A broadband microwave probe device for carrier decay characteristic measurement

Abstract

This invention relates to the field of semiconductor material testing equipment technology, and discloses a broadband microwave probe device for measuring carrier attenuation characteristics, comprising: a probe pen, with a limiting ring fixedly connected to the outer wall of the probe pen, and a probe disposed at one end of the probe pen; a switching mechanism installed on one side of the probe pen; the switching mechanism including a limiting frame; a lifting mechanism installed on one side of the switching mechanism; a moving mechanism installed on one side of the lifting mechanism, the moving mechanism being connected to a support platform via a support column; a fixing mechanism installed inside the support platform; an adjusting mechanism installed inside the support platform on the same side as the fixing mechanism; and a feeding mechanism installed on the upper surface of the support platform. The movement of a connecting frame two drives the limiting frame to move, causing the limiting frame to push a limiting rod one, causing one end of the limiting rod one to rotate inside the limiting frame, and then pulling the fixing plate out of the limiting frame, thus achieving the effect of changing the probe.

Description

Technical Field

[0001] This invention relates to the field of semiconductor material testing equipment technology, specifically a broadband microwave probe device for measuring carrier attenuation characteristics. Background Technology

[0002] Carrier decay characteristics are a key indicator for evaluating the performance of semiconductor materials and optoelectronic devices. Wideband microwave probes are the core equipment for achieving this measurement. With the rapid development of semiconductor technology, the requirements for measurement accuracy and efficiency are increasing. Existing measurement devices are gradually revealing some problems in practical applications, which not only affect the accuracy of the measurement but also restrict the overall testing efficiency.

[0003] In practical testing, different probes of different specifications are often required for samples with different characteristics. Existing devices mostly use traditional threaded or clip-on fixation for probes, making the assembly and disassembly process quite cumbersome and time-consuming. In scenarios requiring frequent switching of test objects, this severely impacts the continuity of the workflow. Furthermore, the positioning and fixation of the test object largely relies on manual adjustment by the operator. Manual placement makes it difficult to guarantee that the sample is accurately placed in the core testing area each time. This human-introduced positional deviation directly leads to poor repeatability of measurement results, making it difficult to guarantee the reliability of the data.

[0004] Existing technical solutions generally lack automated loading and unloading designs. The entire testing process is manually divided into two independent steps: sample handling and measurement. This operating mode is inefficient when dealing with large-volume sample testing tasks, and there is a risk of accidental sample damage during manual handling, failing to meet the high-throughput, automated requirements of modern production testing. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a broadband microwave probe device for measuring carrier attenuation characteristics. This device solves the problems of cumbersome probe replacement, poor accuracy due to manual sample positioning, and low overall testing efficiency due to low automation of loading and unloading.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a broadband microwave probe device for measuring carrier attenuation characteristics, comprising;

[0007] A probe, wherein a limit ring is fixedly connected to the outer wall of the probe, and a probe is provided at one end of the probe;

[0008] A switching mechanism, installed on one side of the probe, is used to fix the probe.

[0009] The switching mechanism includes a limiting frame, the outer wall of which is fixedly connected to the outer wall of the probe, a sliding plate slidably connected to the outer wall of the limiting frame, a connecting frame two fixedly connected to one side of the outer wall of the sliding plate, the outer wall of the connecting frame two slidably connected to the inside of the limiting frame, a spring two installed between one end of the connecting frame two and the limiting frame, a limiting frame fixedly connected to one end of the connecting frame two, two limiting rods one slidably connected to the inner wall of the limiting frame, a spring three provided between the two limiting rods one, and both limiting rods one rotatably connected to the inner wall of the limiting frame;

[0010] A lifting mechanism, installed on one side of the switching mechanism, is used to adjust the height;

[0011] A moving mechanism, installed on one side of the lifting mechanism, is used to adjust the detection position. The moving mechanism is connected to a support platform via a support column.

[0012] A fixing mechanism, installed inside the support platform, is used to adjust the position of the object being tested;

[0013] The adjustment mechanism, which is installed inside the support platform and the fixing mechanism on the same side, is used to fix the object being tested;

[0014] The feeding mechanism is installed on the upper surface of the support platform and is used to place the object to be tested.

[0015] Preferably, a fixing plate is fixedly connected to the outer wall of the probe, the outer wall of the fixing plate is slidably connected to the inside of the limiting frame, and the fixing plate is engaged with the limiting rod.

[0016] Preferably, the lifting mechanism includes a connecting frame, a connecting rod fixedly connected to the outer wall of the connecting frame, a motor fixedly connected to the outer wall of the connecting rod, a threaded rod fixedly connected to the output end of the motor, one end of the threaded rod rotatably connected to the inner wall of the connecting frame, a threaded sleeve threadedly connected to the outer wall of the threaded rod, a movable plate fixedly connected to the outer wall of the threaded sleeve, a clamping frame fixedly connected to the outer wall of the movable plate, a connecting block slidably connected inside the clamping frame, a clamping plate fixedly connected to one end of the connecting block, a spring provided between one side of the connecting block and the clamping frame, and a sensor fixedly connected to the lower surface of the connecting frame.

[0017] Preferably, the moving mechanism includes a support frame, on the upper surface of which two slide rails are symmetrically fixedly connected, and on the upper surface of each of the two slide rails are slidably connected sliders. A slide rail is fixedly connected to one side of the outer wall of the slider, and a slider is slidably connected to the upper surface of the slide rail. The outer wall of the slider is fixedly connected to the outer wall of the connecting frame.

[0018] Preferably, the fixing mechanism includes a second connecting block and an electric actuator. The outer wall of the second connecting block slides inside the support platform. Two second connecting rods are rotatably connected inside the second connecting block. The other ends of the two second connecting rods are rotatably connected to two first sliding frames. The outer wall of the first sliding frame is slidably connected inside the support platform. Two adjustment frames are fixedly connected to the upper surfaces of the two first sliding frames. The first electric actuator is fixedly connected inside the support platform. The output end of the first electric actuator is fixedly connected to the outer wall of the second connecting block.

[0019] Preferably, the inner walls of both adjustment frames are slidably connected to fixed rods, the fixed rods are provided with protective pads inside, and the outer walls of the adjustment frames are fixedly connected to adjustment rods.

[0020] Preferably, the adjustment mechanism includes a movable frame and an electric actuator. A connecting plate is fixedly connected to the lower surface of the movable frame, a sliding frame is slidably connected inside the movable frame, a fixed rod is fixedly connected to the outer wall of the sliding frame, the outer wall of the electric actuator is fixedly connected to the inside of the support platform, and the output end of the electric actuator is fixedly connected to the lower surface of the connecting plate.

[0021] Preferably, the feeding mechanism includes a support plate 1, the lower surface of which is more connected to the upper surface of the support platform. A sliding groove is formed inside the support plate 1. An electric push rod 3 is fixedly connected to the lower surface of the support plate 1. A limiting rod 2 is fixedly connected to the output end of the electric push rod 3. A sliding sleeve is slidably connected to the outer wall of the limiting rod 2. A connecting plate 2 is fixedly connected to the outer wall of the sliding sleeve. A picking rod is fixedly connected to the outer wall of the connecting plate 2. A sliding rod is fixedly connected to the outer wall of the picking rod. The outer wall of the sliding rod is slidably connected to the inner wall of the sliding groove.

[0022] Preferably, the outer wall of the material picking rod is slidably connected to a second support plate, and the lower surface of the second support plate is fixedly connected to the upper surface of the support platform.

[0023] Preferably, a detector is fixedly connected to the upper surface of the support platform, and a connector is provided on the upper surface of the detector. The connector is connected to the probe through a transmission line.

[0024] This invention provides a broadband microwave probe device for measuring carrier attenuation characteristics. It offers the following advantages:

[0025] 1. This invention moves the connecting frame two inside the limiting frame by pulling the sliding plate, and compresses the spring two. The movement of the connecting frame two causes the limiting frame to move, which pushes the limiting rod one, causing one end of the limiting rod one to rotate inside the limiting frame and compress the spring three, thereby removing the limiting rod one from the fixing plate. Then, pulling the probe causes the fixing plate to move and be removed from the limiting frame, thus achieving the effect of replacing the probe.

[0026] 2. This invention activates an electric actuator to push a connecting block 2, causing a sliding frame 1 to slide within a support platform. This causes an adjusting frame to move the fixed rod and the adjusting rod, thereby moving the object to be tested to the center position. The output end of the electric actuator 2 then moves the connecting plate 1, pulling the moving frame and causing the sliding frame 2 to move. The movement of the sliding frame 2 causes the fixed rod to slide inside the adjusting frame, thus bringing the protective pad on the fixed rod into contact with the object to be tested, achieving a fixing effect.

[0027] 3. In this invention, the electric push rod three pushes the limiting rod two and the sliding sleeve to move the connecting plate two, which in turn drives the picking rod to slide the sliding rod inside the sliding groove. This causes the picking rod to rise and move along the sliding groove. The electric push rod three then resets the limiting rod two and pulls the sliding sleeve and the connecting plate two to move, causing the picking rod to move the sliding rod along the sliding groove. This places the object to be tested onto the support plate one and the support plate two, achieving the effect of convenient material picking and unloading. Attached Figure Description

[0028] Figure 1 This is a perspective view of the present invention;

[0029] Figure 2 This is a side view of the present invention;

[0030] Figure 3 This is a schematic diagram of the connecting frame of the present invention;

[0031] Figure 4 This is a cross-sectional view of the movable plate of the present invention;

[0032] Figure 5 This is a cross-sectional view of the limiting frame of the present invention;

[0033] Figure 6 for Figure 5 Enlarged view of point A;

[0034] Figure 7 This is a schematic diagram of the support frame of the present invention;

[0035] Figure 8 This is an exploded view of the support plate of the present invention;

[0036] Figure 9 This is a cross-sectional view of the support platform of the present invention;

[0037] Figure 10 This is a cross-sectional view of the movable frame of the present invention.

[0038] The components include: 1. Support platform; 2. Detector; 3. Moving mechanism; 301. Support frame; 302. Slider 1; 303. Slide rail 1; 304. Slide rail 2; 305. Slider 2; 4. Probe; 5. Lifting mechanism; 501. Connecting frame 1; 502. Connecting rod 1; 503. Motor; 504. Clamping frame; 505. Moving plate; 506. Threaded sleeve; 507. Threaded rod; 508. Connecting block 1; 509. Clamping plate; 5010. Spring 1; 6. Switching mechanism; 601. Limiting frame; 602. Spring 2; 603. Sliding plate; 604. Spring 3; 605. Limiting rod 1; 606. Connecting frame 2; 607. Limiting frame; 7. Fixing mechanism; 701. 702. Connecting block 2; 703. Electric push rod 1; 704. Adjusting frame; 705. Fixed rod; 706. Adjusting rod; 707. Protective pad; 708. Sliding frame 1; 709. Connecting rod 2; 800. Adjusting mechanism; 801. Moving frame; 802. Connecting plate 1; 803. Electric push rod 2; 804. Sliding frame 2; 905. Feeding mechanism; 901. Support plate 1; 902. Sliding groove; 903. Sliding rod; 904. Support plate 2; 905. Picking rod; 906. Electric push rod 3; 907. Limiting rod 2; 908. Connecting plate 2; 909. Sliding sleeve; 10. Connecting head; 11. Limiting ring; 12. Sensor; 13. Probe; 14. Fixed plate; 15. Support column. Detailed Implementation

[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] Please see the appendix Figure 1 -Appendix Figure 10 This invention provides a broadband microwave probe device for measuring carrier attenuation characteristics, comprising:

[0041] The probe 4 has a limit ring 11 fixedly connected to its outer wall, and a probe 13 is provided at one end of the probe 4.

[0042] The switching mechanism 6 is installed on one side of the probe 4 and is used to fix the probe 13.

[0043] The switching mechanism 6 includes a limiting frame 601, the outer wall of which is fixedly connected to the outer wall of the probe 4. A sliding plate 603 is slidably connected to the outer wall of the limiting frame 601. A connecting frame 606 is fixedly connected to one side of the outer wall of the sliding plate 603. The outer wall of the connecting frame 606 is slidably connected to the inside of the limiting frame 601. A spring 602 is installed between one end of the connecting frame 606 and the limiting frame 601. A limiting frame 607 is fixedly connected to one end of the connecting frame 606. Two limiting rods 605 are slidably connected to the inner wall of the limiting frame 607. A spring 604 is provided between the two limiting rods 605. Both limiting rods 605 are rotatably connected to the inner wall of the limiting frame 601. A fixing plate 14 is fixedly connected to the outer wall of the probe 13. The outer wall of the fixing plate 14 is slidably connected to the inside of the limiting frame 601. The fixing plate 14 is engaged with the limiting rods 605.

[0044] Specifically, firstly, pulling the sliding plate 603 moves the connecting frame 606 inside the limiting frame 601, compressing the spring 602. The movement of the connecting frame 606 then moves the limiting frame 607, causing it to push the limiting rod 605. One end of the limiting rod 605 rotates inside the limiting frame 601, compressing the spring 604, thus removing the limiting rod 605 from the fixing plate 14. Next, pulling the probe 13 moves the fixing plate 14 out of the limiting frame 601, removing the probe 13 from the probe 4. Then, by releasing... Opening the sliding plate 603 causes the second spring 602 to push the second connecting frame 606 and the limiting frame 607 to move and reset, causing the third spring 604 to push the first limiting rod 605 to reset. By inserting the data cable of the probe 13 into the probe 4, the probe 13 is pushed to move the fixing plate 14, causing the fixing plate 14 to slide within the limiting frame 601 and press the first limiting rod 605 to move. Then, the first limiting rod 605 retracts into the limiting frame 601. When it moves to the opening position, the third spring 604 pushes the first limiting rod 605 to insert into the opening, thereby fixing the fixing plate 14.

[0045] The lifting mechanism 5 is installed on one side of the switching mechanism 6 and is used to adjust the height. The lifting mechanism 5 includes a connecting frame 501, a connecting rod 502 is fixedly connected to the outer wall of the connecting frame 501, a motor 503 is fixedly connected to the outer wall of the connecting rod 502, a threaded rod 507 is fixedly connected to the output end of the motor 503, one end of the threaded rod 507 is rotatably connected to the inner wall of the connecting frame 501, a threaded sleeve 506 is threadedly connected to the outer wall of the threaded rod 507, a moving plate 505 is fixedly connected to the outer wall of the threaded sleeve 506, a clamping frame 504 is fixedly connected to the outer wall of the moving plate 505, a connecting block 508 is slidably connected inside the clamping frame 504, a clamping plate 509 is fixedly connected to one end of the connecting block 508, a spring 5010 is provided between one side of the connecting block 508 and the clamping frame 504, and a sensor 12 is fixedly connected to the lower surface of the connecting frame 501.

[0046] Specifically, pulling the clamping plate 509 causes the connecting block 508 to move inside the clamping frame 504, compressing the spring 5010, and then pushing the probe 4 to move and place it between the two clamping plates 509. The spring 5010 pushes the connecting block 508 to move the clamping plate 509, locking it between the limiting rings 11 to fix the probe 4. The starting motor 503 causes the output end to drive the threaded rod 507 to rotate. The sensor 12 collects position information, and the threaded sleeve 506 drives the moving plate 505 to move through the thread on the threaded rod 507, causing the probe 4 and the probe 13 to move, so that the probe of the probe 13 contacts the object to be tested for detection.

[0047] The moving mechanism 3 is installed on one side of the lifting mechanism 5 and is used to adjust the detection position. The moving mechanism 3 is connected to the support platform 1 through the support column 15. The moving mechanism 3 includes a support frame 301. Two slide rails 303 are symmetrically fixedly connected to the upper surface of the support frame 301. Slider 302 is slidably connected to the upper surface of each slide rail 303. A slide rail 304 is fixedly connected to one side of the outer wall of slider 302. Slider 305 is slidably connected to the upper surface of slide rail 304. The outer wall of slider 305 is fixedly connected to the outer wall of the connecting frame 501.

[0048] Specifically, the support column 15 can support the support frame 301, the slider 302 slides on the slide rail 303 and drives the slide rail 304 to move, and the slider 305 drives the connecting frame 501 to move, so that the probe 4 and the probe 13 are moved to the position to be tested.

[0049] The fixing mechanism 7 is installed inside the support platform 1 and is used to adjust the position of the object being tested. The fixing mechanism 7 includes a second connecting block 701 and an electric push rod 702. The outer wall of the second connecting block 701 slides inside the support platform 1. Two second connecting rods 708 are rotatably connected inside the second connecting block 701. The other ends of the two second connecting rods 708 are rotatably connected to two first sliding frames 707. The outer wall of the first sliding frame 707 is slidably connected inside the support platform 1. Two adjustment frames 703 are fixedly connected to the upper surface of the two first sliding frames 707. The electric push rod 702 is fixedly connected inside the support platform 1. The output end of the electric push rod 702 is fixedly connected to the outer wall of the second connecting block 701. The inner walls of the two adjustment frames 703 are slidably connected to a fixing rod 704. A protective pad 706 is provided inside the fixing rod 704. An adjustment rod 705 is fixedly connected to the outer wall of the adjustment frame 703.

[0050] Specifically, by activating the electric actuator 702, the connecting block 701 is pushed to slide inside the support platform 1, thereby pulling the connecting rod 708 to move, causing one end to rotate inside the support plate 901 and the other end to rotate on the sliding frame 707. The movement of the connecting rod 708 causes the sliding frame 707 to slide inside the support platform 1, and causes the adjusting frame 703 to move the fixed rod 704 and the adjusting rod 705. The movement of the adjusting rod 705 pushes the object to be tested to move, so that the object to be tested is moved to the center position.

[0051] The adjustment mechanism 8 is installed inside the support platform 1 and the fixing mechanism 7 on the same side, and is used to fix the object to be tested. The adjustment mechanism 8 includes a movable frame 801 and an electric push rod 803. A connecting plate 802 is fixedly connected to the lower surface of the movable frame 801. A sliding frame 804 is slidably connected inside the movable frame 801. A fixing rod 704 is fixedly connected to the outer wall of the sliding frame 804. The outer wall of the electric push rod 803 is fixedly connected to the inside of the support platform 1. The output end of the electric push rod 803 is fixedly connected to the lower surface of the connecting plate 802.

[0052] Specifically, the fixed rod 704 drives the sliding frame 804 to slide on the moving frame 801. The output end of the electric push rod 803 drives the connecting plate 802 to move, and pulls the moving frame 801 to drive the sliding frame 804 to move. The movement of the sliding frame 804 drives the fixed rod 704 to slide inside the adjusting frame 703, so that the protective pad 706 on the fixed rod 704 comes into contact with the object being tested, achieving the effect of fixation.

[0053] The feeding mechanism 9 is installed on the upper surface of the support platform 1 and is used to place the object to be tested. The feeding mechanism 9 includes a support plate 901, the lower surface of which is more connected to the upper surface of the support platform 1. A sliding groove 902 is provided inside the support plate 901. An electric push rod 906 is fixedly connected to the lower surface of the support plate 901. A limit rod 907 is fixedly connected to the output end of the electric push rod 906. A sliding sleeve 909 is slidably connected to the outer wall of the limit rod 907. A connecting plate 908 is fixedly connected to the outer wall of the sliding sleeve 909. A picking rod 905 is fixedly connected to the outer wall of the connecting plate 908. A sliding rod 903 is fixedly connected to the outer wall of the picking rod 905. The outer wall of the sliding rod 903 is slidably connected to the inner wall of the sliding groove 902. A support plate 904 is slidably connected to the outer wall of the picking rod 905. The lower surface of the support plate 904 is fixedly connected to the upper surface of the support platform 1.

[0054] Specifically, the output end of the electric actuator 3 906 pushes the limiting rod 2 907 to move, and pushes the sliding sleeve 909 to move the connecting plate 2 908. The movement of the connecting plate 2 908 drives the picking rod 905 to move, causing the sliding rod 903 to slide inside the sliding groove 902. The picking rod 905 then lifts the connecting plate 2 908, and the sliding sleeve 909 slides on the limiting rod 2 907, thereby raising the picking rod 905 upward and moving it along the sliding groove 902. The object to be tested is placed on the picking rod 905. The activation of the electric actuator 3 906 resets the limiting rod 2 907 and pulls the sliding sleeve 909 and the connecting plate 2 908 to move, causing the picking rod 905 to drive the sliding rod 903 to move along the sliding groove 902, placing the object to be tested on the support plate 1 901 and the support plate 2 904.

[0055] A detector 2 is fixedly connected to the upper surface of the support platform 1. A connector 10 is provided on the upper surface of the detector 2. The connector 10 is connected to the probe 4 through a transmission line.

[0056] Specifically, connector 10 is inserted into the detector 2, and data is transmitted to the detector 2 via the transmission line and connector 10 for display.

[0057] Working principle: First, pulling the sliding plate 603 moves the connecting frame 606 inside the limiting frame 601, compressing the spring 602. The movement of the connecting frame 606 moves the limiting frame 607, pushing the limiting rod 605. One end of the limiting rod 605 rotates inside the limiting frame 601, compressing the spring 604, thus removing the limiting rod 605 from the fixing plate 14. Then, pulling the probe 13 moves the fixing plate 14 out of the limiting frame 601, removing the probe 13 from the probe 4. Releasing the sliding plate 603 causes the spring 602 to push the connecting frame 606 and the limiting frame 607 back to their original positions, and the spring 604 pushes the limiting rod 605 back to its original position. The probe 13's data cable is then inserted... Insert the probe 4 into the interior, then push the probe 13 to move the fixing plate 14, causing the fixing plate 14 to slide within the limiting frame 601 and press the limiting rod 605 to move. Then, the limiting rod 605 retracts into the limiting frame 601. When it moves to the opening position, the spring 604 pushes the limiting rod 605 to insert into the opening, thereby fixing the fixing plate 14. Pull the clamping plate 509 to move the connecting block 508 inside the clamping frame 504 and press the spring 5010. Push the probe 4 to move and place it between the two clamping plates 509. The spring 5010 pushes the connecting block 508 to move the clamping plate 509, locking it between the limiting rings 11 to fix the probe 4. Then, insert the connector 10 into the interior of the detector 2.

[0058] The output end of the electric actuator 3 906 pushes the limiting rod 2 907 to move, and pushes the sliding sleeve 909 to move the connecting plate 2 908. The movement of the connecting plate 2 908 drives the picking rod 905 to move, so that the sliding rod 903 slides inside the sliding groove 902. The picking rod 905 drives the connecting plate 2 908 to lift, and then drives the sliding sleeve 909 to slide on the limiting rod 2 907. This makes the picking rod 905 rise upward and move along the sliding groove 902, placing the object to be tested on the picking rod 905. The start of the electric actuator 3 906 resets the limiting rod 2 907 and pulls the sliding sleeve 909 and the connecting plate 2 908 to move, so that the picking rod 905 drives the sliding rod 903 to move along the sliding groove 902, placing the object to be tested on the support plate 1 901 and the support plate 2 904.

[0059] By activating the electric actuator 702, the connecting block 701 slides inside the support platform 1, thereby pulling the connecting rod 708 to move. One end of the connecting rod rotates inside the support plate 901, and the other end rotates on the sliding frame 707. The movement of the connecting rod 708 causes the sliding frame 707 to slide inside the support platform 1, and the adjusting frame 703 moves the fixed rod 704 and the adjusting rod 705. The fixed rod 704 then moves the sliding frame 804 on the moving frame 801. The movement of the adjusting rod 705 pushes the object to be tested to move to the center position of the support plate 901. The output end of the electric actuator 803 moves the connecting plate 802, and pulls the moving frame 801 to move the sliding frame 804. The movement of the sliding frame 804 causes the fixed rod 704 to slide inside the adjusting frame 703, so that the protective pad 706 on the fixed rod 704 comes into contact with the object to be tested, achieving a fixing effect.

[0060] Position information is collected by sensor 12 and slides on slide rail 303 via slider 302, which in turn moves slide rail 304. Simultaneously, slider 305 moves connecting frame 501, causing probe 4 and probe 13 to move to the position to be tested. Motor 503 is started to drive the output end to rotate threaded rod 507. The thread on threaded rod 507 causes threaded sleeve 506 to move moving plate 505, which in turn moves probe 4 and probe 13, so that the probe of probe 13 contacts the object to be tested for detection. The data is then transmitted to detector 2 via transmission line and connector 10 for display.

Claims

1. A broadband microwave probe device for measuring carrier attenuation characteristics, characterized in that, include; A probe (4) is fixedly connected to the outer wall of the probe (4) with a limit ring (11) and a probe (13) is provided at one end of the probe (4). The switching mechanism (6) is installed on one side of the probe (4) to fix the probe (13). The switching mechanism (6) includes a limiting frame (601), the outer wall of the limiting frame (601) is fixedly connected to the outer wall of the probe (4), a sliding plate (603) is slidably connected to the outer wall of the limiting frame (601), a connecting frame two (606) is fixedly connected to one side of the outer wall of the sliding plate (603), the outer wall of the connecting frame two (606) is slidably connected to the inside of the limiting frame (601), a spring two (602) is installed between one end of the connecting frame two (606) and the limiting frame (601), a limiting frame (607) is fixedly connected to one end of the connecting frame two (606), two limiting rods one (605) are slidably connected to the inner wall of the limiting frame (607), a spring three (604) is provided between the two limiting rods one (605), and both limiting rods one (605) are rotatably connected to the inner wall of the limiting frame (601); The outer wall of the probe (13) is fixedly connected to a fixing plate (14), the outer wall of the fixing plate (14) is slidably connected to the inside of the limiting frame (601), and the fixing plate (14) is engaged with the limiting rod (605); The lifting mechanism (5) is installed on one side of the switching mechanism (6) and is used to adjust the height; The moving mechanism (3) is installed on one side of the lifting mechanism (5) and is used to adjust the detection position. The moving mechanism (3) is connected to the support platform (1) through the support column (15). The fixing mechanism (7) is installed inside the support platform (1) and is used to adjust the position of the object being tested; The adjustment mechanism (8) is installed inside the support platform (1) and the fixing mechanism (7) on the same side, and is used to fix the object to be tested; The feeding mechanism (9) is installed on the upper surface of the support platform (1) and is used to place the object to be tested.

2. The broadband microwave probe device for measuring carrier attenuation characteristics according to claim 1, characterized in that, The lifting mechanism (5) includes a connecting frame (501), a connecting rod (502) is fixedly connected to the outer wall of the connecting frame (501), a motor (503) is fixedly connected to the outer wall of the connecting rod (502), a threaded rod (507) is fixedly connected to the output end of the motor (503), one end of the threaded rod (507) is rotatably connected to the inner wall of the connecting frame (501), and a threaded sleeve (506) is threadedly connected to the outer wall of the threaded rod (507). 06) has a movable plate (505) fixedly connected to its outer wall. A clamping frame (504) is fixedly connected to the outer wall of the movable plate (505). A connecting block (508) is slidably connected inside the clamping frame (504). A clamping plate (509) is fixedly connected to one end of the connecting block (508). A spring (5010) is provided between one side of the connecting block (508) and the clamping frame (504). A sensor (12) is fixedly connected to the lower surface of the connecting frame (501).

3. A broadband microwave probe device for measuring carrier attenuation characteristics according to claim 2, characterized in that, The moving mechanism (3) includes a support frame (301). Two slide rails (303) are symmetrically fixedly connected to the upper surface of the support frame (301). Slider 1 (302) is slidably connected to the upper surface of each of the two slide rails (303). Slide rail 2 (304) is fixedly connected to one side of the outer wall of slider 1 (302). Slider 2 (305) is slidably connected to the upper surface of slide rail 2 (304). The outer wall of slider 2 (305) is fixedly connected to the outer wall of connecting frame 1 (501).

4. A broadband microwave probe device for measuring carrier attenuation characteristics according to claim 1, characterized in that, The fixing mechanism (7) includes a second connecting block (701) and an electric push rod (702). The outer wall of the second connecting block (701) slides inside the support platform (1). The inner wall of the second connecting block (701) is rotatably connected to two second connecting rods (708). The other ends of the two second connecting rods (708) are rotatably connected to two first sliding frames (707). The outer wall of the first sliding frame (707) slides inside the support platform (1). The upper surfaces of the two first sliding frames (707) are fixedly connected to two adjustment frames (703). The first electric push rod (702) is fixedly connected inside the support platform (1). The output end of the first electric push rod (702) is fixedly connected to the outer wall of the second connecting block (701).

5. A broadband microwave probe device for measuring carrier attenuation characteristics according to claim 4, characterized in that, The inner walls of the two adjustment frames (703) are slidably connected with fixed rods (704), and the inside of the fixed rods (704) is provided with protective pads (706). The outer walls of the adjustment frames (703) are fixedly connected with adjustment rods (705).

6. A broadband microwave probe device for measuring carrier attenuation characteristics according to claim 5, characterized in that, The adjustment mechanism (8) includes a movable frame (801) and an electric push rod (803). A connecting plate (802) is fixedly connected to the lower surface of the movable frame (801). A sliding frame (804) is slidably connected inside the movable frame (801). A fixed rod (704) is fixedly connected to the outer wall of the sliding frame (804). The outer wall of the electric push rod (803) is fixedly connected to the inside of the support platform (1). The output end of the electric push rod (803) is fixedly connected to the lower surface of the connecting plate (802).

7. A broadband microwave probe device for measuring carrier attenuation characteristics according to claim 1, characterized in that, The feeding mechanism (9) includes a support plate (901), the lower surface of which is more connected to the upper surface of the support platform (1). A sliding groove (902) is provided inside the support plate (901). An electric push rod (906) is fixedly connected to the lower surface of the support plate (901). A limit rod (907) is fixedly connected to the output end of the electric push rod (906). A sliding sleeve (909) is slidably connected to the outer wall of the limit rod (907). A connecting plate (908) is fixedly connected to the outer wall of the sliding sleeve (909). A picking rod (905) is fixedly connected to the outer wall of the connecting plate (908). A sliding rod (903) is fixedly connected to the outer wall of the picking rod (905). The outer wall of the sliding rod (903) is slidably connected to the inner wall of the sliding groove (902).

8. A broadband microwave probe device for measuring carrier attenuation characteristics according to claim 7, characterized in that, The outer wall of the material taking rod (905) is slidably connected to a second support plate (904), and the lower surface of the second support plate (904) is fixedly connected to the upper surface of the support platform (1).

9. A broadband microwave probe device for measuring carrier attenuation characteristics according to claim 1, characterized in that, The upper surface of the support platform (1) is fixedly connected to a detector (2), and the upper surface of the detector (2) is provided with a connector (10), which is connected to the probe (4) via a transmission line.

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