A metasurface-based optical beam polarization dynamic analysis device
By using a metasurface-based beam polarization dynamic analysis device and employing a polarization analysis functional unit array to achieve synchronous detection of beam polarization state, the problems of low accuracy and poor environmental adaptability of traditional optical surface shape detection in dynamic environments are solved, thus realizing efficient and stable optical element surface shape detection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- INST OF APPLIED ELECTRONICS CHINA ACAD OF ENG PHYSICS
- Filing Date
- 2025-12-30
- Publication Date
- 2026-05-15
AI Technical Summary
Existing optical surface shape detection technologies have low accuracy and poor environmental adaptability in dynamic environments. Traditional polarization phase shifting technologies have complex optical paths and high costs, making it difficult to meet the needs of industrial sites and mobile platforms.
A beam polarization dynamic analysis device based on metasurfaces is adopted, which utilizes a polarization analysis functional unit array, including left-handed, right-handed, vertically polarized, and horizontally polarized beam detection units. The synchronous detection of beam polarization state is achieved through subwavelength micro/nano structures and cuboid structures, and the integrated design supports global polarization analysis.
The optical system structure has been simplified, the detection accuracy and efficiency have been improved, the environmental adaptability and stability have been enhanced, and it is suitable for environments with large vibrations or temperature changes, while reducing the system size and cost.
Smart Images
Figure CN121430827B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of optical measurement technology, and more specifically to a beam polarization dynamic analysis device based on a metasurface. Background Technology
[0002] Optical component surface shape inspection is one of the core technologies in modern optical manufacturing and metrology, widely used in the quality control of high-performance optical devices such as telescopes, laser systems, and imaging equipment. Surface shape accuracy directly affects the performance of optical systems; therefore, high-precision and high-efficiency inspection methods have always been a research hotspot. Currently, mainstream surface shape inspection techniques are based on interferometry, with phase-shifting interferometry generally considered the most accurate method. This method reconstructs the component surface shape by introducing phase changes to resolve interference fringes. Traditional phase-shifting techniques mainly include mechanical phase shifting and wavelength-tuned phase shifting: mechanical phase shifting relies on physically moving a reference mirror or component to generate a phase shift, while wavelength-tuned phase shifting achieves phase modulation by changing the wavelength of the light source. Although these methods can achieve sub-nanometer accuracy in static environments, they depend on stable mechanical or optical components and cannot adapt to dynamic environments such as vibration and temperature fluctuations, resulting in measurement results that are easily interfered with and poor environmental adaptability.
[0003] To overcome the limitations of static measurements, polarization phase-shifting interferometry has emerged as the only method capable of dynamic phase-shifting interferometry. Existing polarization phase-shifting techniques typically rely on the analysis of beam polarization states, such as deriving phase information by measuring the intensity of linearly polarized light at 0°, 45°, 90°, and 135°. This technique utilizes polarization elements (such as waveplates and polarization beam splitters) to combine the test and reference beams and detect interference signals from different polarization states. However, existing methods have significant drawbacks: the systems typically employ a Thyman Green optical path, meaning the test and reference beams propagate along different paths, increasing optical path complexity and alignment difficulty, and making the system highly sensitive to environmental disturbances (such as airflow disturbances). Furthermore, to achieve multi-polarization state detection, multiple polarization optical elements (such as wire grids and quarter-wave plates) are required, further increasing system size, cost, and calibration complexity. These limitations restrict the application of this technology in industrial settings or on mobile platforms, making it difficult to meet the demands for high environmental adaptability. Therefore, there is an urgent need in the field for a new scheme with a simplified structure that enables dynamic measurement along a common optical path to improve detection efficiency and reliability.
[0004] Therefore, existing technologies still need further development. Summary of the Invention
[0005] The purpose of this invention is to overcome the above-mentioned technical deficiencies and provide a beam polarization dynamic analysis device based on metasurfaces to solve the problems existing in the prior art.
[0006] To achieve the above-mentioned technical objectives, the present invention provides a beam polarization dynamic analysis device based on metasurface, including a polarization analysis functional unit array, wherein the polarization analysis functional unit array is composed of multiple polarization analysis functional units, and each polarization analysis functional unit is configured to detect the polarization state of the beam.
[0007] Specifically, each polarization analysis functional unit includes four sub-units: a left-handed polarization detection unit, a right-handed polarization detection unit, a vertical polarization detection unit, and a horizontal polarization detection unit.
[0008] Specifically, the left-handed optical detection unit and the right-handed optical detection unit are composed of chiral subwavelength micro-nano structures, and the structures of the left-handed optical detection unit and the right-handed optical detection unit are mirror-symmetrical.
[0009] Specifically, the size of the chiral subwavelength micro / nano structure is smaller than the test wavelength.
[0010] Specifically, the vertical polarization detection unit and the horizontal polarization detection unit are composed of subwavelength cuboid structures, and the structures of the vertical polarization detection unit and the horizontal polarization detection unit are perpendicular to each other.
[0011] Specifically, the size of the subwavelength cuboid structure is smaller than the test wavelength.
[0012] Specifically, the polarization analysis functional unit array is patched or directly fabricated on the camera target surface.
[0013] Specifically, the device is used for optical element surface shape detection, and achieves dynamic measurement of optical element surface shape by detecting a pair of orthogonal circularly polarized lights and a pair of orthogonal linearly polarized lights.
[0014] Specifically, the polarization analysis functional unit array is arranged in a planar array to support global polarization analysis of the beam.
[0015] Beneficial effects:
[0016] The metasurface-based beam polarization dynamic analysis device provided by this invention, through its innovative polarization analysis functional unit array design, brings multiple beneficial effects, significantly improving the performance and practicality of optical element surface shape detection. Firstly, the device achieves a significant simplification of the system structure. Traditional polarization phase-shifting techniques require complex polarization elements and beam splitting path layouts, while this invention integrates polarization analysis functionality into a metasurface array. Each functional unit contains four sub-units, capable of simultaneously detecting a pair of orthogonally circularly polarized beams and a pair of orthogonally linearly polarized beams. This integrated design reduces the number of external optical components, lowers the system's size and weight, making it easier to deploy in compact or mobile environments. Simultaneously, the array can be directly fabricated or attached to the camera target surface, avoiding cumbersome optical path alignment and improving installation efficiency and stability.
[0017] Secondly, the metasurface structure used in this invention is based on subwavelength micro / nano units, exhibiting high mechanical and thermal stability, reducing wear and drift problems associated with traditional moving parts. This robustness enables the device to operate stably for extended periods under harsh conditions, supporting real-time continuous monitoring and meeting the high reliability requirements of modern optical inspection.
[0018] Third, this invention improves detection accuracy and efficiency. The array arrangement of the polarization analysis functional unit supports global beam analysis, capturing full-field polarization information in a single operation, avoiding the time delay of scanning measurements. Simultaneous detection of orthogonal circularly polarized and linearly polarized light provides a complete polarization data foundation for surface shape calculation. Combined with the Stokes quantity description of the beam polarization state, high-precision surface shape diagrams can be quickly reconstructed. Compared with traditional methods, this parallel processing approach shortens measurement time, increases throughput, and reduces human error. Furthermore, the structural optimization of the sub-units (such as the mirror symmetry of chiral micro / nano structures and the vertical arrangement of cuboid structures) ensures a high signal-to-noise ratio and low crosstalk, further guaranteeing measurement accuracy. Overall, this invention not only optimizes performance but also reduces manufacturing costs and maintenance requirements, providing an efficient and economical solution for the field of optical metrology. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the composition of a metasurface-based beam polarization dynamic analysis device provided in a specific embodiment of the present invention. Detailed Implementation
[0020] To enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Based on the embodiments in this application, other similar embodiments obtained by those skilled in the art without creative effort should all fall within the scope of protection of this application. Furthermore, directional terms mentioned in the following embodiments, such as "up," "down," "left," and "right," are only for reference to the directions in the accompanying drawings; therefore, the directional terms used are for illustrative purposes and not for limiting the invention.
[0021] The present invention will be further described below with reference to the accompanying drawings and preferred embodiments.
[0022] Please see Figure 1 This invention provides a beam polarization dynamic analysis device based on a metasurface, comprising:
[0023] It includes a polarization analysis functional unit array, which consists of multiple polarization analysis functional units, each configured to detect the polarization state of the beam.
[0024] It should be further explained that the polarization analysis functional unit array is the core component of the device. Realized using metasurface technology, this array is arranged in a planar array, with each functional unit corresponding to a local region of the beam, thus supporting global polarization analysis. In practical implementations, the size and spacing of the array can be adjusted according to the application scenario. For example, the number of units in the array can be matched to the number of pixels on the camera target surface to ensure high-resolution detection. Each polarization analysis functional unit is fabricated using micro-nano fabrication techniques, and the material can be dielectric materials such as silicon or silicon dioxide to enhance optical performance. In refined implementations, the array density should be optimized to avoid crosstalk; typically, the unit spacing is set to the subwavelength order of the test wavelength (e.g., less than half the wavelength) to maintain detection accuracy. Furthermore, the array can be directly fabricated on the substrate using photolithography or electron beam lithography processes, or integrated into the camera system as a patch assembly, which simplifies device manufacturing and deployment.
[0025] Understandably, the array design enables efficient and parallel detection of beam polarization states, avoiding the complex moving parts found in traditional systems, thereby improving system stability and environmental adaptability. This structure supports real-time dynamic measurement, is suitable for industrial environments with significant vibration or temperature variations, and simultaneously reduces system size and cost.
[0026] Specifically, each polarization analysis functional unit includes four sub-units: a left-handed polarization detection unit, a right-handed polarization detection unit, a vertical polarization detection unit, and a horizontal polarization detection unit.
[0027] It should be further explained that the four-subunit structure of each polarization analysis functional unit is key to achieving synchronous detection of multiple polarization states. In implementation, the four subunits are arranged in a 2x2 or linear array within the same functional unit, ensuring they share the same optical path, thereby reducing calibration errors. Left-handed and right-handed polarization detection units are specifically designed for circularly polarized light analysis, while vertical and horizontal linear polarization detection units are used for linearly polarized light analysis. When refining, the subunits should have consistent dimensions, for example, the aperture size of each subunit should be on the order of micrometers or submicrometers to match the test wavelength (such as visible or infrared bands), and the structural parameters should be optimized using simulation software (such as an FDTD solver) to maximize detection efficiency. Furthermore, the electrical outputs of the four subunits can be integrated into the same readout path for synchronous signal processing, which improves detection speed.
[0028] Understandably, the four-subunit design enables the device to simultaneously capture a pair of orthogonally circularly polarized beams and a pair of orthogonally linearly polarized beams, providing complete polarization information for dynamic surface shape calculation and avoiding the time consumption of multiple measurements required in traditional methods. This integrated structure simplifies the optical system, reduces the number of components, thereby improving reliability and environmental robustness, making it particularly suitable for optical inspection under high-speed or harsh conditions.
[0029] Specifically, the left-handed optical detection unit and the right-handed optical detection unit are composed of chiral subwavelength micro-nano structures, and the structures of the left-handed optical detection unit and the right-handed optical detection unit are mirror-symmetrical.
[0030] It should be further explained that the chiral subwavelength micro / nano structure is the core of circularly polarized light detection, and its mirror-symmetric design ensures differential detection of orthogonally circularly polarized light. In implementation, the chiral structure can be a three-dimensional configuration such as a helical or G-shape, with dimensions strictly corresponding to the test wavelength. For example, for a 633 nm helium-neon laser, the structure period can be set to 200-300 nm, and the height to 100-200 nm, to produce a strong circular dichroism effect. Mirror symmetry means that the structure of the left-handed unit is a mirror reflection of the right-handed unit, for example, achieved through electron beam exposure or focused ion beam processing, ensuring that the selective responses of the two to left-handed and right-handed light are consistent but opposite. In refinement, the chiral parameters of the structure (such as rotation angle and pitch) can be optimized through electromagnetic simulation to maximize the extinction ratio of circularly polarized light. At the same time, the material can be selected as a metal (such as gold or aluminum) or a dielectric material (such as silicon, titanium dioxide, etc.) to balance absorption and scattering losses.
[0031] Understandably, the mirror-symmetric chiral structure provides high-precision discriminative capability for circularly polarized light, avoiding the phase errors introduced by traditional waveplates, thereby improving the accuracy of interferometry. This design also enhances the compactness of the device, reduces the optical path length, facilitates system miniaturization and integration, reduces dependence on external polarization elements, and improves environmental adaptability.
[0032] Specifically, the size of the chiral subwavelength micro / nano structure is smaller than the test wavelength.
[0033] It is important to further clarify that the correspondence between the dimensions of chiral subwavelength micro / nanostructures and the test wavelength is fundamental to ensuring efficient optical response. In implementation, dimensional parameters, including the structure's period, width, and height, are typically set within the subwavelength range of the test wavelength; for example, the period is approximately half the wavelength to suppress higher-order diffraction and enhance near-field effects. For specific applications, such as a test wavelength of 550 nm (green light), the structure period can be optimized to 150-250 nm, and the height to 50-150 nm, with experimental calibration to match the circular dichroism peak of the target wavelength band. Further refinement can be achieved through a calibration process, such as testing the device's response curve using a monochromatic light source and adjusting fabrication parameters to ensure maximum detection sensitivity. Furthermore, dimensional tolerances should be controlled within 10 nm to maintain performance consistency.
[0034] Understandably, wavelength-corresponding design ensures high-efficiency detection in specific wavelength bands, reduces crosstalk and noise, thereby improving signal-to-noise ratio and measurement accuracy. This optimization enables the device to adapt to different optical systems, expanding its application range, while reducing power loss and facilitating long-term stable operation.
[0035] Specifically, the vertical polarization detection unit and the horizontal polarization detection unit are composed of subwavelength cuboid structures, and the structures of the vertical polarization detection unit and the horizontal polarization detection unit are perpendicular to each other.
[0036] It should be further explained that the subwavelength cuboid structure is key to linearly polarized light detection, and its perpendicular arrangement enables differential measurement of orthogonally polarized light. In implementation, the cuboid structure consists of nanoscale rod-shaped units, with dimensions corresponding to the test wavelength; for example, the length is set to approximately half the wavelength, while the width and height are on the subwavelength scale (e.g., 100-300 nm) to generate polarization-dependent scattering or absorption. The perpendicular arrangement means that the major axes of the two units differ by 90 degrees, which can be precisely controlled through directional photolithography to ensure selective response to vertically or horizontally polarized light. When refined, the aspect ratio of the structure can be optimized to 2:1 to 5:1 to enhance anisotropy; the material can be silicon or silicon dioxide to provide high refractive index contrast. Furthermore, the unit spacing should be smaller than the wavelength to avoid coupling effects.
[0037] Understandably, the vertical cuboid structure provides high-contrast linear polarization detection and allows its height to match that of the circular polarization unit, reducing manufacturing costs. This design improves device integration, supports rapid polarization analysis, facilitates real-time surface shape measurement, and enhances system stability under vibration.
[0038] Specifically, the size of the subwavelength cuboid structure is smaller than the test wavelength, and its height is consistent with that of the chiral subwavelength micro / nano structure.
[0039] It is important to further clarify that the high degree of consistency between the subwavelength cuboid structure and the chiral structure is a crucial factor in ensuring device planarity and fabrication feasibility. In implementation, high consistency means that all structures have the same dimensions in the vertical direction, for example, all set to 100-200 nanometers, to facilitate single-step photolithography and reduce multi-layer alignment errors. Dimensions corresponding to the test wavelength mean that the length and width of the cuboid structure are also optimized according to the wavelength; for example, for 1064 nm infrared light, the length can be 500-600 nanometers and the width 150-250 nanometers. During refinement, high consistency can be achieved by controlling the etching depth and using the same mask to fabricate both circular and linear polarizing units to ensure surface flatness and avoid optical aberrations. Simultaneously, dimension correspondence can be verified through simulation to balance detection efficiency and bandwidth.
[0040] Understandably, a highly consistent design simplifies the manufacturing process, reduces processing costs and time, and improves the mechanical stability of the device. This optimization ensures uniform optical performance across all units, reduces measurement errors, and thus enhances the overall system reliability and accuracy, making it particularly suitable for mass production.
[0041] Specifically, the polarization analysis functional unit array is patched or directly fabricated on the camera target surface.
[0042] It's important to further explain that the integration method of the array directly affects the ease of application of the device. In a surface-mount implementation, the array can be pre-fabricated on a flexible substrate and attached to the camera target surface (such as a CCD or CMOS sensor) via adhesive or soldering. The substrate material can be polyimide to enhance flexibility. Direct fabrication, on the other hand, involves directly forming micro / nano structures on the camera target surface using photolithography, such as patterning a dielectric layer deposited on a silicon sensor. When refining the fabrication, the patch thickness should be less than 1 mm to avoid light shading, and direct fabrication must ensure compatibility with the readout circuitry, for example, through back-end CMOS integration. Furthermore, calibration is required after integration, such as testing the response curve using a known polarized light source to optimize signal processing algorithms.
[0043] Understandably, the integrated design enables seamless integration of the device and camera, eliminating the need for external optical components, greatly simplifying the system configuration, and improving portability and environmental adaptability. This direct detection method reduces optical path loss, supports high-speed dynamic measurement, and reduces installation errors, making it suitable for field testing or mobile platforms.
[0044] Specifically, the device is used for optical element surface shape detection, and achieves dynamic measurement of optical element surface shape by detecting a pair of orthogonal circularly polarized lights and a pair of orthogonal linearly polarized lights.
[0045] It should be further explained that the application method of the device involves a complete measurement process. In implementation, the device is integrated into an optical element surface shape measurement system. After the test light is incident on the array, the four sub-units simultaneously output the intensity signals of orthogonal circularly polarized light and linearly polarized light. The phase information is calculated using the Stokes quantity of polarized light for surface shape reconstruction. In detail, the detection process includes a calibration step: first, the device response is calibrated using a standard plane mirror, then dynamic measurements are performed on the element under test. The signal processing unit (such as FPGA or software) calculates the polarization state change in real time and derives the surface shape error. For example, orthogonal circularly polarized light is used to extract the phase shift, and orthogonal linearly polarized light is used to calibrate the intensity of the test light and the reference light to achieve a common optical path design.
[0046] Understandably, the application of the above scheme achieves high-precision dynamic surface shape detection, avoids the delay problem of mechanical phase shift, and improves measurement speed and environmental robustness. This polarization analysis-based method simplifies the interferometer structure, supports real-time monitoring, and is suitable for online quality control in fields such as optical manufacturing and aerospace.
[0047] Specifically, the dynamic measurement can employ a common optical path design to enhance environmental adaptability.
[0048] It's important to further explain that the common-path design is a core advantage of dynamic measurement, reducing environmental sensitivity by sharing the optical path. In implementation, a common-path means that the test and reference beams propagate along the same path. For example, a beam splitter can be used to split the light source into two beams, which are then recombined after detection by the device, avoiding alignment issues caused by beam splitting. More specifically, the system can include compensating elements (such as waveplates) to counteract thermal drift, and the device array can be placed directly in the optical path to ensure that the test and reference beams are subjected to the same disturbances. Signal processing uses differential techniques to eliminate common-mode noise. Furthermore, the common-path design allows for compact layouts, such as encapsulating the entire system in a small housing to resist vibration and temperature variations.
[0049] Understandably, the common-path design significantly improves environmental adaptability, enabling devices to operate stably under harsh conditions (such as industrial environments) and reducing calibration requirements. This design also reduces system complexity and cost, improves reliability, and is suitable for long-term unattended applications.
[0050] Specifically, the polarization analysis functional unit array is arranged in a planar array to support global polarization analysis of the beam.
[0051] It should be further explained that the array arrangement ensures global polarization analysis capabilities. In implementation, the array covers the camera target surface in a grid pattern, such as a rectangular or hexagonal arrangement, with uniform cell spacing to match the beam cross-section and avoid edge effects. During refinement, the array density can be adjusted according to resolution requirements; for example, in high-resolution applications, the spacing is set to the micrometer level, and the fill factor is optimized through simulation to maximize light utilization. Furthermore, the array supports parallel processing; each functional unit operates independently, and the data is fused to generate a full-field polarization map for surface reconstruction.
[0052] Understandably, area arrays provide high spatial resolution polarization information, supporting comprehensive detection of complex optical components and avoiding the time overhead of scanning measurements. This global analysis enhances measurement efficiency and application range, making it suitable for large-aperture components or fast-moving dynamic scenarios.
[0053] Understandably, current methods for measuring the surface shape of components primarily employ interferometry. Among existing interferometry methods, phase-shifting interferometry is widely considered to be the most accurate, and mainstream interferometers all use phase-shifting interferometry. However, in existing phase-shifting interferometry, neither mechanical phase shifting nor wavelength-tuned phase shifting can achieve dynamic measurement, thus significantly reducing environmental adaptability. Existing polarization phase-shifting measurement technology is the only technique capable of achieving dynamic phase-shifting interferometry. Existing polarization phase-shifting interferometry achieves phase shift by combining the test and reference beams and measuring linearly polarized light in four directions: 0°, 45°, 90°, and 135°. This requires both the reference and test beams to be circularly polarized, necessitating a separate beam path design. This results in poorer environmental adaptability compared to systems with a shared beam path. Furthermore, the numerous polarization components further increase system complexity and reduce environmental adaptability. Therefore, improving environmental adaptability requires system simplification and a shared beam path design. To achieve this, the existing detection method based on linearly polarized light in four directions (0°, 45°, 90°, and 135°) needs to be improved to a method based on a pair of orthogonal circularly polarized beams and a pair of orthogonal linearly polarized beams. This invention proposes a beam polarization dynamic analysis device for optical element surface shape detection. This device can detect a pair of orthogonal circularly polarized beams and a pair of orthogonal linearly polarized beams, thus providing support for dynamic surface shape calculation of the element.
[0054] To achieve surface shape detection of dynamic optical elements with simple structure and strong environmental adaptability, the traditional polarization phase-shifting technique based on two pairs of orthogonally linearly polarized light needs to be improved to a surface shape detection technique based on one pair of orthogonally linearly polarized light and one pair of orthogonally circularly polarized light. To achieve array detection of one pair of orthogonally linearly polarized light and one pair of orthogonally circularly polarized light, this invention arranges polarization analysis functional units into an array. Each polarization analysis functional unit consists of four sub-units: a left-handed polarization detection unit, a right-handed polarization detection unit, a vertical linear polarization detection unit, and a horizontal linear polarization detection unit. The left-handed and right-handed polarization detection units are arrays composed of chiral subwavelength (test wavelength) micro-nano structures, and their structures are mirror-symmetric. The vertical and horizontal linear polarization detection units are arrays composed of subwavelength cuboid structures, and their structures are perpendicular to each other. For the detection of linearly polarized light, the commonly used wire grating structure is not used to ensure that the linear polarization detection unit and the circular polarization detection unit have the same structural height, thereby reducing manufacturing costs.
[0055] It is understood that the beam polarization state analysis device proposed in this invention is an array composed of polarization analysis functions. During use, it is patched or directly fabricated on the camera target surface. Each polarization analysis array consists of four sub-units: a left-handed polarization detection unit, a right-handed polarization detection unit, a vertical linear polarization detection unit, and a horizontal linear polarization detection unit. The left-handed and right-handed polarization detection units are arrays composed of chiral subwavelength (test wavelength) micro-nano structures, and their structures are mirror-symmetrical. The vertical and horizontal linear polarization detection units are arrays composed of subwavelength cuboid structures, and their structures are perpendicular to each other.
[0056] It is understood that the beam polarization state analysis device proposed in this invention realizes the detection of a pair of orthogonal circularly polarized beams and a pair of orthogonal linearly polarized beams. Compared with the traditional dynamic measurement technology of polarization phase-shifting dynamic element surface shape based on two pairs of linearly polarized beams, it can realize a more simplified structure and a common optical path with high environmental adaptability for dynamic measurement of element surface shape.
[0057] The technical features described above can be combined arbitrarily. Although not all possible combinations of these technical features are described, any combination of these technical features should be considered to be covered by this specification, provided that such combination does not contain contradictions.
[0058] The specific embodiments of the present invention described above do not constitute a limitation on the scope of protection of the present invention. Any other corresponding changes and modifications made in accordance with the technical concept of the present invention should be included within the scope of protection of the claims of the present invention.
Claims
1. A beam polarization dynamic analysis device based on a metasurface, characterized in that, It includes a polarization analysis functional unit array, which is composed of multiple polarization analysis functional units, each configured to detect the polarization state of the beam; Each polarization analysis functional unit includes four sub-units: a left-handed polarization detection unit, a right-handed polarization detection unit, a vertical polarization detection unit, and a horizontal polarization detection unit; The left-handed optical detection unit and the right-handed optical detection unit are composed of chiral subwavelength micro-nano structures, and the structures of the left-handed optical detection unit and the right-handed optical detection unit are mirror-symmetrical. The chiral subwavelength micro / nanostructure has a size smaller than the test wavelength; The vertical polarization detection unit and the horizontal polarization detection unit are composed of subwavelength cuboid structures, and the structures of the vertical polarization detection unit and the horizontal polarization detection unit are perpendicular to each other. The dimensions of the subwavelength cuboid structure are smaller than the test wavelength; The polarization analysis functional unit array patch or directly fabricated on the camera target surface; The device is used for optical element surface shape detection, and achieves dynamic measurement of optical element surface shape by detecting a pair of orthogonal circularly polarized lights and a pair of orthogonal linearly polarized lights. The polarization analysis functional unit array is arranged in a planar array to support global polarization analysis of the beam; The four sub-units are arranged in a 2x2 or linear array within the same functional unit to ensure that they share the same optical path; After the test light is incident on the array, the four sub-units simultaneously output the intensity signals of orthogonal circularly polarized light and linearly polarized light. The phase information is calculated by describing the Stokes quantity of polarized light for surface reconstruction. The testing process includes calibration steps: first, the device response is calibrated using a standard plane mirror, then dynamic measurements are performed on the component under test, the signal processing unit calculates the polarization state change in real time, and derives the surface shape error; orthogonal circularly polarized light is used to extract the phase shift, and orthogonal linearly polarized light is used to calibrate the intensity of the test light and the reference light to realize the common optical path design; For the detection of linearly polarized light, a wire grid structure is not used, thus ensuring that the linearly polarized light detection unit and the circularly polarized light detection unit have the same structural height.