Vacuum pinch traction roller mechanism, vacuum winding coating equipment and control method thereof

Abstract

The invention discloses a vacuum pinch traction roller mechanism, vacuum winding coating equipment and a control method thereof.The vacuum pinch traction roller mechanism comprises a traction roller, a rubber compression roller, a pressing mechanism arranged in a vacuum cavity and a reverse limiting mechanism arranged in the vacuum cavity, and the pressing mechanism comprises a first servo motor; the driving device is used for driving the rubber pressing roller to generate pressing force towards the traction roller; the reverse limiting mechanism comprises a second servo motor and is used for providing adjustable reverse limiting force for the rubber compression roller. Double servo motors are adopted for cooperative control, and the problems that a traditional air cylinder introduces gas into a vacuum cavity due to the sealing problem of a piston, and the vacuum degree is damaged are solved, and an operator cannot enter the vacuum cavity to conduct manual reverse limiting adjustment after the vacuum cavity operates in a closed mode are solved. The mechanism can accurately and adjustably control pressing force and reverse limiting force in a vacuum environment, so that a film is reliably clamped, and the film is prevented from slipping, deviating and wrinkling under high tension.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating equipment, in particular to a vacuum pinch-pulling roller mechanism, a vacuum winding coating equipment and a control method thereof. BACKGROUND

[0002] In the technical field of vacuum coating equipment, the winding system as a core component is crucial for the progress of vacuum coating technology. The winding system can realize a series of operations such as unwinding, conveying, coating and winding of flexible film substrates, which enables the vacuum coating technology to be applied in many fields such as electronics, optics, energy and other industries. Through precise winding and coating of the film, high-quality coated products can be produced to meet the needs of different industries for film performance and promote the development of related industries.

[0003] In existing vacuum coating equipment, in order to ensure the coating quality and winding effect, the tension of the film on the winding path is usually precisely controlled by adopting segmented tension control, and tension segmentation is the key to realizing segmented control. The traditional tension segmentation method mainly relies on a coating drum or a large-diameter pulling roller. As a driving roller, the pulling roller uses the friction between its surface and the film to pull the film and cut off the tension before and after. In a non-vacuum (atmospheric) environment, such as the papermaking or textile industry, to solve the problem of large tension, a "pinch roller" mechanism is generally used, which consists of a rigid pulling roller and a rubber-covered pressure roller. The rubber-covered pressure roller is pressed against the pulling roller by an actuator such as an air cylinder to increase the friction force and achieve reliable tension cutoff. At the same time, the operator can manually adjust the reverse limiting device on both sides of the rubber-covered pressure roller to prevent the film from wrinkling or deviating.

[0004] However, the existing technical means has obvious defects. When the production process requires extremely high winding tension, the required tension of the film may be greater than the maximum static friction force that the pulling roller can provide, causing the film to slip on the pulling roller, leading to chaos in the tension system and winding failure, and seriously affecting product quality. Moreover, the pinch roller mechanism in the atmospheric environment cannot be directly applied to the vacuum environment. The traditional air cylinder will introduce gas into the vacuum chamber due to the piston seal problem, which will destroy the vacuum degree. Moreover, after the vacuum chamber is closed for operation, the operator cannot manually adjust the reverse limiting device inside. SUMMARY

[0005] To solve the technical problems in the prior art, the present application provides a vacuum pinch-pulling roller mechanism, a vacuum winding coating equipment and a control method thereof.

[0006] The vacuum pinch-pulling roller mechanism, the vacuum winding coating equipment and the control method thereof provided by the present application adopt the following technical solutions: A vacuum pinch-pulling roller mechanism, comprising: A traction roller rotatably arranged in a vacuum chamber; A rubber pressing roller arranged in parallel with one side of the traction roller and used for clamping the film together with the traction roller; A pressing mechanism arranged in the vacuum chamber and used for driving the rubber pressing roller to press against the traction roller, the pressing mechanism comprising a first servo motor used for driving the rubber pressing roller to generate a pressing force against the traction roller; A reverse limiting mechanism arranged in the vacuum chamber and used for providing an adjustable reverse limiting force for the rubber pressing roller, the reverse limiting mechanism comprising a second servo motor used for adjusting a reverse limiting force applied by the reverse limiting mechanism to the rubber pressing roller.

[0007] In some embodiments, the vacuum chamber has a main wall plate with a through hole arranged on the main wall plate and used for connecting the vacuum chamber with the atmospheric side; The vacuum pinch traction roller mechanism further comprises a traction driving unit arranged on the atmospheric side and a sealing assembly, the traction driving unit comprising a traction motor, a speed reducer and a coupling, the output end of the traction motor being connected with the input end of the speed reducer, the output end of the speed reducer being connected with one end of the coupling, the other end of the coupling being connected with the central shaft of the traction roller, the central shaft passing through the through hole, and the sealing assembly being used for sealing the gap between the through hole and the central shaft.

[0008] In some embodiments, the pressing mechanism further comprises a mounting seat, a guide shaft, a pressing roller seat, an adjusting screw, a moving seat and a reverse spring, the guide shaft being fixed to the mounting seat, the pressing roller seat being used for rotatably mounting the rubber pressing roller, the adjusting screw being connected with the output end of the first servo motor, the moving seat being guided and matched with the guide shaft to limit its own rotation and being threadedly matched with the adjusting screw, so that when the adjusting screw rotates, the moving seat linearly slides along the guide shaft, and the reverse spring is arranged between the moving seat and the pressing roller seat and used for transmitting the movement of the moving seat to drive the pressing roller seat to generate the pressing force for the rubber pressing roller.

[0009] In some embodiments, a linear bearing is arranged on the pressing roller seat and the guide shaft passes through the linear bearing; and the pressing roller seat is connected with the moving seat through a sliding sheet.

[0010] In some embodiments, the reverse limiting mechanism further comprises a limiting screw, an inclined slider and a limiting bearing, the limiting screw is driven to rotate by the second servo motor; the inclined slider is in transmission connection with the limiting screw, and is used to translate when the limiting screw rotates; the limiting bearing is arranged at one end of the rubber compression roller; and the inclined slider abuts against the limiting bearing to provide the reverse limiting force.

[0011] In some embodiments, the first servo motor receives a position instruction and accurately controls the rotation angle of the adjusting screw through its built-in position loop control function, so as to drive the moving seat to generate a preset displacement x corresponding to the position instruction, and control the compression force F of the rubber compression roller by using the elastic coefficient k of the reverse spring, where F = kx. The first servo motor also monitors the output torque required for driving the adjusting screw in real time through its built-in torque loop function, so as to detect the compression force F. The torque loop function is configured to output an alarm signal when the monitored output torque exceeds a preset torque threshold corresponding to the upper limit of the compression force F.

[0012] In some embodiments, the vacuum pinch-pulling roller mechanism further comprises a pressure closed-loop control module, which is in communication connection with the first servo motor and is configured to execute the following instructions: During the process of pulling the film by the pulling roller, the output torque monitored in real time by the torque loop function of the first servo motor is obtained, and the output torque is taken as the actual measurement value of the compression force F. The actual measurement value is compared with a preset target compression force F target . According to the deviation between the actual measurement value and the target compression force F target , the position instruction x of the position loop control function is adjusted, so that the absolute value of the difference between the actual measurement value of the compression force F and the target compression force F target is less than a preset threshold.

[0013] In some embodiments, the compression mechanism further comprises a proximity sensor, which is fixedly arranged on the mounting seat and is used to sense the compression roller seat moving with the rubber compression roller; wherein the proximity sensor determines the pressing or lifting state of the rubber compression roller by detecting whether the compression roller seat is at a preset sensing position.

[0014] The application also provides a vacuum winding and coating equipment, comprising: A winding-off mechanism arranged in a vacuum chamber and used to release a film; A coating drum is arranged in the vacuum chamber and used to carry the film for coating; A cathode is arranged on the periphery of the coating drum and used for the coating; A winding mechanism is arranged in the vacuum chamber and used to wind the film; and The vacuum pinch-pulling roller mechanism is arranged on the film winding path between the coating drum and the winding mechanism and used to pinch and pull the film after the film is coated and before the film is wound.

[0015] The application further provides a control method of the vacuum winding and coating equipment, which is suitable for the vacuum winding and coating equipment and includes the following steps: During the film winding process, a film edge sensor arranged in the vacuum chamber is used to monitor the transverse edge position of the film in real time; The transverse edge position is compared with a preset target edge position to obtain an edge deviation signal Δe; According to the edge deviation signal Δe, the second servo motor at both ends of the rubber pressing roller is controlled to drive the inclined sliding block to apply the reverse limiting force with different intensities to the rubber pressing roller, so that the rubber pressing roller is angularly deflected, and the transverse edge position of the film tends to approach the target edge position.

[0016] In summary, the application has at least one of the following beneficial technical effects: 1. The first servo motor and the second servo motor are used for cooperative control, which replaces the traditional actuator such as a cylinder used in an atmospheric environment, fundamentally solves the problem that the traditional cylinder introduces gas into the vacuum chamber due to the piston sealing problem and destroys the vacuum degree, and enables the pinch roller mechanism to be reliably applied to a vacuum environment; 2. The pressure tightening mechanism actively presses the rubber pressing roller against the pulling roller, and the normal pressure is used to improve the friction force, so that reliable clamping and tension interruption of the film are realized, and the film is prevented from slipping; 3. The first servo motor is internally provided with a position loop control function, the displacement x is accurately controlled, the elastic coefficient k of the reverse spring is used to realize accurate open-loop control of the pressure tightening force F (F=kx), the second servo motor is used to drive the reverse limiting mechanism to provide adjustable reverse limiting force, and the double servo motor system solves the problem that the operator cannot manually adjust the reverse limiting force in the vacuum chamber after the traditional mechanism is closed; 4. The application further includes a pressure closed-loop control module. The torque loop function of the first servo motor is used to monitor the actual output torque (as an actual measurement value of the pressure tightening force) in real time, and the actual output torque is compared with a preset target pressure tightening force F targetBy comparing the values ​​and then adjusting the position commands of the servo motors according to the deviation, high-precision closed-loop control of the clamping force is achieved, which can compensate for the fluctuation of clamping force caused by uneven film thickness or spring fatigue in real time. 5. The control method of this application utilizes a film edge sensor installed in the vacuum chamber to monitor the lateral edge position of the film in real time. When the edge deviation signal △e is detected, the controller controls the second servo motors at both ends of the glue roller to apply reverse limit with different forces, causing the glue roller to deflect slightly and the film to approach the target edge position, thereby realizing closed-loop automatic correction and effectively preventing film deviation and wrinkling. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of a vacuum roll coating apparatus provided in one embodiment of this application; Figure 2 This is a three-dimensional structural diagram of the winding mechanism and vacuum clamping mechanism in the embodiments of this application; Figure 3 This is a schematic diagram of the traction drive unit in the embodiments of this application; Figure 4 This is a front structural diagram of the clamping mechanism and the traction roller in an embodiment of this application; Figure 5 This is a three-dimensional structural diagram of the clamping mechanism and the traction roller in an embodiment of this application; Figure 6 This is a side view of the clamping mechanism in the embodiments of this application; Figure 7 This is a schematic diagram of another side view of the clamping mechanism in the embodiments of this application; Figure 8 This is a three-dimensional structural diagram of the clamping mechanism in the embodiments of this application; Figure 9 This is a side view of the clamping mechanism (from another angle) in an embodiment of this application; Figure 10 This is a side view of the reverse limiting mechanism (using a second servo motor) in an embodiment of this application.

[0018] Explanation of reference numerals in the attached drawings: 1. Vacuum chamber; 11. Main wall panel; 12. Small wall panel; 2. Unwinding mechanism; 3. Coating drum; 4. Cathode; 5. Rewinding mechanism; 6. Vacuum clamping traction roller mechanism; 61. Traction roller; 62. Adhesive roller; 621. Adhesive roller bearing; 622. Limit bearing; 63. Pressing mechanism; 631. First servo motor; 632. Reducer; 633. Mounting base; 634. Guide shaft; 635. Pressure roller seat; 63 6. Adjusting screw; 637. Moving seat; 638. Reverse spring; 639. Linear bearing; 6310. Sliding plate; 6311. Proximity sensor; 64. Reverse limit mechanism; 641. Second servo motor; 642. Limit screw; 643. Inclined slider; 644. Reverse limit bearing; 65. Traction drive unit; 651. Traction motor; 652. Reducer; 653. Coupling; 654. Sealing assembly; 7. Roller. Detailed Implementation

[0019] The technical solutions in the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. The described embodiments are only possible technical implementations of the present invention, but are not limited thereto. Other embodiments obtained by those skilled in the art in conjunction with the embodiments of the present invention without creative effort are also within the protection scope of the present invention.

[0020] This application mainly adopts dual servo motors to coordinately control the pinch rollers, which solves the problem of high tension in vacuum, and achieves the effect of accurately controlling the clamping force and preventing film deviation in a vacuum environment, thus ensuring the winding quality. The following is a further detailed description of this application.

[0021] Example 1 Please refer to Figure 1 The vacuum clamping traction roller mechanism 6 provided in this embodiment includes a traction roller 61, a pressure roller 62, a clamping mechanism 63, and a reverse limiting mechanism 64. The traction roller 61 is rotatably disposed within the vacuum chamber 1, and the pressure roller 62 is disposed parallel to one side of the traction roller 61, together clamping the film. The clamping mechanism 63 is disposed within the vacuum chamber 1 and drives the pressure roller 62 to press against the traction roller 61. The reverse limiting mechanism 64 is also disposed within the vacuum chamber 1, providing an adjustable reverse limiting force for the pressure roller 62. This achieves reliable clamping and tension control of the film in a vacuum environment, preventing slippage, deviation, and wrinkling. This is because the coordinated operation of the dual servo motors (first servo motor 631 and second servo motor 641) solves the drawbacks of traditional cylinders in a vacuum environment and the inability to achieve manual adjustment, precisely controlling the clamping force and limiting force.

[0022] For details, please refer to Figure 3The traction roller 61 is driven to rotate by the traction drive unit 65. The traction drive unit 65 includes a traction motor 651, a reducer 652, and a coupling 653. The traction motor 651 can be a three-phase asynchronous motor, which has the advantages of simple structure, reliable operation, and convenient maintenance; the reducer 652 can be a planetary reducer, which has high transmission efficiency, small size, and large load capacity. The output end of the traction motor 651 is connected to the input end of the reducer 652, the output end of the reducer 652 is connected to one end of the coupling 653, and the other end of the coupling 653 is connected to the central shaft of the traction roller 61. The central shaft passes through a perforation on the main wall plate 11 from the atmospheric side to the vacuum side, and the other end of the traction roller 61 is rotatably supported on a small wall plate 12 on the inner wall of the vacuum chamber 1. A sealing component 654, such as a magnetohydrodynamic seal, is provided at the perforation, which can effectively maintain the vacuum level of the chamber while allowing the shaft to rotate. This connection structure and sealing method place the main power source outside the vacuum, simplifying the design inside the vacuum and avoiding potential problems that may arise with the power source in a vacuum environment.

[0023] For details, please refer to Figures 4 to 9The clamping mechanism 63 includes a mounting base 633, a fixed guide shaft 634, a pressure roller seat 635 for mounting the rubber pressure roller 62, an adjusting screw 636, a movable seat 637, and a reverse spring 638. The mounting base 633 can be made of cast iron, providing good stability and rigidity; the guide shaft 634 can be made of stainless steel with a polished surface to reduce friction. The output end of the first servo motor 631 is connected to the adjusting screw 636. The movable seat 637 engages with the guide shaft 634 on one hand, such as by providing a guide groove on the movable seat 637 to slide with the guide shaft 634 and limit its rotation; on the other hand, it engages with the adjusting screw 636 by thread. When the first servo motor 631 drives the adjusting screw 636 to rotate, the movable seat 637 slides linearly along the guide shaft 634. A reverse spring 638 is disposed between the movable seat 637 and the pressure roller seat 635. When the movable seat 637 moves, it compresses the reverse spring 638, and the spring then transmits the pressure to the pressure roller seat 635, thereby driving the rubber pressure roller 62 to generate a clamping force. The pressure roller seat 635 rotatably mounts the rubber pressure roller 62 via a rubber pressure roller bearing 621. A linear bearing 639 is provided on the pressure roller seat 635, through which the guide shaft 634 passes, ensuring the smoothness of the movement of the pressure roller seat 635. The pressure roller seat 635 is connected to the movable seat 637 via a sliding plate 6310. The sliding plate 6310 may be made of polytetrafluoroethylene, which has a low coefficient of friction and good wear resistance, allowing for relative movement between the two controlled by a spring. In addition, the clamping mechanism 63 also includes a proximity sensor 6311, which is fixedly disposed on the mounting base 633 for sensing the movement of the pressure roller seat 635 with the rubber pressure roller 62. The proximity sensor 6311 can be an inductive proximity sensor, which can determine the pressing or lifting state of the rubber roller 62 by detecting whether the pressure roller seat 635 is in a preset sensing position.

[0024] In a preferred embodiment, the first servo motor 631, through its built-in position loop control function, receives a position command and precisely controls the rotation angle of the adjusting screw 636 to drive the moving seat 637 to generate a preset displacement x corresponding to the position command. The spring constant k of the reverse spring 638 is then used to control the clamping force F of the rubber roller 62, where F = kx. This method of precisely controlling the displacement through a servo motor and then converting the displacement into force using an elastic element (reverse spring 638) achieves precise open-loop control of the clamping force. Simultaneously, the first servo motor 631, through its built-in torque loop function, monitors in real time the output torque required to drive the adjusting screw 636 to detect the clamping force F. The torque loop function is configured to output an alarm signal when the monitored output torque exceeds a preset torque threshold corresponding to the upper limit of the clamping force F, thus providing overload protection.

[0025] Furthermore, the vacuum clamping traction roller mechanism 6 also includes a pressure closed-loop control module. This module is communicatively connected to the first servo motor 631 and configured to execute the following instructions: during the traction of the film by the traction roller 61, acquire the output torque monitored in real-time by the torque loop function of the first servo motor 631, and use this output torque as the actual measured value of the clamping force F; compare the actual measured value with a preset target clamping force F. target Compare; based on the actual measured value and the target clamping force F target The deviation is adjusted by modifying the position command x of the position loop control function so that the actual measured value of the clamping force F is closer to the target clamping force F. target The absolute value of the difference is less than a preset threshold. The introduction of this pressure closed-loop control module enables the mechanism to compensate for clamping force fluctuations caused by uneven film thickness, fatigue of the reverse spring 638, or other disturbances in real time, achieving high-precision closed-loop control of the clamping force.

[0026] For details, please refer to Figure 9 and Figure 10 The reverse limiting mechanism 64 includes a limiting screw 642, a sliding block 643, a limiting bearing 622, and a reverse limiting bearing 644. The limiting screw 642 is driven to rotate by a second servo motor 641, which can be a stepper motor, providing precise control and good response performance. The sliding block 643 is connected to the limiting screw 642 via a nut, allowing it to translate as the limiting screw 642 rotates. The limiting bearing 622 is located at one end of the pressure roller 62. The sliding block 643 has a wedge-shaped inclined surface that abuts against the outer ring of the limiting bearing 622. When the second servo motor 641 drives the sliding block 643 to translate, the wedge-shaped surface converts the translational motion into a lateral thrust, i.e., a reverse limiting force, which is applied to the pressure roller 62.

[0027] The implementation principle of this embodiment is as follows: The vacuum clamping traction roller mechanism 6 achieves precise control of the clamping force and reverse limiting force of the adhesive roller 62 in a vacuum environment by employing the coordinated operation of a first servo motor 631 and a second servo motor 641. Placing the traction drive unit 65 on the atmospheric side simplifies the vacuum design and ensures the vacuum level. The rational design of the clamping mechanism 63 and the reverse limiting mechanism 64 ensures that the film can be reliably clamped, preventing slippage, deviation, and wrinkling, thereby improving the quality and stability of the rolled coating. This solves the shortcomings of existing technologies in high-tension winding and makes a significant contribution to the development of vacuum coating equipment technology.

[0028] Example 2 Please refer to Figure 1The vacuum roll coating equipment provided in this application includes an unwinding mechanism 2, a coating drum 3, a cathode 4, a winding mechanism 5, and a vacuum clamping traction roller mechanism 6 as described in the above embodiment. The unwinding mechanism 2 is disposed within the vacuum chamber 1 and is used to release the film. It can consist of an unwinding roller and a tension control device. The unwinding roller can be a metal roller with an anti-slip surface, and the tension control device can be a magnetic powder brake, which can precisely control the unwinding tension. Multiple guide rollers 7 are also provided along the film winding path to guide the film. The coating drum 3 is disposed within the vacuum chamber 1 and is used to carry the film for coating. The surface of the coating drum 3 can undergo special treatment, such as chrome plating, to improve surface smoothness and corrosion resistance. The cathode 4 is disposed around the periphery of the coating drum 3 for coating. The cathode 4 can be a magnetron sputtering cathode, which can efficiently perform the coating operation. The winding mechanism 5 is located inside the vacuum chamber 1 and is used to wind up the film. The winding mechanism 5 includes a winding roller and a winding tension control device. The winding roller can also be a metal roller, and the winding tension control device can be a combination of a servo motor and a reducer, which can precisely control the winding tension. The vacuum clamping traction roller mechanism 6 is located on the film winding path between the coating drum 3 and the winding mechanism 5, and is used to clamp and traction the film after coating and before winding.

[0029] The implementation principle of this embodiment is as follows: This vacuum roll-to-roll coating equipment achieves effective segmentation and control of film tension through the rational arrangement of various mechanisms and the use of the vacuum clamping traction roller mechanism 6. The unwinding mechanism 2 and the winding mechanism 5 precisely control the film tension, and the coating drum 3 and cathode 4 complete the high-quality coating operation. The vacuum clamping traction roller mechanism 6 plays a crucial role in tension interruption and film clamping in the middle, ensuring the stability of the tension in the coating area, improving the coating quality and winding effect, solving the problem of high-tension winding in existing vacuum roll-to-roll coating equipment, and improving the performance and reliability of the entire equipment.

[0030] Example 3 Please refer to Figure 1 , Figure 9 and Figure 10 The control method for the vacuum roll coating equipment provided in this application embodiment is applicable to the vacuum roll coating equipment as described in Embodiment 2, and includes the following steps: S1, Monitoring: During the film winding process, the lateral edge position of the film is monitored in real time by a film edge sensor installed in the vacuum chamber 1. The film edge sensor can be a CCD sensor, which features high resolution and fast response; or it can be an infrared sensor, which can adapt to different environmental conditions. The film edge sensor is installed in a suitable position, such as near the adhesive roller 62, to accurately monitor the film edge.

[0031] S2, Comparison: The controller compares the "lateral edge position" obtained by the thin-film edge sensor with a "preset target edge position," such as the centerline, to obtain an "edge deviation signal Δe." The controller can be a PLC controller, which has powerful logic operation and control capabilities.

[0032] S3, Control and Execution: Based on the magnitude and direction of the "edge deviation signal Δe," the controller, for example through a PID algorithm, sends control signals, typically differential signals, to the second servo motors 641 at both ends of the adhesive roller 62. The second servo motors 641 then drive their respective inclined sliders 643 to apply opposite limiting forces of varying strengths, causing the adhesive roller 62 to deflect slightly at an angle, thereby "turning" the film so that its lateral edge position approaches the target edge position, achieving closed-loop automatic deviation correction.

[0033] The implementation principle of this embodiment is as follows: This control method monitors the edge position of the film in real time, compares it with the target position, and precisely controls the application of unequal reverse limiting forces at both ends of the adhesive roller 62 based on the deviation signal, causing it to deflect at a slight angle, thus achieving closed-loop automatic correction of the film. This greatly improves the stability and yield of winding, effectively preventing problems such as film wrinkling and uneven cores. It is an advanced control scheme that solves the shortcomings of traditional manual adjustment or open-loop control, and enhances the intelligence and automation level of vacuum winding coating equipment.

[0034] The specific embodiments described above do not constitute a limitation on the scope of protection of this application. Any other corresponding changes and modifications made based on the technical concept of this application should be included within the scope of protection of this application.

Claims

1. A vacuum clamping traction roller mechanism, characterized in that, include: A traction roller (61) is rotatably disposed in a vacuum chamber (1); A pressure roller (62) is arranged parallel to one side of the traction roller (61) and is used to clamp the film together with the traction roller (61); A pressing mechanism (63) is disposed in the vacuum chamber (1) for driving the adhesive roller (62) to press against the traction roller (61). The pressing mechanism (63) includes a first servo motor (631) for driving the adhesive roller (62) to generate a pressing force against the traction roller (61). A reverse limiting mechanism (64) is disposed in the vacuum chamber (1) for providing an adjustable reverse limiting force to the adhesive roller (62). The reverse limiting mechanism (64) includes a second servo motor (641) for adjusting the reverse limiting force applied by the reverse limiting mechanism (64) to the adhesive roller (62).

2. The vacuum pinch traction roller mechanism according to claim 1, characterized in that, The vacuum chamber (1) has a main wall panel (11), and the main wall panel (11) has a perforation for connecting the vacuum chamber (1) with the atmosphere. The vacuum clamping traction roller mechanism (6) further includes a traction drive unit (65) and a sealing assembly (654). The traction drive unit (65) is located on the atmospheric side. The traction drive unit (65) includes a traction motor (651), a reducer (652), and a coupling (653). The output end of the traction motor (651) is connected to the input end of the reducer (652). The output end of the reducer (652) is connected to one end of the coupling (653). The other end of the coupling (653) is connected to the central shaft of the traction roller (61). The central shaft passes through the perforation. The sealing assembly (654) is used to seal the gap between the perforation and the central shaft.

3. The vacuum pinch traction roller mechanism according to claim 1, characterized in that, The pressing mechanism (63) further includes a mounting base (633), a guide shaft (634), a pressure roller seat (635), an adjusting screw (636), a movable seat (637), and a reverse spring (638). The guide shaft (634) is fixed to the mounting base (633), the pressure roller seat (635) is used to rotatably mount the rubber pressure roller (62), the adjusting screw (636) is connected to the output end of the first servo motor (631), and the movable seat (637) is connected to the guide shaft (638). The guide shaft (634) is engaged to restrict its own rotation and is threaded with the adjusting screw (636), so that when the adjusting screw (636) rotates, the movable seat (637) slides linearly along the guide shaft (634); the reverse spring (638) is disposed between the movable seat (637) and the pressure roller seat (635) to transmit the movement of the movable seat (637) so that the pressure roller seat (635) drives the rubber pressure roller (62) to generate a pressing force.

4. The vacuum pinch traction roller mechanism according to claim 3, characterized in that, A linear bearing (639) is provided on the pressure roller seat (635), and the guide shaft (634) passes through the linear bearing (639); the pressure roller seat (635) is connected to the movable seat (637) through a sliding piece (6310).

5. The vacuum pinch traction roller mechanism according to claim 1, characterized in that, The reverse limiting mechanism (64) further includes a limiting screw (642), a sliding block (643), and a limiting bearing (622). The limiting screw (642) is driven to rotate by the second servo motor (641). The sliding block (643) is connected to the limiting screw (642) and is used to translate when the limiting screw (642) rotates. The limiting bearing (622) is located at one end of the rubber roller (62). The sliding block (643) abuts against the limiting bearing (622) to provide the reverse limiting force.

6. The vacuum pinch traction roller mechanism according to claim 3, characterized in that, The first servo motor (631) receives a position command through its built-in position loop control function and precisely controls the rotation angle of the adjusting screw (636) to drive the moving seat (637) to generate a preset displacement x corresponding to the position command, and uses the elastic coefficient k of the reverse spring (638) to control the pressing force F of the rubber roller (62), where F=kx; The first servo motor (631) also monitors the output torque required to drive the adjusting screw (636) in real time through its built-in torque loop function to detect the clamping force F; the torque loop function is configured to output an alarm signal when the monitored output torque exceeds a preset torque threshold corresponding to the upper limit of the clamping force F.

7. The vacuum pinch traction roller mechanism according to claim 6, characterized in that, The vacuum clamping traction roller mechanism (6) further includes a pressure closed-loop control module, which is communicatively connected to the first servo motor (631) and configured to execute the following instructions: During the process of the traction roller (61) traction film, the output torque monitored in real time by the torque loop function of the first servo motor (631) is obtained, and the output torque is used as the actual measured value of the clamping force F; The actual measured value is compared with a preset target clamping force F. target Compare; Based on the actual measured value and the target clamping force F target The deviation is adjusted by modifying the position command x of the position loop control function so that the actual measured value of the clamping force F is closer to the target clamping force F. target The absolute value of the difference is less than the preset threshold.

8. The vacuum pinch traction roller mechanism according to claim 3, characterized in that, The pressing mechanism (63) further includes a proximity sensor (6311), which is fixedly mounted on the mounting base (633) and used to sense the pressure roller seat (635) that moves with the rubber pressure roller (62); wherein, the proximity sensor (6311) determines the pressing or lifting state of the rubber pressure roller (62) by detecting whether the pressure roller seat (635) is in a preset sensing position.

9. A vacuum roll-to-roll coating apparatus, characterized in that, include: An unwinding mechanism (2) is installed inside the vacuum chamber (1) and is used to release the film; A coating drum (3) is disposed in the vacuum chamber (1) and is used to carry the thin film for coating. A cathode (4) is disposed on the periphery of the coating drum (3) for coating; A winding mechanism (5) is disposed in the vacuum chamber (1) for winding the film; And the vacuum clamping traction roller mechanism (6) as described in claim 5, wherein the vacuum clamping traction roller mechanism (6) is disposed on the film winding path between the coating drum (3) and the winding mechanism (5) for clamping and traction of the film after coating and before winding.

10. A control method for a vacuum roll-to-roll coating apparatus, characterized in that, Suitable for the vacuum roll-to-roll coating apparatus as described in claim 9, and comprising: During the film winding process, the lateral edge position of the film is monitored in real time by a film edge sensor installed in the vacuum chamber (1); The lateral edge position is compared with the preset target edge position to obtain an edge deviation signal Δe; According to the edge deviation signal △e, the second servo motors (641) at both ends of the adhesive roller (62) are controlled to drive the inclined slider (643) to apply a reverse limiting force of unequal force to the adhesive roller (62), so that the adhesive roller (62) deflects at an angle so that the lateral edge position of the film approaches the target edge position.

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