Raman probe with built-in calibration light source and spectral detection device

Abstract

The application provides a Raman probe with a built-in calibration light source, comprising a dichroic mirror, an excitation light emitting module, a calibration light generating module, a signal light input end and a signal light output end; the excitation light emitting module outputs excitation light which is reflected by the dichroic mirror to the signal light input end; the calibration light emitting module outputs calibration light which is reflected by the dichroic mirror to the signal light output end; the signal light input end collects signal light and transmits the signal light to the dichroic mirror, and then transmits the signal light to the signal light output end; and the signal light output end uniformly outputs the signal light and the calibration light. The application also provides a spectrum detection device, comprising a spectrometer and the Raman probe with the built-in calibration light source; the spectrometer is connected to the light output end of the Raman probe, and completes self-calibration through the received calibration light. The application sets the calibration light source in the Raman probe by using the existing detection light path elements, and depends on the dichroic mirror for reflection and output, so that manual adjustment of the calibration light source and the corresponding optical components is not needed, and spectrum calibration can be efficiently and timely completed.

Description

Technical Field

[0001] This invention relates to the field of spectral detection, and in particular to a Raman probe and spectral detection device with a built-in calibration light source. Background Technology

[0002] When light strikes a medium, some of it is scattered, including Rayleigh scattering and Raman scattering. Rayleigh scattering is an elastic scattering phenomenon; after a photon collides with a molecule, its direction of motion changes, while its energy remains constant. Raman scattering is an inelastic scattering phenomenon; photons exchange energy with molecules, causing a change in the frequency of the scattered light. Raman spectroscopy is a type of scattering spectrum that reflects the vibrational information of molecules. It has excellent chemical specificity and is therefore widely used in chemistry, polymer materials, geology, life sciences, and other fields. The intensity of Raman scattering is approximately [a fraction of that of Rayleigh scattering]. Times ~ Times, which is the intensity of the incident light. Times ~ Therefore, Raman spectrometers typically have a very high detection signal-to-noise ratio.

[0003] To ensure the accuracy and repeatability of Raman spectroscopy, appropriate calibration is necessary. Currently, the conventional calibration method involves placing a standard spectral signal below the objective lens as a calibration light source. This signal is then routed through the appropriate optical path in the Raman spectrometer to the imaging spectrometer for subsequent calibration. However, this method requires repeated disassembly and reassembly of the calibration light source and adjustment of its position to maintain optical path consistency, making the calibration process complex and time-consuming.

[0004] Therefore, how to design a Raman spectrometer that is easy to operate and can be calibrated in real time has become one of the technical problems that urgently need to be solved by those skilled in the art.

[0005] It should be noted that the above description of the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of the present invention and facilitating understanding by those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because they have been described in the background section of this invention. Summary of the Invention

[0006] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a Raman probe and spectral detection device with a built-in calibration light source to solve the problem of complex and time-consuming calibration of Raman spectrometers in the prior art.

[0007] To achieve the above and other related objectives, the present invention provides a Raman probe with a built-in calibration light source. The Raman probe with a built-in calibration light source includes at least: a dichroic mirror, an excitation light emission module, a signal light input terminal, a calibration light generation module, and a signal light output terminal. The excitation light emission module and the signal light input terminal are located on a first side of the dichroic mirror, and the calibration light generation module and the signal light output terminal are located on a second side of the dichroic mirror. The first and second sides of the dichroic mirror are opposite to each other. The excitation light emission module includes a laser and a first filter. The laser emits excitation light, which passes through the first filter and is reflected by the first surface of the dichroic mirror before entering the signal light input terminal. The signal light input terminal includes a signal light collector. The excitation light is transmitted along the optical axis of the signal light collector to the sample under test. The sample under test is excited to generate signal light, which is collected by the signal light collector and transmitted to the dichroic mirror. The signal light is then transmitted through the dichroic mirror to the signal light output terminal. The calibration light generation module includes a calibration light source. The calibration light source generates calibration light, which is reflected by the second surface of the dichroic mirror to the signal light output terminal. After reflection by the dichroic mirror, the direction of propagation of the calibration light is parallel to the optical axis of the signal light collector. The calibration light and the signal light are in the same wavelength band. The signal light output terminal includes a filter. The signal light and the calibration light pass through the filter to remove stray light and are then jointly output to the Raman probe of the built-in calibration light source.

[0008] Optionally, the excitation light emitting module further includes a collimating lens; the collimating lens is disposed in the optical path between the laser and the dichroic mirror, and is used to collimate the excitation light.

[0009] Optionally, the signal light collector is any one of a lens, an arc-shaped reflector, or a compound parabolic surface condenser.

[0010] Optionally, the calibration light generation module further includes a light homogenizer; the light homogenizer is disposed in the optical path between the calibration light source and the dichroic mirror, and is used to homogenize the light intensity of the calibration light and widen the light spot size of the calibration light.

[0011] Optionally, the calibration light generating module further includes a third lens; the third lens is disposed in the optical path between the calibration light source and the dichroic mirror, and is used to collimate the calibration light.

[0012] Optionally, the calibration light generation module further includes a third filter; the third filter is disposed in the optical path between the calibration light source and the dichroic mirror, and is used to filter out stray light in the calibration light.

[0013] Optionally, the signal light output terminal further includes a second lens, which is disposed in the optical path between the dichroic mirror and the filter or in the optical path after the filter, for coupling the signal light and the calibration light.

[0014] Optionally, the second surface of the dichroic mirror has a reflectance of 1%-10% for the calibration light.

[0015] Optionally, the Raman probe with built-in calibration light source further includes a housing; the dichroic mirror, the excitation light emission module, the signal light input terminal, the calibration light generation module, and the signal light output terminal are all located inside the housing; the optical path of the signal light is provided with a first light-transmitting hole at the housing position corresponding to the side of the signal light input terminal; the optical paths of the signal light and the calibration light are provided with a second light-transmitting hole at the housing position corresponding to the side of the signal light output terminal.

[0016] To achieve the above and other related objectives, the present invention also provides a spectral detection device, which includes at least: a spectrometer and a Raman probe with a built-in calibration light source; the spectrometer is used to receive calibration light and signal light output by the Raman probe with the built-in calibration light source; the spectrometer performs spectral detection based on the signal light and performs spectral calibration based on the calibration light.

[0017] Optionally, when the calibration light generation module includes a homogenizer, the spectral detection device further includes an optical fiber bundle; the optical fiber bundle is connected between the Raman probe of the built-in calibration light source and the spectrometer, and is used to transmit the signal light and calibration light output by the Raman probe of the built-in calibration light source to the spectrometer.

[0018] Alternatively, the fiber bundle includes n transparent fibers and m opaque dark cores, where n is a natural number greater than or equal to 1 and m is an integer greater than or equal to 0; when n equals 1, m is 0; when n equals 2, m is greater than or equal to 0; at one end of the fiber bundle connected to the Raman probe of the built-in calibration light source, the n transparent fibers and m opaque dark cores are arranged in concentric circles, and at the other end of the fiber bundle connected to the spectrometer, the n transparent fibers and m opaque dark cores are arranged in a linear shape.

[0019] As described above, the Raman probe and spectral detection device with built-in calibration light source of the present invention have the following beneficial effects:

[0020] 1. This invention places the calibration light source inside the Raman probe and relies on the reflection output of the dichroic mirror, so that the Raman probe with the built-in calibration light source can efficiently and in real time complete the purpose of outputting calibration light. This invention does not require manual adjustment of the calibration light source that is independent of the original optical system, nor does it require moving the components in the original optical system.

[0021] 2. This invention places the fiber bundle between the Raman probe and the spectrometer, which on the one hand couples the Raman probe to the circular end of the fiber bundle, and on the other hand couples the spectrometer to the linear end of the fiber bundle. Therefore, this invention greatly improves the transmission efficiency and transmission quality of signal light and calibration light between the Raman probe and the spectrometer. Attached Figure Description

[0022] Figure 1 The diagram shown is a first structural schematic of the Raman probe with a built-in calibration light source according to the present invention.

[0023] Figure 2 The diagram shown is a schematic representation of the orientation of the dichroic mirror of the present invention.

[0024] Figure 3 The diagram shown is a structural schematic of the calibration light generation module of the present invention.

[0025] Figure 4 The diagram shows a second structural schematic of the Raman probe with a built-in calibration light source according to the present invention.

[0026] Figure 5 The diagram shown is a first structural schematic of the spectral detection device of the present invention.

[0027] Figure 6 The diagram shown is a second structural schematic of the spectral detection device of the present invention.

[0028] Figure 7 The diagram shows the spectral data of each channel of calibration light acquired by the spectrometer of the present invention before calibration.

[0029] Figure 8 The diagram shows the spectral data of each channel of calibration light acquired by the spectrometer of the present invention after calibration.

[0030] Figure 9 The diagram shows the structural schematics of both ends of the optical fiber bundle of the present invention.

[0031] Figure 10 The diagram shown is a structural schematic of the first end of the optical fiber bundle of the present invention.

[0032] Figure 11 The diagram shown is a structural schematic of the second end of the optical fiber bundle of the present invention.

[0033] Component designation explanation

[0034] Detailed Implementation

[0035] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0036] Please see Figures 1-11 It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0037] After Raman light enters the spectrometer, significant spectral drift occurs in each channel, leading to unsatisfactory detection results. Therefore, spectrometer calibration is necessary. Adding a calibration light source to the Raman spectrometer is a common approach; however, as mentioned in the background section, this approach is complex and time-consuming because the signal acquisition optical path structure in the spectrometer is fixed. Adding an external calibration light source requires continuous adjustments during calibration to maintain the consistency of the signal acquisition optical path. While an improvement approach can be implemented within the entire imaging spectrometer, the Raman probe's simple structure and flexibility allow for the placement of the calibration light source. However, adding a calibration light source within the Raman probe still presents the problem of needing to adjust movable components.

[0038] Therefore, in order to solve the above problems, the present invention proposes a Raman probe and spectral detection device with a built-in calibration light source, and the specific technical solution is as follows:

[0039] Example 1

[0040] like Figure 1 As shown, this embodiment provides a Raman probe 1 with a built-in calibration light source, including: a dichroic mirror 15, an excitation light emission module 11, a signal light input terminal 12, a calibration light generation module 13, and a signal light output terminal 14.

[0041] like Figure 1 As shown, the excitation light emission module 11 and the signal light input terminal 12 are located on the first side of the dichroic mirror 15, and the calibration light generation module 13 and the signal light output terminal 14 are located on the second side of the dichroic mirror 15; wherein, the first side and the second side of the dichroic mirror 15 are opposite to each other.

[0042] Specifically, in this embodiment, such as Figure 2As shown, to satisfy the requirements of excitation light reflection, signal light transmission, and calibration light reflection, on one hand, the excitation light emitting module 11 and the signal light input terminal 12 are located on one side of the dichroic mirror 15, and the calibration light generating module 13 and the signal light output terminal 14 are located on the other side of the dichroic mirror 15. On the other hand, the light emitted by the excitation light emitting module 11 and the calibration light generating module 13 are both parallel to the first direction, and the signal light path between the signal light input terminal 12 and the signal light output terminal 14 is parallel to the second direction. The first direction and the second direction are axially symmetrical about the normal of the dichroic mirror 15, and the angle between them and the dichroic mirror 15 is 1 / 2. , The angle is greater than 0 degrees and less than 90 degrees, including but not limited to 15 degrees, 30 degrees, 45 degrees, 60 degrees, and 75 degrees. Furthermore, by selecting a suitable dichroic mirror 15, the dichroic mirror 15 can reflect the light signal in the excitation light band and transmit the light signal in the target signal light band. In practical applications, dichroic mirrors 15 of different bands are selected as needed, which will not be specifically described here.

[0043] like Figure 1 As shown, the excitation light emission module 11 includes a laser 1a and a first filter 1c. The laser 1a emits excitation light, which passes through the first filter 1c and is then reflected by the first surface of the dichroic mirror 15 into the signal light input terminal 12.

[0044] Specifically, in this embodiment, such as Figure 1 As shown, the excitation light emitted by laser 1a is transmitted to the first filter 1c, which filters out stray light from the excitation light. The purified excitation light is then transmitted to the first surface of dichroic mirror 15 and reflected by the first surface of dichroic mirror 15 to the signal light input terminal 12. Further, as... Figure 1 As shown, the excitation light emission module 11 also includes a collimating lens 1b, which is disposed in the optical path between the laser 1a and the dichroic mirror 15 for collimating the excitation light. As an example, the laser 1a can be any one of a solid-state laser, a gas laser, or a semiconductor laser, and the first filter 1c can be a bandpass filter with a center wavelength equal to the excitation light wavelength. In practical applications, the specific types of laser 1a and first filter 1c can be selected as needed, and are not limited to this embodiment.

[0045] like Figure 1 As shown, the signal light input terminal 12 includes a signal light collector 1d; the excitation light is transmitted to the sample to be tested along the optical axis of the signal light collector 1d, the sample to be tested is excited to generate signal light, the signal light is collected by the signal light collector 1d and transmitted to the dichroic mirror 15, and then transmitted to the signal light output terminal 14 through the dichroic mirror 15.

[0046] Specifically, in this embodiment, such as Figure 1As shown, the excitation light is transmitted to the surface of the sample under test through the optical axis of the signal light collector 1d. The sample under test is excited and generates Raman signal light. Since the signal light is scattered from the sample under test, it needs to be collected by the signal light collector 1d. Based on the transmission of the target wavelength by the dichroic mirror 15, the signal light is then transmitted to the signal light output terminal 14 through the dichroic mirror 15. As an example, the signal light collector 1d can be any one of a lens, a curved mirror, or a compound parabolic condenser, used to collimate or focus the Raman signal light. In practical applications, the specific type of signal light collector 1d can be set as needed, and is not limited to this embodiment.

[0047] like Figure 1 and Figure 3 As shown, the calibration light generation module 13 includes a calibration light source 1e, which generates calibration light. The calibration light is reflected by the second surface of the dichroic mirror 15 to the signal light output terminal 14. After being reflected by the dichroic mirror 15, the direction of propagation of the calibration light is parallel to the optical axis of the signal light collector 1d. The calibration light and the signal light are in the same wavelength band.

[0048] Specifically, in this embodiment, the calibration light is reflected by the second surface of the dichroic mirror 15 to the signal light output terminal 14; wherein, the calibration light source 1e is a standard spectral signal added to the Raman probe 1, used to calibrate the spectral data of the signal light obtained by the spectrometer 2. Since the calibration light generated by the calibration light source 1e and the excitation light generated by the laser 1a are both located in the first direction, the reflected calibration light is parallel to the signal light. Further, as... Figure 3 As shown, the calibration light generation module 13 also includes a homogenizer 1h, which is disposed in the optical path between the calibration light source 1e and the dichroic mirror 15, for homogenizing the light intensity of the calibration light and widening the light spot size of the calibration light; the calibration light generation module 13 also includes a third lens 1g, which is disposed in the optical path between the calibration light source 1e and the dichroic mirror 15, for collimating the calibration light; the calibration light generation module 13 also includes a third filter 1f, which is disposed in the optical path between the calibration light source 1e and the dichroic mirror 15, for filtering out stray light in the calibration light, stray light referring to optical signals outside the calibration light and signal light bands. Furthermore, as... Figure 3 As shown, when the calibration light generation module 13 includes a homogenizer 1h, a third lens 1g, and a third filter 1f, both the third lens 1g and the third filter 1f should be placed in the optical path after the homogenizer 1h. As an example, when the excitation wavelength of the laser 1a is 785nm and the signal light band is approximately 800-930nm, the calibration light source 1e is a NeAr lamp whose main spectrum is also in the 800-930nm range, and the third filter 1f is a long-pass filter with a cutoff wavelength of 800nm. In practical applications, the specific types of calibration light source 1e and third filter 1f can be selected as needed, and are not limited to this embodiment.

[0049] like Figure 1 As shown, the signal light output terminal 14 includes a filter 1j. The signal light and the calibration light pass through the filter 1j to filter out stray light, and then are output together to the Raman probe 1 with the built-in calibration light source.

[0050] Specifically, in this embodiment, such as Figure 1 As shown, filter 1j receives the signal light and calibration light, and is used to filter out the excitation light mixed in between. The signal light and calibration light are then output together to the Raman probe 1 after passing through filter 1j. As an example, filter 1j can be a long-pass filter. In practical applications, the specific type of filter 1j can be selected as needed, and is not limited to this embodiment. Furthermore, the signal light output terminal 14 also includes a second lens 1i. The second lens 1i is disposed in the optical path between the dichroic mirror 15 and filter 1j or in the optical path after filter 1j, and is used to couple the signal light and calibration light. The second lens 1i can be any one of a lens that reduces the divergence angle, a collimating lens, and a focusing lens, which will not be specifically described here.

[0051] Specifically, in this embodiment, such as Figure 4 As shown, the Raman probe 1 with a built-in calibration light source also includes a housing 16. A dichroic mirror 15, an excitation light emission module 11, a signal light input terminal 12, a calibration light generation module 13, and a signal light output terminal 14 are all located within the housing 16. The housing 16 is made of opaque material to shield the internal optical system from stray light. Furthermore, to output excitation light to the sample and collect signal light from the sample, a first light-transmitting hole 1m should be provided at the housing position corresponding to the signal light input terminal 12. To output signal light and calibration light, second light-transmitting holes 1n should be provided at the housing positions corresponding to the signal light output terminal 14.

[0052] It should be noted that since the calibration light and the signal light are in the same wavelength band, the dichroic mirror 15 mainly transmits the signal light and calibration light in the target wavelength band. It is generally believed that the higher the transmittance of the dichroic mirror in the target wavelength band, the better. In conventional cases, the dichroic mirror needs to be coated with an anti-reflection film to achieve a transmittance of more than 99% in the target signal light band, which means that its reflectance is less than 1%. However, in order to avoid the trouble of constantly adjusting the calibration light source 1e as an independent optical element, this embodiment takes the opposite approach and uses a specially designed dichroic mirror 15 or a dichroic mirror 15 without an anti-reflection film. It has a small but not negligible reflectance in the target signal light band, that is, the reflectance of the second surface of the dichroic mirror 15 on the calibration light is 1%-10%, including but not limited to 3%, 5%, 7%, and 9%. In practical applications, the reflectance of the second surface of the dichroic mirror 15 on the calibration light can be set as needed, and is not limited to this embodiment. The calibration light source 1e is placed on the second side of the dichroic mirror 15. The calibration light is transmitted to the spectrometer 2 by utilizing the lower reflectivity of the second side of the dichroic mirror 15, thereby calibrating the spectrometer 2. Therefore, the Raman probe can output signal light and calibration light simultaneously. However, on the other hand, the lower reflectivity will lead to the problem of the calibration light being too weak. This problem can be solved by increasing the light intensity of the calibration light source 1e or extending the detection integration time. Thus, this embodiment achieves the invention objective of simple operation and real-time calibration of the spectrometer 2.

[0053] It should be further explained that the Raman probe 1 with built-in calibration light source in this embodiment not only completes the task of exciting and outputting signal light, but also completes the task of outputting calibration light with the help of existing optical path components. There is no need to manually separate the calibration light source 1e from the original Raman probe 1 optical system or the spectrometer 2 optical system, nor is it necessary to move the components in the corresponding optical system. It has the advantages of simple structure and high system integration.

[0054] Example 2

[0055] like Figure 5 As shown, this embodiment provides a spectral detection device, including a spectrometer 2 and a Raman probe 1 with a built-in calibration light source. The spectrometer 2 is used to receive calibration light and signal light output by the Raman probe 1 with a built-in calibration light source. The spectrometer 2 performs spectral detection based on the signal light and spectral calibration based on the calibration light.

[0056] Specifically, in this embodiment, since the Raman probe 1 simultaneously outputs signal light and calibration light, the spectrometer 2 calibrates the obtained signal light spectrum in real time. Further, as... Figure 5 As shown, the spectrometer 2 can be directly located after the optical path of the Raman probe 1, and receives signal light and calibration light through spatial light transmission, such as... Figure 6 As shown, spectrometer 2 can also receive calibration light and signal light output from Raman probe 1 via fiber bundle 3. For example, as... Figure 7 As shown, the spectra of each channel of the calibration light obtained by spectrometer 2 exhibit significant drift, such as... Figure 8 As shown, based on the signal light and calibration light output by the Raman probe 1 with built-in calibration light source in this embodiment, the spectral drift in the spectrum of the calibration light obtained by the spectrometer 2 is greatly improved. Similarly, the spectral data of each channel signal light obtained by the spectrometer 2 in this embodiment will not have obvious drift, and the Raman light detection results will be more accurate.

[0057] Specifically, in this embodiment, when the calibration light generation module 13 includes a homogenizer 1h, the spectral detection device also includes an optical fiber bundle 3. Since the homogenizer 1h can expand the beam of calibration light, the calibration light output by the Raman probe 1 can match the size of the optical fiber bundle 3. Furthermore, the optical fiber bundle 3 is connected between the Raman probe 1 and the spectrometer 2, and is used to transmit the signal light and calibration light output by the Raman probe 1 to the spectrometer 2. Since the optical fiber bundle 3 can not only transmit optical signals but also perform spatial filtering, the transmission quality and efficiency of the signal light and calibration light can be greatly improved. Further still, the optical fiber bundle 3 includes n transparent optical fibers 3a and m opaque dark cores 3b. To better protect the optical fiber bundle 3, each transparent optical fiber 3a and each opaque dark core 3b can be wrapped with an opaque cladding 3c; where n is a natural number greater than or equal to 1, and m is an integer greater than or equal to 0. As an example, when n equals 1, m is 0, that is, a transparent optical fiber 3a is connected between the Raman probe 1 and the spectrometer 2. As another example, when n is greater than or equal to 2, m is greater than or equal to 0, such as Figure 9 , Figure 10 and Figure 11 As shown, to accommodate the shape of Raman light, at one end of the fiber bundle 3 connected to the Raman probe 1 (the first end of the fiber bundle 3), n transparent fibers 3a and m opaque dark cores 3b are arranged in concentric circles. The offset of the signal light at the center of the circle is 0, and the offsets of the signal lights on the same circumference are equal. To accommodate the shape of the entrance slit of the spectrometer 2, at one end of the fiber bundle 3 connected to the spectrometer 2 (the second end of the fiber bundle 3), n transparent fibers 3a and m opaque dark cores 3b are arranged linearly. The opaque dark cores 3b are separated from the transparent fibers 3a with different offsets (zero offset, first offset, and second offset) at the center of the circle in the linear arrangement. In practical applications, the specific arrangement shape of the fiber bundle 3 can be set as needed, and is not limited to this embodiment.

[0058] In summary, the Raman probe with a built-in calibration light source of the present invention includes: a dichroic mirror, an excitation light emission module, a signal light input terminal, a calibration light generation module, and a signal light output terminal. The excitation light emission module emits excitation light, which is reflected by the first surface of the dichroic mirror and enters the signal light input terminal. The signal light input terminal generates signal light, which is transmitted through the dichroic mirror and enters the signal light output terminal. The calibration light generation module generates calibration light, which is reflected by the second surface of the dichroic mirror and enters the signal light output terminal. The signal light output terminal outputs both the signal light and the calibration light to the Raman probe with the built-in calibration light source. The spectral detection device of the present invention includes: a spectrometer and a Raman probe with a built-in calibration light source. The spectrometer receives the calibration light and signal light output by the Raman probe. The spectrometer performs spectral detection based on the signal light and completes its own spectral calibration based on the calibration light. The Raman probe with built-in calibration light source of this invention utilizes existing detection optical path components, placing the calibration light source inside the Raman probe. The calibration light relies on the reflection output of a dichroic mirror, eliminating the need for manual adjustment of the calibration light source, which is independent of the original Raman probe optical system and spectrometer optical system. It also eliminates the need to move components within the original optical system, enabling efficient and real-time self-calibration. This invention offers advantages such as low cost, simple operation, and high system integration. Therefore, this invention effectively overcomes the various shortcomings of existing technologies and possesses high industrial application value.

[0059] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A Raman probe with built-in calibration light source, characterized by, The Raman probe with the built-in calibration light source comprises at least a dichroic mirror, an excitation light emitting module, a signal light input end, a calibration light generating module and a signal light output end. The excitation light emitting module and the signal light input end are located at a first side of the dichroic mirror, and the calibration light generating module and the signal light output end are located at a second side of the dichroic mirror; wherein the first side and the second side of the dichroic mirror are opposite to each other. The excitation light emitting module comprises a laser and a first filter; the laser emits excitation light, the excitation light passes through the first filter and is reflected by a first surface of the dichroic mirror to enter the signal light input end. The signal light input end comprises a signal light collector; the excitation light is transmitted along an optical axis of the signal light collector to a sample to be detected, the sample to be detected generates signal light, the signal light is collected by the signal light collector and transmitted to the dichroic mirror, and then is transmitted to the signal light output end through the dichroic mirror. The calibration light generating module comprises a calibration light source; the calibration light source generates calibration light, the calibration light is reflected by a second surface of the dichroic mirror to the signal light output end; the propagation direction of the calibration light after being reflected by the dichroic mirror is parallel to the optical axis of the signal light collector; wherein the calibration light and the signal light are in the same wave band. The signal light output end comprises a filter; the signal light and the calibration light pass through the filter to filter out stray light, and then are output to outside of the Raman probe with the built-in calibration light source.

2. The Raman probe with built-in calibration light source according to claim 1, characterized in that: The excitation light emitting module further comprises a collimating mirror; the collimating mirror is arranged in an optical path between the laser and the dichroic mirror, and is used for collimating the excitation light.

3. The Raman probe with built-in calibration light source of claim 1, wherein: The signal light collector is any one of a lens, an arc-shaped mirror or a compound parabolic concentrator.

4. The Raman probe with built-in calibration light source of claim 1, wherein: The calibration light generating module further comprises a light homogenizing plate; the light homogenizing plate is arranged in an optical path between the calibration light source and the dichroic mirror, and is used for homogenizing the light intensity of the calibration light and widening the spot size of the calibration light.

5. The Raman probe with built-in calibration light source of claim 1, wherein: The calibration light generating module further comprises a third lens; the third lens is arranged in an optical path between the calibration light source and the dichroic mirror, and is used for collimating the calibration light.

6. The Raman probe with built-in calibration light source of claim 1, wherein: The calibration light generating module further comprises a third filter; the third filter is arranged in an optical path between the calibration light source and the dichroic mirror, and is used for filtering out stray light in the calibration light.

7. The Raman probe with built-in calibration light source of claim 1, wherein: The signal light output end further comprises a second lens; the second lens is arranged in an optical path between the dichroic mirror and the filter or in an optical path behind the filter, and is used for coupling the signal light and the calibration light.

8. The Raman probe with built-in calibration light source according to any one of claims 1-7, characterized in that: The reflectivity of the second surface of the dichroic mirror to the calibration light is 1%-10%.

9. The Raman probe with built-in calibration light source according to any one of claims 1-7, characterized in that: The Raman probe with the built-in calibration light source further comprises a housing; The dichroic mirror, the excitation light emitting module, the signal light input end, the calibration light generating module and the signal light output end are all located in the housing. The light path of the signal light is provided with a first light transmission hole at the position of the shell corresponding to the signal light input end; the light paths of the signal light and the calibration light are provided with a second light transmission hole at the position of the shell corresponding to the signal light output end.

10. A spectroscopic detection device, characterized by The spectral detection device at least comprises a spectrometer and the built-in calibration light source's Raman probe according to any one of claims 1-9; The spectrometer is used for receiving the calibration light and the signal light output by the built-in calibration light source's Raman probe; the spectrometer performs spectral detection based on the signal light and performs spectral calibration based on the calibration light.

11. The spectroscopic detection device of claim 10, wherein: When the calibration light generation module comprises a homogenizing plate, the spectral detection device further comprises an optical fiber bundle; the optical fiber bundle is connected between the built-in calibration light source's Raman probe and the spectrometer, and is used for transmitting the signal light and the calibration light output by the built-in calibration light source's Raman probe to the spectrometer.

12. The spectroscopic detection apparatus of claim 11, wherein: The optical fiber bundle comprises n light-transmitting optical fibers and m non-light-transmitting dark cores, wherein n is a natural number greater than or equal to 1, and m is an integer greater than or equal to 0; When n is equal to 1, m is 0; When n is greater than or equal to 2, m is greater than or equal to 0; at one end of the optical fiber bundle connected to the built-in calibration light source's Raman probe, the n light-transmitting optical fibers and the m non-light-transmitting dark cores are arranged in concentric circles; at the other end of the optical fiber bundle connected to the spectrometer, the n light-transmitting optical fibers and the m non-light-transmitting dark cores are arranged in a linear shape.

Images