Data processing method for graphical design processing

Abstract

The invention relates to the technical field of graphical design and processing, and discloses a data processing method for graphical design and processing, and the method comprises the steps: obtaining an image-text; decomposing the image-text based on the grating period to obtain a plurality of primary decomposed image-texts; decomposing each primary decomposed image-text based on a grating angle to obtain a plurality of secondary decomposed images-texts; performing data amplification cutting processing on each secondary decomposed image-text to obtain an exposure matrix array corresponding to each secondary decomposed image-text; scanning exposure processing is performed on each exposure matrix array. According to the method disclosed by the invention, based on double-layer decomposition of the pattern layer and the data layer, the scanning, tiling and exposure of any pattern can be realized according to the data resolution of the direct-writing photoetching equipment, and the method has the advantages that the processing efficiency is high, the minimum feature size of the pattern reaches sub-nanometer, the breadth is not limited by graphical design software, and the like.

Description

Technical Field

[0001] This invention relates to the field of graphical design and processing technology, and more specifically to a data processing method for graphical design and processing. Background Technology

[0002] The original technical approach involved processing graphical subwavelength grating layouts of different sizes through graphical design and pixel definition. Graphical design is limited by the design software, with a maximum design size of 30,000 × 30,000 pixels. The layout size can only be expanded by defining the pixel size. For example, when the pixel size is defined as 10 micrometers, the layout size in a 30,000 × 30,000 pixel area is 300 × 300 mm. In this case, the minimum detail feature is 10 micrometers. For layouts requiring continuous phase modulation, this can only be achieved through sampling. When the pixel size is set to 0.5 micrometers, the layout size is only 15 × 15 mm for the same pixel size, thus failing to achieve compatibility between fine continuous features and the processing size.

[0003] Because the layout contains different raster angles and periods, the original technical approach decomposed the layout according to the raster period and then sequentially photolithographically etched each period's file in a step-by-step manner. This step-by-step movement involves the XY platform moving point by point for exposure. During this movement, the platform needs to undergo acceleration, deceleration, and position determination, resulting in slow scanning speed, low exposure processing efficiency, and unsuitability for large-format processing. Summary of the Invention

[0004] In view of this, the present invention provides a data processing method for graphical design and processing, in order to solve the problems that traditional methods cannot achieve fine continuous features and are compatible with processing size, have low processing efficiency, and are not suitable for large-format processing.

[0005] In a first aspect, the present invention provides a data processing method for graphical design and processing, the method comprising:

[0006] Get images and text;

[0007] Based on the grating period decomposition image, several first-order decomposition images are obtained;

[0008] Based on the grating angle decomposition, each primary decomposition image is obtained, resulting in several secondary decomposition images.

[0009] Each secondary decomposed image is magnified and segmented to obtain the exposure matrix array corresponding to each secondary decomposed image.

[0010] Perform a scan exposure process on each exposure matrix array.

[0011] The data processing method for graphical design and processing provided in this invention decomposes the graphics and text multiple times, making the graphic data processing process compatible with different graphic and text sizes, and facilitating fine segmentation and expansion, thereby improving processing accuracy and efficiency.

[0012] In one optional implementation, based on the grating period decomposition pattern, several first-order decomposition patterns are obtained, including:

[0013] When the image and text are vector images, the vector images are decomposed according to the layer number to obtain several different first-order decomposed images and texts corresponding to different raster periods. Different layer numbers correspond to different raster periods.

[0014] When the image is a bitmap image, the bitmap image is decomposed according to the Alpha channel index value of the bitmap to obtain several different first-order decomposed images corresponding to different raster periods. Different Alpha channel index values ​​correspond to different raster periods.

[0015] The data processing method for graphical design and processing provided in this embodiment of the invention decomposes different types of graphics using different methods, providing a data foundation for subsequent decomposition and scanning exposure of the decomposed graphics, and enabling the graphic data processing process to support both vector file design processing and bitmap data processing.

[0016] In one optional implementation, each primary decomposition image is decomposed based on the grating angle to obtain several secondary decomposition images, including:

[0017] When the text and images are vector graphics, each layer file of the first decomposed text and images is decomposed according to the data layer to obtain several different second decomposed text and images corresponding to different raster angles. Different data layers correspond to different raster angles.

[0018] When the image and text are bitmap images and text, the grayscale bitmap of each first decomposed image and text is decomposed according to the grayscale value to obtain several different second decomposed images and text corresponding to different raster angles. Different grayscale values ​​correspond to different raster angles.

[0019] The data processing method for graphical design and processing provided in this invention decomposes a first-decomposed graphic into a second-decomposed graphic, providing a data foundation for subsequent cutting and expansion. The different decomposition methods enable the graphic data processing method of this invention to support not only multi-cycle but also multi-angle raster hybrid nesting plate making.

[0020] In one optional implementation, each secondary decomposed image is magnified and segmented to obtain an exposure matrix array corresponding to each secondary decomposed image, including:

[0021] When the image and text are vector graphics, the vector graphics are rasterized based on the data resolution of the direct-write lithography equipment to form a new first pixel matrix;

[0022] The first pixel matrix is ​​segmented based on the segmentation matrix determined by the size of the vector graphic. The segmented first pixel matrix is ​​then expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

[0023] When the image is a bitmap, the bitmap image is enlarged by a preset factor based on the preset pixel size and the data resolution of the direct-write lithography equipment to form a new second pixel matrix;

[0024] The second pixel matrix is ​​segmented based on the segmentation matrix determined by the bitmap image size. The segmented second pixel matrix is ​​then expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

[0025] The data processing method for graphic design and processing provided in this embodiment of the invention expands and divides the secondary decomposed graphics, so that different graphics processing is not affected by the pixel limitations of bitmap design, thus providing a data processing foundation for subsequent scanning-type fast raster exposure.

[0026] In one alternative implementation, performing a scanning exposure process on the exposure matrix array includes:

[0027] A single exposure matrix array is divided into several rows according to the scanning direction to form several scan rows;

[0028] The scan data within a scan line is uploaded to the onboard memory for exposure. The scan data includes segmentation matrix data, a set of stitching step coordinates, and a set of exposure position coordinates.

[0029] Based on the grating angle and scan data of the exposure matrix array, a single-pulse scan exposure is performed on the scan lines until all scan lines contained in a single exposure matrix array have been scanned and exposed, thus obtaining the exposure of a single exposure matrix array.

[0030] The data processing method for graphical design and processing provided in this invention improves machine scanning automation, reduces manual monitoring, saves adjustment time, and increases scanning efficiency by calculating scanning data such as exposure coordinate sets and stitching step coordinate sets.

[0031] In one optional implementation, the method further includes performing single-pulse scan exposure on the scan rows based on the grating angle and scan data of the exposure matrix array, until all scan rows contained in a single exposure matrix array have been scanned and exposed, thus obtaining the exposure of the single exposure matrix array:

[0032] Repeat the single-pulse scanning exposure to obtain the exposure of a single exposure matrix array until the exposure of all exposure matrix arrays is completed. The exposure of all exposure matrix arrays includes the exposure of all exposure matrix arrays of a single decomposed image corresponding to a single grating period.

[0033] Switch the grating period and repeat the exposure steps for all exposure matrix arrays of a single grating period until the exposure of all exposure matrix arrays corresponding to all grating periods is completed.

[0034] The data processing method for graphic design and processing provided in this embodiment of the invention completes the scanning exposure of a single scan line, and then completes the scanning exposure of the entire graphic based on the steps of completing the scanning exposure of the single scan line and the decomposed and segmented graphic layers, thereby realizing refined design and processing and graphic data processing without pixel limitations.

[0035] In a second aspect, the present invention provides a scanning-type rapid grating exposure apparatus, the apparatus comprising:

[0036] The image and text acquisition module is used to acquire images and text.

[0037] The image decomposition module is used to decompose images based on grating period to obtain primary decomposed images; and to decompose primary decomposed images based on grating angle to obtain secondary decomposed images.

[0038] The cutting and expansion module is used to enlarge and cut the secondary decomposed images and text to obtain an exposure matrix array;

[0039] The scanning exposure module is used to perform scanning exposure processing on the exposure matrix array.

[0040] Thirdly, the present invention provides a computer device, comprising: a memory and a processor, the memory and the processor being communicatively connected to each other, the memory storing computer instructions, and the processor executing the computer instructions to perform the data processing method for graphical design and processing described in the first aspect or any corresponding embodiment thereof.

[0041] Fourthly, the present invention provides a computer-readable storage medium storing computer instructions for causing a computer to execute the data processing method for graphical design and processing described in the first aspect or any corresponding embodiment thereof.

[0042] Fifthly, the present invention provides a computer program product, including computer instructions for causing a computer to execute the data processing method for graphical design and processing described in the first aspect or any corresponding embodiment thereof. Attached Figure Description

[0043] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0044] Figure 1 This is a flowchart illustrating a data processing method for graphical design and processing according to an embodiment of the present invention;

[0045] Figure 2 This is a flowchart illustrating another data processing method for graphical design and processing according to an embodiment of the present invention;

[0046] Figure 3 This is a flowchart illustrating another data processing method for graphical design and processing according to an embodiment of the present invention;

[0047] Figure 4 This is a flowchart illustrating another data processing method for graphical design and processing according to an embodiment of the present invention;

[0048] Figure 5 This is a flowchart illustrating another data processing method for graphical design and processing according to an embodiment of the present invention;

[0049] Figure 6 This is a structural block diagram of a scanning rapid grating exposure apparatus according to an embodiment of the present invention;

[0050] Figure 7 This is a schematic diagram of the hardware structure of a computer device according to an embodiment of the present invention;

[0051] Figure 8 A schematic diagram of the exposure matrix array of the segmented and expanded vector graphic according to an embodiment of the present invention;

[0052] Figure 9 A schematic diagram of the exposure matrix array of the segmented and expanded bitmap image according to an embodiment of the present invention;

[0053] Figure 10 A schematic diagram of the scanning exposure direction according to an embodiment of the present invention;

[0054] Figure 11 A schematic diagram of a vector graphic structure according to an embodiment of the present invention;

[0055] Figure 12 A schematic diagram of a bitmap image structure according to an embodiment of the present invention. Detailed Implementation

[0056] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0057] Graphical design is limited by design software, with a maximum design size of 30000×30000 pixels. The layout can only be expanded by defining pixel dimensions, and traditional methods cannot achieve fine, continuous features compatible with the processing size. Because the layout contains different raster angles and periods, traditional methods require the platform to undergo acceleration, deceleration, and position determination scanning during movement, resulting in slow scanning speeds, low exposure and processing efficiency, and unsuitability for large-format processing. This invention provides a data processing method for graphical design processing. Through double-layer decomposition of layer data and digital magnification processing according to the data resolution of direct-write lithography equipment, it can achieve scanning and tiling exposure of arbitrary patterns, resulting in high processing efficiency, sub-nanometer minimum feature size, and no limitation on the processing size by the graphical design software.

[0058] According to an embodiment of the present invention, a data processing method for graphical design processing is provided. It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Furthermore, although a logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than that shown here.

[0059] This embodiment provides a data processing method for graphical design and processing, which can be used on mobile terminals such as mobile phones and tablets. Figure 1 This is a flowchart of a data processing method for graphical design and processing according to an embodiment of the present invention, such as... Figure 1 As shown, the process includes the following steps:

[0060] Step S101: Obtain images and text.

[0061] Obtain the image and text to be processed. The image and text are subwavelength grating patterns, which contain different grating periods and grating angles.

[0062] Step S102: Based on the grating period decomposition image, several first-order decomposition images are obtained.

[0063] The grating period refers to the period of the grating structure. The subwavelength grating pattern is decomposed for the first time according to different grating periods. The first decomposition yields several decomposed images.

[0064] Step S103: Decompose each primary decomposed image based on the grating angle to obtain several secondary decomposed images.

[0065] A grating splits incident light into different directions through diffraction. Light of different wavelengths propagates towards different grating angles. Based on the different grating angles, each primary decomposed image is decomposed a second time, resulting in several secondary decomposed images.

[0066] Step S104: Perform data enlargement and segmentation processing on each secondary decomposed image to obtain the exposure matrix array corresponding to each secondary decomposed image.

[0067] Each secondary decomposition image is cut into several parts, and each part is enlarged by the same proportion to obtain an enlarged secondary decomposition image. This enlarged secondary decomposition image is an exposure matrix array, and each secondary decomposition image corresponds to an exposure matrix array.

[0068] Step S105: Perform scan exposure processing on each exposure matrix array.

[0069] Exposure is performed on a single exposure matrix array, which in turn exposes a single grating period, thereby expanding and processing the subwavelength grating pattern.

[0070] The data processing method for graphic design and processing provided in this embodiment can decompose graphics and text according to the raster period and raster angle, and thus be compatible with multi-period and multi-angle raster mixed nesting plate making processing.

[0071] This embodiment provides a data processing method for graphical design and processing, which can be used in the aforementioned mobile terminals, such as mobile phones and tablet computers. Figure 2 This is a flowchart of a data processing method for graphical design and processing according to an embodiment of the present invention, such as... Figure 2 As shown, the process includes the following steps:

[0072] Step S201: Obtain images and text. For details, please refer to [link / reference]. Figure 1 Step S101 of the illustrated embodiment will not be described again here.

[0073] Step S202: Based on the grating period decomposition image, several first-order decomposition images are obtained.

[0074] Specifically, step S202 includes:

[0075] Step S2021: When the image and text are vector images, decompose the vector images according to the layer number to obtain several different first-order decomposed images and texts corresponding to different raster periods. Different layer numbers correspond to different raster periods.

[0076] Decomposition by layer number refers to classifying graphics and text, designing graphics and text using design software such as LEDIT-GDS, and different raster periods correspond to different layer numbers. The decomposed graphics and text obtained by decomposing based on layer number correspond to different raster periods.

[0077] Step S2022: When the image is a bitmap image, the bitmap image is decomposed according to the Alpha channel index value of the bitmap to obtain several different first-order decomposed images corresponding to different grating periods. Different Alpha channel index values ​​correspond to different grating periods.

[0078] Different alpha channel index values ​​correspond to different raster periods. The bitmap image is decomposed based on the alpha channel index value to obtain a first-order decomposed image corresponding to different raster periods.

[0079] Vector graphics and bitmap graphics are two different image formats, differing in their representation, image quality, file size, editing and modification capabilities, application areas, and compatibility. Vector graphics use lines and curves to describe images and can be scaled to any size without loss of quality. Bitmap graphics use pixels to describe images, offering rich colors and brightness, but may appear pixelated when enlarged.

[0080] Step S203: Based on the grating angle, each primary decomposed image is decomposed to obtain several secondary decomposed images. For details, please refer to [link to relevant documentation]. Figure 1 Step S103 of the illustrated embodiment will not be described again here.

[0081] Step S204 involves enlarging and cropping the data of each secondary decomposed image to obtain the exposure matrix array corresponding to each secondary decomposed image. For details, please refer to [link to details]. Figure 1 Step S104 of the illustrated embodiment will not be described again here.

[0082] Step S205: Perform a scan exposure process for each exposure matrix array. See details below. Figure 1 Step S105 of the illustrated embodiment will not be described again here.

[0083] The data processing method for graphical design and processing provided in this embodiment provides a data foundation for obtaining secondary decomposed graphics and text by performing a first decomposition of the graphics and text.

[0084] This embodiment provides a data processing method for graphical design and processing, which can be used in the aforementioned mobile terminals, such as mobile phones and tablet computers. Figure 3 This is a flowchart of a data processing method for graphical design and processing according to an embodiment of the present invention, such as... Figure 3 As shown, the process includes the following steps:

[0085] Step S301: Obtain images and text. For details, please refer to [link / reference]. Figure 1 Step S101 of the illustrated embodiment will not be described again here.

[0086] Step S302: Based on the grating periodic decomposition pattern, several first-order decomposition patterns are obtained. For details, please refer to [link to details]. Figure 1 Step S102 of the illustrated embodiment will not be described again here.

[0087] Step S303: Decompose each primary decomposed image based on the grating angle to obtain several secondary decomposed images.

[0088] Specifically, step S303 includes:

[0089] Step S3031: When the image and text are vector images and text, decompose each layer file of the first decomposed image and text according to the data layer to obtain several different second decomposed images and text corresponding to different raster angles. Different data layers correspond to different raster angles.

[0090] Vector graphics contain multiple layer files. The LEDIT-GDS program decomposes each layer file containing multiple data layers into multiple layer sub-files containing only a single data layer, so that each data layer corresponds to a raster angle, that is, each graphic sub-file has only one raster angle.

[0091] Step S3032: When the image is a bitmap image, the grayscale bitmap of each first decomposed image is decomposed according to the grayscale value to obtain several different second decomposed images corresponding to different raster angles. Different grayscale value ranges correspond to different raster angles.

[0092] The alpha channel uses 8 bits of binary data to represent 256 levels of grayscale. When the grayscale value is 0, it means that the pixel is completely transparent. Different grayscale value ranges correspond to different raster angles. By decomposing the grayscale bitmap of each primary decomposed image according to the grayscale value range, secondary decomposed images corresponding to different raster angles are obtained.

[0093] To decompose a grayscale bitmap file into four raster angles, you need to extract data with grayscale values ​​ranging from 0 to 63 from the grayscale bitmap file and generate a monochrome bitmap image file. Repeat this process to extract and generate three monochrome bitmap image files with grayscale values ​​ranging from 64 to 127, 128 to 191, and 192 to 255, respectively.

[0094] Step S304 involves enlarging and cropping the data of each secondary decomposed image to obtain the exposure matrix array corresponding to each secondary decomposed image. For details, please refer to [link to details]. Figure 1 Step S104 of the illustrated embodiment will not be described again here.

[0095] Step S305: Perform a scan exposure process for each exposure matrix array. See details below. Figure 1 Step S105 of the illustrated embodiment will not be described again here.

[0096] The data processing method for graphical design and processing provided in this embodiment provides a data foundation for the subsequent cutting and expansion of the graphics and text through a two-level decomposition of the first and second layers. This enables the method to support multi-cycle, multi-angle raster hybrid nested plate making, and also supports vector file design and is compatible with bitmap data processing.

[0097] This embodiment provides a data processing method for graphical design and processing, which can be used in the aforementioned mobile terminals, such as mobile phones and tablet computers. Figure 4 This is a flowchart of a data processing method for graphical design and processing according to an embodiment of the present invention, such as... Figure 4 As shown, the process includes the following steps:

[0098] Step S401: Obtain images and text. For details, please refer to [link / reference]. Figure 1 Step S101 of the illustrated embodiment will not be described again here.

[0099] Step S402: Based on the grating periodic decomposition pattern, several first-order decomposition patterns are obtained. For details, please refer to [link to details]. Figure 1 Step S102 of the illustrated embodiment will not be described again here.

[0100] Step S403: Decompose each primary decomposed image based on the grating angle to obtain several secondary decomposed images. For details, please refer to [link to relevant documentation]. Figure 1 Step S103 of the illustrated embodiment will not be described again here.

[0101] Step S404: Perform data enlargement and segmentation processing on each secondary decomposed image to obtain the exposure matrix array corresponding to each secondary decomposed image.

[0102] Specifically, step S404 includes:

[0103] Step S4041: When the image is a vector image, the vector image is rasterized based on the data resolution of the direct-write lithography device to form a new first pixel matrix.

[0104] Photolithography machines can be classified into contact lithography, direct-write lithography, and projection lithography. Proximity or contact lithography replicates the pattern on the photomask by getting infinitely close; direct-write lithography focuses a light beam to a point and achieves arbitrary pattern processing by scanning with a moving stage or lens.

[0105] The first pixel matrix is ​​segmented based on the segmentation matrix determined by the vector graphic size. The segmented first pixel matrix is ​​then expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

[0106] Spatial light modulators are commonly used optical devices that modulate wavefronts and have wide applications in information optics. Under active control, spatial light modulators can modulate a parameter of the light field through liquid crystal molecules. This includes modulating the amplitude of the light field, modulating the phase through refractive index, modulating the polarization state through rotation of the polarization plane, or achieving the conversion between incoherent and coherent light, thereby writing certain information into the light wave and achieving the purpose of light wave modulation. Spatial light modulators can conveniently load information into one-dimensional or two-dimensional light fields and utilize the advantages of wide bandwidth and multi-channel parallel processing to rapidly process the loaded information.

[0107] In this embodiment, the spatial light modulator can complete the secondary decomposition of the image and text, cutting and mapping transformation to obtain a new exposure matrix.

[0108] Rasterization refers to converting vector graphics files into bitmap data using LEDIT-GDS software and rasterization algorithms. The data resolution of the direct-write lithography equipment is known. Based on the data resolution R of the direct-write lithography equipment, a first pixel matrix with rows and columns of [M,N] is generated, where R×M is the width of the vector graphics file and R×N is the height of the vector graphics file.

[0109] The exposure dimensions of a single-frame vector graphic image are (w, h). Based on the data resolution R of the direct-write lithography equipment, the pixel dimensions [m, n] of the image under a single-frame exposure are determined, where m = w ÷ R and n = h ÷ R. [m, n] is used as the segmentation matrix. Then, the pixel matrix [M, N] is divided according to the segmentation matrix [m, n]. The pixel dimensions [m, n] are expanded according to the pixel resolution (W, H) of the spatial light modulator to form a new exposure matrix array, such as... Figure 8 The diagram shown is a schematic diagram of the exposure matrix array of the segmented and expanded vector graphics according to an embodiment of the present invention.

[0110] Step S4042: When the image is a bitmap image, the bitmap image is enlarged by a preset factor based on the preset pixel size and the data resolution of the direct-write lithography device to form a new second pixel matrix.

[0111] The second pixel matrix is ​​segmented based on the segmentation matrix determined by the bitmap image size. The segmented second pixel matrix is ​​then expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

[0112] Based on the preset pixel size D and the data resolution R of the direct-write lithography equipment, digital magnification is performed. Digital magnification means magnifying the bitmap file by a preset factor S to form a new second pixel matrix data [M,N], where the preset factor S = D ÷ R.

[0113] The size of a single-frame bitmap image exposure is (w, h). Based on the data resolution R of the direct-write lithography equipment, the pixel size [m, n] of the image under single-frame exposure is determined, where m = w ÷ R, n = h ÷ R. [m, n] is used as the segmentation matrix. Then, the second pixel matrix [M, N] is divided according to the segmentation matrix [m, n]. The pixel size [m, n] is expanded according to the pixel resolution (W, H) of the spatial light modulator to form a new exposure matrix array, such as... Figure 9 The diagram shown is a schematic diagram of the exposure matrix array of the segmented and expanded bitmap image according to an embodiment of the present invention.

[0114] Step S405: Perform a scan exposure process for each exposure matrix array. See details below. Figure 1 Step S105 of the illustrated embodiment will not be described again here.

[0115] The data processing method for graphical design and processing provided in this embodiment performs graphical data processing on large-size, large-format images by cutting and expanding the secondary decomposed images. This allows the images and text to be processed to be free from the limitations of 30,000×30,000 pixel bitmap design. The segmentation needs to be adjusted according to the process parameters of the direct-write lithography equipment, and provides the prerequisite for high-efficiency scanning exposure.

[0116] This embodiment provides a data processing method for graphical design and processing, which can be used in the aforementioned mobile terminals, such as mobile phones and tablet computers. Figure 5 This is a flowchart of a data processing method for graphical design and processing according to an embodiment of the present invention, such as... Figure 5 As shown, the process includes the following steps:

[0117] Step S501: Obtain images and text. For details, please refer to [link / reference]. Figure 1 Step S101 of the illustrated embodiment will not be described again here.

[0118] Step S502: Based on the grating periodic decomposition pattern, several first-order decomposition patterns are obtained. For details, please refer to [link to details]. Figure 1 Step S102 of the illustrated embodiment will not be described again here.

[0119] Step S503: Based on the grating angle, each primary decomposed image is decomposed to obtain several secondary decomposed images. For details, please refer to [link to relevant documentation]. Figure 1 Step S103 of the illustrated embodiment will not be described again here.

[0120] Step S504 involves enlarging and cropping the data of each secondary decomposed image to obtain the exposure matrix array corresponding to each secondary decomposed image. For details, please refer to [link to relevant documentation]. Figure 1 Step S104 of the illustrated embodiment will not be described again here.

[0121] Step S505: Perform scan exposure processing on each exposure matrix array.

[0122] Specifically, step S505 includes:

[0123] Step S5051: Divide the single exposure matrix array into several rows according to the scanning direction to form several scan rows.

[0124] A single exposure matrix array is divided into P scan rows according to the scanning direction, where the value of P is in the range of 0≤P≤M÷m, and m is the pixel width of the segmentation matrix [m,n]. Then, the scan rows are scanned and exposed one by one.

[0125] Step S5052: Upload the scan data within a scan line to the onboard memory for exposure. The scan data includes segmentation matrix data, a set of stitching step coordinates, and a set of exposure position coordinates.

[0126] Onboard memory includes the onboard memory of digital micromirror devices (DMDs) and the onboard memory of motion controllers.

[0127] The movement step of each scan line is m×R, and the stitching step of each scan line is X, which is the number of scan lines P multiplied by the movement step, i.e., X = P×m×R, forming a stitching step coordinate set: {X0,X1,X2…Xn}, where R is the data resolution of the direct-write lithography equipment, m is the pixel width of the segmentation matrix [m,n], P is the number of scan lines, and the exposure width of each scan line is the same, which is the stitching step X.

[0128] The segmentation matrix data is [m,n], the number of scan rows is P, and the set of stitching step coordinates of the scan rows is {X0,X1,X2…Xn}. These are then uploaded to the onboard memory of the DMD for exposure.

[0129] Calculate the set of exposure position coordinates {Y0,Y1,Y2…Yn} for the scan line, where Yn=K×n×R. Set K to the index of a segmentation matrix block within a scan line, 0≤K≤N÷n; n is the pixel height of the segmentation matrix [m,n], and R is the data resolution of the direct-write lithography device. Then, upload the coordinate set {Y0,Y1,Y2…Yn} to the onboard memory of the motion controller for exposure.

[0130] Step S5053: Perform single-pulse scanning exposure on the scan lines based on the grating angle and scanning data of the exposure matrix array until all scan lines contained in a single exposure matrix array have been scanned and exposed, thus obtaining the exposure of a single exposure matrix array.

[0131] The motion controller rotates the beam splitter axis to a specified angle according to the grating angle of the exposure matrix array, and at the same time controls the stepping axis to move to the stitching step coordinate position Xn where the scan line is located.

[0132] The motion controller starts moving the scanning axis and triggers pulse signals sequentially at the coordinate positions of the exposure position coordinate set {Y0,Y1,Y2…Yn} via the pulse trigger module. The motion controller sends one pulse signal to the pulse laser to generate a single pulse of light, and another pulse signal to the digital micromirror device to refresh the scanning data uploaded to the onboard memory of the digital micromirror device.

[0133] The single pulse of the pulsed laser, after passing through the beam expansion and collimation system, illuminates the digital micromirror device panel that refreshes the data, generating a patterned light spot. This spot then passes sequentially through a first-stage miniaturization system, a beam splitter, and a second-stage miniaturization system before illuminating the optically sensitive material, thus completing one pulse exposure and finishing one scan line.

[0134] Since the width of a single pulse is less than 50nm, the single-frame pattern retention time of the DMD is no more than 100um. Therefore, the scanning axis does not need to stop during the scanning process and only needs to maintain a constant speed.

[0135] Furthermore, before performing a scan exposure for one scan line, an exposure frequency F is determined based on the processing technology, where 1kHz ≤ F ≤ 10kHz. Based on the exposure frequency F, the moving speed V of the scanning axis can be determined as V = n × R ÷ F. The motion control system moves uniformly from Y0 to Yn at speed V. During this movement, the motion controller sends pulse signals at the exposure frequency F, one to the pulsed laser and the other to the digital micromirror device, such as... Figure 10 The diagram shown is a schematic representation of the scanning exposure direction according to an embodiment of the present invention.

[0136] Step S5054: Repeat the single-pulse scanning exposure to obtain the exposure of a single exposure matrix array until the exposure of all exposure matrix arrays is completed. The completion of the exposure of all exposure matrix arrays includes the exposure of all exposure matrix arrays of a single decomposed image corresponding to a single grating period.

[0137] After the scan exposure of a scan line is completed, the stepping axis moves to the next scan line, and steps S5052 to S5053 are repeated until all scan lines are completed, forming the exposure of a single exposure matrix array.

[0138] After a single exposure matrix array is exposed, the data for the next exposure matrix array is processed and the steps for exposing a single exposure matrix array are repeated until all single exposure matrix arrays are exposed. This means that the exposure of all exposure matrix arrays corresponding to a single decomposed image is completed, or the exposure of all exposure matrix arrays corresponding to a single raster period for a single decomposed image is completed.

[0139] Step S5055: Switch the grating period and repeat the exposure steps for all exposure matrix arrays of a single grating period until the exposure of all exposure matrix arrays corresponding to all grating periods is completed.

[0140] After all the exposure matrix arrays for a single grating period have been scanned and exposed, the grating period needs to be switched, and the steps of scanning and exposing all the exposure matrix arrays for a single grating period need to be repeated to complete the exposure of all array matrices for the corresponding grating period. This process continues until all the exposure matrix arrays for all grating periods have been exposed. Once all the exposure matrix arrays for all grating periods have been exposed, the processing and scanning exposure of the subwavelength grating pattern is complete.

[0141] The data processing method for graphic design and processing provided in this embodiment achieves an exposure efficiency of up to 10kHz by performing single-pulse scanning exposure on the scanning lines. It also supports dynamic scanning exposure with a scanning frequency of up to 10kHz. This method overcomes the shortcomings of traditional variable aperture lithography, which uses step-array exposure and has a maximum frequency of less than 50Hz. As a result, the processing efficiency of this invention is higher, meeting the requirements for large-format processing.

[0142] As one or more specific application embodiments of the present invention, the data processing method for graphical design and processing includes the following steps:

[0143] 1. Acquire images and text. Acquire the images and text to be processed. The images and text are subwavelength grating patterns, which contain different grating periods and grating angles.

[0144] Images and text include two types: vector graphics (GDS File) and bitmap graphics (BMP File).

[0145] Vector graphics (GDS files) consist of several layers, each with a layer number attribute (Layer1...Layer4), and each layer contains several data layers (date1, date2...). Figure 11 The diagram shown is a schematic diagram of a vector graphic structure according to an embodiment of the present invention.

[0146] A bitmap image file (BMP file) consists of several alpha channels. Each alpha channel has an index value attribute, and each alpha channel contains several grayscale bitmaps, such as... Figure 12 The image shown is a schematic diagram of a bitmap image structure according to an embodiment of the present invention.

[0147] 2. Based on the periodic decomposition of the grating, several first-order decomposition images are obtained.

[0148] The first decomposition of text and images differs between vector graphics and bitmap graphics.

[0149] When the image and text are vector graphics, the vector graphics are decomposed according to the layer number. Different layer numbers correspond to different raster periods, resulting in several different decomposed images and texts corresponding to different raster periods.

[0150] When the image is a bitmap, it is decomposed according to the index value of the alpha channel of the bitmap. Different alpha channels correspond to different raster periods, resulting in several different first-order decomposed images corresponding to different raster periods.

[0151] 3. Based on the grating angle, each primary decomposed image is decomposed to obtain several secondary decomposed images.

[0152] The second decomposition of text and images differs between vector graphics and bitmap graphics.

[0153] When the image and text are vector graphics, the first decomposition of the vector graphics is performed by data layers. Different data layers correspond to different raster angles, resulting in several different secondary decomposed images and texts corresponding to different raster angles.

[0154] When the image and text are bitmap images and text, the first decomposition of the bitmap image and text is performed on the grayscale bitmap image and text is performed on the second decomposition. Different grayscale value ranges correspond to different raster angles, resulting in several different secondary decomposition images and text corresponding to different raster angles.

[0155] 4. Enlarge and segment the data of each secondary decomposed image to obtain the exposure matrix array corresponding to each secondary decomposed image.

[0156] The methods for enlarging and cutting data for secondary decomposed graphics and text differ between vector graphics and bitmap graphics.

[0157] When the image and text are vector graphics, the vector graphics are rasterized based on the data resolution of the direct-write lithography equipment to form a new first pixel matrix.

[0158] The first pixel matrix is ​​segmented based on the segmentation matrix determined by the vector graphic size. The segmented first pixel matrix is ​​then expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

[0159] When performing data enlargement and segmentation on vector graphics after secondary decomposition, the first step is to rasterize the vector files to convert them into bitmap data. Rasterization is performed using the LEDIT-GDS software program and rasterization algorithm. Digital enlargement refers to scaling up the bitmap data proportionally.

[0160] When the image is a bitmap, the bitmap image is enlarged by a preset factor based on the preset pixel size and the data resolution of the direct-write lithography equipment to form a new second pixel matrix.

[0161] The second pixel matrix is ​​segmented based on the segmentation matrix determined by the bitmap image size. The segmented second pixel matrix is ​​then expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

[0162] 5. Perform scanning exposure processing on each exposure matrix array.

[0163] A single exposure matrix array is divided into several rows according to the scanning direction, forming several scan rows.

[0164] There is a one-to-one correspondence between the raster period and the first decomposition image; a one-to-many correspondence between the first decomposition image and the second decomposition image; a one-to-one correspondence between the second decomposition image and the exposure matrix array; and a one-to-many correspondence between a single exposure matrix array and the scan line.

[0165] First, complete the scanning exposure of one scan line. Repeat the scanning exposure steps to obtain one scan line until the scanning exposure of a single exposure matrix is ​​completed. Repeat the scanning exposure steps to obtain a single exposure matrix until the scanning exposure of all exposure matrices in a single raster period is completed. Repeat the scanning exposure steps to obtain all exposure matrices in a single raster period until the scanning exposure of all raster periods is completed.

[0166] This embodiment also provides a scanning rapid grating exposure apparatus for implementing the above embodiments and preferred embodiments; details already described will not be repeated. As used below, the term "module" can refer to a combination of software and / or hardware that performs a predetermined function. Although the apparatus described in the following embodiments is preferably implemented in software, hardware implementation, or a combination of software and hardware, is also possible and contemplated.

[0167] This embodiment provides a scanning-type rapid grating exposure device, such as... Figure 6 As shown, it includes:

[0168] The image and text acquisition module 601 is used to acquire images and text.

[0169] The image decomposition module 602 is used to decompose images based on grating period to obtain primary decomposed images; and to decompose primary decomposed images based on grating angle to obtain secondary decomposed images.

[0170] The cutting and expansion module 603 is used to enlarge and cut the secondary decomposed images and text to obtain an exposure matrix array.

[0171] The scanning exposure module 604 is used to perform scanning exposure processing on the exposure matrix array.

[0172] In some alternative implementations, the image / text decomposition module 602 includes:

[0173] The vector graphic decomposition unit is used to decompose the vector graphic according to the layer number when the graphic is a vector graphic, so as to obtain several different decomposed graphics corresponding to different raster periods. Different layer numbers correspond to different raster periods.

[0174] The bitmap image decomposition unit is used to decompose the bitmap image according to the alpha channel index value of the bitmap when the image is a bitmap image, so as to obtain several different decomposed images corresponding to different raster periods. Different alpha channel index values ​​correspond to different raster periods.

[0175] The vector graphics secondary decomposition unit is used to decompose each layer file of the primary decomposed graphics according to the data layer when the graphics are vector graphics, so as to obtain several different secondary decomposed graphics corresponding to different raster angles. Different data layers correspond to different raster angles.

[0176] The bitmap image decomposition unit is used to decompose the grayscale bitmap of each primary decomposed image according to the grayscale value when the image is a bitmap image, so as to obtain several different secondary decomposed images corresponding to different raster angles. Different grayscale values ​​correspond to different raster angles.

[0177] In some alternative implementations, the cutting expansion module 603 includes:

[0178] The vector graphic cutting and expansion unit is used to perform rasterization processing on the vector graphic based on the data resolution of the direct-write lithography device to form a new first pixel matrix when the graphic is a vector graphic; to divide the first pixel matrix based on the segmentation matrix determined by the size of the vector graphic; and to expand the segmented first pixel matrix according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

[0179] The bitmap image cutting and expansion unit is used to enlarge the bitmap image by a preset factor based on the preset pixel size and the data resolution of the direct-write lithography equipment when the image is a bitmap image, forming a new second pixel matrix; the second pixel matrix is ​​divided based on the segmentation matrix determined by the bitmap image size, and the segmented second pixel matrix is ​​expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

[0180] In some alternative implementations, the scanning exposure module 604 includes:

[0181] The scanning row unit is used to divide a single exposure matrix array into several rows according to the scanning direction, forming several scanning rows.

[0182] The scanning data upload unit is used to upload the scanning data in a scanning line to the onboard memory of the digital micromirror device for exposure. The scanning data includes segmentation matrix data, the set of exposure position coordinates of the scanning line, and the data resolution of the direct-write lithography equipment.

[0183] The exposure matrix exposure unit is used to perform single-pulse scanning exposure on the scan lines based on the grating angle and scan data to which the exposure matrix array belongs, until all scan lines contained in a single exposure matrix array have been scanned and exposed, thus obtaining the exposure of a single exposure matrix array; the single-pulse scanning exposure is repeated to obtain the exposure of a single exposure matrix array until the exposure of all exposure matrix arrays is completed, which includes the exposure of all exposure matrix arrays for a single decomposed image corresponding to a single grating period; the grating period is switched, and the steps of obtaining the exposure of all exposure matrix arrays for a single grating period are repeated until the exposure of all exposure matrix arrays corresponding to all grating periods is completed.

[0184] Further functional descriptions of the above modules and units are the same as those in the corresponding embodiments described above, and will not be repeated here.

[0185] In this embodiment, the scanning fast grating exposure apparatus is presented in the form of a functional unit. Here, a unit refers to an ASIC (Application Specific Integrated Circuit) circuit, a processor and memory that execute one or more software or fixed programs, and / or other devices that can provide the above functions.

[0186] This invention also provides a computer device having the above-described features. Figure 6 The scanning rapid grating exposure apparatus shown is shown.

[0187] Please see Figure 7 , Figure 7 This is a schematic diagram of the structure of a computer device provided in an optional embodiment of the present invention, such as... Figure 7 As shown, the computer device includes one or more processors 10, memory 20, and interfaces for connecting the components, including high-speed interfaces and low-speed interfaces. The components communicate with each other via different buses and can be mounted on a common motherboard or otherwise installed as needed. The processors can process instructions executed within the computer device, including instructions stored in or on memory to display graphical information of a GUI on external input / output devices (such as display devices coupled to the interfaces). In some alternative implementations, multiple processors and / or multiple buses can be used with multiple memories and multiple memory modules, if desired. Similarly, multiple computer devices can be connected, each providing some of the necessary operations (e.g., as a server array, a group of blade servers, or a multiprocessor system). Figure 7 Take a processor 10 as an example.

[0188] Processor 10 may be a central processing unit, a network processor, or a combination thereof. Processor 10 may further include a hardware chip. The hardware chip may be an application-specific integrated circuit (ASIC), a programmable logic device (PLD), or a combination thereof. The programmable logic device may be a complex programmable logic device (CAMP), a field-programmable gate array (FPGA), a general-purpose array logic (GDA), or any combination thereof.

[0189] The memory 20 stores instructions executable by at least one processor 10 to cause the at least one processor 10 to perform the method shown in the above embodiments.

[0190] The memory 20 may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created based on the use of the computer device. Furthermore, the memory 20 may include high-speed random access memory and may also include non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some alternative embodiments, the memory 20 may optionally include memory remotely located relative to the processor 10, and these remote memories may be connected to the computer device via a network. Examples of such networks include, but are not limited to, the Internet, intranets, local area networks, mobile communication networks, and combinations thereof.

[0191] The memory 20 may include volatile memory, such as random access memory; the memory may also include non-volatile memory, such as flash memory, hard disk or solid-state drive; the memory 20 may also include a combination of the above types of memory.

[0192] The computer device also includes an input device 30 and an output device 40. The processor 10, memory 20, input device 30, and output device 40 can be connected via a bus or other means. Figure 7 Taking the example of a connection between China and Israel via a bus.

[0193] Input device 30 can receive input numerical or character information, and generate key signal inputs related to user settings and function control of the computer device, such as a touchscreen, keypad, mouse, trackpad, touchpad, joystick, one or more mouse buttons, trackball, joystick, etc. Output device 40 may include display devices, auxiliary lighting devices (e.g., LEDs), and haptic feedback devices (e.g., vibration motors). The aforementioned display devices include, but are not limited to, liquid crystal displays, light-emitting diodes, displays, and plasma displays. In some alternative embodiments, the display device may be a touchscreen.

[0194] This invention also provides a computer-readable storage medium. The methods described above according to embodiments of the invention can be implemented in hardware or firmware, or implemented as computer code that can be recorded on a storage medium, or implemented as computer code downloaded via a network and originally stored on a remote storage medium or a non-transitory machine-readable storage medium and then stored on a local storage medium. Thus, the methods described herein can be processed by software stored on a storage medium using a general-purpose computer, a dedicated processor, or programmable or dedicated hardware. The storage medium can be a magnetic disk, optical disk, read-only memory, random access memory, flash memory, hard disk, or solid-state drive, etc.; further, the storage medium can also include combinations of the above types of memory. It is understood that computers, processors, microprocessor controllers, or programmable hardware include storage components capable of storing or receiving software or computer code, which, when accessed and executed by the computer, processor, or hardware, implements the methods shown in the above embodiments.

[0195] A portion of this invention can be applied as a computer program product, such as computer program instructions, which, when executed by a computer, can invoke or provide the methods and / or technical solutions according to the invention through the operation of the computer. Those skilled in the art will understand that the forms in which computer program instructions exist in a computer-readable medium include, but are not limited to, source files, executable files, installation package files, etc. Correspondingly, the ways in which computer program instructions are executed by a computer include, but are not limited to: the computer directly executing the instructions, or the computer compiling the instructions and then executing the corresponding compiled program, or the computer reading and executing the instructions, or the computer reading and installing the instructions and then executing the corresponding installed program. Here, the computer-readable medium can be any available computer-readable storage medium or communication medium accessible to a computer.

[0196] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A data processing method for graphical design and processing, characterized in that, The method includes: Get images and text; Based on the grating period decomposition image, several first-order decomposition images are obtained; Based on the grating angle decomposition, each primary decomposition image is obtained, resulting in several secondary decomposition images. Each secondary decomposed image is magnified and segmented to obtain the exposure matrix array corresponding to each secondary decomposed image. Perform a scan exposure process on each exposure matrix array.

2. The method according to claim 1, characterized in that, Based on the grating period decomposition image, several first-order decomposition images are obtained, including: When the image and text are vector images, the vector images are decomposed according to the layer number to obtain several different first-order decomposed images and texts corresponding to different raster periods. Different layer numbers correspond to different raster periods. When the image is a bitmap image, the bitmap image is decomposed according to the Alpha channel index value of the bitmap to obtain several different first-order decomposed images corresponding to different raster periods. Different Alpha channel index values ​​correspond to different raster periods.

3. The method according to claim 1, characterized in that, Based on the grating angle decomposition, each primary decomposition image yields several secondary decomposition images, including: When the text and images are vector graphics, each layer file of the first decomposed text and images is decomposed according to the data layer to obtain several different second decomposed text and images corresponding to different raster angles. Different data layers correspond to different raster angles. When the image and text are bitmap images and text, the grayscale bitmap of each first decomposed image and text is decomposed according to the grayscale value to obtain several different second decomposed images and text corresponding to different raster angles. Different grayscale values ​​correspond to different raster angles.

4. The method according to claim 1, characterized in that, Each secondary decomposed image is magnified and segmented to obtain the exposure matrix array corresponding to each secondary decomposed image, including: When the image and text are vector graphics, the vector graphics are rasterized based on the data resolution of the direct-write lithography equipment to form a new first pixel matrix; The first pixel matrix is ​​segmented based on the segmentation matrix determined by the size of the vector graphic. The segmented first pixel matrix is ​​then expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array. When the image is a bitmap, the bitmap image is enlarged by a preset factor based on the preset pixel size and the data resolution of the direct-write lithography equipment to form a new second pixel matrix; The second pixel matrix is ​​segmented based on the segmentation matrix determined by the bitmap image size. The segmented second pixel matrix is ​​then expanded according to the pixel resolution of the spatial light modulator to form a new exposure matrix array.

5. The method according to claim 1, characterized in that, Performing scanning exposure processing on the exposure matrix array includes: A single exposure matrix array is divided into several rows according to the scanning direction to form several scan rows; The scan data within a scan line is uploaded to the onboard memory for exposure. The scan data includes segmentation matrix data, a set of stitching step coordinates, and a set of exposure position coordinates. Based on the grating angle and scan data of the exposure matrix array, a single-pulse scan exposure is performed on the scan lines until all scan lines contained in a single exposure matrix array have been scanned and exposed, thus obtaining the exposure of a single exposure matrix array.

6. The method according to claim 5, characterized in that, The method further includes performing single-pulse scan exposure on the scan rows based on the grating angle and scan data of the exposure matrix array, until all scan rows contained in a single exposure matrix array have been scanned and exposed, thus obtaining the exposure of the single exposure matrix array. Repeat the single-pulse scanning exposure to obtain the exposure of a single exposure matrix array until the exposure of all exposure matrix arrays is completed. The completion of the exposure of all exposure matrix arrays includes the exposure of all exposure matrix arrays of a single decomposed image corresponding to a single grating period. Switch the grating period and repeat the exposure steps for all exposure matrix arrays of a single grating period until the exposure of all exposure matrix arrays corresponding to all grating periods is completed.

7. A scanning-type rapid grating exposure apparatus, characterized in that, The device includes: The image and text acquisition module is used to acquire images and text. The image decomposition module is used to decompose images based on grating period to obtain primary decomposed images; and to decompose primary decomposed images based on grating angle to obtain secondary decomposed images. The cutting and expansion module is used to enlarge and cut the secondary decomposed images and text to obtain an exposure matrix array; The scanning exposure module is used to perform scanning exposure processing on the exposure matrix array.

8. A computer device, characterized in that, include: A memory and a processor are communicatively connected, the memory stores computer instructions, and the processor executes the computer instructions to perform the data processing method for graphical design and processing as described in any one of claims 1 to 6.

9. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions for causing the computer to perform the data processing method for graphical design and processing as described in any one of claims 1 to 6.

10. A computer program product, characterized in that, It includes computer instructions for causing a computer to execute the data processing method for graphical design and processing as described in any one of claims 1 to 6.

Images