Vacuum heating source and vacuum coating equipment

Abstract

The invention relates to the technical field of vacuum coating, in particular to a vacuum heating source and vacuum coating equipment, which comprises a heating chamber, a control device, a conductive electrode and coils, the heating chamber is internally provided with an accommodating cavity, the top of the heating chamber is provided with an output port, the output port is used for a stock bin, and the coils are arranged below the output port at intervals along the vertical direction; the control device is connected with the lowermost coil, the coils are connected through electrical connecting wires, and the conductive electrode is arranged on the inner wall of the heating chamber and extends towards the uppermost coil; the control device is used for controlling induction boosting of the coils, so that the uppermost coil and the conductive electrode generate electric arcs, the stock bin located at the output port is heated, through electromagnetic induction heating, rapid temperature rising is achieved, energy loss is reduced, open fire is not generated in the heating chamber, and the problems that in the prior art, a vacuum heating source is low in temperature rising efficiency, high in heat loss and poor in heating effect are solved. The technical problem that the vacuum evaporation effect is poor due to the abrasion and pollution risks is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, in particular to a vacuum heating source and a vacuum coating device. BACKGROUND

[0002] Thin film deposition refers to a process of depositing one or more layers of thin film (thickness usually from nanometer to micrometer) on the surface of a substrate (such as silicon wafer, glass, metal, etc.). These thin films can endow materials with new electrical, optical, mechanical or chemical properties, and are widely used in semiconductor, display, photovoltaic, optical devices, corrosion-resistant coatings and other fields. Among them, vacuum evaporation coating, referred to as vacuum evaporation, is a method of heating and evaporating the raw material to be formed into a thin film in a vacuum chamber, so that its atoms or molecules are separated from the surface and overflow to form a vapor flow, which is incident on the surface of a thin film photovoltaic cell to form an ITO thin film or other solid thin film.

[0003] In existing evaporation equipment, resistance power supply is usually used as the heating source of the vacuum evaporation source, so as to realize the heating of the container to be heated, and the temperature and rate of evaporation are adjusted by controlling the voltage and current of the resistance wire power supply.

[0004] However, the existing vacuum heating source has low heating efficiency, high heat loss, and the risk of wear and pollution, resulting in poor vacuum evaporation effect. SUMMARY

[0005] The purpose of the present application is to provide a vacuum heating source and a vacuum coating device to solve the technical problem of low heating efficiency, high heat loss, wear and pollution risk of the existing vacuum heating source, and poor vacuum evaporation effect.

[0006] In a first aspect, the present application provides a vacuum heating source based on electromagnetic induction heating technology, comprising a heating chamber, a control device, a conductive electrode and a coil: The heating chamber is provided with a containing cavity, the top of the heating chamber is provided with an output port communicating with the containing cavity, the output port is used to install a material bin carrying the material to be heated, at least two coils are arranged in the vertical direction and spaced apart in sequence below the output port, the control device is connected with the lowermost coil, the coils are connected by an electrical connection line, the conductive electrode is arranged on the inner wall of the heating chamber and extends towards the uppermost coil.

[0007] Further, the vacuum heating source further comprises a flow guide plate, the flow guide plate is arranged below the output port, the flow guide plate is arranged in the vertical direction, and the bottom end of the flow guide plate is connected with the uppermost coil.

[0008] Further, the conductive electrodes are provided in plurality, and the conductive electrodes are uniformly arranged around the flow guide plate.

[0009] Further, the vacuum heating source further comprises an atmosphere pipeline, which is arranged on the side wall of the heating chamber and extends into the accommodating cavity, and is capable of conveying atmosphere gas into the accommodating cavity.

[0010] Further, the control device comprises a control panel and a self-locking switch, two ends of the self-locking switch are connected with the control panel and the lowermost coil respectively.

[0011] In the second aspect, the present application further provides a vacuum coating device, which comprises a coating chamber, the hopper and the above-mentioned vacuum heating source. The coating chamber is provided with a coating cavity, the vacuum heating source is arranged in the coating cavity, the top of the coating cavity is provided with a coating platform, the bottom of the coating platform is used for mounting a piece to be coated, and the hopper is arranged at the output port of the vacuum heating source.

[0012] Further, the vacuum coating device comprises a plurality of vacuum heating sources, and the vacuum heating sources are uniformly and spacedly arranged at the bottom of the coating chamber.

[0013] Further, the vacuum coating device further comprises a baffle, which is movably arranged above the hopper to selectively shield the hopper.

[0014] Further, the vacuum coating device further comprises a driving component, the coating platform is rotationally arranged on the top wall of the coating chamber in the horizontal direction, and the driving component is in transmission connection with the coating platform to drive the coating platform to rotate.

[0015] Compared with the prior art, the vacuum heating source based on the electromagnetic induction heating technology provided by the application comprises a heating chamber, a control device, a conductive electrode and a coil, the heating chamber is internally provided with a containing cavity, the top of the heating chamber is provided with an output port in communication with the containing cavity, the output port is used for mounting a bin for carrying material to be heated, at least two coils are sequentially and spacedly arranged in the vertical direction below the output port, the control device is connected with the lowermost coil, the coils are connected through electric connecting lines, the conductive electrode is arranged on the inner wall of the heating chamber and extends towards the uppermost coil; the coil is controlled to be inducted to be boosted by the control device, so that the uppermost coil and the conductive electrode generate an electric arc, thereby heating the bin at the output port, the electromagnetic induction heating is used to quickly raise the temperature and reduce the energy loss, and no open flame is generated in the heating chamber, thereby solving the technical problems of the prior art, such as low heating efficiency, high heat loss, risk of wear and pollution, and poor vacuum evaporation effect of the vacuum heating source, and the vacuum heating source has high adaptability and flexibility and can be widely applied to various types of heating evaporation containers. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the specific embodiments of the application or the technical solutions in the prior art, the drawings needed to be used in the specific embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0017] Figure 1 The structure schematic diagram of the vacuum heating source provided by the embodiment of the application is shown in the figure. Figure 2 The structure schematic diagram of the vacuum coating equipment provided by the embodiment of the application is shown in the figure.

[0018] Reference signs: 10, vacuum heating source; 100, heating chamber; 110, containing cavity; 120, output port; 200, control device; 210, control panel; 220, self-locking switch; 230, cooling device; 300, conductive electrode; 400, coil; 500, flow guide plate; 600, atmosphere pipeline; 20, coating chamber; 201, coating cavity; 202, coating platform; 30, bin; 40, baffle; 50, driving component. Specific embodiments

[0019] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0021] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0022] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0023] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0024] In the description of the present application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "arrangement", "installation", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0025] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0026] Example 1 like Figure 1 As shown, this embodiment of the invention provides a vacuum heating source 10 based on electromagnetic induction heating technology, including a heating chamber 100, a control device 200, a conductive electrode 300, and a coil 400. The heating chamber 100 is provided with a receiving cavity 110, and the top of the heating chamber 100 is provided with an output port 120 communicating with the receiving cavity 110. The output port 120 is used to install a hopper 30 that carries the material to be heated. At least two coils 400 are arranged vertically at intervals below the output port 120. The control device 200 is connected to the lowermost coil 400. The coils 400 are connected to each other by an electrical connection line. The conductive electrode 300 is disposed on the inner wall of the heating chamber 100 and extends toward the uppermost coil 400.

[0027] That is, the vacuum heating source 10 provided in this embodiment of the invention controls the coil 400 to induce voltage rise through the control device 200, so that the uppermost coil 400 and the conductive electrode 300 generate an electric arc, thereby heating the hopper 30 located at the output port 120. Through electromagnetic induction heating, the temperature rises rapidly, reducing energy loss, and no open flame is generated in the heating chamber 100. It solves the technical problems of low heating efficiency, high heat loss, wear and pollution risks, and poor vacuum evaporation effect of the vacuum heating source 10 in the prior art. It has extremely high adaptability and flexibility and can be widely used in various types of heating evaporation containers.

[0028] Specifically, the heating chamber 100 can be configured as a square box with a hollow cavity 110 inside and a circular hole at the top serving as an output port 120. In this embodiment, the hopper 30 is specifically configured as a circular crucible and positioned at the output port 120. The control device 200 contains a circuit board, specifically a PC board with circuitry, which is connected to the lowermost coil 400 via wires. In this embodiment, two coils 400 are provided. In other embodiments of this application, multiple coils can be provided and arranged sequentially in a vertical direction. The circuit board receives external low-voltage DC, generates a high-frequency current through an oscillation circuit, and supplies it to the lowermost coil 400. Both coils 400 are wound on a magnetic core, with the uppermost coil 400 serving as the secondary coil 400. Electromagnetic induction generates a high voltage, which breaks down the gap with the conductive electrode 300 to produce a high-temperature arc. The conductive electrode 300 is fixed to the inner wall of the heating chamber 100 and faces the coil 400; its material is tungsten or other high-temperature resistant metal.

[0029] Furthermore, the vacuum heating source 10 also includes a guide plate 500, which is disposed below the output port 120. The guide plate 500 is arranged in a vertical direction, and the bottom end of the guide plate 500 is connected to the uppermost coil 400.

[0030] Specifically, the guide plate 500 is configured as a metal cylinder, which can be made of tungsten or other high-temperature resistant metal materials. The guide plate 500 is fixed vertically to the uppermost coil 400 and connected to the coil 400. In this embodiment, the metal electrode is positioned close to the guide plate 500. The guide plate 500 replaces the coil 400 in generating a high-temperature arc, thereby ensuring that the coil 400 itself generates virtually no heat, has a long lifespan, requires no inspection, and has no maintenance or replacement costs.

[0031] Preferably, multiple conductive electrodes 300 are provided, and several conductive electrodes 300 are evenly arranged around the guide plate 500.

[0032] Specifically, in this embodiment, eight conductive electrodes 300 are evenly arranged around the guide plate 500. An installation groove is provided on the inner wall of the heating chamber 100, and the conductive electrodes 300 are inserted into the installation groove, tilted upwards. By arranging multiple conductive electrodes 300 around the guide plate 500, the high-temperature electric arc can be arranged in an arc shape around the guide plate 500, thereby uniformly heating the silo 30 and ensuring the effective evaporation of the material.

[0033] Furthermore, the vacuum heating source 10 also includes an atmosphere pipeline 600, which is disposed on the side wall of the heating chamber 100 and extends into the receiving cavity 110. The atmosphere pipeline 600 is capable of supplying atmosphere gas into the receiving cavity 110.

[0034] Specifically, the atmosphere conduit 600 is configured as a vent pipe, fixed to the side wall of the heating chamber 100, and extends into the receiving cavity 110. The other end of the atmosphere conduit 600 is connected to a gas source or a vacuum pumping assembly. By setting up the atmosphere conduit 600, the heating chamber 100 can be evacuated, and atmospheric gas can be supplied to the receiving space. An inert gas atmosphere is used to protect the surface of the object to be coated from the corrosion and oxidation of contaminants such as oxygen, water vapor, and nitrogen in the air, ensuring the quality and effect of the coating. At the same time, the high voltage generated by electromagnetic induction can be used to excite the gas in the heating chamber 100 to generate plasma, thereby improving the vapor deposition effect.

[0035] Furthermore, the control device 200 includes a control board 210 and a self-locking switch 220, with the two ends of the self-locking switch 220 connected to the control board 210 and the bottommost coil 400, respectively.

[0036] Specifically, the two ends of the self-locking switch 220 are connected to the control board 210 and the lowermost coil 400, respectively. In this embodiment, a mechanical self-locking switch 220 is selected to provide safety isolation, status locking, and system protection. In this embodiment, the heating chamber 100 also includes a cooling device 230, which is located at the bottom of the control device 200 and connected to it. The cooling device 230 faces the coil 400. The cooling device 230 can be a water-cooled pipe or a fan to cool the control board 210.

[0037] Example 2 like Figure 2 As shown, the inventors also provide a vacuum coating apparatus, including a coating chamber 20, a material hopper 30, and the aforementioned vacuum heating source 10; a coating cavity 201 is provided inside the coating chamber 20, the vacuum heating source 10 is disposed inside the coating cavity 201, a coating platform 202 is provided at the top of the coating cavity 201, the bottom of the coating platform 202 is used to install the part to be coated, and the material hopper 30 is disposed at the output port 120 of the vacuum heating source 10.

[0038] Specifically, the coating chamber 20 is configured as a sealed box with a hollow coating cavity 201. A vacuum heating source 10 is located at the bottom of the coating cavity 201, and a coating platform 202 is located at the top of the coating cavity 201, on which the workpiece to be coated is fixed. In this embodiment, the coating platform 202 can be a circular flat plate, and the workpiece to be coated can be the substrate to be vapor-deposited. A material hopper 30 is located at the output port 120 of the vacuum heating source 10. The electric arc of the vacuum heating source 10 heats the material in the hopper 30 to the required temperature, evaporating it onto the workpiece fixed on the coating platform 202, thus completing the vapor deposition process. The electric arc of the vacuum heating source 10 can also clean the surface inside the coating cavity 201 or adjust the atmosphere composition inside the coating cavity 201.

[0039] Furthermore, the vacuum coating equipment includes multiple vacuum heating sources 10, which are evenly spaced at the bottom of the coating chamber 20.

[0040] Specifically, multiple vacuum heating sources 10 are evenly spaced at the bottom of the coating chamber 20, thereby heating different material bins 30 respectively to form linear or annular vapor deposition sources to meet different vapor deposition requirements and to uniformly vapor deposit different models and sizes of parts to be vapor deposited.

[0041] Furthermore, the vacuum evaporation equipment also includes a baffle 40, which is movably disposed above the hopper 30 to selectively shield the hopper 30.

[0042] Specifically, the baffle 40 can be a metal plate driven by a push rod or telescopic mechanism, moving horizontally. The baffle 40 is positioned on one side above the hopper 30 and moves towards or away from the hopper 30, thereby selectively shielding the hopper 30. When it is necessary to stop the vapor deposition process, the baffle 40 can be used to shield the hopper 30 and isolate the material.

[0043] Furthermore, the vacuum coating equipment also includes a drive component 50. The coating platform 202 is rotatably mounted on the top wall of the coating chamber 20 in the horizontal direction. The drive component 50 is connected to the coating platform 202 in a transmission connection to drive the coating platform 202 to rotate.

[0044] Specifically, the driving component 50 is configured as a drive shaft, a drive motor, and a transmission gear set. The coating platform 202 is rotatably mounted on the top wall of the coating chamber 20 in a horizontal direction. The drive shaft passes vertically through the top wall of the coating chamber 20, with its bottom end connected to the coating platform 202 and its top end connected to the transmission gear set. The drive motor is connected to the transmission gear set, thereby driving the drive shaft to rotate, thus realizing the rotation of the coating platform 202. During vapor deposition, driving the coating platform 202 to rotate via the driving component 50 can further improve the uniformity of the vapor deposition.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum heating source, characterized in that, Includes a heating chamber, control unit, conductive electrodes, and coils: The heating chamber is provided with a receiving cavity, and the top of the heating chamber is provided with an output port communicating with the receiving cavity. The output port is used to install a hopper that carries the material to be heated. At least two coils are arranged vertically at intervals below the output port. The control device is connected to the lowermost coil. The coils are connected to each other by an electrical connection line. The conductive electrode is provided on the inner wall of the heating chamber and extends toward the uppermost coil.

2. The vacuum heating source according to claim 1, characterized in that, The vacuum heating source also includes a guide plate, which is disposed below the output port and is arranged vertically. The bottom end of the guide plate is connected to the uppermost coil.

3. The vacuum heating source according to claim 2, characterized in that, The conductive electrodes are provided in multiple ways, and several of the conductive electrodes are evenly arranged around the guide plate.

4. The vacuum heating source according to claim 2, characterized in that, The vacuum heating source also includes an atmosphere pipeline, which is disposed on the side wall of the heating chamber and extends into the receiving cavity. The atmosphere pipeline is capable of supplying atmospheric gas into the receiving cavity.

5. The vacuum heating source according to any one of claims 1-4, characterized in that, The control device includes a control board and a self-locking switch, with the two ends of the self-locking switch connected to the control board and the bottommost coil, respectively.

6. A vacuum coating apparatus, characterized in that, Includes a coating chamber, the material hopper, and a vacuum heating source as described in any one of claims 1-5; The coating chamber is provided with a coating cavity, the vacuum heating source is provided in the coating cavity, the top of the coating cavity is provided with a coating platform, the bottom of the coating platform is used to install the part to be coated, and the material hopper is provided at the output port of the vacuum heating source.

7. The vacuum coating equipment according to claim 6, characterized in that, The vacuum coating equipment includes a plurality of vacuum heating sources, which are evenly spaced at the bottom of the coating chamber.

8. The vacuum coating equipment according to claim 6, characterized in that, The vacuum coating equipment also includes a baffle plate, which is movably disposed above the hopper to selectively shield the hopper.

9. The vacuum coating equipment according to claim 6, characterized in that, The vacuum coating equipment also includes a driving component. The coating platform is rotatably mounted on the top wall of the coating chamber in a horizontal direction. The driving component is connected to the coating platform in a transmission manner to drive the coating platform to rotate.

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