Multi-axis TMR sensor correction method and system

Abstract

The invention discloses a multi-axis TMR sensor correction method and system, the system comprises a multi-axis TMR sensing module, a signal correction module and a signal transmission module, and the signal transmission module is connected with the multi-axis TMR sensing module and the signal correction module; the multi-axis TMR sensing module is used for outputting a voltage signal based on TMR magnetic sensing characteristics; the signal correction module is used for correcting the voltage signal and outputting the corrected voltage signal; and the signal transmission module is used for transmitting a signal between the multi-axis TMR sensing module and the signal correction module. Therefore, after the multi-axis TMR sensing module outputs the original voltage signal, the signal transmission module transmits the original voltage signal to the signal correction module, the signal correction module carries out correction calculation according to the input signal, and the corrected signal is taken as an output accurate magnetic sensing signal, so that the magnetic sensing signal is not easily interfered by an external magnetic field; and the accuracy of output signals is improved.

Description

Technical Field

[0001] This application relates to the field of TMR sensor technology, and in particular to a multi-axis TMR sensor calibration method and system. Background Technology

[0002] A TMR (Tunnel Magneto Resistance) sensor is a sensor based on the magnetoresistive effect, used to measure physical quantities such as magnetic fields, displacement, and velocity. TMR sensors offer advantages such as high sensitivity, fast response, low power consumption, and high integration, and are widely used in commercial and industrial applications.

[0003] The electrical signals output by common single-axis or multi-axis TMR sensors are easily interfered with by external magnetic fields, resulting in significant errors in the output signals. Summary of the Invention

[0004] In view of this, this application provides a multi-axis TMR sensor calibration method and system for calibrating the output signal of a multi-axis TMR sensor to make it antimagnetic.

[0005] In a first aspect, this application provides a multi-axis TMR sensor calibration system, the system comprising a multi-axis TMR sensing module, a signal calibration module, and a signal transmission module, wherein the signal transmission module is connected to the multi-axis TMR sensing module and the signal calibration module respectively;

[0006] The multi-axis TMR sensing module is used to output a voltage signal based on the magnetic sensing characteristics of TMR.

[0007] The signal correction module is used to correct the voltage signal and output the corrected voltage signal;

[0008] The signal transmission module is used to transmit signals between the multi-axis TMR sensing module and the signal correction module.

[0009] Optionally, the multi-axis TMR sensing module includes a first sensor and a second sensor, both of which are in-plane single-axis TMR sensors, and the sensing axis of the first sensor and the sensing axis of the second sensor have a non-zero included angle.

[0010] The first sensor is used to output a first voltage signal based on the TMR magnetic sensing characteristics;

[0011] The second sensor is used to output a second voltage signal based on the TMR magnetic sensing characteristics.

[0012] Optionally, the signal correction module includes a first correction unit and a second correction unit;

[0013] The first correction unit is configured to receive the first voltage signal and the second voltage signal, correct the first voltage signal, and output a first corrected voltage signal;

[0014] The second correction unit is used to receive the first voltage signal and the second voltage signal, correct the second voltage signal, and output the second corrected voltage signal.

[0015] Optionally, the multi-axis TMR sensing module includes a third sensor, a fourth sensor, and a fifth sensor. The third sensor and the fourth sensor are both in-plane single-axis TMR sensors, and the fifth sensor is an out-of-plane single-axis TMR sensor. The sensing axis of the third sensor and the sensing axis of the fourth sensor have a non-zero included angle, and the fifth sensor is perpendicular to the sensing axis of the third sensor and the sensing axis of the fourth sensor, respectively.

[0016] The third sensor is used to output a third voltage signal based on the TMR magnetic sensing characteristics;

[0017] The fourth sensor is used to output a fourth voltage signal based on the TMR magnetic sensing characteristics;

[0018] The fifth sensor is used to output a fifth voltage signal based on the TMR magnetic sensing characteristics.

[0019] Optionally, the signal correction module includes a third correction unit, a fourth correction unit, and a fifth correction unit;

[0020] The third correction unit is used to receive the third voltage signal and the fourth voltage signal, correct the third voltage signal, and output the third corrected voltage signal.

[0021] The fourth correction unit is used to receive the third voltage signal and the fourth voltage signal, correct the fourth voltage signal, and output the fourth corrected voltage signal.

[0022] The fifth correction unit is used to correct the third corrected voltage signal, the fourth corrected voltage signal and the fifth voltage signal, and output the fifth corrected voltage signal.

[0023] Optionally, the multi-axis TMR sensing module includes a sixth sensor, a seventh sensor, and an eighth sensor. The sixth and seventh sensors are both in-plane single-axis Hall sensors, and the eighth sensor is an out-of-plane single-axis TMR sensor. The sensing axes of the sixth and seventh sensors have a non-zero angle between them, and the eighth sensor is perpendicular to the sensing axes of the sixth and seventh sensors, respectively.

[0024] The sixth sensor is used to output a sixth voltage signal based on the TMR magnetic sensing characteristics;

[0025] The seventh sensor is used to output a seventh voltage signal based on the TMR magnetic sensing characteristics;

[0026] The eighth sensor is used to output an eighth voltage signal based on the TMR magnetic sensing characteristics.

[0027] Optionally, the signal correction module includes a sixth correction unit;

[0028] The sixth correction unit is used to correct the sixth voltage signal, the seventh voltage signal and the eighth voltage signal, and output the sixth corrected voltage signal.

[0029] Optionally, the signal correction module includes a voltage operational amplifier module;

[0030] The voltage operational amplifier module is used to correct the voltage signal and output the corrected voltage signal.

[0031] Optionally, the signal transmission module consists of a wire network.

[0032] Secondly, this application provides a multi-axis TMR sensor calibration method, applied to the multi-axis TMR sensor calibration system described in the first aspect above, the method comprising:

[0033] The multi-axis TMR sensing module transmits the corresponding voltage signal to the signal transmission module based on the ambient magnetic field strength.

[0034] The signal transmission module transmits the voltage signal to the signal correction module;

[0035] The signal correction module corrects the voltage signal and outputs the corrected voltage signal.

[0036] Thirdly, embodiments of this application provide an electronic device, the electronic device comprising:

[0037] Memory, used to store one or more programs;

[0038] The processor, when the one or more programs are executed by the processor, implements the multi-axis TMR sensor calibration method described in the second aspect above.

[0039] Fourthly, embodiments of this application provide a computer storage medium storing a program that, when executed by a processor, implements the multi-axis TMR sensor calibration method described in the second aspect above.

[0040] The above technical solution has the following beneficial effects:

[0041] This application provides a multi-axis TMR sensor calibration method and system. The system includes a multi-axis TMR sensing module, a signal correction module, and a signal transmission module. The signal transmission module is connected to both the multi-axis TMR sensing module and the signal correction module. The multi-axis TMR sensing module outputs a voltage signal based on the magnetic sensing characteristics of TMR. The signal correction module corrects the voltage signal and outputs a corrected voltage signal. The signal transmission module transmits the signal between the multi-axis TMR sensing module and the signal correction module. As can be seen, in this application, the multi-axis TMR sensing module outputs the original voltage signal, the signal transmission module transmits this original voltage signal to the signal correction module, and the signal correction module performs correction calculations based on the input signal, using the corrected signal as the output accurate magnetic sensing signal. This corrected signal is less susceptible to interference from external magnetic fields, thus improving the accuracy of the output signal. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in this embodiment or the prior art, the drawings used in the description of the embodiment or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 A schematic diagram of a multi-axis TMR sensor calibration system provided in an embodiment of this application;

[0044] Figure 2 This is another schematic diagram of the multi-axis TMR sensor calibration system provided in the embodiments of this application;

[0045] Figure 3 This is another structural schematic diagram of the multi-axis TMR sensor calibration system provided in the embodiments of this application;

[0046] Figure 4 This is another structural schematic diagram of the multi-axis TMR sensor calibration system provided in the embodiments of this application;

[0047] Figure 5 This is a flowchart of a multi-axis TMR sensor calibration method provided in an embodiment of this application. Detailed Implementation

[0048] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0049] To facilitate a further understanding of the technical solutions provided in this application, the background technology involved in this application will be explained below.

[0050] TMR magnetic sensors possess advantages such as high sensitivity, fast response, low power consumption, and high integration, and are widely used in commercial and industrial scenarios. Their working principle can be briefly described as follows: when the MTJ (Magnetic Tunnel Junction) magnetic moment is subjected to a magnetic field, its direction shifts, causing a corresponding change in its TMR resistance. Generally, a TMR sensor has only one sensing axis. For example, for an in-plane TMR sensor, its magnetization direction under zero field is the x-axis, and the sensing magnetic field extends along the y-axis. The z-axis, due to its anisotropic shape, is immune to magnetic fields on the order of 1 Tesla. When the magnetic fields along the y-axis and z-axis are large, the following problems occur: 1. When Hx is on the order of Hy, the output TMR resistance has an error of 30% to 100%; 2. When Hz ≥ 1T, the output TMR resistance has an error ≥ 10%. For common single-axis or multi-axis TMR sensor chips, such as patent documents CN115840178A and CN112305473B or patent WO 2018 / 202085A, the output electrical signal of the sensor is not corrected and is easily interfered with by external magnetic fields, resulting in significant errors in the output signal.

[0051] To overcome the aforementioned technical problems, this application provides a multi-axis TMR sensor calibration method and system. The system includes a multi-axis TMR sensing module, a signal correction module, and a signal transmission module. The signal transmission module is connected to both the multi-axis TMR sensing module and the signal correction module. The multi-axis TMR sensing module outputs a voltage signal based on the magnetic sensing characteristics of TMR. The signal correction module corrects the voltage signal and outputs a corrected voltage signal. The signal transmission module transmits the signal between the multi-axis TMR sensing module and the signal correction module. As can be seen, in this application, the multi-axis TMR sensing module outputs the original voltage signal, the signal transmission module transmits this original voltage signal to the signal correction module, and the signal correction module performs correction calculations based on the input signal, using the corrected signal as the output accurate magnetic sensing signal. This corrected signal is less susceptible to interference from external magnetic fields, thus improving the accuracy of the output signal.

[0052] See Figure 1This is a schematic diagram of a multi-axis TMR sensor calibration system provided in an embodiment of this application. The multi-axis TMR sensor calibration system 100 includes a multi-axis TMR sensing module 101, a signal calibration module 103, and a signal transmission module 102. The signal transmission module 102 is connected to both the multi-axis TMR sensing module 101 and the signal calibration module 103. The multi-axis TMR sensing module 101 is used to output a voltage signal based on the TMR magnetic sensing characteristics. The signal calibration module 103 is used to calibrate the voltage signal and output the calibrated voltage signal. The signal transmission module 102 is used to transmit the signal between the multi-axis TMR sensing module and the signal calibration module.

[0053] The multi-axis TMR sensing module consists of two or more independent single-axis TMR sensor units, and each sensing unit has a voltage output terminal.

[0054] In one possible implementation, the signal correction module includes a voltage operational amplifier module, which is used to correct the voltage signal and output the corrected voltage signal.

[0055] In one possible implementation, see Figure 2 This is another structural schematic diagram of the multi-axis TMR sensor calibration system provided in the embodiments of this application.

[0056] like Figure 2 As shown, the multi-axis TMR sensing module includes a first sensor H1 and a second sensor H2, i.e., a dual-axis TMR sensing correction system. The first sensor and the second sensor are both in-plane single-axis TMR sensors, and there is a non-zero included angle between the sensing axis of the first sensor and the sensing axis of the second sensor.

[0057] The first sensor is used to output a first voltage signal V1 based on the TMR magnetic sensing characteristics;

[0058] The second sensor is used to output a second voltage signal V2 based on the TMR magnetic sensing characteristics.

[0059] Understandably, both the first and second voltage signals are uncorrected sensing signals, making them susceptible to interference from external magnetic fields.

[0060] The signal transmission network module consists of a wire network, which distributes the first voltage signal and the second voltage signal as input signals to the signal correction module.

[0061] It should be noted that there is a non-zero angle between the sensing axis of the first sensor and the sensing axis of the second sensor. This non-zero angle can be any angle among 15°, 30°, 45°, 60°, 75°, and 90°.

[0062] In one possible implementation, such as Figure 2 As shown, the signal correction module includes a first correction unit and a second correction unit;

[0063] The first correction unit is configured to receive the first voltage signal and the second voltage signal, correct the first voltage signal, and output a first corrected voltage signal;

[0064] The second correction unit is used to receive the first voltage signal and the second voltage signal, correct the second voltage signal, and output the second corrected voltage signal.

[0065] It is understandable that the signal correction module consists of a first correction unit and a second correction unit, both of which receive input signals V1 and V2. The first correction unit corrects the first voltage signal and outputs a first corrected voltage signal V1out, and the second correction unit corrects the second voltage signal and outputs a second corrected voltage signal V2out.

[0066] In the above manner, after the multi-axis TMR sensing module outputs the original voltage signal, the signal transmission module transmits the original voltage signal to the signal correction module. The signal correction module performs correction calculations based on the input signal and uses the corrected signal as the output accurate magnetic sensing signal, which is not easily interfered with by external magnetic fields, thus improving the accuracy of the output signal.

[0067] join Figure 3 This is another structural schematic diagram of the multi-axis TMR sensor calibration system provided in the embodiments of this application.

[0068] like Figure 3 As shown, the multi-axis TMR sensing module includes a third sensor, a fourth sensor, and a fifth sensor, which constitute a three-axis TMR correction system. The third and fourth sensors are both in-plane single-axis TMR sensors, and the fifth sensor is an out-of-plane single-axis TMR sensor. The sensing axes of the third and fourth sensors have a non-zero angle between them, and the fifth sensor is perpendicular to both the sensing axes of the third and fourth sensors.

[0069] The third sensor is used to output a third voltage signal V3 based on the TMR magnetic sensing characteristics;

[0070] The fourth sensor is used to output a fourth voltage signal V4 based on the TMR magnetic sensing characteristics;

[0071] The fifth sensor is used to output a fifth voltage signal V5 based on the TMR magnetic sensing characteristics.

[0072] Understandably, the third, fourth, and fifth voltage signals are all uncorrected sensing signals, which are easily affected by external magnetic fields.

[0073] The signal transmission network module consists of a wire network, which distributes the third, fourth, and fifth voltage signals as input signals to the signal correction module.

[0074] In one possible implementation, such as Figure 3 As shown, the signal correction module includes a third correction unit, a fourth correction unit, and a fifth correction unit;

[0075] The third correction unit is used to receive the third voltage signal and the fourth voltage signal, correct the third voltage signal, and output the corrected voltage signal V3. out ;

[0076] The fourth correction unit is used to receive the third voltage signal and the fourth voltage signal, correct the fourth voltage signal, and output the fourth corrected voltage signal V4out.

[0077] The fifth correction unit is used to correct the third corrected voltage signal, the fourth corrected voltage signal and the fifth voltage signal, and output the fifth corrected voltage signal V5out.

[0078] It is understood that the signal correction module consists of a third correction unit, a fourth correction unit, and a fifth correction unit. The third and fourth correction units both receive input signals V3 and V4. The third correction unit corrects the third voltage signal and outputs a third corrected voltage signal. The fourth correction unit corrects the fourth voltage signal and outputs a fourth corrected voltage signal. The fifth correction unit is used to correct the third, fourth, and fifth voltage signals and output a fifth corrected voltage signal.

[0079] The triaxial TMR calibration system provided in this application transmits the original voltage signal from the multiaxial TMR sensing module to the signal correction module after the signal transmission module outputs the original voltage signal. The signal correction module performs correction calculations based on the input signal and uses the corrected signal as the output accurate magnetic sensing signal. It is not easily interfered with by external magnetic fields, thus improving the accuracy of the output signal. The triaxial TMR calibration system has a high overall operating frequency.

[0080] join Figure 4 This is another structural schematic diagram of the multi-axis TMR sensor calibration system provided in the embodiments of this application.

[0081] like Figure 4As shown, the multi-axis TMR sensing module includes a sixth sensor, a seventh sensor, and an eighth sensor. The sixth and seventh sensors are both in-plane single-axis Hall sensors, and the eighth sensor is an out-of-plane single-axis TMR sensor. The sensing axes of the sixth and seventh sensors have a non-zero angle between them, and the eighth sensor is perpendicular to the sensing axes of the sixth and seventh sensors, respectively.

[0082] The sixth sensor is used to output a sixth voltage signal based on the TMR magnetic sensing characteristics;

[0083] The seventh sensor is used to output a seventh voltage signal based on the TMR magnetic sensing characteristics;

[0084] The eighth sensor is used to output an eighth voltage signal based on the TMR magnetic sensing characteristics.

[0085] Understandably, the sixth, seventh, and eighth voltage signals are all uncorrected sensing signals, which are easily affected by external magnetic fields.

[0086] In one possible implementation, such as Figure 4 As shown, the signal correction module includes a sixth correction unit;

[0087] The sixth correction unit is used to correct the sixth voltage signal, the seventh voltage signal and the eighth voltage signal, and output the sixth corrected voltage signal.

[0088] Since both the sixth and seventh sensors are in-plane single-axis Hall sensors, the signals do not require correction. That is, the sixth voltage signal V6 output by the sixth sensor based on the TMR magnetic sensing characteristics is directly used as the output signal V6. out The seventh voltage signal V7 output by the seventh sensor, based on the TMR magnetic sensing characteristics, is directly used as the output signal V7. out .

[0089] The signal correction module includes a sixth correction unit, which receives a sixth voltage signal, a seventh voltage signal, and an eighth voltage signal, corrects the sixth voltage signal, the seventh voltage signal, and the eighth voltage signal, and outputs a sixth corrected voltage signal V8. out .

[0090] In the above manner, after the multi-axis TMR sensing module outputs the original voltage signal, the signal transmission module transmits the original voltage signal to the signal correction module. The signal correction module performs correction calculations based on the input signal and uses the corrected signal as the output accurate magnetic sensing signal. It is not easily interfered with by external magnetic fields, thus improving the accuracy of the output signal. The overall design of this triaxial TMR correction system is relatively simple and easy to implement.

[0091] join Figure 5 This is a flowchart of a multi-axis TMR sensor calibration method provided in this application embodiment, which is applied to the multi-axis TMR sensor calibration system described in the above embodiment.

[0092] The method may include:

[0093] Step S501: The multi-axis TMR sensing module transmits the corresponding voltage signal to the signal transmission module according to the ambient magnetic field strength;

[0094] Step S502: The signal transmission module transmits the voltage signal to the signal correction module;

[0095] Step S503: The signal correction module corrects the voltage signal and outputs the corrected voltage signal.

[0096] As can be seen from the above embodiments, in this application, the original voltage signal is output by the multi-axis TMR sensing module, the signal transmission module transmits the original voltage signal to the signal correction module, the signal correction module performs correction calculations based on the input signal, and uses the corrected signal as the output accurate magnetic sensing signal, which is not easily interfered by external magnetic fields, thus improving the accuracy of the output signal.

[0097] This application also provides an electronic device, including: a memory for storing one or more programs;

[0098] Processor; when the processor executes the one or more programs, it implements the multi-axis TMR sensor calibration method in the above embodiments.

[0099] This application also provides a computer storage medium storing a program that, when executed by a processor, implements the multi-axis TMR sensor calibration method described above.

[0100] In the embodiments of this application, the terms "first" and "second" (if they exist) are used only as name identifiers and do not represent the order of first and second.

[0101] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0102] Those skilled in the art will understand that the flowchart shown is merely an example in which the embodiments of this application can be implemented, and the scope of application of the embodiments of this application is not limited by any aspect of the flowchart.

[0103] In the several embodiments provided in this application, it should be understood that the disclosed methods, apparatuses, and devices can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual couplings or direct couplings or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0104] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs. Furthermore, the functional units in the various embodiments of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0105] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A multi-axis TMR sensor correction system, characterized by, The system comprises a multi-axis TMR sensing module, a signal correction module and a signal transmission module, the signal transmission module is connected with the multi-axis TMR sensing module and the signal correction module respectively; The multi-axis TMR sensing module is used for outputting a voltage signal based on TMR magnetic sensing characteristics; The signal correction module is used for correcting the voltage signal and outputting a corrected voltage signal; The signal transmission module is used for transmitting signals between the multi-axis TMR sensing module and the signal correction module.

2. The system of claim 1, wherein, The multi-axis TMR sensing module comprises a first sensor and a second sensor, the first sensor and the second sensor are both in-plane single-axis TMR sensors, and the sensing axis of the first sensor and the sensing axis of the second sensor have a non-zero included angle; The first sensor is used for outputting a first voltage signal based on TMR magnetic sensing characteristics; The second sensor is used for outputting a second voltage signal based on TMR magnetic sensing characteristics.

3. The system of claim 2, wherein, The signal correction module comprises a first correction unit and a second correction unit; The first correction unit is used for receiving the first voltage signal and the second voltage signal, correcting the first voltage signal, and outputting a first corrected voltage signal; The second correction unit is used for receiving the first voltage signal and the second voltage signal, correcting the second voltage signal, and outputting a second corrected voltage signal.

4. The system of claim 1, wherein, The multi-axis TMR sensing module comprises a third sensor, a fourth sensor and a fifth sensor, the third sensor and the fourth sensor are both in-plane single-axis TMR sensors, and the fifth sensor is an out-of-plane single-axis TMR sensor, the sensing axis of the third sensor and the sensing axis of the fourth sensor have a non-zero included angle, and the fifth sensor is perpendicular to the sensing axis of the third sensor and the sensing axis of the fourth sensor respectively; The third sensor is used for outputting a third voltage signal based on TMR magnetic sensing characteristics; The fourth sensor is used for outputting a fourth voltage signal based on TMR magnetic sensing characteristics; The fifth sensor is used for outputting a fifth voltage signal based on TMR magnetic sensing characteristics.

5. The system of claim 4, wherein, The signal correction module comprises a third correction unit, a fourth correction unit and a fifth correction unit; The third correction unit is used for receiving the third voltage signal and the fourth voltage signal, correcting the third voltage signal, and outputting a third corrected voltage signal; The fourth correction unit is used for receiving the third voltage signal and the fourth voltage signal, correcting the fourth voltage signal, and outputting a fourth corrected voltage signal; The fifth correction unit is used for correcting the third corrected voltage signal, the fourth corrected voltage signal and the fifth voltage signal, and outputting a fifth corrected voltage signal.

6. The system of claim 1, wherein, The multi-axis TMR sensing module comprises a sixth sensor, a seventh sensor and an eighth sensor, the sixth sensor and the seventh sensor are both in-plane single-axis Hall sensors, the eighth sensor is an out-of-plane single-axis TMR sensor, the sensing axis of the sixth sensor and the sensing axis of the seventh sensor have a non-zero included angle, the eighth sensor is perpendicular to the sensing axis of the sixth sensor and the sensing axis of the seventh sensor respectively; The sixth sensor is used for outputting a sixth voltage signal based on TMR magnetic sensing characteristics; The seventh sensor is used for outputting a seventh voltage signal based on TMR magnetic sensing characteristics; The eighth sensor is used for outputting an eighth voltage signal based on TMR magnetic sensing characteristics.

7. The system of claim 6, wherein, The signal correction module comprises a sixth correction unit; The sixth correction unit is used for correcting the sixth voltage signal, the seventh voltage signal and the eighth voltage signal, and outputting a sixth corrected voltage signal.

8. The system of claim 1, wherein, The signal correction module comprises a voltage operational amplifier module; The voltage operational amplifier module is used for correcting the voltage signal and outputting a corrected voltage signal.

9. The system of claim 1, wherein, The signal transmission module is composed of a wire network.

10. A multi-axis TMR sensor calibration method, characterized by, The method is applied to the multi-axis TMR sensor correction system as claimed in claims 1-9, and the method comprises: The multi-axis TMR sensing module transmits corresponding voltage signals to the signal transmission module according to the environmental magnetic field intensity; The signal transmission module transmits the voltage signals to the signal correction module; The signal correction module corrects the voltage signals and outputs corrected voltage signals.

Images