A gas gun for a focused ion beam-electron beam dual beam microscope

Abstract

The application discloses a gas gun for a focused ion beam-electron beam dual-beam microscope, and relates to the technical field of micro-nano processing of semiconductors and materials, and comprises a stroke adjusting assembly, a gas speed adjusting assembly, a stroke adjusting sleeve, a speed adjusting driving rod, a crucible and a heat-conducting adapter seat, a first sliding piece of the stroke adjusting assembly is connected with the gas speed adjusting assembly and the stroke adjusting sleeve, and a second sliding piece of the gas speed adjusting assembly is connected with the speed adjusting driving rod; the crucible is connected with the stroke adjusting sleeve, the inside of the crucible has a containing space for storing solid-state materials, the containing space has a gas outlet, the crucible has a probe in sealing cooperation with the gas outlet, the probe is connected with the speed adjusting driving rod; the heat-conducting adapter seat is connected with the crucible, and a heating device is connected to the heat-conducting adapter seat, and the technical scheme of the application effectively solves the problem of poor adjusting precision of the existing gas gun.

Description

Technical Field

[0001] This invention relates to the field of micro-nano fabrication technology in the semiconductor industry and materials, and specifically to a gas gun for a focused ion beam-electron beam dual-beam microscope. Background Technology

[0002] The focused ion beam-electron beam dual-beam microscope is an instrument that combines a focused ion beam (FIB) with a scanning electron microscope (SEM). It not only possesses the ability of a SEM to observe samples in real time using an electron beam, but also allows for sample cutting, etching, and deposition using an ion beam. This is a high-end device that simultaneously offers high-resolution SEM observation and fine ion beam processing capabilities. It is currently widely used in many fields such as semiconductors, materials, batteries, and micro / nano fabrication, playing a vital role in modern economic development.

[0003] Focused ion beam-electron beam microscopy (FIE) enables precise micro- and nano-scale fabrication of materials using a high-intensity focused ion beam, while allowing real-time observation via SEM. It is a crucial tool for manufacturing nanodevices and fabricating nanostructures. Focused ion beam etching is primarily divided into physical ion beam etching and reactive ion beam etching. Typically, the metal elements used as the ion source have large atomic masses. When a high-energy ion beam bombards the sample, energy is transferred to the atoms or molecules within the sample, inducing sputtering. By adjusting different ion beam currents, etching with varying precision can be performed on samples of different materials, enabling micro- and nano-scale fabrication of various material surfaces.

[0004] When a focused ion beam scans a selected sample surface area, the processing method on the sample surface varies depending on the ion energy of the incident ion beam. When the ion energy is greater than 50 keV, the focused beam ions are injected into the sample; when the ion energy is only a few eV, the ions are deposited on the sample surface; and when the ion energy is in the range of 5 to 30 keV, the ions collide with the atoms or molecules of the sample, and the exposed area is etched away.

[0005] If a specific gas stream is selected and applied to the sample surface in conjunction with a focused ion beam / electron beam, the gas stream itself will not react with the sample material. However, after the focused ion beam bombards the gas stream, the gas dissociates, and the gas molecules transform into active atoms, ions, and free radicals. At this point, these active groups will chemically react with the sample material, and the reaction products will detach from the sample and be removed by the vacuum system. Therefore, gases can be used to achieve selective or enhanced etching of the sample surface. For example, using reactive gases (such as fluorine, iodine, water vapor, etc.), under certain conditions, the etching by the focused ion beam will couple with localized chemical reactions. When volatile substances are formed, the sputtering rate increases, and material redeposition decreases; however, on the other hand, a hardened layer with a lower sputtering rate may also be formed. This effect of varying sputtering rates can be used to achieve selective etching. If other gases are used, the gas molecules will be decomposed by the focused ion beam, leading to localized material deposition, thereby enabling the construction of various material microstructures.

[0006] In summary, the gas gun is an essential component for the focused ion beam-electron beam dual-beam microscope to achieve core processing functions such as selective etching, enhanced etching, and localized material deposition.

[0007] However, existing gas guns only use a gas tube to reach the sample surface, resulting in poor adjustment accuracy during operation. Summary of the Invention

[0008] In view of this, the present invention provides a gas gun for a focused ion beam-electron beam dual-beam microscope to solve the problem of poor adjustment accuracy of existing gas guns.

[0009] This invention provides a gas gun for a focused ion beam-electron beam dual-beam microscope, comprising:

[0010] The stroke adjustment assembly has a first housing and a first slider, the first slider sliding within the first housing under a driving action;

[0011] A gas speed regulating component has a second housing and a second sliding member. The second housing is fixedly connected to the first sliding member, and the second sliding member slides within the second housing under a driving action.

[0012] The stroke adjustment sleeve has one end fixedly connected to the first sliding member, and the other end extends out of the first sliding member towards the distal end.

[0013] A speed control drive rod is slidably disposed inside the stroke adjustment sleeve, with its first end connected to the second sliding member and its second end extending out of the stroke adjustment sleeve;

[0014] A crucible is connected to the stroke adjustment sleeve. The interior of the crucible has a storage space for storing solid materials. The storage space has a gas outlet. The crucible has a probe that is sealed to the gas outlet. The probe is connected to the speed control drive rod.

[0015] A heat-conducting adapter is connected to the crucible, and a heating device is connected to the heat-conducting adapter.

[0016] The technical solution of this invention enables the storage of injected gas in a solid state within a crucible. The gas gun is equipped with a heating device, the temperature of which is precisely controlled by an external control device. When the temperature rises to the volatilization temperature of the injected gas, the solid gas will volatilize.

[0017] Meanwhile, the control device can operate the probe to open and close, thereby releasing or blocking the gas. The gas gun also has forward and backward functions. When the control device issues a command to move the gas gun forward, the front end of the welded bellows inside the gas gun will move forward, thereby bringing the crucible closer to the sample surface, at which point the gas injection operation can be performed; when the control device issues a command to move the gas gun backward, the front end of the welded bellows inside the gas gun will move backward, moving the crucible away from the sample surface.

[0018] This design effectively solves the problem of poor adjustment accuracy in existing gas guns.

[0019] Optionally, the heating device includes a resistor mounted around the thermally conductive adapter.

[0020] Optionally, the resistor may include a flexible printed circuit board.

[0021] Optionally, the heat-conducting adapter is connected between the crucible and the stroke adjustment sleeve, and a bellows is connected between the heat-conducting adapter and the first housing of the stroke adjustment assembly.

[0022] Optionally, the first slider is pneumatically driven.

[0023] Optionally, a first speed regulating valve and a second speed regulating valve are connected to the first housing. The first housing has a first sliding cavity for accommodating the first sliding member. The first sliding member has a first annular boss. The first annular boss slides in a sealed manner within the first sliding cavity. The first annular boss divides the first sliding cavity into a first cavity and a second cavity. The first speed regulating valve communicates with the first cavity, and the second speed regulating valve communicates with the second cavity.

[0024] Optionally, the first annular boss has an annular groove in its circumference, and a sealing element is provided in the annular groove, the sealing element slidingly sealingly engaging with the inner wall of the first sliding cavity.

[0025] Optionally, the second slider is pneumatically driven.

[0026] Optionally, a third speed regulating valve is connected to the second housing, and the second housing has a second sliding cavity for accommodating the second sliding member. The second sliding member has a second annular boss, which slides in a sealed manner within the second sliding cavity. The third speed regulating valve communicates with the second sliding cavity to drive the second sliding member to move away from the crucible.

[0027] A first elastic element is connected between the second sliding member and the second housing. The first elastic element has an elastic force that drives the second sliding member to move relative to the second housing toward the crucible.

[0028] The second end of the speed-regulating drive rod is connected to a second elastic element, which has an elastic force that drives the speed-regulating drive rod to move relative to the stroke adjustment sleeve in a direction away from the crucible.

[0029] Optionally, the speed regulating drive rod is threadedly connected to the second sliding member, the end of the first end of the speed regulating drive rod extends out of the second sliding member and the second housing, and the end of the first end of the speed regulating drive rod has a rotation operation structure. Attached Figure Description

[0030] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0031] Figure 1 A perspective view of a gas gun for a focused ion beam-electron beam dual-beam microscope provided in an embodiment of the present invention;

[0032] Figure 2 for Figure 1 An exploded view of the stroke adjustment component shown;

[0033] Figure 3 for Figure 2 A cross-sectional view of the first housing shown;

[0034] Figure 4 for Figure 2 The assembled cross-sectional view of the stroke adjustment component shown;

[0035] Figure 5 for Figure 1 An exploded view of the gas speed control assembly shown.

[0036] Figure 6 for Figure 5 A cross-sectional view of the second housing shown;

[0037] Figure 7 for Figure 5 A cross-sectional view of the assembled gas speed control assembly shown.

[0038] Figure 8 for Figure 1 A sectional view of the first housing is hidden in the middle;

[0039] Figure 9 for Figure 1 A perspective view of the crucible section shown;

[0040] Figure 10 for Figure 9 A sectional view;

[0041] Figure 11 for Figure 10 A schematic diagram showing the concealed heat-conducting adapter, bellows, and stroke adjustment sleeve.

[0042] Figure 12 This is a control principle diagram of a gas gun for a focused ion beam-electron beam dual-beam microscope provided in an embodiment of the present invention;

[0043] Figure 13 A circuit diagram of a temperature control module for a gas gun in a focused ion beam-electron beam dual-beam microscope provided for an embodiment of the present invention;

[0044] Figure 14 This is a solenoid valve control circuit;

[0045] Figure 15 This is another solenoid valve control circuit.

[0046] Explanation of reference numerals in the attached figures:

[0047] 1. Stroke adjustment assembly; 101. First housing; 102. First sliding member;

[0048] 2. Gas speed regulating assembly; 201. Second housing; 202. Second sliding member;

[0049] 3. Crucible; 301. Gas outlet; 302. Probe;

[0050] 4. Heat-conducting adapter; 5. Stroke adjustment sleeve; 6. Speed ​​control drive rod; 7. Bellows; 8. First speed control valve; 9. Second speed control valve; 10. First sliding cavity; 11. First annular boss; 12. Third speed control valve; 13. Second sliding cavity; 14. Second annular boss; 15. First elastic element; 16. Second elastic element; 17. Rotary operating structure. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0052] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0053] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0054] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0055] like Figure 1 The image shows a specific embodiment of the gas gun for a focused ion beam-electron beam dual-beam microscope provided in this example, comprising: a stroke adjustment assembly 1, a gas speed control assembly 2, a crucible 3, and a heat-conducting adapter 4; the crucible 3 has an internal space for storing solid materials, and the space has a gas outlet 301; the heat-conducting adapter 4 is connected to the crucible 3, and a heating device is connected to the heat-conducting adapter 4. During operation, the heating device heats the heat-conducting adapter 4, thereby increasing the temperature of the crucible 3, causing the solid material inside to volatilize and form gas, which is then discharged through the gas outlet 301.

[0056] like Figure 2 , Figure 3 and Figure 4As shown, the stroke adjustment assembly 1 has a first housing 101 and a first slider 102. The first slider 102 slides within the first housing 101 under the driving action.

[0057] like Figure 5 , Figure 6 , Figure 7 As shown, the gas speed regulating component 2 has a second housing 201 and a second sliding member 202. Under the driving action, the second sliding member 202 slides within the second housing 201.

[0058] like Figure 8 As shown, the second housing 201 is fixedly connected to the first sliding member 102. With this configuration, the gas speed regulating assembly 2 can be moved as a whole via the first sliding member 102 of the stroke adjusting assembly 1.

[0059] like Figure 8 As shown, this embodiment also includes: a stroke adjustment sleeve 5 and a speed control drive rod 6. One end of the stroke adjustment sleeve 5 is fixedly connected to the first sliding member 102, and the other end extends out of the first sliding member 102 towards the distal end. With this configuration, the stroke adjustment sleeve 5 and the gas speed control component 2 can be moved synchronously through the first sliding member 102 of the stroke adjustment component 1.

[0060] like Figure 8 As shown, the speed regulating drive rod 6 is slidably disposed within the stroke adjusting sleeve 5, and the first end of the speed regulating drive rod 6 is connected to the second sliding member 202. With this configuration, the speed regulating drive rod 6 can be moved via the second sliding member 202 of the gas speed regulating assembly 2.

[0061] like Figure 9 , Figure 10 , Figure 11 As shown, the second end of the speed-regulating drive rod 6 extends out of the stroke-adjusting sleeve 5. The crucible 3 is connected to the stroke-adjusting sleeve 5, and the crucible 3 has a probe 302 that seals against the gas outlet 301. The probe 302 is connected to the speed-regulating drive rod 6. With this configuration, the crucible 3 can be moved via the stroke-adjusting sleeve 5, thereby adjusting the distance between the gas outlet 301 of the crucible 3 and the sample surface. The speed-regulating drive rod 6 can move the probe 302 inside the crucible 3, and the movement of the probe 302 can adjust the gas output of the gas outlet 301.

[0062] It should be noted that, in some embodiments, the heating device may include a resistor, which is attached around the thermally conductive adapter 4 and heats up when energized.

[0063] In some embodiments, the resistor comprises a flexible printed circuit board. Of course, the above description is not limiting; in some alternative embodiments, the resistor may also be a non-flexible PCB board, etc.

[0064] like Figure 1 As shown, in some embodiments, the thermally conductive adapter 4 is connected between the crucible 3 and the stroke adjustment sleeve 5, and a bellows 7 is connected between the thermally conductive adapter 4 and the first housing 101 of the stroke adjustment assembly 1. The bellows 7 ensures that the device has a certain range of motion while achieving a vacuum sealing function, thus balancing sealing reliability and movement flexibility.

[0065] In some embodiments, the first slider 102 is pneumatically driven. Of course, the above description is not limiting; in some alternative embodiments, the first slider 102 may also be mechanically driven, driven by an electric actuator, or driven by a hydraulic cylinder, etc.

[0066] like Figure 3 , Figure 4 As shown, in some embodiments, a first speed regulating valve 8 and a second speed regulating valve 9 are connected to the first housing 101. The first housing 101 has a first sliding cavity 10 for accommodating the first sliding member 102. The first sliding member 102 has a first annular boss 11. The first annular boss 11 slides in a sealed manner within the first sliding cavity 10. The first annular boss 11 divides the first sliding cavity 10 into a first cavity and a second cavity. The first speed regulating valve 8 communicates with the first cavity, and the second speed regulating valve 9 communicates with the second cavity.

[0067] Using the above scheme, when gas enters the first cavity through the first speed regulating valve 8, it can push the first annular boss 11 to move toward the second cavity, thereby driving the first sliding member 102 to move toward the second cavity; when gas enters the second cavity through the second speed regulating valve 9, it can push the first annular boss 11 to move toward the first cavity, thereby driving the first sliding member 102 to move toward the first cavity.

[0068] like Figure 2 As shown, in some embodiments, the first annular boss 11 has an annular groove in its circumference, and a sealing element is disposed within the annular groove. The sealing element slides and seals against the inner wall of the first sliding cavity 10. Specifically, in some embodiments, the sealing element is a sealing ring. Of course, the above description is not limiting, and in some alternative embodiments, the sealing element may be omitted.

[0069] In some embodiments, the second slider 202 is pneumatically driven. Of course, the above description is not limiting; in some alternative embodiments, the second slider 202 may also be mechanically driven, driven by an electric actuator, or driven by a hydraulic cylinder, etc.

[0070] like Figure 6 , Figure 7 As shown, in some embodiments, a third speed control valve 12 is connected to the second housing 201, and the second housing 201 has a second sliding cavity 13 for accommodating the second sliding member 202. The second sliding member 202 has a second annular boss 14, which slides in a sealed manner within the second sliding cavity 13. The third speed control valve 12 communicates with the second sliding cavity 13 to drive the second sliding member 202 to move away from the crucible 3.

[0071] like Figure 7 As shown, in some embodiments, a first elastic member 15 is connected between the second slider 202 and the second housing 201. The first elastic member 15 has an elastic force that drives the second slider 202 to move relative to the second housing 201 toward the crucible 3. Since the second slider 202 is connected to the first section of the speed-regulating drive rod 6, when the second slider 202 moves, it synchronously drives the speed-regulating drive rod 6 to move; that is, the first elastic member 15 has an elastic force that drives the speed-regulating drive rod 6 to move toward the crucible 3.

[0072] like Figure 10 As shown, the second end of the speed regulating drive rod 6 is connected to a second elastic element 16, which has an elastic force that drives the speed regulating drive rod 6 to move relative to the stroke adjusting sleeve 5 in a direction away from the crucible 3.

[0073] With the above settings, the speed regulating drive rod 6 maintains dynamic balance under the combined action of the first elastic element 15 and the second elastic element 16.

[0074] like Figure 8 As shown, in some embodiments, the speed-regulating drive rod 6 is threadedly connected to the second sliding member 202, and the end of the first end of the speed-regulating drive rod 6 extends out of the second sliding member 202 and the second housing 201. The end of the first end of the speed-regulating drive rod 6 has a rotation operation structure 17. Specifically, in some embodiments, the rotation operation structure 17 is an internal hexagonal structure.

[0075] Working principle:

[0076] When the gas injected by the gas gun of a focused ion beam-electron beam dual-beam microscope acts on a certain area of ​​the sample together with the focused ion beam, the gas molecules will decompose under the bombardment of the high-energy focused ion beam, thereby triggering a chemical reaction and performing micro-nano processing and construction on the sample surface.

[0077] The gas gun in this embodiment has a forward / reverse movement function and a function to turn the probe 302 on / off. The crucible 3 of the gas gun stores a solid substance, which can volatilize and form a gas when the temperature rises. The temperature control module can control the crucible 3 of the gas gun to maintain a certain required temperature value with a temperature accuracy of ±0.1℃.

[0078] During operation, the welded bellows 7 of the gas gun moves forward, bringing the crucible 3 closer to the sample surface. Then, the probe 302 is opened, and gas is injected through the gas outlet 301. The temperature control module maintains the crucible 3 at a certain temperature. At this time, the vaporized gas is injected into the sample surface, working together with the high-energy focused ion beam to etch the sample. When gas injection is no longer needed, the welded bellows 7 of the gas gun moves backward, moving the crucible 3 away from the sample surface, the probe 302 is turned off, and the temperature control module stops its temperature control function.

[0079] like Figure 12 As shown, the control circuit for the gas gun in a focused ion beam-electron beam dual-beam microscope provided in this embodiment includes two functional modules: a temperature control module consisting of a temperature controller and a heating control circuit, and an action control module consisting of a communication circuit, a control circuit, and a solenoid valve. The PC communicates with the communication circuit and temperature controller via a network port. The control circuit drives the solenoid valve according to the PC's commands, thereby controlling the forward / reverse movement of the gas gun and opening / closing the detection action. The temperature controller, according to the PC's commands, controls the heating control circuit, thereby controlling the temperature of the crucible 3 of the gas gun, thus causing the solid substance to volatilize and form a gas.

[0080] like Figure 13The diagram shows the temperature control module, which consists of a temperature controller, a heating control circuit, and connectors. Connector J2 connects to the DB9 interface of the gas gun via a 9-core cable, enabling the connection of the heating circuit and thermocouple feedback circuit to the gas gun. Pins 1 and 2 of J2 are the connection pins for the thermocouple of the gas gun, and pins 4 and 5 are the pins for the heating element of the gas gun. The temperature controller connects to a computer via Ethernet. The host computer sends commands to the temperature controller through the Ethernet port to determine the temperature maintained by the gas gun. The thermocouple provides feedback on the real-time temperature value of the gas gun, and the temperature tube controls the heating circuit based on the feedback real-time temperature, thus controlling the temperature of the gas gun. The SSR+ and SSR- outputs of the temperature controller are heating control signals. When heating is required, a 12V voltage is output between SSR+ and SSR-; when heating is not required, no 12V voltage is output between SSR+ and SSR-. U2, U3, and U22 are optocouplers. By controlling whether resistors R9, R30, R43, R49, R51, R53, R55, R57, R59, R61, R63, and R65 are soldered, the magnitude of the secondary output current of the optocouplers can be controlled to adapt to different working conditions and expand the adaptability of the gas gun.

[0081] like Figure 14 , Figure 15 The diagram shows the solenoid valve control circuit. The microcontroller communicates with the host computer via a network interface and controls the on / off state of relays K2 and K3 according to the host computer's instructions, thereby controlling whether to energize solenoid valves S3 and S4. The energization of the solenoid valves controls the opening and closing of the gas path, which in turn controls the forward / reverse movement of the gas gun and the release / prohibition of gas release. The gas path interface of the solenoid valve is connected to the gas gun via the gas path.

[0082] Work process:

[0083] During operation, the gas gun control circuit heats the crucible 3 of the gas gun, maintaining it at a specific temperature to allow the solid material to volatilize. Based on instructions from the host computer, the gas gun control circuit opens a solenoid valve (controlling the forward / reverse movement of the gas gun) to allow airflow into the gas gun, causing the front end of the welded bellows 7 to move forward, bringing the crucible 3 closer to the sample surface. Subsequently, the gas gun control circuit opens another solenoid valve (controlling the opening / closing of the probe 302 of the gas gun) to allow airflow into the gas gun, opening the probe 302. This allows gas to be injected into the sample surface, where it works in conjunction with the high-energy focused electron beam to perform micro / nano fabrication.

[0084] When gas injection is not required, the gas gun control circuit closes the solenoid valve (which controls the opening / closing of the gas gun probe 302), thus closing the probe 302 and prohibiting gas injection; the gas gun control circuit also closes the solenoid valve (which controls the forward / backward movement of the gas gun), causing the front end of the welded bellows 7 of the gas gun to move backward, thus moving the crucible 3 away from the sample surface.

[0085] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the present invention.

Claims

1. A gas gun for a focused ion beam-electron beam dual-beam microscope, characterized in that, include: The stroke adjustment assembly (1) has a first housing (101) and a first slider (102), wherein the first slider (102) slides within the first housing (101) under the action of a drive. The gas speed regulating assembly (2) has a second housing (201) and a second sliding member (202). The second housing (201) is fixedly connected to the first sliding member (102). Under the driving action, the second sliding member (202) slides within the second housing (201). The stroke adjustment sleeve (5) has one end fixedly connected to the first sliding member (102), and the other end extends out of the first sliding member (102) toward the far end. The speed control drive rod (6) is slidably disposed inside the stroke adjustment sleeve (5), with its first end connected to the second sliding member (202) and its second end extending out of the stroke adjustment sleeve (5). The crucible (3) is connected to the stroke adjustment sleeve (5). The interior of the crucible (3) has a storage space for storing solid materials. The storage space has a gas outlet (301). The crucible (3) has a probe (302) that is sealed to the gas outlet (301). The probe (302) is connected to the speed control drive rod (6). A heat-conducting adapter (4) is connected to the crucible (3), and a heating device is connected to the heat-conducting adapter (4).

2. The gas gun for a focused ion beam-electron beam dual-beam microscope according to claim 1, characterized in that, The heating device includes a resistor mounted around the thermally conductive adapter (4).

3. The gas gun for a focused ion beam-electron beam dual-beam microscope according to claim 2, characterized in that, The resistor includes a flexible printed circuit board.

4. The gas gun for a focused ion beam-electron beam dual-beam microscope according to claim 1, characterized in that, The heat-conducting adapter (4) is connected between the crucible (3) and the stroke adjustment sleeve (5), and a bellows (7) is connected between the heat-conducting adapter (4) and the first housing (101) of the stroke adjustment assembly (1).

5. The gas gun for a focused ion beam-electron beam dual-beam microscope according to claim 1, characterized in that, The first sliding member (102) is pneumatically driven.

6. The gas gun for a focused ion beam-electron beam dual-beam microscope according to claim 5, characterized in that, The first housing (101) is connected to a first speed control valve (8) and a second speed control valve (9). The first housing (101) has a first sliding cavity (10) for accommodating the first sliding member (102). The first sliding member (102) has a first annular boss (11). The first annular boss (11) slides in a sealed manner in the first sliding cavity (10). The first annular boss (11) divides the first sliding cavity (10) into a first cavity and a second cavity. The first speed control valve (8) is connected to the first cavity, and the second speed control valve (9) is connected to the second cavity.

7. The gas gun for a focused ion beam-electron beam dual-beam microscope according to claim 6, characterized in that, The first annular boss (11) has an annular groove in its circumference, and a sealing element is provided in the annular groove. The sealing element slides and seals with the inner wall of the first sliding cavity (10).

8. The gas gun for a focused ion beam-electron beam dual-beam microscope according to claim 1, characterized in that, The second slider (202) is pneumatically driven.

9. The gas gun for a focused ion beam-electron beam dual-beam microscope according to claim 8, characterized in that, A third speed control valve (12) is connected to the second housing (201). The second housing (201) has a second sliding cavity (13) for accommodating the second sliding member (202). The second sliding member (202) has a second annular boss (14). The second annular boss (14) slides in a sealed manner within the second sliding cavity (13). The third speed control valve (12) communicates with the second sliding cavity (13) to drive the second sliding member (202) to move away from the crucible (3). A first elastic element (15) is connected between the second sliding member (202) and the second housing (201). The first elastic element (15) has an elastic force that drives the second sliding member (202) to move relative to the second housing (201) toward the crucible (3). The second end of the speed control drive rod (6) is connected to a second elastic element (16), which has an elastic force that drives the speed control drive rod (6) to move relative to the stroke adjustment sleeve (5) in a direction away from the crucible (3).

10. The gas gun for a focused ion beam-electron beam dual-beam microscope according to any one of claims 1-9, characterized in that, The speed control drive rod (6) is connected to the second sliding member (202) by a thread. The end of the first end of the speed control drive rod (6) extends out of the second sliding member (202) and the second housing (201). The end of the first end of the speed control drive rod (6) has a rotation operation structure (17).

Images