Air inlet rate control system and method and gas supply equipment

Abstract

The invention provides an air inlet amount control system, an air inlet amount control method and gas supply equipment, and relates to the field of semiconductor device processing. The air inlet amount control system comprises a temperature sensor, a controller, a motor and an air inlet amount adjusting structure located at an air inlet of the gas supply equipment, and the temperature sensor is used for collecting the temperature of a vaporizer in the gas supply equipment and transmitting the collected temperature to the controller; the controller is used for determining the difference value between the temperature and the target temperature and outputting a control signal to the motor according to the difference value; the motor is used for driving the air inlet volume adjusting structure to move according to the control signal and changing the air inlet area of the air inlet. The air inlet area of the air inlet can be dynamically adjusted according to the difference value between the actually measured temperature and the target temperature of the vaporizer, the influence of convective heat transfer in the gas supply equipment on the temperature of the vaporizer is reduced, and the vaporization performance of the vaporizer is guaranteed.

Description

Technical Field

[0001] This application relates to the field of semiconductor device processing, and more particularly to an air intake control system, an air intake control method, and a gas supply device. Background Technology

[0002] In semiconductor manufacturing, gas supply equipment (such as gas boxes) is a core functional module for the precise transport and control of reaction gases. Its main function is to deliver the gases required for thin film deposition to the process chambers in semiconductor process equipment. Gas supply equipment includes multiple gas transmission lines, such as liquid source lines, carrier lines, and general gas lines. Liquid precursors (such as organometallic compounds or hydrides) are connected to the liquid source lines. The liquid flow rate is measured by a liquid flow meter (LFM), and after being regulated by a valve assembly, it is sent to a vaporizer. The vaporizer heats / depressurizes the liquid precursor to convert it into a gaseous state. Because many thin film deposition processes (such as CVD and ALD) require gaseous reactants, the vaporized gas is then input into the process chamber to participate in the deposition, solving the problem of "liquid not participating uniformly in the deposition reaction."

[0003] The vaporizer's function is to transform a liquid into a gas, and temperature is a key factor affecting phase transition; temperature control directly impacts vaporization performance and gas quality. If the temperature is insufficient, the liquid may not completely vaporize, resulting in an impure gas or the presence of droplets, which can affect subsequent processes. For example, in semiconductor manufacturing, if the liquid precursor is not completely vaporized, it may form an uneven film on the wafer surface or even introduce impurities, affecting electrical performance.

[0004] The existing gas supply equipment uses a fixed design based on experience, which makes the internal flow field and pressure unadjustable and uncorrectable. As a result, the convective heat transfer inside the gas supply equipment directly affects the temperature of the vaporizer and reduces the vaporization performance of the vaporizer. Summary of the Invention

[0005] In view of this, this application provides an air intake control system, an air intake control method, and a gas supply device, which helps to reduce the impact of convective heat transfer inside the gas supply device on the vaporizer temperature.

[0006] In a first aspect, this application provides an air intake volume control system applied to a gas supply equipment. The air intake volume control system includes: a temperature sensor, a controller, a motor, and an air intake volume adjustment structure located at the air intake of the gas supply equipment, wherein:

[0007] The temperature sensor is used to collect the temperature of the vaporizer in the gas supply equipment and transmit the collected temperature to the controller;

[0008] The controller is used to determine the difference between the temperature and the target temperature, and output a control signal to the motor based on the difference;

[0009] The motor is used to drive the air intake volume adjustment structure to move according to the control signal, thereby changing the air intake area of ​​the air inlet.

[0010] In one embodiment, the air intake adjustment structure includes a fixed plate for covering the air intake and a movable plate arranged parallel to the fixed plate. The surface of the fixed plate is provided with a plurality of ventilation holes. The motor is used to drive the movable plate to move in a direction parallel to the fixed plate according to the control signal, thereby adjusting the overlapping area of ​​the movable plate and the fixed plate.

[0011] In one embodiment, the air intake adjustment structure further includes a lead screw and a guide structure. The guide structure is used to limit the movement trajectory of the moving plate. The lead screw is connected to the output shaft of the motor and is threadedly engaged with the moving plate. The moving direction of the moving plate is controlled by the forward and reverse rotation of the motor.

[0012] In one embodiment, outputting a control signal to the motor based on the difference includes:

[0013] The control quantity that reduces the difference is calculated based on the difference and the closed-loop control algorithm based on the difference feedback.

[0014] A control signal is output to the motor according to the control quantity.

[0015] In one embodiment, the gas supply device further includes an exhaust pipe for removing internal gas via a vacuum device, the exhaust pipe including a control valve, and the controller further being configured to:

[0016] After detecting that the difference meets the preset difference condition, the ratio μ between the air inlet area and the corresponding air outlet area of ​​the gas supply device, and the inlet pressure P of the air inlet are obtained. -in The flow conductance C of the control valve -out The pumping speed S of the aforementioned air extraction device -pump and correction factor K;

[0017] Based on the ratio μ and the inlet pressure P of the air inlet. -in The flow conductance C of the control valve -out The pumping speed S of the aforementioned air extraction device -pump And with correction factor K, calculate and output the pressure P inside the gas supply device. -gaxbox .

[0018] In one embodiment, the pressure P inside the gas supply device -gaxbox It is calculated using the following formula:

[0019] .

[0020] In one embodiment, the device further includes: an environmental sensor for monitoring environmental parameters of the external environment in which the gas supply device is located, and transmitting the environmental parameters to the controller; the controller is further configured to, if it detects that the environmental parameters match preset change conditions, trigger the determination of the difference between the current temperature and the target temperature based on the current temperature obtained by the temperature sensor, and output a new control signal to the motor based on the difference between the current temperature and the target temperature.

[0021] Secondly, this application provides an air intake volume control method, applied to the air intake volume control system as described in the first aspect above, the method comprising:

[0022] Obtain the temperature of the vaporizer in the gas supply equipment;

[0023] The difference between the temperature and the target temperature is determined, and a control signal is output to the motor based on the difference. The motor drives the air intake adjustment structure to move according to the control signal, thereby changing the air intake area of ​​the air inlet.

[0024] Thirdly, this application provides a gas supply device, comprising:

[0025] Vaporizer, air inlet, air outlet, motor, and airflow adjustment mechanism; and

[0026] Memory, on which computer instructions are stored;

[0027] A controller is used to execute computer instructions stored in the memory to implement the air intake control method as described in the second aspect.

[0028] In one embodiment, the air intake adjustment structure includes a fixed plate and a movable plate disposed at the air intake. The surface of the fixed plate is provided with a plurality of ventilation holes, and the movable plate is disposed parallel to the fixed plate and is used for reciprocating motion in the parallel direction of the fixed plate. Attached Figure Description

[0029] The accompanying drawings are included to provide a further understanding of this application; they are incorporated into and constitute a part of this application. The drawings illustrate embodiments of this application and, together with this specification, serve to explain the principles of this application. In the drawings:

[0030] Figure 1 This is a schematic diagram of an air intake control system provided in an embodiment of this application;

[0031] Figure 2 This is a schematic diagram of the structure of a gas supply device provided in an embodiment of this application;

[0032] Figure 3 This is a schematic diagram of an air intake volume adjustment structure provided in an embodiment of this application;

[0033] Figure 4 This is a flowchart illustrating an air intake volume control method provided in an embodiment of this application.

[0034] The reference numerals in the figure are as follows:

[0035] 10. Air intake control system;

[0036] 20. Gas supply equipment;

[0037] 200. Air inlet;

[0038] 201. Air outlet;

[0039] 11. Temperature sensor;

[0040] 12. Controller;

[0041] 13. Electric motor;

[0042] 14. Air intake volume adjustment structure;

[0043] 140. Fixing plate;

[0044] 141. Movable board;

[0045] 142. Ventilation opening;

[0046] 143. Scale lines. Detailed Implementation

[0047] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this application. For those skilled in the art, these drawings can be applied to other similar scenarios without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0048] As indicated in this application, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" do not specifically refer to the singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0049] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0050] Furthermore, although the terminology used in this application is selected from commonly known and used terms, some terms mentioned in this application's specification may have been chosen by the applicant according to his or her judgment, and their detailed meanings are explained in the relevant sections of the description herein. Moreover, this application is to be understood not only by the actual terms used, but also by the meaning implied by each term.

[0051] It should be understood that when a component is referred to as "on another component," "connected to another component," "coupled to another component," or "in contact with another component," it can be directly on, connected to, coupled to, or in contact with that other component, or there may be an inserting component. In contrast, when a component is referred to as "directly on another component," "directly connected to," "directly coupled to," or "directly in contact with" another component, there is no inserting component.

[0052] It should be noted that the terms "front," "rear," "up," "down," "left," "right," "longitudinal," and "lateral" used in this application are all based on the installation structure. Figure 1 The perspectives shown are for the purpose of facilitating and simplifying the description of this application, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this application.

[0053] As mentioned above, the air inlet and exhaust design of existing gas supply equipment adopts an empirical fixed design. The air inlet area is fixed and cannot be adjusted after the design is completed. This results in the internal flow field and pressure of the gas supply equipment being unadjustable and uncorrectable. Consequently, the convective heat transfer inside the gas supply equipment directly affects the temperature of the vaporizer and reduces the vaporization performance of the vaporizer.

[0054] To overcome the aforementioned deficiencies in the prior art, this application provides an air intake control system for gas supply equipment. (Reference) Figure 1 One embodiment of this application proposes an air intake control system 10, which is applied to... Figure 2 The gas supply device 20 shown is used to adjust the air inlet area of ​​the air inlet 200 of the gas supply device 20.

[0055] Combination Figure 1 and Figure 2 As shown, the air intake control system 10 includes a temperature sensor 11, a controller 12, a motor 13, and an air intake adjustment structure 14 located at the air intake 200 of the gas supply equipment 20. Specifically: the temperature sensor 11 collects the temperature of the vaporizer (not shown) in the gas supply equipment and transmits the collected temperature to the controller 12. The controller 12 determines the difference between the collected temperature (hereinafter referred to as the measured temperature) and the target temperature, and outputs a control signal to the motor based on this difference. The motor 13 drives the air intake adjustment structure 14 to move according to the control signal, changing the air intake area of ​​the air intake 200. In this way, the air intake area of ​​the air intake can be dynamically adjusted based on the difference between the measured temperature and the target temperature of the vaporizer, which helps to reduce the impact of internal convective heat transfer on the vaporizer temperature and ensures the vaporization performance of the vaporizer.

[0056] In some implementations, the controller 12 can operate according to a preset cycle, such as The system continuously acquires the difference between the current measured temperature and the target temperature, and continuously outputs a control signal to the motor 13 based on this difference. The motor 13 then drives the air intake adjustment structure 14 to move according to the control signal, changing the air intake area of ​​the air inlet 200 until the difference meets a preset difference condition. The preset difference condition can be, for example, 0℃ < difference < 5℃.

[0057] In some embodiments, the controller 12 is specifically configured to calculate a control quantity that reduces the difference between the measured temperature and the target temperature using a closed-loop control algorithm based on the difference feedback, and output a control signal to the motor according to the control quantity. Subsequently, the motor can rotate according to the control signal, thereby driving the air intake adjustment structure to move and changing the air intake area of ​​the air inlet.

[0058] In some embodiments, the closed-loop control algorithm described above can be, for example, a PID (Proportional Integration Differential) control algorithm or a PI (Proportional Integration Proportional-Integral) control algorithm, etc. Taking a PID control algorithm as an example, its corresponding calculation formula can be:

[0059] .

[0060] Where U(t) is the control quantity at time t; K p K is a proportionality coefficient, directly proportional to the error (i.e., the difference mentioned above); the larger the error, the larger the output. i K is the integral coefficient, which accumulates historical errors and eliminates steady-state errors; d The differential coefficient is used to predict the trend of error changes and suppress overshoot; e(t) is the difference between the measured temperature and the target temperature at time t. The goal of the PID control algorithm is to eliminate the error between the measured temperature and the target temperature, making the error as small as possible. For example, if the temperature error is +5℃, U(t) may be +100 (indicating that the motor needs to be adjusted in the forward direction and rotates forward), and if the temperature error is -3℃, U(t) may be -60 (indicating that the motor needs to be adjusted in the reverse direction and rotates in reverse).

[0061] In some embodiments, see Figure 1 and Figure 3 The air intake adjustment structure 14 includes a fixed plate 140 for covering the air intake and a movable plate 141 arranged parallel to the fixed plate 140. The surface of the fixed plate 140 is provided with a plurality of ventilation holes 142. The motor 13 is used to drive the movable plate 141 to move in a direction parallel to the fixed plate 140 according to the control signal, and adjust the overlapping area of ​​the movable plate 141 and the fixed plate 140.

[0062] For example, motor 13 rotates forward according to a control signal, which can drive the moving plate 141 to move parallel to the fixed plate 140 in a direction closer to it (e.g.) Figure 3 (Moving to the left), partially obscuring the ventilation opening 142, thereby reducing the air intake area of ​​the air inlet. For example, the motor 13 can reverse according to a control signal, driving the moving plate 141 to move parallel away from the fixed plate 140 (e.g., ...). Figure 3 (Move to the right) to reduce the obstruction of the ventilation opening 142, thereby increasing the air intake area of ​​the air inlet. The position of the movable plate 141 can be as follows: Figure 3 As shown, it is arranged parallel to one side of the fixing plate 140, but other arrangements are also possible, and this application does not specifically limit this.

[0063] In some embodiments, the air intake adjustment structure 14 may further include a lead screw (not shown) and a guide structure (not shown). The guide structure is used to limit the movement trajectory of the moving plate 141, for example, it can be a guide groove, disposed on both sides of the moving plate 141. The moving plate 141 can reciprocate in the parallel direction of the fixed plate 140 through the guide groove. The lead screw is connected to the output shaft of the motor and threadedly engaged with the moving plate 141. The forward and reverse rotation of the motor 13 controls the movement direction of the moving plate 141. When the motor rotates, the rotational movement can be converted into linear motion through the lead screw, driving the moving plate 141 to reciprocate in the parallel direction of the fixed plate 140.

[0064] Alternatively, in some embodiments, the air intake volume adjustment structure 14 may further include a gear and a rack, with the gear and rack meshing together, and the rack fixedly connected to the movable plate 141. The rotation of the motor 13 drives the gear to rotate, and the gear meshes with the rack, pushing the rack to move linearly, thereby driving the movable plate 141 to reciprocate in the direction parallel to the fixed plate 140. Alternatively, the air intake volume adjustment structure 14 may also include other transmission structures besides the lead screw, gear, and rack; this application is not limited to these, as long as they can drive the movable plate 141 to reciprocate in the direction parallel to the fixed plate 140.

[0065] In some embodiments, the air intake volume regulating structure 14, in addition to... Figure 3 Besides the structure shown where the movable plate 141 moves to change the air intake area, other structures may also be included. For example, the airflow regulating structure 14 may include a flexible baffle that is retracted and extended by a roller. A motor drives the roller to rotate, rolling up or releasing the baffle to change the air intake area. This application is not limited to this, as long as it is a structure that can change the air intake area.

[0066] In some embodiments, see Figure 2 The gas supply device 20 also includes an exhaust pipe for removing internal gas via a vacuum pump. This exhaust pipe includes a control valve, and the gas removed via the exhaust pipe can be discharged through an exhaust port 201. The vacuum pump is, for example, a vacuum pump, and the control valve is, for example, an electric butterfly valve. The controller 12 is also used to, after detecting that the above difference meets a preset difference condition, obtain the ratio μ between the air inlet area and the corresponding air outlet area of ​​the gas supply device 20, and the inlet pressure P of the air inlet. -in Flow conductance C of the control valve -out The pumping speed S of the air extraction equipment -pump And the correction factor K. Further, based on the ratio μ and the inlet pressure P of the air inlet... -in Flow conductance C of the control valve -out The pumping speed S of the air extraction equipment -pump And with correction factor K, calculate and output the internal pressure P of the gas supply device 20. -gaxbox Among them, C -out S reflects the smooth flow of gas through the control valve. -pump The pumping rate of the equipment reflects its ability to remove gas; the correction coefficient K is used to compensate for the deviation between the theoretical model and the actual operating conditions, and can be determined through experimental calibration, simulation, or historical data fitting. -in C -out S -pump All of these can be derived from the known mass conservation equation and conductance calculation equation.

[0067] For example, the pressure P inside the gas supply device 20 -gaxbox It is calculated using the following formula:

[0068] .

[0069] In some embodiments, the aforementioned air inlet area and air outlet area can be obtained by geometric mapping, three-dimensional modeling calculation or laser scanning measurement, thereby calculating the aforementioned ratio μ.

[0070] Alternatively, in other embodiments, see Figure 3 The surface of the fixed plate 140 is provided with scale lines 143. A linear relationship between each scale line and the aforementioned ratio μ is pre-established. After the controller 12 detects that the aforementioned difference meets the preset difference condition, it can obtain scale information through a sensor (e.g., by capturing an image through an image sensor). This scale information indicates which scale line of the fixed plate 140 is blocked by the moving plate 141. Furthermore, based on the pre-established linear relationship between each scale line and the ratio μ, the specific value of the current ratio μ is determined, and then substituted into the aforementioned pressure P. -gaxbox The calculation formula is used to calculate the pressure P inside the gas supply device 20. -gaxbox。

[0071] In some embodiments, the controller 12 can also determine the internal pressure P of the gas supply device. -gaxbox Does it match the safety pressure value? If not (e.g., P) -gaxbox＞ If the safe pressure value is specified, an abnormal pressure alarm will be output to facilitate relevant personnel in resolving the pressure anomaly. As a feasible method, the pressure P can also be... -gaxbox If the pressure does not match the safety pressure value, adjust the opening of the control valve and / or the pumping speed of the pumping equipment to adjust the internal pressure P of the gas supply equipment. -gaxbox For example, when the pressure P -gaxbox When the pressure exceeds the safe value, adjust the opening of the control valve to reduce the pressure or reduce the pumping speed of the pumping equipment, etc.

[0072] In some embodiments, the air intake control system may further include an environmental sensor for monitoring environmental parameters of the external environment in which the gas supply equipment is located and transmitting these parameters to the controller. Further, the controller is also configured to, if it detects that the environmental parameters match a preset change condition, trigger an execution to determine the difference between the current temperature and the target temperature based on the current temperature obtained by the temperature sensor, and output a new control signal to the motor based on the difference between the current temperature and the target temperature. The environmental parameters may include humidity, temperature, etc., and the preset change condition may be, for example, a humidity change exceeding a preset humidity change threshold, or a temperature change exceeding a preset temperature change threshold. In this way, when the external environment changes, the controller automatically triggers the execution to output a new control signal to the motor based on the difference between the current temperature and the target temperature. Then, the motor drives the air intake adjustment structure to move according to the new control signal, changing the air intake area of ​​the air inlet until the difference meets the preset difference condition. This ensures that the vaporization performance of the vaporizer is not affected by the external environment.

[0073] See Figure 4 This application provides an embodiment of an air intake volume control method, which is applied to the air intake volume control system mentioned in the above embodiment, and includes the following steps:

[0074] Step S40: Obtain the temperature of the vaporizer in the gas supply equipment.

[0075] Step S41: Determine the difference between the current temperature and the target temperature, and output a control signal to the motor based on the difference. The motor then drives the air intake adjustment structure to move according to the control signal, thereby changing the air intake area. For specific implementation details of steps S40 and S41, please refer to the descriptions in the above embodiments; they will not be repeated here.

[0076] One embodiment of this application discloses a gas supply device, including: a vaporizer, an air inlet, an air outlet, a motor, and an airflow adjustment structure; a memory storing computer instructions; and a controller for executing the computer instructions stored in the memory to implement the aforementioned airflow control method. The gas supply device can provide various gases to semiconductor process equipment (such as chemical vapor deposition equipment) and is applicable to multiple fields such as vacuum bonding in the panel industry, semiconductor chip packaging, microelectronic integrated circuits, precision optical component manufacturing, and solar photovoltaic production.

[0077] In some embodiments, the air intake adjustment structure includes a fixed plate and a movable plate disposed at the air intake. The surface of the fixed plate is provided with a plurality of ventilation holes, and the movable plate is disposed parallel to the fixed plate and is used to reciprocate in the parallel direction of the fixed plate.

[0078] It should be noted that the adjustment structure and driving principle of the air intake adjustment structure in the gas supply equipment can be found in the description of the relevant content in the above embodiments, and will not be repeated here.

[0079] The preceding description is provided to enable any person skilled in the art to practice the various aspects described herein. However, it should be understood that the scope of protection of this application should be determined by the appended claims and should not be limited to the specific structures and components of the embodiments described above. Those skilled in the art can make various changes and modifications to the embodiments within the spirit and scope of this application, and these changes and modifications also fall within the scope of protection of this application.

Claims

1. An air intake volume control system, characterized in that, The air intake control system, applied to gas supply equipment, includes: a temperature sensor, a controller, a motor, and an air intake adjustment structure located at the air intake of the gas supply equipment, wherein: The temperature sensor is used to collect the temperature of the vaporizer in the gas supply equipment and transmit the collected temperature to the controller; The controller is used to determine the difference between the temperature and the target temperature, and output a control signal to the motor based on the difference; The motor is used to drive the air intake volume adjustment structure to move according to the control signal, thereby changing the air intake area of ​​the air inlet.

2. The air intake control system as described in claim 1, wherein the air intake adjustment structure includes a fixed plate for covering the air intake and a movable plate arranged parallel to the fixed plate, the surface of the fixed plate is provided with a plurality of ventilation holes, and the motor is used to drive the movable plate to move in a direction parallel to the fixed plate according to the control signal, thereby adjusting the overlapping area of ​​the movable plate and the fixed plate.

3. The air intake control system as described in claim 2, wherein the air intake adjustment structure further includes a lead screw and a guide structure, the guide structure being used to limit the movement trajectory of the moving plate; the lead screw is connected to the output shaft of the motor and threadedly engaged with the moving plate, and the moving direction of the moving plate is controlled by the forward and reverse rotation of the motor.

4. The air intake control system as described in claim 1, wherein outputting a control signal to the motor based on the difference includes: The control quantity that reduces the difference is calculated based on the difference and the closed-loop control algorithm based on the difference feedback. A control signal is output to the motor according to the control quantity.

5. The air intake control system as described in claim 1, characterized in that, The gas supply equipment also includes an exhaust pipe that removes internal gas via a suction device, the exhaust pipe including a control valve, and the controller further being used for: After detecting that the difference meets the preset difference condition, the ratio μ between the air inlet area and the corresponding air outlet area of ​​the gas supply device, and the inlet pressure P of the air inlet are obtained. -in The flow conductance C of the control valve -out The pumping speed S of the aforementioned air extraction device -pump and correction factor K; Based on the ratio μ and the inlet pressure P of the air inlet. -in The flow conductance C of the control valve -out The pumping speed S of the aforementioned air extraction device -pump And with correction factor K, calculate and output the pressure P inside the gas supply device. -gaxbox .

6. The air intake control system as described in claim 5, characterized in that, The pressure P inside the gas supply device -gaxbox It is calculated using the following formula: 。 7. The air intake control system as described in claim 5, characterized in that, Also includes: An environmental sensor is used to monitor environmental parameters of the external environment in which the gas supply equipment is located, and to transmit the environmental parameters to the controller; The controller is further configured to, if it detects that the environmental parameters match the preset change conditions, trigger the execution of determining the difference between the current temperature and the target temperature based on the current temperature obtained by the temperature sensor, and output a new control signal to the motor based on the difference between the current temperature and the target temperature.

8. A method for controlling air intake volume, characterized in that, The method, applied to the air intake control system as described in any one of claims 1-7, comprises: Obtain the temperature of the vaporizer in the gas supply equipment; The difference between the temperature and the target temperature is determined, and a control signal is output to the motor based on the difference. The motor drives the air intake adjustment structure to move according to the control signal, thereby changing the air intake area of ​​the air inlet.

9. A gas supply device, characterized in that, include: Vaporizer, air inlet, air outlet, motor, and air volume adjustment structure; as well as Memory, on which computer instructions are stored; A controller is configured to execute computer instructions stored in the memory to implement the air intake control method as described in claim 8.

10. The gas supply device as described in claim 9, characterized in that, The air intake adjustment structure includes a fixed plate and a movable plate disposed at the air intake. The surface of the fixed plate is provided with a plurality of ventilation holes. The movable plate is disposed parallel to the fixed plate and is used for reciprocating motion in the parallel direction of the fixed plate.

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