A segmented drying device and method for producing a coated paper
By using a segmented drying device and a gradient temperature control strategy, the problems of uneven drying and high energy consumption of coated paper were solved, achieving uniform drying and energy-saving effects for coated paper.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2026-01-15
- Publication Date
- 2026-03-27
AI Technical Summary
Existing coated paper drying equipment suffers from uneven drying and high energy consumption. In particular, the single heat source for air supply results in poor adhesion between the coated layer and the base paper, poor appearance smoothness, and serious energy waste.
A segmented drying device is adopted, which uses independent gas injection branch pipes and electronically controlled valves to precisely control the temperature of each heat-conducting component. Combined with a gradient temperature control strategy, it realizes the zoned supply and recirculation management of hot airflow, ensuring uniform drying of the coated paper and energy saving.
It achieves uniform drying of coated paper, avoids bubbling of the coating layer and paper deformation, improves product consistency, and significantly reduces energy consumption.
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Figure CN121557701B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of coated paper production technology, and in particular to a segmented drying apparatus and method for coated paper production. Background Technology
[0002] In the production of coated paper, the drying process is a crucial step in ensuring product quality. Its core requirement is to achieve a firm bond between the coated layer and the base paper, while avoiding defects such as blistering of the coated layer and deformation of the base paper. Currently, most coated paper drying equipment on the market adopts a single heat source and overall air supply mode, which has many technical shortcomings.
[0003] First, the supply of hot air lacks precise control. Usually, air is supplied to the drying area as a whole through a single air duct. During the conduction process, the hot air is prone to heat attenuation, resulting in excessively high temperature in the upstream area and insufficient temperature in the downstream area. This leads to poor uniformity of drying of the coated paper in both the transverse and longitudinal directions, and the product surface is prone to localized incomplete or excessive drying, which seriously affects the adhesion and smoothness of the coated layer.
[0004] In addition, existing drying designs generally use a fixed temperature for heating throughout the entire process. However, during the drying process of coated paper, a higher temperature is required upstream to achieve rapid shaping of the coated layer, while downstream only heat preservation and drying are required. The single temperature supply results in a large amount of energy waste and poor energy-saving effect.
[0005] In summary, in the drying process of coated paper, how to effectively solve the technical problems of uneven drying and high energy consumption caused by the existing single heat source air supply has become a difficult problem. Summary of the Invention
[0006] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution:
[0007] This invention provides a segmented drying device for coated paper production, including a heat source cavity disposed inside a coating machine, an airflow mechanism with its outlet facing the heat source cavity, an air injection pipe and a return pipe communicating with the heat source cavity, a heat-conducting part built into the heat source cavity, an air inlet temperature probe disposed at the air inlet end of the airflow mechanism, a first temperature probe disposed on the heat-conducting part, an output box fixedly installed on the output side of the coating machine, an upper plug-in installed inside the output box, a conduction channel for exporting coated paper formed below the upper plug-in and an airflow channel formed above the upper plug-in, a plurality of heat-conducting components fixedly installed on the upper plug-in, the heat-conducting components having an insert through slot located in the airflow channel and a plurality of airflow through holes, and heat dissipation fins extending into the conduction channel at the bottom of the heat-conducting components.
[0008] An auxiliary square rod is installed within the airflow channel, penetrating each insert slot. A second temperature probe and a heating element are installed at each slot location on the auxiliary square rod. Multiple injection branch pipes connect downstream of the injection pipe, each independently equipped with an injection solenoid valve. An injection branch pipe independently connects to the airflow channel area between adjacent heat-conducting components and upstream of the upstream heat-conducting component. A return gas branch pipe equipped with a return gas temperature probe connects to the airflow channel area downstream of the downstream heat-conducting component. The return gas branch pipe connects to the return gas pipe, which is equipped with a return gas solenoid valve and a miniature air pump. The return gas pipe also connects to an exhaust pipe upstream of the return gas solenoid valve, which is equipped with an exhaust solenoid valve.
[0009] As a preferred technical solution of the device of the present invention: the heat-conducting part is provided with heat-conducting fins facing the heat source cavity, and the airflow mechanism is provided with an air supply pipe inserted into the heat source cavity, with the outlet of the air supply pipe facing the heat-conducting fins.
[0010] As a preferred technical solution of the device of the present invention: the discharge box has multiple transmission rollers in the transmission channel, and the discharge box is provided with a heat insulation layer located directly below the transmission rollers.
[0011] As a preferred embodiment of the device of the present invention: the upper insert includes a horizontal plate portion parallel to the conduction direction of the coated paper and a vertical plate portion fixed to the side opening of the outlet box. The horizontal plate portion is provided with multiple thickened portions, each thickened portion having a vertically penetrating insertion port. A heat-conducting component is fixedly installed at the insertion port position. The thickened portions have fixing through holes on both sides, and the heat-conducting component has mounting screw holes that mate with the fixing through holes. The vertical plate portion has a square hole for installing an auxiliary square rod.
[0012] As a preferred technical solution of the device of the present invention: the auxiliary square rod is provided with a heat insulation part for isolating the second temperature probe from the heating part.
[0013] As a preferred technical solution of the device of the present invention: the top of the heat-conducting component is provided with a heat-insulating pad that abuts against the inner wall of the top plate of the outlet box.
[0014] As a preferred embodiment of the device of the present invention: the auxiliary square rod includes an electrical plug protruding from the upper plug, and the second temperature probe and the heating element are electrically connected to the electrical plug. A power plug module is also installed at the location of the electrical plug, the power plug module has a power socket that mates with the electrical plug, and the power plug module is also connected to an external circuit.
[0015] This invention provides a segmented drying method for producing coated paper, comprising the following:
[0016] Step 1: Start the coating machine and all temperature probes, preset the minimum effective heating temperature of the heat source cavity and the gradient temperature requirement of the heat-conducting components, and establish the heat exchange drying baseline parameters.
[0017] In the second step, the first temperature probe continuously monitors the temperature of the heat-conducting area and compares it with the preset threshold to determine whether the heat source cavity meets the basic heating conditions.
[0018] In step three, if the temperature of the heat-conducting part does not meet the standard, the airflow mechanism is turned off, and the electric heating part is started to heat the heat-conducting part according to the difference between the required temperature of the heat-conducting part and the real-time temperature of the heat-conducting part, until the temperature of the heat-conducting part reaches the required temperature.
[0019] Step four: If the temperature of the heat-conducting part reaches the standard, start the airflow mechanism to introduce external airflow, generate hot airflow through the heat source cavity, open the uppermost air injection electric control valve, and evenly supply hot airflow to the uppermost part of the airflow channel.
[0020] In step five, when the airflow mechanism is activated, if the second temperature probe at the upstream position detects that the temperature of the heat-conducting component has reached the required temperature, analyze the temperatures detected by multiple second temperature probes downstream.
[0021] In step six, when the airflow mechanism is activated, if the real-time temperature of a heat-conducting component that is not at the upstream position is lower than the corresponding required temperature, the gas injection control valve adjacent to the upstream side of the heat-conducting component will open. The degree of opening of the gas injection control valve is proportional to the difference between the required temperature and the real-time temperature.
[0022] Step 7: The return air temperature probe monitors the temperature of the return airflow in the return air branch pipe in real time. If the temperature meets the standard, the micro air pump is started to recover the airflow; if the temperature does not meet the standard, the exhaust electronic control valve is opened to discharge the airflow.
[0023] In step eight, the system collects the operating parameters of the airflow mechanism and the micro air pump in real time, and uses closed-loop control to match the speed of both to stabilize the air pressure in the heat source chamber.
[0024] Compared with existing technologies, the beneficial effects of this invention are:
[0025] The device of this invention adopts a segmented hot air supply structure. Independent air injection branch pipes are configured between adjacent heat-conducting components and in the upstream region. The opening degree of the air injection electronic control valve is proportional to the temperature difference, which can accurately replenish the heat in the downstream low-temperature region. The heat-conducting components act on the coated paper in the conduction channel through heat dissipation fins, which effectively avoids problems such as blistering of the coated layer and paper deformation, and ensures product consistency.
[0026] This invention employs a gradient temperature control strategy, where the required temperature of the heat-conducting components decreases gradually along the conduction direction of the coated paper. Combined with an independent air injection electronic control valve, the air supply is adjusted as needed to avoid ineffective heating. Compared with the traditional single drying method, the energy efficiency is significantly improved. Attached Figure Description
[0027] Figure 1 This is a schematic diagram of the overall structure of the device of the present invention.
[0028] Figure 2 for Figure 1A magnified structural diagram of part A in the middle.
[0029] Figure 3 This is a schematic diagram of the structure of the export box and related components in this invention.
[0030] Figure 4 for Figure 3 A magnified structural diagram of section B in the middle.
[0031] Figure 5 for Figure 4 A magnified structural diagram of part C in the middle.
[0032] Figure 6 This is a schematic diagram showing the disassembled structure of the upper plug, heat-conducting component, and auxiliary square rod in this invention.
[0033] Figure 7 for Figure 6 A magnified structural diagram of part D in the middle.
[0034] Figure 8 for Figure 6 A magnified structural diagram of part E in the middle.
[0035] Figure 9 for Figure 6 This is a magnified structural diagram of point F.
[0036] Wherein: 1-Laminator, 101-Heat source chamber; 2-Heat-conducting part, 201-Heat-conducting fins; 3-First temperature probe; 4-Airflow mechanism, 401-Air supply pipe, 402-Inlet air temperature probe; 5-Injection pipe; 6-Return pipe; 7-Injection branch pipe; 8-Return branch pipe, 801-Return air temperature probe; 9-Exit pipe; 10-Miniature air pump; 11-Injection solenoid valve; 12-Return air solenoid valve; 13-Exhaust solenoid valve; 14-Outlet box, 1401-Conduction channel, 1402-Conduction roller, 1403-Insulation layer, 1404-Airflow channel; 15-Laminator 16-Upper insert, 1601-Horizontal plate, 1602-Vertical plate, 1603-Thickened part, 1604-Insertion port, 1605-Fixing through hole, 1606-Square hole for insertion rod; 17-Heat-conducting component, 1701-Insertion slot, 1702-Airflow through hole, 1703-Heat dissipation fins, 1704-Heat insulation pad, 1705-Mounting screw hole; 18-Auxiliary square rod, 1801-Second temperature probe, 1802-Heat insulation part, 1803-Heating part, 1804-Electric plug; 19-Power module, 1901-Power port; 20-External wiring. Detailed Implementation
[0037] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.
[0038] Example 1: This invention designs a segmented drying device for coated paper production. The overall structure and core components of the device are as follows:
[0039] (I) Main Support Structure
[0040] Combination Figure 1 , Figure 3 The coating machine 1 provides the installation foundation and initial heat source generation environment for the entire drying device. It is equipped with a heat source chamber 101, which is the core area for heat generation and initial conduction. The output box 14 is fixedly installed on the output side of the coating machine 1 and is used for heat preservation and secondary drying during the export process of the coated paper 15. The output box 14 is divided into a conduction channel 1401 and an airflow channel 1404 to realize the zoned operation of the conduction of the coated paper and the circulation of hot airflow.
[0041] (ii) Heat source generation and conduction system
[0042] Combination Figure 1 , Figure 2 The heat-conducting part 2 is installed inside the heat source cavity 101 and has heat-conducting fins 201 facing the heat source cavity 101. It is used to efficiently transfer the heat generated by the operation of the coating machine 1 to the heat source cavity 101, thereby improving the heat diffusion efficiency. The first temperature probe 3 is mounted on the heat-conducting part 2 and is used to detect the temperature of the heat-conducting part 2 in real time, providing data for heat source control. The airflow mechanism 4 is equipped with an air inlet temperature probe 402 at the air inlet end and has an air supply pipe 401 inserted into the heat source cavity 101. The outlet of the air supply pipe 401 is directly opposite the heat-conducting fins 201, which is used to introduce external airflow into the heat source cavity 101. The blown airflow carries away the heat from the heat-conducting fins 201, forming a hot airflow.
[0043] (III) Gas Circulation System
[0044] Combination Figure 1 , Figure 3 , Figure 6The air injection pipe 5 is connected to the heat source cavity 101, and downstream it is connected to multiple air injection branch pipes 7, which are used to divert and transport the hot airflow in the heat source cavity 101 to different areas of the airflow channel 1404. Each air injection branch pipe 7 is independently equipped with an air injection solenoid valve 11. The area between adjacent heat conductors 17 and the area of the airflow channel 1404 upstream of the upstream heat conductor 17 are also independently equipped with an air injection branch pipe 7, so as to achieve precise zoning supply of hot airflow. The return air pipe 6 is connected to the heat source cavity 101 and is equipped with a return air solenoid valve 12 and a miniature air pump 10 with the air outlet facing the heat source cavity 101. The return air pipe 6 is also connected to the exhaust pipe 9 located upstream of the return air solenoid valve 12, so as to realize the return or exhaust of hot airflow. The return air branch pipe 8 connects the area of the airflow channel 1404 downstream of the downstream heat conductor 17 to the return air pipe 6. The return air branch pipe 8 is equipped with a return air temperature probe 801, which is used to detect the temperature of the return airflow. The external exhaust pipe 9 is equipped with an exhaust electronic control valve 13, which is used to discharge airflow that does not meet the temperature requirements.
[0045] (iv) Components inside the export box
[0046] Combination Figure 3 , Figure 4 , Figure 6 The upper insert 16 includes a horizontal plate portion 1601 parallel to the conduction direction of the coated paper 15 and a vertical plate portion 1602 fixed to the side opening of the outlet box 14. The horizontal plate portion 1601 is provided with multiple thickened portions 1603, and the thickened portions 1603 have vertically penetrating insertion ports 1604 and fixing through holes 1605 on both sides. The vertical plate portion 1602 has a square hole 1606 for inserting a heat-conducting component 17 and an auxiliary square rod 18.
[0047] Combination Figure 3 , Figure 6 , Figure 7 The conduction roller 1402 is installed inside the conduction channel 1401 to support and guide the conduction of the coated paper 15. The heat insulation layer 1403 is located directly below the conduction roller 1402 and is disposed inside the discharge box 14 to reduce heat loss within the conduction channel 1401.
[0048] Combination Figure 5 , Figure 6 , Figure 8The heat-conducting component 17 is fixedly installed at the insertion port 1604 and has a mounting screw hole 1705 that mates with the fixing through hole 1605. The top of the heat-conducting component 17 has a heat insulation pad 1704 that abuts against the inner wall of the top plate of the outlet box 14. The heat-conducting component 17 has an insertion through slot 1701 and multiple airflow through holes 1702 located in the airflow channel 1404. The bottom of the heat-conducting component 17 has heat dissipation fins 1703 that extend into the conduction channel 1401 to receive heat from the hot airflow and transfer it to the coating paper 15 through the heat dissipation fins 1703. The auxiliary square rod 18 is installed through each insertion slot 1701. The auxiliary square rod 18 includes an electrical plug 1804 protruding from the upper plug 16. The auxiliary square rod 18 is provided with a heat insulation part 1802 for isolating the second temperature probe 1801 and the heating part 1803. The auxiliary square rod 18 is provided with a second temperature probe 1801 and a heating part 1803 at each insertion slot 1701. The second temperature probe 1801, the heating part 1803 and the electrical plug 1804 are electrically connected.
[0049] Combination Figure 6 , Figure 9 The power module 19 is provided with a power socket 1901 that mates with the power plug 1804. The power module 19 is connected to an external line 20 to supply power to the second temperature probe 1801 and the heating element 1803.
[0050] Example 2: This invention designs a segmented drying method for coated paper production. This method is applied to the aforementioned segmented drying device for coated paper production. The specific steps are as follows:
[0051] (a) Initial heat transfer
[0052] The heat generated during the operation of the coating machine 1 is transferred to the heat source cavity 101 through the heat conduction part 2 and the heat conduction fins 201.
[0053] (II) Initial temperature determination and airflow mechanism control
[0054] If the temperature detected by the first temperature probe 3 does not reach the first preset temperature T m1 Airflow mechanism 4 is closed, and hot airflow is not discharged temporarily.
[0055] If the temperature detected by the first temperature probe 3 reaches the first preset temperature T m1 When the airflow mechanism 4 is activated, the airflow passes through the air supply pipe 401 and blows into the heat-conducting fins 201. The airflow carries away the heat from the heat-conducting fins 201 to form a hot airflow.
[0056] (III) Temperature detection of heat-conducting components and control of electric heating elements
[0057] With the conduction direction of the coated paper 15 as a reference, the second temperature probes 1801, arranged sequentially from upstream to downstream, detect the real-time temperatures of the heat-conducting components 17 at their respective locations as T1, T2, T3...T n The required temperature of the heat-conducting components 17, arranged sequentially from upstream to downstream, is T. x1 T x2 T x3 ...T xn (where T) m1 >T x1 >T x2 >T x3 >...>T xn ):
[0058] When the airflow mechanism 4 is closed, if the real-time temperature detected by the second temperature probe 1801 does not reach the corresponding required temperature, the electric heating part 1803 at that position is activated to heat the heat-conducting component 17 until the temperature reaches the required temperature.
[0059] (iv) Zoned supply regulation of hot airflow
[0060] After the airflow mechanism 4 is activated (that is, when the temperature detected by the first temperature probe 3 reaches the first preset temperature T), m1 The gas injection valve 11 of the gas injection branch pipe 7 at the uppermost position is fully opened, and the hot gas flow enters the air flow channel 1404, and passes through the air flow through holes 1702 of multiple heat-conducting components 17 in sequence to heat each heat-conducting component 17.
[0061] If the second temperature probe 1801 at the upstream position detects that the temperature of the heat-conducting component 17 has reached the required temperature T... x1 The temperature detected by multiple downstream second temperature probes 1801 is analyzed. If the real-time temperature is lower than the corresponding required temperature, the gas injection electronic control valve 11 adjacent to the upper side of the heat-conducting component 17 is opened. The degree of opening is proportional to the difference between the required temperature and the real-time temperature (the greater the difference, the greater the degree of opening).
[0062] (v) Airflow recirculation and exhaust regulation
[0063] Exhaust electronic control valve 13 remains normally open. After the hot airflow reaches the downstream area of airflow channel 1404, it enters return air branch pipe 8. Return air temperature probe 801 detects the airflow temperature.
[0064] If the detected airflow temperature is not higher than the airflow temperature detected by the intake air temperature probe 402, the exhaust electronic control valve 13 remains open and the airflow is discharged through the external exhaust pipe 9.
[0065] If the detected airflow temperature is higher than the airflow temperature detected by the intake air temperature probe 402, the exhaust electronic control valve 13 closes, the return air electronic control valve 12 opens, and the micro air pump 10 starts to re-inject the airflow into the heat source chamber 101.
[0066] In addition, when the micro air pump 10 is started, the control system dynamically adjusts the external airflow intake rate of the airflow mechanism 4 according to its real-time flow rate to ensure stable air pressure in the heat source cavity 101 and avoid excessively high or low air pressure affecting the normal delivery of hot airflow.
[0067] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A segmented drying device for producing coated paper, characterized in that: it comprises a heat source cavity (101) arranged inside a coating machine (1), an air flow mechanism (4) with an outlet end facing the heat source cavity (101), an air injection pipe (5) in communication with the heat source cavity (101), and an air return pipe (6); the heat source cavity (101) is internally provided with a heat conduction part (2); the air flow mechanism (4) is provided with an air inlet temperature probe (402) at the air inlet end; the heat conduction part (2) is provided with a first temperature probe (3); a lead-out box (14) is mounted at the output side of the coating machine (1); the lead-out box (14) is internally provided with an upper insert (16); the upper insert (16) is formed with a conduction channel (1401) below for leading out coated paper (15) and an air flow channel (1404) above; the upper insert (16) is fixedly provided with a plurality of heat conduction pieces (17); the heat conduction pieces (17) are provided with an insert slot (1701) in the air flow channel (1404) and a plurality of air flow through holes (1702); the bottom of the heat conduction piece (17) is provided with a heat dissipation fin (1703) extending into the conduction channel (1401); an auxiliary square bar (18) is arranged in the air flow channel (1404); the auxiliary square bar (18) is arranged through each insert slot (1701); the auxiliary square bar (18) is provided with a second temperature probe (1801) and an electric heating part (1803) at the position of each insert slot (1701); a plurality of air injection branch pipes (7) are connected downstream of the air injection pipe (5); each air injection branch pipe (7) is independently provided with an air injection electric control valve (11); the air flow channel (1404) region between adjacent heat conduction pieces (17) and the most upstream heat conduction piece (17) is independently connected with an air injection branch pipe (7); the air flow channel (1404) region downstream of the most downstream heat conduction piece (17) is connected with an air return branch pipe (8) provided with an air return temperature probe (801); the air return branch pipe (8) is connected with the air return pipe (6); the air return pipe (6) is provided with an air return electric control valve (12) and a micro air pump (10); the air return pipe (6) is further connected with an external exhaust pipe (9) upstream of the air return electric control valve (12); the external exhaust pipe (9) is provided with an exhaust electric control valve (13).
2. The segmented drying device for producing coated paper according to claim 1, characterized in that: the heat conduction part (2) is provided with heat conduction fins (201) facing the heat source cavity (101); the air flow mechanism (4) is provided with a gas supply pipe (401) inserted into the heat source cavity (101); the gas supply pipe (401) is arranged opposite to the heat conduction fins (201).
3. The segmented drying device for producing coated paper according to claim 1, characterized in that: the conduction channel (1401) of the lead-out box (14) is provided with a plurality of conduction rollers (1402); the lead-out box (14) is provided with a heat insulation layer (1403) located directly below the conduction rollers (1402).
4. The segmented drying device for producing coated paper according to claim 1, characterized in that: The upper plug-in part (16) includes a horizontal plate part (1601) parallel to the conduction direction of the coated paper (15), and a vertical plate part (1601) fixed to the side end opening of the lead-out box (14), the horizontal plate part (1601) is provided with a plurality of thickened parts (1603), the thickened parts (1603) are provided with vertically penetrating plug-in openings (1604), and the heat conduction part (17) is fixedly installed at the plug-in opening (1604) position; Wherein, the thickened part (1603) is provided with a fixed through hole (1605) on both sides, and the heat conduction part (17) is provided with a mounting screw hole (1705) matched with the fixed through hole (1605); Wherein, the vertical plate part (1602) is provided with a plug-in square hole (1606) for installing an auxiliary square rod (18).
5. The segmented drying device for producing coated paper according to claim 1, wherein: The auxiliary square rod (18) is provided with a heat insulation part (1802) for separating the second temperature probe (1801) and the electric heating part (1803).
6. The segmented drying device for producing coated paper according to claim 1, wherein: The top of the heat conduction part (17) is provided with a heat insulation pad (1704) abutting against the inner wall of the top plate of the lead-out box (14).
7. The segmented drying device for producing coated paper according to claim 1, wherein: The auxiliary square rod (18) includes an electric plug (1804) protruding from the upper plug-in part (16), and the second temperature probe (1801) and the electric heating part (1803) are electrically connected with the electric plug (1804); An electric plug-in module (19) is also installed at the position of the electric plug (1804), the electric plug-in module (19) is provided with an electric plug-in opening (1901) matched with the electric plug (1804), and the electric plug-in module (19) is also connected with an external circuit (20).
8. A sectional drying method for production of a coated paper, characterized by, The segmented drying device for producing coated paper according to any one of claims 1 to 7 comprises the following contents: Link one, start the coating machine (1) and each temperature probe, preset the minimum effective heating temperature of the heat source cavity (101) and the gradient required temperature of the heat conduction part (17), and determine the heat exchange drying reference parameters; Link two, the first temperature probe (3) continuously monitors the temperature of the heat conduction part (2) region, compares with the preset threshold value, and judges whether the heat source cavity (101) meets the basic heating condition; Link three, if the temperature of the heat conduction part (2) region does not meet the standard, the air flow mechanism (4) is closed, the electric heating part (1803) is started to heat the heat conduction part (17) according to the difference between the required temperature of the heat conduction part (17) and the real-time temperature of the heat conduction part (17), and the temperature of the heat conduction part (17) reaches the required temperature; Link four, if the temperature of the heat conduction part (2) region meets the standard, the air flow mechanism (4) is started to introduce external air flow, the heat source cavity (101) generates hot air flow, the uppermost upstream air injection electric control valve (11) is opened, and the hot air flow is uniformly supplied to the uppermost upstream of the air flow channel (1404). Step five, when the airflow mechanism (4) is in action, if the second temperature probe (1801) at the most upstream position detects that the temperature of the heat conduction member (17) reaches the required temperature, analyze the temperatures detected by the multiple second temperature probes (1801) downstream; Step six, when the airflow mechanism (4) is in action, if the real-time temperature of the heat conduction member (17) at a position other than the most upstream position is lower than the corresponding required temperature, open the gas injection electric control valve (11) adjacent to the upstream side of the heat conduction member (17), and the opening degree of the gas injection electric control valve (11) is proportional to the difference between the required temperature and the real-time temperature; Step seven, the back gas temperature probe (801) monitors the temperature of the backflow gas in the back gas branch pipe (8) in real time, and if the temperature meets the standard, the micro air pump (10) is started to recover the gas flow, otherwise the exhaust electric control valve (13) is opened for exhaust; Step eight, the system collects the operating parameters of the airflow mechanism (4) and the micro air pump (10) in real time, and closes the loop to control the matching of the rates of the two, thereby stabilizing the gas pressure in the heat source cavity (101).
Citation Information
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