Tantalum pentachloride powder recovery system and method for tantalum carbide coating furnace

Abstract

This invention relates to a tantalum pentachloride powder recovery system and method for tantalum carbide coating furnaces, belonging to the field of third-generation semiconductor material preparation and resource recovery. It solves the technical problem in existing tantalum carbide coating processes where tantalum pentachloride powder that does not participate in the tantalum carbide coating reaction is discharged with the process gas flow, leading to resource waste. The technical solution is as follows: The system includes a pre-filter for filtering process gases other than tantalum pentachloride gas; a condenser for condensing the tantalum pentachloride gas discharged from the pre-filter into solid tantalum pentachloride powder for recovery; the second inlet of the condenser is connected to the first outlet of the pre-filter; the second outlet of the condenser is connected to the first inlet of the pre-filter and the furnace exhaust port via a pneumatic valve group; and a vacuum pump is also connected to the second outlet of the condenser. This invention is applied to tantalum carbide coating processes.

Description

Technical Field

[0001] This invention relates to the field of third-generation semiconductor material preparation and resource recycling technology, specifically to a tantalum pentachloride powder recycling system and method for tantalum carbide coating furnaces. Background Technology

[0002] In the field of third-generation semiconductor manufacturing, tantalum carbide-coated graphite exhibits significant material advantages: compared to bare graphite or silicon carbide-coated graphite, it has superior chemical corrosion resistance and can operate stably at high temperatures up to 2600℃. This characteristic can effectively improve the precision of "temperature control" and "impurity control" in semiconductor single crystal growth and wafer etching processes, ultimately contributing to the preparation of high-quality silicon carbide wafers and related epitaxial wafers.

[0003] Currently, chemical vapor deposition (CVD) tantalum carbide coating is the mainstream technology for preparing tantalum carbide coatings. Its process principle is as follows: using tantalum pentachloride as the tantalum source and hydrocarbons as the carbon source, under specific process conditions, the two raw materials are first decomposed into tantalum and carbon elements respectively, and then a tantalum carbide coating is formed on the surface of the substrate through a chemical reaction.

[0004] It is important to note that tantalum pentachloride, as a core raw material, has specific physical properties and process challenges: First, tantalum pentachloride is a white crystalline powder at room temperature with a melting point of 221°C and a boiling point of 242°C. In the tantalum carbide coating process, it needs to be preheated and vaporized before being introduced into the tantalum carbide coating reaction chamber. Second, in order to maintain a constant gas pressure in the reaction chamber, vacuum evacuation is required during the process of introducing the reaction gas. This operation results in extremely low utilization of tantalum pentachloride in the tantalum carbide coating reaction, with a large amount of tantalum source being directly removed without forming a tantalum carbide coating on the substrate surface.

[0005] Because tantalum pentachloride powder is expensive, its low utilization rate in the tantalum carbide coating process leads to serious waste of raw materials. Therefore, developing a method for recovering tantalum pentachloride powder in tantalum carbide coating furnaces has important practical significance and economic value. Summary of the Invention

[0006] This invention addresses the technical problem in existing chemical vapor deposition (CVD) tantalum carbide coating processes where tantalum pentachloride powder that has not undergone the tantalum carbide coating reaction on the substrate surface is directly removed due to the vacuum pumping requirements of the reaction chamber, resulting in a waste of tantalum pentachloride raw materials. The invention proposes a tantalum pentachloride powder recovery system and method for tantalum carbide coating furnaces.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a tantalum pentachloride powder recovery system for tantalum carbide coating furnaces, comprising:

[0008] Pre-filter: Used to filter process gases other than tantalum pentachloride gas. Its first inlet is connected to the exhaust port of the furnace body. A heating device is also installed on the pre-filter, and a heating device is also installed on the vacuum pipeline between the pre-filter and the furnace body.

[0009] Condenser: Used to condense the tantalum pentachloride gas discharged from the pre-filter into solid tantalum pentachloride powder and recover it. The second inlet of the condenser is connected to the first outlet of the pre-filter. The second outlet of the condenser is connected to the first inlet of the pre-filter and the exhaust port of the furnace through a pneumatic valve group. The second outlet of the condenser is also connected to a vacuum pump.

[0010] The condenser includes a shell and a cooling device. The cooling device includes cooling water channels and a second temperature control module. The cooling water channels are arranged on the outer wall of the shell, and the second temperature control module is coupled to a second temperature measuring device located inside the shell.

[0011] The housing is detachably connected to a collection tray and several collection filters. The collection tray and the multiple collection filters together form a layered structure. A certain space is reserved between the collection tray and the adjacent collection filter, and a certain space is reserved between two adjacent collection filters. Tantalum pentachloride gas passes through the collection tray and the multiple collection filters in sequence. The collection tray and the multiple collection filters are used to collect solid tantalum pentachloride powder.

[0012] Each of the multiple collection filters has at least one air-blocking component connected to the side away from the second air outlet, and the air-blocking components on the multiple collection filters are arranged in an alternating manner.

[0013] Furthermore, the pre-filter includes a hollow tank, with a first air inlet and a first air outlet on the tank. A primary filter element is connected inside the tank, and a secondary filter element is nested inside the primary filter element. The secondary filter element is connected to the primary filter element by a fixing screw. The primary filter element, the secondary filter element, and the first air outlet are coaxially arranged.

[0014] Furthermore, the second air inlet and the second air outlet are provided on the housing, and the second air inlet and the second air outlet are coaxially arranged.

[0015] Furthermore, a first through hole is provided on the collection plate, and the first through hole is coaxially arranged with the second air inlet.

[0016] Furthermore, the air-blocking components on multiple collection filters are arranged in an alternating manner; the number of air-blocking components on two adjacent collection filters is one and two, respectively, and the air-blocking component of a collection filter connected to only one air-blocking component is located between the two air-blocking components of a collection filter connected to two air-blocking components.

[0017] Furthermore, for the collection filter screen connected to an air-blocking component, the geometric center axis of the air-blocking component is collinear with the axis of the second air inlet.

[0018] For a collection filter screen with two air-blocking components, the two air-blocking components are connected to the inner side wall of the housing in addition to the collection filter screen itself; and the space reserved between the two air-blocking components is smaller than the size of the air-blocking component connected at the center of the collection filter screen adjacent to the two air-blocking components.

[0019] Furthermore, the pneumatic valve assembly includes a first pneumatic valve, a second pneumatic valve, and a third pneumatic valve. The first air inlet of the pre-filter is connected to one end of the first pneumatic valve, and the other end of the first pneumatic valve is connected to a branch pipe of the first three-way pipe. The other two branches of the first three-way pipe are respectively connected to one end of the second pneumatic valve and one end of the third pneumatic valve. The end of the second pneumatic valve away from the first three-way pipe is connected to the exhaust port of the furnace body. The end of the third pneumatic valve away from the first three-way pipe is connected to a branch pipe of the second three-way valve. The other two branches of the second three-way valve are respectively connected to the second air outlet of the condenser collector and the vacuum pump. An electric speed regulating valve is also connected between the second three-way valve and the vacuum pump.

[0020] Furthermore, the heating device includes a heating belt and a first temperature control module. The heating belt is wrapped around the pre-filter and the vacuum pipeline between the pre-filter and the furnace body. The first temperature control module is coupled with a first temperature measuring device installed on the pre-filter to control the heating temperature of the heating belt, ensuring that the pre-filter and the vacuum pipeline between the pre-filter and the furnace body are in a constant temperature environment.

[0021] Furthermore, the temperature of the constant temperature environment is set at 300℃.

[0022] A method for recovering tantalum pentachloride powder used in tantalum carbide coating furnaces, wherein the recovery method uses the aforementioned tantalum pentachloride powder recovery system for tantalum carbide coating furnaces, and the recovery method includes the following steps:

[0023] Step 1: In the vacuuming stage before the tantalum carbide coating process, the process gas in the furnace is directly discharged through the vacuum pipeline by operating the corresponding valves in the pneumatic valve group to complete the vacuuming operation.

[0024] Step 2: When the vacuum level inside the furnace reaches the preset value and the process enters the tantalum carbide coating stage, the process gas discharged from the furnace is allowed to enter the pre-filter by operating the corresponding valve in the pneumatic valve group. After filtering out the process gas except for tantalum pentachloride gas in the pre-filter, the gas enters the condenser. Subsequently, the tantalum pentachloride gas is condensed in the condenser to form solid tantalum pentachloride powder, thus completing the collection of solid tantalum pentachloride powder.

[0025] The advantages of this invention over the prior art are as follows:

[0026] 1. The system of the present invention can condense and collect tantalum source gas that was not involved in the tantalum carbide coating process and was drawn away by the vacuum pump by the pre-filter between the furnace body and the condenser. It can also filter other solid reaction products in advance by the heating device, thus ensuring the purity of the recovered tantalum pentachloride.

[0027] 2. The system of the present invention extends the flow path of tantalum pentachloride gas in the condenser by using multiple collection filters that form a layered structure within the condenser, allowing the tantalum pentachloride gas to be fully condensed within the condenser, thereby increasing the collection amount of solid tantalum pentachloride powder and reducing the waste of tantalum pentachloride.

[0028] 3. The system of the present invention, through the cooperation of the cooling device of the condenser collector and multiple collection filters forming a layered structure, can improve the condensation rate of tantalum pentachloride gas entering the condenser collector and shorten the time for tantalum pentachloride gas to be converted into solid tantalum pentachloride powder. Attached Figure Description

[0029] The present invention will be further described below with reference to the accompanying drawings:

[0030] Figure 1 This is a schematic diagram of the system structure of the present invention;

[0031] Figure 2 This is a cross-sectional view of the pre-filter of the present invention;

[0032] Figure 3 This is a cross-sectional view of the condenser collector of the present invention;

[0033] Figure 4 This is a schematic diagram of the condenser collector of the present invention.

[0034] In the diagram: 1 is the furnace body, 2 is the vacuum pipeline, 3 is the heating belt, 4 is the pre-filter, 5 is the condenser collector, 6 is the vacuum pump, 7 is the electric speed control valve, 8 is the third pneumatic valve, 9 is the first pneumatic valve, 10 is the second pneumatic valve, 41 is the tank body, 42 is the primary filter element, 43 is the secondary filter element, 44 is the fixing screw, 45 is the first temperature measuring device, 46 is the first air inlet, 47 is the first air outlet, 51 is the second air inlet, 52 is the shell, 53 is the collection filter screen, 54 is the air baffle component, 56 is the second air outlet, 57 is the second temperature measuring device, 58 is the collection tray, and 59 is the cabinet door. Detailed Implementation

[0035] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate relative orientations or positional relationships and are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0036] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0037] like Figures 1 to 4 As shown, the present invention provides a tantalum pentachloride powder recovery system for tantalum carbide coating furnaces, comprising:

[0038] Pre-filter 4: Used to filter process gases other than tantalum pentachloride gas. Its first inlet 46 is connected to the exhaust port of the furnace body 1. A heating device and a first temperature measuring device 45 are also fixedly connected to the pre-filter 4. A heating device is also fixedly connected to the vacuum pipeline 2 between the pre-filter 4 and the furnace body 1.

[0039] Condenser 5: Used to condense the tantalum pentachloride gas discharged from the pre-filter 4 into solid tantalum pentachloride powder and recover it. The second inlet 51 of the condenser 5 is connected to the first outlet 47 of the pre-filter 4. The second outlet 56 of the condenser 5 is connected to the first inlet 46 of the pre-filter 4 and the exhaust port of the furnace body 1 through a pneumatic valve group. The second outlet 56 of the condenser 5 is also connected to a vacuum pump 6.

[0040] The heating device includes a heating belt 3 and a first temperature control module. The heating belt 3 is wrapped around the pre-filter 4 and the vacuum pipeline 2 between the pre-filter 4 and the furnace body 1. The first temperature control module is coupled to a first temperature measuring device 45 to control the heating temperature of the heating belt 3, ensuring that the pre-filter 4 and the vacuum pipeline 2 between the pre-filter 4 and the furnace body 1 are in a constant temperature environment. In this embodiment, the constant temperature environment is set to about 300°C. The function of this constant temperature control is to both filter out reaction products such as tantalum carbide crystals and elemental tantalum in the gas discharged from the furnace body 1 and keep tantalum pentachloride in a gaseous state. This is because the melting and boiling points of reaction products such as tantalum carbide crystals and elemental tantalum in the gas discharged from the furnace body 1 are much higher than 300°C, while tantalum pentachloride is still in a gaseous state at around 300°C and can pass through the pre-filter 4 and enter the condenser collector 5 under the action of the vacuum pump 6. In this embodiment, the first temperature measuring device 45 is a thermocouple, which is inserted into the tank 41. Regarding the temperature setting of the above constant temperature environment, those skilled in the art can make appropriate adjustments according to the actual construction environment and specific needs. The core premise of the adjustment is that the pre-filter 4 must be able to effectively filter other impurity gases except for tantalum pentachloride gas, while ensuring that tantalum pentachloride gas can smoothly enter the condenser collector 5.

[0041] The pre-filter 4 includes a hollow tank 41, with a first air inlet 46 and a first air outlet 47 located on the tank 41. When the pre-filter 4 is placed horizontally (e.g. Figure 2 As shown, the first air inlet 46 is located on the left side wall of the tank 41, and the first air outlet 47 is located on the upper side wall of the tank 41, with the first air outlet 47 located away from the first air inlet 46. A support structure is also fixedly connected to the bottom of the tank 41 to support the pre-filter 4.

[0042] A primary filter element 42 is fixedly connected inside the tank body 41. A secondary filter element 43 is nested inside the primary filter element 42. The secondary filter element 43 is fixedly connected to the primary filter element 42 via a fixing screw 44. The primary filter element 42, the secondary filter element 43, and the first air outlet 47 are coaxially arranged. In this embodiment, the mesh size of the primary filter element 42 is 300 mesh, and the mesh size of the secondary filter element 43 is 800 mesh. Those skilled in the art can make adaptive adjustments to the mesh sizes of the primary filter element 42 and the secondary filter element 43 according to actual needs.

[0043] The condenser collector 5 includes a housing 52 and a cooling device. The housing 52 has a hollow structure. The cooling device includes cooling water channels and a second temperature control module. The cooling water channels are arranged on the outer wall of the housing 52. The second temperature control module is coupled to a second temperature measuring device 57 fixedly installed inside the housing 52 to control the temperature of the cooling water in the cooling water channels. This increases the condensation rate of tantalum pentachloride gas entering the condenser collector 5 and shortens the time it takes for the tantalum pentachloride gas to convert into solid tantalum pentachloride powder. The second temperature measuring device 57 is a thermocouple.

[0044] The second air inlet 51 and the second air outlet 56 are provided on the housing 52. The second air inlet 51 and the second air outlet 56 are coaxially arranged. The second air outlet 56 is connected to the pneumatic valve group and the vacuum pump 6. A collection tray 58 and several collection filters 53 are detachably connected inside the housing 52. The collection tray 58 and the multiple collection filters 53 together form a layered structure. Tantalum pentachloride gas can pass through the collection tray 58 and the multiple collection filters 53 in sequence. The specific positional relationship is as follows: the collection tray 58 is arranged between the second air inlet 51 and the collection filters 53, and a certain space is reserved between the collection tray 58 and the adjacent collection filter 53. A certain space is also reserved between two adjacent collection filters 53. The collection tray 58 and the multiple collection filters 53 are used to collect solid tantalum pentachloride powder.

[0045] In this embodiment, the collection tray 58 and the collection filter 53 are inserted into slots opened on the inner side wall of the housing 52 for easy installation and removal. After opening the cabinet door 59 hinged to the housing 52, the collection tray 58 and the collection filter 53 can be installed and removed.

[0046] A first through hole is provided on the collection tray 58. The first through hole is coaxially arranged with the second air inlet 51 to facilitate the introduction of tantalum pentachloride gas into the housing 52 of the condenser collector 5. In this embodiment, the diameter of the first through hole and the second air inlet 51 are the same.

[0047] The diameter of the vent holes on the collecting filter 53 is such that it can ensure the smooth passage of tantalum pentachloride gas while effectively intercepting solid tantalum pentachloride powder. In this embodiment, the mesh size of the collecting filter 53 is 800 mesh.

[0048] Each of the multiple collection filters 53 has at least one air-blocking component 54 fixedly connected to the side away from the second air outlet 56. The air-blocking components 54 on the multiple collection filters 53 are arranged in an alternating manner, which can disperse the airflow and improve the heat exchange of the airflow, thereby extending the flow path of tantalum pentachloride gas in the housing 52, allowing the tantalum pentachloride gas to fully condense in the housing 52, and ultimately increasing the collection amount of solid tantalum pentachloride powder and reducing the waste of tantalum pentachloride.

[0049] The air-blocking components 54 on the multiple collection filters 53 are arranged in an alternating manner. Specifically, in two adjacent collection filters 53, the number of air-blocking components 54 on the side away from the second air outlet 56 is one and two, respectively. Among them, the air-blocking component 54 of a collection filter 53 that is fixedly connected to only one air-blocking component 54 is located between the two air-blocking components 54 of the collection filter 53 that is fixedly connected to two air-blocking components 54.

[0050] In one embodiment, for a collection filter 53 with one air-blocking component 54 fixedly connected, the geometric center axis of the air-blocking component 54 is collinear with the axis of the second air inlet 51. For a collection filter 53 with two air-blocking components 54 fixedly connected, in addition to being fixedly connected to the collection filter 53, the two air-blocking components 54 are also fixedly connected to the inner sidewall of the housing 52, and the space reserved between the two air-blocking components 54 is smaller than the size of the air-blocking component 54 fixedly connected at the center of the collection filter 53 adjacent to the collection filter 53 with the two air-blocking components 54 (the collection filter 53 with only one air-blocking component 54 fixedly connected).

[0051] In one embodiment, four layers of collecting filters 53 are detachably connected inside the housing 52. The number of air-blocking components 54 on each layer of collecting filters 53 is distributed as follows: one air-blocking component 54 is fixedly connected to the collecting filter 53 near the collecting tray 58 (i.e., near the second air inlet 51), and two air-blocking components 54 are fixedly connected to the collecting filter 53 near the second air outlet 56. Specifically, from the second air inlet 51 side to the second air outlet 56 side, the number of air-blocking components 54 provided on the multiple layers of collecting filters 53 is one, two, one, and two, respectively. The air-blocking component 54 is an air baffle.

[0052] The solid tantalum pentachloride powder generated inside the housing 52 adheres to the lower surface of the collecting filter 53, or falls onto the upper surface of the air-blocking component 54, or falls onto the bottom collecting tray 58. The solid tantalum pentachloride powder collection operation is completed by removing the collecting filter 53 and the collecting tray 58.

[0053] It should be noted that, because the temperature of the second air inlet 51 is higher than the temperature inside the casing 52, the condensation effect is poor when tantalum pentachloride gas passes through the collection filter 53 adjacent to the second air inlet 51 and its fixedly connected baffle component 54. Therefore, the amount of solid tantalum pentachloride powder generated on the baffle component 54 is relatively small. Thus, the waste caused by this portion of solid tantalum pentachloride powder falling from the second air inlet 51 is within the acceptable range of normal consumption.

[0054] The pneumatic valve assembly includes a first pneumatic valve 9, a second pneumatic valve 10, and a third pneumatic valve 8. The first air inlet 46 of the pre-filter 4 is fixedly connected to one end of the first pneumatic valve 9. The other end of the first pneumatic valve 9 is fixedly connected to a branch pipe of the first three-way pipe. The other two branches of the first three-way pipe are fixedly connected to one end of the second pneumatic valve 10 and one end of the third pneumatic valve 8, respectively. The end of the second pneumatic valve 10 away from the first three-way pipe is connected to the exhaust port of the furnace body 1. The end of the third pneumatic valve 8 away from the first three-way pipe is fixedly connected to a branch pipe of the second three-way valve. The other two branches of the second three-way valve are connected to the second air outlet 56 of the condenser collector 5 and the vacuum pump 6, respectively. An electric speed regulating valve 7 is also fixedly connected between the second three-way valve and the vacuum pump 6. By controlling the opening of the electric speed regulating valve 7, the rate at which the gas to be discharged is extracted from the furnace body 1 can be adjusted in real time, so as to keep the extraction rate of the system of the present invention consistent with the intake rate of the process gas entering the furnace body 1, thereby maintaining the constant pressure state in the furnace body 1 and ultimately ensuring the quality of the tantalum carbide coating.

[0055] The vacuum pipeline 2 between the pre-filter 4 and the furnace body 1 includes a connecting pipe, a first tee pipe, a first pneumatic valve 9, and a second pneumatic valve 10. The heating belt 3 is wrapped around the pre-filter 4 and is fixedly connected to the first pneumatic valve 9 and the second pneumatic valve 10 on the connecting pipe and the first tee pipe connecting the pre-filter 4 and the furnace body 1.

[0056] The present invention provides a method for recovering tantalum pentachloride powder used in tantalum carbide coating furnaces. The recovery method utilizes the aforementioned tantalum pentachloride powder recovery system for tantalum carbide coating furnaces, and includes the following steps:

[0057] Step 1: In the vacuuming stage before the tantalum carbide coating process, open the second pneumatic valve 10, the third pneumatic valve 8, and the electric speed control valve 7, while closing the first pneumatic valve 9 to complete the vacuuming operation. This allows the vacuuming stage before the tantalum carbide coating process to bypass the pre-filter 4 and the condenser collector 5, thereby quickly reaching the preset vacuum level in the furnace body 1, greatly shortening the vacuuming operation cycle, and thus greatly shortening the cycle of the tantalum carbide coating process.

[0058] Step 2: When the vacuum level inside furnace 1 reaches the preset value and the tantalum carbide coating process begins, open the first pneumatic valve 9, the second pneumatic valve 10, and the electric speed control valve 7, while simultaneously closing the third pneumatic valve 8. This allows the gas discharged from furnace 1 to enter the pre-filter 4. After filtering out all gases except tantalum pentachloride gas in the pre-filter 4, the gas enters the condenser collector 5. Subsequently, the tantalum pentachloride gas is condensed in the condenser collector 5 to form solid tantalum pentachloride powder, completing the collection of solid tantalum pentachloride powder. By allowing the gas discharged from furnace 1 to first enter the pre-filter 4, other impurities besides tantalum pentachloride gas can be filtered out in advance, greatly improving the purity of the recovered solid tantalum pentachloride powder.

[0059] Regarding the specific structure of this invention, it should be noted that the connection relationships between the various component modules used in this invention are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this invention without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this invention, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0060] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A tantalum pentachloride powder recovery system for tantalum carbide coating furnaces, characterized in that: include: Pre-filter (4): Used to filter process gases other than tantalum pentachloride gas. Its first inlet (46) is connected to the exhaust port of the furnace body (1). A heating device is also provided on the pre-filter (4), and a heating device is also provided on the vacuum pipeline (2) between the pre-filter (4) and the furnace body (1). Condenser (5): Used to condense the tantalum pentachloride gas discharged from the pre-filter (4) into solid tantalum pentachloride powder and recover it. The second inlet (51) of the condenser (5) is connected to the first outlet (47) of the pre-filter (4). The second outlet (56) of the condenser (5) is connected to the first inlet (46) of the pre-filter (4) and the exhaust port of the furnace body (1) through a pneumatic valve group. The second outlet (56) of the condenser (5) is also connected to a vacuum pump (6). The condenser (5) includes a housing (52) and a cooling device. The cooling device includes a cooling water channel and a second temperature control module. The cooling water channel is arranged on the outer wall of the housing (52). The second temperature control module is coupled to a second temperature measuring device (57) installed inside the housing (52). The housing (52) is detachably connected to a collection plate (58) and several collection filters (53). The collection plate (58) and the multiple collection filters (53) together form a layered structure. A certain space is reserved between the collection plate (58) and the adjacent collection filters (53). A certain space is reserved between two adjacent collection filters (53). Tantalum pentachloride gas passes through the collection plate (58) and the multiple collection filters (53) in sequence. The collection plate (58) and the multiple collection filters (53) are used to collect solid tantalum pentachloride powder. Each of the multiple collection filters (53) has at least one air-blocking component (54) connected to the side away from the second air outlet (56), and the air-blocking components (54) on the multiple collection filters (53) are arranged in an alternating manner.

2. The tantalum pentachloride powder recovery system for tantalum carbide coating furnaces according to claim 1, characterized in that: The pre-filter (4) includes a hollow tank (41), a first air inlet (46) and a first air outlet (47) on the tank (41), a primary filter element (42) is connected inside the tank (41), a secondary filter element (43) is nested inside the primary filter element (42), the secondary filter element (43) is connected to the primary filter element (42) by a fixing screw (44), and the primary filter element (42), the secondary filter element (43) and the first air outlet (47) are coaxially arranged.

3. The tantalum pentachloride powder recovery system for tantalum carbide coating furnaces according to claim 1, characterized in that: The second air inlet (51) and the second air outlet (56) are provided on the housing (52), and the second air inlet (51) and the second air outlet (56) are coaxially arranged.

4. The tantalum pentachloride powder recovery system for tantalum carbide coating furnaces according to claim 1, characterized in that: The collection tray (58) has a first through hole, which is coaxially arranged with the second air inlet (51).

5. The tantalum pentachloride powder recovery system for tantalum carbide coating furnaces according to claim 1, characterized in that: Multiple air-blocking components (54) on the collection filter (53) are arranged in an alternating manner; the number of air-blocking components (54) on two adjacent collection filters (53) is one and two respectively, and the air-blocking component (54) of the collection filter (53) with only one air-blocking component (54) is located between the two air-blocking components (54) of the collection filter (53) with two air-blocking components (54).

6. The tantalum pentachloride powder recovery system for tantalum carbide coating furnaces according to claim 1, characterized in that: For a collection filter (53) connected with an air baffle (54), the geometric center axis of the air baffle (54) is collinear with the axis of the second air inlet (51); For a collection filter (53) with two air-blocking components (54) connected to it, the two air-blocking components (54) are connected to the inner wall of the housing (52) in addition to being connected to the collection filter (53); and the space reserved between the two air-blocking components (54) is smaller than the size of the air-blocking component (54) connected at the center of the collection filter (53) adjacent to the collection filter (53) where the two air-blocking components (54) are located.

7. The tantalum pentachloride powder recovery system for tantalum carbide coating furnaces according to claim 1, characterized in that: The pneumatic valve group includes a first pneumatic valve (9), a second pneumatic valve (10), and a third pneumatic valve (8). The first air inlet (46) of the pre-filter (4) is connected to one end of the first pneumatic valve (9). The other end of the first pneumatic valve (9) is connected to a branch of the first three-way pipe. The other two branches of the first three-way pipe are respectively connected to one end of the second pneumatic valve (10) and one end of the third pneumatic valve (8). The end of the second pneumatic valve (10) away from the first three-way pipe is connected to the exhaust port of the furnace body (1). The end of the third pneumatic valve (8) away from the first three-way pipe is connected to a branch of the second three-way valve. The other two branches of the second three-way valve are respectively connected to the second air outlet (56) of the condenser (5) and the vacuum pump (6). An electric speed regulating valve (7) is also connected between the second three-way valve and the vacuum pump (6).

8. The tantalum pentachloride powder recovery system for tantalum carbide coating furnaces according to claim 1, characterized in that: The heating device includes a heating belt (3) and a first temperature control module. The heating belt (3) is wrapped around the pre-filter (4) and the vacuum pipeline (2) between the pre-filter (4) and the furnace body (1). The first temperature control module is coupled with a first temperature measuring device (45) set on the pre-filter (4) to control the heating temperature of the heating belt (3) and ensure that the pre-filter (4) and the vacuum pipeline (2) between the pre-filter (4) and the furnace body (1) are in a constant temperature environment.

9. The tantalum pentachloride powder recovery system for tantalum carbide coating furnaces according to claim 8, characterized in that: The temperature of the constant temperature environment is set to 300℃.

10. A method for recovering tantalum pentachloride powder used in tantalum carbide coating furnaces, characterized in that, The recycling method uses the tantalum pentachloride powder recycling system for tantalum carbide coating furnaces according to any one of claims 1-9, and the recycling method includes the following steps: Step 1: In the vacuuming operation stage before the tantalum carbide coating process, the process gas in the furnace body (1) is directly discharged through the vacuum pipeline (2) by operating the corresponding valve in the pneumatic valve group to complete the vacuuming operation. Step 2: When the vacuum level inside the furnace body (1) reaches the preset value and enters the tantalum carbide coating process stage, the process gas discharged from the furnace body (1) is allowed to enter the pre-filter (4) by operating the corresponding valve in the pneumatic valve group. After filtering out the process gas except for tantalum pentachloride gas in the pre-filter (4), the gas enters the condenser (5). Subsequently, the tantalum pentachloride gas is condensed in the condenser (5) to form solid tantalum pentachloride powder, thus completing the collection of solid tantalum pentachloride powder.

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