Positioning method of electrostatic chuck electrode

Abstract

The invention discloses an electrostatic chuck electrode positioning method, and belongs to the technical field of electrostatic chucks, and the electrostatic chuck electrode positioning method comprises the steps that S1, a mark is made on the inner side wall of a middle mold of a dry press, and the mark is a positioning line or a positioning groove; s2, aluminum nitride powder or aluminum oxide powder is filled into a mold cavity of a middle mold of the dry press according to the designed amount, and pressure is applied to press the aluminum nitride powder or the aluminum oxide powder into an aluminum nitride block or an aluminum oxide block; s3, preparing a positioning jig for positioning the electrode; s4, after the electrode is placed, the positioning jig is placed in, the positioning jig is placed on the electrode, the positioning mark is aligned with the positioning line or the positioning groove, and after alignment, the positioning jig is kept still; s5, slightly adjusting the electrode by using a tool through the hollows and the positioning holes, so that the positioning holes are aligned with the corresponding holes in the electrode; and S6, after alignment, the positioning jig is taken out, and positioning of the electrode is completed.

Description

Technical Field

[0001] This invention relates to the field of electrostatic chuck technology, and in particular to a method for positioning electrostatic chuck electrodes. Background Technology

[0002] The electrostatic chuck has a sandwich structure, and common manufacturing methods include dry pressing and tape casting. Tape casting involves printing electrodes onto a tape, which is then stacked and pressed together layer by layer using the tape for positioning. However, dry pressing inherently suffers from uneven pressing. If marking points are pressed onto the powder and the electrode positions are adjusted, this unevenness will be exacerbated, subsequently affecting product performance. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a method for positioning electrostatic chuck electrodes, so as to solve the problems mentioned in the background art.

[0004] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows:

[0005] A method for positioning an electrostatic chuck electrode, the method comprising the following steps:

[0006] S1: First, make a mark on the inner wall of the mold in the dry press. The mark is a positioning line or a positioning groove, and the positioning line or the positioning groove is perpendicular to the working surface of the lower press head.

[0007] S2: Prepare to press aluminum nitride powder or aluminum oxide powder. Fill the aluminum nitride powder or aluminum oxide powder into the mold cavity of the dry press according to the designed amount, and apply pressure to press the aluminum nitride powder or aluminum oxide powder into aluminum nitride block or aluminum oxide block.

[0008] S3: Prepare a positioning fixture for positioning the electrode. The outer side wall of the positioning fixture is aligned with the inner side wall of the mold in the dry press. The positioning fixture includes at least two positioning holes aligned with the holes on the electrode, a positioning mark aligned with the mark, and a cutout for adjusting the electrode. The electrode is then transferred flat onto the aluminum nitride block or the aluminum oxide block, and the position of the electrode is initially adjusted according to the positioning fixture.

[0009] S4: After placing the electrode, place the positioning fixture on top of the electrode, align the positioning mark with the positioning line or the positioning groove, and keep the positioning fixture stationary after alignment.

[0010] S5: Using tools, slightly adjust the electrode through the cutout and the positioning hole so that the positioning hole is aligned with the corresponding hole on the electrode;

[0011] S6: After alignment, remove the positioning fixture to complete the positioning of the electrode.

[0012] Preferably, the positioning fixture is made of acrylic material.

[0013] Preferably, if the mark is a positioning groove, then the positioning mark is a positioning mark groove with the same width as the positioning groove.

[0014] Preferably, when aligning the positioning fixture, the positioning mark groove is aligned with the positioning groove, and the positioning rod is inserted after alignment to complete the alignment of the positioning fixture.

[0015] Preferably, the positioning fixture has a handle on its upper side wall for easy placement or removal.

[0016] The above technical solution has the following beneficial effects:

[0017] This application enables the positioning of the electrodes of an electrostatic chuck by setting marks, positioning fixtures, and positioning methods, allowing for rapid positioning of the electrostatic chuck electrodes. The operation is simple, low-cost, and highly accurate. Attached Figure Description

[0018] Figure 1 This is a cross-sectional structural schematic diagram of a positioning method for an electrostatic chuck electrode according to the present invention.

[0019] Figure 2 This is a schematic diagram of the positioning fixture of the present invention;

[0020] Figure 3 This is a schematic diagram of the structure of a positioning method for an electrostatic chuck electrode according to the present invention;

[0021] Figure 4 This is another structural schematic diagram of a positioning method for an electrostatic chuck electrode according to the present invention. Detailed Implementation

[0022] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that these descriptions are for the purpose of aiding understanding the present invention, but do not constitute a limitation thereof. Furthermore, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0023] refer to Figures 1-4 A method for positioning an electrostatic chuck electrode specifically includes the following steps:

[0024] S1: First, make a mark on the inner wall of the mold 1 in the dry press, which is a positioning line 7 or a positioning groove 11. The positioning line 7 or the positioning groove 11 is perpendicular to the working surface of the lower press head 2.

[0025] Specifically, the dry press is used to press ceramic powder, such as aluminum nitride powder or alumina powder. After pressing, it can be sintered to form an electrostatic chuck ceramic plate. The middle mold 1 of the dry press, together with the lower press head 2 and the upper press head, can press the aluminum nitride or alumina powder into blocks. Positioning lines 7 or positioning grooves 11 are made on the inner wall of the middle mold 1 of the dry press. The positioning lines 7 or positioning grooves 11 are used to position the positioning fixture 5, and then the positioning fixture 5 is used to position the electrode 4 of the electrostatic chuck. The positioning lines 7 or positioning grooves 11 are perpendicular to the working surface of the lower press head 2. The positioning lines 7 can be directly marked on the inner wall of the middle mold 1 of the dry press using a scribing tool. When determining the positioning fixture 5, the positioning lines 7 are aligned with the positioning marks on the positioning fixture 5. At this time, the positioning marks on the positioning fixture 5 can be a line. The positioning grooves 11 can be machined when processing the middle mold 1 of the dry press.

[0026] S2: Prepare to press aluminum nitride powder or aluminum oxide powder. Fill the mold cavity of mold 1 in the dry press with the designed amount of aluminum nitride powder or aluminum oxide powder and press the aluminum nitride powder or aluminum oxide powder into aluminum nitride block 3 or aluminum oxide block 3 with a pressure of 10 MPa.

[0027] Specifically, the amount of aluminum nitride powder or aluminum oxide powder can be calculated based on the thickness of the electrostatic chuck to be prepared. First, add a portion, and after positioning and placing the electrode 4 of the electrostatic chuck, add the remaining ceramic powder to press it into shape. After adding a portion, press the aluminum nitride or aluminum oxide powder into aluminum nitride block 3 or aluminum oxide block 3 with a pressure of 10 MPa. After pressing into blocks, the next step of placing the electrode 4 of the electrostatic chuck can be prepared.

[0028] S3: Prepare a positioning fixture 5 for positioning the electrode 4. The outer side wall of the positioning fixture 5 is aligned with the inner side wall of the mold 1 in the dry press. The positioning fixture 5 includes at least two positioning holes 8 aligned with the holes on the electrode 4, a positioning mark aligned with the mark, and a cutout 9 for adjusting the electrode 4. The electrode 4 is flatly transferred onto the aluminum nitride block 3 or the aluminum oxide block 3, and then the position of the electrode 4 is initially adjusted according to the positioning fixture 5.

[0029] Specifically, the positioning fixture 5 used to position the electrode 4 of the electrostatic chuck is prepared in advance and can be used directly when needed. The shape of the positioning fixture 5 can be set according to the shape of the mold 1 in the dry press. For example, if the electrostatic chuck is disc-shaped and the mold 1 in the dry press is cylindrical, the positioning fixture 5 can be disc-shaped. Its outer wall cooperates with the mold 1 in the dry press, which can restrict the position of the positioning fixture 5, but allows it to move freely up and down or rotate circumferentially. The electrode 4 is then transferred flat onto the aluminum nitride block 3 or aluminum oxide block 3. Then, the position of the electrode 4 is initially adjusted according to the positioning fixture 5, so that it is close to the accurate position. The initial adjustment of the position of electrode 4 is to allow the positioning fixture 5 to be adjusted to the final accurate position more quickly after placement. The positioning fixture 5 includes at least two positioning holes 8 aligned with the holes on electrode 4, positioning marks aligned with the marks, and a cutout 9 for adjusting electrode 4. The positioning holes 8 are used to determine the position of electrode 4 according to the position of positioning fixture 5. Both can be positioned by at least two positioning holes 8. There can be two or three positioning holes 8. The positioning marks are used to align with the marks to determine the correct circumferential position of positioning fixture 5. The cutout 9 is used to reserve space after the position of positioning fixture 5 is determined for operating and adjusting electrode 4 to the correct position.

[0030] S4: After placing the electrode 4, put in the positioning fixture 5. Place the positioning fixture 5 on the electrode 4 and align the positioning mark with the positioning line 7 or the positioning groove 11. After alignment, keep the positioning fixture 5 stationary.

[0031] Specifically, after placing electrode 4, adjust its position to be near the correct position, then put in positioning fixture 5, align the positioning mark with positioning line 7 or positioning groove 11, and adjust positioning fixture 5 to the correct position. After alignment, keep positioning fixture 5 still, and prepare for the next step of adjusting electrode 4.

[0032] S5: Using tools, slightly adjust electrode 4 through the cutout 9 and positioning hole 8 to align positioning hole 8 with the corresponding hole on electrode 4. Specifically, after placing positioning fixture 5, fine-tune the position of electrode 4 through cutout 9, such as by using tweezers, until positioning hole 8 is aligned with the corresponding hole on electrode 4. When placing positioning fixture 5, leave a certain distance between it and electrode 4 to make it easier to adjust the position of electrode 4 and to avoid changing the position of electrode 4 when removing positioning fixture 5 after adjusting the position of electrode 4.

[0033] S6: After alignment, remove the positioning fixture 5 to complete the positioning of electrode 4. After electrode 4 is positioned, add the remaining ceramic powder and press it. After pressing, it can be sintered to form an electrostatic chuck. After sintering into ceramic, its surface will be polished to remove the excess part on the side wall caused by the setting of positioning line 7 or positioning groove 11.

[0034] In some embodiments, the positioning fixture 5 is made of acrylic material, which is an excellent transparent polymer material that is easy to process and manufacture, and also allows observation of the electrode 4 when adjusting its position.

[0035] In some embodiments, if the marking is a positioning groove 11, then the positioning mark is a positioning mark groove 12 with the same width as the positioning groove 11. Specifically, the width of the positioning mark groove 12 can be the same as the width of the positioning groove 11. When determining the position of the positioning fixture 5, the two grooves can be aligned to complete the determination. If the marking is a positioning line 7, then the positioning mark on the positioning fixture 5 is also a positioning mark line 10. When aligning, the two lines can be aligned.

[0036] In some embodiments, when aligning the positioning fixture 5, the positioning mark groove 12 is aligned with the positioning groove 11. After alignment, the positioning rod 13 is inserted to complete the alignment of the positioning fixture 5. Specifically, the positioning rod 13 can be a square rod with a thickness consistent with the width of the positioning mark groove 12. After insertion, it can restrict the circumferential position of the positioning fixture 5 and complete the positioning. Its height can be less than the sum of the depths of the positioning mark groove 12 and the positioning groove 11 for better insertion, so that the positioning groove 11 does not have to penetrate the entire vertical direction.

[0037] In some embodiments, a handle 6 is provided on the upper side wall of the positioning fixture 5 for use when placing or removing the positioning fixture 5. The handle 6 is located above the positioning fixture 5 for easy handling and placement.

[0038] This application uses a method of setting marks, positioning fixture 5, and positioning to position the electrode 4 of an electrostatic chuck, enabling the electrode 4 of the electrostatic chuck to be positioned quickly. The operation is simple, the cost is low, and the positioning accuracy is high.

[0039] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and these variations still fall within the protection scope of the present invention.

Claims

1. A method for positioning electrodes of an electrostatic chuck, characterized in that, The positioning method includes the following steps: S1: First, make a mark on the inner wall of the mold in the dry press. The mark is a positioning line or a positioning groove, and the positioning line or the positioning groove is perpendicular to the working surface of the lower press head. S2: Prepare to press aluminum nitride powder or aluminum oxide powder. Fill the aluminum nitride powder or aluminum oxide powder into the mold cavity of the dry press according to the designed amount, and apply pressure to press the aluminum nitride powder or aluminum oxide powder into aluminum nitride block or aluminum oxide block. S3: Prepare a positioning fixture for positioning the electrode. The outer side wall of the positioning fixture is aligned with the inner side wall of the mold in the dry press. The positioning fixture includes at least two positioning holes aligned with the holes on the electrode, a positioning mark aligned with the mark, and a cutout for adjusting the electrode. The electrode is then transferred flat onto the aluminum nitride block or the aluminum oxide block, and the position of the electrode is initially adjusted according to the positioning fixture. S4: After placing the electrode, place the positioning fixture on top of the electrode, align the positioning mark with the positioning line or the positioning groove, and keep the positioning fixture stationary after alignment. S5: Using tools, slightly adjust the electrode through the cutout and the positioning hole so that the positioning hole is aligned with the corresponding hole on the electrode; S6: After alignment, remove the positioning fixture to complete the positioning of the electrode.

2. The method for positioning an electrostatic chuck electrode according to claim 1, characterized in that, The positioning fixture is made of acrylic material.

3. The method for positioning an electrostatic chuck electrode according to claim 1, characterized in that, If the mark is a positioning groove, then the positioning mark is a positioning mark groove with the same width as the positioning groove.

4. The method for positioning an electrostatic chuck electrode according to claim 3, characterized in that, When aligning the positioning fixture, align the positioning mark groove with the positioning groove, and then insert the positioning rod to complete the alignment of the positioning fixture.

5. The method for positioning an electrostatic chuck electrode according to claim 1, characterized in that, The positioning fixture has a handle on its upper side wall for easy placement or removal.

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