Pneumatic switch multi-gang valve and using method

Abstract

The invention provides a pneumatic switch multi-gang valve and a using method, and relates to the technical field of fluid valves. Comprising a valve body and a blocking device. A liquid inlet channel, a plurality of branch channels and a plurality of transfer grooves corresponding to the branch channels are formed in the valve body; a first transfer hole and a second transfer hole are formed in the bottom of each transfer groove, the liquid inlet channel communicates with the transfer grooves through the first transfer holes, and the branch channels communicate with the corresponding transfer grooves through the second transfer holes; the blocking device is arranged on the valve body and matched with the transfer groove to form a transfer cavity, and the blocking device is used for opening and closing the first transfer hole and / or the second transfer hole. Single-branch supply and multi-branch channel on-off can be achieved, the complexity of pipe arrangement is reduced, and the occupied space of the switch valve is small.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of fluid valve, in particular to a pneumatic switch multi-association valve and a use method thereof. BACKGROUND

[0002] The fluid switch valve is a core component used in semiconductor manufacturing equipment. The semiconductor manufacturing equipment needs precise and stable fluid supply, and can be reliably and quickly closed when the processing agent or deionized water is not needed. Therefore, it is necessary to provide a fluid switch valve.

[0003] The switch valve in the prior art can only realize the on-off of a specific liquid pipeline. If multiple liquid on-off is required, a switch valve needs to be arranged on each branch. Since the semiconductor manufacturing equipment needs to be connected with various pipelines, a large number of switch valves need to be installed on one equipment. This form of pipe arrangement is complex, occupies a large space, and has a high cost. SUMMARY

[0004] The present application provides a pneumatic switch multi-association valve and a use method thereof, which can realize single branch supply, multiple branch passage on-off, reduce the complexity of pipe arrangement, and reduce the space occupied by the switch valve.

[0005] To achieve the above-mentioned purpose, the present application provides a pneumatic switch multi-association valve, comprising a valve body and a blocking device. The valve body is provided with a liquid inlet channel, a plurality of branch channels, and a plurality of transfer grooves corresponding to the branch channels. The bottom of the transfer groove is provided with a first transfer hole and a second transfer hole. The liquid inlet channel communicates with the transfer groove through the first transfer hole, and the branch channel communicates with the corresponding transfer groove through the second transfer hole. The blocking device is arranged on the valve body and cooperates with the transfer groove to form a transfer cavity. The blocking device is used to open and close the first transfer hole and / or the second transfer hole.

[0006] Optionally, the blocking device comprises a plurality of driving members and a diaphragm. The periphery of the transfer groove is provided with a sealing groove. The diaphragm is attached to the valve body and covers the transfer groove. The diaphragm is provided with a plurality of sealing rings. The sealing ring is embedded in the corresponding sealing groove, so that the sealing ring and the transfer groove form the transfer cavity. The driving member is arranged on the corresponding transfer cavity. The driving member is used to drive the diaphragm to tightly adhere to the bottom of the transfer groove or separate from the bottom of the transfer groove, so as to realize the communication or blocking of the first transfer hole and / or the second transfer hole.

[0007] Optionally, the blocking device further comprises an upper sealing plate and a first fastener, the driving member is a pneumatic control speed regulating valve; the upper sealing plate is attached to the diaphragm and connected to the valve body through the first fastener, the upper sealing plate is provided with a vent hole corresponding to the transfer groove, and the vent hole is used to connect the pneumatic control speed regulating valve; the pneumatic control speed regulating valve pressurizes the vent hole to push the diaphragm to tightly adhere to the bottom of the transfer groove, so that the first transfer hole and / or the second transfer hole are disconnected.

[0008] Optionally, the blocking device further comprises a branch sealing plate and a second fastener; the branch sealing plate is attached to the liquid outlet of the branch channel and connected to the valve body through the second fastener, the branch sealing plate is provided with a liquid outlet hole corresponding to the liquid outlet, and the liquid outlet hole is in communication with the liquid outlet; the branch sealing plate is used to seal the liquid outlet pipe connected to the liquid outlet to prevent liquid from flowing out of the liquid outlet pipe and the liquid outlet.

[0009] Optionally, the blocking device further comprises a liquid inlet sealing plate and a third fastener; the liquid inlet sealing plate is attached to the liquid inlet of the liquid inlet channel and connected to the valve body through the third fastener, the liquid inlet sealing plate is provided with a liquid inlet hole corresponding to the liquid inlet channel, and the liquid inlet hole is in communication with the liquid inlet; the liquid inlet sealing plate is used to seal the liquid inlet pipe connected to the liquid inlet to prevent liquid from flowing out of the liquid inlet pipe and the liquid inlet.

[0010] Optionally, the blocking device further comprises a plurality of liquid outlet connectors, one end of the liquid outlet connector extends into the corresponding branch channel, and the other end of the liquid outlet connector extends out of the corresponding liquid outlet hole, so that the liquid outlet connector is sealed between the branch channel; the liquid outlet connector is used to connect the liquid outlet pipe.

[0011] Optionally, the blocking device further comprises a liquid inlet connector, one end of the liquid inlet connector extends into the liquid inlet channel, and the other end of the liquid inlet connector extends out of the liquid inlet hole, so that the liquid inlet connector is sealed between the liquid inlet channel; the liquid inlet connector is used to connect the liquid inlet pipe.

[0012] The application also provides a use method of the pneumatic on-off multi-connection valve, which is applied to the pneumatic on-off multi-connection valve, the blocking device comprises a plurality of driving members, a diaphragm and an upper sealing plate, the driving member is a pneumatic control speed regulating valve, the diaphragm is arranged on the transfer groove, and the upper sealing plate is attached to the diaphragm; the pneumatic on-off multi-connection valve further comprises a branch sealing plate, a liquid inlet sealing plate, a plurality of liquid outlet connectors and a plurality of liquid inlet connectors; the use method comprises the following steps:

[0013] S1: connecting a liquid pipeline to the valve body and connecting a gas power source pipeline to the gas-controlled speed regulating valve; S2: the gas power source pipeline supplies the gas-controlled speed regulating valve with gas, and the gas pressure pushes the diaphragm to adhere to the first transfer hole and / or the second transfer hole, thereby cutting off the liquid inlet channel and the branch channel; S3: the gas power source pipeline stops supplying the gas-controlled speed regulating valve with gas, so that the diaphragm is separated from the first transfer hole and the second transfer hole, thereby realizing the opening of the branch channel; S4: adjusting the gas inlet amount of the gas-controlled speed regulating valve to adjust the gas inlet rate, thereby controlling the speed of opening and closing of the branch channel.

[0014] Optionally, the S2 further includes the following specific steps:

[0015] S21: if multiple branch channels need to be closed at the same time, the gas power source pipeline supplies each gas-controlled speed regulating valve with gas at the same time, and the gas pressure pushes the diaphragm to adhere to each first transfer hole and / or each second transfer hole, thereby cutting off the liquid inlet channel and multiple branch channels, and realizing the closing of multiple branch channels; S22: if a certain branch channel needs to be closed, the gas power source pipeline supplies the corresponding gas-controlled speed regulating valve with gas, and the gas pressure pushes the diaphragm to adhere to the corresponding first transfer hole and / or the corresponding second transfer hole, thereby cutting off the liquid inlet channel and the corresponding branch channel, and realizing the closing of the corresponding branch channel.

[0016] Optionally, the S3 further includes the following specific steps:

[0017] S31: if multiple branch channels need to be opened at the same time, the gas power source pipeline stops supplying each gas-controlled speed regulating valve with gas, so that the diaphragm is separated from each first transfer hole and each second transfer hole, thereby realizing the opening of multiple branch channels;

[0018] S32: if a certain branch channel needs to be opened, the gas power source pipeline stops supplying the corresponding gas-controlled speed regulating valve with gas, so that the diaphragm is separated from the corresponding first transfer hole and the corresponding second transfer hole, thereby realizing the opening of the corresponding branch channel.

[0019] The application provides a pneumatic switch multi-association valve and a use method thereof. The valve body is provided with an inlet channel, a plurality of branch channels and a transfer groove corresponding to the plurality of branch channels. A first transfer hole and a second transfer hole are arranged at the bottom of the transfer groove to communicate the inlet channel with the branch channels. A blocking device is arranged on the valve body to form a transfer cavity in cooperation with the transfer groove. Liquid flows from the inlet channel into the transfer cavity through the first transfer hole and flows into the branch channel through the second transfer hole. The blocking device can block or open the first transfer hole and / or the second transfer hole to realize single-branch supply and multi-branch channel blocking, thereby reducing the complexity of the manifold and reducing the space occupation of the switch valve. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the application, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the application, and therefore should not be regarded as a limitation on the scope. Other related drawings can also be obtained by those skilled in the art without creative labor.

[0021] Figure 1 FIG. 1 is a structural schematic diagram of the pneumatic switch multi-association valve of the application;

[0022] Figure 2 FIG. 2 is an exploded schematic diagram of the pneumatic switch multi-association valve of the application;

[0023] Figure 3 FIG. 3 is a structural schematic diagram of the valve body of the application;

[0024] Figure 4 FIG. 4 is an enlarged schematic diagram of B in FIG. 3; Figure 3

[0025] Figure 5 FIG. 5 is a front sectional view of the pneumatic switch multi-association valve of the application;

[0026] Figure 6 FIG. 6 is an A-A sectional view of the pneumatic switch multi-association valve of the application;

[0027] Figure 7 FIG. 7 is a structural schematic diagram of the pneumatic switch multi-association valve with two branch channels of the application;

[0028] Figure 8 FIG. 8 is a structural schematic diagram of the pneumatic switch multi-association valve with three branch channels of the application;

[0029] Figure 9 FIG. 9 is a flow schematic diagram of the use method of the pneumatic switch multi-association valve of the application.

[0030] ​Icon: 100-valve body; 110-liquid inlet channel; 120-branch channel; 130- transfer groove; 131-first transfer hole; 132-second transfer hole; 133-sealing groove; 140-branch sealing plate; 150-second fastener; 160-branch mounting plate; 170 liquid inlet sealing plate; 180-third fastener; 190-liquid inlet mounting plate; 200-blocking device; 210-driving member; 220-septum; 221-sealing ring; 230-upper sealing plate; 240-first fastener; 250-bottom mounting plate; 300-liquid outlet connector; 400-liquid inlet connector.

[0031] The implementation, functional features and advantages of the present application will be further described with reference to the accompanying drawings in conjunction with the embodiments. DETAILED DESCRIPTION

[0032] In order to make the objectives, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in conjunction with the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0033] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement condition, etc. between components in a certain posture (as shown in the drawings), and if the certain posture changes, the directional indications will also change accordingly.

[0034] In the present application, unless otherwise explicitly specified and limited, the terms "connection", "fixation" and the like should be understood broadly, for example, "fixation" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection; can be direct connection, or indirect connection through an intermediate medium; can be internal connection of two elements or interaction relationship between two elements, unless otherwise explicitly limited. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] In addition, if the description of "first", "second" and the like is involved in the embodiments of the present application, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included at least one of the features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. For example, "A and / or B" includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art. When the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the present application.

[0036] The switch valve in the prior art can only realize the on-off of a specific liquid pipeline. If multiple liquid on-off is to be realized, switch valves need to be respectively arranged on each branch. Since semiconductor manufacturing equipment needs to be connected with various pipelines, a large number of switch valves need to be installed on one equipment. This form of pipe arrangement is complex, occupies a large space, and has a high cost. In view of the above problems, embodiments of the present application provide the following technical solutions to overcome the above problems.

[0037] Please refer to Figures 1 to 8 The embodiment of the present application provides a pneumatic switch multi-association valve, which comprises a valve body 100 and a blocking device 200. The valve body 100 is provided with a liquid inlet channel 110, a plurality of branch channels 120, and a plurality of transfer grooves 130 corresponding to the plurality of branch channels 120. The bottom of the transfer groove 130 is provided with a first transfer hole 131 and a second transfer hole 132. The liquid inlet channel 110 is communicated with the transfer groove 130 through the first transfer hole 131. The branch channel 120 is communicated with the corresponding transfer groove 130 through the second transfer hole 132. The blocking device 200 is arranged on the valve body 100 and cooperates with the transfer groove 130 to form a transfer cavity. The blocking device 200 is used to block or open the first transfer hole 131 and / or the second transfer hole 132.

[0038] Specifically, the liquid inlet channel 110, the plurality of branch channels 120, and the plurality of transfer grooves 130 corresponding to the plurality of branch channels 120 are arranged in the valve body 100. The bottom of the transfer groove 130 is provided with a first transfer hole 131 and a second transfer hole 132, which are used to communicate the liquid inlet channel 110 and the branch channel 120. The blocking device 200 is arranged on the valve body 100 and cooperates with the transfer groove 130 to form a transfer cavity.

[0039] In use, liquid enters the liquid inlet channel 110, enters the transfer cavity through the first transfer hole 131, further enters the branch channel 120 through the second transfer hole 132, and then flows out through the branch channel 120. The blocking device 200 cooperates with the transfer groove 130 to block and unblock the first transfer hole 131 and / or the second transfer hole 132, thereby controlling the opening and closing of the liquid inlet channel 110 and the corresponding branch channel 120.

[0040] It should be noted that the number of branch channels 120 can be flexibly set according to actual needs, such as Figure 7 two branch channels 120, Figure 8 three branch channels 120.

[0041] The pneumatic switch multi-union valve provided by the present application comprises a valve body 100, a liquid inlet channel 110, a plurality of branch channels 120, a transfer groove 130 corresponding to the plurality of branch channels 120, a first transfer hole 131 and a second transfer hole 132 formed in the bottom of the transfer groove 130, and a blocking device 200. The liquid inlet channel 110 is in communication with the branch channel 120, and the blocking device 200 cooperates with the transfer groove 130 to form a transfer cavity, so that liquid flows from the liquid inlet channel 110 into the transfer cavity through the first transfer hole 131, and then flows into the branch channel 120 through the second transfer hole 132. The blocking device 200 can block and unblock the first transfer hole 131 and / or the second transfer hole 132, thereby realizing single-branch supply and opening and closing of the plurality of branch channels 120, reducing the complexity of the manifold, and reducing the space occupied by the switch valve.

[0042] Please refer to Figures 1 to 6 In the embodiment of the present application, the blocking device 200 comprises a plurality of driving members 210 and a diaphragm 220, and a sealing groove 133 is formed in the periphery of the transfer groove 130. The diaphragm 220 is attached to the valve body 100 and covers the transfer groove 130. A plurality of sealing rings 221 are provided on the diaphragm 220, and the sealing rings 221 are embedded in the corresponding sealing grooves 133, so that the sealing rings 221 and the transfer groove 130 form the transfer cavity. The driving member 210 is arranged on the corresponding transfer cavity, and the driving member 210 is used to drive the diaphragm 220 to tightly adhere to the bottom of the transfer groove 130 or to separate from the bottom of the transfer groove 130, so as to realize the communication or blocking of the first transfer hole 131 and / or the second transfer hole 132.

[0043] Specifically, the diaphragm 220 is attached to the valve body 100 and covers the transfer groove 130, the sealing ring 221 is embedded into the corresponding sealing groove 133, so that the diaphragm 220 and the transfer groove 130 cooperatively form a transfer cavity, and the sealing ring 221 prevents liquid from leaking out of the transfer cavity. The plurality of driving members 210 are respectively arranged on the corresponding transfer cavities, and the driving member 210 can individually drive the diaphragm 220 on the corresponding transfer cavity to tightly adhere to or separate from the bottom of the transfer groove 130, so as to block the first transfer hole 131 and / or the second transfer hole 132 and realize the opening and closing of the single branch channel 120.

[0044] It can be understood that when the single branch channel 120 needs to be closed, the corresponding driving member 210 drives the diaphragm 220 to tightly adhere to the bottom of the corresponding transfer groove 130, so as to block the first transfer hole 131 and / or the second transfer hole 132 and further block the liquid inlet channel 110 and the branch channel 120, so that the liquid cannot enter the branch channel 120 from the liquid inlet channel 110, and the branch channel 120 is individually closed.

[0045] Please refer to Figures 1 to 6 In the embodiment of the present application, the blocking device 200 further comprises an upper sealing plate 230 and a first fastener 240, the driving member 210 is a gas control speed regulating valve, the upper sealing plate 230 is attached to the diaphragm 220 and connected to the valve body 100 through the first fastener 240, the upper sealing plate 230 is provided with a gas passage hole corresponding to the transfer groove 130, and the gas passage hole is used to connect the gas control speed regulating valve. The gas control speed regulating valve pressurizes the gas passage hole to push the diaphragm 220 to tightly adhere to the bottom of the transfer groove 130, so as to block the first transfer hole 131 and / or the second transfer hole 132.

[0046] Specifically, the upper sealing plate 230 is attached to the diaphragm 220 and connected to the valve body 100 through the first fastener 240, so that the upper sealing plate 230 tightly adheres to the diaphragm 220, thereby improving the air tightness of the diaphragm 220 and the transfer groove 130 and preventing the sealing ring 221 from falling off the sealing groove 133. Further, the upper sealing plate 230 is provided with a gas passage hole corresponding to the transfer groove 130, which is used to connect and communicate with the gas control speed regulating valve. The gas control speed regulating valve pressurizes the gas passage hole to push the diaphragm 220 to tightly adhere to the bottom of the transfer groove 130, so as to block the first transfer hole 131 and / or the second transfer hole 132. The liquid inlet channel 110 and the branch channel 120 are blocked by using gas and air pressure, which simplifies the setting form of the driving member 210 and reduces the failure rate of the blocking device 200.

[0047] It should be noted that the bottom mounting plate 250 can be arranged on the opposite side of the valve body 100 relative to the upper sealing plate 230, and the upper sealing plate 230 is connected to the bottom mounting plate 250 through the first fastener 240, so that the bottom mounting plate 250 and the upper sealing plate 230 clamp the valve body 100 and the diaphragm 220, and the air tightness of the diaphragm 220 and the transfer groove 130 is further improved.

[0048] In the embodiment of the present application, the branch sealing plate 140 and the second fastener 150 are further included; the branch sealing plate 140 is attached to the liquid outlet of the branch channel 120 and is connected to the valve body 100 through the second fastener 150, the branch sealing plate 140 is provided with a liquid outlet hole corresponding to the liquid outlet, and the liquid outlet hole is in communication with the liquid outlet; the branch sealing plate 140 is used to seal the liquid outlet pipe connected to the liquid outlet, so as to prevent liquid from flowing out of the liquid outlet pipe and the liquid outlet.

[0049] Specifically, the branch sealing plate 140 is connected to the valve body 100 through the second fastener 150 and covers the liquid outlet of the branch channel 120, a liquid outlet hole is arranged on the branch sealing plate 140 at a position corresponding to the liquid outlet, and the liquid outlet pipe extends into the liquid outlet from the liquid outlet hole, so that the liquid outlet pipe is in communication with the branch channel 120; the branch sealing plate 140 improves the sealing property between the liquid outlet pipe and the liquid outlet, and prevents liquid from leaking out of the liquid outlet pipe and the liquid outlet during repeated use.

[0050] It should be noted that the branch mounting plate 160 can be arranged on the opposite side of the valve body 100 relative to the branch sealing plate 140, and the branch sealing plate 140 is connected to the branch mounting plate 160 through the second fastener 150, so that the branch mounting plate 160 and the branch sealing plate 140 clamp the valve body 100, and the air tightness of the liquid outlet is further improved.

[0051] In the embodiment of the present application, the liquid inlet sealing plate and the third fastener 180 are further included; the liquid inlet sealing plate is attached to the liquid inlet of the liquid inlet channel 110 and is connected to the valve body 100 through the third fastener 180, the liquid inlet sealing plate is provided with a liquid inlet hole corresponding to the liquid inlet channel 110, and the liquid inlet hole is in communication with the liquid inlet; the liquid inlet sealing plate is used to seal the liquid inlet pipe connected to the liquid inlet, so as to prevent liquid from flowing out of the liquid inlet pipe and the liquid inlet.

[0052] Specifically, the liquid inlet sealing plate is connected to the valve body 100 through the third fastener 180 and covers the liquid inlet of the liquid inlet channel 110, a liquid inlet hole is arranged on the liquid inlet sealing plate at a position corresponding to the liquid inlet, and the liquid inlet pipe extends into the liquid inlet from the liquid inlet hole, so that the liquid inlet pipe is in communication with the liquid inlet channel 110; the liquid inlet sealing plate improves the sealing property between the liquid inlet pipe and the liquid inlet, and prevents liquid from leaking out of the liquid inlet pipe and the liquid inlet during repeated use.

[0053] It should be noted that the liquid inlet mounting plate 190 can be arranged in the valve body 100, and the liquid inlet sealing plate is connected with the liquid inlet mounting plate 190 through the third fastener 180, so that the liquid inlet sealing plate is tightly attached to the valve body 100, and the air tightness of the liquid inlet is further improved.

[0054] In the embodiment of the present application, a plurality of liquid outlet connectors 300 are further included, one end of the liquid outlet connector 300 extends into the corresponding branch passage 120, the other end of the liquid outlet connector 300 extends out of the corresponding liquid outlet hole, so that the liquid outlet connector 300 is sealed with the branch passage 120; the liquid outlet connector 300 is used to connect the liquid outlet pipe.

[0055] Specifically, one end of the liquid outlet connector 300 extends into the liquid outlet and is connected with the branch passage 120, and the other end of the liquid outlet connector 300 extends out of the liquid outlet hole, which facilitates the connection of the liquid outlet pipe with the liquid outlet connector 300, simplifies the connection form of the liquid pipe, and the branch sealing plate 140 improves the sealing between the liquid outlet connector 300 and the liquid inlet.

[0056] In the embodiment of the present application, a liquid inlet connector 400 is further included, one end of the liquid inlet connector 400 extends into the liquid inlet passage 110, the other end of the liquid inlet connector 400 extends out of the liquid inlet hole, so that the liquid inlet connector 400 is sealed with the liquid inlet passage 110; the liquid inlet connector 400 is used to connect the liquid inlet pipe.

[0057] Specifically, one end of the liquid inlet connector 400 extends into the liquid inlet and is connected with the liquid inlet passage 110, and the other end of the liquid inlet connector 400 extends out of the liquid inlet hole, which facilitates the connection of the liquid inlet pipe with the liquid inlet connector 400, simplifies the connection form of the liquid pipe, and the liquid inlet sealing plate improves the sealing between the liquid inlet connector 400 and the liquid inlet.

[0058] Please refer to Figure 9 The present application further provides a use method of the pneumatic on-off multi-connection valve, which is applied to the above-mentioned pneumatic on-off multi-connection valve, the blocking device 200 includes a plurality of driving members 210, a diaphragm 220 and an upper sealing plate 230, the driving member 210 is a pneumatic control speed regulating valve, the diaphragm 220 is arranged on the transfer groove 130, and the upper sealing plate 230 is attached to the diaphragm 220; the pneumatic on-off multi-connection valve further includes a branch sealing plate 140, a liquid inlet sealing plate, a plurality of liquid outlet connectors 300 and a plurality of liquid inlet connectors 400; the use method includes the following steps:

[0059] S1: connecting the liquid pipeline to the valve body 100 and connecting the gas power source pipeline to the gas control speed regulating valve; S2: the gas power source pipeline supplies the gas control speed regulating valve with gas, and the gas pressure pushes the diaphragm 220 to adhere to the first transfer hole 131 and / or the second transfer hole 132, thereby cutting off the liquid inlet channel 110 and the branch channel 120; S3: the gas power source pipeline stops supplying the gas control speed regulating valve with gas, so that the diaphragm 220 is separated from the first transfer hole 131 and the second transfer hole 132, thereby realizing the opening of the branch channel 120; S4: adjusting the gas inlet amount of the gas control speed regulating valve to adjust the gas inlet rate, thereby controlling the speed of opening and closing of the branch channel 120.

[0060] Specifically, the liquid inlet pipe is connected to the liquid inlet connector 400, the liquid outlet pipe is connected to the liquid outlet connector 300, and the gas power source pipe is connected to the gas control speed regulating valve; when it is needed to close the branch channel 120, the gas power source pipe supplies the gas control speed regulating valve with gas, so that a large gas pressure is generated between the diaphragm 220 and the upper sealing plate 230, the large gas pressure makes the diaphragm 220 tightly adhere to the bottom of the transfer groove 130, the first transfer hole 131 and / or the second transfer hole 132 are blocked, the liquid inlet channel 110 and the branch channel 120 are further blocked, and the closing of the branch channel 120 is realized; when it is needed to open the branch channel 120, the gas power source pipe stops supplying the gas control speed regulating valve with gas, so that there is no pressure difference between the gas pressure between the diaphragm 220 and the upper sealing plate 230 and the gas pressure between the diaphragm 220 and the transfer groove 130, that is, the diaphragm 220 cannot tightly adhere to the bottom of the transfer groove 130, the first transfer hole 131 and the second transfer hole 132 are communicated, the liquid inlet channel 110 and the branch channel 120 are further communicated, and the opening of the branch channel 120 is realized. Moreover, the gas control speed regulating valve can adjust the gas inlet amount, thereby adjusting the speed of opening and closing of the branch channel 120.

[0061] In the embodiment of the present application, the S2 further includes the following specific steps:

[0062] S21: if multiple branch channels 120 need to be closed at the same time, the gas power source pipeline supplies each gas control speed regulating valve with gas, the gas pressure pushes the diaphragm 220 to adhere to each first transfer hole 131 and / or each second transfer hole 132, thereby cutting off the liquid inlet channel 110 and the multiple branch channels 120, and realizing the closing of the multiple branch channels 120; S22: if a certain branch channel 120 needs to be closed, the gas power source pipeline supplies the corresponding gas control speed regulating valve with gas, the gas pressure pushes the diaphragm 220 to adhere to the corresponding first transfer hole 131 and / or the corresponding second transfer hole 132, thereby cutting off the liquid inlet channel 110 and the corresponding branch channel 120, and realizing the closing of the corresponding branch channel 120.

[0063] The S3 further comprises the following specific steps:

[0064] S31: If multiple branch channels 120 need to be opened simultaneously, the gas power source pipeline stops supplying gas to each gas control speed regulating valve, so that the diaphragm 220 is separated from each first transfer hole 131 and each second transfer hole 132, thereby realizing the opening of multiple branch channels 120.

[0065] S32: If a certain branch channel 120 needs to be opened, the gas power source pipeline stops supplying gas to the corresponding gas control speed regulating valve, so that the diaphragm 220 is separated from the corresponding first transfer hole 131 and the corresponding second transfer hole 132, thereby realizing the opening of the corresponding branch channel 120.

[0066] Specifically, when all branch channels 120 need to be closed, the gas power source pipe supplies gas to all gas control speed regulating valves, so that a large gas pressure is generated between the diaphragm 220 and the upper sealing plate 230. The large gas pressure causes the diaphragm 220 to tightly adhere to the bottom of all transfer grooves 130, thereby blocking the first transfer hole 131 and / or the second transfer hole 132, and further blocking the liquid inlet channel 110 and all branch channels 120, thereby realizing the closure of all branch channels 120. When a certain branch channel 120 needs to be closed, the gas power source pipe supplies gas to the corresponding gas control speed regulating valve, so that a large gas pressure is generated between the diaphragm 220 and the upper sealing plate 230. The large gas pressure causes the diaphragm 220 to tightly adhere to the bottom of the corresponding transfer groove 130, thereby blocking the first transfer hole 131 and / or the second transfer hole 132, and further blocking the liquid inlet channel 110 and the corresponding branch channel 120, thereby realizing the closure of the branch channel 120.

[0067] When all branch channels 120 need to be opened, the gas power source pipe stops supplying gas to all gas control speed regulating valves, so that there is no pressure difference between the diaphragm 220 and the upper sealing plate 230 and between the diaphragm 220 and all transfer grooves 130, i.e., the diaphragm 220 cannot tightly adhere to the bottom of all transfer grooves 130, thereby connecting the first transfer hole 131 and the second transfer hole 132, and further connecting the liquid inlet channel 110 and all branch channels 120, thereby realizing the opening of all branch channels 120. When a certain branch channel 120 needs to be opened, the gas power source pipe stops supplying gas to the corresponding gas control speed regulating valve, so that there is no pressure difference between the diaphragm 220 and the upper sealing plate 230 and between the diaphragm 220 and the corresponding transfer groove 130, i.e., the diaphragm 220 cannot tightly adhere to the bottom of the corresponding transfer groove 130, thereby connecting the first transfer hole 131 and the second transfer hole 132, and further connecting the liquid inlet channel 110 and the corresponding branch channel 120, thereby realizing the opening of the branch channel 120.

[0068] The above merely provides the specific implementation of the embodiments of the present application, but the protection scope of the embodiments of the present application is not limited to this. Any change or replacement within the technical scope disclosed by the embodiments of the present application should be covered in the protection scope of the embodiments of the present application. Therefore, the protection scope of the embodiments of the present application should be subject to the protection scope of the claims.

Claims

1. A pneumatically operated multi-port valve, characterized in that, Includes valve body and shut-off device; The valve body is provided with an inlet channel, multiple branch channels, and multiple transfer grooves corresponding to the multiple branch channels; The bottom of the transfer groove is provided with a first transfer hole and a second transfer hole. The liquid inlet channel is connected to the transfer groove through the first transfer hole, and the branch channel is connected to the corresponding transfer groove through the second transfer hole. The blocking device is disposed on the valve body and cooperates with the transfer groove to form a transfer cavity. The blocking device is used to disconnect the first transfer hole and / or the second transfer hole.

2. The pneumatic multi-port valve according to claim 1, characterized in that, The blocking device includes multiple driving components and a diaphragm, and a sealing groove is provided around the periphery of the transfer groove; The diaphragm is attached to the valve body and covers the transfer groove. The diaphragm is provided with a plurality of sealing rings, which are embedded in the corresponding sealing grooves so that the sealing rings and the transfer grooves form the transfer cavity. The driving component is disposed on the corresponding transfer cavity. The driving component is used to drive the diaphragm to adhere tightly to the bottom of the transfer groove or to separate from the bottom of the transfer groove, so as to connect or block the first transfer hole and / or the second transfer hole.

3. The pneumatic switch multi-port valve according to claim 2, characterized in that, The blocking device also includes an upper sealing plate and a first fastener, and the driving component is a pneumatic speed control valve; The upper sealing plate is attached to the diaphragm and connected to the valve body by the first fastener. The upper sealing plate has a vent hole corresponding to the transfer groove. The vent hole is used to connect to the pneumatic speed control valve. The pneumatic speed control valve pressurizes the air through the vent to push the diaphragm against the bottom of the transfer groove, thereby disconnecting the first transfer hole and / or the second transfer hole.

4. The pneumatic switch multi-port valve according to claim 3, characterized in that, It also includes branch sealing plates and second fasteners; The branch sealing plate is attached to the liquid outlet of the branch channel and connected to the valve body by a second fastener. The branch sealing plate has a liquid outlet hole corresponding to the liquid outlet, and the liquid outlet hole is connected to the liquid outlet. The branch sealing plate is used to seal the outlet pipe connected to the outlet to prevent liquid from flowing out between the outlet pipe and the outlet.

5. The pneumatic switch multi-port valve according to claim 4, characterized in that, It also includes a liquid inlet seal plate and a third fastener; The liquid inlet sealing plate is attached to the liquid inlet of the liquid inlet channel and connected to the valve body by a third fastener. The liquid inlet sealing plate has a liquid inlet hole corresponding to the liquid inlet channel, and the liquid inlet hole is connected to the liquid inlet. The liquid inlet sealing plate is used to seal the liquid inlet pipe connected to the liquid inlet to prevent liquid from flowing out between the liquid inlet pipe and the liquid inlet.

6. The pneumatic switch multi-port valve according to claim 4, characterized in that, It also includes multiple liquid outlet connectors, one end of which extends into the corresponding branch channel, and the other end of which protrudes from the corresponding liquid outlet hole, so as to seal the liquid outlet connector with the branch channel; The liquid outlet connector is used to connect to the liquid outlet pipe.

7. The pneumatic switch multi-port valve according to claim 5, characterized in that, It also includes a liquid inlet connector, one end of which extends into the liquid inlet channel and the other end of which protrudes from the liquid inlet hole, so as to seal the liquid inlet connector and the liquid inlet channel; The liquid inlet connector is used to connect to the liquid inlet pipe.

8. A method of using a pneumatic multi-port valve, characterized in that, The pneumatic switch multi-port valve is applied to any one of claims 1-7, wherein the blocking device includes multiple driving elements, a diaphragm and an upper sealing plate, wherein the driving element is a pneumatic speed control valve, the diaphragm covers the transfer groove, and the upper sealing plate is attached to the diaphragm. The pneumatic switch multi-port valve also includes a branch sealing plate, an inlet sealing plate, multiple outlet connectors, and multiple inlet connectors; The method of use includes the following steps: S1: Connect the liquid pipeline to the valve body and the gas power source pipeline to the pneumatic speed control valve; S2: The gas power source pipeline supplies gas to the pneumatic speed control valve. The gas pressure pushes the diaphragm to adhere to the first transfer hole and / or the second transfer hole, thus disconnecting the liquid inlet channel and the branch channel. S3: The gas power source pipeline stops supplying gas to the pneumatic speed control valve, causing the diaphragm to separate from the first transfer hole and the second transfer hole, thereby opening the branch channel; S4: Adjust the air intake volume of the pneumatic speed control valve to adjust the gas intake rate, thereby controlling the opening and closing speed of the branch channel.

9. The method of using the pneumatic switch multi-port valve according to claim 8, characterized in that, S2 further includes the following specific steps: S21: If multiple branch channels need to be closed simultaneously, the gas power source pipeline simultaneously supplies gas to each of the pneumatic speed control valves. The gas pressure pushes the diaphragm to adhere to each of the first transfer hole and / or each of the second transfer holes, disconnecting the liquid inlet channel and multiple branch channels, thereby closing multiple branch channels. S22: If a branch channel needs to be closed, the gas power source pipeline supplies gas to the corresponding pneumatic speed control valve. The gas pressure pushes the diaphragm to adhere to the corresponding first transfer hole and / or the corresponding second transfer hole, thereby disconnecting the liquid inlet channel and the corresponding branch channel, and thus closing the corresponding branch channel.

10. The method of using the pneumatic switch multi-port valve according to claim 8, characterized in that, S3 further includes the following specific steps: S31: If multiple branch channels need to be opened simultaneously, the gas power source pipeline is shut off to supply gas to each of the pneumatic speed control valves, so that the diaphragm is separated from each of the first transfer holes and each of the second transfer holes, thereby opening multiple branch channels; S32: If a branch channel needs to be opened, the gas power source pipeline is shut off to supply gas to the corresponding pneumatic speed control valve, so that the diaphragm is separated from the corresponding first transfer hole and the corresponding second transfer hole, thereby opening the corresponding branch channel.

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