Substrate positioning device for nanoimprint

Abstract

The invention discloses a substrate positioning device for nanoimprint, which belongs to the technical field of nanoimprint, and comprises a positioning mechanism for positioning and adjusting the position of the center point of a substrate, an adsorption mechanism for adsorbing and positioning the positioned and adjusted substrate, and a switching mechanism, the reset module is used for resetting the positioning disc after positioning adjustment and switching the position of the sucking disc II; by arranging the switching mechanism, compared with a three-step operation mode of moving and placing of a traditional mechanical arm, seamless connection of positioning and adsorption is achieved through collaborative design of the positioning mechanism and the adsorption mechanism, intermediate carrying steps are reduced, the positioning time of a single substrate is shortened, the continuous operation requirement of batch production is met, and the production efficiency is improved. The displacement risk is eliminated, the precision loss in the carrying link is eliminated, and meanwhile positioning deviation caused by vibration, inertia or path errors in traditional carrying is avoided.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of nanoimprint, and particularly relates to a substrate positioning device for nanoimprint. BACKGROUND

[0002] As a high-precision micro-nano structure manufacturing technology, nanoimprint technology has been widely applied in the fields of semiconductor chips, optical devices, biosensors and the like, and the core thereof is to accurately transfer a micro-nano pattern on a template to a substrate surface, and the positioning accuracy of the substrate directly determines the alignment error of the pattern transfer, and is a key link affecting the quality of the final product. At present, in the existing nanoimprint process, the substrate positioning usually adopts a separate operation mode of "positioning - moving - adsorbing", and in the actual production process, there are certain defects, the positioning mechanism and the adsorbing mechanism are independently arranged, and after the substrate is positioned, the three-step moving operation of "grabbing - moving - placing" is required through the mechanical hand, the intermediate link is redundant, the positioning cycle of a single substrate is prolonged, and it is difficult to adapt to the high-efficiency demand of batch production. In order to avoid the above technical problems, it is necessary to provide a substrate positioning device for nanoimprint to overcome the defects in the prior art. SUMMARY

[0003] The application aims to provide a substrate positioning device for nanoimprint to solve the problems in the background art.

[0004] To achieve the above-mentioned purpose, the application provides the following technical scheme: a substrate positioning device for nanoimprint comprises: A positioning mechanism is used to position and adjust the center point position of the substrate. The positioning mechanism comprises a positioning disc for bearing the substrate and a mounting platform, and the upper surface of the mounting platform is provided with a detection piece for positioning the substrate. An adsorbing mechanism is used to adsorb and position the substrate after the positioning and adjustment. The adsorbing mechanism comprises a suction disc I and a suction disc II, and the center of the suction disc I is provided with an opening slot matched with the suction disc II.

[0005] A switching mechanism is used to reset the positioning disc after the positioning and adjustment and switch the position of the suction disc II. The switching mechanism comprises a connecting seat I and a moving platform II which are horizontally and slidingly connected in the cavity of the mounting platform, the suction disc II is vertically and slidingly connected with the moving platform II, and the positioning disc is located on the connecting seat I and rotationally connected therewith.

[0006] As a preferred implementation, the inner wall of the mounting platform is fixedly connected with a guide rail one, the guide rail one is through and slidingly connected with a moving platform one, the surface of the moving platform one is fixedly connected with a moving seat one, the surface of the moving seat one is vertically slidingly connected with a mounting seat, the surface of the mounting seat is horizontally slidingly connected with a moving seat two, and the moving seat two is fixedly connected with a connecting seat one.

[0007] As a preferred implementation, the guide rail one is through and horizontally slidingly connected with a moving platform two, the moving platform two is through and fixedly installed with an electric push rod, and the telescopic end of the electric push rod is fixedly connected with the lower surface of a suction disc two.

[0008] As a preferred implementation, the lower surface of the suction disc two is fixedly connected with a limiting rod one, the limiting rod one is through and vertically slidingly connected with the moving platform two.

[0009] As a preferred implementation, the upper surface of the suction disc one is provided with a protruding block, the surface of the protruding block is provided with a fine hole for adsorbing a base disc, and the bottom side of the suction disc one and the suction disc two is provided with a connecting port in communication with the fine hole.

[0010] As a preferred implementation, the upper surface of the suction disc one is fixedly connected with a placing disc, the lower surface of the placing disc is provided with an annular groove matched with the suction disc two, and the surface of the placing disc is provided with an arc-shaped groove matched with the protruding block, so as to ensure that the surface of the suction disc one is in a horizontal state and facilitate the placement of the base plate.

[0011] As a preferred implementation, the surface of the mounting platform is fixedly connected with a connecting seat two, the connecting seat two is horizontally slidingly connected with a moving seat three extending towards the suction disc one, and the lower surface of the moving seat three is vertically limitingly connected with a magnetic block for positioning the edge of the base disc.

[0012] As a preferred implementation, the connecting seat two and the moving seat three are arranged in an annular array at the periphery of the suction disc one, and one end of the moving seat three close to the connecting seat two is fixedly connected with a limiting rod two through and horizontally slidingly connected with the connecting seat two.

[0013] As a preferred implementation, the mounting platform is horizontally slidingly connected with a bearing seat fixedly connected with a detection piece, and the upper surface of the mounting platform is fixedly connected with a guide rail two through and slidingly connected with the bearing seat.

[0014] Compared with the prior art, the present application has the following advantages: Compared with the three-step operation mode of the traditional mechanical hand grabbing and moving and placing, the seamless connection of positioning and adsorption is realized through the cooperative design of the positioning mechanism and the adsorption mechanism, the intermediate carrying step is reduced, the positioning time of a single substrate is shortened, the continuous operation demand of batch production is adapted, the precision loss of the carrying link is eliminated, and the positioning deviation caused by vibration, inertia or path error in traditional carrying is avoided. The positioning mechanism and the adsorption mechanism are integrated, the horizontal position of the moving seat three on the connecting seat two can be adjusted, different sizes of substrates can be adapted, the distribution design of the convex blocks and the radial fine holes on the surface of the suction cup one ensures uniform adsorption of various substrates, and local deformation of the substrate during adsorption can be avoided.

[0015] The horizontal movement of the moving seat three can adapt to the edge positioning demand of different substrates, the horizontal movement can retreat, interference caused by subsequent operation of different sizes of substrates can be avoided, the traditional positioning device lacks a targeted pressing structure, which further aggravates the pattern transfer error, the magnetic block is driven downward by the electromagnet, the arc-shaped sheet at the bottom can be attached to the edge of the substrate, the edge warping of the substrate before adsorption or embossing is prevented, and the flatness of the substrate is further ensured. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 The whole three-dimensional structure of the present application is shown Figure 1 ; Figure 2 The mounting platform of the present application is shown Figure 3 The internal structure of the mounting platform of the present application is shown Figure 4 The positioning mechanism of the present application is shown Figure 5 The switching mechanism of the present application is shown Figure 6 The structure of the suction cup two of the present application is shown Figure 7 The structure of the placing disc of the present application is shown Figure 8 The structure of the suction cup one of the present application is shown Figure 9 The structure of the connecting seat two of the present application is shown

[0017] In the diagram: 1. Mounting platform; 2. Bearing seat; 3. Detection component; 4. Positioning plate; 5. Placement plate; 6. Suction cup one; 7. Suction cup two; 8. Movable seat one; 9. Movable platform one; 10. Mounting seat; 11. Movable seat two; 12. Connecting seat one; 13. Movable platform two; 14. Guide rail one; 15. Limiting rod one; 16. Electric push rod one; 17. Annular groove; 18. Arc groove; 19. Connection port; 20. Protrusion; 21. Connecting seat two; 22. Movable seat three; 23. Magnetic block; 24. Limiting rod two. Detailed Implementation

[0018] The present invention will be further described below with reference to embodiments.

[0019] The following embodiments are used to illustrate the present invention, but should not be used to limit the scope of protection of the present invention. The conditions in the embodiments can be further adjusted according to specific conditions, and simple improvements to the method of the present invention under the premise of the concept of the present invention are all within the scope of protection claimed by the present invention.

[0020] Please see Figure 1 - Figure 9 The present invention provides a substrate positioning device for nanoimprinting, comprising: The positioning mechanism is used to position and adjust the center point of the substrate; the servo motor drives the positioning disk 4 to rotate, which drives the substrate to rotate synchronously, so that the positioning notch on the substrate surface cooperates with the detection element 3 to achieve preliminary center point calibration.

[0021] The positioning mechanism includes a positioning disk 4 for supporting the substrate and a mounting platform 1. The upper surface of the mounting platform 1 is provided with a detection element 3 for positioning the substrate in conjunction with the positioning disk 4. The detection element 3 can be a visual sensor or a laser displacement sensor. Visual sensors are used to identify notches on the edges of the substrate; laser displacement sensors are used to detect the flatness of the substrate. An adsorption mechanism is used to adsorb and position the substrate after positioning adjustment. The adsorption mechanism includes a first suction cup 6 and a second suction cup 7. The center of the first suction cup 6 has an opening groove that fits with the second suction cup 7. The mounting platform 1 has a cavity for the positioning plate 4 and the second suction cup 7 to be stored. Compared with traditional adsorption mechanisms that mostly use a single suction cup, this solution uses the first suction cup 6 and the second suction cup 7, which has strong adaptability to substrates of different sizes. The suction force is uniform and does not easily cause local deformation of the substrate, thus ensuring the integrity of the imprinted pattern. A switching mechanism is used to switch the positioned disk 4 to the suction cup 2 7 after positioning; The switching mechanism includes a connecting seat 12 and a moving platform 13 that are horizontally slidably connected to the cavity of the mounting platform 1, a suction cup 7 that is vertically slidably connected to the moving platform 13, and a positioning disk 4 located on the connecting seat 12 and rotatably connected to it. By setting the switching mechanism, the positioning mechanism and the adsorption mechanism can be integrated. The existing mechanical hand carrying needs to be operated through three steps of "grabbing-moving-placing". Through the cooperative design of the positioning mechanism and the adsorption mechanism, the positioning and adsorption can be seamlessly connected, the operation steps and time are reduced, and the production efficiency is improved. Meanwhile, in the multi-step operation, the substrate is easily affected by vibration, inertia or path error to affect the positioning accuracy. The positioning mechanism is switched out of positioning, so that the base plate directly falls on the adsorption mechanism, eliminating the displacement risk of the carrying link, and the accuracy can be improved. The integrated design of the positioning mechanism and the adsorption mechanism can realize modular configuration, adapt to different sizes of base plate, and effectively improve the flexibility of the device.

[0022] The inner wall of the mounting platform 1 is fixedly connected with a guide rail one 14, the guide rail one 14 penetrates and is slidingly connected with a moving platform one 9, the surface of the moving platform one 9 is fixedly connected with a moving seat one 8, the surface of the moving seat one 8 is vertically slidingly connected with a mounting seat 10, the surface of the mounting seat 10 is horizontally slidingly connected with a moving seat two 11, the moving seat two 11 is fixedly connected with a connecting seat one 12. When the moving platform one 9 slides along the moving platform two 13, the positioning disc 4 can move in the first direction. When the mounting seat 10 vertically slides downward on the moving seat one 8, the positioning disc 4 can vertically move downward, so that the positioning disc 4 is stored in the mounting platform 1, and the moving platform one 9 moves away from the direction of the moving platform two 13, so that the suction disc two 7 moves to the bottom of the suction disc one 6, so that the suction disc one 6 and the suction disc two 7 are reset and combined to realize adsorption and fixation of the substrate.

[0023] Further, by moving the mounting seat 10 in the vertical direction, the position of the positioning disc 4 in the vertical direction is adjusted, the connecting seat one 12 is fixedly provided with a servo motor for driving the positioning disc 4 to rotate, so that the substrate on the positioning disc 4 is driven to rotate, the substrate rotates so that the notch on the surface of the substrate is matched with the detection piece 3, the detection piece 3 detects the substrate, and the positioning disc 4 realizes positioning of the center point of the substrate. When the positioning disc 4 positions the substrate, the connecting seat one 12 moves in the horizontal direction along the moving seat two 11, and the moving platform one 9 moves along the moving platform two 13, so that the horizontal and vertical directions of the positioning disc 4 are adjusted. The shaft fixedly connected with the positioning disc 4 moves in the opening groove in the center of the suction disc one 6, so that the center point of the substrate is adjusted and positioned, so that the center point of the substrate can overlap with the center point of the suction disc one 6, and the subsequent adsorption and pressing operation are facilitated.

[0024] The guide rail one 14 penetrates the moving platform two 13 and is connected with the moving platform two 13 horizontally and slidably, the moving platform two 13 is penetrated and fixedly installed with the electric push rod one 16, the telescopic end of the electric push rod one 16 is fixedly connected with the lower surface of the suction cup two 7, when the positioning disc 4 is vertically downward, the positioned substrate is placed on the suction cup one 6, and is in the storage state, the electric push rod one 16 on the moving platform two 13 is started, and the telescopic end of the electric push rod one 16 pushes the suction cup two 7 to move in the vertical direction.

[0025] Further, in the scheme, the corresponding moving platform one 9, the mounting seat 10, the moving seat two 11 and the moving platform two 13 are driven by the cooperation of the servo motor and the lead screw, the servo motor drives the corresponding moving platform one 9, the mounting seat 10, the moving seat two 11 and the moving platform two 13 to move accurately, so that the positioning disc 4 moves accurately on the XYZ axis, and the stability of the positioning process and the switching process is ensured.

[0026] The lower surface of the suction cup two 7 is fixedly connected with the limiting rod one 15, the limiting rod one 15 penetrates the moving platform two 13 and is connected with the moving platform two 13 vertically and slidably, the vertical direction of the suction cup two 7 is limited by the limiting rod one 15, so that the suction cup two 7 can move stably in the vertical direction.

[0027] The upper surface of the suction cup one 6 is provided with the convex block 20, the surface of the convex block 20 is provided with the fine hole for adsorbing the substrate, the bottom side of the suction cup one 6 and the suction cup two 7 is provided with the connecting port 19 in communication with the fine hole, the fine hole can prevent the substrate from deforming, so that the substrate can be adsorbed stably, the convex block 20 is arranged in a plurality of groups in a ring array, and the grooves of each group of convex blocks 20 are arranged radially from inside to outside, the connecting port 19 is used for being connected with an external negative pressure mechanism, and the substrate is positioned by a negative pressure mode.

[0028] The upper surface of the suction cup one 6 is fixedly connected with the placing disc 5, the lower surface of the placing disc 5 is provided with the annular groove 17 matched with the suction cup two 7, the annular groove 17 is used for ensuring that the suction cup one 6 and the suction cup two 7 are repeatedly matched, and the surface of the placing disc 5 is provided with the arc-shaped groove 18 matched with the convex block 20, so as to ensure that the surface of the suction cup one 6 is in a horizontal state and facilitates the placement of the substrate.

[0029] The surface of the mounting platform 1 is fixedly connected with a connecting seat two 21, the connecting seat two 21 is horizontally and slidingly connected with a moving seat three 22 extending towards the suction disc one 6, the lower surface of the moving seat three 22 is vertically and limitingly connected with a magnetic block 23 for positioning the edge of the base disc, the magnetic block 23 moves in the vertical direction and contacts the base plate on the suction disc one 6, which can prevent the edge of the base plate from warping and ensure that the base plate is stably positioned on the suction disc one 6 for subsequent installation and placement, specifically, the moving seat three 22 is internally provided with an electromagnet and a spring mechanism matched with the magnetic block 23, when the electromagnet is powered, the magnetic block 23 is pushed down under the repulsive force, so that the magnetic block 23 can be attached to the edge of the base plate.

[0030] Furthermore, the conventional positioning device lacks a targeted pressing structure, which further aggravates the pattern transfer error, the bottom end of the magnetic block 23 is fixedly connected with an arc-shaped piece corresponding to the base disc, by arranging the arc-shaped piece, the edge of the base disc can be better pressed to prevent the edge of the base disc from warping.

[0031] As shown in Figure 2 The connecting seat two 21 and the moving seat three 22 are arranged in an annular array at the periphery of the suction disc one 6, one end of the moving seat three 22 close to the connecting seat two 21 is fixedly connected with a limiting rod two 24 penetrating through the connecting seat two 21 and being horizontally and slidingly connected with the connecting seat two 21, an electric push rod two is arranged on the connecting seat two 21, the telescopic end of the electric push rod two is connected with the moving seat three 22, the electric push rod two drives the moving seat three 22 to move in the horizontal direction, which can assist in positioning according to base plates of different sizes.

[0032] The mounting platform 1 is horizontally and slidingly connected with a bearing seat 2 fixedly connected with the detection piece 3, the upper surface of the mounting platform 1 is fixedly connected with a guide rail two penetrating through the bearing seat 2 and being slidingly connected with the bearing seat 2; One side of the mounting platform 1 close to the bearing seat 2 is provided with an electric push rod three, the bearing seat 2 is driven to move on the guide rail two by the electric push rod three, the servo motor drives the positioning disc 4 to rotate to cooperate with the detection piece 3 to identify the gap of the base plate and complete the angle calibration; the moving platform one 9 slides along the guide rail one 14, the guide rail one 14 is a linear guide rail, the moving seat two 11 slides along the mounting seat 10 to adjust the horizontal position of the positioning disc 4, so that the center point of the base plate is aligned with the center point of the suction disc one 6; after calibration, the electric push rod three drives the detection piece 3 to retreat to avoid interfering with subsequent operations.

[0033] The working principle and use process of the present application are as follows: The base plate is carried by the mechanical hand and placed on the positioning disc 4, the servo motor on the connecting seat one 12 is started to drive the positioning disc 4 to rotate with the base plate; The electric push rod three is started to drive the bearing seat 2 to move the detection piece 3 towards the base plate, the detection piece 3 identifies the positioning gap of the edge of the base plate, sends a signal to the electric control system, and the servo motor stops rotating to complete the preliminary calibration of the angle of the base plate; By sliding the moving platform one 9 along the guide rail one 14 and sliding the moving seat two 11 along the mounting seat 10, the horizontal position of the positioning disc 4 is adjusted to align the center point of the substrate with the center point of the suction disc one 6. After the adjustment is completed, the electric push rod three drives the detection piece 3 to retreat to avoid interference with subsequent operations. The mounting seat 10 is vertically lowered along the moving seat one 8, and the positioning disc 4 is stored in the cavity of the mounting platform 1, and the substrate is stably placed on the protrusion 20 of the suction disc one 6. The moving platform one 9 slides along the guide rail one 14 away from the suction disc two 7, and the positioning disc 4 completely exits the adsorption area; the moving platform two 13 drives the suction disc two 7 to slide to the opening slot directly below the suction disc one 6, and the electric push rod one 16 drives the suction disc two 7 to vertically rise and fit with the suction disc one 6. Start the external negative pressure mechanism, the suction disc one 6 and the suction disc two 7 generate negative pressure through the fine hole, adsorb the substrate, the negative pressure is kept at-80kPa~ -90kPa, to avoid the deformation of the substrate caused by excessive suction force; The electric push rod two on the connecting seat two 21 pushes the moving seat three 22 to move towards the edge of the substrate until the magnetic block 23 is aligned with the edge of the substrate, the electromagnet is electrified, generates repulsive force to push the magnetic block 23 to move down, and the arc-shaped piece is attached to the edge of the substrate to prevent the edge from warping. After positioning, the electric control system sends a signal to the nano-imprinting device to start the subsequent imprinting process. After the imprinting is completed, the negative pressure mechanism is depressurized, the electromagnet is de-energized, the magnetic block 23 is reset under the action of the spring mechanism, and the moving seat three 22, the moving platform two 13 and the positioning disc 4 are reset in turn, waiting for the positioning of the next substrate.

[0034] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A substrate positioning device for nanoimprint, characterized by: The utility model relates to a substrate positioning device, which comprises the following parts: a positioning mechanism for positioning and adjusting the center point position of a substrate; the positioning mechanism comprises a positioning disc (4) for carrying the substrate and a mounting platform (1), and the upper surface of the mounting platform (1) is provided with a detection piece (3) for positioning the substrate; an adsorption mechanism for adsorbing and positioning the substrate after positioning and adjusting; the adsorption mechanism comprises a suction disc I (6) and a suction disc II (7), and the center of the suction disc I (6) is provided with an open slot that matches the suction disc II (7); a switching mechanism for resetting the positioning disc (4) after positioning and adjusting and switching the position of the suction disc II (7); the switching mechanism comprises a connecting seat I (12) and a moving platform II (13) that are horizontally and slidingly connected in the cavity of the mounting platform (1), the suction disc II (7) is vertically and slidingly connected with the moving platform II (13), and the positioning disc (4) is located on the connecting seat I (12) and is rotationally connected with the connecting seat I (12).

2. The substrate positioning device for nanoimprint according to claim 1, wherein: The inner wall of the mounting platform (1) is fixedly connected with a guide rail I (14), the guide rail I (14) penetrates and is slidingly connected with a moving platform I (9), the surface of the moving platform I (9) is fixedly connected with a moving seat I (8), the surface of the moving seat I (8) is vertically and slidingly connected with a mounting seat (10), the surface of the mounting seat (10) is horizontally and slidingly connected with a moving seat II (11), and the moving seat II (11) is fixedly connected with the connecting seat I (12).

3. The substrate positioning device for nanoimprint according to claim 2, wherein: The guide rail I (14) penetrates and is horizontally and slidingly connected with the moving platform II (13), the moving platform II (13) is penetrated and fixedly installed with an electric push rod I (16), and the telescopic end of the electric push rod I (16) is fixedly connected with the lower surface of the suction disc II (7).

4. The substrate positioning device for nanoimprint according to claim 3, wherein: The lower surface of the suction disc II (7) is fixedly connected with a limiting rod I (15), the limiting rod I (15) penetrates and is vertically and slidingly connected with the moving platform II (13).

5. The substrate positioning device for nanoimprint according to claim 4, wherein: The upper surface of the suction disc I (6) is provided with a lug (20), the surface of the lug (20) is provided with a fine hole for adsorbing the substrate, and one side of the bottom of the suction disc I (6) and the suction disc II (7) is provided with a connecting port (19) that is in communication with the fine hole.

6. The substrate positioning device for nanoimprint according to claim 5, wherein: The upper surface of the suction disc I (6) is fixedly connected with a placing disc (5), the lower surface of the placing disc (5) is provided with an annular groove (17) that matches the suction disc II (7), and the surface of the placing disc (5) is provided with an arc-shaped groove (18) that matches the lug (20), so that the surface of the suction disc I (6) is kept in a horizontal state and the substrate is conveniently placed.

7. The substrate positioning device for nanoimprint according to claim 1, wherein: The surface of the mounting platform (1) is fixedly connected with a connecting seat II (21), the connecting seat II (21) is horizontally and slidingly connected with a moving seat III (22) that extends towards the suction disc I (6), and the lower surface of the moving seat III (22) is vertically and limitingly connected with a magnetic block (23) for positioning the edge of the substrate.

8. The substrate positioning device for nanoimprint according to claim 7, wherein: The connecting seat II (21) and the moving seat III (22) are arranged in a ring array around the suction disc I (6), and one end of the moving seat III (22) close to the connecting seat II (21) is fixedly connected with a limiting rod II (24) that penetrates and is horizontally and slidingly connected with the connecting seat II (21).

9. The substrate positioning device for nanoimprint according to claim 1, wherein: The mounting platform (1) is horizontally and slidingly connected with a bearing seat (2) fixedly connected with a detection member (3), and the upper surface of the mounting platform (1) is fixedly connected with a guide rail two penetrating through the bearing seat (2) and slidingly connected with the bearing seat (2).

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