High-precision plane heating table and using method

Abstract

The invention relates to a high-precision plane heating table and a using method, the high-precision plane heating table comprises a base and a heat conduction plate, the inner bottom of the base is provided with a heating wire and an airflow adjusting module, the heat conduction plate is provided with a plurality of vertically-through mounting holes, the plurality of mounting holes are arranged in an array, and each mounting hole is internally provided with a cylindrical adjusting seat; a PEEK ball is fixedly mounted at the top of the cylindrical adjusting seat, and the top end of the PEEK ball protrudes out of the top of the heat conduction plate; by adopting the technical scheme, the PEEK ball can solve the problem that a traditional metal heating surface easily scratches sensitive materials such as a silicon wafer and an optical lens, the PEEK ball protrudes a little, a small gap can be reserved between the PEEK ball and a base material, heat is transferred through air convection and radiation, the situation that local heating is not uniform like direct contact is avoided, and the service life of the PEEK ball is prolonged. In addition, the cylindrical adjusting seats are arranged according to an array, so that the flatness of a heating surface can be controlled to be in a micron order, and the flow quantity of air flow in contact with the PEEK balls is adjusted in real time through the air flow adjusting module, so that the uniform heating effect of the heating table is achieved.

Description

Technical Field

[0001] This invention relates to the field of precision heating equipment technology, and in particular to a high-precision planar heating stage and its usage method. Background Technology

[0002] A heating stage is a common laboratory instrument whose main function is to provide a stable heat source for heating samples in various experimental processes. Its principle and wide range of applications make it an indispensable tool in scientific research and experiments. The working principle of a heating stage is based on the conversion of electrical energy into heat energy. It usually consists of a heating element, a temperature controller, and a platform. The heating element is the core part of the heating stage. It heats through a resistance wire, converting electrical energy into heat energy. When current passes through the resistance wire, due to the resistance, the electrical energy is consumed and converted into heat energy, thereby heating the sample on the platform.

[0003] Currently, most heating tables use aluminum plates as the upper heating plate, with heating wires directly attached to or embedded inside the aluminum plate. The heating wires generate heat when electricity is applied, and the heat is conducted to the aluminum plate and then acts on the substrate. This can easily lead to uneven distribution of the heating wires. Summary of the Invention

[0004] The purpose of this invention is to provide a high-precision planar heating stage and its usage method to solve the problems existing in the prior art.

[0005] The above-mentioned technical objective of the present invention is achieved through the following technical solution: A high-precision planar heating stage and its usage method include a base and a heat conduction plate. The base has a completely open top, and a heating wire and airflow regulating module are installed at the bottom inner part of the base. The heat conduction plate is detachably installed on the top of the base. The heat conduction plate has multiple through-holes arranged in an array. Each hole contains a cylindrical adjusting seat, and a PEEK ball is fixedly installed on the top of the cylindrical adjusting seat. The top of the PEEK ball protrudes from the top of the heat conduction plate.

[0006] By adopting the above technical solution and using PEEK balls with moderate hardness and strong chemical inertness, it is not easy to react with other substances. The substrate will not be scratched when placed on it, which can solve the problem that traditional metal heating surfaces can easily scratch sensitive materials such as silicon wafers and optical lenses. Moreover, the PEEK balls protrude slightly, leaving a small gap between them and the substrate. Heat is transferred through air convection and radiation, which can prevent uneven heating caused by direct contact. In addition, the cylindrical adjustment seats are arranged in an array. Before heating, the corresponding adjustment seats for the positions that will deform due to heating can be adjusted individually, thereby controlling the flatness of the heating surface at the micron level. Furthermore, the airflow adjustment module adjusts the airflow in contact with the PEEK balls in real time, thereby achieving the effect of uniform heating of the heating platform.

[0007] In a further embodiment, the airflow regulating module includes an axial flow fan and multiple guide components of different sizes. The bottom end of the base is provided with an mounting port for vertical installation. The axial flow fan is installed inside the mounting port and is spaced apart at the bottom of the heating wire. Multiple guide components are arranged sequentially from bottom to top on the heating wire in descending order of size. Each guide component includes a vertical ring plate and an inclined ring disk. The inclined ring disk is fixedly installed on the centrifugal side of the inclined ring disk. A switch valve is provided at the bottom of the inclined ring disk. A temperature sensor is provided on the proximal side of each vertical ring plate. Each temperature sensor is electrically connected to a controller. The controller is electrically connected to each of the switch valves.

[0008] By adopting the above technical solution, the temperature sensor can detect the temperature of different areas inside the base in real time. Once the temperature in a certain place is too high or too low, it will send a signal to the controller. After receiving the signal, the controller can adjust the opening of the corresponding airflow guide valve to control the airflow. The axial fan sends air from bottom to top, and then guides it through the airflow guides of different sizes and layers. The heat can be evenly distributed in the base, preventing the center from being hot and the edges from being cold. It can also eliminate local hot spots and make the heat transfer plate receive heat more evenly, meeting the high temperature accuracy requirements of processes such as semiconductor manufacturing and optical component processing.

[0009] In a further embodiment, the cylindrical adjusting seat includes a support base and a screw rod. The support base is fixedly installed on the top of the screw rod. Each of the mounting holes is provided with a thread adapted to the screw. The screw rod is screwed into the mounting hole. The bottom end of the screw rod is provided with an extension end extending to the bottom of the heat conduction plate.

[0010] By adopting the above technical solution, the screw and the thread of the mounting hole can be adjusted in height. By removing the heat conduction plate from the base, the height of a single cylindrical adjustment seat can be adjusted by tightening the extension end of the screw. For example, if it is known that a certain corner of the heat conduction plate is slightly warped, the screw at that position can be adjusted to make up for the height, thereby solving the problem of thermal deformation.

[0011] In a further embodiment, a first internal threaded hole is provided at each of the four corners of the base, and a second internal threaded hole adapted to the first internal threaded hole is provided at each of the four corners of the heat conduction plate, and a stud is screwed into each of the first internal threaded hole and the second internal threaded hole.

[0012] By adopting the above technical solution, the levelness of the heat conduction plate can be finely adjusted by adjusting the screw depth of the stud in the first and second internal threaded holes. For example, if the heat conduction plate is found to be slightly crooked during installation, adjusting the screw depth of a certain corner stud can calibrate the plane, thereby ensuring the flatness of the entire plate surface during subsequent heating.

[0013] This invention also discloses a method for using a high-precision planar heating stage, comprising the following steps: Step S1: Real-time temperature data of the corresponding airflow area is collected in real time by using temperature sensors installed on the proximal side of each vertical ring plate. Step S2: Input multiple real-time temperature data into the controller. The controller calculates the temperature uniformity index between different areas of the heating plane and determines whether the current heating plane has reached a uniform heating state. Step S3: If the judgment result is that the uniform heating state has not been reached, the controller calculates and generates the opening adjustment parameters of the corresponding switch valves based on the difference between the real-time temperature data of each area and the preset target temperature value. Step S4: The controller sends a control command to the corresponding switch valve according to the opening adjustment parameters, and adjusts its opening synchronously to change the distribution of hot airflow through the corresponding guide component until the temperature of each area of ​​the heating plane reaches a uniform heating state.

[0014] In a further embodiment, in step S2, determining whether the current heating plane has reached a uniform heating state includes: Step S21: The controller receives real-time temperature data uploaded by all temperature sensors, calculates the difference between the highest and lowest temperature values ​​in all real-time temperature data, and obtains the real-time temperature range. Step S22: Determine whether the real-time temperature difference is less than or equal to the preset allowable temperature difference threshold. If yes, determine that the heating plane has reached a uniform heating state; otherwise, determine that the heating plane has not reached a uniform heating state.

[0015] In a further embodiment, in step S3, calculating and generating the opening adjustment parameters of the corresponding switching valve includes: Step S31: For the corresponding area monitored by temperature sensor T_i, obtain its real-time temperature data T_ri; Step S32: Calculate the difference ΔT_i between the real-time temperature data T_ri and the preset target temperature value T_set for this area, which is ΔT_i = T_set - T_ri; Step S33: Based on the magnitude and sign of the difference ΔT_i, calculate the opening change ΔK_i that the corresponding switching valve V_i needs to be adjusted using a preset PID control model, and use it as the opening adjustment parameter.

[0016] In a further embodiment, in step S4, synchronously adjusting the opening degree includes: the controller simultaneously sends all the calculated opening adjustment parameters to the corresponding switching valves, and all the relevant switching valves, after receiving the control command, simultaneously adjust to their respective target opening degrees within a preset synchronization time window.

[0017] In summary, the present invention has the following beneficial effects: 1. The high-precision planar heating stage method provided by this invention achieves intelligent and dynamic precise control of the uniform heating state of the heating plane by constructing a closed-loop control system based on the target temperature value, using real-time temperature range as the criterion, and synchronous airflow distribution as the execution means. Specifically, the method first uses multiple temperature sensors arranged in a ring to synchronously collect real-time temperature data of each zone of the heating plane and quickly calculates the temperature range of the entire plane, which serves as a direct and clear criterion for whether a uniform heating state has been achieved. Once it is determined that the target temperature has not been achieved, the system calculates the optimal opening adjustment of the valves in each corresponding airflow channel based on the deviation between the temperature of each zone and the preset target temperature using a classic and reliable PID control model, and instructs all valves to synchronously complete the adjustment in a very short time. This allows for the immediate and precise redistribution of the hot air flow through each annular area. For areas with temperatures higher than the target value, the valve opening is reduced to reduce the temperature per unit area. Flow rate; For areas with temperatures below the target value, increasing the valve opening increases the flow rate per unit area. The core advantage of this method is that it decomposes a complex planar temperature field homogenization problem into a target-following control problem for multiple independent zones. Through centralized calculation and synchronous execution, it ensures the coordination and timeliness of the control actions of each zone. Compared with the traditional solution that relies on passive heat conduction by the heat exchanger, this method introduces an active, real-time feedback-based airflow intervention mechanism, which can effectively compensate for temperature unevenness caused by uneven heating element power or environmental disturbances. This keeps the temperature uniformity of the heating plane consistently stable within the extremely high precision range of ±1℃ required by the process. This not only fundamentally improves the quality and yield of production processes with stringent requirements for temperature field consistency, such as semiconductor wafer baking, precision optical component bonding, and high-end PCB reflow soldering, but also enhances the equipment's adaptability and energy efficiency in response to different working conditions. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of a high-precision planar heating stage according to the present invention; Figure 2 This is a schematic diagram of the internal structure of the base of a high-precision planar heating stage according to the present invention; Figure 3 This is a schematic diagram of the airflow adjustment module and heating wire of a high-precision planar heating stage according to the present invention; Figure 4 This is a schematic diagram showing the connection relationship between the switching valve and the flow guide of a high-precision planar heating stage according to the present invention. Figure 5 This is an overall flowchart of the method of using a high-precision planar heating stage according to the present invention.

[0019] In the diagram, 1 is the base; 2 is the heat conduction plate; 3 is the heating wire; 4 is the airflow regulation module; 41 is the axial flow fan; 42 is the air guide; 5 is the PEEK ball; 6 is the switch valve; 7 is the temperature sensor; and 8 is the stud. Detailed Implementation

[0020] The present invention will be further described in detail below with reference to the accompanying drawings.

[0021] Identical parts are indicated by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "upper," and "lower" used in the following description refer to the attached figures. Figure 1 In this specification, the terms "bottom surface" and "top surface," "inner" and "outer" refer to the direction toward or away from the geometry of a specific component. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this specification, "a plurality of" means two or more, unless otherwise explicitly and specifically defined by the direction of the center.

[0022] Example 1: like Figures 1-4 As shown, a high-precision planar heating stage and its usage method include a base 1 and a heat conduction plate 2. The top of the base 1 is a completely open structure. The bottom of the base 1 is provided with a heating wire 3 and an airflow regulating module 4. The heat conduction plate 2 is detachably installed on the top of the base 1. The heat conduction plate 2 is provided with multiple through-holes. The multiple mounting holes are arranged in an array. Each mounting hole is provided with a cylindrical adjustment seat. A PEEK ball 5 is fixedly installed on the top of the cylindrical adjustment seat. The top of the PEEK ball 5 protrudes from the top of the heat conduction plate 2. The airflow regulating module 4 includes an axial flow fan 41 and multiple guide components 42 of different sizes. The bottom of the base 1 has an mounting port for vertical installation. The axial flow fan 41 is installed inside the mounting port and spaced apart at the bottom of the heating wire 3. Multiple guide components 42 are arranged sequentially from bottom to top on the heating wire 3 via support rods, arranged in descending order of size. Each guide component 42 includes a vertical ring plate and an inclined ring disc. The inclined ring disc is fixedly installed on the centrifugal side of the inclined ring disc. A switching valve 6 is located at the bottom of the inclined ring disc. A temperature control valve is located on the proximal side of each vertical ring plate. The temperature sensor 7 is electrically connected to the controller, and the controller is electrically connected to each switch valve 6. The cylindrical adjustment seat includes a support base and a screw. The support base is fixedly installed on the top of the screw. The mounting holes are provided with threads that are compatible with the screws. The screw is screwed into the mounting holes. The bottom end of the screw is provided with an extension end that extends to the bottom of the heat conduction plate 2. The four corners of the base 1 are provided with first internal threaded holes, and the four corners of the heat conduction plate 2 are provided with second internal threaded holes that are compatible with the first internal threaded holes. Studs 8 are screwed into the first internal threaded holes and the second internal threaded holes.

[0023] Specific implementation process: First, adjust the overall level of the heating platform by rotating the stud 8 according to the heating requirements. Then, according to the shape of the placed items and the requirements for heating uniformity, rotate the screw of the cylindrical adjustment seat. Because the mounting hole has a matching thread, the screw will move up and down, driving the support base and the PEEK ball 5 on the top to rise and fall. Adjust the height of the top of the PEEK ball 5 protruding from the top of the heat conduction plate 2 to ensure uniform heating. Then, start the axial flow fan 41. The airflow enters from the mounting port at the bottom of the base. Under the guidance of multiple guides arranged from large to small and from bottom to top on the top of the heating wire 3, an orderly airflow is formed. The airflow is heated when it passes through the heating wire 3 and diffuses evenly to the heat conduction plate 2. During this process, the temperature sensor 7 monitors the temperature near the center of the vertical ring plate in real time and transmits the data to the controller. If the temperature in a certain area is too high, the controller controls the corresponding switch valve 6 at the bottom of the inclined ring plate to reduce its opening. If the temperature in a certain area is too low, the controller controls the corresponding switch valve 6 at the bottom of the inclined ring plate to its maximum opening, adjusting the local airflow and changing the hot air flow area between the two guide components, thereby changing the hot air flow at the bottom of the heat conduction plate 2, thus changing the temperature of the PEEK ball. As a result, the heat generated by the heating wire 3 is transferred to the item placed on it through the heat conduction plate 2 and the PEEK ball, realizing the heating function. After use, the axial flow fan 41 and the heating wire 3 are turned off for the next use.

[0024] like Figure 5 As shown, the present invention also discloses a method for using a high-precision planar heating stage, comprising the following steps: Step S1: Real-time temperature data of the corresponding airflow area is collected in real time by temperature sensor 7 set on the proximal side of each vertical ring plate. Multiple high-precision temperature sensors synchronously collect data at a fixed sampling frequency of 10 times per second. Each sensor monitors the temperature of a specific annular area on the corresponding heating plane defined by the vertical ring plate in which it is located. The controller receives the data streams from all temperature sensors to form a set of real-time temperature data {T_r1, T_r2, …, T_rn}, where n is the total number of temperature sensors. Step S2: Input multiple real-time temperature data into the controller. The controller calculates the temperature uniformity index between different areas of the heating plane and determines whether the current heating plane has reached a uniform heating state. The determination of whether the current heating plane has reached a uniform heating state specifically includes: Step S21: The controller receives real-time temperature data uploaded by all temperature sensors 7, finds the maximum value T_max and the minimum value T_min from the set {T_ri}, calculates their difference, and obtains the real-time temperature range R. The calculation formula is as follows: ; In the formula, T_max is the highest temperature in the region, in degrees Celsius (°C), representing the temperature value with the largest value among a set of real-time temperature data collected from all temperature sensors 7 at the current sampling time; T_min is the lowest temperature in the region, in degrees Celsius (°C), representing the temperature value with the smallest value among the same set of real-time temperature data at the same sampling time; R is the real-time temperature range, in degrees Celsius (°C), which directly reflects the absolute temperature difference between the hottest and coldest points of the heating plane.

[0025] Step S22: Compare the calculated real-time temperature range R with a preset allowable temperature difference threshold δ. In this embodiment, the threshold δ is 1℃.

[0026] The judgment logic is as follows: if R≤δ, the temperature uniformity of the entire heating plane is deemed to meet the requirements, i.e., the uniform heating state has been achieved; if R>δ, the uniform heating state has not been achieved, and the adjustment process needs to be initiated.

[0027] It should be noted that using the real-time temperature range R as the core criterion for uniform heating has the advantages of clear physical meaning, simple calculation and fast response. It can directly grasp the core contradiction of temperature uniformity - the maximum temperature difference, so that the decision-making objective of the control system is very clear. By introducing the preset threshold δ, it can provide users with an interface that can be flexibly set according to different process accuracy requirements.

[0028] Step S3: If the judgment result is that the uniform heating state has not been reached, the controller calculates and generates the opening adjustment parameters of the corresponding switch valve 6 based on the difference between the real-time temperature data of each area and the preset target temperature value. The calculation and generation of the opening adjustment parameters for the corresponding switching valve 6 specifically includes: Step S31: For the i-th annular region monitored by temperature sensor T_i, obtain its real-time temperature data T_ri from the controller.

[0029] Step S32: Calculate the deviation ΔT_i between the real-time temperature T_ri and the preset target temperature value T_set in this area. The calculation formula is as follows: ; In the formula, ΔT_i, Tset, and Tri are all in degrees Celsius (°C). When the value of ΔT_i is positive, it means that the temperature of the area is lower than the target value and needs to be increased; when the value is negative, it means that the temperature of the area is higher than the target value and needs to be decreased.

[0030] Step S33: Based on the deviation ΔT_i, calculate the required opening change ΔK_i of the main valve V_i corresponding to control the airflow in this area using a preset proportional-integral-derivative control model. ΔK_i is the opening adjustment parameter, usually expressed as a percentage change in opening. A commonly used incremental digital PID calculation formula is as follows: ; Where e(k) = ΔTi(k), which is the temperature difference at the current sampling time; e(k-1) and e(k-2) represent the temperature differences at the previous and the time before that sampling times, respectively; Kp, Ki, and Kd are the pre-tuned proportional, integral, and derivative coefficients, respectively; ΔKi(k) is the opening adjustment amount to be applied this time; and finally, the new target opening Ki,new of the switching valve 6 is: ; By collecting and calculating the temperature deviation of each area in real time, the system dynamically adjusts the valve opening change ΔKi(k) and outputs a control signal to drive the actuator to adjust the opening of the switch valve 6, thereby achieving precise control of airflow and quickly stabilizing the temperature of the PEEK ball 5 to the set target value, improving energy efficiency and comfort.

[0031] Step S4: The controller sends a control command to the corresponding switch valve 6 according to the opening adjustment parameters, and adjusts its opening degree synchronously to change the distribution of hot airflow through the corresponding guide 42 until the temperature of each area of ​​the heating plane reaches a uniform heating state.

[0032] The synchronous adjustment of its opening degree specifically includes: after the controller completes the calculation of the opening degree change ΔK_i in all areas, it synchronously sends a set of control instructions containing the target opening degree value to the actuators of all relevant switching valves 6. After receiving the instructions, all switching valves 6 act simultaneously within a preset 100-millisecond synchronization time window, adjusting to their respective new target opening degree K_i,new. The direct physical effect of this synchronous adjustment action is to instantly change the flow distribution of the hot airflow blown out from the axial flow fan 41 and heated by the heating wire 3 when it enters the annular channel composed of guide members 42 of different sizes.

[0033] The system will periodically repeat steps S1 to S4 to form a closed-loop feedback control. In each control cycle, the system dynamically adjusts the airflow distribution according to the latest temperature distribution. As the iteration progresses, the temperature T_ri of each region will continuously approach the target temperature T_set, and the range R between them will gradually decrease. When R is continuously less than or equal to the threshold δ, the system determines that it has entered a steady state of heat homogenization. After that, the controller can automatically switch to the maintenance mode, reduce the adjustment frequency, and only make fine adjustments to counteract external disturbances. Thus, while achieving high-precision heat homogenization, the system's response speed and long-term operational stability are also taken into account.

[0034] The working principle of this invention: The high-precision planar heating stage method disclosed in this invention is based on achieving precise uniform heating of the planar temperature through dynamic control of airflow distribution. The control logic is as follows: when the temperature of a certain area is too high, the controller controls the opening of the corresponding valve at the bottom of the inclined ring disk to decrease; when the temperature of a certain area is too low, the controller controls the opening of the corresponding valve at the bottom of the inclined ring disk to increase. This forms the cornerstone of the entire control strategy. Its theoretical basis stems from the basic principle of forced convection heat transfer: when airflow passes under the heating plane, the rate at which it carries away heat mainly depends on two factors: the temperature difference between the airflow and the heating plane, and the airflow rate. Under the premise of steady-state system operation and stable heat source power, the initial temperature of the airflow from the axial flow fan and heated by the heating wire can be regarded as relatively constant. Therefore, the adjustment of the temperature of a specific annular area is mainly transformed into the control of the flow rate in the airflow channel of that area. The opening degree of the switch valve 6 directly determines the flow area and flow resistance of the flow channel. According to the basic principles of fluid mechanics, under the condition that the fan head of the axial flow fan 41 is basically stable, the volumetric flow rate Q_i flowing through a certain channel is approximately proportional to the flow conductance of that channel (positively correlated with the opening degree of the switch valve 6). Therefore, adjusting the opening degree of the switch valve 6 is to directly adjust the flow rate of the hot air flowing through the heating back of that area.

[0035] Once all the switching valves 6 are adjusted to their positions according to the new Ki,new within a 100-millisecond synchronization window, the airflow distribution pattern inside the heating platform changes instantly. For the low-temperature annular zone, the valve opening below increases, the flow resistance decreases, and more of the mainstream airflow from the axial fan is allocated to this channel. The strong airflow washes over the cavity formed by the corresponding inclined annular plate and the upper base plate, efficiently carrying away heat. At the same time, for the low- and high-temperature annular zones, the opening of the switching valves 6 decreases, as if partially shutting off the heat tap in this area. The airflow becomes slower, and heat cannot be quickly conducted to the PEEK spheres 5 located in the corresponding area, thus preventing the PEEK spheres 5 in this area from heating up quickly. Through this coordinated airflow redistribution strategy of reducing the flow of hot air in the high-temperature zone and increasing the flow in the low-temperature zone, the system dynamically corrects the convective heat transfer boundary conditions under the heating plane, accurately balancing the heat flow output of the entire plane and strongly driving the temperature distribution to converge towards a uniform state.

[0036] In the embodiments disclosed in this invention, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; "linking" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments disclosed in this invention according to the specific circumstances.

[0037] This specific embodiment is merely an explanation of the present invention and is not intended to limit the invention. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A high-precision planar heating stage, comprising a base (1) and a heat conduction plate (2), characterized in that: The top of the base (1) is a completely open structure. The bottom of the base (1) is provided with a heating wire (3) and an airflow regulating module (4). The heat conduction plate (2) is detachably installed on the top of the base (1). The heat conduction plate (2) is provided with multiple through-holes. The multiple through-holes are arranged in an array. Each through-hole is provided with a cylindrical adjustment seat. A PEEK ball (5) is fixedly installed on the top of the cylindrical adjustment seat. The top of the PEEK ball (5) protrudes from the top of the heat conduction plate (2).

2. The high-precision planar heating stage according to claim 1, characterized in that: The airflow regulating module (4) includes an axial flow fan (41) and multiple guide components (42) of different sizes. The bottom end of the base (1) is provided with an installation port for vertical installation. The axial flow fan (41) is installed in the installation port. The axial flow fan (41) is spaced apart at the bottom of the heating wire (3). Multiple guide components (42) are arranged in descending order from bottom to top on the heating wire (3). The guide component (42) includes a vertical ring plate and an inclined ring plate. The inclined ring plate is fixedly installed on the centrifugal side of the inclined ring plate. A switch valve (6) is provided at the bottom of the inclined ring plate. A temperature sensor (7) is provided on the proximal side of each vertical ring plate. The temperature sensor (7) is electrically connected to a controller. The controller is electrically connected to each switch valve (6).

3. The high-precision planar heating stage according to claim 1, characterized in that: The cylindrical adjustment seat includes a support seat and a screw. The support seat is fixedly installed on the top of the screw. Each of the mounting holes is provided with a thread that matches the screw. The screw is screwed into the mounting hole. The bottom end of the screw is provided with an extension end that extends to the bottom of the heat conduction plate (2).

4. A high-precision planar heating stage according to claim 1, characterized in that: The base (1) is provided with a first internal thread hole at each of its four corners, and the heat conduction plate (2) is provided with a second internal thread hole at each of its four corners that is adapted to the first internal thread hole. A stud (8) is screwed into both the first internal thread hole and the second internal thread hole.

5. A method of using a high-precision planar heating stage according to any one of claims 1-4, characterized in that: Step S1: Real-time temperature data of the corresponding airflow area is collected in real time by temperature sensors (7) set on the proximal side of each vertical ring plate. Step S2: Input multiple real-time temperature data into the controller. The controller calculates the temperature uniformity index between different areas of the heating plane and determines whether the current heating plane has reached a uniform heating state. Step S3: If the judgment result is that the uniform heating state has not been reached, the controller calculates and generates the opening adjustment parameters of the corresponding switch valve (6) based on the difference between the real-time temperature data of each area and the preset target temperature value. Step S4: The controller sends a control command to the corresponding switch valve (6) according to the opening adjustment parameters, and adjusts its opening synchronously to change the distribution of hot air flow through the corresponding guide (42) until the temperature of each area of ​​the heating plane reaches a uniform state.

6. The method of using the high-precision planar heating stage according to claim 5, characterized in that, In step S2, determining whether the current heating plane has reached a uniform heating state includes: Step S21: The controller receives the real-time temperature data uploaded by all temperature sensors (7), calculates the difference between the highest and lowest temperature values ​​in all real-time temperature data, and obtains the real-time temperature range. Step S22: Determine whether the real-time temperature difference is less than or equal to the preset allowable temperature difference threshold. If yes, determine that the heating plane has reached a uniform heating state; otherwise, determine that the heating plane has not reached a uniform heating state.

7. The method of using the high-precision planar heating stage according to claim 5, characterized in that, In step S3, calculating and generating the opening adjustment parameters of the corresponding switching valve (6) includes: Step S31: For the corresponding area monitored by temperature sensor (7) T_i, obtain its real-time temperature data T_ri; Step S32: Calculate the difference ΔT_i between the real-time temperature data T_ri and the preset target temperature value T_set for this area; Step S33: Based on the magnitude and sign of the difference ΔT_i, calculate the opening change ΔK_i of the corresponding switch valve (6) V_i that needs to be adjusted through the preset PID control model, and use it as the opening adjustment parameter.

8. The method of using the high-precision planar heating stage according to claim 5, characterized in that, In step S4, the synchronous adjustment of the opening degree includes: the controller simultaneously sends all the calculated opening adjustment parameters to the corresponding switch valves (6), and all the relevant switch valves (6) adjust to their respective target opening degrees within the preset synchronization time window after receiving the control command.

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