Silane liquid filling and transporting device and filling method thereof

Abstract

The invention discloses a silane liquid filling and transporting device and a filling method thereof. The device comprises a silane storage tank, a main transporting pipe, a return pipe, a filling pipe, a tank car, a nitrogen replacement pipeline and a condensing system. The method comprises the following steps: (1) connecting pipelines; (2) replacing gas impurities; (3) replacing nitrogen; and (4) filling silane liquid. The filling method disclosed by the invention has the advantages that the operation is simple, the implementation is easy, the filling efficiency of the silane liquid is improved, and the production cost is reduced; the risk is reduced, the silane waste amount is reduced, the cold insulation effect is good, the condensation system is arranged on the tank car, it can be guaranteed that silane in a tank body of the tank car is in a liquid state all the time, and the gasification overpressure phenomenon is avoided; the pressure of the silane in the tank body of the transportation tank car is kept in a low-pressure state all the time, compared with high-pressure gaseous silane transportation, the safety is better, the single-time transportation amount can reach 21-23 tons, the liquid transportation amount is far larger than the gas transportation amount, and the transportation cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silane liquid transportation, in particular to a silane liquid filling and transportation device and a filling method thereof. BACKGROUND

[0002] Silane gas as a gas source providing silicon component can be used to manufacture high-purity polysilicon, monocrystalline silicon, silicon-carbon negative electrode and other materials, and is widely used in integrated circuit, biological medicine, photovoltaic, display panel, semiconductor, microelectronic, optoelectronic and other industries. Because of its high purity and fine control, it has become a special gas that cannot be replaced in the above industries. With the continuous development of chemical industry, the downstream industry of gas industry is rich, and the demand for silane gas is increasing year by year.

[0003] Silane gas is a colorless, highly active and compressible gas at room temperature and atmospheric pressure, but the unique self-ignition and explosiveness of silane gas leads to silane gas belonging to high-risk gas, and there is a great safety risk in the transportation process. The existing filling and transportation technology is to fill silane gas into steel cylinders or cluster vehicles for transportation, and gaseous silane is transported, which has high transportation cost, small transportation capacity and high risk of high pressure of transportation container. Among them, patent No. 201711310529.3 discloses a filling system suitable for high-purity chlorosilane and a charging and discharging method thereof. The filling system realizes the charging and discharging and purging replacement of high-purity chlorosilane by parallel communication of the conventional nitrogen pipeline system and the tail gas pipeline system, parallel communication of the first high-purity nitrogen pipeline system and the tail gas pipeline system, parallel communication of the second high-purity nitrogen pipeline system and the unloading pipeline system, and parallel communication of the loading pipeline system, the tail gas pipeline system and the unloading pipeline system. The problems of material pollution, environmental pollution and equipment corrosion in the process of high-purity material filling and unloading are solved, and the technical effects of protecting the filling system equipment and preventing material pollution and environmental pollution are achieved. The charging and discharging efficiency of the filling system is improved by setting the PLC control system. Patent No. 202120992722.5 discloses a filling system for accurately controlling the mixing and nitrogen concentration ratio of silane, which comprises a nitrogen storage tank, a nitrogen conveying pipeline, a silane storage tank, a silane conveying pipeline, a filling cylinder and a filling pipeline. The filling pipeline is in communication with the filling cylinder, one end of the filling pipeline is detachably connected with the filling cylinder, the nitrogen conveying pipeline is in communication with the nitrogen storage tank and the filling pipeline, the silane conveying pipeline is in communication with the silane storage tank and the filling pipeline, a conveying pump, a filter and a precision filter are installed on the nitrogen conveying pipeline and the silane conveying pipeline, a first flow meter and a first valve are arranged on the nitrogen conveying pipeline, a second flow meter and a second valve are arranged on the silane conveying pipeline, and a third flow meter and a third valve are arranged on the filling pipeline. The technical contents disclosed in the above patents are all gaseous filling, which has the following problems: 1. The single filling capacity is small, the transportation cost is high, the filling efficiency is low, and the production efficiency is affected; 2. The filling needs to use a compressor for pressurization, and the filling pressure is as high as 13-15 MPa. The risk of leakage increases under high pressure, and once the leakage occurs, it may cause fire and explosion, which poses a serious threat to the safety of personnel life and property; 3. The whole filling system to the transportation system needs to involve high-precision compressors, vacuum pump systems, helium detection instruments, nitrogen replacement systems, precision control systems, waste gas emission and recovery systems, steel cylinders and torpedo vehicles, and the equipment structure is complex, and the operation and maintenance cost is high.

[0004] However, although the single filling amount of the silane liquid is increased, the transportation cost is low when the silane liquid is transported; however, the silane liquid has the characteristics of high flammability and explosiveness, which makes the safety and efficiency in the filling, storage and transportation process become the technical problems to be solved in the industry; in view of this, the present application discloses a silane liquid filling and transportation device and a filling method thereof, so as to improve the filling efficiency and ensure the operation safety. SUMMARY

[0005] The purpose of the present application is to provide a silane liquid filling and transportation device with simple connection structure, better safety and reduced production cost.

[0006] The second purpose of the present application is to provide a silane liquid filling method with reduced transportation cost, reduced danger and reduced silane waste.

[0007] The present application is implemented by the following technical solutions: the first purpose of the present application provides a silane liquid filling and transportation device, which comprises a silane storage tank, a transportation main pipe, a reflux pipe, a filling pipe, a tank car, a nitrogen replacement pipeline and a condensing system; the liquid outlet of the silane storage tank is communicated with the liquid inlet end of the transportation main pipe, the liquid outlet end of the transportation main pipe is communicated with the liquid inlet end of the reflux pipe and the filling pipe respectively, the liquid outlet end of the reflux pipe is communicated with the inlet of the silane storage tank, the liquid outlet end of the filling pipe is communicated with the liquid inlet of the tank body of the tank car, a liquid pump, a regulating valve, a first pressure sensor and the nitrogen replacement pipeline are sequentially arranged on the transportation main pipe along the silane flow direction, the gas outlet end of the nitrogen replacement pipeline is communicated with the transportation main pipe, and a gas valve is arranged on the nitrogen replacement pipeline;

[0008] A first shut-off valve, a nitrogen purity detector, a gas discharge pipe and a second shut-off valve are sequentially arranged on the reflux pipe along the gas flow direction, the gas inlet end of the gas discharge pipe is communicated with the reflux pipe, and a first discharge valve is arranged on the gas discharge pipe;

[0009] A silane detector and a filling valve are sequentially arranged on the filling pipe;

[0010] The condensing system is arranged on the top of the tank car, the gas outlet of the tank body is communicated with the heat medium inlet of the silane cooler of the condensing system, and the heat medium outlet of the silane cooler of the condensing system is communicated with the liquid inlet of the tank body;

[0011] The signal output ends of the first pressure sensor, the nitrogen purity detector and the silane detector are connected with the signal input end of the controller through signal connection, and the signal output end of the controller is connected with the signal input ends of the liquid pump, the regulating valve, the gas valve, the first shut-off valve, the second shut-off valve, the first discharge valve and the filling valve through signal connection.

[0012] Further, it also includes a second pressure sensor and a second exhaust valve; a condenser is arranged on the top of the silane storage tank, the second pressure sensor is arranged on the silane storage tank, and the second exhaust valve is arranged on the gas outlet of the condenser; the signal output end of the second pressure sensor is connected with the signal input end of the controller through signal connection, and the signal output end of the controller is connected with the signal input end of the second exhaust valve through signal connection.

[0013] Further, the condensing system includes a silane cooler, a compressor, an air cooler and a freon storage tank; the cold medium outlet of the silane cooler is communicated with the gas inlet of the compressor, the gas outlet of the compressor is communicated with the gas inlet of the air cooler, the liquid outlet of the air cooler is communicated with the liquid inlet of the freon storage tank, and the liquid outlet of the freon storage tank is communicated with the cold medium inlet of the silane cooler.

[0014] Further, a throttle valve group is arranged on the connecting pipeline between the freon storage tank and the silane cooler.

[0015] Further, the tank body includes an outer tank and an inner tank, the outer tank is sleeved and fixed outside the inner tank, perlite is filled between the inner tank and the outer tank, and the outer tank and the inner tank are vacuumized.

[0016] The purpose of the patent is to provide a method for filling silane liquid, which includes the following steps:

[0017] (1) connecting the pipeline: after the component analysis of the tank body of the tank truck is qualified, the liquid outlet end of the filling pipe is sealed and connected to the liquid inlet of the tank body of the tank truck;

[0018] (2) replacing gas impurities: the controller controls the opening of the gas valve, the first shut-off valve and the first exhaust valve, and nitrogen is introduced into the transport main pipe, the filling pipe and the return pipe for nitrogen replacement, so that the air, moisture and other impurities in the pipeline are discharged from the gas exhaust pipe; the nitrogen purity detector detects the nitrogen purity in the return pipe at all times and transmits the signal to the controller, and when the nitrogen purity reaches 99% or above, the controller controls the closing of the gas valve and the first exhaust valve;

[0019] (3) replacing nitrogen: the controller controls the opening of the regulating valve and the second shut-off valve, and uses silane to replace the nitrogen in the transport main pipe, the filling pipe and the return pipe; the silane detector detects the silane concentration in the filling pipe at all times and transmits the signal to the controller, and when the silane concentration reaches 99.9999% or above, the controller controls the closing of the first shut-off valve and the second shut-off valve;

[0020] (4) Filling silane liquid: the controller controls the filling valve to open, and controls the liquid pump to start, and silane liquid is filled into the tank of the tank truck until the silane liquid in the tank of the tank truck reaches the required filling amount, then the controller controls the filling valve and the regulating valve to close, and the liquid pump is stopped, and the first cut-off valve and the second cut-off valve are controlled to close.

[0021] Further, in step (3), the controller controls the regulating valve to open to 30% in 5 minutes, and to fully open at 10 minutes, and the opening process is slow to prevent sudden opening, which cannot control the silane flow and causes impact on the pipeline and the valve, and the valve sealing performance is reduced, and there is a risk of silane leakage.

[0022] Further, step (3) further includes the following steps: the mixed gas of the replaced silane and nitrogen enters the condenser to be condensed, and the condensed silane liquid falls into the silane storage tank; the second pressure sensor detects the pressure in the silane storage tank at any time and transmits the signal to the controller, when the detected pressure in the silane storage tank is more than 80% of the design pressure, the controller controls the second discharge valve to open to discharge the uncondensed nitrogen in an emergency; when the detected pressure in the silane storage tank is less than 80% of the design pressure, the controller controls the second discharge valve to close.

[0023] Further, step (4) further includes the following steps: the first pressure sensor detects the pressure in the transportation main pipe at any time and transmits the signal to the controller, and the controller controls the opening degree of the regulating valve to keep the pressure in the transportation main pipe at 1.0-1.2 MPa.

[0024] Further, step (4) further includes the following steps: the condensing system above the tank truck is started at the same time, that is, the compressor, the air cooler and the throttle valve group are opened; the freon gas is compressed by the compressor, cooled into freon liquid by the air cooler, enters the freon storage tank, and then is reduced in pressure and cooled to-48 to-52 DEG C by the throttle valve group, and then exchanges heat with the gasified silane in the tank body to liquefy the silane, and the pressure in the tank body is kept at not higher than 0.7 MPa; in the subsequent transportation process of the tank truck, the condensing system is always kept open.

[0025] Advantages of the application:

[0026] 1. The filling method disclosed by the application is simple to operate and easy to realize, improves the filling efficiency of the silane liquid, and reduces the production cost; after the filling is completed, the pipeline is directly communicated with the silane storage tank for pressure keeping, without the need to discharge all the silane in the pipeline; compared with gaseous filling, replacement and leakage detection are performed each time, the danger is reduced, and the waste amount of silane is reduced.

[0027] 2、The tank car of the application discloses a double-layer vacuum cooling of the tank body, and the condensing system is arranged on the tank car, so that the silane in the tank body of the tank car is always in liquid state and the overpressure phenomenon caused by gasification does not occur, thereby ensuring that the silane pressure in the tank body of the tank car is always maintained in a low-pressure state, and the safety is better compared with the high-pressure gaseous silane transportation.

[0028] 3、The tank car disclosed by the application can transport 21-23 tons of liquid at a time, and the liquid transportation capacity is far greater than the gas transportation capacity, so that the transportation cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only constitute some embodiments of the application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0030] Fig. 1 It is a schematic diagram of the overall structure of the application.

[0031] Fig. 2 It is a schematic diagram of the structure of the tank body of the tank car.

[0032] Silane storage tank 1, transportation main pipe 2, reflux pipe 3, filling pipe 4, tank car 5, tank body 51, outer tank 511, inner tank 512, perlite 513, nitrogen replacement pipeline 6, condensing system 7, silane cooler 71, compressor 72, air cooler 73, freon storage tank 74, throttle valve group 75, second pressure sensor 8, second discharge valve 9, liquid pump 10, regulating valve 11, first pressure sensor 12, gas valve 13, first cut-off valve 14, nitrogen purity detector 15, gas discharge pipe 16, second cut-off valve 17, first discharge valve 18, silane detector 19, filling valve 20, condenser 21, controller 22. DETAILED DESCRIPTION

[0033] Embodiment one: as Figs. 1-2As shown, a silane liquid filling transportation device includes a silane storage tank 1, a transportation main pipe 2, a backflow pipe 3, a filling pipe 4, a tank car 5, a nitrogen replacement pipeline 6, a condensing system 7, a second pressure sensor 8 and a second discharge valve 9; the liquid outlet of the silane storage tank 1 is communicated with the liquid inlet end of the transportation main pipe 2, the liquid outlet end of the transportation main pipe 2 is communicated with the liquid inlet end of the backflow pipe 3 and the filling pipe 4 respectively, the liquid outlet end of the backflow pipe 3 is communicated with the inlet of the silane storage tank 1, the liquid outlet end of the filling pipe 4 is communicated with the liquid inlet of the tank body 51 of the tank car 5, the liquid pump 10, the adjusting valve 11, the first pressure sensor 12 and the nitrogen replacement pipeline 6 are sequentially arranged on the transportation main pipe 2 along the silane flow direction, the liquid pump 10 is selected to be a magnetic pump, which is driven by the magnetic coupling principle to ensure no leakage and excellent sealing, and the pump body material is required to be corrosion resistant.

[0034] The gas outlet end of the nitrogen replacement pipeline 6 is communicated with the transportation main pipe 2, and the gas valve 13 is arranged on the nitrogen replacement pipeline 6; the first cut-off valve 14, the nitrogen purity detector 15, the gas discharge pipe 16 and the second cut-off valve 17 are sequentially arranged on the backflow pipe 3 according to the gas flow direction, the gas inlet end of the gas discharge pipe 16 is communicated with the backflow pipe 3, and the first discharge valve 18 is arranged on the gas discharge pipe 16; the silane detector 19 and the filling valve 20 are sequentially arranged on the filling pipe 4; the condensing system 7 is arranged on the top of the tank car 5, the gas outlet of the tank body 51 is communicated with the heat medium inlet of the silane cooler 71 of the condensing system 7, the heat medium outlet of the silane cooler 71 of the condensing system 7 is communicated with the liquid inlet of the tank body 51, which can ensure that the silane in the tank body 51 of the tank car 5 is always in a liquid state and will not appear gasification overpressure phenomenon; further ensure that the silane pressure in the tank body 51 of the transportation tank car 5 is always maintained in a low pressure state, which is safer than high pressure gaseous silane transportation; the condenser 21 is communicated and arranged on the top of the silane storage tank 1, the second pressure sensor 8 is arranged on the silane storage tank 1, and the second discharge valve 9 is arranged on the gas outlet of the condenser 21.

[0035] The condensing system 7 includes the silane cooler 71, the compressor 72, the air cooler 73 and the freon storage tank 74; the cold medium outlet of the silane cooler 71 is communicated with the gas inlet of the compressor 72, the gas outlet of the compressor 72 is communicated with the gas inlet of the air cooler 73, the liquid outlet of the air cooler 73 is communicated with the liquid inlet of the freon storage tank 74, and the liquid outlet of the freon storage tank 74 is communicated with the cold medium inlet of the silane cooler 71; the throttling valve group 75 is arranged on the connecting pipeline between the freon storage tank 74 and the silane cooler 71.

[0036] The tank body 51 comprises an outer tank 511 and an inner tank 512, the outer tank 511 is fixedly sleeved outside the inner tank 512, the material of the inner tank 512 is S31603, the material of the outer tank 511 is Q345R, perlite 513 is filled between the inner tank 512 and the outer tank 511, and the outer tank 511 and the inner tank 512 are vacuumized, and the cold insulation effect is good.

[0037] The signal output ends of the first pressure sensor 12, the second pressure sensor 8, the nitrogen purity detector 15 and the silane detector 19 are connected with the signal input end of the controller 22 through signals, and the signal output end of the controller 22 is connected with the signal input ends of the liquid pump 10, the regulating valve 11, the gas valve 13, the first cut-off valve 14, the second cut-off valve 17, the first discharge valve 18, the second discharge valve 9 and the filling valve 20 through signals.

[0038] The pipelines of the device are all made of 316L stainless steel pipes, the level is EP level, the corrosion resistance is very high, the device can be used under harsh conditions, and the filling is clean; all the valves of the device are made of imported pneumatic diaphragm valves, the material is 316L, and the level is EP level.

[0039] The cost of the filling equipment in the filling and transportation device is about 4-7 million yuan, the tank car 5 is about 0.5 million yuan, and the condensing system 7 is about 1.5-2 million yuan.

[0040] The price of the existing silane gas filling equipment is between 20-45 million yuan, and the price of the torpedo car pipe bundle is about 0.95 million yuan. Obviously, the cost of the silane liquid filling and transportation device is cheaper.

[0041] Embodiment 2: a method for filling silane liquid, comprising the following steps:

[0042] (1) connecting pipelines: after the composition analysis of the tank body 51 of the tank car 5 is qualified (that is, nitrogen content: <0.05 PPM; oxygen content: <0.05 PPM; borane content: <0.2 PPM; phosphine content: <0.2 PPM), the liquid outlet of the filling pipe 4 is sealed and connected to the liquid inlet of the tank body 51 of the tank car 5.

[0043] (2) replacing gas impurities: the controller 22 controls the gas valve 13, the first cut-off valve 14 and the first discharge valve 18 to be opened, nitrogen gas is introduced into the transportation main pipe 2, the filling pipe 4 and the reflux pipe 3 for nitrogen replacement, and the air, moisture and other impurities in the pipelines are discharged from the gas discharge pipe 16; the nitrogen purity detector 15 detects the nitrogen purity in the reflux pipe 3 at all times and transmits the signal to the controller 22, when the nitrogen purity reaches more than 99%, the controller 22 controls the gas valve 13 and the first discharge valve 18 to be closed.

[0044] (3) Replace nitrogen: the controller 22 controls the regulating valve 5 to open to 30% within 5 minutes, and to open fully at 10 minutes, the opening process should be slow to prevent sudden opening, which can not control the flow of silane, cause impact on the pipeline and valve, and reduce the sealing of the valve over time, which can cause leakage of silane; and control the second cut-off valve 17 to open, and use silane to replace the nitrogen in the transport main pipe 2, filling pipe 4 and return pipe 3; the silane detector 19 detects the silane concentration in the filling pipe 4 at all times and transmits the signal to the controller 22, when the silane concentration reaches 99.9999% or above, the controller 22 controls the first cut-off valve 14 and the second cut-off valve 17 to close; the mixed gas of the replaced silane and nitrogen enters the condenser 21 to be condensed, and the condensed silane liquid falls into the silane storage tank 1; the second pressure sensor 8 detects the pressure in the silane storage tank 1 at all times and transmits the signal to the controller 22, when the detected pressure in the silane storage tank 1 reaches 80% or above of the design pressure, the controller 22 controls the second discharge valve 9 to open to discharge the uncondensed nitrogen; when the detected pressure in the silane storage tank 1 is lower than 80% of the design pressure, the controller 22 controls the second discharge valve 9 to close.

[0045] (4) Fill silane liquid: the controller 22 controls the filling valve 20 to open, and controls the liquid pump 10 to start to fill the silane liquid into the tank body 51 of the tank car 5, until the silane liquid in the tank body 51 of the tank car 5 reaches the required amount, then control the filling valve 20 and the regulating valve 11 to close, and stop the liquid pump 10, at the same time, control the first cut-off valve 14 and the second cut-off valve 17 to close, keep the return pipe 3 always connected with the silane storage tank 1 to prevent overpressure caused by the gasification of the low-temperature silane liquid in the transport main pipe 2, filling pipe 4 and return pipe 3; the first pressure sensor 12 detects the pressure in the transport main pipe 2 at all times and transmits the signal to the controller 22, and the controller 22 controls the opening degree of the regulating valve 11 to keep the pressure in the transport main pipe 2 at 1.0-1.2 MPa.

[0046] At the same time, start the condensing system 7 above the tank car 5, i.e. open the compressor 72, air cooler 73 and throttle valve group 75; the freon gas is compressed by the compressor 72, cooled by the air cooler 73 into freon liquid to enter the freon storage tank 74, then the freon liquid is reduced in pressure and temperature to -48 to -52℃ by the throttle valve group 75, then enters the silane cooler 71 to exchange heat with the gasified silane in the tank body 51 of the tank car 5 to liquefy the silane, and keep the pressure in the tank body 51 at no higher than 0.7 MPa; in the subsequent transportation process of the tank car 5, the condensing system 7 is always kept open to maintain the stable pressure in the tank body 51 of the tank car 5.

[0047] The maximum filling amount of the silane gas transportation is 4.2 tons / car silane, the silane liquid transportation can be filled with 21-23 tons / car, the silane liquid transportation amount is more than 5 times of the silane gas transportation amount, according to the transportation cost of 5-10 yuan / km, the transportation distance of 1000 km, the transportation cost of the silane gas is 25-50 thousand yuan for transporting the same quality silane, and the transportation cost of the silane liquid is 0.5-1 thousand yuan; the transportation cost of the silane is greatly reduced.

[0048] The above is only a preferred embodiment of the present application, and is not used to limit the present application, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A silane liquid filling and transport device, characterized in that, It includes a silane storage tank, a transport main, a return pipe, a filling pipe, a tank truck, a nitrogen purging pipeline, and a condensation system; the outlet of the silane storage tank is connected to the inlet of the transport main, the outlet of the transport main is connected to the inlets of the return pipe and the filling pipe, the outlet of the return pipe is connected to the inlet of the silane storage tank, and the outlet of the filling pipe is connected to the inlet of the tank truck. A liquid pump, a regulating valve, a first pressure sensor, and the nitrogen purging pipeline are sequentially arranged along the silane flow direction on the transport main. The outlet of the nitrogen purging pipeline is connected to the transport main, and a gas valve is installed on the nitrogen purging pipeline. A first shut-off valve, a nitrogen purity detector, a gas discharge pipe, and a second shut-off valve are sequentially arranged on the return pipe according to the airflow direction. The inlet end of the gas discharge pipe is connected to the return pipe, and a first discharge valve is provided on the gas discharge pipe. A silane detector and a filling valve are sequentially installed on the filling tube; The condensation system is installed on the top of the tanker. The air outlet of the tank body is connected to the heat medium inlet of the silane cooler of the condensation system, and the heat medium outlet of the silane cooler of the condensation system is connected to the liquid inlet of the tank body. The signal output terminals of the first pressure sensor, the nitrogen purity detector, and the silane detector are all connected to the signal input terminal of the controller via signal connections. The signal output terminal of the controller is connected to the signal input terminals of the liquid pump, the regulating valve, the gas valve, the first shut-off valve, the second shut-off valve, the first discharge valve, and the filling valve via signal connections.

2. The silane liquid filling and transportation device according to claim 1, characterized in that, It also includes a second pressure sensor and a second discharge valve; a condenser is connected to the top of the silane storage tank, the second pressure sensor is installed on the silane storage tank, and a second discharge valve is installed at the outlet of the condenser; the signal output terminal of the second pressure sensor is connected to the signal input terminal of the controller, and the signal output terminal of the controller is connected to the signal input terminal of the second discharge valve.

3. The silane liquid filling and transportation device according to claim 1, characterized in that, The condensation system includes a silane cooler, a compressor, an air cooler, and a Freon storage tank; the cold medium outlet of the silane cooler is connected to the air inlet of the compressor, the air outlet of the compressor is connected to the air inlet of the air cooler, the liquid outlet of the air cooler is connected to the liquid inlet of the Freon storage tank, and the liquid outlet of the Freon storage tank is connected to the cold medium inlet of the silane cooler.

4. A silane liquid filling and transport device according to claim 3, characterized in that, A throttling valve assembly is installed on the connecting pipe between the Freon storage tank and the silane cooler.

5. A silane liquid filling and transport device according to claim 1, characterized in that, The tank body includes an outer tank and an inner tank. The outer tank is fixedly fitted onto the outside of the inner tank. Perlite is filled between the inner tank and the outer tank, and a vacuum is drawn between the outer tank and the inner tank.

6. A method for filling silane liquid using the filling and transport device according to any one of claims 1-5, characterized in that, It includes the following steps: (1) Connect the pipeline: After the composition analysis of the tanker is qualified, seal the outlet end of the filling pipe to the inlet of the tanker. (2) Replacement of gas impurities: The controller controls the gas valve, the first shut-off valve and the first discharge valve to open, and nitrogen is introduced into the transport main pipe, filling pipe and return pipe for nitrogen replacement, and the air, moisture and other impurities in the pipeline are discharged from the gas discharge pipe. The nitrogen purity detector constantly monitors the nitrogen purity in the return pipe and transmits the signal to the controller. When the nitrogen purity reaches 99% or higher, the controller closes the gas valve and the first discharge valve. (3) Nitrogen replacement: The controller controls the opening of the regulating valve and the second shut-off valve to replace the nitrogen in the transport main pipe, filling pipe and return pipe with silane; the silane detector constantly monitors the silane concentration in the filling pipe and transmits the signal to the controller. When the silane concentration reaches 99.9999% or more, the controller controls the first shut-off valve and the second shut-off valve to close. (4) Filling silane liquid: The controller controls the filling valve to open and controls the liquid pump to start, filling the tank of the tank truck with silane liquid until the amount of silane liquid in the tank of the tank truck reaches the required level. Then, the controller controls the filling valve and regulating valve to close and stops the liquid pump. At the same time, the controller controls the first shut-off valve and the second shut-off valve to close.

7. The method for filling silane liquid according to claim 6, characterized in that, In step (3): the controller controls the regulating valve to open to 30% within 5 minutes and to fully open within 10 minutes.

8. A method for filling silane liquid according to claim 6, characterized in that, Step (3) also includes the following steps: the silane and nitrogen mixture displaced enters the condenser for condensation, and the condensed silane liquid falls into the silane storage tank; the second pressure sensor constantly detects the pressure in the silane storage tank and transmits the signal to the controller; when the detected pressure in the silane storage tank reaches more than 80% of its design pressure, the controller controls the second discharge valve to open and urgently discharge the uncondensed nitrogen; when the detected pressure in the silane storage tank is lower than 80% of its design pressure, the controller controls the second discharge valve to close.

9. A method for filling silane liquid according to claim 6, characterized in that, Step (4) also includes the following steps: the first pressure sensor constantly detects the pressure in the transport main pipe and transmits the signal to the controller, and the controller controls the opening of the regulating valve to keep the pressure in the transport main pipe at 1.0 to 1.2 MPa.

10. A method for filling silane liquid according to claim 6, characterized in that, Step (4) also includes the following steps: simultaneously start the condensation system above the tank truck, that is, turn on the compressor, air cooler and throttle valve group; after the Freon gas is compressed by the compressor, it is cooled into Freon liquid by the air cooler and enters the Freon storage tank. Then, the Freon liquid is depressurized and cooled to -48 to -52°C by the throttle valve group. After that, it enters the silane cooler to exchange heat with the vaporized silane in the tank of the tank truck to liquefy the silane, and the pressure in the tank is kept not higher than 0.7MPa. Subsequently, during the tank truck transportation process, the condensation system is always kept open.

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