Three-dimensional electric field sensor calibration device and calibration method

Abstract

The invention discloses a three-dimensional electric field sensor calibration device and method, and relates to the technical field of sensors, and the device comprises a shielding housing which is used for isolating a to-be-calibrated three-dimensional electric field sensor from a reference electric field; the electrode plate is arranged in the shielding shell and is used for generating a standard reference electric field; the rotary clamp mechanism is arranged in the shielding shell and is used for clamping the three-dimensional electric field sensor and adjusting the spatial attitude of the three-dimensional electric field sensor; the rotating clamp mechanism comprises a first rotating part which is used for driving the three-dimensional electric field sensor to rotate around a first axis and switching between a first posture and a second posture; the second rotating part is used for driving the three-dimensional electric field sensor to rotate around a second axis to carry out third posture adjustment, and the first axis and the second axis are in orthogonal rotation; the intersection point of the first axis and the second axis coincides with the sensitive center of the three-dimensional electric field sensor. According to the method, the three-dimensional electric field vector calculation precision can be improved, and the spatial distribution characteristics are completely represented.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sensors, in particular to a three-dimensional electric field sensor calibration device and method. BACKGROUND

[0002] Electric field detection technology is a key measurement means in the fields of aerospace equipment monitoring, national defense early warning system, smart grid operation and maintenance, and meteorological disaster monitoring. In different application scenarios, the spectral characteristics and time-varying characteristics of the target electric field are significantly different, and in scenarios such as thunderstorm cloud charge structure inversion and aircraft static distribution monitoring, both the electric field strength and direction information need to be obtained. Measuring only the amplitude will miss the spatial field distribution data, and a calibration scheme for a three-dimensional electric field sensor is urgently needed to support accurate measurement.

[0003] Current three-dimensional electric field measurement faces multiple challenges: environmental factors such as sensor layout distance, temperature and pressure changes directly affect accuracy, and spatial charge migration and ion flow disturbance introduce electromagnetic noise errors; more importantly, the three-dimensional orthogonal characteristics of the electric field lead to nonlinear coupling between components, and the manufacturing process of the sensor is difficult to achieve ideal three-axis orthogonality, which is prone to inter-axis coupling errors. Traditional single-axis or non-orthogonal calibration methods cannot fully characterize the spatial distribution characteristics of the electric field, and there is a lack of calibration systems that can achieve three-dimensional orthogonality and multi-axis sensitivity matching.

[0004] In view of this, it is necessary to provide a three-dimensional electric field sensor calibration device and method. SUMMARY

[0005] In view of the problem in the prior art that single-axis or non-orthogonal calibration methods cannot fully characterize the spatial distribution characteristics of the electric field, the present application provides a three-dimensional electric field sensor calibration device and method, which can effectively eliminate the three-dimensional electric field component coupling effect and the three-axis non-ideal orthogonal error of the sensor, improve the three-dimensional electric field vector calculation accuracy, and simultaneously obtain the electric field strength and direction information, and fully characterize the spatial distribution characteristics. The specific technical solutions are as follows: In a first aspect, the present application provides a three-dimensional electric field sensor calibration device, comprising: a shielding shell for isolating a three-dimensional electric field sensor to be calibrated from a reference electric field; an electrode plate installed in the shielding shell for generating a standard reference electric field; a rotary clamp mechanism installed in the shielding shell for clamping the three-dimensional electric field sensor and adjusting the spatial pose of the three-dimensional electric field sensor; The rotary clamp mechanism comprises: a first rotating part for driving the three-dimensional electric field sensor to rotate around a first axis to switch between a first pose and a second pose; A second rotating member is configured to drive the three-dimensional electric field sensor to rotate around a second axis to perform a third attitude adjustment, and the first axis and the second axis are orthogonal to each other. The intersection of the first axis and the second axis coincides with the sensitive center of the three-dimensional electric field sensor.

[0006] Preferably, the first rotating member is a double-ring nested structure including an inner ring and an outer ring, the outer ring is configured to nest the second rotating member, and the inner ring is configured to load the three-dimensional electric field sensor.

[0007] Preferably, the outer ring is provided with a sector-shaped notch for limiting the rotation angle, so as to realize the ±180° omnidirectional rotation of the second rotating member.

[0008] Preferably, the second rotating member includes two half-circle ring clamps and corresponding fixed clamps, and the half-circle ring clamps adopt a Y-shaped topological configuration. The two sides of the half-circle ring clamp are provided with symmetric bifurcated arms, and the bifurcated arms are provided with a positioning module at the end; the middle part of the half-circle ring clamp is provided with a cylindrical shaft, and the cylindrical shaft is provided with a connecting groove; the fixed clamp includes a cylindrical base and a rectangular clamping part with a hollow notch; the connecting groove is connected with the cylindrical base; and the rectangular clamping part with the hollow notch is connected with the electrode plate.

[0009] Preferably, the rotating clamp mechanism is made of polytetrafluoroethylene material.

[0010] In a second aspect, the application further provides a three-dimensional electric field sensor calibration method, which is applied to the three-dimensional electric field sensor calibration device described above, and includes the following steps: The three-dimensional electric field sensor is installed on the rotating clamp mechanism and placed in the shielding shell; The attitude of the three-dimensional electric field sensor is adjusted by the rotating clamp mechanism, so that different planes are sequentially perpendicular to the reference electric field direction, and the output voltage under each attitude is recorded; According to the linear relationship between the output voltage and the electric field intensity, the three-dimensional electric field vector is obtained through inverse matrix decoupling operation.

[0011] Preferably, the adjustment of the attitude of the three-dimensional electric field sensor by the rotating clamp mechanism, so that different planes are sequentially perpendicular to the reference electric field direction, and the output voltage under each attitude is recorded, includes: The rotating clamp mechanism is controlled to sequentially perform the adjustment of three specific orthogonal attitudes: The xy plane of the three-dimensional electric field sensor is adjusted to be perpendicular to the electric field direction of the reference electric field, and the first output voltage under the first attitude is recorded; Adjust the three-dimensional electric field sensor to make its xz plane perpendicular to the electric field direction of the reference electric field, and record a second output voltage in a second posture; Adjust the three-dimensional electric field sensor to make its yz plane perpendicular to the electric field direction of the reference electric field, and record a third output voltage.

[0012] Preferably, the three-dimensional electric field vector is obtained by inverse matrix decoupling operation according to the linear relationship between the output voltage and the electric field intensity, comprising: Based on the first output voltage, the second output voltage and the third output voltage, the sensitivity coefficients and the bias voltage of the three-dimensional electric field sensor in the directions of the three sensitive axes are calculated respectively; According to the sensitivity coefficients, a sensitivity matrix is constructed, and the output voltage of the three-dimensional electric field sensor in actual measurement is decoupled in combination with the bias voltage, so as to obtain a three-dimensional electric field vector.

[0013] Compared with the prior art, the beneficial effects of the present application are: The three-dimensional electric field sensor calibration device and calibration method of the present application realize rotation through double rotating shafts, eliminate the three-dimensional electric field nonlinear coupling effect and three-axis non-ideal orthogonal error by matching a three-dimensional decoupling algorithm, solve the limitation of traditional single-axis calibration, and simultaneously obtain the electric field intensity and direction information, and completely represent the spatial distribution characteristics. BRIEF DESCRIPTION OF DRAWINGS

[0014] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or the prior art description will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, each element or part is not necessarily drawn according to the actual scale.

[0015] Figure 1 A three-dimensional electric field sensor calibration device according to an embodiment of the present application is shown in the figure.

[0016] Figure 2 A rotating clamp mechanism according to an embodiment of the present application is shown in the figure.

[0017] Figure 3 A first rotating part according to an embodiment of the present application is shown in the figure.

[0018] Figure 4 A semicircular ring clamp according to an embodiment of the present application is shown in the figure.

[0019] Figure 5 A fixed clamp according to an embodiment of the present application is shown in the figure.

[0020] Figure 6 A three-dimensional electric field sensor calibration method according to an embodiment of the present application is shown in the figure.

[0021] The drawings are identified as follows: 10 - shielding housing; 20 - electrode plate; 30 - rotating clamp mechanism, 31 - three-dimensional electric field sensor; 32 - first rotating member; 33 - semi-circular clamp; 34 - fixed clamp. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0023] It should be understood that, when used in the specification, the terms "comprise" and "include" indicate the presence of described features, integers, steps, operations, elements, and / or components, but do not exclude one or more other features, integers, steps, operations, elements, components, and / or sets thereof.

[0024] It should also be understood that the terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in the specification and the appended claims of the present application, the singular forms "a", "an" and "the" are intended to include the plural forms unless the context clearly indicates otherwise.

[0025] It should be further understood that the term "and / or" used in the specification of the present application means any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0026] The following embodiments are described with reference to Figures 1 to 6 .

[0027] The embodiments of the present application provide a three-dimensional electric field sensor calibration device, which comprises: A shielding housing 10 is used to isolate a three-dimensional electric field sensor 31 to be calibrated from a reference electric field; An electrode plate 20 is installed in the shielding housing 10 and is used to generate a standard reference electric field; A rotating clamp mechanism 30 is installed in the shielding housing 10 and is used to clamp the three-dimensional electric field sensor 31 and adjust the spatial pose of the three-dimensional electric field sensor 31; The rotating clamp mechanism 30 comprises: A first rotating member 32 is used to drive the three-dimensional electric field sensor 31 to rotate around a first axis, and switch between a first pose and a second pose; A second rotating member is configured to drive the three-dimensional electric field sensor 31 to rotate around a second axis to perform a third attitude adjustment, and the first axis and the second axis are orthogonal to each other. The intersection of the first axis and the second axis coincides with the sensitive center of the three-dimensional electric field sensor 31.

[0028] The three-dimensional electric field sensor 31 calibration device according to the embodiment of the application can isolate external interference through the shielding shell 10, and the electrode plate 20 can provide a standard reference electric field to provide a stable environment for calibration. The orthogonal double-axis rotating clamp mechanism 30 is configured to rotate around the orthogonal axes by the first rotating member and the second rotating member, so that the sensor can be accurately adjusted to a required attitude, the intersection of the double axes coincides with the sensitive center of the sensor, the spatial deviation during rotation is avoided, the measurement reference under each attitude is ensured to be consistent, and mechanical errors are effectively eliminated.

[0029] In the embodiment, the shielding shell 10 is a metal shell with shielding functions for alternating current electric field and direct current electric field, and the three-dimensional electric field sensor 31 is a three-dimensional electric field sensor 31 based on a MEMS structure. The three-dimensional electric field sensor 31 is clamped by the rotating clamp mechanism 30, and the rotating clamp mechanism 30 and the three-dimensional electric field sensor 31 are placed in the metal shell, and the rotating clamp mechanism 30 is connected to the electrode plate 20. The calibration device has two rotating shafts, can realize two rotating degrees of freedom, and can realize calibration of the X-axis, the Y-axis and the Z-axis.

[0030] Specifically, the first rotating member 32 is a double-ring nested structure including an inner ring and an outer ring, the outer ring is used for nesting the second rotating member, and the inner ring is used for loading the three-dimensional electric field sensor 31.

[0031] The outer ring is provided with a sector-shaped notch for limiting the rotation angle, so as to realize ±180° omnidirectional rotation of the second rotating member.

[0032] The second rotating member includes two half-circle ring clamps 33 and corresponding fixed clamps 34, and the half-circle ring clamp 33 adopts a Y-shaped topological configuration. The two sides of the half-circle ring clamp 33 are provided with symmetric bifurcated arms, and the bifurcated arms are provided with a positioning module at the ends; the middle part of the half-circle ring clamp 33 is provided with a cylindrical shaft, and the cylindrical shaft is provided with a connecting groove; the fixed clamp 34 includes a cylindrical base and a rectangular clamping part with a hollow notch; the connecting groove is connected with the cylindrical base; and the rectangular clamping part with the hollow notch is connected with the electrode plate 20.

[0033] In the embodiment, the three-dimensional electric field sensor 31 based on the MEMS structure is placed in the shielding shell 10, and the fixed clamp 34 with the hollowed-out rectangular cuboid is clamped on the electrode plate 20. At this time, the half-round clamp 33 is tightly fitted with the fixed clamp 34, the calibration of the X-axis and the Y-axis can be realized, and then the outer ring of the first rotating part 32 can be rotated to realize the calibration of the Z-axis. When the three-dimensional electric field sensor 31 is calibrated, the three-dimensional electric field sensor 31 based on the MEMS structure placed in the shielding shell 10 is placed on the inner ring of the rotating clamp mechanism 30; at the same time, the fixed clamp 34 is fixed on the electrode plate 20, and the center plane of the whole calibration device is coincident with the plane of the electrode plate 20.

[0034] The first rotating part 32 adopts a double-ring nested structure and is composed of two precisely machined rings. The first rotating part 32 is in the shape of a cylinder as a whole, the middle ring part is hollowed out and used for loading the three-dimensional electric field sensor 31, the outer ring is movably nested with the two half-round clamps 33 and can be rotated at any angle, and the outer ring is provided with a 30° sector gap, and the rotating position is positioned through the gap area. The central axes of the two rings are orthogonally arranged, the gap is designed to be symmetrical at an angle, the rotating angle range reaches ±180°, and the center points of the two rings always coincide during the rotating process, so that the reference uniformity of the space coordinate system during the calibration of the sensor is ensured.

[0035] The half-round clamp 33 of the second rotating part is designed in a Y-shaped topology, and the main body is composed of a central cylindrical shaft and two symmetrically distributed bifurcated arms. The end of the cylinder has a standard threaded interface, which is used for rigid connection with the rotating base of the calibration device; the bifurcated end is integrated with a hexagonal positioning module, the center is inlaid with a positioning pin, and the three-dimensional electric field sensor 31 and the corresponding counterbore at the bottom of the shielding shell 10 form an interference fit. The connection between the two arms adopts a round corner transition design, which can effectively control the deformation.

[0036] The fixed clamp 34 of the second rotating part is composed of a cylindrical base and a rectangular cuboid clamping part with a hollow gap. The cylindrical base is formed by precise machining to form an interface, which can be quickly docked with the connecting groove of the cylindrical shaft; the end of the rectangular cuboid is provided with a rectangular hollow area, the inner edge contour of which is gap-fitted with the calibration box of the three-dimensional electric field sensor 31, which not only ensures the radial positioning accuracy of the sensor during installation, but also leaves a fine tuning space to avoid mechanical stress concentration.

[0037] Specifically, the rotating clamp mechanism 30 is made of polytetrafluoroethylene material.

[0038] The rotating clamp mechanism 30 of the embodiment is made of polytetrafluoroethylene material, which has high insulation performance and can isolate unnecessary electric field conduction or current interference between the clamp and the electrode plate 20 and the three-dimensional electric field sensor 31, avoid introducing additional electric field noise, and ensure the purity of the calibration environment.

[0039] The embodiment of the application provides a three-dimensional electric field sensor calibration device, which is placed in a shielding shell 10, and a three-dimensional electric field sensor 31 based on a MEMS structure is placed in a rotating clamp mechanism 30; meanwhile, a fixed clamp 34 is fixed on an electrode plate 20, and the center plane of the whole calibration device is coincident with the plane of the electrode plate 20; first, the calibrated three-dimensional electric field sensor is installed in the shielding shell 10 made of metal, and the position is adjusted so that the xy plane of the three-dimensional electric field sensor 31 is perpendicular to the direction of a reference electric field E generated by the electrode plate 20. Under the action of the reference electric field E, the three-dimensional electric field sensor outputs , wherein , is a calibration parameter. The rotating clamp mechanism 30 is rotated so that the xz plane of the three-dimensional electric field sensor is perpendicular to the direction of the reference electric field E. Under the action of the reference electric field E, the three-dimensional electric field sensor outputs . Wherein , is a calibration parameter. The semicircular clamp 33 is rotated so that the yz plane of the three-dimensional electric field sensor 31 is perpendicular to the direction of the reference electric field E. Under the action of the reference electric field E, the three-dimensional electric field sensor outputs . Wherein , is a calibration parameter. After calibration in three directions, the electric fields in the x, y and z directions are obtained respectively, and the three-dimensional electric field value can be obtained through three-dimensional electric field decoupling.

[0040] In the second aspect, the embodiment of the application further provides a three-dimensional electric field sensor calibration method, which is applied to the three-dimensional electric field sensor calibration device and includes the following steps: Step S1, installing the three-dimensional electric field sensor on the rotating clamp mechanism and placing the three-dimensional electric field sensor in the shielding shell; Step S2, adjusting the posture of the three-dimensional electric field sensor through the rotating clamp mechanism so that different planes of the three-dimensional electric field sensor are sequentially perpendicular to the direction of a reference electric field, and recording the output voltage in each posture; In the calibration process, the three-dimensional electric field sensor based on MEMS is encapsulated in the shielding shell, and the spatial posture adjustment is realized through the rotating clamp mechanism. The fixed clamp is used to accurately align the plane of the electrode plate with the center of the calibration device, and the calibration is performed after the alignment.

[0041] Specifically, the adjusting the posture of the three-dimensional electric field sensor through the rotating clamp mechanism so that different planes of the three-dimensional electric field sensor are sequentially perpendicular to the direction of a reference electric field, and recording the output voltage in each posture includes: adjusting three specific orthogonal postures through the rotating clamp mechanism in sequence: Adjusting the three-dimensional electric field sensor to make its xy plane perpendicular to the electric field direction of the reference electric field, recording a first output voltage of the three-dimensional electric field sensor in a first posture; the first output voltage is expressed as: Adjusting the three-dimensional electric field sensor to make its xz plane perpendicular to the electric field direction of the reference electric field, recording a second output voltage of the three-dimensional electric field sensor in a second posture; the second output voltage is expressed as: Adjusting the three-dimensional electric field sensor to make its yz plane perpendicular to the electric field direction of the reference electric field, recording a third output voltage of the three-dimensional electric field sensor in a third posture; the third output voltage is expressed as: Step S3, according to the linear relationship between the output voltage and the electric field intensity, the three-dimensional electric field vector is obtained by inverse matrix decoupling operation.

[0042] Wherein, , , is a calibration parameter.

[0043] Specifically, according to the linear relationship between the output voltage and the electric field intensity, the three-dimensional electric field vector is obtained by inverse matrix decoupling operation, including: Based on the first output voltage, the second output voltage and the third output voltage, the sensitivity coefficient and the bias voltage of the three-dimensional electric field sensor in the direction of the three sensitive axes are calculated respectively; the sensitivity matrix is constructed according to the sensitivity coefficient, and the output voltage of the three-dimensional electric field sensor in the actual measurement is decoupled combined with the bias voltage, so as to obtain the three-dimensional electric field vector.

[0044] In specific implementation, based on three sets of orthogonal direction calibration parameters , , , a three-dimensional electric field decoupling model can be established. Assuming that the sensitive direction of the sensor in the three-dimensional rectangular coordinate system in space is , , , the measured electric field vector can be decoupled by the following formula: Wherein, is the sensitivity coefficient matrix in each direction. The coefficient matrix can be obtained by calibration experiment. In actual measurement, the output voltage of the sensor is known , after deducting the bias , the inverse or pseudo-inverse of the sensitivity matrix is used for solving, and the three-dimensional electric field vector distribution is obtained: ​ wherein, is the inverse matrix of the sensitivity matrix, By the decoupling process, the accurate reconstruction of the reference electric field space vector can be realized, and the three-dimensional electric field measurement requirement is met.

[0045] The three-dimensional electric field sensor calibration method of the embodiment of the application can accurately adjust the sensor posture through the double-rotating shaft rotating clamp mechanism, so that the xy, xz and yz planes are in turn perpendicular to the reference electric field, and three groups of output voltages in the orthogonal postures are obtained; combined with the linear relationship between the output voltage and the electric field intensity, the three-dimensional electric field component coupling effect and the three-axis non-ideal orthogonal error of the sensor are eliminated through the inverse matrix decoupling operation, the three-dimensional electric field vector calculation accuracy is greatly improved, and the limitation of the traditional single-axis calibration is solved. The electric field intensity and direction information are synchronously obtained, and the spatial distribution characteristics are completely characterized.

[0046] Those skilled in the art can appreciate that the units of the examples described in combination with the embodiments disclosed herein can be realized in electronic hardware, computer software or a combination of both, and in order to clearly illustrate the interchangeability of hardware and software, the components of the examples have been described in the above description in general terms. Whether the functions are realized in hardware or software depends on the specific application and design constraints of the technical solution. The skilled person can use different methods to realize the described functions for each specific application, but such implementation should not be considered beyond the scope of the present application.

[0047] In the embodiments provided in the present application, it should be understood that the division of units is only a logical functional division, and when actually implemented, there can be another division manner, for example, a plurality of units can be combined into one unit, one unit can be split into a plurality of units, or some features can be ignored, etc.

[0048] In addition, each functional unit in each embodiment of the present application can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of a software functional unit.

[0049] The integrated unit, if implemented in the form of a software function unit and sold or used as an independent product, can be stored in a computer readable storage medium. Based on such understanding, the technical solutions of the present application essentially or say the part that contributes to the prior art or the whole or part of the technical solutions can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes a plurality of instructions for causing a computer device (which can be a personal computer, a server or a network device, etc.) to execute all or part of the steps of the method described in the various embodiments of the present application. The aforementioned storage medium includes: a U disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a mobile hard disk, a magnetic disk or an optical disk, and various media that can store program codes.

[0050] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should be covered in the scope of the specification of the present application.

Claims

1. A three-dimensional electric field sensor calibration device, characterized by, The application relates to a three-dimensional electric field sensor calibration device. The device comprises: a shielding shell for isolating a three-dimensional electric field sensor to be calibrated from a reference electric field; an electrode plate installed in the shielding shell for generating a standard reference electric field; a rotating clamp mechanism installed in the shielding shell for clamping the three-dimensional electric field sensor and adjusting the spatial posture of the three-dimensional electric field sensor; the rotating clamp mechanism comprises: a first rotating part for driving the three-dimensional electric field sensor to rotate around a first axis to switch between a first posture and a second posture; a second rotating part for driving the three-dimensional electric field sensor to rotate around a second axis to adjust a third posture, wherein the first axis and the second axis are orthogonal rotating axes; 2. A three-dimensional electric field sensor calibration device according to claim 1, wherein, wherein the intersection of the first axis and the second axis coincides with the sensitive center of the three-dimensional electric field sensor.

3. A three-dimensional electric field sensor calibration device according to claim 2, wherein, The first rotating part is a double-ring nested structure comprising an inner ring and an outer ring, wherein the outer ring is used for nesting the second rotating part, and the inner ring is used for loading the three-dimensional electric field sensor.

4. The three-dimensional electric field sensor calibration device of claim 2, wherein, The outer ring is provided with a sector-shaped notch for limiting the rotating angle, so as to realize the full-directional rotation of the second rotating part by 180 degrees. The second rotating part comprises two half-circle ring clamps and corresponding fixed clamps, wherein the half-circle ring clamps adopt a Y-shaped topological configuration.

5. A three-dimensional electric field sensor calibration device according to any one of claims 1-4, characterized in that, The two sides of the half-circle ring clamp are provided with symmetric bifurcated arms, and the bifurcated arms are provided with positioning modules at the ends; the middle part of the half-circle ring clamp is provided with a cylindrical shaft, and the cylindrical shaft is provided with a connecting groove; the fixed clamp comprises a cylindrical base and a rectangular clamping part with a hollow notch; the connecting groove is connected with the cylindrical base; and the rectangular clamping part with the hollow notch is connected with the electrode plate.

6. A method of calibrating a three-dimensional electric field sensor, the method comprising: The rotating clamp mechanism is made of polytetrafluoroethylene material. The application is applied to the three-dimensional electric field sensor calibration device of any one of claims 1-5, and comprises the following steps: installing the three-dimensional electric field sensor on the rotating clamp mechanism and placing the three-dimensional electric field sensor in the shielding shell; adjusting the posture of the three-dimensional electric field sensor by the rotating clamp mechanism, so that different planes of the three-dimensional electric field sensor are sequentially perpendicular to the reference electric field direction, and recording the output voltage under each posture; 7. The method of claim 6, wherein, obtaining a three-dimensional electric field vector through inverse matrix decoupling operation according to the linear relationship between the output voltage and the electric field intensity. The step of adjusting the posture of the three-dimensional electric field sensor by the rotating clamp mechanism, so that different planes of the three-dimensional electric field sensor are sequentially perpendicular to the reference electric field direction, and recording the output voltage under each posture comprises: controlling the rotating clamp mechanism to sequentially execute the adjustment of three specific orthogonal postures: adjusting the three-dimensional electric field sensor so that the xy plane of the three-dimensional electric field sensor is perpendicular to the electric field direction of the reference electric field, and recording the first output voltage under the first posture; adjusting the three-dimensional electric field sensor so that the xz plane of the three-dimensional electric field sensor is perpendicular to the electric field direction of the reference electric field, and recording the second output voltage under the second posture; 8. The method of claim 7, wherein, adjusting the three-dimensional electric field sensor so that the yz plane of the three-dimensional electric field sensor is perpendicular to the electric field direction of the reference electric field, and recording the third output voltage. The step of obtaining a three-dimensional electric field vector through inverse matrix decoupling operation according to the linear relationship between the output voltage and the electric field intensity comprises: Based on the first output voltage, the second output voltage and the third output voltage, sensitivity coefficients and bias voltages of the three-dimensional electric field sensor in three sensitive axis directions are calculated respectively; According to the sensitivity coefficients, a sensitivity matrix is constructed, and the output voltage of the three-dimensional electric field sensor in actual measurement is decoupled combined with the bias voltages, so as to obtain a three-dimensional electric field vector.

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