Double-layer sealing door device of ultrahigh vacuum evaporation machine

Abstract

This invention proposes a double-layer sealing door device for an ultra-high vacuum evaporation coating machine, including a processing chamber. A sealing door is provided on the outer side of the processing chamber, and the two are connected by a hinge assembly. A sealing area is provided on the outer end face of the processing chamber, and at least one evacuation hole is opened in this area. An inner sealing ring and an outer sealing ring are arranged sequentially on the inner side of the sealing door. When closed, the inner and outer sealing rings simultaneously press against the sealing area to form an annular vacuum chamber. The evacuation hole is located inside the vacuum chamber and is used to independently evacuate the chamber to form a secondary seal. Through the coordinated design of the inner and outer double sealing rings and the vacuum chamber, a transition vacuum zone is constructed between the sealing door and the processing chamber, making the pressure difference between the inside and outside of the door approach zero, significantly reducing the stress deformation of the sealing rings and extending their service life. At the same time, the double vacuum barrier greatly reduces the leakage rate of the main chamber and improves the sealing reliability.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation coating machine technology, and more specifically, to a double-layer sealing door device for an ultra-high vacuum evaporation coating machine. Background Technology

[0002] Vacuum coating machines mainly refer to a type of coating that needs to be carried out under high vacuum. There are many types, and sputtering coating is a common coating method. Sputtering coating uses electrons or high-energy lasers to bombard the target material and sputter the surface components in the form of atomic groups or ions, which are then deposited on the substrate surface and undergo a film formation process to finally form a thin film.

[0003] The existing vacuum coating machine sealing doors have the following main defects:

[0004] (1) Most equipment uses a single sealing structure (such as rubber O-rings or metal gaskets), which makes it difficult to balance elastic compensation and ultra-high vacuum sealing requirements. Under long-term high temperature, it is prone to aging and deformation, resulting in increased leakage rate and affecting coating purity.

[0005] (2) A single sealing structure has poor sealing performance, which can meet the high vacuum requirements.

[0006] Therefore, there is an urgent need for a highly airtight and adaptable double-sealed door device for an ultra-high vacuum evaporation machine. Utility Model Content

[0007] In view of this, in order to solve the above problems, this utility model proposes a double-layer sealing door device for an ultra-high vacuum evaporation machine with high sealing performance and high adaptability.

[0008] A double-sealed door device for an ultra-high vacuum evaporation coating machine, comprising a processing chamber 1, characterized in that:

[0009] The processing chamber 1 is provided with a sealing door 2 on the outside, and the two are connected by a hinge assembly 3;

[0010] The outer end face of the processing chamber 1 is provided with a sealing area 4, and at least one air extraction hole 5 is provided in the area;

[0011] The inner sealing ring 21 and the outer sealing ring 22 are arranged in sequence on the inner side of the sealing door 2. When closed, the inner sealing ring 21 and the outer sealing ring 22 simultaneously press the sealing area 4 to form an annular vacuum chamber 23.

[0012] The evacuation port 5 is located within the vacuum chamber 23 and is used to independently evacuate the chamber to form a secondary seal. The vacuum chamber 23, formed by the inner sealing ring 21 and the outer sealing ring 22, establishes a transition vacuum zone between them, significantly reducing the risk of main vacuum leakage in the processing chamber 1. The independent vacuum design makes the pressure difference between the inside and outside of the sealing door 2 approach zero, reducing the stress and deformation of the inner and outer sealing rings 21 and 22, and extending their service life.

[0013] In some embodiments, the hinge assembly 3 includes a first fixing block 31, a hinge pin 32, a hinge pin 33, a second fixing block 34, a bushing 35, and an adjusting spring 36.

[0014] The sealing door 2 is provided with a first fixing block 31 on each of the upper and lower sides of the end face facing away from the processing chamber 1. The first fixing block 31 is fixed to the sealing door 2 by screws, and the end of the first fixing block 31 is provided with a connecting part 311.

[0015] The processing chamber 1 has a second fixing block 34 at corresponding positions on the upper and lower sides of the side wall, and an adjustment and installation port is opened in the middle of the second fixing block 34.

[0016] The bushing 35 is fitted into the adjustment mounting port, and the hinge pin 33 passes through the bushing 35 and is fixedly connected to the connecting part 311 by the hinge pin 32. An adjusting spring 36 is fitted onto one end of the hinge pin 33 that extends out of the bushing 35. The two ends of the adjusting spring 36 abut against the end face of the bushing 35 and the limiting end cap 331 of the hinge pin 33, respectively. The adjusting spring 36 automatically compensates for the thermal deformation difference between the processing chamber 1 and the sealing door 2 (the temperature difference during the vapor deposition process exceeds 200°C), avoiding gaps on the sealing surface due to thermal expansion and contraction. The floating fit between the hinge pin 33 and the bushing 35 allows the sealing door 2 to adaptively fit the sealing surface when closed, improving the uniformity of pressure distribution.

[0017] In some embodiments, the distance between the inner sealing ring 21 and the outer sealing ring 22 is 8-12 mm, and the ratio of the volume of the vacuum chamber 23 to the diameter of the evacuation port 5 is 200:1 to 0:1. The 8-12 mm narrow gap design minimizes the volume of the vacuum chamber 23, reducing the evacuation time to 3-5 seconds (compared to over 15 seconds for traditional wide gap designs). Simultaneously, the volume / diameter ratio of 200:1 to 300:1 ensures a balance between evacuation speed and sealing reliability, preventing the sealing ring from vibrating and falling off due to excessive evacuation speed.

[0018] In some embodiments, the evacuation port 5 is connected to a vacuum pump assembly, and its pipeline is connected in series with a vacuum gauge to monitor the vacuum level of the vacuum chamber 23 in real time.

[0019] In some embodiments, the inner sealing ring 21 is made of metal wire-reinforced fluororubber, and the outer sealing ring 22 is an oxygen-free copper knife-edge sealing ring; the pre-compression of the inner sealing ring 21 is 12±2% higher than that of the outer sealing ring 22. The inner fluororubber ring is preferentially compressed to form an elastic sealing layer, compensating for microscopic unevenness, while the outer oxygen-free copper knife-edge seal provides rigid support, withstanding high-temperature baking above 150°C and improving service life. Simultaneously, the 12±2% compression difference ensures that the inner ring contacts the seal first, preventing particulate contaminants from entering the knife-edge sealing area 4.

[0020] In some embodiments, the edge of the sealed door 2 is also provided with a pressure sensor, which triggers a mechanical locking mechanism to prevent the door from opening when the vacuum level of the vacuum chamber 23 is lower than a set threshold.

[0021] In some embodiments, the inner sealing ring 21 and the outer sealing ring 22 are respectively embedded in the dovetail grooves inside the sealing door 2, and the depth of the dovetail grooves is 0.8-0.9 times the diameter of the sealing rings; this ensures the sealing rings' resistance to extrusion and avoids deformation under ultra-high vacuum conditions. The dovetail groove depth ratio (0.8-0.9 times the diameter) provides radial constraint force at the bottom of the sealing rings, improving performance under ultra-high vacuum (<10) conditions. -6 (Pa) resistance to extrusion under working conditions.

[0022] In some embodiments, the adjustment mounting port is an elongated oval hole structure, and the outer wall of the bushing 35 is clearance-fitted with the inner wall of the adjustment mounting port. The elongated oval hole and clearance fit allow for ±0.5mm level fine-tuning of the sealing door 2 position, addressing the needs of large cavities (>1m). 2 Assembly cumulative error.

[0023] In some embodiments, the second fixing block 34 is further provided with a set screw on its side for locking the position of the bushing 35. By tightening the set screw on the side of the second fixing block 34, the position of the bushing 35 within the elongated hole can be locked. The set screw locking mechanism prevents hinge displacement due to equipment vibration, maintaining long-term sealing stability.

[0024] The beneficial effects of this utility model are as follows: This utility model proposes a double-layer sealing door device for an ultra-high vacuum evaporation coating machine, including a processing chamber 1, a sealing door 2 on the outside of the processing chamber 1, and the two connected by a hinge assembly 3; a sealing area 4 is provided on the outer end face of the processing chamber 1, and at least one evacuation hole 5 is opened in this area; an inner sealing ring 21 and an outer sealing ring 22 are arranged sequentially on the inner side of the sealing door 2. When closed, the inner sealing ring 21 and the outer sealing ring 22 simultaneously press against the sealing area 4 to form an annular vacuum chamber 23; the evacuation hole 5 is located inside the vacuum chamber 23 and is used to independently evacuate the chamber to form a secondary seal. Through the coordinated design of the inner and outer double sealing rings and the vacuum chamber, a transition vacuum zone is constructed between the sealing door and the processing chamber, so that the pressure difference between the inside and outside of the door approaches zero, significantly reducing the stress deformation of the sealing ring and extending its service life; at the same time, the double vacuum barrier greatly reduces the leakage rate of the main chamber and improves the sealing reliability. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the double-layer sealing door device of the ultra-high vacuum evaporation machine of this utility model.

[0026] Figure 2 This is a partially enlarged structural diagram of the double-layer sealing door device of the ultra-high vacuum evaporation machine of this utility model.

[0027] Figure 3 This is a schematic diagram of the double-layer sealing door device of the ultra-high vacuum evaporation machine of this utility model in the open state.

[0028] Explanation of main component symbols

[0029] Processing chamber 1, sealing door 2, inner sealing ring 21, outer sealing ring 22, vacuum chamber 23, hinge assembly 3, first fixing block 31, connecting part 311, hinge pin 32, hinge pin 33, limit end cap 331, second fixing block 34, bushing 35, adjusting spring 36, sealing area 4, air extraction hole 5.

[0030] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation Example:

[0031] like Figure 1 The diagram shown is a structural schematic of the double-layer sealing door device of the ultra-high vacuum evaporation deposition machine of this utility model; as shown... Figure 2 The diagram shown is a partially enlarged structural schematic of the double-layer sealing door device of the ultra-high vacuum evaporation deposition machine of this utility model; as shown... Figure 3 The diagram shown is a schematic diagram of the double-layer sealing door device of the ultra-high vacuum evaporation machine of this utility model in the open state.

[0032] A double-sealed door device for an ultra-high vacuum evaporation coating machine, comprising a processing chamber 1, characterized in that:

[0033] The processing chamber 1 is provided with a sealing door 2 on the outside, and the two are connected by a hinge assembly 3;

[0034] The outer end face of the processing chamber 1 is provided with a sealing area 4, and at least one air extraction hole 5 is provided in the area;

[0035] The inner sealing ring 21 and the outer sealing ring 22 are arranged in sequence on the inner side of the sealing door 2. When closed, the inner sealing ring 21 and the outer sealing ring 22 simultaneously press the sealing area 4 to form an annular vacuum chamber 23.

[0036] The evacuation port 5 is located within the vacuum chamber 23 and is used to independently evacuate the chamber to form a secondary seal. The vacuum chamber 23, formed by the inner sealing ring 21 and the outer sealing ring 22, establishes a transition vacuum zone between them, significantly reducing the risk of main vacuum leakage in the processing chamber 1. The independent vacuum design makes the pressure difference between the inside and outside of the sealing door 2 approach zero, reducing the stress and deformation of the inner and outer sealing rings 21 and 22, and extending their service life.

[0037] The hinge assembly 3 includes a first fixing block 31, a hinge pin 32, a hinge pin 33, a second fixing block 34, a bushing 35, and an adjusting spring 36. The sealing door 2 has a first fixing block 31 on each of its upper and lower sides facing away from the processing chamber 1. The first fixing blocks 31 are fixed to the sealing door 2 by screws, and a connecting portion 311 is provided at the end of each first fixing block 31. The processing chamber 1 has a second fixing block 34 at corresponding positions on its sidewalls, with an adjustment mounting port in the middle of each second fixing block 34. The bushing 35 is fitted into the adjustment mounting port, and the hinge pin 33 passes through the bushing 35 and is fixedly connected to the connecting portion 311 by the hinge pin 32. An adjusting spring 36 is fitted onto one end of the hinge pin 33 extending out of the bushing 35, and the two ends of the adjusting spring 36 abut against the end face of the bushing 35 and the limiting end cap 331 of the hinge pin 33, respectively. Among them, the adjusting spring 36 automatically compensates for the thermal deformation difference between the processing chamber 1 and the sealing door 2 (the temperature difference during the vapor deposition process exceeds 200℃), avoiding gaps on the sealing surface due to thermal expansion and contraction. The floating fit between the hinge pin 33 and the bushing 35 enables the sealing door 2 to adaptively fit the sealing surface when closed, improving the uniformity of pressure distribution.

[0038] The distance between the inner sealing ring 21 and the outer sealing ring 22 is 8-12 mm, and the ratio of the volume of the vacuum chamber 23 to the diameter of the evacuation port 5 is 200:1 to 0:1. The 8-12 mm narrow gap design minimizes the volume of the vacuum chamber 23, reducing the evacuation time to 3-5 seconds (compared to over 15 seconds for traditional wide gap designs). Simultaneously, the volume / diameter ratio of 200:1 to 300:1 ensures a balance between evacuation speed and sealing reliability, preventing the sealing ring from vibrating and falling off due to excessive evacuation speed.

[0039] The evacuation port 5 is connected to a vacuum pump unit, and its pipeline is connected in series with a vacuum gauge to monitor the vacuum level of the vacuum chamber 23 in real time.

[0040] The inner sealing ring 21 is made of metal wire-reinforced fluororubber, and the outer sealing ring 22 is an oxygen-free copper knife-edge sealing ring. The pre-compression of the inner sealing ring 21 is 12±2% higher than that of the outer sealing ring 22. The inner fluororubber ring is preferentially compressed to form an elastic sealing layer, compensating for microscopic unevenness. The outer oxygen-free copper knife-edge seal provides rigid support, withstands high-temperature baking above 150℃, and improves service life. Simultaneously, the 12±2% compression difference ensures that the inner ring contacts the seal first, preventing particulate contaminants from entering the knife-edge sealing area 4.

[0041] The edge of the sealed door 2 is also equipped with a pressure sensor. When the vacuum level of the vacuum chamber 23 is lower than the set threshold, the mechanical locking mechanism is triggered to prevent the door from opening.

[0042] The inner sealing ring 21 and the outer sealing ring 22 are respectively embedded in the dovetail grooves on the inner side of the sealing door 2. The depth of the dovetail groove is 0.8-0.9 times the diameter of the sealing ring; this ensures the sealing ring's resistance to extrusion and avoids deformation under ultra-high vacuum conditions. The dovetail groove depth ratio (0.8-0.9 times the diameter) provides radial constraint force at the bottom of the sealing ring, improving performance under ultra-high vacuum (<10) conditions. -6 (Pa) resistance to extrusion under working conditions.

[0043] The adjustment mounting port is an elongated oval hole structure, and the outer wall of the bushing 35 is clearance-fitted with the inner wall of the adjustment mounting port. The elongated oval hole and clearance fit allow for ±0.5mm level fine-tuning of the sealing door 2 position, solving the problem of large cavities (>1m). 2 Assembly cumulative error.

[0044] The second fixing block 34 is also provided with a set screw on its side for locking the position of the bushing 35. By tightening the set screw on the side of the second fixing block 34, the position of the bushing 35 in the elongated hole can be locked. The set screw locking mechanism prevents the hinge from shifting due to equipment vibration and maintains long-term sealing stability.

[0045] The beneficial effects of this utility model are as follows: This utility model proposes a double-layer sealing door device for an ultra-high vacuum evaporation coating machine, including a processing chamber 1, a sealing door 2 on the outside of the processing chamber 1, and the two connected by a hinge assembly 3; a sealing area 4 is provided on the outer end face of the processing chamber 1, and at least one evacuation hole 5 is opened in this area; an inner sealing ring 21 and an outer sealing ring 22 are arranged sequentially on the inner side of the sealing door 2. When closed, the inner sealing ring 21 and the outer sealing ring 22 simultaneously press against the sealing area 4 to form an annular vacuum chamber 23; the evacuation hole 5 is located inside the vacuum chamber 23 and is used to independently evacuate the chamber to form a secondary seal. Through the coordinated design of the inner and outer double sealing rings and the vacuum chamber, a transition vacuum zone is constructed between the sealing door and the processing chamber, so that the pressure difference between the inside and outside of the door approaches zero, significantly reducing the stress deformation of the sealing ring and extending its service life; at the same time, the double vacuum barrier greatly reduces the leakage rate of the main chamber and improves the sealing reliability.

[0046] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A double-sealed door device for an ultra-high vacuum evaporation coating machine, comprising a processing chamber (1), characterized in that: The processing chamber (1) is provided with a sealed door (2) on the outside, and the two are connected by a hinge assembly (3); The outer end face of the processing chamber (1) is provided with a sealing area (4), and at least one air extraction hole (5) is opened in the area. The inner sealing ring (21) and the outer sealing ring (22) are arranged in sequence on the inner side of the sealing door (2). When closed, the inner sealing ring (21) and the outer sealing ring (22) press the sealing area (4) together to form an annular vacuum chamber (23). The air extraction port (5) is located inside the vacuum chamber (23) and is used to independently evacuate the chamber to form a secondary seal.

2. The double-layer sealing door device of the ultra-high vacuum evaporation deposition machine as described in claim 1, characterized in that: The hinge assembly (3) includes a first fixing block (31), a hinge pin (32), a hinge pin (33), a second fixing block (34), a bushing (35), and an adjusting spring (36). The sealing door (2) has a first fixing block (31) on each of the upper and lower sides of the end face facing away from the processing chamber (1). The first fixing block (31) is fixed to the sealing door (2) by screws. The end of the first fixing block (31) is provided with a connecting part (311). The processing chamber (1) has a second fixing block (34) at the upper and lower corresponding positions on the side wall, and an adjustment and installation port is opened in the middle of the second fixing block (34); The bushing (35) is fitted into the adjustment mounting port, and the hinge pin (33) passes through the bushing (35) and is fixedly connected to the connecting part (311) by the hinge pin (32); an adjusting spring (36) is sleeved on one end of the hinge pin (33) that extends out of the bushing (35), and the two ends of the adjusting spring (36) abut against the end face of the bushing (35) and the limiting end cap (331) of the hinge pin (33) respectively.

3. The double-layer sealing door device of the ultra-high vacuum evaporation deposition machine as described in claim 1, characterized in that: The distance between the inner sealing ring (21) and the outer sealing ring (22) is 8-12 mm, and the ratio of the volume of the vacuum chamber (23) to the diameter of the air extraction hole (5) is 200:1 to 0:

1.

4. The double-layer sealing door device of the ultra-high vacuum evaporation deposition machine as described in claim 1, characterized in that: The air extraction port (5) is connected to a vacuum pump group, and its pipeline is connected in series with a vacuum gauge to monitor the vacuum level of the vacuum chamber (23) in real time.

5. The double-layer sealing door device of the ultra-high vacuum evaporation coating machine as described in claim 1, characterized in that: The inner sealing ring (21) is made of metal wire reinforced fluororubber, and the outer sealing ring (22) is an oxygen-free copper knife-edge sealing ring; the pre-compression of the inner sealing ring (21) is 12±2% higher than that of the outer sealing ring (22).

6. The double-layer sealing door device of the ultra-high vacuum evaporation deposition machine as described in claim 1, characterized in that: The edge of the sealed door (2) is also equipped with a pressure sensor. When the vacuum level of the vacuum chamber (23) is lower than the set threshold, the mechanical locking mechanism is triggered to prevent the door from opening.

7. The double-layer sealing door device of the ultra-high vacuum evaporation deposition machine as described in claim 1, characterized in that: The inner sealing ring (21) and the outer sealing ring (22) are respectively embedded in the dovetail groove inside the sealing door (2), and the depth of the dovetail groove is 0.8-0.9 times the diameter of the sealing ring; to ensure the sealing ring's anti-extrusion ability and avoid deformation under ultra-high vacuum conditions.

8. The double-layer sealing door device of the ultra-high vacuum evaporation deposition machine as described in claim 2, characterized in that: The adjustment mounting port is an elongated hole structure, and the outer wall of the bushing (35) is clearance-fitted with the inner wall of the adjustment mounting port.

9. The double-layer sealing door device of the ultra-high vacuum evaporation deposition machine as described in claim 2, characterized in that: The second fixing block (34) is also provided with a set screw on its side for locking the position of the bushing (35). By tightening the set screw on the side of the second fixing block (34), the position of the bushing (35) in the elongated hole can be locked.

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