Polishing device with optical part conveying line

Abstract

The invention discloses a polishing device with an optical part conveying line, and relates to the technical field of optical part conveying, the polishing device comprises an auxiliary vacuum chamber and a main vacuum chamber, conveying devices are arranged in the auxiliary vacuum chamber and the main vacuum chamber, each conveying device comprises a rail, each rail is composed of a V-shaped guide rail and a plane guide rail, and a workpiece trolley is arranged on the outer surface of each rail; a workpiece clamp is arranged at the bottom of the workpiece trolley, rolling wheels are arranged on the two sides of the workpiece trolley, ball screws are arranged on the outer surfaces of the rails, an inner frame is arranged in the main vacuum chamber, a driving device is arranged in the inner frame, a pre-pressing mechanism is arranged in the auxiliary vacuum chamber, and a lifting device is arranged in the inner frame. Through the mechanism of the lead screw and the sliding block, the workpiece trolley is attracted to move by means of the electromagnet, the beneficial effects of accurate guiding, stable supporting, small vacuum chamber size, light weight and the like are achieved, and the conveying track is the combination of the V shape and the plane, so that the workpiece trolley is accurate in conveying guiding, stable in process, compact in structure and convenient to install and debug.

Description

Technical Field

[0001] This application relates to a transport device, and more specifically to the field of optical component transport technology, particularly to a polishing device with an optical component transport line. Background Technology

[0002] A polishing device with an optical component transport line is specifically designed for optical component processing, particularly in ion beam shaping, to facilitate the transport of optical components between processing stages and complete the polishing operation. In ion beam processing of optical components, single-vacuum-chamber ion beam polishing machines require vacuum breaking and re-vacuuming each time a workpiece is loaded or unloaded, increasing auxiliary time and reducing processing efficiency. Existing ion beam polishing machines often employ a dual-vacuum-chamber structure, including a main vacuum chamber and a secondary vacuum chamber. Processing is performed in the main vacuum chamber, while workpiece loading and unloading occur in the secondary vacuum chamber. The main vacuum chamber has a much larger volume than the secondary vacuum chamber. Dual-vacuum-chamber ion beam polishing machines only require vacuum breaking in the secondary vacuum chamber throughout the entire processing, thus significantly improving efficiency. However, this layout requires optical component transport and high-precision repetitive positioning between the main and secondary vacuum chambers.

[0003] Existing workpiece conveying drives mostly use traditional mechanical transmissions, such as chain drives and belt drives. These transmission methods are not only complex in structure and prone to failure, but the vibrations generated during transmission can also be transmitted to optical components, affecting processing accuracy and further reducing the accuracy and stability of processing. Summary of the Invention

[0004] In order to improve the problems of traditional mechanical transmission being prone to failure and affecting processing accuracy, this application provides a polishing device with an optical component transport line.

[0005] The polishing apparatus with an optical component transport line provided in this application adopts the following technical solution: A polishing apparatus with an optical component conveying line includes a secondary vacuum chamber and a primary vacuum chamber. Both the secondary and primary vacuum chambers are equipped with conveying devices. Each conveying device includes a set of tracks inside the secondary and primary vacuum chambers, each track consisting of a V-shaped guide rail and a flat guide rail. A workpiece carriage is mounted on the outer surface of the tracks. A workpiece clamp for holding optical components is mounted on the bottom of the workpiece carriage. Several rollers rolling on the outer surface of the tracks are mounted on both sides of the workpiece carriage. Ball bearing screws for abutting the workpiece carriage are mounted on the outer surface of the tracks. An inner frame is installed inside the primary vacuum chamber. A drive device for moving the workpiece carriage is installed inside the inner frame. Pre-compression mechanisms for abutting the tracks are installed inside the secondary and primary vacuum chambers. A lifting device for lifting the workpiece clamp is installed inside the inner frame.

[0006] By adopting the above technical solution, the secondary vacuum chamber and the main vacuum chamber constitute a segmented vacuum environment, effectively isolating contamination. The combination of V-shaped and planar guide rails ensures that the trolley will not derail or be over-constrained, runs smoothly, and is easy to assemble and adjust. The workpiece trolley is responsible for carrying and transporting optical components. Ball screws are used for mechanical locking after the trolley is in place. The inner frame, drive device, lifting device, and pre-pressurization mechanism in the main vacuum chamber work together to realize the entire process of the workpiece from the transportation state to being stably lifted and accurately positioned at the processing station. The use of an electromagnet adsorption structure to push and pull the workpiece trolley has the advantages of precise guidance, stable support, small vacuum chamber size, and lightweight. It also meets the working requirements of the vacuum environment, will not cause vacuum contamination due to volatilization / release, and can be remotely controlled and is simple and convenient to operate. The conveying track is a combination structure of V-shaped guide rail and planar guide rail, which makes the workpiece trolley stable during the conveying process, compact in structure, and easy to install and debug.

[0007] Preferably, both the secondary vacuum chamber and the main vacuum chamber are equipped with fixed seats, the pre-compression mechanism is located at the bottom of the fixed seats, and the track is located on the top surface of the fixed seats.

[0008] By adopting the above technical solution, the fixed seat serves as the mounting base for the track, providing rigid support for the entire conveyor line. The pre-compression mechanism is located at the bottom of the fixed seat. Its function is to actively eliminate the slight deformation and gaps of the track caused by its own weight, thermal deformation, or stress by applying a continuous and adjustable upward or constraint force, thereby improving the static and dynamic accuracy of the entire conveyor reference surface from the source.

[0009] Preferably, the outer surface of the workpiece carriage is provided with an L-shaped connecting plate, the bottom of the L-shaped connecting plate is fixedly connected to the workpiece fixture, an iron block is provided on the side of the workpiece carriage near the main vacuum chamber, and a number of positioning holes are opened on the bottom surface of the workpiece fixture.

[0010] By adopting the above technical solution, the L-shaped connecting plate is a rigid connecting part between the workpiece fixture and the main body of the carriage. The workpiece fixture directly carries and clamps the optical parts. The positioning hole at its bottom is a key interface for docking with the lifting device, which is used to transmit precise positioning and lifting actions. The iron block set on the side of the carriage is a coupling component for realizing non-contact magnetic drive, which allows the drive device to drive the internal carriage to move outside the vacuum chamber.

[0011] Preferably, the driving device includes an outer frame disposed inside the inner frame, a reciprocating lead screw driven by a vacuum motor is disposed inside the outer frame, a slider is disposed on the outer surface of the reciprocating lead screw and slidably disposed inside the outer frame, and a connecting rod is disposed at the bottom of the slider.

[0012] By adopting the above technical solution, the outer frame serves as the installation and guiding foundation, the reciprocating lead screw driven by the vacuum motor serves as the power source, converting the rotational motion into linear motion, and the slider and connecting rod serve as the power output end, with magnets installed at their ends. The magnets are sent to a position close to the iron block of the trolley through the connecting rod, thereby generating a magnetic attraction force to pull the trolley to make precise reciprocating linear motion on the track.

[0013] Preferably, the lifting device includes a fixing plate disposed on the outer surface of the inner frame, and the outer surface of the fixing plate is provided with three L-shaped slide rods, and the outer surface of the L-shaped slide rods is provided with positioning pins that are adapted to be inserted into the positioning holes.

[0014] By adopting the above technical solution, the fixed plate and L-shaped slide rods form a high-rigidity lifting frame. The positioning pins at the top of the three L-shaped slide rods are precisely aligned with the positioning holes at the bottom of the workpiece fixture. During operation, the lifting device rises as a whole, and the positioning pins are precisely inserted into the positioning holes, thereby smoothly and vertically lifting the workpiece fixture and the optical components on it away from the workpiece carriage, realizing the separation of the workpiece from the transportation system, and providing a non-interference, highly stable positioning platform for processing.

[0015] Preferably, the outer surface of the workpiece carriage is provided with an auxiliary mechanism for limiting the workpiece carriage. The auxiliary mechanism includes a rectangular groove formed on the top surface of the track, collection frames provided on both sides of the bottom of the track, a rack provided at the bottom of the track, an auxiliary frame provided on the side of the workpiece carriage near the rack, a locking device for limiting the workpiece carriage provided inside the auxiliary frame, and a lubrication device for lubricating the rollers provided inside the auxiliary frame.

[0016] By adopting the above technical solution, the collection frame is located at both ends of the track to collect the vacuum grease and metal particles that have been collected, keeping the vacuum chamber clean. The rack is a toothed track that triggers lubrication and locks in one direction. The auxiliary frame is the carrier for installing all auxiliary functional components. Its internal locking device realizes the one-way movement locking of the trolley, and the lubrication device realizes automatic fixed-point lubrication during operation.

[0017] Preferably, the locking device includes a rotating shaft rotatably disposed inside the auxiliary frame, the outer surface of the rotating shaft is provided with a pawl that can lock between two adjacent teeth of the rack, a torsion spring sleeved on the outer surface of the rotating shaft is provided between the pawl and the auxiliary frame, and a reset device for canceling the workpiece carriage limit is provided inside the auxiliary frame.

[0018] By adopting the above technical solution, the rotating shaft, pawl, and torsion spring constitute a one-way clutch. Under the action of the torsion spring, the pawl automatically engages in the tooth groove of the rack, preventing the carriage from moving in the direction of the secondary vacuum chamber (reverse direction), ensuring that the position of the carriage is absolutely fixed during processing. The reset device is used to release the pawl from its engaged state when the carriage needs to return.

[0019] Preferably, the reset device includes a displacement block disposed on the bottom surface of the track, a reset block disposed on the side of the track away from the displacement block, a connecting post slidably disposed inside the auxiliary frame, an H-shaped auxiliary block disposed on the top of the connecting post, a cylinder one disposed on the side of the H-shaped auxiliary block near the displacement block, a cylinder two disposed on the side of the H-shaped auxiliary block away from the cylinder one, a protruding ring disposed on the outer surface of the connecting post that engages with the inside of the auxiliary frame, a protrusion disposed on the inner side of the pawl, and a wedge-shaped block disposed at the bottom of the connecting post that abuts against the protrusion.

[0020] By adopting the above technical solution, the displacement block and the reset block are trigger modules fixed at different positions on the track, while cylinder one and cylinder two are trigger rods installed on the H-shaped auxiliary block. When the trolley moves from the auxiliary chamber to the main chamber, cylinder one slides over the inclined surface one of the displacement block, causing the wedge block to lift up without interfering with the pawl. When the trolley needs to return after being positioned in the main chamber, the drive device drives the trolley to move slightly in the opposite direction, causing cylinder two to enter the sliding groove two of the reset block. Under the action of inclined surface two, the H-shaped auxiliary block and the connecting column are pressed down, and the wedge block presses down on the protrusion, forcing the pawl to overcome the torsion spring force and rotate to disengage from the rack, thereby releasing the one-way lock.

[0021] Preferably, the lubrication device includes a gear 1 rotatably disposed inside an auxiliary frame, a fixed frame disposed at the bottom of the auxiliary frame, a bevel gear set rotatably disposed inside the fixed frame at the bottom of the rotating shaft of the gear 1, a reciprocating screw 2 rotatably disposed inside the fixed frame on the side of the bevel gear set away from the gear 1, an auxiliary cylinder disposed inside the workpiece carriage, a sliding ring slidably disposed inside the auxiliary cylinder on the outer surface of the reciprocating screw 2, a piston slidably disposed inside the auxiliary cylinder on one side of the sliding ring, and an extrusion head disposed on the side of the auxiliary cylinder near the roller.

[0022] By adopting the above technical solution, gear one meshes with the rack at the bottom of the track, converting the linear motion of the trolley into rotational motion. The power direction is changed by the bevel gear set and transmitted to the reciprocating screw two. The rotation of the reciprocating screw two drives the sliding ring and piston to perform reciprocating linear motion in the auxiliary cylinder, thereby extruding vacuum grease from the extruder head and realizing automatic lubrication of the rollers during operation.

[0023] Preferably, the track has an inclined groove inside, and the inclined groove slopes from the middle of the track to both ends.

[0024] By adopting the above technical solution, the inclined groove inside the track, with its structure tilting from the middle to both ends, allows the minute wear metal particles generated during operation to automatically flow to both ends of the track under the action of gravity, and finally flow into the collection box, preventing oil stains from accumulating on the critical track bearing surface, and ensuring the stability and cleanliness of operation.

[0025] In summary, this application includes at least one of the following beneficial technical effects: 1. A conveying mechanism consisting of a lead screw, a single slide rail / slider, and a vacuum motor, along with an electromagnet to attract the workpiece carriage, is used to push and pull the workpiece carriage, thereby transporting optical components from the secondary vacuum chamber to the main vacuum chamber. The electromagnet attraction structure for pushing and pulling the workpiece carriage offers advantages such as precise guidance, stable support, prevention of over-positioning, small vacuum chamber size, and lightweight design. It also meets the requirements for working in a vacuum environment, preventing vacuum contamination due to evaporation / release. Furthermore, it allows for remote control and is simple and convenient to operate. The conveying track is a combination of V-shaped guide rails and flat guide rails, ensuring accurate guidance, smooth movement, a compact structure, and easy installation and debugging of the workpiece carriage during transport.

[0026] 2. When the workpiece carriage enters the main vacuum chamber, the lifting and positioning device directly connects with the positioning hole of the workpiece fixture through the positioning pin, lifting the workpiece and separating it from the carriage. In conjunction with the pre-pressing mechanism, the workpiece carriage waits in place until the optical components are processed, at which point it is accurately lowered back onto the workpiece carriage. This improves positioning accuracy and ensures the accuracy of ion beam shaping, thereby eliminating the influence of errors in the workpiece carriage itself and track clearances on positioning. This ensures the workpiece remains stable during processing and greatly improves the sub-nanometer precision of ion beam shaping. The pre-pressing mechanism installed in the secondary vacuum chamber prevents the optical components and workpiece carriage from shifting due to vibration or machine tool reference surface tilt, thus improving positioning accuracy and ensuring the accuracy of the transport motion.

[0027] 3. The piston moves within the auxiliary cylinder via a transmission structure consisting of gear one, bevel gear set, and reciprocating screw two, causing vacuum grease to be extruded from the extrusion head. This provides good lubrication for the movement of rollers in the workpiece carriage, reducing wear and extending the service life of the equipment. Furthermore, the lubrication system is highly automated, requiring no manual intervention. The rectangular grooves within the track cooperate with the collection frame to actively collect the wear particles generated during operation and guide them to both sides of the track.

[0028] 4. By utilizing the one-way locking structure composed of a pawl and a rack, combined with the triggering mechanism of the displacement block and the reset block, precise control of the workpiece carriage's movement direction is achieved. When the workpiece carriage is positioned in the main vacuum chamber, the pawl engages with the rack to prevent it from moving. When the workpiece carriage needs to return from the main vacuum chamber to the secondary vacuum chamber, the reset block drives the wedge block to move downward, thereby pushing the pawl outward to deflect it, preventing the pawl from engaging with the rack. This design makes the movement of the workpiece carriage more orderly and controllable, improves the stability and reliability of the entire device, and avoids the risk of positioning deviation or collision caused by misoperation. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of this application; Figure 2 This is a schematic diagram of the internal structure of the secondary vacuum chamber in this application; Figure 3 This is a schematic diagram of the connection structure of the iron blocks in this application; Figure 4 For the purposes of this application Figure 3 Enlarged schematic diagram of the structure at point A in the middle; Figure 5 This is a schematic diagram of the internal structure of the main vacuum chamber in this application; Figure 6 For the purposes of this application Figure 5 Enlarged schematic diagram of the structure at point B; Figure 7 This is a partial exploded view of the structure in this application; Figure 8 This is a schematic diagram of the connection structure of the collection frame in this application; Figure 9 This is a schematic diagram showing the positional relationship of the extruder heads in this application; Figure 10 This is a schematic diagram of the pawl connection structure in this application; Figure 11 This is a schematic diagram of the internal structure of the auxiliary cylinder in this application.

[0030] Reference numerals: 1. Secondary vacuum chamber; 2. Main vacuum chamber; 3. Inner frame; 4. Mounting base; 41. Track; 42. Ball screw; 5. Workpiece carriage; 51. Roller; 52. L-shaped connecting plate; 53. Workpiece fixture; 54. Positioning hole; 55. Iron block; 6. Outer frame; 61. Reciprocating lead screw one; 62. Slider; 63. Connecting rod; 7. Fixing plate; 71. L-shaped slide bar; 72. Positioning pin; 8. Auxiliary mechanism; 81. Rectangular groove; 82. Collection frame; 83. Rack; 84. Auxiliary frame; 85. Gear 1; 86. Pawl; 87. Rotating shaft; 88. Torsion spring; 89. Connecting column; 810. Wedge block; 811. Protrusion; 812. Convex ring; 813. H-shaped auxiliary block; 814. Cylinder one; 815. Cylinder two; 816. Fixing frame; 817. Bevel gear set; 818. Reciprocating lead screw two; 819. Auxiliary cylinder; 820. Sliding ring; 821. Piston; 822. Extrusion head; 823. Displacement block; 824. Reset block; 9. Pre-compression mechanism. Detailed Implementation

[0031] The following is in conjunction with the appendix Figures 1-11 This application will be described in further detail.

[0032] This application discloses a polishing apparatus with an optical component transport line.

[0033] Example 1 Reference Figures 1-7 A polishing device with an optical component conveying line includes a secondary vacuum chamber 1 and a main vacuum chamber 2. Both the secondary vacuum chamber 1 and the main vacuum chamber 2 are equipped with conveying devices. Each conveying device includes a set of tracks 41 installed inside the secondary vacuum chamber 1 and the main vacuum chamber 2. Both the secondary vacuum chamber 1 and the main vacuum chamber 2 are fixedly installed with a fixed base 4. A pre-pressing mechanism 9 is installed at the bottom of the fixed base 4. The tracks 41 are fixedly installed on the top surface of the fixed base 4. The tracks 41 are composed of a V-shaped guide rail and a flat guide rail. The outer surface of the track 41 is slidably connected to a workpiece carriage 5. The inner wall of the workpiece carriage 5 is symmetrically abutted by an L-shaped connecting plate 52. The bottom surface of the L-shaped connecting plate 52 is fixedly connected to a workpiece clamp 53, which is used to clamp optical parts. Several rollers 51 are rotatably connected to both sides of the workpiece carriage 5. The rollers 51 roll on the top surface of the track 41. An iron block 55 is fixedly installed on the side of the workpiece carriage 5 near the main vacuum chamber 2. Several positioning holes 54 are opened on the bottom surface of the workpiece clamp 53. A ball screw 42 is fixedly installed at the bottom of the track 41, which is used to abut the workpiece carriage 5. An inner frame 3 is fixedly connected inside the main vacuum chamber 2. A drive device is installed inside the inner frame 3. The drive device is used to drive the workpiece carriage 5 from the secondary vacuum chamber 1 into the main vacuum chamber 2. The drive device includes an outer frame 6, which is fixedly installed on the upper part of the inner wall of the inner frame 3. A reciprocating screw 61 is rotatably connected to the inner wall of the outer frame 6. The reciprocating screw 61 is connected to the vacuum motor through a coupling. A slider 62 is slidably connected to the outer surface of the reciprocating screw 61. A ball bearing and a reverser are installed inside the slider 62. The slider 62 is slidably connected to the inner wall of the outer frame 6. A connecting rod 63 is fixedly connected to the bottom of the slider 62. An electromagnet is fixedly installed at one end of the connecting rod 63 near the workpiece carriage 5. The electromagnet is used to attract and fix the iron block 55 fixedly installed on the outer surface of the workpiece carriage 5. Both the auxiliary vacuum chamber 1 and the main vacuum chamber 2 are equipped with a pre-pressure mechanism 9. The pre-pressure mechanism 9 is used to abut against the track 41. The pre-pressure mechanism 9 is used to prevent the optical parts and workpiece carriage 5 from shifting due to vibration and machine tool reference surface tilt, thereby improving positioning accuracy and ensuring the accuracy of conveying motion. The inner frame 3 is equipped with a lifting device. The lifting device is used to lift the workpiece fixture 53. The lifting device includes a fixed plate 7. The fixed plate 7 is fixedly connected to the top surface of the inner frame 3. Three L-shaped slide rods 71 ​​are slidably connected to the outer surface of the fixed plate 7. The three L-shaped slide rods 71 ​​are driven to move up and down by a vacuum motor. The outer surface of the L-shaped slide rods 71 ​​is fixedly connected to a positioning pin 72, and the positioning pin 72 is inserted into the positioning hole 54 for adaptation.

[0034] During operation, the pre-pressure mechanism 9 applies a stable pre-tightening force to the track 41 from the bottom, eliminating any minor deformations or gaps in the track 41 and creating a stable and precise reference platform for subsequent ion beam polishing. First, the workpiece carriage 5, containing optical components, is placed on the track 41 of the secondary vacuum chamber 1. After the processing command is issued, the drive unit of the main vacuum chamber 2 starts, and the control system starts the vacuum motor. The vacuum motor drives the reciprocating lead screw 61 to rotate, driving the slider 62 to move linearly along the outer frame 6. The slider 62, through the connecting rod 63, drives the powerful magnet at its end to move synchronously. The force attracts the iron block 55 on the workpiece carriage 5, causing the entire workpiece carriage 5 to move synchronously in a straight line along the track 41, pulling the workpiece carriage 5 from the secondary vacuum chamber 1 into the main vacuum chamber 2 along the track 41. After it is in place, the ball screw 42 abuts against the body of the workpiece carriage 5 to prevent it from moving. Then, the lifting device in the inner frame 3 is activated, and the positioning pin 72 fixedly connected to the top surface of the L-shaped slide rod 71 will be precisely inserted into the positioning hole 54 at the bottom of the workpiece fixture 53, thereby achieving precise positioning and lifting the workpiece fixture 53 and the optical parts it holds as a whole, separating it from the workpiece carriage 5.

[0035] Example 2 Reference Figures 8-10 An auxiliary mechanism 8 is provided on the outer surface of the workpiece carriage 5. The auxiliary mechanism 8 is used to limit the workpiece carriage 5. The auxiliary mechanism 8 includes a rectangular groove 81, which is opened on the inner wall of the track 41. Collection frames 82 are provided on both sides of the bottom of the track 41. An inclined groove is opened inside the track 41, and the inclined groove is inclined from the middle of the track 41 to both ends. The inclined groove and the rectangular groove 81 are connected to each other. A rack 83 is fixedly connected to the bottom of the track 41. An auxiliary frame 84 is fixedly connected to the side of the workpiece carriage 5 near the rack 83. A snap-fit ​​device is provided inside the auxiliary frame 84. The locking device is used to restrict the workpiece carriage 5. The locking device includes a rotating shaft 87, which is rotatably connected to the inner wall of the auxiliary frame 84. A pawl 86 is fixedly connected to the outer surface of the rotating shaft 87. The pawl 86 can be locked between two adjacent teeth of the rack 83 to achieve anti-backward locking of the workpiece carriage 5. A torsion spring 88 is fixedly connected to the top surface of the pawl 86. The side of the torsion spring 88 away from the pawl 86 is fixedly connected to the inner wall of the auxiliary frame 84, and the torsion spring 88 is sleeved on the outer surface of the rotating shaft 87. A reset device is provided inside the auxiliary frame 84 to cancel the limit of the workpiece carriage 5. The reset device includes a displacement block 823, which is fixedly connected to one side of the bottom surface of the track 41 and is located near the ball screw 42. A reset block 824 is fixedly connected to the side of the track 41 away from the displacement block 823. The displacement block 823 has a sliding groove 1 inside, and a slope 1 is provided on the side of the sliding groove 1 near the auxiliary frame 84. The reset block 824 has a sliding groove 2 inside, and a slope 2 is provided on the side of the sliding groove 1 away from the auxiliary frame 84. The slope 1 and slope 2 are in opposite directions. A connecting post 89 is slidably connected through the inside of the auxiliary frame 84. A rectangular block is fixedly connected to the outer surface of the connecting post 89 to prevent the connecting post 89 from rotating inside the auxiliary frame 84. An H-shaped auxiliary block 813 is fixedly connected to the top of the connecting post 89. A cylinder 814 is fixedly connected to the side of the H-shaped auxiliary block 813 closest to the displacement block 823, and a cylinder 815 is fixedly connected to the side of the H-shaped auxiliary block 813 furthest from the cylinder 814. A protruding ring 812 is fixedly connected to the outer surface of the middle part of the connecting post 89. The protruding ring 812 is engaged inside the auxiliary frame 84. A protrusion 811 is fixedly connected to the inner side of the pawl 86. The outer surface of the protrusion 811 is designed to be arc-shaped. A wedge block 810 is fixedly connected to the bottom of the connecting post 89. Furthermore, the wedge block 810 abuts against the protrusion 811. In the initial state, the cylinder 814 is level with the groove opened by the displacement block 823. At this time, the wedge block 810 does not contact the protrusion 811. When the auxiliary frame 84 moves and drives the cylinder 815 to move into the reset block 824, the rotating shaft 87, the H-shaped auxiliary block 813, and the wedge block 810 move downward together, thereby pushing the protrusion 811 to drive the pawl 86 to deflect outward together, so that the pawl 86 disengages from the teeth of the rack 83, and the workpiece carriage 5 is released from the restriction.

[0036] When the workpiece carriage 5 moves into the main vacuum chamber 2, the pawl 86 slides on the rack 83. Because the force of the torsion spring 88 constantly presses the pawl 86 against the rack 83, the tip of the pawl 86 will engage on the rear side of the current tooth groove of the rack 83. If the workpiece carriage 5 is subjected to a slight reverse force (such as vibration), the pawl 86 will immediately lock into the tooth surface, forming a mechanical hard stop, completely preventing the workpiece carriage 5 from moving towards the auxiliary vacuum chamber 1, ensuring the ultra-stability of the machining process. After machining, the workpiece carriage 5 needs to be returned to the auxiliary vacuum chamber 1. First, the drive device drives the workpiece carriage 5 towards the main vacuum chamber 2. At this time, the device installed in H... The cylinder 815 on the H-shaped auxiliary block 813 moves and enters the groove of the reset block 824 fixed on the track 41. Due to the design of the inclined surface, the cylinder 815 is forced to move downward, which drives the entire H-shaped auxiliary block 813, the connecting column 89 and the wedge block 810 to move downward. The lower inclined surface of the wedge block 810 presses the protrusion 811 on the inner side of the pawl 86, forcing the pawl 86 to rotate outward around the rotating shaft 87, so that its tip completely disengages from the tooth groove of the rack 83. Once the pawl 86 is disengaged, the one-way lock is released, and the workpiece carriage 5 can move freely in the opposite direction under the action of the drive device and return to the secondary vacuum chamber 1.

[0037] Reference Figures 10-11 The auxiliary frame 84 is equipped with a lubrication device for lubricating the roller 51. The lubrication device includes a gear 85, which is rotatably connected to the inner wall of the auxiliary frame 84 and is located on the side away from the pawl 86. A fixed frame 816 is fixedly connected to the bottom of the auxiliary frame 84. A bevel gear set 817 is fixedly connected to the bottom of the rotating shaft of the gear 85. The bevel gear set 817 is rotatably connected to the inner wall of the fixed frame 816. A reciprocating screw 818 is fixedly connected to the side of the bevel gear set 817 away from the gear 85 and is rotatably connected to the inner wall of the fixed frame 816. An auxiliary cylinder 819 is fixedly connected inside the workpiece carriage 5. A sliding ring 820 is slidably connected to the outer surface of the reciprocating lead screw 818. The sliding ring 820 is equipped with balls and a reversing device inside. The sliding ring 820 is slidably connected to the inner wall of the auxiliary cylinder 819. A piston 821 is fixedly connected to one side of the sliding ring 820. The piston 821 is located on the side away from the reciprocating lead screw 818. The piston 821 is slidably connected to the inner wall of the auxiliary cylinder 819. An extrusion head 822 is fixedly connected and communicated to the side of the auxiliary cylinder 819 near the roller 51.

[0038] As the workpiece carriage 5 moves on the track 41, the gear 85 on the auxiliary frame 84 meshes with the rack 83 at the bottom of the track 41 and rotates. The rotation of the gear 85, through the bevel gear set 817 at the lower end of its shaft 87, converts the power direction to be perpendicular to the track 41 and drives the reciprocating screw 818 to rotate. The rotation of the reciprocating screw 818 drives the sliding ring 820 on it to reciprocate along the axial direction. The sliding ring 820 drives the piston 821 to reciprocate within the auxiliary cylinder 819. The rotation of the reciprocating screw 818 and the sliding ring 820 drive the piston 821 to reciprocate within the auxiliary cylinder 819. Ring 820 and piston 821 move toward extrusion head 822. At this time, piston 821 applies stable and continuous pressure to the grease in front. This pressure causes the vacuum grease to be extruded through extrusion head 822 and applied to the surface of roller 51. A one-way valve is provided at the outlet of extrusion head 822 to prevent back suction. When piston 821 moves in the reverse direction, negative pressure is generated in auxiliary cylinder 819. At this time, new grease can be added to auxiliary cylinder 819 through an external metering mechanism (such as a plunger pump) to prepare for the next extrusion.

[0039] Among them, the vacuum grease is in jelly form. The auxiliary cylinder 819 is connected to the metering mechanism through a vacuum-sealed quick interface. A vacuum-compatible plunger pump or screw pump can be used as the power source to effectively deliver the vacuum grease and achieve accurate metering. The iron block 55 is made of soft magnetic material with low hysteresis and high permeability (such as DT4 electrical pure iron), and its outer surface is wrapped with a polyimide film. The inner frame 3 is equipped with a thermal compensation displacement sensor to monitor and compensate for the slight elongation of the track 41 caused by the heat of the drive device in real time. The track 41 is made of high-hardness martensitic stainless steel (SUS440C) with a hard chrome plating finish (parts inside a vacuum can be passivated) for wear resistance. The main body of the pawl 86 is made of stainless steel, and the tip of the pawl 86 is made of PEEK (polyetheretherketone), Vespel (polyimide) or silicon nitride ceramic. The serrated surface of the rack 83 is coated with DLC (diamond-like carbon).

[0040] The implementation principle of a polishing device with an optical component transport line in this application embodiment is as follows: During operation, the pre-tensioning mechanism 9 first applies a pre-tightening force to the track 41 to eliminate gaps. Then, the workpiece carriage 5 carrying the optical components is placed on the track 41 of the secondary vacuum chamber 1. After the drive device is started, the iron block 55 fixedly installed on the workpiece carriage 5 is attracted by magnetic force, and the workpiece carriage 5 is smoothly pulled into the main vacuum chamber 2. After it is in place, it is locked by the ball screw 42. The positioning pin 72 of the lifting device is then inserted into the positioning hole 54 opened in the workpiece fixture 53, which precisely lifts the optical components and separates them from the workpiece carriage 5. During the movement of the workpiece carriage 5, the pawl 86 can be locked in one direction to prevent accidental retraction during processing. After processing is completed, the workpiece carriage 5 moves in the opposite direction to trigger the reset mechanism to disengage the pawl 86, and can then be driven back to the secondary vacuum chamber 1. During the entire operation, the gear 85 meshes with the rack 83 to drive the lubrication system, automatically squeezing vacuum grease into the roller 51 to ensure smooth operation.

[0041] The above are merely optional embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A polishing apparatus with an optical component transport line, characterized in that: The utility model provides a kind of optical component conveying device, including secondary vacuum chamber (1), main vacuum chamber (2), the inside of secondary vacuum chamber (1), main vacuum chamber (2) is provided with conveying device, the conveying device includes the group of track (41) being provided in secondary vacuum chamber (1), main vacuum chamber (2) inside, the track (41) is composed of V guide rail+plane guide rail, the outer surface of track (41) is provided with workpiece trolley (5), the bottom of workpiece trolley (5) is provided with workpiece clamp (53) for clamping optical component, the both sides of workpiece trolley (5) are provided with several gyro wheels (51) rolling on the outer surface of track (41), the outer surface of track (41) is provided with wave pearl screw (42) for abutting workpiece trolley (5); The inside of main vacuum chamber (2) is provided with inner frame (3), the inside of inner frame (3) is provided with driving device for driving workpiece trolley (5) to move, the inside of secondary vacuum chamber (1), main vacuum chamber (2) is provided with pre-pressing mechanism (9) for abutting track (41), the inside of inner frame (3) is provided with lifting device for lifting workpiece clamp (53).

2. The polishing apparatus having an optical component conveying line according to claim 1, characterized by: The inside of secondary vacuum chamber (1), main vacuum chamber (2) is provided with fixed seat (4), the pre-pressing mechanism (9) is arranged at the bottom of fixed seat (4), and the track (41) is arranged on the top surface of fixed seat (4).

3. The polishing apparatus having an optical component conveying line according to claim 1, wherein: The outer surface of workpiece trolley (5) is provided with L-shaped connecting plate (52), the bottom of L-shaped connecting plate (52) is fixedly connected with workpiece clamp (53), the side of workpiece trolley (5) close to main vacuum chamber (2) is provided with an iron block (55), and the bottom surface of workpiece clamp (53) is provided with a plurality of positioning holes (54).

4. The polishing apparatus having an optical component conveying line according to claim 1, wherein: The driving device includes an outer frame (6) arranged inside the inner frame (3), the inside of the outer frame (6) is provided with a reciprocating screw rod (61) driven by a vacuum motor, the outer surface of the reciprocating screw rod (61) is provided with a sliding block (62) slidingly arranged inside the outer frame (6), and the bottom of the sliding block (62) is provided with a connecting rod (63).

5. The polishing apparatus having an optical component conveying line according to claim 3, wherein: The lifting device includes a fixed plate (7) arranged on the outer surface of the inner frame (3), the outer surface of the fixed plate (7) is provided with three L-shaped slide rods (71), and the outer surface of the L-shaped slide rod (71) is provided with a positioning pin (72) adapted to be inserted into the positioning hole (54).

6. The polishing apparatus having an optical component conveying line according to claim 1, wherein: The outer surface of the workpiece trolley (5) is provided with an auxiliary mechanism (8) for limiting the workpiece trolley (5), the auxiliary mechanism (8) includes a rectangular groove (81) formed on the top surface of the track (41), the bottom of the track (41) is provided with a collection frame (82) on both sides, the bottom of the track (41) is provided with a rack (83), the side of the workpiece trolley (5) close to the rack (83) is provided with an auxiliary frame (84), the inside of the auxiliary frame (84) is provided with a clamping device for limiting the workpiece trolley (5), and the inside of the auxiliary frame (84) is provided with a lubricating device for lubricating the gyro wheel (51).

7. A polishing apparatus having an optical component conveying line according to claim 6, characterized in that: The clamping device comprises a rotating shaft (87) arranged inside the auxiliary frame (84), the outer surface of the rotating shaft (87) is provided with a pawl (86) which can be clamped between two adjacent teeth of the rack (83), a torsion spring (88) is arranged between the pawl (86) and the auxiliary frame (84) and sleeved on the outer surface of the rotating shaft (87), and the inside of the auxiliary frame (84) is provided with a reset device for canceling the limiting of the workpiece trolley (5).

8. The polishing apparatus having an optical component conveying line according to claim 7, wherein: The reset device comprises a displacement block (823) arranged on the bottom surface of the track (41), the side of the track (41) away from the displacement block (823) is provided with a reset block (824), the inside of the auxiliary frame (84) is slidably provided with a connecting column (89), the top of the connecting column (89) is provided with an H-shaped auxiliary block (813), the side of the H-shaped auxiliary block (813) close to the displacement block (823) is provided with a cylinder one (814), the side of the H-shaped auxiliary block (813) away from the cylinder one (814) is provided with a cylinder two (815), the outer surface of the connecting column (89) is provided with a convex ring (812) clamped in the inside of the auxiliary frame (84), the inner side of the pawl (86) is provided with a convex block (811), and the bottom of the connecting column (89) is provided with a wedge-shaped block (810) abutting against the convex block (811).

9. The polishing apparatus having an optical component conveying line according to claim 6, wherein: The lubricating device comprises a gear one (85) rotatably arranged in the inside of the auxiliary frame (84), the bottom of the rotating shaft of the gear one (85) is provided with a bevel gear set (817) rotatably arranged in the inside of a fixed frame (816) arranged on the bottom of the auxiliary frame (84), the side of the bevel gear set (817) away from the gear one (85) is provided with a reciprocating screw rod two (818) rotatably arranged in the inside of the fixed frame (816), the inside of the workpiece trolley (5) is provided with an auxiliary cylinder (819), the outer surface of the reciprocating screw rod two (818) is provided with a sliding ring (820) slidably arranged in the inside of the auxiliary cylinder (819), one side of the sliding ring (820) is provided with a piston (821) slidably arranged in the inside of the auxiliary cylinder (819), and the side of the auxiliary cylinder (819) close to the roller (51) is provided with an extrusion head (822).

10. The polishing apparatus having an optical component conveying line according to claim 1, wherein: The inside of the track (41) is provided with an inclined groove which is inclined from the middle of the track (41) to both ends.

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