Beam-splitting optical lens set, beam-splitting optical single lens and light-splitting device

Abstract

The application belongs to the technical field of optics, and provides a beam-splitting optical lens set, a beam-splitting optical single lens and a light splitting device. The beam-splitting optical lens set comprises two beam-splitting optical lenses, and the light splitting surface of each beam-splitting optical lens comprises a plurality of grooves arranged in parallel and uniformly to form a plurality of sub light splitting areas. By abutting the light splitting surfaces of the two beam-splitting optical lenses, a plurality of light splitting units can be formed, and then the incident light can be split and emitted by the plurality of light splitting units. The shape of the emitted light spot can be controlled by controlling the shape of the light splitting unit towards the emitting surface, thereby reducing the process difficulty of the beam-splitting optical lens, and improving the product yield of the beam-splitting optical lens.

Description

Technical Field

[0001] This application belongs to the field of optical technology, and in particular relates to a beam-splitting lens group, a beam-splitting single lens, and a beam-splitting device. Background Technology

[0002] Beam splitting technology can divide a single incident beam of light into multiple outgoing beams based on spatial, angular, or energy parameters to meet various application needs such as imaging, sensing, lighting, and medical applications. One method involves creating microstructured surfaces on or inside the lens to achieve beam splitting. These beam-splitting lenses with microstructured surfaces offer advantages in production, including mass production capabilities and reusable templates.

[0003] Beam-splitting lenses can be manufactured using laser processing and related technologies. For example, multiple grooves can be engraved on the lens surface using a laser, dividing the lens into multiple sub-splitting regions. These sub-splitting regions then split the incident light into beams. The shapes of the sub-splitting regions can be predefined as circles, squares, rhombuses, etc., to accommodate different beam-splitting requirements. Furthermore, the number of grooves can be controlled to adjust the amount of beam splitting. However, with a fixed lens area / volume, a higher number of grooves results in smaller groove widths, poorer structural stability, and consequently, higher precision requirements for the manufacturing process.

[0004] In the production of beam-splitting lenses, laser internal engraving technology can be used to carve from the inside of the lens to divide it into multiple sub-splitting zones. However, this internal engraving method has low engraving precision, making it difficult for the produced beam-splitting lenses to meet high-precision requirements. Alternatively, two rounds of laser engraving can be performed on the lens surface to form multiple identical grooves. When the required number of beam splitters is low, the groove wall thickness is larger, resulting in a more stable groove structure. However, when the required number of beam splitters is high, the groove wall thickness is smaller, and the groove walls are prone to chipping and collapse due to the energy generated during laser processing, leading to a decrease in the yield rate of the beam-splitting lenses. Summary of the Invention

[0005] This application provides a beam-splitting lens assembly, a beam-splitting single lens, and a beam-splitting device to solve the problem of low yield rate caused by the high processing precision requirements of beam-splitting lenses.

[0006] In a first aspect, embodiments of this application provide a beam-splitting lens assembly, comprising: two beam-splitting lenses, the two beam-splitting lenses being of the same size;

[0007] Each beam-splitting lens includes a beam-splitting surface and a reference surface; each beam-splitting surface includes multiple parallel grooves, the grooves in each beam-splitting surface have the same groove depth, and the grooves in each beam-splitting surface have the same distribution density; wherein, the multiple grooves located in the beam-splitting surface divide the beam-splitting surface into multiple sub-beam-splitting regions; the reference surface in the two beam-splitting lenses is a plane; the groove width of each groove is smaller than the width of each sub-beam-splitting region;

[0008] Two beam-splitting lenses are fitted together to form a beam-splitting lens group; wherein, the overlapping portion of the sub-beam-splitting regions located on the two beam-splitting surfaces forms multiple beam-splitting units, and the shape of the beam-splitting units is related to the intersection angle formed by the sub-beam-splitting regions located on the two beam-splitting surfaces; the multiple beam-splitting units are used to split the incident light beam;

[0009] The shape of the beam splitting unit and the groove depth are determined based on the shape of the light spot formed after the incident light is split.

[0010] In some feasible embodiments, the reference surface of each beam-splitting lens has an axisymmetric shape.

[0011] In some feasible embodiments, the two beam-splitting lenses include a first beam-splitting lens and a second beam-splitting lens; the first beam-splitting lens includes a first beam-splitting surface, a first reference surface and a first limiting surface, and the second beam-splitting lens includes a second beam-splitting surface, a second reference surface and a second limiting surface;

[0012] The first reference surface and the second reference surface are the same; the first limiting surface is connected to the first beam splitting surface and the first reference surface respectively, and the second limiting surface is connected to the second beam splitting surface and the second reference surface respectively; the first beam splitting surface includes a plurality of first sub-beam splitting regions formed by grooves, and the second beam splitting surface includes a plurality of second sub-beam splitting regions formed by grooves.

[0013] Wherein, the edge of the first sub-splitting region forms a first limiting angle with the first limiting surface; the edge of the second sub-splitting region forms a second limiting angle with the second limiting surface; the first limiting angle and the second limiting angle are used to determine the intersection angle formed by the first sub-splitting region and the second sub-splitting region.

[0014] In some feasible embodiments, both the first limiting angle and the second limiting angle are right angles; when the first beam-splitting surface of the first beam-splitting lens and the second beam-splitting surface of the second beam-splitting lens are attached together, the intersection angle formed by the first sub-beam-splitting region and the second sub-beam-splitting region is 90°.

[0015] In some feasible embodiments, the reference plane of each beam splitter lens is an axisymmetric figure composed of a major arc and a chord belonging to the same circle, and the side plane where the chord is located is perpendicular to the reference plane where the chord is located to form a limiting surface based on the side plane where the chord is located.

[0016] In some feasible embodiments, the reference plane of each beam splitter lens is a regular polygon, and the side plane containing the edge of each reference plane is perpendicular to the reference plane to form a limiting surface based on the side plane containing the edge.

[0017] In some feasible embodiments, each beam splitter lens is made of one of the following materials: quartz, borosilicate, silicon, germanium, and sapphire.

[0018] Secondly, embodiments of this application provide a beam-splitting single lens, including: a positive beam-splitting surface and a negative beam-splitting surface; the positive beam-splitting surface and the negative beam-splitting surface are two surfaces in opposite directions in the beam-splitting single lens;

[0019] The positive beam-splitting surface and the negative beam-splitting surface each include a plurality of grooves, which divide the positive beam-splitting surface into a plurality of positive beam-splitting regions; the plurality of grooves divide the negative beam-splitting surface into a plurality of negative beam-splitting regions; the plurality of positive beam-splitting regions are parallel to each other, and the plurality of negative beam-splitting regions are parallel to each other; the grooves have the same groove depth and the same distribution density; the groove width of each groove is smaller than the groove width of the positive beam-splitting region and the negative beam-splitting region.

[0020] The overlapping portion of the positive beam splitting region and the negative beam splitting region forms multiple beam splitting units; the shape of the beam splitting unit is related to the intersection angle formed by the positive beam splitting region and the negative beam splitting region, and multiple beam splitting units are used to split the incident light beam;

[0021] The shape of the beam splitting unit and the groove depth are determined based on the shape of the light spot formed after the incident light is split.

[0022] In some feasible embodiments, the intersection angle is 90°.

[0023] Thirdly, embodiments of this application provide a beam splitting device, including a shaping lens group and a beam splitting lens group of any one of the first aspects or a beam splitting single lens of any one of the second aspects; the beam splitting lens group or the beam splitting single lens and the shaping lens group are arranged along the same optical axis; the shaping lens group is located on the light-emitting side of the beam splitting lens group or the beam splitting single lens.

[0024] Among them, the beam splitting lens group or the beam splitting single lens is configured to split the incident light into beam splitting light and output the beam splitting light to the shaping lens group; the diameter of the beam splitting single lens in the beam splitting lens group is greater than or equal to the diameter of the incident light.

[0025] The orthokeratology lens group is configured to adjust the shape of the beam splitter light spot to the target shape. Attached Figure Description

[0026] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0027] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 A schematic diagram of the beam-splitting surface and reference surface of the beam-splitting lens in the beam-splitting lens group provided in the embodiments of this application is shown;

[0029] Figure 2 A cross-sectional view of the beam-splitting lens assembly provided in an embodiment of this application is shown;

[0030] Figure 3 A schematic diagram of the shape of the beam-splitting lens provided in an embodiment of this application is shown;

[0031] Figure 4 This illustration shows a schematic diagram of the beam-splitting surface of a first type of first beam-splitting lens and a second beam-splitting lens provided in an embodiment of this application.

[0032] Figure 5 This paper shows a schematic diagram of the beam-splitting surfaces of the second type of first beam-splitting lens and second beam-splitting lens provided in an embodiment of this application;

[0033] Figure 6 This illustration shows a schematic diagram of the beam-splitting surface of the third type of first and second beam-splitting lenses provided in an embodiment of this application.

[0034] Figure 7 A schematic diagram of the structure of a beam-splitting single lens provided in an embodiment of this application is shown.

[0035] Illustration:

[0036] 1-Beam-splitting lens group; 10-Beam-splitting lens; 11-First beam-splitting lens; 12-Second beam-splitting lens; 13-Single beam-splitting lens; 101-Beam-splitting surface; 111-First beam-splitting surface; 112-First reference surface; 131-Positive beam-splitting surface; 132-Reverse beam-splitting surface; 102-Reference surface; 121-Second beam-splitting surface; 122-Second reference surface; 113-First limiting surface; 123-Second limiting surface; 133-Single lens limiting surface; 1001-Groove; 1002-Sub-beam-splitting area; 1101-First sub-beam-splitting area; 1201-Second sub-beam-splitting area; 1301-Positive beam-splitting area; 1302-Reverse beam-splitting area; 10000-Beam-splitting unit. Detailed Implementation

[0037] The embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described below do not represent all embodiments consistent with this application. They are merely examples of systems and methods consistent with some aspects of this application.

[0038] It should be noted that the brief descriptions of terms in this application are only for the convenience of understanding the embodiments described below, and are not intended to limit the embodiments of this application. Unless otherwise stated, these terms should be understood in their ordinary and common meaning.

[0039] The terms "first," "second," "third," etc., used in the specification and accompanying drawings of this application are used to distinguish similar or related objects or entities, and do not necessarily imply a specific order or sequence, unless otherwise specified. It should be understood that such terms can be used interchangeably where appropriate.

[0040] Beam splitting technology is one of the key technologies in the field of optics. It refers to splitting incident light into multiple outgoing beams, and modulating the energy, energy distribution, and spot shape of the outgoing beams according to specific needs. For example, in laser processing, laser beams can be split into multiple beams to simultaneously process multiple points on a surface to form a specific pattern. Similarly, in the field of medical devices, laser beams can be split to form laser dot arrays, which can then be used to treat affected areas.

[0041] Beam splitting technology can be achieved by adding beam-splitting lenses to optical devices. For example, multiple beam-splitting units can be formed on the surface of a single lens, splitting the incident light into beams before emission. Multiple grooves can be machined on the lens surface using laser cutting, dividing the lens into multiple beam-splitting units. However, during laser cutting, taking a square lens as an example, some groove walls are repeatedly cut, leading to chipping and other damage at the repeatedly cut locations, thus reducing the processing yield of the beam-splitting lens. This yield is further reduced, especially when the density of beam-splitting units is high, such as when the groove width is on the micrometer scale and the lens size is limited.

[0042] To address the above problems, this application provides a beam-splitting lens assembly 1. The beam-splitting lens assembly 1 includes two beam-splitting lenses 10, which are of the same size.

[0043] like Figure 1As shown, each beam-splitting lens 10 includes a beam-splitting surface 101 and a reference surface 102, which are parallel to each other. Each beam-splitting surface 101 includes a plurality of parallel grooves 1001. The grooves 1001 can be formed by laser engraving on the beam-splitting surface 101, and the plurality of grooves 1001 divide the beam-splitting surface 101 into a plurality of sub-beam-splitting regions 1002.

[0044] The beam-splitting surface 101 has grooves 1001 on one side, and the other side opposite to the beam-splitting surface 101 is the reference surface 102, which is a plane. The initial state of the beam-splitting surface 101 is also the same plane as the reference surface 102. Multiple grooves 1001 can be cut on the surface of the plane by laser cutting.

[0045] The bottom surface of the groove 1001 formed by laser engraving is approximately rectangular (here, the definition of rectangle ignores the influence of burrs formed by laser cutting on the specific shape). The cross-sectional shape of the sub-beam splitting region 1002 (the shape of the sub-beam splitting region 1002 on the incident or exit surface side) is also approximately rectangular. The sub-beam splitting region 1002 as a whole is approximately cuboid. The incident light can be transmitted in each sub-beam splitting region 1002, and the beam splitting lens can split the incident light into beams based on the sub-beam splitting region 1002 before exiting.

[0046] The grooves 1001 located in the beam-splitting surfaces 101 of the two beam-splitting lenses 10 have the same distribution density. With a fixed size for the beam-splitting lens 10, a higher distribution density of the grooves 1001 indicates a greater number of grooves 1001 in the beam-splitting surface 101, and correspondingly, a greater number of sub-beam-splitting regions 1002. The distribution density of the grooves 1001 can be controlled by adjusting the cutting width and / or spacing of the grooves 1001 according to usage requirements.

[0047] In some embodiments, such as Figure 1 As shown, each groove 1001 has the same width, which can be set to 1.5 μm. Since each groove 1001 has the same width and depth, a beam-splitting surface 101 with multiple grooves 1001 and sub-splitting regions 1002 evenly distributed is obtained.

[0048] Sub-splitter zones formed by grooves of identical structural dimensions provide a basis for uniform beam splitting, facilitating control over the beam shape and energy of each emitted beam. Furthermore, the same production template can be reused in the manufacturing process, enabling mass production of the beam-splitter lens 10 and effectively improving production efficiency.

[0049] In some embodiments, the width of each groove 1001 is smaller than the width of each sub-beam splitter 1002, which reduces the incident light loss rate. Since the grooves 1001 are laser-engraved, the internal walls of the grooves 1001 may not be smooth planes. Incident light will experience optical phenomena such as reflection and refraction within the grooves 1001, resulting in incident light loss. However, the incident light experiences less loss during propagation in the relatively uniform medium of the sub-beam splitter. Therefore, with a fixed lens size, reducing the width of the grooves 1001 can effectively increase the number of sub-beam splitters 1002 and reduce the incident light loss rate.

[0050] When both beam-splitting lenses 10 have multiple grooves 1001 on their beam-splitting surfaces 101, the two beam-splitting lenses 10 work together. The overlapping portion of the sub-splitting regions 1002 in the two beam-splitting surfaces 101 can yield multiple beam-splitting units 10000 of the same size, which helps to maintain a consistent beam shape and uniform beam energy of the emitted light. After the incident light enters the beam-splitting lens group 1, the multiple beam-splitting units 10000 split the incident light, and the grooves 1001, based on the energy consumption of the incident light, ensure that the resulting beams have a certain interval, i.e., forming a beam-splitting dot matrix.

[0051] In some embodiments, the beam-splitting surfaces 101 of two beam-splitting lenses 10 can be bonded together, so that the sub-beam-splitting regions 1002 in the two beam-splitting surfaces 101 overlap to form a plurality of beam-splitting units 10000, and intersect to form an intersection angle. Thus, the overlapping portion of every two sub-beam-splitting regions 1002 forms a plurality of beam-splitting units 10000, and the intersection angle can determine the shape of the beam-splitting units 10000, thereby controlling the beam spot shape. With the beam-splitting surfaces bonded together, one reference surface 102 of the two beam-splitting lenses 10 is the incident surface of the incident light, and the other reference surface 102 is the exit surface of the emitted light. That is, the incident light enters from one reference surface 102 and is split by the plurality of beam-splitting units 10000, and then exits from the other reference surface 102.

[0052] In some examples, after aligning the two beam splitters 10, the two beam splitters 10 can be glued together from the sides to avoid the glue obstructing the lens surface.

[0053] The groove depth of the groove 1001 and the shape of the beam splitting unit 10000 are determined based on the desired shape of the light spot formed after the incident light is split. On one hand, the cross-sectional shape of the beam splitting unit 10000 is related to the shape of the light spot formed after the incident light is split. On the other hand, the groove depth of the groove 1001 also affects the shape of the light spot. The shape of the light spot is affected by the blurring angle caused by the energy distribution of the light spot, and the value of the groove depth affects the sharpness of the corners of the light spot. The deeper the groove, the easier it is for the light spot to form sharp corners, and the bright and dark boundaries of the light spot appear clear and sharp. The shallower the groove, the lower the sharpness of the corners of the light spot.

[0054] The cross-sectional shape of the beam splitting unit 10000 can be adjusted by controlling the arrangement angle of the grooves 1001 in the beam splitting lens 10. That is, the engraving angle of the grooves 1001 can be adjusted according to the desired light spot shape, thereby controlling the cross-sectional shape of the beam splitting unit 10000 by controlling the arrangement angle of the grooves 1001.

[0055] like Figure 2 As shown in (a), in some examples, the cross-sectional shape of the beam splitter 10000 can be square. The groove depth is set to at least 2 μm so that the spot shape of the emitted light after beam splitting is approximately square. In this case, the overall shape of the beam splitter 10000 is a cube with a square cross-section.

[0056] like Figure 2 As shown in (b) in some examples, the cross-sectional shape of the beam splitter 10000 can be rhomboid so that the spot shape of the emitted light after beam splitting is approximately rhomboid. In this case, the overall shape of the beam splitter 10000 is a cube with a rhomboid cross-section.

[0057] It is understood that the cross-sectional shape of the beam splitter 10000 includes, but is not limited to, a square or a rhombus. The cross-sectional shape of the beam splitter 10000 can be determined by determining the arrangement angle of the grooves 1001 according to the desired light spot shape.

[0058] Furthermore, the depth of the groove 1001 can be adjusted to accommodate the desired spot shape. In some examples, the groove depth is controlled to 5 μm. In still other examples, the groove depth is controlled to 8 μm.

[0059] It should be noted that the depth of the groove affects the structural stability of the lens. Therefore, the depth of the groove 1001 is less than one-third of the lens thickness to ensure the processing yield of the beam-splitting lens 10. In some examples, the thickness of the beam-splitting lens 10 can be between 1.5 mm and 3 mm.

[0060] In addition, the material of the beam splitter lens 10 also has a certain impact on the beam splitting effect of the incident light. Different materials have different light transmission capabilities, so the material of the beam splitter lens 10 can be selected according to different wavelengths of light.

[0061] In some embodiments, the material of the beam splitter lens 10 is one of quartz, borosilicate, silicon, germanium, and sapphire.

[0062] In some examples, the incident light is a laser beam with a wavelength of 2940 nm, and the material of the beam splitter 10 can be quartz. Since the wavelength of 2940 nm is close to the limit of the wavelength supported by quartz, in order to further improve or ensure the transmittance of quartz to 2940 nm wavelength light, specific laser spectral materials can be doped into the quartz to ensure the beam splitting effect of the beam splitter 10 and reduce the light loss rate.

[0063] In some examples, the groove 1001 is relatively deep, so sapphire can be used to fabricate the beam splitter lens 10 based on the high density of sapphire, so as to ensure the structural stability and production yield of the beam splitter lens 10.

[0064] In some examples, the beam splitter lens group 1 also has the ability to split light with wavelengths of 420nm, 532nm, 755nm, and 1064nm. The material of the beam splitter lens 10, the width and depth of the groove 1001, and the cross-sectional shape of the beam splitter unit 10000 can be selected and combined with the desired light spot shape.

[0065] In addition, an anti-reflection coating can be provided on the beam splitting surface 101 of the beam splitting lens 10 to improve the light transmission capability in the beam splitting lens 10 or the beam splitting lens group 1, thereby reducing light energy loss.

[0066] By setting a beam-splitting surface 101 on the beam-splitting lens 10 and then attaching the beam-splitting surface 101 together, a beam-splitting lens group 1 with multiple beam-splitting units 10000 can be formed. The beam-splitting lens group 1 can effectively split the incident light beam and make the shape of the emitted light spot similar to the target shape. The separate lens arrangement, while effectively splitting the light, reduces the lens processing difficulty and effectively avoids problems such as edge chipping that are easily caused by processing grooves on a single lens, thereby improving the lens production yield. Furthermore, based on the same / similar structure of the lenses, the beam-splitting lens 10 can be produced according to the same production template, thereby improving the production efficiency of the beam-splitting lens 10.

[0067] To reduce manufacturing difficulty, the shape of the beam splitter lens 10 can be a regular shape such as a circle or a regular polygon. Furthermore, circular or regular polygonal lenses make it easier to ensure the fit of the two beam splitter lenses 10 when they are fitted together, which is beneficial for forming a standardized beam splitter lens group 1.

[0068] like Figure 3 As shown, the reference surface 102 of each beam-splitting lens 10 has an axisymmetric shape. The axisymmetric geometry of this shape facilitates the formation of parallel and uniformly distributed grooves 1001 and sub-splitting regions 1002 during the manufacturing stage of the beam-splitting lens 10. During the bonding stage of the beam-splitting lenses 10, corresponding positions of the two beam-splitting lenses 10 are easily bonded with good bonding effect, thereby ensuring the beam splitting effect.

[0069] In some embodiments, the beam splitter lens 10 is a circular lens, that is, the reference surface 102 of the beam splitter lens 10 is circular. During the processing stage of the groove 1001, multiple grooves 1001 can be cut into one side of the circular lens by laser cutting process, and during the bonding stage, the two circular beam splitter lenses 10 are bonded together according to the required light spot shape and a preset intersection angle.

[0070] Based on the geometric characteristics of a circle, identical circular beam-splitting lenses 10 can be mass-produced. When beam-splitting units 10000 of different shapes are required, only the relative angles between the circular beam-splitting lenses 10 need to be adjusted. Therefore, the circular beam-splitting lens 10 has strong adaptability to different application scenarios.

[0071] In other embodiments, the beam-splitting lens 10 is a square lens, meaning the reference surface 102 of the beam-splitting lens 10 is square. During the processing of the grooves 1001, multiple grooves 1001 can be cut into one side of the square lens using a laser cutting process. However, based on the geometric characteristics of a square, the square lenses need to be processed in batches according to the shape requirements of the beam-splitting unit 10000 during the processing to ensure the corresponding bonding state of the two square beam-splitting lenses 10 when they are fitted together.

[0072] In some examples, a groove 1001 is cut along the x-axis on the surface of the square beam-splitting lens 10 in one batch, and a groove is cut along the y-axis on the surface of the square beam-splitting lens 10 in another batch. By attaching the two square beam-splitting lenses 10 from these two batches together, a 90° intersection angle can be obtained, meaning that multiple beam-splitting units 10000 can output an approximately square light spot.

[0073] Understandably, during the laser cutting process for lens manufacturing, the laser cutting requires cutting grooves 1001 at a certain angle on the lens surface. This cutting process necessitates the laser cutting device finding the cutting position on the lens surface. Based on the limiting structure, grooves 1001 can be cut at different angles in the two beam-splitting lenses 10. Therefore, in the stage of assembling the beam-splitting lens group 1, simply attaching the two beam-splitting lenses 10 at their corresponding positions forms the beam-splitting lens group 1 with multiple beam-splitting units 10000.

[0074] like Figure 4 As shown in (a) and (b), the beam-splitting lens 10 includes a limiting structure, and the two beam-splitting lenses 10 include a first beam-splitting lens 11 and a second beam-splitting lens 12. The first beam-splitting lens 11 includes a first beam-splitting surface 111, a first reference surface 112 and a first limiting surface 113, and the second beam-splitting lens 12 includes a second beam-splitting surface 121, a second reference surface 122 and a second limiting surface 123;

[0075] The first reference surface 112 and the second reference surface 122 are the same; the first limiting surface 113 is connected to the first beam splitting surface 111 and the first reference surface 112 respectively, and the second limiting surface 123 is connected to the second beam splitting surface 121 and the second reference surface 122 respectively; the first beam splitting surface 111 includes a plurality of first sub-beam splitting regions 1101 formed by being separated by grooves 1001, and the second beam splitting surface 121 includes a plurality of second sub-beam splitting regions 1201 formed by being separated by grooves 1001.

[0076] The beam-splitting surfaces of the first beam-splitting lens 11 and the second beam-splitting lens 12 are different, that is, the directions of the first sub-beam-splitting region 1101 and the second sub-beam-splitting region 1201 in the first beam-splitting surface 111 and the second beam-splitting surface 121 are different.

[0077] In some embodiments, the first sub-splitter 1101 and the second sub-splitter 1201 form different angles relative to the limiting surfaces in their respective splitting surfaces. When the first sub-splitter 1101 and the second sub-splitter 1201 are fitted together, they form an intersection angle, determined by a first limiting angle α formed by the first sub-splitter 1101 relative to the first limiting surface 113 and a second limiting angle β formed by the second sub-splitter 1201 relative to the second limiting surface 123. Wherein, as... Figure 4 As shown in (a) and (b), the first limiting angle α and the second limiting angle β are the angles formed by the cross section of the sub-splitting region and the limiting surface. That is, the processing angle of the groove 1001 can control the angles formed by the first sub-splitting region 1101 and the second sub-splitting region 1201 relative to the limiting surface.

[0078] By setting a limiting surface, an orientation reference is provided for cutting the groove 1001, thereby reducing the positioning difficulty of the laser device in the process of processing the groove 1001 and effectively improving the processing efficiency of the beam splitter lens.

[0079] like Figure 5 As shown in (a) and (b), in some examples, the first sub-splitting region 1101 and the edge line of the first limiting surface 113 located in the first splitting surface 111 are parallel to each other, and the second sub-splitting region 1201 and the edge line of the second limiting surface 123 located in the second splitting surface 121 are perpendicular to each other. The edge line of the first sub-splitting region 1101 may refer to the edge line generated by the cutting groove 1001 used to determine the width of the first sub-splitting region 1101.

[0080] Furthermore, when the first beam-splitting lens 11 and the second beam-splitting lens 12 are attached together, the first beam-splitting lens 11 and the second beam-splitting lens 12 can be aligned and attached along the first limiting surface 113 and the second limiting surface 123 as a reference. The first sub-beam-splitting region 1101 and the second sub-beam-splitting region 1201 that are attached to each other form an intersection angle of 90°. This allows the cross-sectional shape of the beam-splitting unit 10000 to be controlled to be square, so that the shape of the emitted light spot is approximately square.

[0081] By setting a limiting surface, the cutting angle of the groove 1001 can be effectively controlled. Therefore, when the two beam-splitting lenses are aligned and bonded using the limiting surface as a reference, the intersection angle formed by the first sub-beam-splitting region 1101 and the second sub-beam-splitting region 1201 will meet the desired angle based on the cutting angle design. Furthermore, it effectively avoids manually adjusting the angle of the beam-splitting lenses during bonding, which helps improve the precision control of the intersection angle.

[0082] The shape of the beam splitter lens group 1 also needs to be adapted to the space for accommodating the optical device. The setting method of the limiting surface of the beam splitter lens 10 with different shapes can also be adaptively adjusted according to the shape of the beam splitter lens 10, so as to fully reduce the processing difficulty of the beam splitter lens 10.

[0083] like Figure 6 As shown in (a) and (b), the reference plane of each beam splitter lens 10 is an axisymmetric figure composed of a major arc and a chord belonging to the same circle, and the side plane where the chord is located is perpendicular to the reference plane where the chord is located to form a limiting surface based on the side plane where the chord is located.

[0084] In some embodiments, the first sub-splitting region 1101 of the first beam-splitting surface 111 of the first beam-splitting lens 11 is parallel to the first limiting surface 113, and the second sub-splitting region 1201 of the second beam-splitting surface 121 of the second beam-splitting lens 12 is perpendicular to the second limiting surface 123. When the first beam-splitting lens 11 and the second beam-splitting lens 12 are in contact, the intersection angle formed by the first sub-splitting region 1101 and the second sub-splitting region 1201 is 90°, the shape of the plurality of beam-splitting units 10000 facing the exit surface is square, and the shape of the light spot of the exit light formed after the incident light is split is approximately square.

[0085] By setting a limiting surface on the circular lens, the reference surface of the circular lens is adjusted to a combination of an arc and a chord. The side plane where the chord is located is used as the limiting surface, which can effectively solve the problem that the lack of directional reference of the circular lens during the processing of laser processing devices increases the processing difficulty.

[0086] It should be noted that the size of the limiting surface can be controlled by adjusting the length of the string. The length of the string should be sufficient for the laser processing device to recognize and use as a positional reference for laser cutting. If the recognition accuracy of the laser device is high enough, the length of the string can also be set to a smaller value. In this case, the beam splitter lens will appear as an approximately circular lens.

[0087] It is understandable that, due to its sharp geometric features, a regular polygonal lens can be used as a limiting surface based on the side plane where the existing edges of the regular polygon are located.

[0088] like Figure 5 As shown in (a) and (b), the reference plane of each beam splitter is a regular polygon, and the side plane containing the edge of each reference plane is perpendicular to the reference plane. This side plane can be used as a limiting surface to provide an angle reference during the cutting process of the groove 1001.

[0089] In some embodiments, the beam-splitting lens can be a cube, and during the processing of the beam-splitting lens, laser cutting can be performed based on one edge of one face of the cube. When cutting the first sub-splitting region 1101 on the first beam-splitting lens 11, the cutting can be performed along a direction parallel to one edge of the square; when cutting the second sub-splitting region 1201 on the second beam-splitting lens 12, the cutting can be performed along a direction perpendicular to one edge of the square.

[0090] In other embodiments, the beam-splitting surface and the reference surface of the beam-splitting lens can be regular hexagons. During the processing of the beam-splitting lens, laser cutting can be performed based on one side of the regular hexagon. When cutting the first sub-splitting region 1101 on the first beam-splitting lens 11, the cutting can be performed along a direction parallel to one side of the square. When cutting the second sub-splitting region 1201 on the second beam-splitting lens 12, the cutting can be performed along a direction perpendicular to one side of the regular hexagon.

[0091] By processing the beam-splitting lens 10 separately and then assembling the beam-splitting lens 10 to form the beam-splitting lens group 1, the processing difficulty of the beam-splitting lens 10 can be effectively reduced, thereby effectively improving the yield rate of the beam-splitting lens 10 and taking into account the beam-splitting efficiency of the beam-splitting lens group 1.

[0092] like Figure 7 As shown in the illustration, this application also provides a beam-splitting single lens 13. A positive beam-splitting surface 131 and a negative beam-splitting surface 132 can be obtained by laser processing on the front and back surfaces of the single lens, respectively. The positive beam-splitting surface 131 and the negative beam-splitting surface 132 are two surfaces with opposite directions in the beam-splitting lens.

[0093] like Figure 7 As shown in (a) and (b) in some embodiments, the positive beam-splitting surface 131 includes a groove 1001, which is disposed along the x-axis direction. The negative beam-splitting surface 132 includes a groove 1001, which is disposed along the y-axis direction.

[0094] In some embodiments, the plurality of grooves 1001 on the positive beam-splitting surface 131 are parallel to each other, and the edges of the plurality of positive beam-splitting regions 1301 formed therefrom are also parallel to each other. The plurality of grooves 1001 on the negative beam-splitting surface 132 are parallel to each other, and the edges of the plurality of negative beam-splitting regions 1302 formed therefrom are also parallel to each other. The grooves 1001 on the positive beam-splitting surface 131 and the negative beam-splitting surface 132 have the same groove depth and the same distribution density.

[0095] Furthermore, the positive beam-splitting region 1301 and the negative beam-splitting region 1302 form an intersecting angle, and the overlapping portion of the positive beam-splitting region 1301 and the negative beam-splitting region 1302 forms a beam-splitting unit 10000. In this case, the positive beam-splitting surface 131 can be the incident surface, and the negative beam-splitting surface 132 can be the exit surface. Multiple beam-splitting units 10000 can split the incident light into beams, which are then emitted from the negative beam-splitting surface 132.

[0096] It should be noted that the groove depth of the groove 1001 and the shape of the beam splitting unit 10000 are adjusted according to the desired spot shape of the emitted light. The adjustment principle has been described in the embodiment of the beam splitting lens group 1, and will not be repeated here.

[0097] In some embodiments, the width of the groove 1001 can be set to 1.5 μm. The width of the groove 1001 is smaller than the width of the positive beam splitting region 1301 and the negative beam splitting region 1302, so as to reduce the optical loss rate.

[0098] In some embodiments, the depth of the groove 1001 can be set to 2 μm, and the depth of the groove 1001 accounts for no more than one-third of the lens thickness, so as to maintain the stability of the lens structure.

[0099] In some examples, a manufacturing process based on laser engraving on both the front and back sides to form a groove 1001 is used. The depth of the groove 1001 accounts for no more than one-sixth of the thickness of the beam splitter lens 13, in order to maintain the stability of the lens structure and thus ensure production yield.

[0100] In some examples, the cross-sectional shape of the beam splitter 10000 is square. After the incident light is split by the beam splitter, it exits through the square opening of the beam splitter, forming a light spot that is approximately square.

[0101] In addition, the material of the beam splitter lens 13 can be selected from quartz, borosilicate, silicon, germanium, and sapphire, and the specific material to be used is selected in combination with factors such as the incident light wavelength, groove depth, and desired light spot shape.

[0102] The positive beam splitting surface 131 and the negative beam splitting surface 132 of the beam splitting single lens 13 can also be processed by laser cutting. Therefore, the cutting direction reference can be provided for laser processing by setting the single lens limiting surface 133.

[0103] The single-lens limiting surface 133 of the beam-splitting single lens 13 is connected to the positive beam-splitting surface 131 and the negative beam-splitting surface 132, respectively.

[0104] In some embodiments, when the shape of the beam splitter lens is a combination of a superior arc and a chord belonging to the same circle, the side plane where the chord is located is the single lens limiting surface 133.

[0105] In other embodiments, when the shape of the beam-splitting lens is a regular polygon, the side of the regular polygon is a single lens limiting surface 133.

[0106] When the beam-splitting single lens 13 is an axisymmetric figure, the positive beam-splitting region 1301 and the negative beam-splitting region 1302 located on the positive beam-splitting surface 131 and the negative beam-splitting surface 132 respectively form an intersection angle, that is, the positive beam-splitting region 1301 and the negative beam-splitting region 1302 form different angles with respect to the single lens limiting surface 133 or are 90°.

[0107] In some examples, the angle formed by the positive beam splitting region 1301 and the negative beam splitting region 1302 relative to the single lens limiting surface 133 is 90°, and the cross angle is also adaptively 90°. At this time, the shape of the multiple beam splitting units 10000 facing the exit surface is square, which can split the incident light beam and form an approximately square light spot.

[0108] By processing the positive beam splitter 131 and the negative beam splitter 132 on a single beam splitter lens, multiple processing of the same side mirror can be effectively avoided, thereby avoiding problems such as edge chipping caused by repeated processing of the mirror, which is conducive to improving the production yield of beam splitter lenses.

[0109] Based on the beam-splitting lens group 1 or beam-splitting single lens 13 described in the above embodiments, it can be combined with other optical elements to form a beam-splitting device.

[0110] This application provides a beam splitter, including: a shaping lens group and a beam-splitting lens group 1, wherein the beam-splitting lens group 1 and the shaping lens group are arranged along the same optical axis. The beam-splitting lens group 1 is configured to split incident light into a beam and to emit the split beam to the shaping lens group; the diameter of the beam-splitting lens in the beam-splitting lens group 1 is greater than or equal to the diameter of the incident light.

[0111] The shaping lens group is configured to adjust the shape of the beam splitter light spot to a target shape.

[0112] The shaping lens group is located on the light-emitting side of the beam-splitting lens group 1. The shaping lens group can further modulate the emitted light of the beam-splitting lens group 1 so that the shape of the emitted light spot conforms to the desired shape. For example, the shape of the emitted light spot can be modulated from a square to a circle to form a dot matrix spot.

[0113] In some embodiments, the shaping lens group and the beam-splitting lens group 1 are arranged along the same optical axis to ensure that the shaping lens group can fully receive the emitted light from the beam-splitting lens group 1, thereby improving the utilization rate of the incident light and the formation effect of the dot matrix. Taking laser light as an example, after beam splitting and modulation by optical devices, a laser dot matrix can be formed.

[0114] This optical device can split incident light into a uniform dot matrix. The resulting optical dot matrix has characteristics such as uniform energy and controllability. Therefore, this optical device can be applied to fields such as medical devices and laser processing, and improve the accuracy of corresponding equipment in these fields.

[0115] This application embodiment also provides a beam splitter, including: a shaping lens group and a beam splitter single lens 13; the beam splitter single lens 13 and the shaping lens group are arranged along the same optical axis;

[0116] The beam-splitting single lens 13 is configured to split the incident light into a beam and emit the beam-splitting light to the shaping lens group; the diameter of the beam-splitting single lens 13 is greater than or equal to the diameter of the incident light.

[0117] The shaping lens group is configured to adjust the shape of the beam splitter light spot to a target shape.

[0118] The shaping lens group is located on the light-emitting side of the beam-splitting single lens 13. The shaping lens group can further modulate the emitted light of the beam-splitting single lens 13 so that the shape of the emitted light spot conforms to the desired shape. For example, the shape of the emitted light spot can be modulated from a square to a circle to form a dot matrix spot.

[0119] In some embodiments, the shaping lens group and the beam-splitting single lens 13 are arranged along the same optical axis to ensure that the shaping lens group can fully receive the emitted light from the beam-splitting single lens 13, thereby improving the utilization rate of the incident light and the formation effect of the dot matrix. Taking laser light as an example, after beam splitting and modulation by optical devices, a laser dot matrix can be formed.

[0120] This optical device can split incident light into a uniform dot matrix. The resulting optical dot matrix has characteristics such as uniform energy and controllability. Therefore, this optical device can be applied to fields such as medical devices and laser processing, and improve the accuracy of corresponding equipment in these fields.

[0121] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments described herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A beam-splitting lens assembly, characterized in that, include: Two beam-splitting lenses, both of which are of the same size; Each beam-splitting lens includes a beam-splitting surface and a reference surface; each beam-splitting surface includes a plurality of parallel grooves, the grooves in each beam-splitting surface having the same groove depth and the same distribution density; wherein, the plurality of grooves located in the beam-splitting surface divides the beam-splitting surface into a plurality of sub-beam-splitting regions; the reference surface in two beam-splitting lenses is a plane; the groove width of each groove is smaller than the width of each sub-beam-splitting region; The beam-splitting surfaces of the two beam-splitting lenses are bonded together to form the beam-splitting lens group; wherein, the overlapping portion of the sub-beam-splitting regions located on the two beam-splitting surfaces respectively forms a plurality of beam-splitting units, and the shape of the beam-splitting units is related to the intersection angle formed by the sub-beam-splitting regions located on the two beam-splitting surfaces respectively; the plurality of beam-splitting units are used to split the incident light beam; The shape of the beam splitting unit and the groove depth are determined according to the desired shape of the light spot formed after the incident light is split; the groove is obtained by laser cutting process; the groove loses the incident light when it enters; the groove depth and width are on the order of micrometers.

2. The beam-splitting lens assembly according to claim 1, characterized in that, The reference surface of each of the beam-splitting lenses has an axisymmetric shape.

3. The beam-splitting lens assembly according to claim 2, characterized in that, The two beam-splitting lenses include a first beam-splitting lens and a second beam-splitting lens; the first beam-splitting lens includes a first beam-splitting surface, a first reference surface and a first limiting surface, and the second beam-splitting lens includes a second beam-splitting surface, a second reference surface and a second limiting surface; The first reference surface and the second reference surface are the same; the first limiting surface is connected to the first beam splitting surface and the first reference surface respectively, and the second limiting surface is connected to the second beam splitting surface and the second reference surface respectively; the first beam splitting surface includes a plurality of first sub-beam splitting regions formed by the grooves, and the second beam splitting surface includes a plurality of second sub-beam splitting regions formed by the grooves. Wherein, the edge of the first sub-splitting region forms a first limiting angle with the first limiting surface; the edge of the second sub-splitting region forms a second limiting angle with the second limiting surface; the first limiting angle and the second limiting angle are used to determine the intersection angle formed by the first sub-splitting region and the second sub-splitting region.

4. The beam-splitting lens assembly according to claim 3, characterized in that, Both the first limiting angle and the second limiting angle are right angles; when the first beam splitting surface of the first beam splitting lens and the second beam splitting surface of the second beam splitting lens are attached together, the intersection angle formed by the first sub-beam splitting area and the second sub-beam splitting area is 90°.

5. The beam-splitting lens assembly according to claim 3, characterized in that, The reference plane of each of the beam splitters is an axisymmetric figure composed of major arcs and chords belonging to the same circle, and the side plane where the chord is located is perpendicular to the reference plane where the chord is located to form a limiting surface based on the side plane where the chord is located.

6. The beam-splitting lens assembly according to claim 3, characterized in that, The reference plane of each of the beam splitters is a regular polygon, and the side plane containing the edge of each reference plane is perpendicular to the reference plane to form a limiting surface based on the side plane containing the edge.

7. The beam-splitting lens assembly according to claim 3, characterized in that, Each of the aforementioned beam-splitting lenses is made of one of the following materials: quartz, borosilicate, silicon, germanium, or sapphire.

8. A beam-splitting single lens, characterized in that, include: A positive beam-splitting surface and a negative beam-splitting surface; the positive beam-splitting surface and the negative beam-splitting surface are two surfaces with opposite directions in the beam-splitting single lens; The positive beam-splitting surface and the negative beam-splitting surface each include a plurality of grooves, which divide the positive beam-splitting surface into a plurality of positive beam-splitting regions; the plurality of grooves divide the negative beam-splitting surface into a plurality of negative beam-splitting regions; the plurality of positive beam-splitting regions are parallel to each other, and the plurality of negative beam-splitting regions are parallel to each other; the grooves have the same groove depth and the same distribution density; the groove width of each groove is smaller than the groove width of the positive beam-splitting region and the negative beam-splitting region. The overlapping portion of the positive beam splitting region and the negative beam splitting region forms a plurality of beam splitting units; the shape of the beam splitting unit is related to the intersection angle formed by the positive beam splitting region and the negative beam splitting region, and the plurality of beam splitting units are used to split the incident light beam; The shape of the beam splitting unit and the groove depth are determined according to the shape of the light spot formed after the incident light is split; the groove is obtained by laser cutting process; the groove loses the incident light when it enters; the depth and width of the groove are on the order of micrometers.

9. The beam-splitting single lens according to claim 8, characterized in that, The intersection angle is 90°.

10. A beam splitter, characterized in that, include: Orthopedic lens assembly and beam splitter lens assembly as described in any one of claims 1-7 or beam splitter single lens as described in any one of claims 8-9; The beam-splitting lens group or the beam-splitting single lens and the shaping lens group are arranged along the same optical axis; the shaping lens group is located on the light-emitting side of the beam-splitting lens group or the beam-splitting single lens; The beam-splitting lens group or the beam-splitting single lens is configured to split the incident light into a beam and emit the beam-splitting light to the shaping lens group; the diameter of the beam-splitting single lens in the beam-splitting lens group is greater than or equal to the diameter of the incident light. The shaping lens group is configured to adjust the shape of the beam splitter light spot to a target shape.

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