Wastewater treatment equipment for recycling semiconductor ultrapure water and treatment process of wastewater treatment equipment

Abstract

The invention provides semiconductor ultrapure water recycling wastewater treatment equipment and a treatment process thereof, and relates to the field of ultrapure water treatment.The semiconductor ultrapure water recycling wastewater treatment equipment comprises a raw water tank, a raw water pump arranged on the outer side of the raw water tank and a connecting pipe arranged on the raw water pump and the raw water tank; in order to solve the problems that in the prior art, when an activated carbon filter is used, blockage occurs along with time, an activated carbon filter element needs to be replaced at the moment, the filtering work is interrupted, and the wastewater treatment efficiency is affected, a cleaning mechanism is arranged, and activated carbon is driven to rotate through the cleaning mechanism; the activated carbon is backwashed by the wastewater filtered for the first time, so that the condition that the filtering work cannot be carried out due to the blockage of the activated carbon is reduced, and the wastewater treatment efficiency is improved; by arranging the cleaning mechanism, the problem that in the prior art, the efficiency is low due to single-time filtering of a filtering device is solved; and through the arrangement of the cleaning mechanism, the problem of waste caused by direct discharge of backwashing water in the prior art is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of ultrapure water treatment, in particular to a semiconductor ultrapure water recycling wastewater treatment equipment and its treatment process. BACKGROUND

[0002] The semiconductor ultrapure water recycling wastewater treatment equipment is mainly used for recycling and treating various types of wastewater generated in the semiconductor manufacturing process, and recycling the purified wastewater back to the ultrapure water system for reuse, which is a key environmental protection facility for efficient use of water resources, reduction of production costs and reduction of environmental pollution. However, during primary filtration, the use of activated carbon filter will be blocked over time, which requires replacement of activated carbon filter element, causing interruption of filtration work and affecting wastewater treatment efficiency.

[0003] For example: the semiconductor ultrapure water recycling wastewater treatment equipment disclosed in Chinese invention patent (application number: 202310756540.1) has a multi-medium filter and an activated carbon filter for primary filtration during the recycling of ultrapure water. The use of activated carbon filter will be blocked over time, which requires replacement of activated carbon filter element, so that the filtration work cannot be continuous. The above patent can prove the defects existing in the prior art.

[0004] Therefore, we improve it and propose a semiconductor ultrapure water recycling wastewater treatment equipment and its treatment process. SUMMARY

[0005] The purpose of the present application is to solve the problem that the use of activated carbon filter will be blocked over time, which requires replacement of activated carbon filter element, causing interruption of filtration work and affecting wastewater treatment efficiency.

[0006] In order to achieve the above-mentioned purpose of the application, the semiconductor ultrapure water recycling wastewater treatment equipment and its treatment process are provided to solve the above-mentioned problems.

[0007] The present application is as follows: It comprises a raw water tank, a raw water pump arranged outside the raw water tank, a connecting pipe arranged on the raw water pump and the raw water tank, a filter tank arranged outside the raw water tank, and a cleaning mechanism arranged on the filter tank. The cleaning mechanism comprises a water inlet pipe arranged on the raw water pump and the filter box, a water outlet pipe arranged on the filter box, a water inlet cavity, a water outlet cavity and a cleaning cavity arranged in the filter box, a motor arranged on the filter box, a driving shaft rotatably arranged on the filter box, a mounting frame arranged on the driving shaft, activated carbon arranged on the mounting frame, a hollow box arranged on the filter box, a cylinder arranged on the hollow box, a baffle slidably arranged on the hollow box and a valve arranged on the water outlet pipe.

[0008] As a preferred technical scheme of the present application, the water inlet pipe and the water inlet cavity are in communication, the water outlet pipe and the water outlet cavity are in communication, the cleaning cavity and the hollow box are in communication, the driving shaft is arranged on the output end of the motor, the mounting frame is rotatably arranged on the filter box, and the baffle is arranged on the output end of the cylinder.

[0009] As a preferred technical scheme of the present application, a filter screen is slidably arranged in the hollow box, and a knob is arranged on the filter screen.

[0010] As a preferred technical scheme of the present application, a through pipe is fixedly penetrated on the hollow box, a one-way valve is arranged in the through pipe, and the through pipe is fixedly penetrated on the connecting pipe.

[0011] As a preferred technical scheme of the present application, a threaded column is threadedly connected with the knob and the hollow box, and a knob is arranged on the threaded column.

[0012] As a preferred technical scheme of the present application, a rubber block is arranged in the filter box, and the mounting frame is matched with the rubber block.

[0013] As a preferred technical scheme of the present application, a guide groove is arranged in the filter box, a jacking column is slidably arranged on the guide groove, springs are arranged on the corresponding surfaces of the guide groove and the jacking column, and a semicircular groove is arranged on the mounting frame.

[0014] As a preferred technical scheme of the present application, a ball is arranged on the jacking column, and the ball is matched with the semicircular groove.

[0015] The semiconductor ultra-pure water recycling wastewater treatment process is as follows: In use, the raw water pump is started, the raw water pump draws the wastewater in the raw water tank into the water inlet cavity from the connecting pipe and the water inlet pipe, the lower end of the activated carbon filters the wastewater in the water inlet cavity, the wastewater is filtered for the first time, the filtered wastewater is located at the upper end of the activated carbon, the wastewater at the upper end of the activated carbon enters the water outlet cavity and the cleaning cavity under the action of pressure, the activated carbon filters the wastewater for the second time when the wastewater enters the water outlet cavity and the cleaning cavity, and the wastewater filtered for two times in the water outlet cavity is transferred to the next process by opening the valve. Step S2, when the active carbon bottom is blocked, the motor is started, the motor drives the driving shaft to rotate 120 degrees, the driving shaft drives the installation frame and the active carbon to rotate 120 degrees synchronously, at this time, the active carbon on the water inlet cavity is transferred to the cleaning cavity, and the valve is closed, the air cylinder is started, the air cylinder output end drives the baffle to slide and expand, so that the cleaning cavity and the hollow box are communicated, at this time, the wastewater above the active carbon enters the cleaning cavity, and then the wastewater filtered for the first time enters the bottom of the active carbon, the bottom of the active carbon in the cleaning cavity is backwashed, the blockage of the bottom of the active carbon is removed through backwashing, and the removed blockage is transferred to the hollow box; Step S3, when the installation frame rotates 120 degrees, the ball on the jacking column and the semicircular groove are in the state of disengagement and engagement, when the ball and the semicircular groove are disengaged, the ball and the jacking column slide, and the spring is compressed, when the ball and the semicircular groove are engaged, the ball is driven to impact the semicircular groove through the elasticity of the spring, so that the installation frame and the active carbon vibrate, the blockage on the active carbon is loosened through vibration of the active carbon, and the installation frame is positioned through engagement of the ball and the semicircular groove. Step S4, the wastewater in the hollow box is filtered through the filter screen, the wastewater at the bottom of the filter screen enters the water inlet cavity from the through pipe and the water inlet pipe through the pressure of the raw water pump, and the one-way valve unidirectionally guides the wastewater, so that the backwashed wastewater is transferred to the water inlet cavity again.

[0016] Compared with the prior art, the beneficial effects of the present application are as follows: In the scheme of the present application: 1. In order to solve the problem that the use of the active carbon filter in the prior art will be blocked over time, the active carbon filter element needs to be replaced, the filtering work is interrupted, and the wastewater treatment efficiency is affected, the cleaning mechanism is arranged, the active carbon is driven to rotate through the cleaning mechanism, and the active carbon is backwashed through the wastewater filtered for the first time, so that the situation that the filtering work cannot be performed due to blockage of the active carbon is reduced, and the wastewater treatment efficiency is improved. 2. The cleaning mechanism is arranged, the distribution of the water inlet cavity and the discharge cavity is realized, the wastewater is filtered twice before being discharged to the next process, the filtering efficiency is improved, and the problem that the filtering device in the prior art is single-filtered and has low efficiency is solved. 3. The cleaning mechanism is arranged, the blockage is filtered through the filter screen, the backwashed wastewater is transferred to the water inlet cavity again, the waste of water resources is reduced, and the problem that the backwashing water is directly discharged in the prior art is solved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 The structure diagram of the wastewater treatment equipment for semiconductor ultra-pure water recycling provided by the present application is shown. Figure 2The internal structure schematic view of the filter box of the semiconductor ultrapure water recycling wastewater treatment equipment provided in the application; Figure 3 The local sectional structure schematic view of the filter box and the hollow box of the semiconductor ultrapure water recycling wastewater treatment equipment provided in the application; Figure 4 The semiconductor ultrapure water recycling wastewater treatment equipment provided in the application Figure 3 The enlarged structure schematic view of the A area in the middle; Figure 5 The structure schematic view of the water inlet cavity, the water outlet cavity and the cleaning cavity of the semiconductor ultrapure water recycling wastewater treatment equipment provided in the application; Figure 6 The ball and semicircular groove engagement structure schematic view of the semiconductor ultrapure water recycling wastewater treatment equipment provided in the application.

[0018] Indicated in the figure: 1, raw water tank; 101, raw water pump; 102, connecting pipe; 103, filter box; 2, cleaning mechanism; 201, water inlet pipe; 202, water outlet pipe; 203, water inlet cavity; 204, water outlet cavity; 205, cleaning cavity; 206, motor; 207, drive shaft; 208, mounting frame; 209, activated carbon; 210, hollow box; 211, air cylinder; 212, baffle; 213, valve; 214, through pipe; 215, filter screen; 216, push block; 217, threaded column; 218, knob; 219, rubber block; 220, guide groove; 221, jacking column; 222, spring; 223, semicircular groove; 224, ball; 225, one-way valve. DETAILED DESCRIPTION

[0019] In order for those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.

[0020] As described in the background, the use of activated carbon filters will be blocked over time, at which time the activated carbon filter element needs to be replaced, so that the filtering work is interrupted, affecting the efficiency of wastewater treatment.

[0021] In order to solve this technical problem, the present application provides a semiconductor ultrapure water recycling wastewater treatment equipment and a treatment process thereof, which is applied to ultrapure water treatment.

[0022] Specifically, please refer toFigure 1 Figure 6 As shown in the figure, the semiconductor ultra-pure water recycling wastewater treatment equipment specifically comprises: a raw water tank 1, a raw water pump 101 arranged outside the raw water tank 1, a connecting pipe 102 arranged on the raw water pump 101 and the raw water tank 1, a filter tank 103 comprising a filter tank 103 arranged outside the raw water tank 1, a cleaning mechanism 2 arranged on the filter tank 103, and in the prior art, the raw water tank 1 is used for storing wastewater; The cleaning mechanism 2 comprises: a water inlet pipe 201 arranged on the raw water pump 101 and the filter tank 103, a water outlet pipe 202 arranged on the filter tank 103, a water inlet cavity 203, a water outlet cavity 204 and a cleaning cavity 205 arranged in the filter tank 103, a motor 206 arranged on the filter tank 103, a drive shaft 207 rotatably arranged on the filter tank 103, an installation frame 208 arranged on the drive shaft 207, activated carbon 209 arranged on the installation frame 208, a hollow tank 210 arranged on the filter tank 103, a gas cylinder 211 arranged on the hollow tank 210, a baffle 212 slidably arranged on the hollow tank 210, and a valve 213 arranged on the water outlet pipe 202.

[0023] The semiconductor ultra-pure water recycling wastewater treatment equipment and the treatment process thereof provided by the present application can solve the problem that the use of the activated carbon filter in the prior art will be blocked over time, and the activated carbon filter element needs to be replaced at this time, so that the filtering work is interrupted and the wastewater treatment efficiency is affected. The cleaning mechanism 2 is arranged, the activated carbon 209 is driven to rotate by the cleaning mechanism 2, and the activated carbon 209 is backwashed by the wastewater filtered for the first time, so that the situation that the filtering work cannot be performed due to the blockage of the activated carbon 209 is reduced, and the wastewater treatment efficiency is improved. The cleaning mechanism 2 is arranged, the wastewater is filtered twice before being discharged into the next process through the distribution of the water inlet cavity 203 and the water outlet cavity 204, the filtering efficiency is improved, and the problem that the filtering device in the prior art is single-filtered and has low efficiency is solved. The cleaning mechanism 2 is arranged, the clogging material is filtered by the filter screen 215, the backwashed wastewater is transferred into the water inlet cavity 203 again, the waste of water resources is reduced, and the problem that the backwashing water is directly discharged and wasted in the prior art is solved.

[0024] In order for those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings.

[0025] It should be noted that the embodiments in the present application and the features and technical solutions in the embodiments can be combined with each other without conflict.

[0026] ​It should be noted that like reference numerals and characters refer to like elements throughout the several views of the drawings, and thus, once certain elements are defined in one view, they do not need to be further defined and explained in a following view.

[0027] Embodiment 1, please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 , a kind of semiconductor ultra-pure water recycling waste water treatment equipment, water inlet pipe 201 and water inlet cavity 203 are connected, drain pipe 202 and drainage cavity 204 are connected, cleaning cavity 205 and hollow box 210 are communicated, drive shaft 207 is arranged at the output end of motor 206, mounting frame 208 is rotationally arranged on filter box 103, baffle 212 is arranged at the output end of pneumatic cylinder 211; In use, start raw water pump 101, raw water pump 101 will waste water in raw water tank 1 from connecting pipe 102 and water inlet pipe 201 into water inlet cavity 203, as shown in Figure 2 The lower end of activated carbon 209 filters waste water in water inlet cavity 203, at this time waste water is filtered for the first time, and the filtered waste water is located at the upper end of activated carbon 209, and the waste water at the upper end of activated carbon 209 enters drainage cavity 204 and cleaning cavity 205 respectively under the action of pressure, and activated carbon 209 filters waste water for the second time when waste water enters drainage cavity 204 and cleaning cavity 205, and the waste water filtered twice in drainage cavity 204 is discharged by opening valve 213, wherein the initial state of baffle 212 is as shown in Figure 4As shown, baffle 212 blocks the channel connecting cleaning chamber 205 and hollow box 210, preventing them from communicating. When the bottom of activated carbon 209 becomes blocked, motor 206 is started, driving drive shaft 207 to rotate 120 degrees. Drive shaft 207 drives mounting frame 208 and activated carbon 209 to rotate 120 degrees synchronously. At this time, activated carbon 209 located on inlet chamber 203 is transferred into cleaning chamber 205, and valve 213 is closed. Cylinder 211 is started, and the output end of cylinder 211 drives baffle 212 to slide open, connecting cleaning chamber 205 and hollow box 210. At this time, wastewater above activated carbon 209 enters cleaning chamber 205. The wastewater after the first filtration backwashes the bottom of activated carbon 209, and the bottom of activated carbon 209 in cleaning chamber 205 is backwashed. The backwashing removes the blockage at the bottom of activated carbon 209 and transfers it to hollow box 210. By driving activated carbon 209 to rotate and backwashing it with the wastewater after the first filtration, activated carbon 209 is cleaned, reducing the possibility of filtration failure due to blockage and improving wastewater treatment efficiency. The distribution of inlet chamber 203 and outlet chamber 204 allows wastewater to be filtered twice before being discharged into the next process, improving filtration efficiency. The activated carbon 209 on mounting frame 208 is detachable. Furthermore, a filter screen 215 is slidably disposed inside the hollow box 210, and a toggle block 216 is disposed on the filter screen 215; The filter screen 215 filters the blockage in the hollow box 210. The actuating block 216 is slid outward, and the actuating block 216 drives the filter screen 215 to slide synchronously and get out of the hollow box 210. At this time, the surface of the filter screen 215 can be cleaned to prevent the filter screen 215 from getting clogged. Furthermore, a through pipe 214 is fixedly inserted through the hollow box 210, and a one-way valve 225 is installed inside the through pipe 214. The through pipe 214 is fixedly inserted through the connecting pipe 102. like Figure 1 As shown, the wastewater at the bottom of the filter screen 215 is connected to the connecting pipe 102 through the through pipe 214. Through the pressure of the raw water pump 101, the wastewater enters the inlet chamber 203 from the through pipe 214 and the inlet pipe 201. The one-way valve 225 conducts one-way flow of the wastewater to prevent the wastewater from flowing back into the hollow box 210, thus avoiding the waste of water resources. At this time, the baffle 212 is in the state of blocking the channel connecting the cleaning chamber 205 and the hollow box 210. Furthermore, the toggle block 216 and the hollow box 210 are threadedly connected to a threaded post 217, and a knob 218 is provided on the threaded post 217. By rotating the knob 218, the knob 218 drives the threaded column 217 to rotate synchronously, and the threaded column 217 rotates and fixes the push block 216 and the hollow box 210, so that the push block 216 is fixed on the hollow box 210, preventing the filter screen 215 from loosening during filtering; By driving the activated carbon 209 to rotate through the cleaning mechanism 2, and by using the wastewater filtered for the first time to backwash the activated carbon 209, the activated carbon 209 is cleaned, reducing the situation that the activated carbon 209 is blocked and the filtering work cannot be performed, improving the wastewater treatment efficiency. Through the distribution of the water inlet cavity 203 and the drainage cavity 204, the wastewater is filtered twice before being discharged to the next process, improving the filtering efficiency. By filtering the blockage through the filter screen 215, the backwashed wastewater is transferred back to the water inlet cavity 203, reducing water waste.

[0028] In example 2, the semiconductor ultra-pure water recycling wastewater treatment equipment provided in example 1 is further optimized, specifically as shown in Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 , a rubber block 219 is arranged in the filter box 103, and the mounting frame 208 and the rubber block 219 are matched; By blocking the mounting frame 208 with the rubber block 219, the situation that the wastewater in the water inlet cavity 203 enters the drainage cavity 204 and the cleaning cavity 205 is reduced; Further, a guide groove 220 is arranged in the filter box 103, a jacking column 221 is slidably arranged on the guide groove 220, springs 222 are arranged on the corresponding surfaces of the guide groove 220 and the jacking column 221, and a semicircular groove 223 is arranged on the mounting frame 208; Further, a ball 224 is arranged on the jacking column 221, and the ball 224 and the semicircular groove 223 are matched; When the mounting frame 208 is rotated by 120 degrees, the ball 224 on the jacking column 221 and the semicircular groove 223 are in a disengaged and engaged state. When the ball 224 and the semicircular groove 223 are disengaged, the ball 224 and the jacking column 221 slide, and the spring 222 is compressed. When the ball 224 and the semicircular groove 223 are engaged, the ball 224 is driven to impact the semicircular groove 223 by the elasticity of the spring 222, so that the mounting frame 208 and the activated carbon 209 vibrate. By vibrating the activated carbon 209, the blockage on the activated carbon 209 is loosened, thereby improving the backwashing efficiency. The ball 224 and the semicircular groove 223 are engaged to position the mounting frame 208; Example 3, a semiconductor ultra-pure water recycling wastewater treatment process, comprising the following steps: Step S1, in use, the raw water pump 101 is started, the raw water pump 101 draws the waste water in the raw water tank 1 from the connecting pipe 102 and the water inlet pipe 201 into the water inlet cavity 203, the lower end of the activated carbon 209 filters the waste water in the water inlet cavity 203, at this time the waste water is filtered for the first time, the filtered waste water is located at the upper end of the activated carbon 209, the waste water at the upper end of the activated carbon 209 enters the drainage cavity 204 and the cleaning cavity 205 respectively under the action of pressure, when the waste water enters the drainage cavity 204 and the cleaning cavity 205, the activated carbon 209 filters the waste water for the second time, the waste water filtered for two times in the drainage cavity 204 is transferred to the next process by opening the valve 213; Step S2, when the bottom of the activated carbon 209 is blocked, the motor 206 is started, the motor 206 drives the driving shaft 207 to rotate 120 degrees, the driving shaft 207 drives the mounting frame 208 and the activated carbon 209 to rotate 120 degrees synchronously, at this time the activated carbon 209 located on the water inlet cavity 203 is transferred into the cleaning cavity 205, and the valve 213 is closed, the air cylinder 211 is started, the output end of the air cylinder 211 drives the baffle 212 to slide and expand, so that the cleaning cavity 205 and the hollow tank 210 are communicated, at this time the waste water above the activated carbon 209 enters the cleaning cavity 205, and then the waste water filtered for the first time washes the bottom of the activated carbon 209, the bottom of the activated carbon 209 in the cleaning cavity 205 is backwashed, the blockage at the bottom of the activated carbon 209 is removed by backwashing, and the removed blockage is transferred into the hollow tank 210; Step S3, when the mounting frame 208 rotates 120 degrees, the ball 224 on the jacking column 221 and the semicircular groove 223 are in the disengaged and engaged state, when the ball 224 and the semicircular groove 223 are disengaged, the ball 224 and the jacking column 221 slide, and the spring 222 is compressed, when the ball 224 and the semicircular groove 223 are engaged, the ball 224 is driven to impact the semicircular groove 223 by the elasticity of the spring 222, so that the mounting frame 208 and the activated carbon 209 vibrate, the blockage on the activated carbon 209 is loosened by vibrating the activated carbon 209, and the mounting frame 208 is positioned by the engagement of the ball 224 and the semicircular groove 223; Step S4, the waste water in the hollow tank 210 is filtered by the filter screen 215, the waste water at the bottom of the filter screen 215 enters the water inlet cavity 203 from the through pipe 214 and the water inlet pipe 201 under the pressure of the raw water pump 101, the one-way valve 225 unidirectionally guides the waste water, so that the backwashed waste water is transferred back into the water inlet cavity 203.

[0029] In this application, unless otherwise clearly indicated and limited, the terms "mounting", "connection", "connecting", "fixed", and the like should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be electrical connection or communication with each other; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0030] Obviously, the above-described embodiments are only a part of the embodiments of the present application, and are not all the embodiments. The preferred embodiments of the present application are shown in the drawings, but do not limit the patent scope of the present application. The present application can be realized in many different forms, and conversely, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing specific embodiments, or make equivalent substitutions for part of the technical features. Any equivalent structure made by using the content of the present application specification and drawings, directly or indirectly applied to other related technical fields, is also within the patent protection scope of the present application.

Claims

1. A wastewater treatment device for semiconductor ultrapure water recycling, comprising a raw water tank (1), a raw water pump (101) disposed outside the raw water tank (1), and a connecting pipe (102) disposed on the raw water pump (101) and the raw water tank (1), characterized in that, Includes a filter box (103) located outside the raw water tank (1) and a cleaning mechanism (2) located on the filter box (103); The cleaning mechanism (2) includes an inlet pipe (201) installed on the raw water pump (101) and the filter box (103), a drain pipe (202) installed on the filter box (103), an inlet chamber (203), a drain chamber (204) and a cleaning chamber (205) installed in the filter box (103), a motor (206) installed on the filter box (103), a drive shaft (207) installed on the filter box (103), a mounting frame (208) installed on the drive shaft (207), activated carbon (209) installed on the mounting frame (208), a hollow box (210) installed on the filter box (103), a cylinder (211) installed on the hollow box (210), a baffle (212) slidably installed on the hollow box (210), and a valve (213) installed on the drain pipe (202).

2. The wastewater treatment equipment for semiconductor ultrapure water recycling according to claim 1, characterized in that, The water inlet pipe (201) is connected to the water inlet chamber (203), the drain pipe (202) is connected to the drain chamber (204), the cleaning chamber (205) is connected to the hollow box (210), the drive shaft (207) is located at the output end of the motor (206), the mounting frame (208) is rotatably mounted on the filter box (103), and the baffle (212) is located at the output end of the cylinder (211).

3. The wastewater treatment equipment for semiconductor ultrapure water recycling according to claim 2, characterized in that, A filter screen (215) is slidably disposed inside the hollow box (210), and a toggle block (216) is disposed on the filter screen (215).

4. The wastewater treatment equipment for semiconductor ultrapure water recycling according to claim 3, characterized in that, A through pipe (214) is fixedly inserted through the hollow box (210), and a one-way valve (225) is installed inside the through pipe (214). The through pipe (214) is fixedly inserted through the connecting pipe (102).

5. The wastewater treatment equipment for semiconductor ultrapure water recycling according to claim 4, characterized in that, The actuating block (216) and the hollow box (210) are threadedly connected to a threaded post (217), and a knob (218) is provided on the threaded post (217).

6. The wastewater treatment equipment for semiconductor ultrapure water recycling according to claim 5, characterized in that, A rubber block (219) is provided inside the filter box (103), and the mounting frame (208) and the rubber block (219) are compatible.

7. The wastewater treatment equipment for semiconductor ultrapure water recycling according to claim 6, characterized in that, The filter box (103) is provided with a guide groove (220), and a top moving column (221) is slidably provided on the guide groove (220). A spring (222) is provided on the corresponding surface of the guide groove (220) and the top moving column (221). A semi-circular groove (223) is provided on the mounting frame (208).

8. The wastewater treatment equipment for semiconductor ultrapure water recycling according to claim 7, characterized in that, The jacking column (221) is provided with a ball bearing (224), which is adapted to the semi-circular groove (223).

9. A wastewater treatment process for semiconductor ultrapure water recycling, using the wastewater treatment equipment for semiconductor ultrapure water recycling as described in claim 8, characterized in that, Includes the following steps: Step S1: When in use, start the raw water pump (101). The raw water pump (101) draws the wastewater in the raw water tank (1) into the inlet chamber (203) through the connecting pipe (102) and the inlet pipe (201). The lower end of the activated carbon (209) filters the wastewater in the inlet chamber (203). At this time, the wastewater has undergone the first filtration. The filtered wastewater is located at the upper end of the activated carbon (209). The wastewater at the upper end of the activated carbon (209) enters the drain chamber (204) and the cleaning chamber (205) respectively under the action of pressure. When the wastewater enters the drain chamber (204) and the cleaning chamber (205), the activated carbon (209) performs a second filtration on the wastewater. By opening the valve (213), the wastewater in the drain chamber (204) that has undergone two filtrations is transferred to the next process. Step S2: When the bottom of the activated carbon (209) becomes clogged, the motor (206) is started. The motor (206) drives the drive shaft (207) to rotate 120 degrees. The drive shaft (207) drives the mounting frame (208) and the activated carbon (209) to rotate 120 degrees synchronously. At this time, the activated carbon (209) located in the water inlet chamber (203) is transferred to the cleaning chamber (205), and the valve (213) is closed. The cylinder (211) is started, and the output end of the cylinder (211) is activated. Drive the baffle (212) to slide and unfold, so that the cleaning chamber (205) and the hollow box (210) are connected. At this time, the wastewater above the activated carbon (209) enters the cleaning chamber (205), and then the wastewater filtered for the first time backwashes the bottom of the activated carbon (209). The bottom of the activated carbon (209) in the cleaning chamber (205) is backwashed. The backwashing causes the blockage at the bottom of the activated carbon (209) to fall off, and the fallen blockage is transferred to the hollow box (210). In step S3, when the mounting frame (208) rotates 120 degrees, the ball (224) on the jacking post (221) and the semi-circular groove (223) are in a disengaged and engaged state. When the ball (224) and the semi-circular groove (223) disengage, the ball (224) and the jacking post (221) slide, and the spring (222) is compressed. When the ball (224) and the semi-circular groove (223) engage, the elasticity of the spring (222) drives the ball (224) to hit the semi-circular groove (223), causing the mounting frame (208) and the activated carbon (209) to vibrate. By vibrating the activated carbon (209), the blockage on the activated carbon (209) is loosened. The mounting frame (208) is positioned by the engagement of the ball (224) and the semi-circular groove (223). In step S4, the wastewater in the hollow box (210) is filtered through the filter screen (215). The pressure of the raw water pump (101) causes the wastewater at the bottom of the filter screen (215) to enter the inlet chamber (203) through the through pipe (214) and the inlet pipe (201). The one-way valve (225) conducts one-way flow of the wastewater, so that the backwashed wastewater is transferred back into the inlet chamber (203).

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