Square lip seal cutting and straightening device

Abstract

This invention discloses a square lip seal cutting and straightening device, comprising: a linear module formed as a platform, the top surface of which is formed as a straightening part, the straightening part being shaped to fit the bottom surface of the square lip seal; a straightening connecting part that can slide linearly on the top surface of the linear module, and is formed as a frame structure that fits the shape and size of the four edges of the square lip seal; a pressure cap that can be fixedly mounted on one side of the straightening connecting part, the bottom surface of which is shaped to fit the top surface of the conductive tooth side of the square lip seal; a first stop bar arranged side by side with the pressure cap, which can be fixedly mounted on the other side of the straightening connecting part, the bottom surface of which is shaped to fit the top surface of the elastic lip side of the square lip seal; and at least one second stop bar installed at the ends of the pressure cap and the first stop bar in the length direction of the linear module, which can be fixedly mounted on the straightening connecting part.

Description

Technical Field

[0001] This invention relates to the field of semiconductors, and in particular to a square lip seal cutting and straightening device. Background Technology

[0002] In ECP (electrochemical copper plating) equipment for integrated circuit manufacturing, the square lip seal is a key component integrating both sealing and conductivity functions, and is typically installed at the interface between the plating gripper and the wafer. It solves the problem of electrolyte leakage during plating and also stably transmits the current required for plating, which is of great significance for ensuring wafer plating quality and stable equipment operation. The following is a detailed introduction:

[0003] The square lip seal is based on a square lip sealing structure, which differs from the conventional round lip seal. The square structure is more suitable for the sealing requirements of partially regularized wafer clamping stations or square electroplating chambers, providing a larger contact area and stronger extrusion resistance. Its "conductive teeth" are conductive contact elements integrated into the square lip seal. They are usually distributed in an array or continuous tooth shape on the side of the seal that contacts the wafer. The connecting parts of some conductive teeth are embedded inside the sealing substrate, with only the contact end and the electrical connection end exposed.

[0004] The main function of the square lip seal is to tightly fit the elastic lip of the square lip seal against the outer perimeter of the wafer when the electroplating grabber of the ECP equipment is holding the wafer. Through its own deformation, it forms a sealed perimeter, strictly preventing electrolyte from entering the non-working area around the wafer. This avoids electrolyte waste and corrosion of internal components, and also prevents accidental plating in non-working areas from affecting subsequent wafer processing.

[0005] The square lip seal integrates the sealing and conductive components, solving the problem of precise alignment during the installation of traditional separate components and reducing assembly errors. Simultaneously, this integrated structure facilitates cleaning, exposing only a small portion of the conductive contacts, reducing damage to components from electrolyte residue and extending equipment maintenance cycles. Regarding dimensional accuracy, the deformation of the square lip seal must be controlled within 0.5mm to avoid interfering with sealing or conductivity.

[0006] Because square lip seals consist of an encapsulated portion (elastic lip) and a metal portion (conductive teeth), their manufacturing involves at least two processes: metal laser cutting and engraving, and encapsulation. During production, deformation of the square lip seal is unavoidable due to tolerances. This deformation leads to poor contact with the conductive teeth, reducing conductivity and affecting the quality and efficiency of electroplating. Another problem arising from deformation of the square lip seal during electroplating is the potential corrosiveness of the electroplating solution, which can damage equipment. Therefore, it is essential to ensure that the square lip seal is free from deformation before installation and use.

[0007] In addition, the production process of square lip seals requires laser cutting to carve the design shape of the metal skeleton. However, laser cutting needs to be performed repeatedly on the metal skeleton. Due to the shape limitations, square lip seals cannot use a rotary method to perform reciprocating laser cutting and carving.

[0008] Currently, there is no effective solution for simultaneously laser-cutting and reshaping square lip seals. Summary of the Invention

[0009] The summary of this invention introduces a series of simplified concepts, all of which are simplifications of existing technologies in the field, and will be further explained in detail in the detailed description section. This summary is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0010] The technical problem to be solved by the present invention is to provide a device for laser cutting and shaping of a metal skeleton of a square lip seal and / or a square lip seal (i.e., a product after the metal skeleton is coated with rubber).

[0011] To solve the above-mentioned technical problems, the present invention provides a square lip seal cutting and straightening device. The square lip seal includes a square body, one side of which is formed as an elastic lip, i.e., the rubber-coated part of the metal skeleton, and the other side of which is formed as a conductive tooth, i.e., the exposed metal skeleton part. There is a height difference between the elastic lip side and the conductive tooth side. When the square lip seal is in use, the elastic lip side contacts and supports the wafer. The square lip seal cutting and straightening device includes:

[0012] A linear module is formed as a stage, and its top surface is formed as a straightening part, which is shaped to fit with the bottom surface of a square lip seal.

[0013] The orthopedic connection part can slide linearly on the top surface of the linear module, and it is formed as a frame structure that matches the shape and size of the four edges of the square lip seal.

[0014] A pressure cap that can be fixed to one side of the orthopedic connection part, the bottom surface of which is formed to match the top surface of the conductive teeth side of the square lip seal;

[0015] The first stop bar is arranged in parallel with the cover, and a clearance gap is formed between it and the cover. The clearance gap allows the cutting laser to pass through. It can be fixed on the other side of the orthopedic connection. Its bottom surface is formed to match the top surface of the elastic lip side of the square lip seal.

[0016] At least one second stop bar is installed at the end of the cover and the first stop bar along the length of the straight module, and they can be fixed to the orthopedic connection.

[0017] Optionally, the square lip seal cutting and straightening device can be further improved, with the straightening connection part being able to slide linearly on the top surface of the linear module. It is formed as a frame structure, and its top surface is formed as a deformable straightening recess, which is formed to fit the bottom surface of the square lip seal.

[0018] Optionally, the square lip seal cutting and straightening device can be further improved by forming a second stop at both ends of the gland and the first stop.

[0019] Optionally, the square lip seal cutting and straightening device may be further improved by including:

[0020] The positioning connection is formed on the orthopedic connection at the corresponding position below the second stop bar.

[0021] Optionally, the square lip seal cutting and straightening device can be further improved by forming the positioning connection part into a stepped structure that matches the shape of the second stop bar.

[0022] Optionally, the square lip seal cutting and straightening device can be further improved, with the gland and the first stop bar fixed to the frame structure by multiple height-adjustable and fixed positioning connectors;

[0023] The positioning connector ensures that the pressure cap and the first stop bar are at the same height above the orthopedic connection.

[0024] The positioning accuracy of the positioning connector is greater than or equal to 0.001mm.

[0025] Optionally, the square lip seal cutting and straightening device can be further improved by making the first stop bar replaceable. By replacing the first stop bar, the width of the clearance gap can be changed to meet different laser cutting requirements.

[0026] Square lip seals cannot be shaped using the same rotational method as circular lip seals because square lip seals have a height difference between their two sides (and may also have reinforcing ribs), so they cannot be shaped by pressing down on a flat surface.

[0027] Correspondingly, laser cutting to remove part of the metal skeleton and shape it into the desired form also requires the metal skeleton to move repeatedly under the laser to complete the cutting. Square lip seals cannot utilize the same rotational motion as circular lip seals to complete the laser cutting process.

[0028] This invention develops a method for laser cutting and simultaneously shaping a square lip seal using linear reciprocating motion.

[0029] The usage process of the present invention will be described using one of two embodiments.

[0030] A square lip seal is placed into the straightening connector, and then a pressure cap, a first stop, and a second stop are installed. The straightening connector is then pushed to move repeatedly in a straight line on the linear module. The top surface of the linear module is formed as the straightening part, which is shaped to fit the bottom surface of the square lip seal. By pushing the straightening connector to move repeatedly in a straight line on the top surface of the linear module, the deformed position of the square lip seal is corrected by the pressure cap, the first stop, and the second stop. While the straightening connector moves repeatedly in a straight line on the linear module, a laser source emits a cutting laser, which laser-cuts the square lip seal through the clearance gap. In other words, straightening and laser cutting are completed simultaneously during the repeated linear movement on the linear module.

[0031] This invention can achieve at least the following technical effects;

[0032] 1. Due to its shape, a square lip seal cannot be laser-cut by rotation. The present invention provides a solution for laser cutting of square lip seals by means of reciprocating motion on a linear module, with the laser cutting through the clearance between the first stop bar and the pressure cap. The present invention solves the technical defect that a square lip seal cannot be laser-cut by rotation due to its shape, and provides an ideal solution for laser cutting of square lip seals.

[0033] 2. Furthermore, this invention also solves the technical defect that square lip seals cannot be corrected by rotation due to shape limitations, providing an ideal solution for correcting square lip seals. That is, this invention can correct the shape while performing laser cutting.

[0034] 3. This invention utilizes a linear module, a pressure cap, a first stop bar, and a second stop bar to perform laser cutting and shaping simultaneously through repeated linear motion. This maintains downward pressure during the shaping process and ensures stability. The repeated motion prevents rebound deformation after shaping, ensuring uniform force application and avoiding localized over- or under-pressure. Furthermore, the positioning accuracy of the positioning connectors ensures precise correction of deformed areas during shaping, improving accuracy. Laser cutting can be completed simultaneously with repeated linear motion shaping, achieving two process operations through a single set of repeated linear motions, significantly improving production efficiency. Attached Figure Description

[0035] The accompanying drawings are intended to illustrate the general characteristics of the methods, structures, and / or materials used in specific exemplary embodiments of the invention, supplementing the description in the specification. However, the drawings are schematic diagrams not drawn to scale and may not accurately reflect the precise structural or performance characteristics of any of the given embodiments. The drawings should not be construed as limiting or restricting the range of numerical values ​​or properties covered by exemplary embodiments of the invention. The invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0036] Figure 1 This is a schematic diagram of a square lip seal.

[0037] Figure 2 This is a schematic diagram of the structure of the first embodiment of the present invention.

[0038] Figure 3 This is a schematic diagram of the structure of the second embodiment of the present invention.

[0039] Explanation of reference numerals in the attached figures:

[0040] Ontology 1;

[0041] Elastic lip 2;

[0042] Conductive tooth 3;

[0043] Linear module 4;

[0044] Orthopedic section 4.1;

[0045] Orthopedic connection 5;

[0046] Orthopedic recess 5.1;

[0047] Positioning connection part 5.2;

[0048] Cap 6;

[0049] First stop bar 7;

[0050] Second stop bar 8. Detailed Implementation

[0051] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can fully understand other advantages and technical effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through different specific embodiments, and various details in this specification can also be applied based on different viewpoints, with various modifications or changes made without departing from the overall design concept of the invention. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. The following exemplary embodiments of the present invention can be implemented in many different forms and should not be construed as being limited to the specific embodiments set forth herein. It should be understood that these embodiments are provided to make the disclosure of the present invention thorough and complete, and to fully convey the technical solutions of these exemplary embodiments to those skilled in the art. It should be understood that when an element is referred to as "connected" or "combined" to another element, the element can be directly connected or combined to the other element, or there may be intermediate elements. The difference is that when an element is referred to as "directly connected" or "directly combined" to another element, there are no intermediate elements. Throughout the drawings, the same reference numerals always denote the same elements.

[0052] First embodiment;

[0053] refer to Figure 1 Combination Figure 2 As shown, the present invention provides a square lip seal cutting and straightening device. The square lip seal includes a square body 1, one side of which is formed as an elastic lip 2, which is the rubber-coated part of the metal skeleton. The other side of the body 1 is formed as a conductive tooth 3. There is a height difference between the elastic lip 2 side and the conductive tooth 3 side. This height difference is usually used to allow the elastic lip 2 to support the bent structure manufactured by the wafer. The square lip seal cutting and straightening device includes:

[0054] The linear module 4 is formed as a stage, and its top surface is formed as a straightening part 4.1, which is shaped to fit with the bottom surface of the square lip seal.

[0055] The orthopedic connecting part 5 can slide linearly on the top surface of the linear module 4, for example, by sliding on the top surface of the linear module 4 via the slide rails on both sides of the linear module 4. It is formed as a frame structure that matches the shape and size of the four edges of the square lip seal.

[0056] The pressure cap 6 can be fixed on one side of the orthopedic connection part 5, and its bottom surface is formed to match the top surface of the conductive tooth 3 of the square lip seal.

[0057] The first stop bar 7 is arranged in parallel with the pressure cover 6, and a clearance gap is formed between it and the pressure cover 6. The clearance gap allows the cutting laser to pass through. It can be fixed on the other side of the orthopedic connection part 5. Its bottom surface is formed to match the top surface of one side of the elastic lip 2 of the square lip seal.

[0058] At least one second stop bar 8 is installed at the end of the cover 6 and the first stop bar 7 in the length direction of the straight module 4. They can be fixed on the straightening connection part 5. In this embodiment, there are two second stop bars 8, which are located at both ends of the cover 6 and the first stop bar 7 in the length direction of the straight module 4, respectively.

[0059] The main design concept of the first embodiment of this invention is as follows: The square lip seal is shaped by the straightening connecting part reciprocating linearly on the linear module, thus solving the technical problem that the square lip seal cannot be shaped by rotation. Simultaneously, it addresses the technical deficiency that the square lip seal cannot be laser-cut by rotation due to its shape limitations, providing an ideal solution for laser cutting of the square lip seal; achieving the goal of realizing two process operations through a set of repetitive linear movements.

[0060] Second embodiment;

[0061] refer to Figure 1 Combination Figure 3 As shown, the present invention provides a square lip seal cutting and straightening device, which is an improvement on the first embodiment described above. The same parts will not be repeated. The square lip seal cutting and straightening device includes:

[0062] The orthopedic connecting part 5 can slide linearly on the top surface of the linear module 4. It is formed as a frame structure, and its top surface is formed as a deformable orthopedic recess 5.1. The orthopedic recess 5.1 is formed to fit the bottom surface of the square lip seal.

[0063] This embodiment shares the same design concept as the first embodiment, with the main difference being the addition of a shaping recess. The shaping recess is preferably a soft metal sheet structure (e.g., a copper sheet shaped to fit the bottom of a square lip seal). The square lip seal is placed in the shaping recess for shaping and then fixed by a cap, a first stop, and a second stop. The shaping connector moves linearly back and forth on the linear module. The shaping portion on the top surface of the linear module applies force to the shaping recess, causing it to deform and tend towards the shape of the shaping portion on the top surface of the linear module. Adding the shaping recess prevents direct contact between the shaping portion and the square lip seal, avoiding wear during reciprocating motion (e.g., scratches caused by repeated movement).

[0064] Optionally, the first or second embodiment described above can be further improved; in order to increase the ease of operation of the square lip seal cutting and straightening device and achieve rapid installation and positioning, a positioning connection part 5.2 is added, which is formed on the straightening connection part 5 at the corresponding position below the second stop 8. The positioning connection part 5.2 is formed as a stepped structure that matches the shape of the second stop 8.

[0065] Optionally, the first or second embodiment described above can be further improved; to increase the applicability of the square lip seal cutting and straightening device, it can be applied to square lip seals of different thicknesses. The pressure cap 6 and the first stop 7 are fixed to the straightening connection part 5 by multiple height-adjustable positioning connectors, such as high-precision positioning screws; the positioning connectors ensure that the pressure cap 6 and the first stop 7 are at the same height above the straightening connection part 5; wherein, the positioning accuracy of the positioning connectors is greater than or equal to 0.001mm.

[0066] Optionally, the first or second embodiment described above can be further improved; the first stop bar 7 is formed as a replaceable stop bar, and the width of the clearance gap can be changed by replacing the first stop bar 7 to meet different laser cutting requirements.

[0067] The present invention has been described in detail above through specific embodiments and examples, but these are not intended to limit the invention. Many modifications and improvements can be made by those skilled in the art without departing from the principles of the invention, and these should also be considered within the scope of protection of the present invention.

Claims

1. A square lip seal cutting and straightening device, the square lip seal comprising a square body (1), one side of the body (1) forming an elastic lip (2), the other side of the body (1) forming a conductive tooth (3), wherein there is a height difference between the elastic lip (2) side and the conductive tooth (3) side, characterized in that, The square lip seal cutting and straightening device includes: The linear module (4) is formed as a stage, and the top surface is formed as a straightening part (4.1). The straightening part (4.1) is formed in a shape that matches the bottom surface of the square lip seal. The orthopedic connection (5) can slide linearly on the top surface of the linear module (4) to form a frame structure that matches the shape and size of the four sides of the square lip seal; The cap (6) can be fixed on one side of the orthopedic connection (5), and the bottom surface is formed to match the top surface of the conductive tooth (3) of the square lip seal. The first stop bar (7) is arranged side by side with the cover (6) and a clearance gap is formed between them. The clearance gap allows the cutting laser to pass through. The first stop bar (7) can be fixed on the other side of the orthopedic connection (5). The bottom surface is formed to match the top surface of the elastic lip (2) of the square lip seal. At least one second stop bar (8) is installed at the end of the cover (6) and the first stop bar (7) along the length of the straight module (4), and they can be fixed to the orthopedic connection (5).

2. The square lip seal cutting and straightening device as described in claim 1, characterized in that: The top surface of the orthopedic connection (5) is formed as a deformable orthopedic recess (5.1), which is formed to fit the bottom surface of the square lip seal.

3. The square lip seal cutting and straightening device as described in any one of claims 1 or 2, characterized in that: The second stop bar (8) is formed at both ends of the cover (6) and the first stop bar (7).

4. The square lip seal cutting and straightening device as described in any one of claims 1 or 2, characterized in that, Also includes: The positioning connection (5.2) is formed on the orthopedic connection (5) at the corresponding position below the second stop (8).

5. The square lip seal cutting and straightening device as described in claim 4, characterized in that: The positioning connection part (5.2) is formed into a stepped structure that matches the shape of the second stop (8).

6. The square lip seal cutting and straightening device as described in any one of claims 1 or 2, characterized in that: The pressure cap (6) and the first stop bar (7) are fixed to the frame structure by multiple height-adjustable and fixed positioning connectors; The positioning connector makes the pressure cap (6) and the first stop bar (7) at the same height above the orthopedic connection (5); The positioning accuracy of the positioning connector is greater than or equal to 0.001mm.

7. The square lip seal cutting and straightening device as described in any one of claims 1 or 2, characterized in that: The first stop bar (7) is formed as a replaceable stop bar, and the width of the clearance gap can be changed by replacing the first stop bar (7) to meet different laser cutting requirements.

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