Vacuum adsorption device and method for substrate glass feeding robot

Abstract

The invention belongs to the field of plate glass manufacturing through an overflow down-draw method, and relates to a vacuum adsorption device and method for a substrate glass feeding robot. Comprising a plate feeding robot frame; the vacuum adsorption device body is mounted on the plate feeding robot frame through a bracket; the displacement air cylinder is connected with the vacuum adsorption device body; the displacement air cylinder is used for driving the vacuum adsorption device body to execute stretching and retracting movement. The negative pressure sucking pump is connected with the vacuum adsorption device body through an air guide pipe; and the negative pressure sucking pump is used for providing negative pressure adsorption force. The stability in the glass carrying process is effectively improved, the breakage rate is reduced, and the production efficiency and equipment maintenance convenience are improved.

Description

Technical Field

[0001] This invention belongs to the field of overflow pull-down method for manufacturing flat glass, and relates to a vacuum adsorption device and method for a robot on a substrate glass plate. Background Technology

[0002] In the process of producing substrate glass using the overflow pull-down method, a loading robot is used to transport the high-temperature formed glass sheets from the handover position to the target loading position. Traditional loading robots typically use bottom-mounted auxiliary suction cups to adhere and fix the glass sheets. However, due to the small suction area and limited suction force of the suction cups, the glass sheets are prone to shaking or even falling off during robot movement. Especially in high-temperature environments, the rubber suction cups are susceptible to thermal deformation, causing seal failure and leading to vacuum leakage, which seriously affects the stability of handling and the yield rate. In addition, tiny glass powder and fragments generated during glass processing can easily enter the vacuum system, clogging pipelines or damaging the pump body, further reducing equipment reliability.

[0003] Current technologies primarily rely on auxiliary suction cups for glass adsorption, but their simple structure and limited functionality fail to meet the demands for high stability, long lifespan, and self-cleaning capabilities. Due to insufficient suction force, the glass plate is prone to vibration and displacement during robot movement, leading to edge collisions and breakage. Furthermore, frequent replacement of clogged or aged suction cups not only increases maintenance costs but also causes unplanned downtime, impacting overall production efficiency. Summary of the Invention

[0004] To address the problem of glass plate wobbling and breakage caused by unstable adsorption during displacement in existing technologies, this invention provides a vacuum adsorption device and method for substrate glass loading robots. This effectively improves the stability of glass handling, reduces breakage rate, and enhances production efficiency and equipment maintenance convenience.

[0005] To achieve the above objectives, the present invention employs the following technical solution: In a first aspect, the present invention provides a robotic vacuum adsorption device for substrate glass, comprising: Upper robot frame; The vacuum adsorption device body is mounted on the upper plate robot frame via a bracket; A displacement cylinder is connected to the body of the vacuum adsorption device; the displacement cylinder is used to drive the body of the vacuum adsorption device to perform extension and retraction movements. A negative pressure suction pump is connected to the vacuum adsorption device body through an air guide pipe; the negative pressure suction pump is used to provide negative pressure adsorption force.

[0006] Preferably, the vacuum adsorption device body includes a high-temperature resistant rubber sealing ring, an impurity filter screen, and an air inlet; The vacuum adsorption device has a through airflow channel inside its body; the high-temperature resistant rubber sealing ring is arranged around the adsorption end inlet of the airflow channel. The impurity filter screen is fixedly installed in the airflow channel and located between the adsorption end inlet and the connection port of the air guide tube. The air inlet is located on the wall of the airflow channel and on the side of the impurity filter screen away from the adsorption end inlet.

[0007] Preferably, there are multiple air inlets, which are evenly arranged around the axis of the airflow channel.

[0008] Preferably, the outer edge of the high-temperature resistant rubber sealing ring protrudes beyond the adsorption end face of the vacuum adsorption device body.

[0009] Preferably, the negative pressure air pump is equipped with an air intake adjustment mechanism, which is used to adjust the air pumping rate of the negative pressure air pump.

[0010] Preferably, the vacuum adsorption device's negative pressure pump is equipped with an airflow reversing structure, which is used to switch the airflow direction in the air guide pipe, so that the air guide pipe and the airflow channel of the vacuum adsorption device body can selectively achieve air intake or air blowing.

[0011] Preferably, a suction cup is also installed at the bottom of the upper robot frame, and the adsorption end face of the vacuum adsorption device body is aligned with the adsorption end face of the suction cup.

[0012] Secondly, the present invention provides a method for robotic vacuum adsorption of a substrate glass plate, comprising the following steps: Start the negative pressure pump to create a negative pressure inside the vacuum adsorption device body; Control the upper-board robot to move to the glass handover position; The displacement cylinder is extended to drive the vacuum adsorption device body to move toward the upper edge of the glass plate until the adsorption end face of the vacuum adsorption device body contacts the upper edge of the glass plate and forms a seal. The upper edge of the glass plate is fixed by adsorption through the negative pressure inside the vacuum adsorption device body; Control the upper plate robot to move the adsorbed glass plate to the target upper plate position.

[0013] Preferably, the negative pressure air pump is in continuous operation throughout the entire working cycle of the upper-board robot.

[0014] Preferably, the method further includes a cleaning step: Control the negative pressure air pump to switch to air blowing mode; The positive airflow generated by the negative pressure pump removes glass powder or fragments accumulated inside the vacuum adsorption device body, and / or removes dust from the air duct.

[0015] Compared with the prior art, the present invention has the following beneficial effects: By setting up an adsorption structure consisting of an upper robot frame, a vacuum adsorption device body, a displacement cylinder, and a negative pressure pump, the displacement cylinder pushes the vacuum adsorption device body to contact the upper edge of the glass and form a seal. Then, the negative pressure pump draws air to generate negative pressure to achieve stable adsorption. This solves the problems of insufficient suction force and high-temperature deformation of traditional auxiliary suction cups, which cause large shaking and easy breakage during glass handling. It effectively improves the stability of glass handling, reduces the breakage rate, and improves production efficiency and equipment maintenance convenience. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a first-view view of a robot vacuum adsorption device for substrate glass mounting according to the present invention. Figure 2 This is a second-view view of a robot vacuum adsorption device for substrate glass mounting according to the present invention. Figure 3 This is a first-view view of the vacuum adsorption device body. Figure 4 This is a second-view perspective view of the vacuum adsorption device.

[0018] The components include: 1. Upper robot frame; 2. Suction cup; 3. Vacuum adsorption device body; 4. Negative pressure air pump; 5. High temperature resistant rubber sealing ring; 6. Impurity filter screen; 7. Air inlet; 8. Displacement cylinder; 9. Air guide pipe; 10. Support frame. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of the embodiments of the present invention, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] Furthermore, the use of the term "horizontal" does not imply that the component must be absolutely horizontal, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0024] In the description of the embodiments of the present invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific circumstances.

[0025] The present invention will now be described in further detail with reference to the accompanying drawings: The first objective of this invention is to provide a robotic vacuum adsorption device for substrate glass, such as... Figures 1-2 As shown, it includes: Upper robot frame 1; The vacuum adsorption device body 3 is mounted on the upper plate robot frame 1 via a bracket 10; A displacement cylinder 8 is connected to the vacuum adsorption device body 3; the displacement cylinder 8 is used to drive the vacuum adsorption device body 3 to perform extension and retraction movements. The negative pressure pump 4 is connected to the vacuum adsorption device body 3 through the air guide pipe 9; the negative pressure pump 4 is used to provide negative pressure adsorption force.

[0026] The loading robot frame 1, serving as the supporting foundation of the entire device, can be integrated into the mobile platform of the automated loading robot. It possesses three-dimensional spatial motion capabilities and is used to precisely transport glass panels from the handover position to the target loading position. This loading robot frame 1 can be made of high-strength aluminum alloy or stainless steel to balance lightweight design with structural rigidity, adapting to frequent start-stop operations and high-speed running.

[0027] The vacuum adsorption device body 3 is fixedly mounted on the upper robot frame 1 via a bracket 10. Its position can be adjusted according to the actual glass size and handover posture to ensure that the adsorption end face can be accurately aligned with the upper edge area of ​​the glass plate. The vacuum adsorption device body 3 has a block or strip-shaped structure with a through airflow channel inside. It is connected to the negative pressure pump 4 through the air guide pipe 9 to form a complete negative pressure circuit system. Its adsorption end face is designed as a flat or slightly arc-shaped surface to adapt to glass edge surfaces with different curvatures and improve sealing reliability.

[0028] One end of the displacement cylinder 8 is connected to the upper robot frame 1 or the support 10, and the other end is connected to the vacuum adsorption device body 3, which is used to drive the latter to perform linear reciprocating motion relative to the robot frame. This displacement cylinder 8 can be a standard industrial double-acting cylinder, or it can be replaced with an electric actuator or a servo linear module, providing controllable extension and retraction strokes while meeting response speed requirements. Through this mechanism, the adsorption device body 3 can be actively pushed close to the glass surface after the robot reaches the predetermined position, avoiding poor contact or impact damage caused by positioning errors.

[0029] The negative pressure pump 4, acting as a negative pressure generating device, is connected to the airflow channel of the vacuum adsorption device body 3 via the air guide pipe 9, continuously drawing in internal air to create a negative pressure environment. This negative pressure pump 4 can be of various types, such as a rotary vane vacuum pump, a vortex pump, or a venturi tube vacuum generator, and can be flexibly selected according to on-site air supply conditions and energy consumption requirements. When the vacuum adsorption device body 3 is in contact with the glass surface, the negative pressure pump 4 starts and establishes a stable negative pressure zone within the sealed chamber, thereby generating an adsorption force perpendicular to the contact surface, achieving effective clamping of the glass plate.

[0030] like Figures 3-4 As shown, the vacuum adsorption device body 3 includes a high-temperature resistant rubber sealing ring 5, an impurity filter screen 6, and an air inlet 7. The vacuum adsorption device body 3 has a through airflow channel inside; the high-temperature resistant rubber sealing ring 5 is arranged around the adsorption end inlet of the airflow channel. The impurity filter screen 6 is fixedly installed in the airflow channel and located between the adsorption end inlet and the connection port of the air guide pipe 9. The air inlet 7 is located on the wall of the airflow channel and on the side of the impurity filter 6 away from the adsorption end inlet.

[0031] A high-temperature resistant rubber sealing ring 5 is arranged around the adsorption end inlet of the airflow channel to contact the glass plate surface and form a sealing interface during adsorption. This sealing ring is made of high-temperature resistant elastic materials such as fluororubber, silicone rubber, or EPDM rubber, and can operate for extended periods in high-temperature environments without significant aging or deformation. When the vacuum adsorption device body 3 abuts against the upper edge of the glass plate, the sealing ring is compressed and undergoes elastic deformation, filling microscopic uneven areas, effectively preventing air leakage and improving adsorption stability.

[0032] The impurity filter screen 6 is fixedly installed in the airflow channel, located between the adsorption end inlet and the connection port of the air guide pipe 9, to intercept glass dust, debris, or other particulate matter that enters with the airflow. This filter screen can be made of stainless steel wire mesh, sintered metal porous material, or polymer microporous filter membrane, with a pore size generally ranging from 10μm to 100μm, sufficient to block most of the tiny particles generated during glass processing, while ensuring that the airflow meets the adsorption requirements. Furthermore, the filter screen can be configured with a double-layer structure: an outer coarse filter screen to intercept large particles, and an inner fine filter screen to further purify the airflow, thereby improving filtration efficiency and service life.

[0033] The air inlet 7 is located on the wall of the airflow channel, on the side of the impurity filter 6 away from the adsorption end inlet, i.e., downstream of the filtered airflow path. This arrangement ensures that incoming air must pass through the filter before entering the main airflow channel, preventing unfiltered contaminants from directly entering the pump body. The number of air inlets 7 can be adjusted according to flow requirements, and their arrangement can be a single axial opening or multiple holes evenly arranged around the axis of the airflow channel. The air inlets 7 can also be equipped with a throttle valve or regulating baffle to achieve local control of the intake rate.

[0034] The outer edge of the high-temperature resistant rubber sealing ring 5 protrudes from the adsorption end face of the vacuum adsorption device body 3, so that the sealing ring preferentially undergoes elastic deformation when in contact with the glass surface, thereby effectively filling the micro-uneven or local contamination areas on the glass surface, forming a tighter and more stable sealing interface, and thus ensuring reliable adsorption performance under negative pressure environment.

[0035] The negative pressure air pump 4 is equipped with an air intake adjustment mechanism, which is used to adjust the air extraction rate of the negative pressure air pump 4. The air intake adjustment mechanism can take several forms, including but not limited to the following: one is to change the operating frequency of the pump body by adjusting the speed of the drive motor, for example, by using a variable frequency motor in conjunction with a PLC control system to automatically adjust the output power according to the set parameters; another is to set an adjustable valve structure on the air inlet pipe, such as an electric throttle valve or a pneumatic butterfly valve, to limit the gas flow rate entering the pump body by changing the opening degree, thereby indirectly controlling the air extraction rate.

[0036] The function of the suction volume adjustment mechanism is to allow the negative pressure suction pump 4 to flexibly adjust the suction rate according to factors such as the actual size, weight, and surface flatness of the glass plate being transported, thereby controlling the negative pressure level inside the vacuum adsorption device body 3. For example, when transporting thinner or more fragile substrate glass, the suction rate can be reduced to decrease the adsorption force and avoid the risk of breakage due to local stress concentration; while when handling large-area or high-inertia glass plates, the suction rate can be increased to enhance adsorption stability and prevent slippage or detachment during transportation.

[0037] The negative pressure vacuum pump 4 is equipped with an airflow reversing structure, which is used to switch the airflow direction within the air guide pipe 9, allowing the air guide pipe 9 and the airflow channel of the vacuum adsorption device body 3 to selectively achieve suction or blowing. This pump can be a conventional type such as a positive displacement vacuum pump, rotary vane pump, or screw pump, or a composite pump with positive pressure output capability can be selected to meet the requirements of the subsequent airflow reversing function. In this embodiment, the negative pressure vacuum pump 4 is specially equipped with an airflow reversing structure, which is independently set at the pump outlet end or integrated into the internal flow channel of the pump, and is used to regulate the gas flow direction. The airflow reversing structure can be an electromagnetic reversing valve, a mechanical three-way valve, a proportional directional control valve, or other fluid control elements with flow channel switching function. Its switching action can be automatically triggered by the control system or manually set by the operator.

[0038] The function of the airflow reversing structure is to change the airflow direction within the air guide pipe 9, thereby achieving selective control of the working state of the internal air passage of the vacuum adsorption device body 3. When in the suction mode, the airflow reversing structure connects the negative pressure pump 4 and the air guide pipe 9 to form a negative pressure channel, forming the suction mode. At this time, gas is drawn in from the adsorption end of the vacuum adsorption device body 3, enters the pump body through the air guide pipe 9 and is discharged, thereby generating negative pressure at the adsorption end face, achieving reliable adsorption of the upper edge of the glass plate. When in the blowing mode, the airflow reversing structure switches the flow channel connection relationship, causing the negative pressure pump 4 to switch to a positive pressure output mode or introducing external compressed air into the system, forming the blowing mode. At this time, gas flows in reverse from the pump end or the gas source end through the air guide pipe 9 into the internal air passage of the vacuum adsorption device body 3, and is ejected from the adsorption end, forming an outward airflow impact force.

[0039] The bottom of the upper robot frame 1 is also equipped with a suction cup 2, and the adsorption end face of the vacuum adsorption device body 3 is aligned with the adsorption end face of the suction cup 2. The suction cup 2 is usually made of flexible polymer material, such as silicone rubber or polyurethane, which has good sealing and cushioning performance. The suction cup 2 is connected to the external air extraction system through an internal negative pressure chamber, which can form a local vacuum area when in contact with the glass surface, thereby achieving adsorption and fixation of the bottom or middle area of ​​the glass. The number of suction cups 2 can be set to a single or multiple arrays according to the actual load requirements to optimize the force distribution.

[0040] A second objective of this invention is to provide a robotic vacuum adsorption method for substrate glass, comprising the following steps: S1. Start the negative pressure air pump 4 to make it run continuously. According to the characteristics of the glass plate to be transported (such as size and weight), the air pumping rate is preset or adjusted in real time through the air intake adjustment mechanism of the negative pressure air pump 4 to match the required adsorption force.

[0041] S2. Control the overall movement of the upper-board robot, so that the vacuum adsorption device body 3 it carries is precisely moved to the glass transfer position. At this position, the substrate glass to be transported is usually positioned and supported by upstream equipment (such as forming equipment or conveying mechanism).

[0042] S3. The displacement cylinder 8 is activated, causing its piston rod to extend, thereby driving the vacuum adsorption device body 3 to move relative to the upper robot frame 1 towards the upper edge of the glass plate. The advancement of the displacement cylinder 8 causes the adsorption end face of the vacuum adsorption device body 3 (on which a high-temperature resistant rubber sealing ring 5 is provided) to smoothly abut against the surface of the upper edge of the glass plate. Because its outer edge protrudes from the adsorption end face, the high-temperature resistant rubber sealing ring 5 preferentially makes elastic contact and deforms with the glass surface, effectively filling the microscopic unevenness and forming a sealed adsorption chamber.

[0043] S4. After the vacuum adsorption device body 3 and the glass surface are sealed, the negative pressure inside is established by the continuously running negative pressure pump 4. This negative pressure quickly acts on the sealed chamber, generating a strong adsorption force perpendicular to the glass surface, thereby firmly adsorbing and fixing the upper edge of the glass plate onto the vacuum adsorption device body 3.

[0044] During this process, the impurity filter 6 inside the vacuum adsorption device body 3 intercepts glass dust or tiny fragments that may enter with the airflow, preventing them from entering the air duct 9 and the negative pressure pump 4, thus protecting the system. At the same time, the air inlet 7 located behind the filter allows air to enter the airflow channel when needed (such as for pressure adjustment or subsequent air blowing for cleaning).

[0045] S5. After confirming that the glass plate has been stably adsorbed (which can be verified by a pressure sensor or position sensor), control the loading robot to move the adsorbed glass plate as a whole, and transport it accurately and smoothly from the glass transfer position to the target loading position (such as a buffer rack, inspection table or the entrance to the next process).

[0046] Throughout the handling process, the negative pressure vacuum pump 4 operates continuously to maintain a constant suction force, ensuring that the glass plate does not shake, shift, or fall off during robot acceleration, deceleration, or turning. Simultaneously, the suction cups 2 on the robot's bottom work in conjunction, providing additional bottom support and suction force to further enhance handling stability.

[0047] S6. Once the glass plate reaches the target position and is accurately positioned, the displacement cylinder 8 retracts, causing the vacuum adsorption device body 3 to detach from the glass plate surface, thus releasing the adsorption. Additionally, the airflow reversing structure of the negative pressure pump 4 can be briefly switched to blowing mode to inject a small amount of positive pressure air into the airflow channel, assisting in the separation of the glass plate from the adsorption end face and ensuring smooth release.

[0048] Then, the robot on the upper plate is reset, ready to perform the next handling task.

[0049] In addition, cleaning and maintenance steps are included (which can be performed periodically or as needed): The airflow reversing structure of the negative pressure air pump 4 is switched to the blowing mode.

[0050] The positive airflow (or introduced external compressed air) generated by the negative pressure air pump 4 flows at high speed through the air guide pipe 9 and the airflow channel of the vacuum adsorption device body 3.

[0051] The forward airflow can effectively blow out contaminants such as glass powder and fragments accumulated inside the vacuum adsorption device body 3 (especially on the side of the impurity filter 6 near the adsorption end), while removing dust that may be deposited in the air guide pipe 9, thus achieving self-cleaning of the system, maintaining unobstructed airflow channels and long-term stability of adsorption performance.

[0052] Throughout the entire work cycle of the loading robot (including all stages such as standby, movement, adsorption, handling, and release), the negative pressure pump 4 operates continuously. This configuration avoids wear and tear on the pump body caused by frequent start-stop cycles and ensures sufficient negative pressure is provided immediately when adsorption is needed, improving the system's response speed and work efficiency. Furthermore, the negative pressure pump 4 also features air cooling, enabling real-time cooling of the vacuum adsorption device 3.

[0053] The method of this invention significantly improves the stability and reliability of the substrate glass handling process by coordinating the movement of the robot, the precise contact and detachment of the adsorption device, and the stable generation and maintenance of negative pressure. It effectively reduces the risk of glass breakage, while the integrated cleaning function extends the service life of the equipment and reduces maintenance requirements.

[0054] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A robotic vacuum adsorption device for substrate glass, characterized in that, include: Upper robot frame (1); The vacuum adsorption device body (3) is mounted on the upper plate robot frame (1) via a bracket (10); A displacement cylinder (8) is connected to the vacuum adsorption device body (3); the displacement cylinder (8) is used to drive the vacuum adsorption device body (3) to perform extension and retraction movements; The negative pressure pump (4) is connected to the vacuum adsorption device body (3) through the air guide pipe (9); the negative pressure pump (4) is used to provide negative pressure adsorption force.

2. The robotic vacuum adsorption device for substrate glass as described in claim 1, characterized in that, The vacuum adsorption device body (3) includes a high-temperature resistant rubber sealing ring (5), an impurity filter screen (6), and an air inlet (7). The vacuum adsorption device body (3) has a through airflow channel inside; the high-temperature resistant rubber sealing ring (5) is arranged around the adsorption end inlet of the airflow channel. The impurity filter screen (6) is fixedly installed in the airflow channel and located between the adsorption end inlet and the connection port of the air guide pipe (9); The air inlet (7) is opened on the wall of the airflow channel and is located on the side of the impurity filter (6) away from the adsorption end inlet.

3. The robotic vacuum adsorption device for substrate glass as described in claim 2, characterized in that, The number of air inlets (7) is multiple, and the multiple air inlets (7) are evenly arranged around the axis of the airflow channel.

4. The robotic vacuum adsorption device for substrate glass as described in claim 2, characterized in that, The outer edge of the high-temperature resistant rubber sealing ring (5) protrudes from the adsorption end face of the vacuum adsorption device body (3).

5. The robotic vacuum adsorption device for substrate glass as described in claim 1, characterized in that, The negative pressure air pump (4) is equipped with an air intake adjustment mechanism, which is used to adjust the air intake rate of the negative pressure air pump (4).

6. The robotic vacuum adsorption device for substrate glass as described in claim 1, characterized in that, The negative pressure air pump (4) is equipped with an airflow reversing structure, which is used to switch the airflow direction in the air guide pipe (9) so that the air guide pipe (9) and the airflow channel of the vacuum adsorption device body (3) can selectively achieve air intake or air blowing.

7. The robotic vacuum adsorption device for substrate glass as described in claim 1, characterized in that, The bottom of the upper board robot frame (1) is also equipped with a suction cup (2), and the suction end face of the vacuum adsorption device body (3) is aligned with the suction end face of the suction cup (2).

8. A method for robotic vacuum adsorption of a substrate glass plate, characterized in that, The apparatus according to any one of claims 1 to 7 includes the following steps: Start the negative pressure pump (4) to create a negative pressure inside the vacuum adsorption device body (3); Control the upper-board robot to move to the glass handover position; The displacement cylinder (8) is extended to drive the vacuum adsorption device body (3) to move toward the upper edge of the glass plate until the adsorption end face of the vacuum adsorption device body (3) contacts the upper edge of the glass plate and forms a seal. The upper edge of the glass plate is fixed by the negative pressure inside the vacuum adsorption device body (3); Control the upper plate robot to move the adsorbed glass plate to the target upper plate position.

9. The method for robotic vacuum adsorption of a substrate glass plate according to claim 8, characterized in that, Throughout the entire working cycle of the upper-board robot, the negative pressure air pump (4) is in continuous operation.

10. The method for robotic vacuum adsorption of a substrate glass plate according to claim 8, characterized in that, The method also includes a cleaning step: Control the negative pressure air pump (4) to switch to air blowing mode; The positive airflow generated by the negative pressure pump (4) removes glass powder or fragments accumulated inside the vacuum adsorption device body (3) and / or removes dust from the air duct (9).

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