vacuum cavity, thus preventing uneven stress on the equipment.

Description

Technical Field

[0001] This application relates to the field of pipe connection technology, and in particular to a corrugated pipe assembly and industrial equipment. Background Technology

[0002] In precision equipment used in industries such as semiconductors, scientific instruments, chemicals, and pharmaceuticals, bellows are often used as shock-absorbing supports, connecting vacuum chambers and pipelines to compensate for their relative installation positions. This reduces vibrations transmitted to the vacuum chamber and improves the airtightness of the transported medium. However, due to the expansion and contraction characteristics of bellows, a large pressure difference between the inside and outside of the bellows can generate significant tensile forces on the vacuum chamber, causing uneven stress on the equipment and, in severe cases, potentially leading to equipment overturning. Summary of the Invention

[0003] The embodiments of this application provide a bellows assembly and industrial equipment that can still have good pressure self-balancing performance when there is a large pressure difference between the inside and outside of the bellows, so as to avoid generating a large tensile force on the vacuum cavity and causing uneven stress on the equipment.

[0004] In a first aspect, this application provides a bellows assembly, the bellows assembly comprising:

[0005] The first bellows includes a first end and a third end, and the first bellows is provided with a first cavity;

[0006] The second corrugated pipe is located outside the first corrugated pipe. The second corrugated pipe includes a second end and a fourth end. The second end is farther away from the first end relative to the fourth end. The second corrugated pipe is provided with a second cavity. The cross-sectional area of ​​the first cavity is the same as the cross-sectional area of ​​the second cavity.

[0007] A first connector, the first connector connecting the first end and the second end; and

[0008] A second connector connects the third end and the fourth end;

[0009] At least one of the first connector and the second connector is provided with an air passage, which connects the first cavity and the second cavity.

[0010] When the first cavity of the first bellows and the second cavity of the second bellows are connected to each other through an air passage, the pressure in the first cavity of the first bellows and the pressure in the second cavity of the second bellows can be kept consistent through the air passage. The pressure in the first cavity refers to the force exerted by the fluid (gas or liquid) inside the first cavity on a unit area of ​​the cavity wall. The pressure in the second cavity refers to the force exerted by the fluid (gas or liquid) inside the second cavity on a unit area of ​​the cavity wall. Keeping the pressure in the first cavity and the pressure in the second cavity the same through the air passage means that the pressure in the first cavity and the pressure in the second cavity can be dynamically maintained equal through the air passage to maintain pressure balance and stability between the two cavities. This equality allows for a certain tolerance range.

[0011] In the nested arrangement of the first and second corrugated pipes, when the innermost first corrugated pipe is connected to a vacuum device (such as a vacuum pump) to create a vacuum environment in the first chamber, the pressure inside the first corrugated pipe is lower than the external atmospheric pressure. This causes the two ends of the first corrugated pipe to deform towards the middle, thus exerting a certain force on the third end. At this time, the first chamber of the first corrugated pipe and the second chamber of the second corrugated pipe are interconnected through an air passage, maintaining consistent pressure. Since the air pressure in the second corrugated pipe is the same as that in the first corrugated pipe, under the influence of external atmospheric pressure, a certain force can be exerted on the fourth end of the second corrugated pipe located on the outer side. This force acts on the first corrugated pipe through the second connector, achieving force balance with the force exerted on the first corrugated pipe. The first end of the first corrugated pipe and the second end of the second corrugated pipe also achieve force balance through the first connector, with the same principle as the third end of the first corrugated pipe and the fourth end of the second corrugated pipe, which will not be elaborated here.

[0012] Understandably, by configuring the bellows assembly as a nested double-bellows structure with a first bellows and a second bellows, the first chamber of the first bellows and the second chamber of the second bellows can be kept in communication using air passages located within the first and / or second connectors connecting the first and second bellows. This ensures that the pressure in each chamber of the inner and outer bellows remains consistent, maintaining pressure balance between the chambers. Furthermore, the air passages being built into the first and / or second connectors allows for a concealed air passage layout, resulting in a more compact structure.

[0013] On the one hand, setting the pressure in the first chamber of the first bellows and the pressure in the second chamber of the second bellows to be the same ensures that the pressure difference between the first chamber and the external atmospheric pressure, as well as the pressure difference between the second chamber and the external atmospheric pressure, also remain the same, thereby controlling the balance of forces between the first and second bellows. On the other hand, setting the pressure in the first chamber of the first bellows and the pressure in the second chamber of the second bellows to be the same also facilitates simultaneous vacuuming of both using the same vacuum equipment (such as a vacuum pump).

[0014] Furthermore, in a vacuum environment, the axial tensile force (i.e., pulling force) of the bellows can satisfy the following relationship:

[0015] .

[0016] Where F is the axial tensile force of the bellows, in N; ΔP is the pressure difference between the inner cavity of the bellows and the external environment, in Pa; P1 is standard atmospheric pressure, in Pa; P2 is the air pressure inside the bellows, in Pa; and S is the cross-sectional area of ​​the inner cavity of the bellows, in m². 2 .

[0017] Based on the above relationship and the fact that the pressure difference between the first cavity and the external environment and the pressure difference between the second cavity and the external environment are the same, it can be seen that by making the cross-sectional area of ​​the first cavity of the first bellows the same as the cross-sectional area of ​​the second cavity of the second bellows, it can be ensured that the inner and outer bellows as a whole will not generate external tensile force under different pipeline pressure scenarios, thus achieving force transmission balance. This gives the bellows assembly 100 good pressure self-balancing performance and avoids the problem of uneven force and overturning of the vacuum device caused by generating a large tensile force on it.

[0018] In one possible implementation, the first connector includes a first end cap, a second end cap, and a sleeve;

[0019] The first end cap is fixedly connected to the first end, the second end cap is fixedly connected to the second end, the sleeve is connected between the first end cap and the second end cap, and the air passage is located inside the first end cap, the sleeve and the second end cap.

[0020] Understandably, because the air duct is located inside the first connector, a concealed layout of the air duct can be achieved. This not only improves the overall airtightness of the air duct but also provides a certain degree of support and protection, effectively preventing damage to the air duct from external structures. Furthermore, since the first cavity of the first bellows and the second cavity of the second bellows can be interconnected through the air duct inside the first connector, this internal air duct design integrates the first connector with the air duct, effectively preventing external leakage caused by exposed joints due to external interconnecting pipes. In addition, the internal air duct structure is simple, thus reducing the need for additional interconnecting pipe joints in the bellows assembly, resulting in a simpler structural design and reducing the risk of seal failure.

[0021] In one possible implementation, the airway includes a first channel, a second channel, and a third channel;

[0022] The first channel is located inside the first end cap, which is annular. The entrance of the first channel is located inside the first end cap and communicates with the first cavity. The outlet of the first channel is located on the surface of the first end cap facing the sleeve.

[0023] The second channel is located inside the sleeve, the inlet of the second channel is located on the surface of the sleeve facing the first end cap and communicates with the outlet of the first channel, the outlet of the second channel is located on the surface of the sleeve facing the second end cap, and the second channel extends along the axial direction of the sleeve;

[0024] The third channel is located inside the second end cap. The inlet of the third channel is located on the surface of the second end cap facing the sleeve and communicates with the outlet of the second channel. The outlet of the third channel is located on the surface of the second end cap facing the second bellows and communicates with the second cavity.

[0025] It is understandable that by dividing the air passage into three channels—the first channel, the second channel, and the third channel—the air passage can be evenly distributed in the first end cap, the sleeve, and the second end cap. This achieves a structural arrangement where the air passage is built into the first connector and evenly distributed inside. This is beneficial for leveraging the synergistic advantages of the first connector and the air passage, optimizing the spatial layout of the bellows assembly, and making the components in the bellows assembly more compact.

[0026] In one possible implementation, the second bellows includes a first sub-tube and a second sub-tube;

[0027] The first sub-tube is sleeved on the outside of the first corrugated pipe and connected to the first connector;

[0028] The second sub-tube is sleeved on the outside of the first sub-tube and connected to the first connector. The gap area between the second sub-tube and the first sub-tube forms the second cavity.

[0029] Understandably, by making the second bellows a nested structure of double bellows, the gap area between the nested first and second sub-tubes can be used to form an annular second cavity. The annular second cavity structure is simple, less complex, and occupies less space. While ensuring that the cross-sectional area of ​​the first cavity is the same as that of the second cavity, the overall dimensions of the bellows assembly can be reduced to the minimum. Furthermore, while maintaining pressure balance between the second and first bellows, the second bellows as a whole can exhibit better balance, stress consistency, and reliability.

[0030] In one possible implementation, the sleeve is fitted onto the outside of the second bellows, and the second connector includes a first flange and a second flange.

[0031] The first flange is fixedly connected to the third end, and is located at both ends of the first bellows along with the first connecting piece;

[0032] The second flange is sleeved on the outside of the first bellows and fixedly connected to the fourth end. The second flange also passes through the sleeve and can close the opening of the second cavity away from the second end cover.

[0033] Understandably, by having the second flange and the second end cap of the first connector respectively close the two openings of the second cavity of the second bellows, the second cavity of the second bellows can be made a closed cavity, ensuring good sealing performance and preventing leakage. Furthermore, by including both the first and second flanges in the second connector, it is not only convenient to connect the first and second bellows together, but also to easily fix the bellows assembly to other equipment, thus enabling the bellows assembly to be connected to other devices.

[0034] In one possible implementation, the first end cap is provided with a plurality of slots, the plurality of slots being arranged at intervals along the circumferential direction of the first end cap, each slot penetrating the first end cap along the thickness direction of the first end cap and penetrating the outer edge of the first end cap along the radial direction of the first end cap.

[0035] The sleeve has multiple notches, which are spaced apart along the circumferential direction of the sleeve. Each notch penetrates the sleeve along the thickness direction and communicates with a slot.

[0036] The second flange includes a second body and a plurality of second fixing parts. The second body is connected to the fourth end and closes the opening of the second cavity away from the second end cover. The plurality of second fixing parts are all connected to the second body and are arranged at intervals along the circumferential direction of the second flange. Each second fixing part passes through one of the notches.

[0037] Understandably, by creating multiple notches on the sleeve corresponding to the slots on the first end cap, and allowing the multiple second fixing parts of the second flange to pass through these notches, the multiple second fixing parts of the second flange can be arranged radially with the first end cap in the bellows assembly. When the multiple second fixing parts of the second flange pass through the multiple notches on the sleeve, stress can be evenly distributed along the circumference of the second flange among the multiple second fixing parts, avoiding material fatigue or damage to the connection points due to stress concentration, and extending the service life of the second flange. Furthermore, allowing the multiple second fixing parts of the second flange to pass through the multiple notches on the sleeve provides more connection points for the second flange on the outside of the sleeve. These connection points can evenly distribute the load on the second flange, improving the operational reliability of the second flange.

[0038] In one possible implementation, the second connector further includes a displacement compensation mechanism connected between the first flange and the second flange, the displacement compensation mechanism including a connecting rod, a ball head, and a ball socket connecting seat;

[0039] The connecting rod is located between the first flange and the second flange;

[0040] The ball socket connector is fixedly connected to the first flange and / or the second flange;

[0041] The ball head is located between the connecting rod and the ball-and-socket connector. The ball head is fixedly connected to the connecting rod and rotatably connected to the ball-and-socket connector. The ball head and the ball-and-socket connector are in spherical fit.

[0042] Understandably, the multi-degree-of-freedom rotation of the ball head within the ball-and-socket connector allows for adaptive adjustment of the relative positions of the first and second bellows, compensating for axial misalignment (such as radial misalignment along the bellows assembly). This ensures alignment of the central axis of the first and second bellows, guaranteeing assembly precision and improving tolerance when radial misalignment occurs during installation. It effectively prevents installation failures due to radial deviation caused by rigid interconnection. Furthermore, the spherical fit between the ball head and the ball-and-socket connector distributes the load evenly across the spherical surface. This uniform force distribution reduces localized stress concentration, improving impact resistance and extending the service life of all components.

[0043] In one possible implementation, the bellows assembly further includes a vibration damping structure that can be connected to at least one of the following: between the first flange and the displacement compensation mechanism, on the side of the first flange away from the displacement compensation mechanism, between the second flange and the displacement compensation mechanism, and on the side of the second flange away from the displacement compensation mechanism.

[0044] It is understandable that setting vibration damping structures at the aforementioned locations for isolation can reduce vibration along the vibration transmission path of "second bellows-second flange-displacement compensation mechanism-first flange", making it difficult for vibration to be transmitted from one end of the bellows assembly to the other, effectively isolating vibration transmission between the equipment connected to both ends of the bellows assembly, avoiding damage to the precision of the connected equipment by vibration, and improving the overall vibration isolation effect of the bellows assembly.

[0045] In one possible implementation, the first bellows is a welded bellows, and / or the second bellows is a welded bellows.

[0046] Understandably, welded bellows have advantages such as low stiffness, excellent dynamic performance, and good vibration reduction performance, which can reduce the overall stiffness of the bellows assembly and reduce the vibration transmission of the bellows assembly itself.

[0047] Secondly, this application also provides an industrial device, which includes a vacuum device, a vacuum pipeline and a bellows assembly as described above. The vacuum device is provided with a vacuum chamber, and the bellows assembly is connected between the vacuum device and the vacuum pipeline, and communicates between the vacuum chamber and the vacuum pipeline. Attached Figure Description

[0048] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0049] Figure 1 This is a simplified structural diagram of the industrial equipment provided in the embodiments of this application;

[0050] Figure 2 This is a schematic diagram of the bellows assembly provided in an embodiment of this application;

[0051] Figure 3 This is a simplified structural diagram of a bellows assembly provided in an embodiment of this application;

[0052] Figure 4 This is a simplified schematic diagram of another structure of the bellows assembly provided in the embodiments of this application;

[0053] Figure 5 yes Figure 2The diagram shows the assembly of the first and second bellows of the bellows assembly.

[0054] Figure 6 yes Figure 2 An exploded view of the first and second bellows of the bellows assembly shown.

[0055] Figure 7 It is along Figure 2 A schematic diagram of the cross-section obtained by cutting along section line AA;

[0056] Figure 8 yes Figure 2 A schematic diagram of the structure of the first connector of the bellows assembly at one angle;

[0057] Figure 9 yes Figure 8 An exploded view of the first connector shown.

[0058] Figure 10 It is along Figure 8 A schematic diagram of the cross-section obtained by cutting along section line BB;

[0059] Figure 11 It is along Figure 2 A schematic diagram of a cross-section at an angle obtained by cutting along the cutting line CC;

[0060] Figure 12 yes Figure 2 The diagram shows the structure of the first flange and the second flange of the second connector.

[0061] Figure 13 It is along Figure 2 The diagram shows a cross-sectional view of a portion of the structure obtained by cutting along section line CC at another angle.

[0062] Explanation of reference numerals in the attached figures:

[0063] 10-First bellows; 11-First cavity; 12-First end; 13-Third end;

[0064] 100-Bellwall assembly;

[0065] 20 - Second bellows; 21 - Second cavity; 22 - Second end; 23 - Fourth end; 24 - First sub-tube; 25 - Second sub-tube;

[0066] 200 - Industrial equipment; 210 - Vacuum device; 220 - Vacuum pipeline; 230 - Vibration isolation base;

[0067] 2110 - Vacuum cavity;

[0068] 30-First connector; 31-First end cap; 32-Second end cap; 33-Sleeve; 34-Air passage;

[0069] 311 - Groove; 331 - Notch; 341 - First channel; 342 - Second channel; 343 - Third channel;

[0070] 40 - Second connecting piece; 41 - First flange; 42 - Second flange; 43 - Displacement compensation mechanism;

[0071] 411-First main body; 412-First fixing part; 421-Second main body; 422-Second fixing part; 431-Connecting rod; 432-Ball head; 433-Ball socket connecting seat;

[0072] 50 - Vibration-damping structure. Detailed Implementation

[0073] For ease of understanding, the terminology used in the embodiments of this application will be explained first.

[0074] And / or: This is simply a way of describing the relationship between related objects. It indicates that there can be three kinds of relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone.

[0075] Multiple: refers to two or more.

[0076] Connection: should be interpreted broadly. For example, the connection between A and B can be a direct connection between A and B, or an indirect connection between A and B through an intermediary.

[0077] Circumferential direction: The ring-shaped direction around the central axis, which is perpendicular to both the axial and radial directions.

[0078] Axial direction: A straight line along the central axis, perpendicular to both the circumferential and radial directions.

[0079] Radial direction: A straight line extending outward from the central axis, perpendicular to both the axial and circumferential directions.

[0080] "Center", "up", "down", "vertical", "horizontal", "inner", "outer", "left", "side" and other terms indicating orientation or positional relationship: These indicated orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the embodiments of this application and simplifying the description, and are not intended to indicate or imply that the parts or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the embodiments of this application.

[0081] Relative orientation: This refers to orientation relative to each other, but does not necessarily mean that the orientations of the two components must be completely opposite. For example, if the first component and the second component are positioned relative to each other, it means that the first component is roughly facing the second component. However, in some cases, the orientation of the components may have a certain tilt angle.

[0082] The terms "first," "second," "third," and other various designations are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. The data used in this way can be interchanged where appropriate so that the embodiments described herein can be implemented in a sequence other than that illustrated or described herein.

[0083] "Including", "having", and any variations thereof: means to cover non-exclusive inclusion, for example, a system, product, or device that includes a series of units is not necessarily limited to those units that are explicitly listed, but may include other units that are not explicitly listed or that are inherent to such products or devices.

[0084] Furthermore, the various numerical designations used in the embodiments of this application are merely for descriptive convenience and are not intended to limit the scope of protection of the embodiments of this application. The order of the sequence numbers used in the embodiments of this application does not imply a sequential execution order; the execution order of each process should be determined by its function and internal logic. Any embodiment or design scheme described as "exemplary" or "for example" should not be construed as being more preferred or advantageous than other embodiments or design schemes. Specifically, the use of terms such as "exemplary" or "for example" is intended to present related concepts in a concrete manner for ease of understanding. Unless otherwise specified or in accordance with logical conflicts, the terminology and / or descriptions between different embodiments of this application are consistent.

[0085] The specific embodiments of this application will now be clearly described in conjunction with the accompanying drawings.

[0086] Embodiments of this application provide a bellows assembly and industrial equipment.

[0087] Industrial equipment can include, but is not limited to, vacuum-related equipment (such as vacuum pumps, vacuum valves, vacuum transmission systems, etc.), gas conveying and processing equipment (such as special gas conveying systems, chemical vapor deposition equipment, etc.), and process equipment (such as etching equipment, ion implantation equipment, etc.).

[0088] Please see Figure 1 , Figure 1 This is a simplified structural diagram of the industrial equipment 200 provided in an embodiment of this application. Wherein, Figure 1 The purpose is merely to illustratively describe the connection relationships of the various structures in industrial equipment 200, and not to specifically limit the connection positions, specific constructions, or quantities of each structure. Figure 1The illustrated structure does not constitute a specific limitation on industrial equipment 200.

[0089] Industrial equipment 200 may include a vacuum device 210, a bellows assembly 100, a vacuum pipe 220, and a vacuum pump (not shown). The vacuum device 210 may contain a vacuum chamber 2110. The vacuum chamber 2110 can be used for various processes in a high vacuum environment, such as etching and thin film deposition. The vacuum device 210 can be placed on a vibration isolation base 230 to reduce vibration interference with the normal operation of the vacuum device 210 and meet its vibration isolation requirements. The bellows assembly 100 can connect the vacuum device 210 and the vacuum pipe 220, and connect the vacuum chamber 2110 of the vacuum device 210 and the vacuum pipe 220. The bellows assembly 100 provides a flexible connection between the vacuum device 210 and the vacuum pipe 220, and is used for vibration isolation, sealing, and displacement compensation between the two. Vacuum conduit 220 can be connected between bellows assembly 100 and vacuum pump, and connects bellows assembly 100 and vacuum pump. The interior of vacuum conduit 220 can be set to a vacuum state or a non-vacuum state according to the production process requirements of the product. Vacuum pump can be used to maintain the vacuum environment in vacuum chamber 2110 of vacuum device 210.

[0090] Understandably, as described in the background section, in precision equipment, the bellows connecting the vacuum chamber and the vacuum pipeline have expansion and contraction characteristics. To meet tolerance requirements or vibration isolation requirements during pipeline interconnection, large-diameter bellows are often used to absorb tolerances or isolate vibrations. However, larger diameter bellows also generate greater tensile forces. This results in a significant pressure difference between the inside and outside of the bellows, causing the bellows to exert a tremendous tensile force on the vacuum chamber, leading to uneven stress on the equipment and, in severe cases, potentially causing the equipment to overturn.

[0091] In view of this, embodiments of this application provide a bellows assembly 100 that can still have good pressure self-balancing performance in environments where there is a large pressure difference between the inside and outside of the bellows (such as when the inside of the bellows is in a vacuum state), so as to avoid generating a large pulling force on the vacuum chamber 2110, which would cause the equipment to overturn due to uneven force.

[0092] The bellows assembly 100 is applicable not only to the industrial equipment 200 mentioned above, but also to equipment requiring high positioning accuracy or high performance under vacuum conditions. For example, the bellows assembly 100 may be suitable for the chemical industry, such as for conveying corrosive media. It may also be suitable for the mechanical equipment industry, such as for connecting power, hydraulic, and pneumatic pipelines. Furthermore, it may be suitable for the automation control industry, such as for connecting fluid control and temperature control pipelines. Finally, it may be suitable for the aerospace industry, such as for compensating hydraulic and fuel lines.

[0093] Please refer to the following: Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 , Figure 2 This is a schematic diagram of the structure of the bellows assembly 100 provided in an embodiment of this application. Figure 3 This is a simplified structural diagram of a bellows assembly 100 provided in an embodiment of this application. Figure 4 This is a simplified schematic diagram of another structure of the bellows assembly 100 provided in the embodiments of this application. Figure 5 yes Figure 2 The diagram shows the assembly of the first bellows 10 and the second bellows 20 of the bellows assembly 100. Figure 6 yes Figure 2 An exploded view of the first bellows 10 and the second bellows 20 of the bellows assembly 100 shown.

[0094] The various structures of the bellows assembly 100 are illustrated in the form of a simplified mechanism diagram. Figure 3 and Figure 4 In, for example, Figure 2 The various structures of the bellows assembly 100 are illustrated in the simplified mechanism diagram. Figure 3 middle, Figure 3 It can have more than Figure 2 The bellows assembly shown has 100 fewer components. Additionally, Figures 2-4 The purpose is merely to schematically illustrate the connection relationships of the components in the bellows assembly 100, and is not to specifically limit the connection positions, specific structures, or quantities of each component. Furthermore, the structure illustrated in this embodiment does not constitute a specific limitation on the bellows assembly 100. In other embodiments of this application, the bellows assembly 100 may include components that are more... Figures 2-4 This may involve more or fewer components, or combining certain components, or splitting certain components, or different component arrangements.

[0095] The bellows assembly 100 may include a first bellows 10, a second bellows 20, a first connector 30, and a second connector 40. In the radial direction of the bellows assembly 100, the first bellows 10, the second bellows 20, and the first connector 30 may be nested sequentially from the inside to the outside.

[0096] The first bellows 10 may include a first end 12 and a third end 13. The first bellows 10 may have a first cavity 11. The first cavity 11 may extend along the axial direction of the first bellows 10 and extend from the first end 12 to the third end 13. The first cavity 11 may be a cavity that extends through both ends. One opening of the first cavity 11 may be located at the first end 12, and the other opening of the first cavity 11 may be located at the third end 13.

[0097] The second bellows 20 can be located outside the first bellows 10. Specifically, as follows: Figure 3 As shown, the second corrugated pipe 20 can be annular and sleeved on the outside of the first corrugated pipe 10, or, as... Figure 4 As shown, the second bellows 20 can be non-annular and is located outside the first bellows 10. The second bellows 20 may include a second end 22 and a fourth end 23. The second end 22 may be located away from the first end 12 of the first bellows 10 relative to the fourth end 23. The fourth end 23 may be located towards the first end 12 of the first bellows 10 relative to the second end 22. The second bellows 20 may be provided with a second cavity 21. The second cavity 21 may extend along the axial direction of the second bellows 20 and extend from the second end 22 to the fourth end 23. The second cavity 21 may also extend along the circumferential direction of the second bellows 20 and surround the periphery of the first bellows 10. That is, the second cavity 21 can be an annular cavity. One opening of the second cavity 21 may be located at the second end 22, and the other opening of the second cavity 21 may be located at the fourth end 23. The cross-sectional area of ​​the second cavity 21 may be the same as the cross-sectional area of ​​the first cavity 11. The fact that the cross-sectional area of ​​the second cavity 21 is the same as that of the first cavity 11 means that the cross-sectional area of ​​the second cavity 21 and the first cavity 11 can be exactly the same, or within the allowable area difference range.

[0098] The first connector 30 can be sleeved on the outside of the second corrugated pipe 20 and connect the first end 12 of the first corrugated pipe 10 and the second end 22 of the second corrugated pipe 20.

[0099] The second connector 40 can connect to the third end 13 of the first bellows 10 and the fourth end 23 of the second bellows 20. At least one of the first connector 30 and the second connector 40 can be provided with an air passage 34. Figure 3 and Figure 4The illustration is based on an example where the air passage 34 is located in the first connecting member 30, but is not limited thereto. The air passage 34 can connect between the first cavity 11 of the first bellows 10 and the second cavity 21 of the second bellows 20, and connect the first cavity 11 and the second cavity 21. The pressure in the first cavity 11 and the pressure in the second cavity 21 can be kept the same through the air passage 34. Specifically, the pressure in the first cavity 11 can be less than atmospheric pressure, and the pressure in the first cavity 11 can be a vacuum pressure. The pressure in the second cavity 21 can also be less than atmospheric pressure, and the pressure in the second cavity 21 can be a vacuum pressure. The vacuum pressure in the first cavity 11 and the vacuum pressure in the second cavity 21 can be kept the same through the air passage 34. That is, the first cavity 11 and the second cavity 21 can have the same degree of vacuum.

[0100] The pressure in the first chamber 11 refers to the force exerted by the fluid (gas or liquid) inside the first chamber 11 on a unit area of ​​its wall surface. Similarly, the pressure in the second chamber 21 refers to the force exerted by the fluid (gas or liquid) inside the second chamber 21 on a unit area of ​​its wall surface. Maintaining the same pressure in the first chamber 11 and the second chamber 21 through the air passage 34 means that the pressures in the first chamber 11 and the second chamber 21 are dynamically equalized through the air passage 34 to maintain pressure balance and stability between the two chambers. This equality allows for a certain tolerance range.

[0101] In the nested arrangement of the first bellows 10 and the second bellows 20, when the inner bellows 10 is connected to a vacuum device (such as a vacuum pump) to create a vacuum environment in the first cavity 11, the pressure inside the first bellows 10 is lower than the external atmospheric pressure. This causes the two ends of the first bellows 10 to deform towards the middle, thus exerting a certain force on the third end 13 (e.g., Figure 3 and Figure 4 The pulling force F to the right is shown. At this time, the first cavity 11 of the first bellows 10 and the second cavity 21 of the second bellows 20 are interconnected through the air passage 34 and maintain the same pressure. Since the air pressure of the second bellows 20 is the same as that of the first bellows 10, a certain force can be generated on the fourth end 23 of the second bellows 20 located on the outside under the action of the external atmospheric pressure (such as...). Figure 3 and Figure 4 The leftward thrust F' (as shown) acts on the first bellows 10 through the second connector 40, achieving force balance with the force acting on the first bellows 10. The first end 12 of the first bellows 10 and the second end 22 of the second bellows 20 also achieve force balance through the first connector 30, the principle of which is the same as that of the third end 13 of the first bellows 10 and the fourth end 23 of the second bellows 20, and will not be described again here.

[0102] It is understandable that by setting the bellows assembly 100 as a double bellows structure with the first bellows 10 and the second bellows 20 nested inside and outside, the air passage 34 provided in the first connector 30 and / or the second connector 40 connected between the first bellows 10 and the second bellows 20 can be used to keep the first cavity 11 of the first bellows 10 and the second cavity 21 of the second bellows 20 in communication, so that the pressure in each cavity of the inner and outer bellows can be kept consistent, thereby maintaining the pressure balance between the cavities.

[0103] Setting the pressure in the first chamber 11 of the first bellows 10 and the pressure in the second chamber 21 of the second bellows 20 to be the same ensures that the pressure difference between the first chamber 11 and the external atmospheric pressure, and the pressure difference between the second chamber 21 and the external atmospheric pressure, are also kept the same, thereby controlling the balance of forces between the first bellows 10 and the second bellows 20.

[0104] Furthermore, in a vacuum environment, the axial tensile force (i.e., pulling force) of the bellows can satisfy the following relationship:

[0105] .

[0106] Where F is the axial tensile force of the bellows, in N; ΔP is the pressure difference between the inner cavity of the bellows and the external environment, in Pa; P1 is standard atmospheric pressure, in Pa; P2 is the air pressure inside the bellows, in Pa; and S is the cross-sectional area of ​​the inner cavity of the bellows, in m². 2 .

[0107] Based on the above relationship and the fact that the pressure difference between the first cavity 11 and the external environment and the pressure difference between the second cavity 21 and the external environment are the same, it can be seen that by making the cross-sectional area of ​​the first cavity 11 of the first bellows 10 the same as the cross-sectional area of ​​the second cavity 21 of the second bellows 20, it can be ensured that the inner and outer bellows as a whole will not generate external tensile force under different pipeline pressure scenarios, thus achieving force transmission balance. This gives the bellows assembly 100 good pressure self-balancing performance and avoids the problem of uneven force and overturning of the vacuum device 210 due to the large tensile force generated on it.

[0108] The relative positions of the components in the bellows assembly 100 have been briefly described above. The following section will describe in detail the structure of each component in the bellows assembly 100 and the connection relationships between them, with reference to the accompanying drawings.

[0109] Please refer to the following: Figure 1 , Figure 5 and Figure 6The first bellows 10 can be a welded bellows. Welded bellows have advantages such as low stiffness, excellent dynamic performance, and good vibration reduction performance, which can reduce the overall stiffness of the bellows assembly 100 and reduce the vibration transmission of the bellows assembly 100 itself. For example, the first bellows 10 can be a diaphragm-type welded bellows, which has even lower stiffness and can meet the low vibration transmission requirements of high-precision equipment. In some other embodiments, the first bellows 10 can also be a molded bellows.

[0110] For example, the first bellows 10 can be connected between the vacuum chamber 2110 and the vacuum pump of the vacuum device 210, and communicate between the vacuum chamber 2110 and the vacuum pump. One opening of the first cavity 11 of the first bellows 10 can communicate with one of the vacuum chamber 2110 and the vacuum pump, and the other opening of the first cavity 11 can communicate with the other of the vacuum chamber 2110 and the vacuum pump.

[0111] The second bellows 20 can be a welded bellows. Welded bellows have advantages such as low stiffness, excellent dynamic performance, and good vibration reduction performance, which can reduce the overall stiffness of the bellows assembly 100 and reduce the vibration transmission of the bellows assembly 100 itself. For example, the second bellows 20 can be a diaphragm-type welded bellows, which has even lower stiffness and can meet the low vibration transmission requirements of high-precision equipment. In some other embodiments, the second bellows 20 can also be a molded bellows.

[0112] Please continue reading. Figure 5 and Figure 6 The second bellows 20 may include a first sub-tube 24 and a second sub-tube 25. The first sub-tube 24 may be sleeved on the outside of the first bellows 10 and have a gap or contact with the first bellows 10. The first sub-tube 24 may be coaxially arranged with the first bellows 10. The second sub-tube 25 may be sleeved on the outside of the first sub-tube 24 and spaced apart from the first sub-tube 24. The second sub-tube 25 may be coaxially arranged with the first sub-tube 24. In the radial direction of the bellows assembly 100, the first bellows 10, the first sub-tube 24, and the second sub-tube 25 may be arranged sequentially from the inside to the outside and are all coaxially arranged. The gap region between the second sub-tube 25 and the first sub-tube 24 may form the second cavity 21 of the second bellows 20 described above. Exemplarily, the first sub-tube 24 and the second sub-tube 25 may both be located outside the first end 12 of the first bellows 10.

[0113] It is understandable that by creating a certain gap between the first sub-tube 24 and the first bellows 10, not only can a certain deformation space be provided for the first bellows 10 to meet its contraction and elongation requirements, but the contraction of the first bellows 10 and the second bellows 20 will also prevent interference, resulting in better reliability. Furthermore, by making the second bellows 20 a nested structure of double bellows, the gap area between the nested first sub-tube 24 and the second sub-tube 25 can be used to form an annular second cavity 21. The annular second cavity 21 has a simple structure and low complexity. While ensuring that the cross-sectional area of ​​the first cavity 11 is the same as that of the second cavity 21, the overall dimensions of the bellows assembly 100 can be reduced to the maximum extent. Moreover, while ensuring pressure balance between the second bellows 20 and the first bellows 10, the second bellows 20 as a whole can have better balance, stress consistency, and reliability.

[0114] Please refer to the following: Figure 7 , Figure 8 and Figure 9 , Figure 7 It is along Figure 2 The diagram shows a cross-section obtained by cutting along section line AA. Figure 8 yes Figure 2 The diagram shows a structural schematic of the first connector 30 of the bellows assembly 100 at an angle. Figure 9 yes Figure 8 The exploded structural diagram of the first connector 30 is shown.

[0115] The first connector 30 can be located at the first end 12 of the first corrugated pipe 10 and cover the outside of the second corrugated pipe 20. The first connector 30 can be connected to both the first sub-pipe 24 and the second sub-pipe 25 of the second corrugated pipe 20. For example, the first connector 30 can be fixedly connected to the first end 12 of the first corrugated pipe 10 and / or the second end 22 of the second corrugated pipe 20 by welding, bonding, screwing, or other methods.

[0116] The first connector 30 may include a first end cap 31, a second end cap 32, and a sleeve 33. The first end cap 31 may be annular. The first end cap 31 may be fitted onto the outside of the first bellows 10 and fixedly connected to the first end 12 of the first bellows 10. The second end cap 32 may be fitted onto the outside of the first bellows 10 and fixedly connected to the second end 22 of the second bellows 20. The second end cap 32 may close the opening of the second cavity 21 of the second bellows 20 located at the second end 22 (i.e., the opening of the second cavity 21 of the second bellows 20 facing the air passage 34). The sleeve 33 may be connected between the first end cap 31 and the second end cap 32 and fitted onto the outside of the second bellows 20. In some other embodiments, the sleeve 33 may also be located between the first bellows 10 and the second bellows 20.

[0117] For example, the first end cap 31 may have a central annular shape and multiple fan-shaped edge areas. The second end cap 32 may have an annular shape. It should be understood that the shapes of the first end cap 31 and the second end cap 32 are not limited to the shapes shown in the figures, and may also be other shapes such as polygons or irregular shapes, which will not be listed here.

[0118] In the embodiments of this application, the air passage 34 can be located inside the first end cap 31, the second end cap 32, and the sleeve 33. The number of air passages 34 can be one or more. When there are multiple air passages 34, their structures can be similar, identical, or different. The multiple air passages 34 can be spaced apart along the circumferential direction of the first connector 30. By providing multiple air passages 34 in a distributed layout, the overall cross-sectional area of ​​the air passages 34 can be increased, reducing the hysteresis of pressure balance between the first bellows 10 and the second bellows 20 and the pressure difference in the pipeline. This allows the first bellows 10 and the second bellows 20 to quickly achieve pressure balance, thereby achieving overall force balance in the bellows assembly 100. For example, the number of air passages 34 can be four. The four air passages 34 can be spaced apart along the circumferential direction of the first connector 30.

[0119] Based on the above description, it should be understood that since the air passage 34 is arranged inside the first connector 30, a concealed layout of the air passage 34 can be achieved. This not only improves the overall airtightness of the air passage 34 but also provides certain support and protection for the air passage 34, effectively preventing the air passage 34 from being damaged by external structures. Furthermore, since the first cavity 11 of the first bellows 10 and the second cavity 21 of the second bellows 20 can be interconnected through the air passage 34 inside the first connector 30, this internal air passage 34 form can integrate the first connector 30 and the air passage 34 together, effectively avoiding the problem of external leakage caused by exposed joints due to external interconnecting pipes. In addition, the internal air passage 34 has a simple structure, thus reducing the need for additional interconnecting pipe joints in the bellows assembly 100, resulting in a simpler structural design and reducing the risk of seal failure.

[0120] The following description of the structure of airway 34 will be based on one example. Unless otherwise specified, the following description of one airway 34 can be applied to other airways 34.

[0121] Please continue reading. Figure 7 , Figure 9 and Figure 10 , Figure 10 It is along Figure 8 The diagram shows the cross-section obtained by cutting along section line BB.

[0122] The air passage 34 may include a first passage 341, a second passage 342, and a third passage 343. The first passage 341 may be located within the first end cap 31. The inlet of the first passage 341 may be located inside the first end cap 31 and communicate with the first cavity 11 of the first bellows 10. The outlet of the first passage 341 may be located on the surface of the first end cap 31 facing the sleeve 33. The first passage 341 may extend radially along the first end cap 31. The second passage 342 may be located within the sleeve 33. The inlet of the second passage 342 may be located on the surface of the sleeve 33 facing the first end cap 31 and communicate with the outlet of the first passage 341. The outlet of the second passage 342 may be located on the surface of the sleeve 33 facing the second end cap 32. The second passage 342 may extend axially along the sleeve 33. The third passage 343 may be located within the second end cap 32. The inlet of the third passage 343 may be located on the surface of the second end cap 32 facing the sleeve 33 and communicate with the outlet of the second passage 342. The outlet of the third channel 343 may be located on the surface of the second end cap 32 facing the second bellows 20 and communicate with the second cavity 21 of the second bellows 20. The third channel 343 may extend in the radial direction of the second end cap 32.

[0123] It is understandable that by dividing the air passage 34 into three channels—the first channel 341, the second channel 342, and the third channel 343—the air passage 34 can be evenly distributed within the first end cap 31, the sleeve 33, and the second end cap 32. This achieves a structural arrangement where the air passage 34 is built into and evenly distributed within the first connector 30. This is beneficial for leveraging the synergistic advantages of the first connector 30 and the air passage 34, optimizing the spatial layout of the bellows assembly 100, and making the components in the bellows assembly 100 more compact.

[0124] Furthermore, for example Figure 10 As shown, the third channel 343 can be annular in shape, that is, the third channel 343 can be an annular channel. The annular third channel 343 can be connected to the second cavity 21 of the second bellows 20.

[0125] It is understandable that by making the third channel 343 an annular channel, the overall communication area between the airway 34 and the second cavity 21 of the second corrugated pipe 20 can be increased, thereby improving the communication rate between the airway 34 and the second cavity 21 and enabling the second cavity 21 to quickly achieve mutual communication with the first cavity 11 of the first corrugated pipe 10.

[0126] Please refer to the following: Figure 11 and Figure 12 , Figure 11 It is along Figure 2 The diagram shows a cross-section obtained by cutting along section line CC at an angle. Figure 12 yes Figure 2The diagram shows the structure of the first flange 41 and the second flange 42 of the second connector 40.

[0127] In the embodiments of this application, the second connector 40 can realize a flexible connection between the first bellows 10 and the second bellows 20. The second connector 40 may include a first flange 41 and a second flange 42. Exemplarily, the first flange 41 may have a shape with a central annular region and a cross-shaped edge region. The second flange 42 may have a shape with a central annular region and a cross-shaped edge region. It should be understood that the shapes of the first flange 41 and the second flange 42 are not limited to the shapes shown in the figures, and may also be other shapes such as polygons or irregular shapes, which will not be listed here.

[0128] The first flange 41 can be sleeved on the outside of the first bellows 10 and fixedly connected to the third end 13 of the first bellows 10. The first flange 41 and the first connector 30 can be located at opposite ends of the first bellows 10. Specifically, the first flange 41 can include a first body 411 and a plurality of first fixing parts 412. The first body 411 can be sleeved on the outside of the first bellows 10 and fixedly connected to the third end 13 of the first bellows 10. The plurality of first fixing parts 412 can all be connected to the first body 411 and are arranged at intervals along the circumferential direction of the first flange 41. One end of each first fixing part 412 is fixedly connected to the first body 411, and the other end of each first fixing part 412 extends away from the first body 411. For example, the number of first fixing parts 412 can be four. The four first fixing parts 412 can be arranged at intervals along the circumferential direction of the first flange 41 and are all connected to the first body 411.

[0129] The second flange 42 can be sleeved on the outside of the first bellows 10 and fixedly connected to the fourth end 23 of the second bellows 20. The second flange 42 can also pass through the first connector 30 and can close the opening of the second cavity 21 of the second bellows 20 away from the second end cap 32 (i.e., the opening of the fourth end 23 of the second cavity 21 of the second bellows 20). Part of the second flange 42 is located in the notch 331 of the first connector 30, and the rest of the second flange 42 protrudes relative to the first connector 30.

[0130] Specifically, see reference Figure 8 , Figure 9 , Figure 11 and Figure 12The first end cap 31 may have multiple slots 311. These slots 311 may be spaced apart along the circumferential direction of the first end cap 31. Each slot 311 may penetrate the first end cap 31 along its thickness direction. Each slot 311 may also penetrate the outer edge of the first end cap 31 along its radial direction. The width of each slot 311 may gradually increase from the center region of the first end cap 31 towards its edge region. For example, the number of slots 311 may be four. These four slots 311 may be spaced apart along the circumferential direction of the first end cap 31.

[0131] The sleeve 33 may have multiple notches 331. These notches 331 may be spaced apart along the circumferential direction of the sleeve 33. The number of notches 331 may be the same as the number of slots 311 in the first end cap 31, and they may be configured in a one-to-one correspondence. Each notch 331 may penetrate the sleeve 33 along its thickness direction. Each notch 331 may communicate with one slot 311 of the first end cap 31. For example, the number of notches 331 may be four. These four notches 331 may be spaced apart along the circumferential direction of the sleeve 33. Each notch 331 may communicate with one slot 311.

[0132] The second flange 42 may include a second body 421 and a plurality of second fixing parts 422. The second body 421 may be sleeved on the outside of the first bellows 10 and fixedly connected to the fourth end 23 of the second bellows 20. The second body 421 may close the opening of the second cavity 21 of the second bellows 20 away from the air passage 34. The plurality of second fixing parts 422 may all be connected to the second body 421 and are arranged at intervals along the circumferential direction of the second flange 42. One end of each second fixing part 422 is fixedly connected to the second body 421, and each second fixing part 422 passes through a notch 331 of the sleeve 33. The other end of each second fixing part 422 extends away from the second body 421 and protrudes relative to the outer surface of the sleeve 33.

[0133] The number of second fixing parts 422 can be the same as the number of first fixing parts 412 of the first flange 41, and they are arranged in a one-to-one correspondence. That is, one second fixing part 422 can correspond to one first fixing part 412 of the first flange 41. Each second fixing part 422 is opposite to and spaced apart from one first fixing part 412 of the first flange 41 in the axial direction of the bellows assembly 100. For example, the number of second fixing parts 422 can be four. The four second fixing parts 422 can be arranged at intervals along the circumferential direction of the second flange 42, and each is connected to the second body 421.

[0134] It is understandable that by having the second flange 42 and the second end cap 32 of the first connector 30 respectively close the two openings of the second cavity 21 of the second bellows 20, the second cavity 21 of the second bellows 20 can be made into a closed cavity, ensuring that the second cavity 21 of the second bellows 20 has good sealing performance and is not prone to leakage. Furthermore, by having the second connector 40 include the first flange 41 and the second flange 42, it is not only convenient to connect the first bellows 10 and the second bellows 20 together, but also convenient to fix the bellows assembly 100 to other equipment, realizing the connection of the bellows assembly 100 to other equipment.

[0135] Furthermore, by creating multiple notches 331 on the sleeve 33 corresponding to the multiple slots 311 of the first end cap 31, and allowing the multiple second fixing parts 422 of the second flange 42 to pass through these notches 331, the multiple second fixing parts 422 of the second flange 42 and the first end cap 31 can be arranged to intersect in the radial direction of the bellows assembly 100. When the multiple second fixing parts 422 of the second flange 42 pass through the multiple notches 331 of the sleeve 33, stress can be evenly distributed along the circumference of the second flange 42 among the multiple second fixing parts 422, avoiding material fatigue or damage to the connection parts due to stress concentration, and extending the service life of the second flange 42. In addition, allowing the multiple second fixing parts 422 of the second flange 42 to pass through the multiple notches 331 of the sleeve 33 provides more connection positions for the second flange 42 on the outside of the sleeve 33. These connection positions can evenly distribute the load on the second flange 42, improving the operational reliability of the second flange 42.

[0136] Please refer to the following: Figure 2 and Figure 13 , Figure 13 It is along Figure 2 The diagram shows a cross-sectional view of a portion of the structure obtained by cutting along section line CC at another angle.

[0137] The second connector 40 may further include a displacement compensation mechanism 43. The displacement compensation mechanism 43 may be connected between the first flange 41 and the second flange 42. The displacement compensation mechanism 43 is capable of aligning the central axis of the first bellows 10 and the central axis of the second bellows 20. Exemplarily, the displacement compensation mechanism 43 is capable of compensating for the offset of the central axis of the first bellows 10 and the central axis of the second bellows 20 in the radial direction of the bellows assembly 100. Exemplarily, the displacement compensation mechanism 43 may be located on the side of the first connector 30 opposite to the second bellows 20, i.e., on the outside of the first connector 30. Alternatively, the displacement compensation mechanism 43 may pass through the first connector 30.

[0138] Understandably, by setting up the displacement compensation mechanism 43 and connecting it between the first flange 41 and the second flange 42, the first bellows 10 and the second bellows 20 can be connected together, ensuring the connection strength, installation stability, and installation reliability between the first bellows 10 and the second bellows 20. Furthermore, since there may be certain assembly deviations between the first bellows 10 and the second bellows 20 during assembly, the displacement compensation mechanism 43, by aligning the central axis of the first bellows 10 and the central axis of the second bellows 20, can compensate for the axial misalignment of the first bellows 10 and the second bellows 20 during installation, reduce the internal forces caused by displacement deformation during the assembly of each bellows, and improve the vibration isolation effect of the bellows assembly 100.

[0139] In the embodiments of this application, the number of displacement compensation mechanisms 43 can be one or more. When there are multiple displacement compensation mechanisms 43, the structures of the multiple displacement compensation mechanisms 43 can be similar, identical, or different. The multiple displacement compensation mechanisms 43 can be arranged at intervals along the circumferential direction of the bellows assembly 100. Each displacement compensation mechanism 43 can be connected between the first flange 41 and the second flange 42, specifically between the first fixing part 412 of the first flange 41 and the second fixing part 422 of the second flange 42. Exemplarily, the number of displacement compensation mechanisms 43 can be four. The four displacement compensation mechanisms 43 can be respectively connected between the four first fixing parts 412 of the first flange 41 and the four second fixing parts 422 of the second flange 42, and arranged at intervals along the circumferential direction of the bellows assembly 100. When the number of displacement compensation mechanisms 43 is one, the displacement compensation mechanism 43 can be a circumferential structural component with a mechanical transmission function.

[0140] Understandably, the multiple displacement compensation mechanisms 43 are arranged in a uniform ring around the second bellows 20, which can better achieve the pressure distribution between the first flange 41 and the second flange 42, avoid the problem of eccentric deformation between the first bellows 10 and the second bellows 20, and achieve the balance of the push and pull forces of the bellows assembly 100.

[0141] The following description will use a displacement compensation mechanism 43 as an example to illustrate the structure of the displacement compensation mechanism 43. Unless otherwise specified, the following description of a displacement compensation mechanism 43 can be applied to other displacement compensation mechanisms 43.

[0142] Please continue reading. Figure 2 and Figure 13The displacement compensation mechanism 43 may include a connecting rod 431, a ball head 432, and a ball-and-socket connector 433. The connecting rod 431 may be located between the first flange 41 and the second flange 42, and extends along the axial direction of the bellows assembly 100. The ball-and-socket connector 433 may be fixedly connected to the first flange 41 and / or the second flange 42. The ball-and-socket connector 433 and the first flange 41 may be fixedly connected by means such as welding, bonding, or screwing. The ball head 432 may be located between the connecting rod 431 and the ball-and-socket connector 433. The ball head 432 may be fixedly connected to the connecting rod 431 and rotatably connected to the ball-and-socket connector 433. The ball head 432 and the ball-and-socket connector 433 have a spherical fit. This spherical fit between the ball head 432 and the ball-and-socket connector 433 provides multiple degrees of freedom. The ball head 432 can rotate in any direction within the ball socket connector 433, enabling movement in three-dimensional space, thereby transmitting power at different angles and flexibly performing multi-directional movements.

[0143] For example, there may be two ball-and-socket connectors 433. The two ball-and-socket connectors 433 are fixedly connected to the first flange 41 and the second flange 42, respectively. There may also be two ball heads 432. The two ball heads 432 are fixedly connected to both ends of the connecting rod 431, respectively. The two ball heads 432 are also rotatably connected to the two ball-and-socket connectors 433, respectively. Each ball head 432 and the ball-and-socket connector 433 connected to it have a spherical fit.

[0144] Understandably, by rotating the ball head 432 within the ball-and-socket connector 433 with multiple degrees of freedom, the relative position between the first bellows 10 and the second bellows 20 can be adaptively adjusted, compensating for axial misalignment between them (such as radial misalignment along the bellows assembly 100). This ensures alignment of the central axis of the first bellows 10 with the central axis of the second bellows 20, guaranteeing the assembly accuracy between them and improving the tolerance performance when radial misalignment occurs during installation. This effectively avoids situations where radial deviation due to rigid interconnection prevents bellows installation. Furthermore, the spherical fit between the ball head 432 and the ball-and-socket connector 433 allows for uniform load distribution on the spherical surface. This uniform force distribution reduces localized stress concentration, improving impact resistance and extending the service life of each component.

[0145] In embodiments of this application, the bellows assembly 100 may further include a vibration damping structure 50. The vibration damping structure 50 may be connected to at least one of the following: between the first flange 41 and the displacement compensation mechanism 43; on the side of the first flange 41 facing away from the displacement compensation mechanism 43; between the second flange 42 and the displacement compensation mechanism 43; and on the side of the second flange 42 facing away from the displacement compensation mechanism 43. The vibration damping structure 50 may be any structural component with a certain degree of flexibility, capable of elastic deformation under pressure and rebounding after the pressure is removed. For example, the vibration damping structure 50 may be a flexible pad (such as rubber), a spring, etc.

[0146] It is understandable that by setting up vibration damping structures 50 at the aforementioned locations for isolation, vibration in the vibration transmission path of "second bellows 20-second flange 42-displacement compensation mechanism 43-first flange 41" can be reduced, making it difficult for vibration to be transmitted from one end of the bellows assembly 100 to the other end. This effectively isolates the vibration transmission between the equipment connected to both ends of the bellows assembly 100 (such as vacuum device 210 and vacuum pump), avoids damage to the precision of the connected equipment caused by vibration, and improves the overall vibration isolation effect of the bellows assembly 100.

[0147] Specifically, the vibration damping structure 50 can be disposed at any one or a combination of the following locations: between the ball joint 433 and the first flange 41, on the side of the first flange 41 facing away from the ball joint 433, and between the ball joint 433 and the second flange 42. This vibration isolation method can effectively isolate the vibration of the connecting rod 431.

[0148] The embodiments of this application have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A bellows assembly, characterized in that, The bellows assembly includes: The first bellows includes a first end and a third end, and the first bellows is provided with a first cavity; The second corrugated pipe is located outside the first corrugated pipe. The second corrugated pipe includes a second end and a fourth end. The second end is farther away from the first end relative to the fourth end. The second corrugated pipe is provided with a second cavity. The cross-sectional area of ​​the first cavity is the same as the cross-sectional area of ​​the second cavity. A first connector, the first connector connecting the first end and the second end; and A second connector connects the third end and the fourth end; At least one of the first connector and the second connector is provided with an air passage, which connects the first cavity and the second cavity.

2. The bellows assembly as described in claim 1, characterized in that, The first connector includes a first end cap, a second end cap, and a sleeve; The first end cap is fixedly connected to the first end, the second end cap is fixedly connected to the second end, the sleeve is connected between the first end cap and the second end cap, and the air passage is located inside the first end cap, the sleeve and the second end cap.

3. The bellows assembly as described in claim 2, characterized in that, The airway includes a first channel, a second channel, and a third channel; The first channel is located inside the first end cap, which is annular. The entrance of the first channel is located inside the first end cap and communicates with the first cavity. The outlet of the first channel is located on the surface of the first end cap facing the sleeve. The second channel is located inside the sleeve, the inlet of the second channel is located on the surface of the sleeve facing the first end cap and communicates with the outlet of the first channel, the outlet of the second channel is located on the surface of the sleeve facing the second end cap, and the second channel extends along the axial direction of the sleeve; The third channel is located inside the second end cap. The inlet of the third channel is located on the surface of the second end cap facing the sleeve and communicates with the outlet of the second channel. The outlet of the third channel is located on the surface of the second end cap facing the second bellows and communicates with the second cavity.

4. The bellows assembly as described in any one of claims 1-3, characterized in that, The second corrugated pipe includes a first sub-pipe and a second sub-pipe; The first sub-tube is sleeved on the outside of the first corrugated pipe and connected to the first connector; The second sub-tube is sleeved on the outside of the first sub-tube and connected to the first connector. The gap area between the second sub-tube and the first sub-tube forms the second cavity.

5. The bellows assembly as described in claim 2, characterized in that, The sleeve is fitted onto the outside of the second bellows, and the second connector includes a first flange and a second flange. The first flange is fixedly connected to the third end, and is located at both ends of the first bellows along with the first connecting piece; The second flange is sleeved on the outside of the first bellows and fixedly connected to the fourth end. The second flange also passes through the sleeve and can close the opening of the second cavity away from the second end cover.

6. The bellows assembly as described in claim 5, characterized in that, The first end cap is provided with a plurality of slots, which are arranged at intervals along the circumferential direction of the first end cap. Each slot penetrates the first end cap along the thickness direction and penetrates the outer edge of the first end cap along the radial direction of the first end cap. The sleeve has multiple notches, which are spaced apart along the circumferential direction of the sleeve. Each notch penetrates the sleeve along the thickness direction and communicates with a slot. The second flange includes a second body and a plurality of second fixing parts. The second body is connected to the fourth end and closes the opening of the second cavity away from the second end cover. The plurality of second fixing parts are all connected to the second body and are arranged at intervals along the circumferential direction of the second flange. Each second fixing part passes through one of the notches.

7. The bellows assembly as described in claim 5 or 6, characterized in that, The second connecting member further includes a displacement compensation mechanism, which is connected between the first flange and the second flange. The displacement compensation mechanism includes a connecting rod, a ball head, and a ball socket connecting seat. The connecting rod is located between the first flange and the second flange; The ball socket connector is fixedly connected to the first flange and / or the second flange; The ball head is located between the connecting rod and the ball socket connector. The ball head is fixedly connected to the connecting rod and rotatably connected to the ball socket connector. The ball head and the ball socket connector are in spherical fit.

8. The bellows assembly as described in claim 7, characterized in that, The bellows assembly further includes a vibration damping structure, which can be connected to at least one of the following: between the first flange and the displacement compensation mechanism, on the side of the first flange away from the displacement compensation mechanism, between the second flange and the displacement compensation mechanism, and on the side of the second flange away from the displacement compensation mechanism.

9. The bellows assembly as described in any one of claims 1-3, characterized in that, The first corrugated pipe is a welded corrugated pipe, and / or the second corrugated pipe is a welded corrugated pipe.

10. An industrial device, characterized in that, The industrial equipment includes a vacuum device, a vacuum pipeline, and a bellows assembly as described in any one of claims 1-9. The vacuum device is provided with a vacuum chamber, and the bellows assembly is connected between the vacuum device and the vacuum pipeline, and communicates between the vacuum chamber and the vacuum pipeline.

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