Cleaning agent and cleaning method for aluminum gas distribution plate

Abstract

The invention relates to a cleaning agent and a cleaning method for an aluminum gas distribution plate, and relates to the field of cleaning, the cleaning agent comprises a first cleaning agent, a second cleaning agent and a third cleaning agent; the first lotion comprises the following components in percentage by mass: 1-10% of sulfuric acid, 0.5-5% of nitric acid, 1-10% of phosphoric acid, 0.5-5% of chromic acid, 1-10% of tartaric acid, 1-10% of gluconic acid, 0.1-2% of a quaternary ammonium salt cationic surfactant and the balance of water; the second lotion comprises alkali, tartaric acid salt, gluconate, peroxide and water; the third washing agent comprises inorganic acid, inorganic acid salt, oxalic acid, tartaric acid and water. The cleaning agent provided by the invention can realize a good cleaning effect on the aluminum gas distribution plate, basically does not influence the use of the aluminum gas distribution plate when effectively removing sediments in air holes of the aluminum gas distribution plate, and does not cause the defect of reaming of through holes of the aluminum gas distribution plate.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of cleaning, in particular to a cleaning agent and a cleaning method for an aluminum gas distribution plate. BACKGROUND

[0002] At present, in the process of manufacturing LCD (Liquid Crystal Display) and OLED (Organic Light Emitting Display), gas phase deposition is usually used to prepare products. In the process of gas phase deposition, a gas distribution device is usually used to distribute raw material gas. For example, CN120026307A discloses a gas phase deposition equipment, which relates to the technical field of semiconductor preparation. The gas phase deposition equipment comprises a first gas inlet, a gas distribution structure, a gas inlet structure and a supporting table. The gas distribution structure comprises a bottom wall and a side wall. A plurality of gas passing holes are arranged on the bottom wall. A first heating part is arranged around the bottom wall in the side wall. The gas inlet structure is arranged in the space enclosed by the bottom wall and the side wall. A gas channel is arranged in the gas inlet structure, which is connected to the first gas inlet and each gas passing hole. A second heating part is arranged around the gas channel in the gas inlet structure.

[0003] Because the gas distribution device is provided with grooves and through holes of different levels of aperture, after being used for a period of time, a large amount of black and gray deposits will be generated on the surface, grooves and inner walls of the through holes of the gas distribution device, which will block or reduce the through holes of the grooves. Some of the deposits will also erode the substrate of the gas distribution device, which will eventually affect the operation and processing effect of the gas phase deposition equipment.

[0004] Therefore, after being used for a plurality of times, the gas distribution device needs to be cleaned to ensure the use effect of the gas distribution device. The current cleaning process mainly includes the main operation processes of sand blasting, polishing, sand blasting, shaping, strong alkali cleaning, strong acid cleaning, pure water cleaning and drying. However, the current cleaning process has the problem that foreign matters will occur in the through holes after processing, which will increase the rework rate, thereby causing the problem of aperture expansion and affecting the service life of the product. SUMMARY

[0005] In view of the problems in the prior art, the present application aims to provide a cleaning agent and a cleaning method for an aluminum gas distribution plate, so as to solve the defects that the current cleaning process has the problem that foreign matters will occur in the through holes after processing, which will increase the rework rate, thereby causing the problem of aperture expansion and affecting the service life of the product.

[0006] To achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0007] In a first aspect, the present application provides a cleaning agent for an aluminum gas distribution plate, which comprises: a first cleaning agent, a second cleaning agent and a third cleaning agent.

[0008] The first cleaning agent comprises, in terms of mass percentage:

[0009] Sulfuric acid 1-10%, nitric acid 0.5-5%, phosphoric acid 1-10%, chromic acid 0.5-5%, primary fruit acid 1-10%, gluconic acid 1-10%, quaternary ammonium salt cationic surfactant 0.1-2%, balance water;

[0010] The second detergent comprises: alkali, fructose, gluconate, peroxide, and water;

[0011] The third detergent comprises: inorganic acid, inorganic acid salt, oxalic acid, secondary fruit acid, and water.

[0012] The cleaning agent provided by this invention, through the design of its components, can achieve a good cleaning effect on aluminum gas distribution discs. While effectively removing deposits from the pores of the aluminum gas distribution disc, it does not significantly affect the use of the aluminum gas distribution disc and will not cause defects such as enlarged pores in the through holes of the aluminum gas distribution disc.

[0013] As a preferred embodiment of the present invention, the second detergent comprises, by weight percentage:

[0014] Alkali 1.5-15%, fructate 2-10%, gluconate 1-10%, peroxide 2-5%, balance water.

[0015] As a preferred embodiment of the present invention, the third detergent comprises, by weight percentage:

[0016] Inorganic acid 3-15%, inorganic acid salt 2-10%, oxalic acid 1-5%, secondary fruit acid 1-10%, balance water.

[0017] As a preferred embodiment of the present invention, the first fruit acid includes one or a combination of at least two of lactic acid, malic acid, or citric acid.

[0018] Preferably, the quaternary ammonium salt cationic surfactant includes one or a combination of at least two of the following: hexadecyltrimethylammonium chloride, dodecyltrimethylammonium chloride, benzalkonium chloride, or polyquaternary ammonium salts.

[0019] As a preferred embodiment of the present invention, the alkali includes one or a combination of at least two of sodium hydroxide, potassium hydroxide, or calcium hydroxide.

[0020] Preferably, the fructate comprises one or a combination of at least two of sodium lactate, potassium lactate, sodium malate, potassium malate, sodium citrate, or potassium citrate.

[0021] Preferably, the gluconate comprises one or a combination of at least two of sodium gluconate, potassium gluconate, or calcium gluconate.

[0022] Preferably, the peroxide comprises one or a combination of at least two of sodium peroxide, peroxysulfuric acid, or ammonium persulfate.

[0023] As a preferred embodiment of the present invention, the inorganic acid includes one or a combination of at least two of nitric acid, sulfuric acid, or phosphoric acid.

[0024] Preferably, the inorganic acid salts include nitrates and / or sulfates.

[0025] Preferably, the second fruit acid includes one or a combination of at least two of lactic acid, malic acid, or citric acid.

[0026] Secondly, the present invention provides a cleaning method for an aluminum gas distribution disc, the cleaning method comprising:

[0027] The aluminum gas distribution disc is cleaned using the cleaning agent described in the first aspect;

[0028] The cleaning process includes a first cleaning, sandblasting, a second cleaning, and a third cleaning performed sequentially.

[0029] The first cleaning uses a first detergent;

[0030] The second cleaning uses a second detergent;

[0031] The third cleaning uses a third cleaning agent.

[0032] As a preferred technical solution of the present invention, the temperature of the first cleaning is 25-75℃.

[0033] Preferably, the first cleaning time is 1-20 hours.

[0034] As a preferred embodiment of the present invention, the temperature of the second cleaning is 20-50℃.

[0035] Preferably, the second cleaning time is 1-120 minutes.

[0036] As a preferred technical solution of the present invention, the temperature of the third cleaning is 20-80℃.

[0037] Preferably, the third cleaning time is 1-120 minutes.

[0038] Compared with existing technical solutions, the present invention has the following beneficial effects:

[0039] (1) The cleaning agent provided by the present invention optimizes the composition of the cleaning agent and utilizes the combination of each component and the cleaning process to achieve efficient cleaning of aluminum gas distribution disks. It can effectively achieve the dual goals of suppressing foreign matter generation and pore size expansion, providing a brand-new solution for the maintenance of LCD and OLED manufacturing equipment.

[0040] (2) The cleaning method provided by the present invention achieves stability and controllability of cleaning effect by optimizing parameters such as the component concentration of chemical cleaning agent, treatment time, and temperature. Furthermore, the cleaning method of the present invention significantly reduces the reliance on physical treatment methods such as sandblasting, and instead adopts a more precise chemical cleaning method, with a foreign matter removal rate ≥90% and substrate pore size change ≤0.01mm after cleaning.

[0041] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims. Detailed Implementation

[0042] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0043] In the vapor deposition process, gas distribution devices are cleaned after multiple uses to ensure their performance. Current cleaning processes mainly include sandblasting, grinding, shaping, strong alkali cleaning, strong acid cleaning, pure water cleaning, and drying. However, current cleaning processes suffer from the problem of foreign matter entering the through-holes after treatment, leading to increased rework rates, resulting in enlarged pore sizes and affecting product lifespan. Therefore, this invention optimizes the cleaning agent used in the cleaning process, enabling more uniform removal of deposits from each through-hole while protecting the aluminum and its alloy substrates. This effectively inhibits the formation of foreign matter and pore enlargement, as detailed below:

[0044] I. This embodiment provides a cleaning agent for aluminum gas distribution discs, the cleaning agent comprising: a first cleaning agent, a second cleaning agent, and a third cleaning agent;

[0045] The first detergent comprises, by weight percentage:

[0046] Sulfuric acid 1-10%, nitric acid 0.5-5%, phosphoric acid 1-10%, chromic acid 0.5-5%, primary fruit acid 1-10%, gluconic acid 1-10%, quaternary ammonium salt cationic surfactant 0.1-2%, balance water;

[0047] The second detergent comprises: alkali, fructose, gluconate, peroxide, and water;

[0048] The third detergent comprises: inorganic acid, inorganic acid salt, oxalic acid, secondary fruit acid, and water.

[0049] In this invention, the material of the aluminum gas distribution disc can be selected as pure aluminum, aluminum alloy, or other aluminum materials commonly used in the field.

[0050] In this invention, the sulfuric acid in the first detergent is 1-10% by mass percentage, for example, it can be 1%, 1.9%, 2.8%, 3.7%, 4.6%, 5.5%, 6.4%, 7.3%, 8.2%, 9.1% or 10%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0051] In this invention, the nitric acid in the first detergent is 0.5-5% by mass percentage, for example, it can be 0.5%, 0.95%, 1.4%, 1.85%, 2.3%, 2.75%, 3.2%, 3.65%, 4.1%, 4.55% or 5%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0052] In this invention, the phosphoric acid in the first detergent is 1-10% by mass percentage, for example, it can be 1%, 1.9%, 2.8%, 3.7%, 4.6%, 5.5%, 6.4%, 7.3%, 8.2%, 9.1% or 10%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0053] In this invention, the chromic acid in the first detergent is 0.5-5% by mass percentage, for example, it can be 0.5%, 0.95%, 1.4%, 1.85%, 2.3%, 2.75%, 3.2%, 3.65%, 4.1%, 4.55% or 5%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0054] In this invention, the first fruit acid in the first detergent has a mass percentage content of 1-10%, for example, it can be 1%, 1.9%, 2.8%, 3.7%, 4.6%, 5.5%, 6.4%, 7.3%, 8.2%, 9.1% or 10%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0055] In this invention, the gluconic acid in the first detergent is 1-10% by mass percentage, for example, it can be 1%, 1.9%, 2.8%, 3.7%, 4.6%, 5.5%, 6.4%, 7.3%, 8.2%, 9.1% or 10%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0056] In this invention, the quaternary ammonium salt cationic surfactant in the first detergent is 0.1-2% by mass percentage, for example, it can be 0.1%, 0.29%, 0.48%, 0.67%, 0.86%, 1.05%, 1.24%, 1.43%, 1.62%, 1.81% or 2%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0057] The second detergent comprises, by weight percentage:

[0058] Alkali 1.5-15%, fructate 2-10%, gluconate 1-10%, peroxide 2-5%, balance water.

[0059] In this invention, the alkali in the second detergent is 1.5-15% by mass percentage, for example, it can be 1.5%, 2.85%, 4.2%, 5.55%, 6.9%, 8.25%, 9.6%, 10.95%, 12.3%, 13.65% or 15%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0060] In this invention, the fruit acid salt in the second detergent is 2-10% by mass percentage, for example, it can be 2%, 2.8%, 3.6%, 4.4%, 5.2%, 6%, 6.8%, 7.6%, 8.4%, 9.2% or 10%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0061] In this invention, the gluconate in the second detergent is 1-10% by mass percentage, for example, it can be 1%, 1.9%, 2.8%, 3.7%, 4.6%, 5.5%, 6.4%, 7.3%, 8.2%, 9.1% or 10%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0062] In this invention, the peroxide in the second detergent is 2-5% by mass percentage, for example, it can be 2%, 2.3%, 2.6%, 2.9%, 3.2%, 3.5%, 3.8%, 4.1%, 4.4%, 4.7% or 5%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0063] The third detergent, by weight percentage, comprises:

[0064] Inorganic acid 3-15%, inorganic acid salt 2-10%, oxalic acid 1-5%, secondary fruit acid 1-10%, balance water.

[0065] In this invention, the inorganic acid in the third detergent is 3-15% by mass percentage, for example, it can be 3%, 4.2%, 5.4%, 6.6%, 7.8%, 9%, 10.2%, 11.4%, 12.6%, 13.8% or 15%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0066] In this invention, the inorganic acid salt in the third detergent is 2-10% by mass percentage, for example, it can be 2%, 2.8%, 3.6%, 4.4%, 5.2%, 6%, 6.8%, 7.6%, 8.4%, 9.2% or 10%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0067] In this invention, the oxalic acid in the third detergent is 1-5% by mass percentage, for example, it can be 1%, 1.4%, 1.8%, 2.2%, 2.6%, 3%, 3.4%, 3.8%, 4.2%, 4.6% or 5%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0068] In this invention, the second fruit acid in the third detergent is 1-10% by mass percentage, for example, it can be 1%, 1.9%, 2.8%, 3.7%, 4.6%, 5.5%, 6.4%, 7.3%, 8.2%, 9.1% or 10%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0069] The first fruit acid includes one or a combination of at least two of lactic acid, malic acid, or citric acid.

[0070] For example, the combination of the first fruit acid includes: a combination of lactic acid and malic acid, a combination of malic acid and citric acid, a combination of lactic acid and citric acid, etc.

[0071] The quaternary ammonium salt cationic surfactant includes one or a combination of at least two of the following: hexadecyltrimethylammonium chloride, dodecyltrimethylammonium chloride, benzalkonium chloride, or polyquaternary ammonium salts.

[0072] In this invention, the polyquaternary ammonium salt can be selected as polyquaternary ammonium salt 126, etc.

[0073] For example, combinations of quaternary ammonium salt cationic surfactants include: combinations of hexadecyltrimethylammonium chloride and dodecyltrimethylammonium chloride, combinations of dodecyltrimethylammonium chloride and benzalkonium chloride, combinations of benzalkonium chloride and polyquaternary ammonium salts, etc.

[0074] The alkali includes one or a combination of at least two of sodium hydroxide, potassium hydroxide, or calcium hydroxide.

[0075] For example, combinations of bases include: combinations of sodium hydroxide and potassium hydroxide, combinations of potassium hydroxide and calcium hydroxide, combinations of sodium hydroxide and calcium hydroxide, combinations of sodium hydroxide, potassium hydroxide and calcium hydroxide, etc.

[0076] The fructate salt includes one or a combination of at least two of sodium lactate, potassium lactate, sodium malate, potassium malate, sodium citrate, or potassium citrate.

[0077] For example, combinations of fructates include: combinations of sodium lactate and potassium lactate, combinations of potassium lactate and sodium malate, combinations of sodium malate and potassium malate, combinations of potassium malate and sodium citrate, combinations of sodium citrate and potassium citrate, etc.

[0078] The gluconate includes one or a combination of at least two of sodium gluconate, potassium gluconate, or calcium gluconate.

[0079] For example, combinations of gluconates include: combinations of sodium gluconate and potassium gluconate, combinations of potassium gluconate and calcium gluconate, etc.

[0080] The peroxide includes one or a combination of at least two of sodium peroxide, peroxysulfuric acid, or ammonium persulfate.

[0081] The inorganic acid includes one or a combination of at least two of nitric acid, sulfuric acid, or phosphoric acid.

[0082] For example, combinations of inorganic acids include: combinations of nitric acid and sulfuric acid, combinations of sulfuric acid and phosphoric acid, combinations of nitric acid and phosphoric acid, combinations of nitric acid, sulfuric acid and phosphoric acid, etc.

[0083] The inorganic acid salts include nitrates and / or sulfates.

[0084] In this invention, the nitrate may include sodium nitrate and / or potassium nitrate, etc.

[0085] In this invention, the sulfate may include sodium sulfate and / or potassium sulfate, etc.

[0086] The second fruit acid includes one or a combination of at least two of lactic acid, malic acid, or citric acid.

[0087] For example, the combination of the second fruit acid includes: a combination of lactic acid and malic acid, a combination of malic acid and citric acid, a combination of lactic acid and citric acid, etc.

[0088] II. This embodiment provides a cleaning method for an aluminum gas distribution plate, the cleaning method comprising:

[0089] The aluminum gas distribution plate was cleaned using a cleaning agent;

[0090] The cleaning process includes a first cleaning, sandblasting, a second cleaning, and a third cleaning performed sequentially.

[0091] The first cleaning uses a first detergent;

[0092] The second cleaning uses a second detergent;

[0093] The third cleaning uses a third cleaning agent.

[0094] In this invention, the sandblasting process can be designed according to conventional requirements in the field. For example, alumina sand with a particle size of 80-400 mesh can be used, the sandblasting pressure can be 0.1-10MPa, the sandblasting distance can be 100-500mm, and the sandblasting time can be 1-20h to obtain a uniform surface roughness Ra of 2-10μm.

[0095] The temperature of the first cleaning is 25-75℃, for example, it can be 25℃, 30℃, 35℃, 40℃, 45℃, 50℃, 55℃, 60℃, 65℃, 70℃ or 75℃, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0096] The first cleaning time is 1-20h, for example, it can be 1h, 2.9h, 4.8h, 6.7h, 8.6h, 10.5h, 12.4h, 14.3h, 16.2h, 18.1h or 20h, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0097] The temperature of the second cleaning is 20-50℃, for example, it can be 20℃, 23℃, 26℃, 29℃, 32℃, 35℃, 38℃, 41℃, 44℃, 47℃ or 50℃, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0098] The second cleaning time is 1-120 min, for example, it can be 1 min, 12.9 min, 24.8 min, 36.7 min, 48.6 min, 60.5 min, 72.4 min, 84.3 min, 96.2 min, 108.1 min or 120 min, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0099] The temperature of the third cleaning is 20-80℃, for example, it can be 20℃, 26℃, 32℃, 38℃, 44℃, 50℃, 56℃, 62℃, 68℃, 74℃ or 80℃, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0100] The third cleaning time is 1-120 min, for example, it can be 1 min, 12.9 min, 24.8 min, 36.7 min, 48.6 min, 60.5 min, 72.4 min, 84.3 min, 96.2 min, 108.1 min or 120 min, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0101] III. To illustrate the cleaning effect achievable by the cleaning agent provided by this invention, the following practical examples are used for explanation:

[0102] Example 1

[0103] This embodiment provides a cleaning method for an aluminum gas distribution plate, as detailed below:

[0104] The aluminum gas distribution plate was cleaned using a cleaning agent;

[0105] The cleaning agent includes: a first cleaning agent, a second cleaning agent, and a third cleaning agent;

[0106] The first detergent comprises, by weight percentage: 5% sulfuric acid, 3% nitric acid, 5% phosphoric acid, 3% chromic acid, 5% primary fruit acid (citric acid), 5% gluconic acid, 1% quaternary ammonium salt cationic surfactant (hexadecyltrimethylammonium chloride), and the balance being water;

[0107] The second detergent comprises, by weight percentage: 8% alkali (sodium hydroxide), 6% fructate (sodium citrate), 5% gluconate (sodium gluconate), 3.5% peroxide (sodium peroxide), with the balance being water;

[0108] The third detergent comprises, by weight percentage: 9% inorganic acid (nitric acid), 6% inorganic acid salt (sodium nitrate), 3% oxalic acid, 5% secondary fruit acid (citric acid), and the balance being water;

[0109] The cleaning process includes a first cleaning, sandblasting to a surface roughness Ra of 6 μm, a second cleaning, and a third cleaning, performed sequentially.

[0110] The first cleaning uses a first detergent, at a temperature of 50°C, for 10 hours;

[0111] The second cleaning uses a second detergent, at a temperature of 65°C, for 60 minutes;

[0112] The third cleaning uses a third cleaning agent, at a temperature of 50°C, for 60 minutes.

[0113] Example 2

[0114] This embodiment provides a cleaning method for an aluminum gas distribution plate, as detailed below:

[0115] The aluminum gas distribution plate was cleaned using a cleaning agent;

[0116] The cleaning agent includes: a first cleaning agent, a second cleaning agent, and a third cleaning agent;

[0117] The first detergent comprises, by weight percentage: 1% sulfuric acid, 5% nitric acid, 1% phosphoric acid, 5% chromic acid, 1% primary fruit acid (lactic acid), 10% gluconic acid, 0.1% quaternary ammonium salt cationic surfactant (dodecyltrimethylammonium chloride), and the balance being water;

[0118] The second detergent comprises, by weight percentage: 1.5% alkali (potassium hydroxide), 10% fructate (sodium lactate), 10% gluconate (sodium gluconate), 5% peroxide (persulfuric acid), and the balance being water;

[0119] The third detergent comprises, by weight percentage: 3% inorganic acid (phosphoric acid), 10% inorganic acid salt (sodium sulfate), 5% oxalic acid, 10% secondary fruit acid (lactic acid), and the balance being water;

[0120] The cleaning process includes a first cleaning, sandblasting until the surface roughness Ra is 2μm, a second cleaning, and a third cleaning, performed sequentially.

[0121] The first cleaning uses a first detergent, at a temperature of 25°C, for 20 hours;

[0122] The second cleaning uses a second detergent, at a temperature of 50°C, for 20 minutes;

[0123] The third cleaning uses a third cleaning agent, at a temperature of 20°C, for 120 minutes.

[0124] Example 3

[0125] This embodiment provides a cleaning method for an aluminum gas distribution plate, as detailed below:

[0126] The aluminum gas distribution plate was cleaned using a cleaning agent;

[0127] The cleaning agent includes: a first cleaning agent, a second cleaning agent, and a third cleaning agent;

[0128] The first detergent comprises, by weight percentage: 10% sulfuric acid, 0.5% nitric acid, 10% phosphoric acid, 0.5% chromic acid, 10% malic acid, 1% gluconic acid, 2% quaternary ammonium cationic surfactant (benzalkonium chloride), and the balance being water;

[0129] The second detergent comprises, by weight percentage: 15% alkali (calcium hydroxide), 2% fructate (sodium malate), 1% gluconate (calcium gluconate), 2% peroxide (sodium peroxide), and the balance being water;

[0130] The third detergent comprises, by weight percentage: 15% inorganic acid (sulfuric acid), 2% inorganic acid salt (sodium nitrate), 1% oxalic acid, 1% secondary fruit acid (malic acid), and the balance being water;

[0131] The cleaning process includes a first cleaning, sandblasting to a surface roughness Ra of 10 μm, a second cleaning, and a third cleaning, performed sequentially.

[0132] The first cleaning uses a first detergent, at a temperature of 75°C, for 1 hour;

[0133] The second cleaning uses a second detergent, at a temperature of 20°C, for 120 minutes;

[0134] The third cleaning uses a third cleaning agent, at a temperature of 80°C, for 1 minute.

[0135] Comparative Example 1

[0136] The only difference from Example 1 is that the first detergent does not contain chromic acid.

[0137] Comparative Example 2

[0138] The only difference from Example 1 is that the first detergent does not contain the first fruit acid (citric acid).

[0139] Comparative Example 3

[0140] The only difference from Example 1 is that the first detergent does not contain gluconic acid.

[0141] Comparative Example 4

[0142] The only difference from Example 1 is that the first detergent does not contain a quaternary ammonium salt cationic surfactant (hexadecyltrimethylammonium chloride).

[0143] Comparative Example 5

[0144] The only difference from Example 1 is that the second detergent does not contain fructose (sodium citrate).

[0145] Comparative Example 6

[0146] The only difference from Example 1 is that the second detergent does not contain gluconate (sodium gluconate).

[0147] Comparative Example 7

[0148] The only difference from Example 1 is that the second detergent does not contain peroxides.

[0149] Comparative Example 8

[0150] The only difference from Example 1 is that the third detergent does not contain inorganic acid salts (sodium nitrate).

[0151] Comparative Example 9

[0152] The only difference from Example 1 is that the third detergent does not contain oxalic acid.

[0153] Comparative Example 10

[0154] The only difference from Example 1 is that the third detergent does not contain the second fruit acid (citric acid).

[0155] Comparative Example 11

[0156] The only difference from Example 1 is that the second detergent is replaced with an 8% sodium hydroxide solution.

[0157] Comparative Example 12

[0158] The only difference from Example 1 is that the third detergent is replaced with a 9% nitric acid solution.

[0159] Comparative Example 13

[0160] The only difference from Example 1 is that the hexadecyltrimethylammonium chloride in the first detergent is replaced with an equal amount of sodium dodecylbenzenesulfonate.

[0161] Comparative Example 14

[0162] The only difference from Example 1 is that the hexadecyltrimethylammonium chloride in the first detergent is replaced with an equal amount of dodecylethoxysulfonate betaine.

[0163] The relevant parameters of the through holes in the aluminum gas distribution disc before and after cleaning in the above embodiments and comparative examples are compared in Table 1 below. The foreign matter removal rate refers to the reduction ratio of the number of residual foreign matter on the surface or in the pores, reflecting the cleanliness of the product or the effectiveness of the treatment process. The calculation formula is: Foreign matter removal rate = (Foreign matter content before treatment - Foreign matter content after treatment) / Foreign matter content before treatment. The foreign matter content can be selected as mg / L or particles / cm³. 2 Or ppm; Substrate pore size change refers to the phenomenon that the size (pore diameter) of the original fine pores on the substrate surface changes due to the regeneration process of removing surface deposits, such as acid or alkali cleaning, sandblasting, and grinding. The pore size change reflects the cleaning effect during the regeneration process and is an important parameter for evaluating the cleanliness of the regenerated product. The calculation formula is: Substrate pore size change = Substrate pore size after cleaning - Substrate pore size before cleaning. The values ​​in Table 1 are the values ​​with the largest changes.

[0164] Table 1

[0165]

[0166] As shown in Table 1, the solution provided by the present invention, through the design of the cleaning agent components, can achieve a good cleaning effect on the aluminum gas distribution plate. While effectively removing the deposits in the pores of the aluminum gas distribution plate, it basically does not affect the use of the aluminum gas distribution plate and will not cause the defects of enlarged pores in the through holes of the aluminum gas distribution plate.

[0167] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0168] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0169] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. A cleaning agent for aluminum gas distribution discs, characterized in that, The cleaning agent includes: a first cleaning agent, a second cleaning agent, and a third cleaning agent; The first detergent comprises, by weight percentage: Sulfuric acid 1-10%, nitric acid 0.5-5%, phosphoric acid 1-10%, chromic acid 0.5-5%, primary fruit acid 1-10%, gluconic acid 1-10%, quaternary ammonium salt cationic surfactant 0.1-2%, balance water; The second detergent comprises: alkali, fructose, gluconate, peroxide, and water; The third detergent comprises: inorganic acid, inorganic acid salt, oxalic acid, secondary fruit acid, and water.

2. The cleaning agent as described in claim 1, characterized in that, The second detergent comprises, by weight percentage: Alkali 1.5-15%, fructate 2-10%, gluconate 1-10%, peroxide 2-5%, balance water.

3. The cleaning agent as described in claim 1, characterized in that, The third detergent comprises, by weight percentage: Inorganic acid 3-15%, inorganic acid salt 2-10%, oxalic acid 1-5%, secondary fruit acid 1-10%, balance water.

4. The cleaning agent according to any one of claims 1-3, characterized in that, The first fruit acid includes one or a combination of at least two of lactic acid, malic acid, or citric acid; Preferably, the quaternary ammonium salt cationic surfactant includes one or a combination of at least two of the following: hexadecyltrimethylammonium chloride, dodecyltrimethylammonium chloride, benzalkonium chloride, or polyquaternary ammonium salts.

5. The cleaning agent according to any one of claims 1-3, characterized in that, The alkali includes one or a combination of at least two of sodium hydroxide, potassium hydroxide, or calcium hydroxide. Preferably, the fructate comprises one or a combination of at least two of sodium lactate, potassium lactate, sodium malate, potassium malate, sodium citrate, or potassium citrate; Preferably, the gluconate comprises one or a combination of at least two of sodium gluconate, potassium gluconate, or calcium gluconate; Preferably, the peroxide comprises one or a combination of at least two of sodium peroxide, peroxysulfuric acid, or ammonium persulfate.

6. The cleaning agent according to any one of claims 1-3, characterized in that, The inorganic acid includes one or a combination of at least two of nitric acid, sulfuric acid, or phosphoric acid; Preferably, the inorganic acid salt includes: nitrate and / or sulfate; Preferably, the second fruit acid includes one or a combination of at least two of lactic acid, malic acid, or citric acid.

7. A method for cleaning an aluminum gas distribution disc, characterized in that, The cleaning method includes: The aluminum gas distribution disc is cleaned using the cleaning agent described in any one of claims 1-6; The cleaning process includes a first cleaning, sandblasting, a second cleaning, and a third cleaning performed sequentially. The first cleaning uses a first detergent; The second cleaning uses a second detergent; The third cleaning uses a third cleaning agent.

8. The cleaning method as described in claim 7, characterized in that, The temperature of the first cleaning is 25-75℃; Preferably, the first cleaning time is 1-20 hours.

9. The cleaning method as described in claim 7, characterized in that, The temperature for the second cleaning is 20-50℃; Preferably, the second cleaning time is 1-120 minutes.

10. The cleaning method as described in claim 7, characterized in that, The temperature of the third cleaning is 20-80℃; Preferably, the third cleaning time is 1-120 minutes.

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