Double-basket half-piece arranging mechanism for ALD (atomic layer deposition) equipment

Abstract

The invention relates to a double-basket half-piece arranging mechanism for ALD (atomic layer deposition) equipment, which is structurally characterized in that an output end of a servo motor is in driving connection with a synchronous shaft, two ends of the synchronous shaft are respectively in transmission connection with a synchronous cog belt, and the synchronous cog belts on two sides are respectively connected with two ends of a mounting frame through synchronous belt clamping blocks; the synchronous belt clamping blocks on the same side of the first wafer arranging mechanism and the second wafer arranging mechanism are connected to the same linear guide rail in a sliding mode through sliding blocks respectively, wafer arranging ceramic modules are installed on the two sides of the installation frame and comprise silicon wafer pushing blocks, ceramic comb teeth are arranged on the silicon wafer pushing blocks, and the ceramic comb teeth on the silicon wafer pushing blocks on the two sides of the installation frame face the same direction but are staggered in height. The ceramic comb teeth on the silicon wafer pushing blocks of the first wafer arranging mechanism and the second wafer arranging mechanism face opposite directions, and the ceramic comb teeth on the silicon wafer pushing blocks on the same side are the same in height. The ALD half-piece preparation device has the advantages that ALD half-piece preparation processes of BC batteries and TOPCON batteries can be compatible, the production efficiency can be effectively improved, the structure is compact, the production cost is low, and the operation is reliable and stable.

Description

Technical Field

[0001] This invention relates to a double basket half-cell handling mechanism for photovoltaic cell ALD coating process equipment, belonging to the field of photovoltaic cell ALD coating process technology. Background Technology

[0002] ALD (Atomic Layer Deposition) coating is a method for manufacturing photovoltaic cells using atomic layer deposition technology. The ALD coating process involves a chemical reaction on the surface of the silicon wafer to form one or more dense passivation films, and is a core step in the fabrication of solar photovoltaic cells.

[0003] Photovoltaic cells are generally made from silicon wafers of the same size through a series of processes. Currently, cutting a complete silicon wafer into two identical halves can significantly improve the final performance of the cell.

[0004] In the half-cell fabrication process of BC cells (back contact cells), passivation films need to be prepared on both sides of the half-cell silicon wafer using the ALD process; in the half-cell fabrication process of TOPCON cells (tunneling oxide passivated contact cells), passivation films can be prepared on both sides or one side of the half-cell silicon wafer using the ALD process, depending on actual needs.

[0005] In the ALD process, silicon wafers are typically placed into slots within a passivation container (hereinafter referred to as a process boat). If there is one silicon wafer in one slot of the process boat, it is a double-sided deposition process; if there are two silicon wafers in one slot of the process boat, it is a single-sided deposition process. After the ALD process, the required passivation film can be formed on both sides of the silicon wafer.

[0006] After the previous process is completed, the silicon wafers enter the ALD equipment via a basket conveyor line. Vacuum chucks are typically used. The silicon wafers are then guided from the basket into the process boat by the wafer sorting mechanism, or from the process boat into the basket.

[0007] In the existing technology, due to the different requirements for passivation film preparation, the ALD half-cell preparation process of BC battery and TOPCON battery cannot be effectively compatible. When changing products, the preparation mechanism needs to be adjusted and replaced, which affects production efficiency and increases production costs. Summary of the Invention

[0008] The present invention proposes a double basket half-cell feeding mechanism for ALD equipment, which aims to overcome the above-mentioned shortcomings of the prior art and realize an ALD half-cell preparation process compatible with BC batteries and TOPCON batteries.

[0009] The technical solution of this invention: A double-basket half-piece sheet handling mechanism for ALD equipment, comprising a first sheet handling mechanism and a second sheet handling mechanism. Each of the first and second sheet handling mechanisms includes a co-moving shaft, a servo motor, a synchronous toothed belt, a linear guide rail, a pair of sheet handling ceramic modules, a pair of synchronous belt clamps, and a mounting bracket. The output end of the servo motor drives and connects to the co-moving shaft. A synchronous toothed belt is connected to each end of the co-moving shaft. The synchronous toothed belt is fitted onto a pair of synchronous pulleys. The synchronous toothed belts on both sides are connected to the two ends of the mounting bracket via synchronous belt clamps. The first sheet handling mechanism... The synchronous belt clamps on the same side of the wafer handling mechanism and the second wafer handling mechanism are slidably connected to the same linear guide rail by a slider. Wafer handling ceramic modules are installed on both sides of the mounting frame. The wafer handling ceramic modules include wafer pushers arranged along the length of the mounting frame. The wafer pushers are uniformly provided with ceramic comb teeth along the length. The ceramic comb teeth on the wafer pushers on both sides of the mounting frame face the same direction but are staggered in height. The ceramic comb teeth on the wafer pushers of the first wafer handling mechanism and the second wafer handling mechanism face each other. The ceramic comb teeth on the corresponding wafer pushers on the same side of the first wafer handling mechanism and the second wafer handling mechanism are at the same height. Each pair of ceramic wafer-arranging modules forms a co-moving body. The ceramic wafer-arranging modules within the same co-moving body can move together. They slide on a linear guide rail via sliders and are connected to corresponding synchronous toothed belts via synchronous belt clamps. The synchronous toothed belts mesh with synchronous pulleys. The synchronous pulleys connect the synchronous toothed belts and pulleys on both sides via a co-moving shaft and are then connected to servo motors. Each pair of ceramic wafer-arranging modules is driven by a servo motor. The rotation of the two servo motors, combined with the guidance of the linear guide rails, allows the two co-moving bodies to move along the direction of the linear guide rails. The ceramic comb teeth at the same height in the first and second wafer-arranging mechanisms can respectively straighten the corresponding half-wafers.

[0010] Preferably, the servo motors of the first wafer sorting mechanism and the second wafer sorting mechanism are stacked, with the servo motor of the first wafer sorting mechanism located at the bottom. The coaxial shafts of the first wafer sorting mechanism and the second wafer sorting mechanism are arranged parallel to each other at intervals. The synchronous toothed belts of the first wafer sorting mechanism and the second wafer sorting mechanism are arranged parallel to each other at intervals. The synchronous toothed belts on both sides of the first wafer sorting mechanism are connected to both ends of the first mounting frame through a first synchronous belt clamp. The first wafer sorting ceramic module is installed on both sides of the first mounting frame. The first wafer sorting ceramic module includes a first silicon wafer pusher block arranged along the length direction of the first mounting frame. The two first silicon wafer pushers are evenly provided with first ceramic comb teeth along the length direction. The synchronous toothed belts on both sides of the second wafer sorting mechanism are connected to both ends of the second mounting frame through a second synchronous belt clamp. The second wafer sorting ceramic module is installed on both sides of the second mounting frame. The second wafer sorting ceramic module includes a second silicon wafer pusher block arranged along the length direction of the second mounting frame. The two second silicon wafer pushers are evenly provided with second ceramic comb teeth along the length direction. The first ceramic comb teeth and the second ceramic comb teeth face each other, and the first ceramic comb teeth and the second ceramic comb teeth on the same side have the same height.

[0011] Preferably, the end of the synchronous toothed belt furthest from the co-moving shaft is provided with a synchronous belt tensioning seat. Tensioning is achieved through the synchronous belt tensioning seat, ensuring the movement accuracy of the toothed belt.

[0012] Advantages of this invention: The structure is reasonably designed. This double basket half-cell feeding mechanism is compatible with the ALD half-cell preparation process of BC batteries and TOPCON batteries, which can effectively improve production efficiency. It also has a compact structure, low production cost, and reliable and stable operation. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural schematic diagram of the double basket half-piece sorting mechanism for the ALD device of the present invention.

[0014] Figure 2 This is a top view schematic diagram of the double basket half-piece sheet handling mechanism for the ALD device of the present invention.

[0015] Figure 3 This is a schematic diagram of the main structure of the double basket half-piece sorting mechanism for the ALD device of the present invention.

[0016] Figure 4 This is a schematic diagram of the structure of the first ceramic wafer sorting module in the double basket half-wafer sorting mechanism of the ALD device of the present invention.

[0017] Figure 5 This is a schematic diagram of the structure of the second ceramic wafer sorting module in the double basket half-wafer sorting mechanism of the ALD device of the present invention.

[0018] Figure 6 This is a schematic diagram of the structure of the first wafer sorting mechanism in the double basket half-wafer wafer sorting mechanism of the ALD device of the present invention.

[0019] Figure 7 This is a schematic diagram of the structure of the second wafer sorting mechanism in the double basket half-wafer wafer sorting mechanism of the ALD device of the present invention.

[0020] Figure 8 This is a schematic diagram of the orderly and disengaged states of the single-station sorting sheet in the ALD equipment of the present invention using the double basket half-sheet sorting mechanism.

[0021] Figure 9 This is a schematic diagram of how the double-basket half-piece sorting mechanism of the ALD equipment of the present invention sorts two baskets separately when performing double-station sorting and straightening.

[0022] In the diagram, 1 is the coaxial shaft, 2 is the servo motor, 3 is the synchronous toothed belt, 4 is the linear guide, 5 is the synchronous belt tensioner, 6 is the first wafer-arranging ceramic module, 601 is the first silicon wafer pusher, 602 is the first ceramic comb tooth, 7 is the second wafer-arranging ceramic module, 701 is the second silicon wafer pusher, 702 is the second ceramic comb tooth, 8 is the first synchronous belt clamp, 9 is the second synchronous belt clamp, 10 is the first mounting bracket, 11 is the second mounting bracket, 12 is the first flower basket, and 13 is the second flower basket. Detailed Implementation

[0023] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0024] like Figure 1-7 As shown, an ALD (Alternating Discharge) device uses a double-basket half-piece sorting mechanism. Its structure includes a first sorting mechanism and a second sorting mechanism. Both the first and second sorting mechanisms include a coaxial shaft 1, a servo motor 2, a synchronous toothed belt 3, a linear guide rail 4, a pair of sorting ceramic modules, a pair of synchronous belt clamps, and a mounting bracket. The output of the servo motor 2 drives and connects to the coaxial shaft 1. A synchronous toothed belt 3 is connected to each end of the coaxial shaft 1. The synchronous toothed belt 3 is fitted onto a pair of synchronous pulleys. The synchronous toothed belts 3 on both sides are connected to the two ends of the mounting bracket via synchronous belt clamps 8. The first sorting... The synchronous belt clamps 8 on the same side of the wafer handling mechanism and the second wafer handling mechanism are slidably connected to the same linear guide rail 4 by a slider. Wafer handling ceramic modules are installed on both sides of the mounting frame. The wafer handling ceramic modules include wafer pushers arranged along the length of the mounting frame. The wafer pushers are uniformly provided with ceramic comb teeth along the length. The ceramic comb teeth on the wafer pushers on both sides of the mounting frame face the same direction but are staggered in height. The ceramic comb teeth on the wafer pushers of the first wafer handling mechanism and the second wafer handling mechanism face each other. The ceramic comb teeth on the corresponding wafer pushers on the same side of the first wafer handling mechanism and the second wafer handling mechanism are at the same height.

[0025] In the specific design, the servo motors 2 of the first wafer-arranging mechanism and the second wafer-arranging mechanism are stacked, with the servo motor 2 of the first wafer-arranging mechanism located at the bottom. The coaxial shafts 1 of the first wafer-arranging mechanism and the second wafer-arranging mechanism are arranged parallel to each other with vertical spacing. The synchronous toothed belts 3 of the first wafer-arranging mechanism and the second wafer-arranging mechanism are arranged parallel to each other with vertical spacing. A synchronous belt tensioning seat 5 is provided at the end of the synchronous toothed belt 3 away from the coaxial shaft 1. The synchronous toothed belts 3 on both sides of the first wafer-arranging mechanism are respectively connected to the two ends of the first mounting frame 10 through a first synchronous belt clamp 8. The first wafer-arranging ceramic modules 6 are installed on both sides of the first mounting frame 10. The first wafer-arranging ceramic modules 6 include a first silicon wafer arranged along the length direction of the first mounting frame 10. The wafer pusher 601 has two first silicon wafer pushers 601 with first ceramic comb teeth 602 evenly arranged along the length direction. The two sides of the second wafer sorting mechanism are connected to the two ends of the second mounting frame 11 by a second synchronous belt clamp 9. The second wafer sorting ceramic module 7 is installed on both sides of the second mounting frame 11. The second wafer sorting ceramic module 7 includes a second silicon wafer pusher 701 arranged along the length direction of the second mounting frame 11. The two second silicon wafer pushers 701 have second ceramic comb teeth 702 evenly arranged along the length direction. The first ceramic comb teeth 602 and the second ceramic comb teeth 702 face each other. The first ceramic comb teeth 602 and the second ceramic comb teeth 702 on the same side have the same height.

[0026] Based on the above structure, the two sets of first ceramic plate modules 6 and the two sets of second ceramic plate modules 7 form a co-moving body. The ceramic plate modules of the same co-moving body can move together. They slide on the linear guide rail 4 through sliders and are connected to the corresponding synchronous toothed belt 3 through the first synchronous belt clamp 8 and the second synchronous belt clamp 9. The synchronous toothed belt meshes with the synchronous pulley and is tensioned by the synchronous belt tensioning seat 5 to ensure the movement accuracy of the toothed belt. The synchronous pulley connects the synchronous toothed belt 3 and the synchronous pulley on both sides through the co-moving shaft 1 and then connects to the servo motor 2.

[0027] The two sets of first-stage ceramic wafer-arranging modules 6 and the two sets of second-stage ceramic wafer-arranging modules 7 form co-moving bodies, each driven by a servo motor 2. The rotation of the two servo motors 2, combined with the guidance of the linear guide rail 4, allows the two co-moving bodies to move along the direction of the linear guide rail 4. The ceramic comb teeth of the first and second wafer-arranging mechanisms, located at the same height, can respectively straighten the corresponding half wafers.

[0028] like Figure 8 As shown, when using this invention for single-station sheet straightening, The first wafer sorting mechanism rotates S1 revolutions via servo motor 2 and moves in the direction of the higher arrow; the second wafer sorting mechanism rotates S1 revolutions via servo motor 2 and moves in the direction of the lower arrow. The first and second wafer sorting mechanisms approach each other, and the two servo motors 2 rotate relative to each other until the first silicon wafer pusher 601 and the second silicon wafer pusher 701 contact the silicon wafer. At this time, the first ceramic comb tooth 602 and the second ceramic comb tooth 702 are also inserted into the silicon wafer, realizing the sorting and straightening of the silicon wafer.

[0029] After the wafers are arranged, the silicon wafers are taken away by other mechanisms. At this time, the servo motors 2 that control the first and second wafer arrangement mechanisms move in opposite directions for S1 revolutions, and the first and second wafer arrangement mechanisms move away from each other, achieving a disengaged state.

[0030] like Figure 9 As shown, when using this invention for dual-station wafer straightening, The first and second wafer sorting mechanisms, located at the first basket 12, perform the function of straightening and separating silicon wafers by rotating their respective servo motors 2 a number of revolutions S1. After completing this action, the servo motors 2 of the first and second wafer sorting mechanisms are controlled to rotate a number of revolutions S2 (usually S2 > S1) so that the first and second wafer sorting mechanisms move to the position of the second basket 13. After the servo motors 2 of the first and second wafer sorting mechanisms rotate S1 revolutions, the wafer sorting function of the two sets of half-wafers in the second basket 13 is achieved.

[0031] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0032] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these all fall within the protection scope of the present invention.

Claims

1. A double basket half sheet handling mechanism for an ALD apparatus, characterized by, The first wafer sorting mechanism and the second wafer sorting mechanism each include a same shaft (1), a servo motor (2), a synchronous toothed belt (3), a linear guide rail (4), a pair of wafer sorting ceramic modules, a pair of synchronous belt clamps and a mounting frame, the output end of the servo motor (2) is drivingly connected with the same shaft (1), the two ends of the same shaft (1) are respectively drivingly connected with a synchronous toothed belt (3), the synchronous toothed belt (3) is sleeved on a pair of synchronous pulleys, the two synchronous toothed belts (3) are respectively connected with the two ends of the mounting frame through a synchronous belt clamp (8), the synchronous belt clamps (8) on the same side of the first wafer sorting mechanism and the second wafer sorting mechanism are respectively slidingly connected with the same linear guide rail (4), the wafer sorting ceramic modules are installed on the two sides of the mounting frame, the wafer sorting ceramic module includes a silicon wafer push block arranged along the length direction of the mounting frame, ceramic combs are uniformly arranged on the silicon wafer push block along the length direction, the ceramic combs on the silicon wafer push blocks on the two sides of the mounting frame are directed to the same direction but are staggered in height, the ceramic combs on the silicon wafer push blocks of the first wafer sorting mechanism and the second wafer sorting mechanism are directed to opposite directions, and the ceramic combs on the corresponding silicon wafer push blocks on the same side of the first wafer sorting mechanism and the second wafer sorting mechanism are of the same height.

2. A double-flower basket half-plate sorting mechanism for an ALD apparatus according to claim 1, wherein, The servo motors (2) of the first wafer sorting mechanism and the second wafer sorting mechanism are stacked, the servo motor (2) of the first wafer sorting mechanism is located at the lower side, the same shafts (1) of the first wafer sorting mechanism and the second wafer sorting mechanism are arranged in parallel at intervals, the synchronous toothed belts (3) of the first wafer sorting mechanism and the second wafer sorting mechanism are arranged in parallel at intervals, the synchronous toothed belts (3) on the two sides of the first wafer sorting mechanism are respectively connected with the two ends of the first mounting frame (10) through a first synchronous belt clamp (8), the first wafer sorting ceramic modules (6) are installed on the two sides of the first mounting frame (10), the first wafer sorting ceramic module (6) includes a first silicon wafer push block (601) arranged along the length direction of the first mounting frame (10), first ceramic combs (602) are uniformly arranged on the two first silicon wafer push blocks (601) along the length direction, the synchronous toothed belts (3) on the two sides of the second wafer sorting mechanism are respectively connected with the two ends of the second mounting frame (11) through a second synchronous belt clamp (9), the second wafer sorting ceramic modules (7) are installed on the two sides of the second mounting frame (11), the second wafer sorting ceramic module (7) includes a second silicon wafer push block (701) arranged along the length direction of the second mounting frame (11), second ceramic combs (702) are uniformly arranged on the two second silicon wafer push blocks (701) along the length direction, the first ceramic combs (602) and the second ceramic combs (702) are directed to opposite directions, and the first ceramic combs (602) and the second ceramic combs (702) on the same side are of the same height.

3. The dual-lantern half-piece sorting mechanism for an ALD apparatus of claim 1, wherein, The end of the synchronous toothed belt (3) away from the same shaft (1) is provided with a synchronous belt tensioning seat (5).

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