Process recipe synchronization method and apparatus, recipe dispensing management device, and storage medium

Abstract

The application discloses a process formula synchronization method and device, a formula distribution management equipment and a storage medium. The process formula synchronization method can initiate a formula synchronization transaction in response to a synchronization instruction, and implement a synchronization operation based on the formula synchronization transaction. In the synchronization operation process, a forced security process of backing up an existing process formula with a synchronization conflict first and then synchronizing a target process formula to a target entity is adopted, and a synchronization log associated with the formula synchronization transaction is created, so that each synchronization operation can be traced and the corresponding target entity can be restored to a state before synchronization, thereby improving the convenience of the synchronization operation and fundamentally guaranteeing the data security of the process formula and the maintainability of the system.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, specifically to a process recipe synchronization method, process recipe synchronization device, recipe allocation management equipment, process recipe synchronization system, computer-readable storage medium, and computer program product related to semiconductor process equipment. Background Technology

[0002] In semiconductor manufacturing, a process recipe is a set of core parameters that control equipment to execute specific process steps (such as photolithography, etching, and deposition). It typically includes key information such as master parameters, sub-recipes, bill of materials, gas flow rates, time, and power. As production lines scale up and processes become more complex, ensuring consistency of process recipes between different machines, or between machines and the central management system, is crucial for guaranteeing product yield and production stability.

[0003] Traditional methods of synchronizing process recipes, such as sending a recipe from one machine to another via a portable storage device (e.g., USB flash drive, external hard drive) or network transmission, require manual re-import. If the imported recipe is unusable, manual modification of parameters is necessary. Furthermore, synchronization is limited to one machine at a time. Traditional methods of synchronizing process recipes are generally cumbersome, inefficient, and prone to errors.

[0004] To address the aforementioned efficiency issues, several solutions aimed at improving synchronization speed have emerged in related technologies. For example, international patent application WO2025098252A1 discloses a method for synchronizing process formulations, which employs a multi-threaded asynchronous task processing approach to shorten the overall synchronization time by processing multiple formulation synchronization tasks in parallel.

[0005] However, in real-world high-reliability semiconductor manufacturing environments, such process formulation synchronization solutions prioritize efficiency while having inherent flaws in data security and operational controllability. For example, they lack a protection mechanism for existing formulations with the same name on the target side, posing a direct risk of overwriting and making the operation irreversible. Furthermore, they lack the ability to quickly locate and accurately recover from batch synchronization errors. Moreover, the operation process lacks complete audit logs that can be linked to specific changes, making it difficult to trace problems. Summary of the Invention

[0006] In view of the lack of the above-mentioned related technologies, the purpose of this application is to disclose a process formula synchronization method, a process formula synchronization device, a formula distribution management device, and a computer-readable storage medium to solve various problems in the related technologies.

[0007] This application discloses a method for simultaneous process formulation, comprising the following steps:

[0008] In response to a synchronization command, a recipe synchronization transaction is initiated; the recipe synchronization transaction specifies a source entity, at least one target entity, and at least one target process recipe to be synchronized, wherein the source entity and each of the target entities are each one of the recipe allocation management device and the semiconductor process equipment, and the recipe allocation management device and the semiconductor process equipment are located on the same local area network.

[0009] In response to the recipe synchronization transaction, a synchronization operation is performed; wherein, for each target entity, the following steps are performed: checking whether there is an existing process recipe in the target entity that conflicts with the synchronization of the at least one target process recipe; if so, backing up the existing process recipe that conflicts with the synchronization to the recipe allocation management device before synchronization, as the original process recipe; synchronizing the at least one target process recipe to the target entity;

[0010] A synchronization log is generated that is associated with the recipe synchronization transaction. The synchronization log records the backup information of the original process recipe and its association with the corresponding target entity, which is used to support the restoration of the corresponding target entity to the state before synchronization based on the synchronization log.

[0011] Optionally, the process formulation synchronization method further includes: monitoring the synchronization result of the at least one target entity, generating a synchronization status report, wherein the synchronization status report distinguishes between target entities that have successfully synchronized and target entities that have failed to synchronize; and in response to a retry instruction for a target entity that has failed to synchronize, re-performing the synchronization operation only on the target entity that has failed to synchronize.

[0012] Optionally, the process recipe synchronization method further includes: after the synchronization operation is completed, if any target entity is detected to have failed to synchronize, a global rollback option is provided; in response to the confirmation instruction for the global rollback option, a rollback operation is performed on all involved target entities based on the synchronization log, restoring all target entities to their pre-synchronization state.

[0013] Optionally, the process recipe synchronization method further includes: real-time detection of the response status of the at least one target entity during the synchronization operation; if any target entity returns a synchronization failure or timeout, a global rollback is automatically triggered to undo all executed synchronization operations, and all target entities involved are restored to their pre-synchronization state based on the synchronization log.

[0014] Optionally, the process recipe synchronization method further includes performing a rollback operation: in response to the rollback operation instruction, determining the target entity to be rolled back and its corresponding original process recipe based on the synchronization log; and restoring the determined original process recipe to the corresponding target entity.

[0015] Optionally, when the recipe synchronization transaction specifies two or more target entities, the rollback operation can select to restore the original process recipe for all or part of the target entities.

[0016] Optionally, the recipe synchronization transaction corresponds to a one-to-many mode. In the one-to-many mode, the synchronization instruction is generated by performing a first type of synchronization operation, including: receiving an operation to select one entity as the source entity; receiving an operation to select two or more semiconductor process devices as the target entities; receiving an operation to select at least one target process recipe from the process recipe set of the source entity; and receiving a synchronization trigger operation.

[0017] Optionally, the recipe synchronization transaction corresponds to a one-to-one mode, which further includes: in response to a comparison request between two selected entities, performing a process recipe comparison on the process recipe sets in the two entities and outputting the comparison result; and in response to a synchronization instruction related to the comparison result, initiating a recipe synchronization transaction.

[0018] Optionally, in the one-to-one mode, the synchronization instruction is generated by executing a second type of synchronization operation, including: receiving an operation to select a first entity as the source entity and a second entity as the target entity; receiving an operation to perform a process recipe comparison, comparing the process recipe sets in the source entity and the process recipe sets in the target entity, and outputting the comparison result; receiving an operation to select at least one target process recipe from the process recipe set of the source entity based on the comparison result; and receiving a synchronization trigger operation.

[0019] Optionally, in the one-to-one mode, the synchronization instruction is generated by executing a second type of synchronization operation, including: receiving an operation to select a first entity and a second entity to be compared; receiving an operation to perform a process recipe comparison, comparing the process recipe sets in the first entity and the process recipe sets in the second entity, and outputting the comparison result; receiving an operation to select at least one target process recipe based on the comparison result, wherein the operation to select at least one target process recipe includes selecting at least one first target process recipe from the process recipe set of the first entity, and / or selecting at least one second target process recipe from the process recipe set of the second entity; receiving a synchronization trigger operation: if the at least one first target process recipe is selected, then a recipe synchronization transaction is initiated with the first entity as the source entity and the second entity as the target entity; if the at least one second target process recipe is selected, then a recipe synchronization transaction is initiated with the second entity as the source entity and the first entity as the target entity.

[0020] Optionally, the comparison results include the same class, different class, and similar class, wherein the same class, different class, and similar class are displayed by different visual identifiers; the visual identifiers include at least one of the following: color mark, icon symbol, font style, and background highlight.

[0021] Optionally, backing up the existing process formula with synchronization conflicts to the formula allocation management device includes: backing up the existing process formula with synchronization conflicts and its associated materials and sub-formulas to the formula allocation management device.

[0022] Optionally, the formula distribution management device is pre-configured with an access control policy to control the access permissions of different users to perform synchronous operations and related operations.

[0023] Accordingly, this application discloses a process formula synchronization device, applied to a formula distribution management device, the process formula synchronization device comprising:

[0024] The transaction initiation module is configured to initiate a recipe synchronization transaction in response to a synchronization command; the recipe synchronization transaction specifies a source entity, at least one target entity, and at least one target process recipe to be synchronized, wherein the source entity and each of the target entities are each one of the recipe allocation management device and the semiconductor process equipment, and the recipe allocation management device and the semiconductor process equipment are located on the same local area network.

[0025] A secure synchronization module is configured to perform a synchronization operation in response to the recipe synchronization transaction; wherein, for each target entity, the following is performed: checking whether there is an existing process recipe in the target entity that conflicts with the synchronization of the at least one target process recipe; backing up the existing process recipe that conflicts with the synchronization to the recipe allocation management device as the original process recipe before synchronization; and synchronizing the at least one target process recipe to the target entity.

[0026] The log management module is configured to generate a synchronization log associated with the recipe synchronization transaction. The synchronization log records backup information of the original process recipe and its association with the corresponding target entity, which is used to support the restoration of the corresponding target entity to the state before synchronization based on the synchronization log.

[0027] Optionally, the process recipe synchronization device further includes a rollback control module, configured to perform a rollback operation based on the synchronization log, so that the target entity is restored to its state before synchronization.

[0028] Optionally, the process recipe synchronization device further includes: a synchronization retry management module, configured to monitor the synchronization result of the at least one target entity, generate a synchronization status report that distinguishes between successful and failed target entities, and, in response to a retry instruction for a failed target entity, re-execute the synchronization operation only for the failed target entity.

[0029] Optionally, the process recipe synchronization device further includes a rollback control module, configured to provide a global rollback option if any target entity fails to synchronize after the synchronization operation is completed, and in response to a confirmation instruction for the option, perform a rollback operation on all target entities based on the synchronization log to restore all target entities to their pre-synchronization state.

[0030] Optionally, the process recipe synchronization device further includes: a rollback control module, configured to detect the response status of each target entity in real time during the synchronization operation, and automatically trigger a global rollback when any target entity returns a synchronization failure or timeout, cancel all executed synchronization operations, and restore all target entities to their pre-synchronization state based on the synchronization log.

[0031] Accordingly, this application discloses a formula distribution management device, including a processor and a memory. The memory stores a computer program, and the processor is used to run the computer program in the memory to implement the steps in the process formula synchronization method provided in the embodiments of this application.

[0032] Accordingly, this application discloses a computer-readable storage medium having a computer program stored thereon, wherein the computer program is executed by a processor to implement the steps in the process recipe synchronization method provided in the embodiments of this application.

[0033] Accordingly, this application discloses a computer program product, including a computer program or instructions, which are executed by a processor to implement the steps in the process recipe synchronization method provided in the embodiments of this application.

[0034] This application discloses a process recipe synchronization method, a process recipe synchronization device, a recipe allocation and management device, and a computer-readable storage medium. The process recipe synchronization method, in response to a synchronization command, initiates a synchronization transaction including a source entity, at least one target entity, and at least one target process recipe. Synchronization is performed based on the recipe synchronization transaction. For each target entity, a synchronization conflict is first detected. If a conflict exists, the existing process recipe is backed up to the original process recipe, and then the target process recipe is synchronized. A synchronization log associated with the target entity is generated, providing a complete basis for subsequent recovery operations. Compared to related technologies, this application, while ensuring the convenience and efficiency of synchronization operations, fundamentally guarantees the data security of process recipes and the maintainability of the system. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 The diagram shown is a flowchart of the process formulation synchronization method of this application in one embodiment.

[0037] Figure 2 This is a flowchart illustrating the process of performing synchronization operations for each target entity.

[0038] Figure 3 This is a schematic diagram of the first interactive interface corresponding to a one-to-many mode.

[0039] Figure 4 and Figure 5 A schematic diagram of a second interactive interface corresponding to a one-to-one mode is shown in one embodiment.

[0040] Figure 6 and Figure 7 This is a schematic diagram of a second interactive interface corresponding to a one-to-one mode in another embodiment.

[0041] Figure 8 The diagram shown is a structural schematic of the process formulation synchronization device of this application in one embodiment.

[0042] Figure 9 The diagram shown is a structural schematic of the formula distribution management device of this application in one embodiment. Detailed Implementation

[0043] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0044] The terms “first,” “second,” “third,” “fourth,” etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “corresponding,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0045] In the process formulation synchronization operation in the semiconductor manufacturing field, traditional manual operation has problems such as cumbersome operation, low efficiency and easy error. While the asynchronous processing method of threads has greatly improved the synchronization efficiency, it has significant shortcomings in terms of data security and operational controllability.

[0046] In view of this, embodiments of this application disclose a process recipe synchronization method, a process recipe synchronization device, a recipe allocation management device, and a computer-readable storage medium. The process recipe synchronization method can initiate a recipe synchronization transaction in response to a synchronization command. This synchronization transaction specifies a source device, at least one target device, and the process recipe to be synchronized. In this recipe synchronization transaction, a unique secure synchronization process can be executed for each target device: before synchronization, existing process recipes with synchronization conflicts in the target device are checked and backed up; only then is the process recipe to be synchronized synchronized to the target device. Furthermore, the process recipe synchronization method also generates a synchronization log associated with the recipe synchronization transaction, fully recording the backup information and the corresponding relationship between the target entities. Through the closed-loop design of "conflict detection-backup protection-synchronization-log recording," this process recipe synchronization method prevents data from being accidentally overwritten at the source and provides the possibility for fast and accurate data recovery based on logs. Thus, while ensuring automated synchronization operation and synchronization efficiency, it effectively solves the deficiencies of existing technologies in terms of data security, error recovery, and operational traceability.

[0047] Please see Figure 1 The diagram shown is a flowchart of the process formulation synchronization method of this application in one embodiment.

[0048] The process recipe synchronization method is applied in semiconductor manufacturing environments, including recipe distribution management (RDM) equipment and semiconductor process equipment.

[0049] To ensure clarity and conciseness, the term "RDM device" will be used consistently throughout the following description to refer to the aforementioned "recipe distribution management device." An RDM device may be, for example, a terminal or a server. Terminal device types include, but are not limited to, at least one of the following: smartphones, tablets, wearable devices, personal computers (PCs), laptops, and desktop computers. Those skilled in the art will understand that the number of terminals may be greater or less. This application does not limit the number or type of terminals. A server may be an independent physical server, a server cluster or distributed system composed of multiple physical servers, or a cloud server providing cloud computing services such as cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, content delivery networks (CDNs), and basic cloud computing services such as big data and artificial intelligence platforms.

[0050] The RDM (Reference Design Data) device, deployed within the factory, serves as the central management node for process recipe data in a semiconductor manufacturing environment. In some examples, the RDM device connects to multiple managed semiconductor process equipment (e.g., etching machines, thin-film deposition equipment, lithography track machines, ion implanters, etc.) within the same physically isolated local area network (LAN) via an industrial-grade Ethernet switch. The LAN can utilize a TCP / IP protocol stack as the underlying communication foundation, ensuring that the RDM device can directly access its process recipe storage interface via the device's IP address. Each semiconductor process equipment is registered with a unique device identifier and device type information in the RDM device, facilitating device discovery, status monitoring, process recipe matching, and updates. This enables secure, efficient, and traceable synchronous management of process recipes. A process recipe is a set of parameters that controls the execution of specific process steps by semiconductor process equipment. It typically includes a master recipe file, one or more sub-recipes, a bill of materials (BOM), gas flow configurations, time series, RF power settings, and possible binary attachments (e.g., equipment calibration data or waveform files).

[0051] like Figure 1 As shown, the method for synchronizing process formulations includes the following steps:

[0052] Step S101: In response to the synchronization command, initiate a recipe synchronization transaction.

[0053] In the description of the embodiments in this application, the related operations involved in the process formulation synchronization method are illustrated using an RDM device as an example, but this is not a limitation. The related operations can also be performed in other devices, such as a designated process formulation device, or in combination across different devices, such as a single RDM device working in conjunction with a designated process formulation device, or in a specific control terminal, such as a mobile terminal with specific operating permissions. All of the above situations are within the scope of protection of this application.

[0054] Synchronization commands are generated based on user input through an interactive interface. In some embodiments, the interactive interface is a graphical user interface running on a touch screen, allowing users to input synchronization commands via touch. In other embodiments, the interactive interface can also be configured as a display screen combined with input devices, including but not limited to one or more of a mouse, keyboard, trackball, and voice recognition device, to adapt to the operational needs of different production line environments.

[0055] Taking the interactive interface as an example, the synchronization command is directly derived from a series of input operations performed by the user on the interactive interface. This interactive interface, as an interaction bridge between the user and the RDM device, is designed as an intuitive and highly guided operating environment.

[0056] In some embodiments, to ensure production data security and operational compliance, RDM devices are pre-configured with access control policies to control the access permissions of different users to perform synchronization operations and related operations through the interactive interface. For example, roles such as "System Administrator," "Process Engineer," and "Equipment Operator" can be predefined, and specific access permissions can be configured for each role. For instance, a System Administrator has user management, policy configuration, and full operation permissions; a Process Engineer can initiate synchronization and rollback operations; and an Equipment Operator typically can only perform pre-authorized tasks. Permission configuration can be completed through the RDM device's dedicated management interface (which is also a type of interactive interface). The System Administrator can create or edit roles, select permissions from a predefined permission list (e.g., "Initiate Batch Synchronization," "Initiate One-to-One Synchronization," "View Synchronization Logs," "Execute Rollback," "Manage Users," etc.), and then associate specific user accounts with roles to complete permission assignment. After a user logs in, the RDM device loads their permission set in real time and dynamically adjusts the interactive interface: functions that the user does not have permission to operate will be hidden or disabled, and the interactive interface will only display the devices and operation options that the user is authorized to access. When a user attempts to perform an operation, the RDM device performs a background permission check. If insufficient permissions are granted, the operation is interrupted and a clear prompt is given. This mechanism ensures security while enabling precise control and accountability for operations.

[0057] As mentioned earlier, in practical applications, users define recipe synchronization transactions through an interactive interface. For example, in scenarios requiring process recipe synchronization, users can specify one entity as the source entity and select multiple entities as target entities within an interactive interface through click or drag operations. They can then select at least one process recipe to be synchronized from the process recipe list reflecting the process recipe in the source entity as the target process recipe, and finally confirm the submission by clicking the "Synchronize" button. The source entity and each target entity must be a member within the same local area network, and their identities are limited to either RDM devices or semiconductor process equipment. This ensures that the synchronization operation is performed only in a controlled and trusted network environment, eliminating the risk of data leakage or contamination caused by cross-network segment misoperation or unauthorized device access.

[0058] The interactive interface will capture and integrate this series of front-end operations in real time, and transform them into a structured, executable synchronous instruction.

[0059] Therefore, it can be seen that the starting point of all synchronization logic is the user's active operation on the interactive interface. By transforming intuitive interface interaction into precise background instructions, RDM devices simplify complex synchronization tasks and accurately convey user intentions.

[0060] Subsequently, the RDM device initiates a recipe synchronization transaction based on the content of the synchronization command. The recipe synchronization transaction is used to carry and drive the subsequent synchronization process. In the recipe synchronization transaction, the aforementioned three core elements are formally established as components of the recipe synchronization transaction. That is, the recipe synchronization transaction explicitly specifies the source entity, at least one target entity, and at least one target process recipe to be synchronized, and ensures that the source entity and each target entity meet the network and role constraints of being "either an RDM device or a semiconductor process device, and located in the same local area network".

[0061] In some embodiments, the recipe synchronization transaction adopts a one-to-many mode, in which there is one source entity and two or more target entities.

[0062] In a one-to-many mode, synchronization instructions are generated by performing a first type of synchronization operation. In some embodiments, synchronization instructions are generated via a first interactive interface.

[0063] In some examples, generating synchronization instructions through the first interactive interface may specifically include:

[0064] First, it accepts the operation of selecting a single entity as the source entity.

[0065] Next, the operation of selecting two or more semiconductor process devices as target entities is received.

[0066] Next, the operation of selecting at least one target process recipe from the process recipe set of the source entity is received.

[0067] Finally, receive the synchronously triggered operation.

[0068] In some examples, generating synchronization instructions through the first interactive interface may specifically include:

[0069] First, it accepts the operation of selecting a single entity as the source entity.

[0070] Next, the operation of selecting at least one target process recipe from the process recipe set of the source entity is received.

[0071] Next, the operation of selecting two or more semiconductor process devices as target entities is received.

[0072] Finally, receive the synchronously triggered operation.

[0073] In some embodiments, the recipe synchronization transaction adopts a one-to-one mode, in which there is one source entity and one target entity.

[0074] In the one-to-one mode, it also includes: in response to a comparison request between two selected entities, performing a process recipe comparison on the process recipe sets in the two entities and outputting the comparison results; and in response to a synchronization command related to the comparison results, initiating a recipe synchronization transaction.

[0075] In one-to-one mode, synchronization instructions are generated by performing a second type of synchronization operation. In some embodiments, synchronization instructions are generated via a second interactive interface of the interaction interface.

[0076] In some examples, generating synchronization commands through a second interactive interface may specifically include:

[0077] First, it accepts the operation of selecting a first entity as the source entity and a second entity as the target entity.

[0078] Next, the process formula comparison operation is received, the process formula set in the source entity and the process formula set in the target entity are compared, and the comparison results are output.

[0079] Next, the operation of selecting at least one target process recipe from the process recipe set of the source entity based on the comparison results is received.

[0080] Finally, receive the synchronously triggered operation.

[0081] In some examples, generating synchronization commands through a second interactive interface may specifically include:

[0082] First, receive the operation of selecting the first and second entities to be compared;

[0083] Next, the process formula comparison operation is received, the process formula set in the first entity and the process formula set in the second entity are compared, and the comparison result is output.

[0084] Next, the operation of selecting at least one target process formulation based on the comparison result is received, wherein the operation of selecting at least one target process formulation includes selecting at least one first target process formulation from the process formulation set of the first entity, and / or selecting at least one second target process formulation from the process formulation set of the second entity.

[0085] Finally, receive the synchronization trigger operation: if at least one first target process recipe is selected, initiate a recipe synchronization transaction with the first entity as the source entity and the second entity as the target entity; if at least one second target process recipe is selected, initiate a recipe synchronization transaction with the second entity as the source entity and the first entity as the target entity.

[0086] Further detailed descriptions of the one-to-many and one-to-one modes will follow.

[0087] Step S103: In response to the recipe synchronization transaction, perform a synchronization operation.

[0088] In step S103, in response to the recipe synchronization transaction, the RDM device performs a synchronization operation.

[0089] In some embodiments, the synchronization operation performed by the RDM device may specifically include: firstly parsing the source entity, at least one target entity (e.g., a target entity list), and at least one target process recipe to be synchronized (e.g., a target process recipe list) as instructed in the recipe synchronization transaction; then, performing the corresponding synchronization operation process for each target entity in the target entity list to ensure that each target entity can be processed independently and safely, and that the target entities do not affect each other.

[0090] In this application, a conflict detection and automatic backup protection mechanism is introduced before synchronizing the target process formula in the source entity to the target entity.

[0091] Please see Figure 2 This is a flowchart illustrating the process of performing synchronization operations for each target entity.

[0092] like Figure 2 As shown, the following steps are performed for each target entity:

[0093] Step S201: Compare at least one target process formulation with existing process formulations in the target entity.

[0094] In step S201, the target process formula to be synchronized is compared with the existing process formulas in the target entity to check whether there are any existing process formulas in the target entity that conflict with the target process formula.

[0095] In practical applications, step S201 may specifically include: querying the target entity for all existing process recipes to which it belongs; and determining whether there are any existing process recipes that meet the synchronization conflict conditions based on at least one target process recipe to be synchronized and all existing process recipes found.

[0096] Synchronization conflict refers to a situation where, before the process recipe synchronization operation is performed, there is an overlap or association between the target process recipe to be written and an existing process recipe already existing in the target entity, which may lead to overwriting, confusion, or process risks. To ensure data security and process consistency, RDM equipment needs to identify such situations and trigger protection mechanisms such as automatic backup.

[0097] The criteria for determining synchronization conflicts include, but are not limited to: identical names, identical unique identifiers (UIDs), highly similar process types and key parameters, and downgraded version numbers.

[0098] The most basic and universally applicable criterion for determining synchronization conflicts is identical recipe names. That is, if the target process recipe to be synchronized has the exact same name as an existing process recipe in the target entity, regardless of whether their contents are identical, it is considered a potential overriding operation and constitutes a synchronization conflict. This is because in most semiconductor manufacturing plant (Fab) environments, the recipe name is the primary identifier for users to call and identify recipes; identical names mean that the same process step may be updated or replaced. Therefore, identical recipe names are considered a synchronization conflict.

[0099] To further improve the accuracy and robustness of conflict detection, several enhanced decision-making mechanisms are also supported. For example, in scenarios where unique identifier (UID) management is enabled, even if the recipe name is modified, as long as the process recipe to be synchronized has the same unique identifier (UID) as an existing recipe in the target entity (this unique identifier is usually generated by the device or RDM when the process recipe is created, and has global uniqueness and immutability), it can still be identified as a duplicate deployment of the same logical process recipe, thus constituting a synchronization conflict.

[0100] Furthermore, even with identical names, version control policies can cause synchronization conflicts if version downgrading is configured. Specifically, when the version number of the process recipe to be synchronized is lower than the current version of the process recipe with the same name in the target entity (e.g., downgrading from V3.2 to V3.1), and the system policy prohibits downgrading, this synchronization behavior will be considered a high-risk operation and will also constitute a synchronization conflict.

[0101] If it is determined that there is an existing process formula in the target entity that is synchronously conflicting with at least one target process formula, then proceed to step S203; if it is determined that there is no existing process formula in the target entity that is synchronously conflicting with at least one target process formula, then proceed directly to step S205.

[0102] Step S203: Back up the existing process formula with synchronization conflict to the formula allocation management device as the original process formula.

[0103] In step S203, existing process recipes with synchronization conflicts will be backed up and stored in the local folder of the RDM device.

[0104] In some embodiments, the backup process may specifically include: calling the target entity's recipe export interface to package the existing process recipes with synchronization conflicts, their associated Bill of Materials (BOM), binary attachments, and sub-recipes into a complete recipe snapshot. This recipe snapshot is transmitted to the RDM device via an encrypted channel and stored in a dedicated backup database. In the backup database, the recipe snapshot is marked as corresponding to the original process recipe of the target entity and associated with the currently processing recipe synchronization transaction. This full backup mechanism ensures the integrity of the original process state, enabling subsequent rollbacks to not only restore the main recipe but also restore all associated dependent data, preventing equipment from failing to load or malfunctioning due to partial missing data.

[0105] It should be noted that when multiple target process recipes are specified in a recipe synchronization transaction for the same target entity, different backup operations can be used. In some embodiments, while maintaining security, the target entity is checked in batches for conflicting recipes with the same name as any of the process recipes to be synchronized, and all existing process recipes with synchronization conflicts are backed up at once. In some embodiments, the multiple target process recipes to be synchronized are checked sequentially according to their order, for conflicting recipes with the same name as a particular process recipe to be synchronized, and the existing process recipes with synchronization conflicts are backed up accordingly.

[0106] Step S203 enables existing process recipes with synchronization conflicts to be backed up to the RDM device before being overwritten by the process recipe to be synchronized. This achieves the reversibility of the synchronization process and ensures the high reliability of process data, effectively reducing the risk of data loss due to accidental overwriting and significantly improving the security and recoverability of the synchronization operation.

[0107] Step S205: Synchronize at least one target process formulation to the target entity.

[0108] In some embodiments, this synchronization operation is accomplished via a standardized communication protocol between the RDM device and the target entity. The RDM device first obtains a complete data packet of at least one target process recipe from the source entity. This data packet contains the target process recipe and its associated materials (e.g., Bill of Materials, any binary attachments) and sub-recipes.

[0109] Subsequently, the RDM device selects the appropriate transmission protocol to initiate a write request based on the target entity's device type, manufacturer, and communication capabilities.

[0110] During synchronization, the RDM device encapsulates the target process recipe data according to the data format required by the target entity and transmits it to the target entity through a secure channel (e.g., TLS encrypted connection). Upon receiving the data, the target entity performs local verification (e.g., integrity check, parameter validity verification), and after confirming that it is correct, loads it into its local process recipe library, assigns a unique identifier (UID), and updates the status to "available".

[0111] It should be noted that when multiple target process recipes are specified in a recipe synchronization transaction for the same target entity, different synchronization operations can be used.

[0112] In some embodiments, when writing multiple target process recipes to the target machine database, a database transaction is initiated, and all target process recipe data to be written is packaged into a single batch and submitted all at once through efficient batch database operations. Because this batch synchronization method packages all target process recipe data, the following scenarios may occur: either synchronization succeeds, with all target process recipes synchronized to the target entity; or synchronization fails, with none of the target process recipes synchronized to the target entity. This batch synchronization method offers advantages such as strong consistency and high synchronization efficiency, making it particularly suitable for scenarios involving critical processes, complete process imports, and overall version upgrades, ensuring the integrity of the process logic.

[0113] In some embodiments, each target process recipe is written to the target entity sequentially according to a preset priority or a user-specified order. The writing of each target process recipe is performed independently; the failure of a previous target process recipe does not affect the writing of subsequent target process recipes. This sequential synchronization method has advantages such as high fault tolerance and fine-grained control, and is particularly suitable for scenarios such as incremental updates, merging of multi-source process recipes, and debugging in test environments, thereby improving flexibility and robustness.

[0114] Step S105: Generate a synchronization log associated with the recipe synchronization transaction. The synchronization log records backup information of the original process recipe and its association with the corresponding target entity.

[0115] In some embodiments, a corresponding synchronization log can be generated during the synchronization operation for each target entity in the recipe synchronization transaction. After the synchronization operation for all target entities in the recipe synchronization transaction is completed, the multiple synchronization logs corresponding to each entity can be summarized to form a synchronization log (table) associated with the recipe synchronization transaction.

[0116] Specifically, after completing conflict detection, backup, and synchronization of the current target entity, a structured synchronization log is generated. This log records backup information of the original process recipe and its association with the corresponding target entity, supporting the restoration of the corresponding target entity to its pre-synchronization state based on the synchronization log. The synchronization log is stored in the log database of the RDM device.

[0117] In some embodiments, the synchronization log can be organized in a standardized data structure and includes at least one or more of the following fields: a transaction identifier for identifying the current recipe synchronization transaction, the identifier of the target entity being synchronized, the operation timestamp, the source entity information, the operation result status, the information and storage location of the backed-up existing process recipes (if a synchronization conflict occurred and a backup operation was triggered), a list of successfully synchronized recipes (e.g., recipe name and version number), and the user account and permission information of the user who initiated the synchronization command operation.

[0118] Synchronization logs provide a complete execution basis for subsequent rollback operations. When it is necessary to restore a target entity to its pre-synchronization state, the corresponding synchronization log is retrieved based on the transaction identifier or target entity identifier. If the log contains a valid original process recipe storage path, the recipe snapshot is automatically loaded from the backup storage location and redeployed to the corresponding target entity using the same communication protocol as during synchronization. This ensures that the device state is accurately restored to the moment before synchronization, achieving precise, one-click state rollback and significantly reducing downtime troubleshooting time caused by recipe errors. The entire rollback process is also recorded in a new audit log, forming a complete change-recovery closed loop.

[0119] It should also be noted that after the synchronization log is generated, it can be written to a highly reliable log storage system, and operation permission control can be set so that only authorized users can query it or use it for rollback operations.

[0120] Thus, through the above mechanism, the synchronization log not only serves as evidence for operation auditing, but also becomes a core infrastructure for ensuring the security of process data. This makes the process formula synchronization process of this application traceable, verifiable, and reversible, which is significantly better than the traditional stateless, backupless, and unreversible formula distribution scheme.

[0121] In this application, after performing a synchronization operation in response to a recipe synchronization transaction, one or more post-synchronization processing operations are performed based on the result of the synchronization operation.

[0122] In some embodiments, the process formulation synchronization method also includes a failure retry operation.

[0123] Specifically, the retry operation for failures may include the following steps:

[0124] First, monitor the synchronization result of at least one target entity and generate a synchronization status report. The synchronization status report distinguishes between target entities that have successfully synchronized and those that have failed to synchronize.

[0125] After the synchronization operation of at least one target entity in a recipe synchronization transaction is completed, a synchronization status report is generated based on the synchronization result of at least one target entity. In some examples, the synchronization status report is automatically generated based on the result of the synchronization operation and is displayed on the interactive interface immediately after the synchronization operation of the recipe synchronization transaction is completed. Alternatively, in some examples, after the synchronization operation of the recipe synchronization transaction is completed, a synchronization status report is generated and displayed on the interactive interface in response to user actions.

[0126] The synchronization status report will indicate which target entities were successfully synchronized and which failed. Successful and failed synchronization targets can be displayed using different visual identifiers, including at least one of the following: color coding, icon symbols, font styles, and background highlighting.

[0127] Users can identify the target entity from which synchronization failed based on the synchronization status report displayed on the interactive interface.

[0128] Next, in response to the retry instruction for the target entity that failed to synchronize, the synchronization operation is re-executed only for the target entity that failed to synchronize.

[0129] Users can select some or all of the target entities that failed to synchronize based on the synchronization status report displayed on the interactive interface, and perform retry operations on the selected target entities, generating corresponding retry instructions.

[0130] In this way, in response to a retry instruction for a target entity that failed to synchronize, the synchronization operation can be re-executed on the selected target entity. The process of this synchronization operation is the same as described above. Figure 2 The process steps are similar and will not be repeated here.

[0131] In some embodiments, the process recipe synchronization method further includes performing a global rollback operation based on the response status of at least one target entity in the recipe synchronization transaction, that is, uniformly deciding whether to confirm that all synchronization operations are effective, or to revoke all executed synchronization operations, so as to ensure the consistency of process recipe status among multiple target entities.

[0132] Generally, global rollback operations can be divided into two categories: the first category requires external confirmation (e.g., from the operator or upper-level control system), which is suitable for flexible scenarios that require assessment. The second category is automatically triggered by the system, which is suitable for highly reliable unmanned scenarios.

[0133] In some embodiments, the first type of global rollback operation includes the following steps:

[0134] First, if any target entity fails to synchronize after the synchronization operation is completed, a global rollback option is provided.

[0135] For example, the synchronization operation of at least one target entity in the recipe synchronization transaction is completed, and a synchronization status report is generated based on the synchronization result of at least one target entity. The synchronization status report distinguishes between target entities that have been successfully synchronized and target entities that have failed to be synchronized. When a target entity that has failed to be synchronized is detected in the synchronization status report, a global rollback option is provided and displayed on the interactive interface.

[0136] For example, the synchronization operation of each target entity in the recipe synchronization transaction is monitored in real time. Once the synchronization failure of any target entity is detected, that is, the synchronization status report corresponding to the target entity shows synchronization failure, a global rollback option is provided and displayed on the interactive interface.

[0137] Next, in response to the confirmation command for the global rollback option, a rollback operation is performed on all target entities involved based on the synchronization log, restoring all target entities to their pre-synchronization state.

[0138] Specifically, the rollback operation may include:

[0139] When the user clicks or selects the global rollback option and confirms, a confirmation command is generated.

[0140] In response to the confirmation command for the global rollback option, retrieve the synchronization log corresponding to the synchronization transaction for this recipe from the database.

[0141] Based on the records in the synchronization log, perform the following steps for each target entity involved: rewrite the corresponding original process recipe into the target entity; if the target entity has a new process recipe (i.e., the target process recipe) during the synchronization operation, delete the target process recipe; restore the target entity to its state before synchronization.

[0142] Furthermore, for each target entity, the recovery operation result can be marked as successful or unsuccessful. After all target entities in the recipe synchronization transaction have completed recovery, the recipe synchronization transaction is marked as "rolled back," and a rollback operation log is generated. Simultaneously, the result of the rollback operation can also be displayed in the interactive interface.

[0143] By utilizing global rollback operations, all target entities can be atomically restored to a consistent state before synchronization. Furthermore, rollback operations are performed based on user confirmation, offering high flexibility and reliability. This makes it suitable for scenarios where external decision-making bodies (e.g., humans, machines, or intelligent agents) need to assess the situation before authorization.

[0144] Of course, global rollback operations are not limited to the implementation methods described above; there are other possible implementation methods as well.

[0145] In some embodiments, the second type of global rollback operation includes the following steps:

[0146] During the synchronization operation, the response status of at least one target entity is monitored in real time. Once any target entity is detected to have failed to synchronize (i.e., the synchronization status report for that target entity shows synchronization failure) or a target entity is detected to have timed out, a global rollback is automatically triggered, undoing all executed synchronization operations and restoring all involved target entities to their pre-synchronization state based on the synchronization log.

[0147] Furthermore, for each target entity, the recovery operation result can be marked as successful or unsuccessful. After all target entities in the recipe synchronization transaction have completed recovery, the recipe synchronization transaction is marked as "rolled back," and a rollback operation log is generated. Simultaneously, the result of the rollback operation can also be displayed in the interactive interface.

[0148] By utilizing global rollback operations, all target entities can be atomically restored to a consistent state before synchronization. Furthermore, based on detection-automatic rollback operations, it features strong security and high efficiency, making it particularly suitable for "zero-fault-tolerance" scenarios.

[0149] In some embodiments, the process formulation synchronization method also includes a rollback operation.

[0150] Specifically, the rollback operation may include the following steps:

[0151] First, in response to the rollback operation command, based on the established synchronization log and the association between each target entity and its original process recipe, at least one target entity to be rolled back and its corresponding original process recipe are determined.

[0152] Next, the determined original process formula is restored to the corresponding target entity.

[0153] Rollback operation commands can also be generated based on user input through the interactive interface. In some embodiments, the interactive interface uses a graphical user interface (GUI) as an operational bridge between the user and the RDM device. It is designed as an intuitive and highly guided rollback task construction environment. For example, in a scenario where it is necessary to restore the state before a certain recipe synchronization operation, the user can first search for a specific recipe synchronization transaction in the log query interface (filtered by transaction identifier, target entity identifier, operation time, or operation user, etc.). In response to this search operation, the interactive interface displays all associated target entities under that transaction and their synchronization result summaries. For target entities that have triggered backups, the interface will clearly mark the "rollbackable" status and display the names of one or more original process recipes that are rollbackable, as well as backup time and other information.

[0154] When a recipe synchronization transaction specifies two or more target entities, the rollback operation allows users to choose to restore the original process recipe for all or part of the target entities. Users can select one or more "rollbackable" target entities, or select one or more "rollbackable" original process recipes under that target entity, and then click the "Execute Rollback" button to confirm submission. The interface will capture this front-end operation in real time and integrate it into a structured rollback operation command. This command includes at least: a list of target entities to be rolled back, the corresponding original process recipe reference information (e.g., process recipe name or storage path), and the associated original recipe synchronization transaction identifier.

[0155] In some embodiments, to ensure the security and operational compliance of the production environment, RDM devices also apply permission management policies to rollback operations. For example, only "System Administrators" or "Process Engineers" are granted the "Execute Rollback" permission; while "Device Operators" typically do not have the right to initiate rollbacks. The permission configuration mechanism is consistent with the synchronization operation: the system administrator defines role permissions through a dedicated management interface, selects authorized permissions from a preset permission list (e.g., "View Synchronization Logs," "Execute Rollback," etc.), and binds user accounts to roles. After a user logs in, their permission set is dynamically loaded: if a user does not have rollback permissions, the rollback button is hidden or disabled; if a user attempts to bypass the interface and directly call the rollback interface, the RDM device will perform permission verification in the background and refuse execution.

[0156] In response to the rollback operation command, the RDM device parses the target entity list and original process recipe reference information, and performs secondary verification based on the relationships recorded in the synchronization log. Specifically, the RDM device queries the synchronization log database to confirm that each target entity to be rolled back does indeed have a valid original process recipe backup in the corresponding recipe synchronization transaction, and that the original process recipe backup has not been deleted or corrupted. After successful verification, a rollback transaction is established for this rollback operation, and the following operations are performed on each target entity in sequence within the context of this transaction: load its corresponding original process recipe snapshot from the RDM backup storage area, and redeploy it to the target entity using the same communication protocol as the original synchronization, thereby restoring it to its state before synchronization.

[0157] The entire rollback process is also recorded in a new audit log, which includes information such as the rollback operator, rollback time, target entities involved, and the original formula version restored, thus achieving a complete change-recovery closed loop and accountability.

[0158] Therefore, the starting point of the rollback operation is also the user's active selection on the interactive interface. By transforming the user's intention to synchronize historical transactions into precise recovery instructions based on logs and backup data, a highly reliable, fine-grained, and auditable recipe state rollback capability is achieved, effectively supporting the strict control requirements for process changes in the semiconductor manufacturing environment.

[0159] As mentioned earlier, recipe synchronization transactions can include one-to-many and one-to-one modes.

[0160] The following sections will describe the one-to-many and one-to-one modes in detail.

[0161] Recipe synchronization transactions employ a one-to-many model. In this model, the source entity is one RDM device or one semiconductor process device, and the target entity is two or more semiconductor process devices. Synchronization instructions are generated by executing a first-type synchronization operation.

[0162] Specifically, suppose that a critical process recipe on a certain RDM equipment or semiconductor process equipment (e.g., equipment 1) is to be distributed in batches to multiple semiconductor process equipment of the same type or similar process (e.g., equipment 2, equipment 3, equipment 4) to achieve process consistency calibration or rapid deployment of new versions.

[0163] Therefore, in practical applications, users access the primary interface provided by the RDM device to perform corresponding operations. Please refer to [link / reference]. Figure 3This is a schematic diagram of the first interactive interface corresponding to the one-to-many mode. This first interactive interface is specifically designed for one-to-many synchronization tasks. Through a clear layout and intuitive operation guidance, it supports users in completing the entire process from entity specification (including source entity specification and target entity specification), recipe selection to synchronous execution. It also supports batch operations for synchronization to multiple target entities, and displays synchronization status information in real time during program execution, improving user experience and operational transparency.

[0164] The first interactive interface can present different graphical display interfaces depending on the different operations or processes in the one-to-many mode.

[0165] like Figure 3 As shown, in the first main interface 300 of the first interactive interface, for example, the upper left corner of the first main interface 300 can be set as the first source entity selection area 301, which can display a list of all accessible entities within the local area network, including the RDM device itself and all online semiconductor process equipment. The user can specify one of the entities as the source entity (e.g., device 1) through a single selection operation. Subsequently, the RDM device dynamically loads the currently available set of process recipes under the source entity and displays them in the recipe display area 302 in list form. The recipe display area 302 can be located below the first source entity selection area 301. Each process recipe displayed can include summary information such as name, version number, creation time, associated materials, and number of sub-recipes. In some embodiments, process recipes can be subdivided into multiple types according to different usage levels and purposes, such as wafer-level process recipes, stage-level process recipes, model-level process recipes, etc. In addition, the first main interface 300 can also provide a recipe search area for directly searching for process recipes. The search can provide precise search or fuzzy search.

[0166] Meanwhile, the central area of ​​the first main interface 300 provides a first target entity selection area 303, listing all other online devices except the source entity. Of course, the first target entity selection area 303 can also display all online devices, including the source entity. Users can select two or more semiconductor process devices as target entities (e.g., device 2, device 3, device 4) through multi-selection operations (e.g., checking checkboxes, dragging and dropping, or multi-key combinations). To improve operational efficiency, the interface also supports filtering or batch selection of all devices by device type, machine number, process module, etc.

[0167] After selecting the source entity and target entity, the user selects at least one target process recipe from the source entity's process recipe set as the object to be synchronized. Selection methods include single selection, multiple selection, or all selection, and filtering by recipe type is supported. For example, a single selection can be made of process recipe 1 in recipe set A, or multiple selection can be made of process recipes 2 and 3 in recipe set A, or multiple selection can be made of process recipe 1 in recipe set A and process recipe 5 in recipe set C, etc. For each selected target process recipe, a summary of its key parameters can be previewed in real time to assist the user in confirming the synchronization content. For example, the selected target process recipes can also be displayed in the selected recipe area 304 of the first main interface 300. Of course, in other embodiments, other selection orders can also be used. For example, the source entity can be selected first in the source entity selection area, then at least one target process recipe can be selected from the source entity's process recipe set in the recipe display area as the object to be synchronized, and finally two or more semiconductor process devices can be selected as target entities in the target entity selection area.

[0168] Once the user confirms the selection is correct, they click the "Synchronize" button 305 on the interface. The RDM device then captures all the aforementioned front-end inputs, including source entity identifiers, target entity lists, and target process recipe lists, and integrates them into a structured synchronization command. This synchronization command is then submitted to the RDM device's back-end processing engine.

[0169] The RDM device parses the synchronization command and verifies the following constraints:

[0170] All involved entities (source entities and target entities) are located within the same local area network;

[0171] Each entity is legally identified and consists of RDM equipment or semiconductor process equipment.

[0172] Users have the permission to read process recipes for selected source entities and write process recipes for selected target entities.

[0173] Once the verification is successful, the RDM device will formally initiate a recipe synchronization transaction and establish the above three core elements—a single source entity, multiple target entities, and at least one target process recipe—as components of the recipe synchronization transaction.

[0174] In the subsequent execution phase, the RDM device will, based on this one-to-many synchronization transaction, execute an independent synchronization process for each target entity in sequence:

[0175] First, retrieve the complete data of the selected target process formulation (including the main formulation, all sub-formulations, Bill of Materials (BOM), and binary attachments) from the source entity and save it as a local temporary formulation data file (hereinafter referred to as the ert file). If the source entity is an RDM device, the target process formulation is already stored in the RDM device's local ert file, so this step can be omitted. If the source entity is the RDM device itself, the target process formulation is already stored locally, and there is no need to retrieve it from an external device; the locally stored formulation data can be read directly. Here, the RDM device can also be identified as the local endpoint.

[0176] Subsequently, for each target entity, the RDM device checks whether there is an existing process recipe in the target entity that has a synchronization conflict with at least one target process recipe. If so, the existing process recipe with synchronization conflict is automatically backed up to the RDM device as the original process recipe. Then, the complete data of the parsed target process recipe is synchronously written into the target entity.

[0177] The first main interface 300 also provides a recipe synchronization display area 306, which displays the status information during the synchronization process. This allows users to see in real time which step the program has reached and what operations it has performed during program execution.

[0178] Furthermore, the formula synchronization display area 306 can also display the synchronization results of the formula synchronization transaction during or after the synchronization process. That is, it can display the synchronization results of each target process formula and / or each target entity involved in the formula synchronization transaction. For example, the target process formula is displayed as the main item, showing the synchronization results of the target process formula to each target entity. The synchronization results include at least the target process formula identifier, the source entity identifier, the target entity identifier (i.e., the target entity identifier of the target process formula to different target entities), the synchronization time (i.e., the synchronization time of the target process formula to different target entities), and the synchronization status (the synchronization status of the target process formula to different target entities). The synchronization status includes, but is not limited to, synchronization successful, synchronization failed, and synchronization not started. For example, the target entity is displayed as the main item, showing the synchronization results of the target entity receiving each target process recipe. The synchronization results include at least the target entity identifier, source entity identifier, target process recipe identifier (i.e., the target process recipe identifier of the target entity receiving each target process recipe), synchronization time (i.e., the synchronization time of the target entity receiving each target process recipe), and synchronization status (i.e., the synchronization status of the target entity receiving each target process recipe). The synchronization status includes, but is not limited to, synchronization successful, synchronization failed, and synchronization not started. Similarly, taking the synchronization status as an example, synchronization success and synchronization failure can be displayed through different visual identifiers, including at least one of the following: color markings, icon symbols, font styles, and background highlights.

[0179] In some embodiments, for all target process recipes in the recipe synchronization transaction, if any target process recipe fails to be successfully synchronized to the target entity, the synchronization status report corresponding to that target entity will show synchronization failure.

[0180] The entire one-to-many synchronization process is driven by a single transaction, but the processing of each target entity is isolated from each other and does not affect each other. This ensures both the efficiency of batch operations and that the failure of a single target entity will not affect other target entities.

[0181] After synchronization is complete, the RDM device generates a synchronization log associated with the recipe synchronization transaction for each target entity, and further summarizes them into an overall transaction report for users to audit and trace back.

[0182] Thus, through a dedicated first interactive interface, this application simplifies the complex one-to-many recipe distribution task into an intuitive four-step operation of "selecting source entity", "selecting target entity", "selecting process recipe" and "point synchronization", which significantly reduces the cognitive burden on users. At the same time, relying on the transactional, permission-based and log-based background mechanism, it ensures the security, consistency and traceability of large-scale synchronization, perfectly meeting the dual requirements of high efficiency and high reliability in semiconductor manufacturing.

[0183] In addition, the first interactive interface may also include an operation log interface for recording and managing the recipe synchronization history. The operation log interface displays all completed recipe synchronization transactions and their execution results.

[0184] After each successful or failed recipe synchronization task, the RDM device automatically generates a structured synchronization log record and persists it in the RDM device's log database. When the user enters the "History" or "Operation Log" view, the RDM device retrieves the relevant logs from the database and dynamically presents them in tabular form on the interface for the user to query and trace.

[0185] Specifically, when a synchronization operation triggers conflict detection and generates a backup of the original process recipe, a "reversible" marker will be added to the entry for the target entity or the process recipe in the synchronization log, indicating to the user that the operation has the capability to be restored. This "reversible" marker can be displayed as an icon, text label, special symbol, or highlight.

[0186] If a user finds that a synchronization caused an abnormality in the process recipe on the target entity (e.g., parameter deviation, process instability) during subsequent use, they can initiate a rollback operation by clicking the "Rollback" button on the right side of the synchronization log entry corresponding to the target entity.

[0187] In response to the rollback command, the RDM device will automatically retrieve the corresponding backup data based on the transaction identifier and the original process recipe storage path recorded in the synchronization log entry. Subsequently, the RDM device will initiate the rollback transaction and use the same communication protocol as the original synchronization to redeploy the backed-up original process recipe to the target entity, thereby restoring the target entity to its pre-synchronization state.

[0188] The entire rollback process is also recorded in a new audit log, which includes information such as the rollback operator, rollback time, and restored recipe version, forming a complete "change-restore" closed loop to ensure that all operations are traceable, verifiable, and reproducible.

[0189] In some embodiments, recipe synchronization transactions employ a one-to-one model. In this model, the source entity is an RDM device or a semiconductor process device, and the target entity is an RDM device or a semiconductor process device. As can be seen, both the source and target entities are single entities; that is, a single synchronization operation involves only recipe exchange or alignment between the two entities. Synchronization instructions are generated by executing a second type of synchronization operation.

[0190] Specifically, suppose we want to compare and synchronize a specific process recipe on one RDM or semiconductor process equipment (e.g., equipment 1) with another RDM or semiconductor process equipment (e.g., equipment 2) to achieve recipe calibration, difference repair, or version alignment between the two equipments. This scenario is often used for process debugging, parameter reproduction after equipment maintenance, importing baseline configurations before new equipment goes live, or verifying process consistency across similar equipment on different production lines.

[0191] Therefore, in practical applications, users access the second interactive interface provided by the RDM device to perform corresponding operations. Please refer to [link / reference]. Figure 4 and Figure 5 The diagram shows a second interactive interface corresponding to the one-to-one mode in one embodiment. This second interactive interface is specifically designed for one-to-one comparison and synchronization tasks. Through a clear layout and intuitive operation guidance, it supports users in completing the entire process from specifying two entities, comparing process formulas, selecting formulas based on comparison results to synchronous execution. It also displays comparison details and synchronization status information in real time during program execution, improving user experience and operational transparency.

[0192] like Figure 4 As shown, in this second interactive interface, for example, the upper left corner of the second main interface 400 can be set as the second source entity selection area 401, which can display a list of all accessible entities within the local area network, including the RDM device itself and all online semiconductor process equipment. Users can specify one entity as the source entity (e.g., device 1) through a single selection operation. Optionally, the RDM device will dynamically load the currently available set of process recipes under that source entity and display them in a list format in the source entity recipe display area 402 located below the second source entity selection area 401. Each displayed process recipe can include summary information such as name, version number, creation time, associated materials, and number of sub-recipes. In addition, a device search area can be provided below the second source entity selection area 401 for directly searching for devices. The search can provide precise or fuzzy search.

[0193] Meanwhile, the upper right corner of the second main interface 400 provides a second target entity selection area 403, which can display a list of all accessible entities within the local area network, including the RDM device itself and all online semiconductor process equipment. Users can specify an entity different from the previously specified source entity as the target entity (e.g., device 2) through a single-selection operation. Optionally, the RDM device dynamically loads the currently available set of process recipes for the target entity and displays them in a list format in the target entity recipe display area 404 located below the second target entity selection area 403. Each displayed process recipe can include summary information such as name, version number, creation time, associated materials, and number of sub-recipes. Similarly, in some embodiments, process recipes can be subdivided into multiple types according to different usage levels and purposes, such as wafer-level process recipes, stage-level process recipes, and model-level process recipes. Furthermore, a device search area can be provided below the second target entity selection area 403 for directly searching for devices. The search can provide precise or fuzzy search.

[0194] Thus, by selecting the source entity and the target entity, the two objects to be compared are determined.

[0195] Once the user confirms the selection is correct, they click the "First Comparison" button 405 on the interface. The RDM device then captures all the aforementioned front-end inputs, forming a comparison request between the two entities. This comparison request is then submitted to the RDM device's back-end processing engine to trigger the comparison operation.

[0196] The RDM device parses the comparison request, performs a process recipe comparison between the process recipe sets in the source entity and the target entity, and classifies the comparison results of each process recipe according to preset rules:

[0197] Same class (Equal): Both name and content are identical;

[0198] Different classes (Not Equal): The names or contents are different;

[0199] Approximate: Different names but highly similar process types and core parameters. "Highly similar" can be based on a preset similarity threshold, for example, the difference in key parameters (e.g., temperature, pressure, time) does not exceed ±5%, and the process type codes are consistent.

[0200] After the comparison is completed, the results will be displayed in the first comparison result display area 406 below the middle area of ​​the second main interface 400, or in another new first comparison display interface 408 (e.g., Figure 5The comparison results are displayed in the [screenshot / framework]. For example, taking three categories of comparison results as an example, the various process formulations under the three categories are displayed in the first comparison result display area 406 or the new first comparison display interface 408. Each category of process formulations is presented in list form, supporting sorting or filtering by name, version, or process type. For the three categories of process formulations, different visual identifiers such as color markings, icons, font styles, or background highlights can be used to intuitively indicate the comparison status, facilitating quick and accurate identification of different categories. For example, process formulations in the "same category" can be marked with a "√" (or "=") icon, process formulations in the "different category" can be marked with a "×" (or "≠") icon, and process formulations in the "similar category" can be marked with a "○" (or "≈") icon.

[0201] Additionally, in the second main interface 400 or the new first comparison display interface 408, users can filter specific types of comparison results through set filter buttons (e.g., "Show only same class", "Show only different class", "Show only similar class") to focus on the categories of interest.

[0202] Subsequently, users can select one or more process recipes as target process recipes in the process recipe list below the source entity, and click the "First Synchronization" button 407 (or Figure 5 The RDM device, by clicking the "Second Synchronization" button (409), captures all the aforementioned front-end inputs, including the two comparison entities and the selected target process recipe list, and integrates them into a structured synchronization command. This synchronization command is then submitted to the RDM device's back-end processing engine.

[0203] The RDM device parses the synchronization command and verifies the following constraints:

[0204] All involved entities (source entity and target entity) are located within the same local area network;

[0205] Each entity is legally identified and consists of RDM equipment or semiconductor process equipment.

[0206] Users have the permission to read process recipes for selected source entities and write process recipes for selected target entities.

[0207] Once the verification is successful, the RDM device will formally initiate a recipe synchronization transaction and establish the above three core elements—two comparison entities and at least one target process recipe—as components of the recipe synchronization transaction.

[0208] In the subsequent execution phase, the RDM device will perform an independent synchronization process for the target entity based on this one-to-one synchronization transaction:

[0209] First, retrieve the complete data of the selected target process formulation (including the master formulation, all sub-formulations, Bill of Materials (BOM), and binary attachments) from the source entity and save it as a local .ert file. If the source entity is an RDM device, and the target process formulation is already stored in the RDM device's local .ert file, this step can be omitted.

[0210] Subsequently, the complete data of the parsed target process formula is synchronously written into the target entity.

[0211] The second main interface 400 also provides a recipe synchronization display area, which displays the status information during the synchronization process. This allows users to see in real time which step the program has reached and what operations it has performed during program execution.

[0212] Furthermore, the formula synchronization display area can also display the synchronization results of the formula synchronization transaction during or after the synchronization process. That is, it can display the synchronization results of each target process formula and / or each target entity involved in the formula synchronization transaction. For example, displaying the target process formula as the main item shows the synchronization results from the target process formula to the target entity. The synchronization results include at least the target process formula identifier, source entity identifier, target entity identifier, synchronization time, and synchronization status, which includes, but is not limited to, synchronization successful, synchronization failed, and synchronization not started. For example, displaying the target entity as the main item shows the synchronization results of the target entity receiving each target process formula. The synchronization results include at least the target entity identifier, source entity identifier, target process formula identifier (i.e., the target process formula identifier received by the target entity), synchronization time (i.e., the synchronization time when the target entity received each target process formula), and synchronization status (i.e., the synchronization status when the target entity received each target process formula). The synchronization status includes, but is not limited to, synchronization successful, synchronization failed, and synchronization not started. Similarly, taking synchronization status as an example, synchronization success and synchronization failure can be displayed through different visual identifiers, including at least one of the following: color markings, icon symbols, font styles, and background highlights.

[0213] In some embodiments, for all target process recipes in the recipe synchronization transaction, if any target process recipe fails to be successfully synchronized to the target entity, the synchronization status report corresponding to that target entity will show synchronization failure.

[0214] After synchronization is complete, the RDM device generates a synchronization log associated with the recipe synchronization transaction for the target entity and summarizes it into an overall transaction report for user auditing and backtracking.

[0215] Through the above mechanism, this application realizes full-process visualized management from equipment selection, formula comparison, difference analysis to targeted synchronization. First, a dual-entity formula comparison is performed, and the differences are presented in three categories: "same type", "different type", and "similar type". This allows users to accurately select the formula to be synchronized with full knowledge, reduce the risk of misoperation, and significantly improve the efficiency and accuracy of process debugging and equipment calibration. It is particularly suitable for the formula consistency assurance requirements in high-precision manufacturing scenarios.

[0216] In addition, the second interactive interface may also include an operation log interface for recording and managing the recipe synchronization history. The operation log interface displays all completed recipe synchronization transactions and their execution results.

[0217] After each successful or failed recipe synchronization task, the RDM device automatically generates a structured synchronization log record and persists it in the RDM device's log database. When the user enters the "History" or "Operation Log" view, the RDM device retrieves the relevant logs from the database and dynamically presents them in tabular form on the interface for the user to query and trace.

[0218] Specifically, when a synchronization operation triggers conflict detection and generates a backup of the original process recipe, a "reversible" marker will be added to the entry for the target entity or the process recipe in the synchronization log, indicating to the user that the operation has the capability to be restored. This "reversible" marker can be displayed as an icon, text label, special symbol, or highlight.

[0219] If a user finds that a synchronization caused an abnormality in the process recipe on the target entity (e.g., parameter deviation, process instability) during subsequent use, they can initiate a rollback operation by clicking the "Rollback" button on the right side of the synchronization log entry corresponding to the target entity.

[0220] In response to the rollback command, the RDM device will automatically retrieve the corresponding backup data based on the transaction identifier and the original process recipe storage path recorded in the synchronization log entry. Subsequently, the RDM device will initiate the rollback transaction and use the same communication protocol as the original synchronization to redeploy the backed-up original process recipe to the target entity, thereby restoring the target entity to its pre-synchronization state.

[0221] The entire rollback process is also recorded in a new audit log, which includes information such as the rollback operator, rollback time, and restored recipe version, forming a complete "change-restore" closed loop to ensure that all operations are traceable, verifiable, and reproducible.

[0222] Please see Figure 6 and Figure 7The diagram shown is a schematic representation of a second interactive interface corresponding to a one-to-one mode in another embodiment.

[0223] In practice, users can first click the "Compare" tab in the bottom navigation bar of the RDM main interface to switch to the comparison mode, which provides a second interactive interface.

[0224] like Figure 6 As shown, in this second interactive interface, for example, in the entity display area 501 on the left side of the third main interface 500, a list of all accessible entities within the local area network can be displayed, including the RDM device itself and all online semiconductor process equipment. Users can select any two entities. Optionally, the two selected entities will be loaded as comparison objects into the "Selected Entities" display area on the right.

[0225] For example, a device search area may also be provided at the physical display area 501 for directly searching for devices. The search can provide precise search or fuzzy search.

[0226] In addition, by clicking the "Import" button, the RDM device will automatically pull the corresponding process recipe set from the selected entities and display it in a list format in the "Selected Entities" display area 502 on the right. This will dynamically generate two side-by-side recipe lists, each corresponding to the recipe data of the two selected entities. Each process recipe displayed can include summary information such as name, version number, creation time, associated materials, and the number of sub-recipes.

[0227] Once the user confirms the selection is correct, they click the "Second Comparison" button 503 on the interface. The RDM device then captures all the aforementioned front-end inputs, forming a comparison request between the two entities. This comparison request is subsequently submitted to the RDM device's back-end processing engine to trigger the comparison operation.

[0228] The RDM device parses the comparison request, performs a process recipe comparison between the process recipe sets in the source entity and the target entity, and classifies the comparison results of each process recipe according to preset rules:

[0229] Same class (Equal): Both name and content are identical;

[0230] Different classes (Not Equal): The names or contents are different;

[0231] Approximate class: Different in name but highly similar in process type and core parameters.

[0232] After the comparison is completed, the comparison results are displayed in the second comparison result display area 506 of the new second comparison display interface 505. This page is presented in the form of a two-column table, with the left and right sides corresponding to the recipe lists of the two selected entities, and each row representing one recipe record.

[0233] Taking the three categories of comparison results as an example, the main page displays the various process formulations under each category. Each category of process formulations is presented in list form, supporting sorting or filtering by name, version, and process type. For the three categories of process formulations, different visual identifiers such as color markings, icons, font styles, or background highlights can be used to intuitively indicate the comparison status, facilitating quick and accurate identification of different categories. For example, a filter control area 507 can be set at the top or bottom of the second comparison result display area 506. For process formulations of the "same category," a "√" (or "=" icon can be used; for process formulations of the "different category," a "×" (or "≠") icon can be used; and for process formulations of the "similar category," a "○" (or "≈") icon can be used.

[0234] Additionally, in the new second comparison display interface 505, users can filter specific types of comparison results and focus on the categories of interest using filter buttons (e.g., "Show only same class", "Show only different class", "Show only similar class") in the top or bottom filter control area 507.

[0235] Subsequently, the source entity and target entity, as well as the target process formulation, are determined.

[0236] In some examples, at least one process recipe can be selected from the process recipe set of the first entity as the first target process recipe, and a recipe synchronization transaction with the first entity as the source entity and the second entity as the target entity can be initiated. Taking the second interactive interface as an example (e.g.) Figure 7 As shown in the diagram, the comparison results are presented in a two-column table format, with the first entity and its associated process recipe on the left and the second entity and its associated process recipe on the right. Thus, in practical applications, users can select one or more process recipes as the first target process recipe in the left-hand list (selecting these recipes in the left-hand list also indicates that the first entity is the source entity). Then, by clicking the "Synchronize to Right" button (e.g., "→"), the RDM device initiates a recipe synchronization transaction with the first entity on the left as the source entity and the second entity on the right as the target entity, synchronizing one or more selected process recipes from the left to the second entity on the right. Figure 7 As shown, this illustrates the synchronization of process recipes (e.g., process recipe 2 and process recipe 3) from the left-hand device (e.g., device 2) to the right-hand device (e.g., device 3).

[0237] In some examples, at least one process recipe can be selected from the process recipe set of the second entity as the second target process recipe, initiating a recipe synchronization transaction with the second entity as the source entity and the first entity as the target entity. Taking the second interactive interface as an example, the comparison results are presented in a two-column table format, where the first entity and its associated process recipes are on the left and the second entity and its associated process recipes are on the right. Thus, in practical applications, the user can select one or more process recipes as the second target process recipes in the right-hand list (by selecting them in the right-hand list, the user also indicates that the second entity is the source entity), and then click the "Synchronize to Left" button (e.g., "←"). The RDM device then initiates a recipe synchronization transaction with the second entity on the right as the source entity and the first entity on the left as the target entity, synchronizing the selected one or more process recipes on the right to the second entity on the left.

[0238] In some examples, at least one process recipe can be selected from the process recipe set of the first entity as the first target process recipe, initiating a recipe synchronization transaction with the first entity as the source entity and the second entity as the target entity; simultaneously, at least one process recipe can be selected from the process recipe set of the second entity as the second target process recipe, initiating a recipe synchronization transaction with the second entity as the source entity and the first entity as the target entity. This enables hybrid synchronization of process recipes between the two entities. In the hybrid synchronization transaction, it can be divided into two independent synchronization subtasks, processed separately. For example, the two synchronization subtasks are executed serially to avoid communication conflicts and facilitate user observation of the completion status of each synchronization subtask. For details on operations on the second interactive interface, please refer to the preceding description, which will not be repeated here.

[0239] The RDM device captures all the aforementioned front-end inputs, including the two comparison entities and the selected target process recipe list, and integrates them into a structured synchronization command. This synchronization command is then submitted to the RDM device's back-end processing engine.

[0240] The RDM device parses the synchronization command and verifies the following constraints:

[0241] All involved entities (source entity and target entity) are located within the same local area network;

[0242] Each entity is legally identified and consists of RDM equipment or semiconductor process equipment.

[0243] Users have the permission to read process recipes for selected source entities and write process recipes for selected target entities.

[0244] Once the verification is successful, the RDM device will formally initiate a recipe synchronization transaction and establish the above three core elements—two comparison entities and at least one target process recipe—as components of the recipe synchronization transaction.

[0245] In the subsequent execution phase, the RDM device will perform an independent synchronization process for the target entity based on this one-to-one synchronization transaction:

[0246] First, retrieve the complete data of the selected target process formulation (including the master formulation, all sub-formulations, Bill of Materials (BOM), and binary attachments) from the source entity and save it as a local .ert file. If the source entity is an RDM device, and the target process formulation is already stored in the RDM device's local .ert file, this step can be omitted.

[0247] Subsequently, the complete data of the parsed target process formula is synchronously written into the target entity.

[0248] The third main interface 500 also provides a recipe synchronization display area, which displays the status information during the synchronization process. This allows users to see in real time which step the program has reached and what operations it has performed during program execution.

[0249] Furthermore, the formula synchronization display area can also display the synchronization results of the formula synchronization transaction during or after the synchronization process. That is, it can display the synchronization results of each target process formula and / or each target entity involved in the formula synchronization transaction. For example, displaying the target process formula as the main item shows the synchronization results from the target process formula to the target entity. The synchronization results include at least the target process formula identifier, source entity identifier, target entity identifier, synchronization time, and synchronization status, which includes, but is not limited to, synchronization successful, synchronization failed, and synchronization not started. For example, displaying the target entity as the main item shows the synchronization results of the target entity receiving each target process formula. The synchronization results include at least the target entity identifier, source entity identifier, target process formula identifier (i.e., the target process formula identifier received by the target entity), synchronization time (i.e., the synchronization time when the target entity received each target process formula), and synchronization status (i.e., the synchronization status when the target entity received each target process formula). The synchronization status includes, but is not limited to, synchronization successful, synchronization failed, and synchronization not started. Similarly, taking synchronization status as an example, synchronization success and synchronization failure can be displayed through different visual identifiers, including at least one of the following: color markings, icon symbols, font styles, and background highlights.

[0250] In some embodiments, for all target process recipes in the recipe synchronization transaction, if any target process recipe fails to be successfully synchronized to the target entity, the synchronization status report corresponding to that target entity will show synchronization failure.

[0251] After synchronization is complete, the RDM device generates a synchronization log associated with the recipe synchronization transaction for the target entity and summarizes it into an overall transaction report for user auditing and backtracking.

[0252] Through the above mechanism, this application realizes full-process visual management from equipment selection, formula comparison, difference analysis to targeted synchronization. First, a dual-entity formula comparison is performed, and the differences are presented in three categories: "same", "different", and "similar". This allows users to accurately control the synchronization content and direction with full knowledge, which significantly improves the efficiency and accuracy of process debugging and equipment calibration. It is particularly suitable for the formula consistency assurance requirements in high-precision manufacturing scenarios.

[0253] In addition, the second interactive interface may also include an operation log interface for recording and managing the recipe synchronization history. The operation log interface displays all completed recipe synchronization transactions and their execution results.

[0254] After each successful or failed recipe synchronization task, the RDM device automatically generates a structured synchronization log record and persists it in the RDM device's log database. When the user enters the "History" or "Operation Log" view, the RDM device retrieves the relevant logs from the database and dynamically presents them in tabular form on the interface for the user to query and trace.

[0255] Specifically, when a synchronization operation triggers conflict detection and generates a backup of the original process recipe, a "reversible" marker will be added to the entry for the target entity or the process recipe in the synchronization log, indicating to the user that the operation has the capability to be restored. This "reversible" marker can be displayed as an icon, text label, special symbol, or highlight.

[0256] If a user finds that a synchronization caused an abnormality in the process recipe on the target entity (e.g., parameter deviation, process instability) during subsequent use, they can initiate a rollback operation by clicking the "Rollback" button on the right side of the synchronization log entry corresponding to the target entity.

[0257] In response to the rollback command, the RDM device will automatically retrieve the corresponding backup data based on the transaction identifier and the original process recipe storage path recorded in the synchronization log entry. Subsequently, the RDM device will initiate the rollback transaction and use the same communication protocol as the original synchronization to redeploy the backed-up original process recipe to the target entity, thereby restoring the target entity to its pre-synchronization state.

[0258] It should be noted that the users mentioned in the embodiments of this application may include engineers from manufacturing plants, engineers from equipment manufacturers, intelligent robots, virtual intelligent voice assistants on computer devices, AI intelligent agents, etc.

[0259] This application also discloses a process formula synchronization device, which is applied in a formula distribution management device.

[0260] Please see Figure 8 The diagram shown is a schematic diagram of the process formulation synchronization device of this application in one embodiment.

[0261] like Figure 8 As shown, the process formula synchronization device of this application includes: a transaction initiation module 601, a security synchronization module 603, and a log management module 605.

[0262] The transaction initiation module 601 is configured to initiate a recipe synchronization transaction in response to a synchronization command.

[0263] In the recipe synchronization transaction, a source entity, at least one target entity, and at least one target process recipe to be synchronized are specified. The source entity and each target entity are respectively one of the recipe allocation management device and the semiconductor process equipment, and the recipe allocation management device and the semiconductor process equipment are located on the same local area network.

[0264] In some embodiments, synchronization instructions can be received and generated through an interactive interface, which may be a graphical user interface. That is, the formation of synchronization instructions is directly derived from a series of input operations performed by the user on the interactive interface.

[0265] In some embodiments, the recipe synchronization transaction adopts a one-to-many mode, in which there is one source entity and two or more target entities. For example, the source entity is one RDM device or one semiconductor process device, and the target entities are two or more semiconductor process devices.

[0266] In some embodiments, the recipe synchronization transaction adopts a one-to-one mode, in which there is one source entity and one target entity. For example, the source entity is an RDM device or a semiconductor process device, and the target entity is an RDM device or a semiconductor process device.

[0267] The secure synchronization module 603 is configured to perform a synchronization operation in response to a recipe synchronization transaction.

[0268] For each target entity, perform the following: Check if there is an existing process recipe in the target entity that conflicts with at least one target process recipe. Before synchronization, back up the existing process recipe that conflicts with the synchronization to the recipe allocation management device as the original process recipe; synchronize at least one target process recipe to the target entity.

[0269] In this application, conflict detection and automatic backup are performed before synchronization is implemented. This can identify the risk of overwriting in advance and automatically back up conflict recipes and their complete related data, ensuring that the synchronization operation is reversible.

[0270] The log management module 605 is configured to generate a synchronization log associated with the recipe synchronization transaction. The synchronization log records the backup information of the original process recipe and its association with the corresponding target entity, which is used to support the restoration of the corresponding target entity to the state before synchronization based on the synchronization log.

[0271] This synchronization log is uniquely associated with the currently processing recipe synchronization transaction and stored in the RDM device's log database.

[0272] Synchronized logs provide a complete execution basis for subsequent rollback operations.

[0273] The process formula synchronization device of this application also includes a rollback control module 607, which is configured to perform a rollback operation based on the synchronization log to restore the target entity to the state before synchronization.

[0274] In some embodiments, when it is necessary to restore a target entity to its pre-synchronization state, the synchronization log is queried, and the corresponding process formula is selected according to the synchronization log and a rollback operation instruction is generated. The rollback control module 607 can respond to the rollback operation instruction, determine the target entity to be rolled back and its corresponding original process formula based on the established association relationship with each target entity and its original process formula in the synchronization log, and redeploy it to the corresponding target entity, thereby achieving accurate and one-click state rollback.

[0275] The process formulation synchronization device of this application also includes a synchronization retry management module, which is configured to monitor the synchronization result of at least one target entity, generate a synchronization status report that distinguishes between successful and failed target entities, and, in response to a retry instruction for a failed target entity, re-execute the synchronization operation only for the failed target entity.

[0276] The process formulation synchronization device in this application also includes a rollback control module.

[0277] In some embodiments, the rollback control module is configured to provide a global rollback option if any target entity fails to synchronize after the synchronization operation is completed, and in response to a confirmation instruction for the option, perform a rollback operation on all target entities based on the synchronization log to restore all target entities to their pre-synchronization state.

[0278] In some embodiments, the rollback control module is configured to detect the response status of each target entity in real time during the execution of the synchronization operation, and automatically trigger a global rollback when any target entity returns a synchronization failure or timeout, undoing all executed synchronization operations, and restoring all target entities to their pre-synchronization state based on the synchronization log.

[0279] It should be noted that the process formula synchronization device and the process formula synchronization method provided in the above embodiments belong to the same concept. The specific operation methods of each module and unit have been described in detail in the method embodiments and will not be repeated here. In practical applications, the process formula synchronization device provided in the above embodiments can be assigned to different functional modules as needed, that is, the internal structure of the system can be divided into different functional modules to complete all or part of the functions described above. This is not a limitation here.

[0280] This application also discloses a formula dispensing management device, such as... Figure 9 The diagram shown illustrates the structure of a formula dispensing management device in one embodiment of this application. This device can be a terminal or a server, specifically:

[0281] The formula distribution management device includes a processor 701 and a memory 703. The processor 701 and the memory 703 can communicate via a bus 702. The memory 703 can store program instructions, and the processor 701 implements the steps in the process formula synchronization method in the previous embodiment by running the program instructions in the memory 703.

[0282] Bus 702 can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. Buses can be categorized as address buses, data buses, control buses, etc. For ease of representation, although only one thick line is used in the diagram, this does not indicate that there is only one bus or one type of bus.

[0283] The processor 701 can be implemented as a central processing unit (CPU), a microprocessor unit (MCU), a system on chip (System on Chip), or a field-programmable logic array (FPGA).

[0284] The memory 703 may include volatile memory for temporary data storage during operation, such as random access memory (RAM).

[0285] The memory 703 may also include non-volatile memory for data storage, such as read-only memory (ROM), flash memory, hard disk drive (HDD), or solid-state disk (SSD).

[0286] In some embodiments, the recipe dispensing management device may further include a communication interface 704. The communication interface 704 is used for communication with external devices. In specific instances, the communication interface 704 may include one or more wired and / or wireless communication circuit modules. For example, the communication interface 704 may include one or more of, such as a wired network card, a USB module, a serial interface module, etc. The wireless communication protocols followed by the wireless communication module include, for example, Near Field Communication (NFC) technology, Infrared (IR) technology, Global System for Mobile Communications (GSM), General Packet Radio Service (GPRS), Code Division Multiple Access (CDMA), Wideband Code Division Multiple Access (WCDMA), Time-Division Code Division Multiple Access (TD-SCDMA), Long Term Evolution (LTE), Bluetooth (BT), Global Navigation Satellite System (GNSS), etc.

[0287] The formula dispensing management device may also include an input unit and an output unit. The input unit can be used to receive input digital or character information, and to generate keyboard, mouse, touchscreen, joystick, optical, or trackball signal inputs related to user settings and function control. The output unit can be used to present or transmit processing results, status information, and interactive feedback to the user, for example, through a display screen (e.g., LCD screen, touchscreen), indicator lights, speakers, vibration modules, printers, or other audible, visual, or tactile output devices, generating text, image, sound, or tactile signals corresponding to the equipment's operating status, formula dispensing results, operation prompts, or alarm information.

[0288] Specifically in this embodiment, the processor 701 in the formula distribution management device will load the executable files corresponding to the processes of one or more computer programs into the memory 703 according to the following instructions, and the processor 701 will run the program instructions stored in the memory 703 to realize the various steps of the aforementioned process formula synchronization method.

[0289] For details on the implementation of each of the above steps, please refer to the previous examples, which will not be repeated here.

[0290] Those skilled in the art will understand that all or part of the steps in the various methods of the above embodiments can be performed by a computer program, or by a computer program controlling related hardware. The computer program can be stored in a computer-readable storage medium and loaded and executed by a processor.

[0291] Therefore, this application further discloses a process recipe synchronization system, including the recipe allocation management device as described above and at least one semiconductor process device, wherein the recipe allocation management device and the at least one semiconductor process device are communicatively connected and located in the same local area network.

[0292] Therefore, this application further discloses a computer-readable storage medium storing a computer program that can be loaded by a processor to execute the steps in any of the process formulation synchronization methods provided in this application.

[0293] The computer-readable storage medium may include: read-only memory (ROM), random access memory (RAM), disk or optical disk, etc.

[0294] Since the computer program stored in the computer-readable storage medium can execute the steps in any of the process recipe synchronization methods provided in the embodiments of this application, the beneficial effects that any of the process recipe synchronization methods provided in the embodiments of this application can achieve can be realized, as detailed in the preceding embodiments, and will not be repeated here.

[0295] This application also provides a computer program product, which includes a computer program stored in a computer-readable storage medium. A processor of a formula dispensing management device reads the computer program from the computer-readable storage medium and executes the computer program, causing the formula dispensing management device to perform the methods provided in various optional implementations of the above-described process formula synchronization method.

[0296] The foregoing has provided a detailed description of a process formula synchronization method, process formula synchronization device, formula allocation management equipment, process formula synchronization system computer-readable storage medium, and computer program product provided in the embodiments of this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A method for synchronizing process formulation, characterized in that, Includes the following steps: In response to a synchronization command, initiate a recipe synchronization transaction; In the recipe synchronization transaction, a source entity, at least one target entity, and at least one target process recipe to be synchronized are specified, wherein the source entity and each of the target entities are each one of a recipe allocation management device and a semiconductor process device, and the recipe allocation management device and the semiconductor process device are located on the same local area network. In response to the recipe synchronization transaction, a synchronization operation is performed; wherein, for each target entity, the following steps are performed: Check whether there is an existing process recipe in the target entity that has a synchronization conflict with the at least one target process recipe; if so, only when a synchronization conflict is detected, back up the existing process recipe with the synchronization conflict to the recipe allocation management device as the original process recipe before synchronization; Synchronize the at least one target process formulation to the target entity; Generate a synchronization log associated with the recipe synchronization transaction, wherein the synchronization log records backup information of the original process recipe and its association with the corresponding target entity; The synchronization log is used to support rollback operations, which include: in response to a rollback operation instruction, determining at least one target entity to be rolled back and its corresponding original process recipe based on the association between the synchronization log and each target entity and its original process recipe; restoring the determined original process recipe to the corresponding target entity; and when the recipe synchronization transaction specifies two or more target entities, the rollback operation can select to restore the original process recipe for all or part of the target entities, and can select to restore all or part of the original process recipe under the selected target entities.

2. The method for synchronizing process formulation according to claim 1, characterized in that, Also includes: Monitor the synchronization result of the at least one target entity and generate a synchronization status report, wherein the synchronization status report distinguishes between target entities that have successfully synchronized and target entities that have failed to synchronize; as well as In response to a retry instruction for a target entity that has failed to synchronize, the synchronization operation is re-executed only for the target entity that failed to synchronize.

3. The method for synchronizing process formulation according to claim 1, characterized in that, Also includes: If any target entity fails to synchronize after the synchronization operation is completed, a global rollback option is provided. as well as In response to the confirmation command for the global rollback option, a rollback operation is performed on all target entities involved based on the synchronization log, restoring all target entities to their pre-synchronization state.

4. The method for synchronizing process formulation according to claim 1, characterized in that, Also includes: The response status of at least one target entity is monitored in real time during the synchronous operation. as well as If any target entity returns a synchronization failure or timeout, a global rollback is automatically triggered, undoing all executed synchronization operations and restoring all involved target entities to their pre-synchronization state based on the synchronization log.

5. The method for synchronizing process formulation according to claim 1, characterized in that, The recipe synchronization transaction corresponds to a one-to-many mode, in which the synchronization instructions are generated by executing a first type of synchronization operation, including: Receive an operation to select a single entity as the source entity; The operation of receiving two or more semiconductor process devices as the target entity; Receive the operation of selecting at least one target process formulation from the process formulation set of the source entity; and Receive synchronously triggered operations.

6. The method for synchronizing process formulation according to claim 1, characterized in that, The recipe synchronization transaction corresponds to a one-to-one mode, which further includes: in response to a comparison request between two selected entities, performing a process recipe comparison on the process recipe sets in the two entities and outputting the comparison result; and in response to a synchronization instruction related to the comparison result, initiating a recipe synchronization transaction.

7. The method for synchronizing process formulation according to claim 6, characterized in that, In the one-to-one mode, the synchronization instruction is generated by performing a second type of synchronization operation, including: The operation of selecting a first entity as the source entity and selecting a second entity as the target entity is accepted. Receive the operation to perform process formula comparison, compare the process formula set in the source entity and the process formula set in the target entity, and output the comparison result; Receive an operation to select at least one target process formulation from the process formulation set of the source entity based on the comparison result; and Receive synchronously triggered operations.

8. The method for synchronizing process formulation according to claim 6, characterized in that, In the one-to-one mode, the synchronization instruction is generated by performing a second type of synchronization operation, including: Receive the operation of selecting the first and second entities to be compared; Receive the operation to perform process formula comparison, compare the process formula set in the first entity with the process formula set in the second entity, and output the comparison result; The operation of selecting at least one target process formulation based on the comparison result is received, wherein the operation of selecting at least one target process formulation includes selecting at least one first target process formulation from the process formulation set of the first entity, and / or selecting at least one second target process formulation from the process formulation set of the second entity; and Receive synchronization trigger operation: If at least one first target process recipe is selected, initiate a recipe synchronization transaction with the first entity as the source entity and the second entity as the target entity; if at least one second target process recipe is selected, initiate a recipe synchronization transaction with the second entity as the source entity and the first entity as the target entity.

9. The method for synchronizing process formulations according to claim 7 or 8, characterized in that, The comparison results include the same class, different class, and similar class, wherein the same class, different class, and similar class are displayed by different visual identifiers; the visual identifiers include at least one of the following: color mark, icon symbol, font style, and background highlight.

10. The method for synchronizing process formulation according to claim 1, characterized in that, The step of backing up the existing process formula with synchronization conflicts to the formula allocation management device includes: backing up the existing process formula with synchronization conflicts and its associated materials and sub-formulas to the formula allocation management device.

11. The method for synchronizing process formulation according to claim 1, characterized in that, The formula distribution management device is pre-configured with an access control policy to control the access permissions of different users to perform synchronous operations and related operations.

12. A process formulation synchronization device, characterized in that, The process formula synchronization device, applied to a formula dispensing and management equipment, includes: The transaction initiation module is configured to initiate a recipe synchronization transaction in response to a synchronization command; the recipe synchronization transaction specifies a source entity, at least one target entity, and at least one target process recipe to be synchronized, wherein the source entity and each of the target entities are each one of the recipe allocation management device and the semiconductor process equipment, and the recipe allocation management device and the semiconductor process equipment are located on the same local area network. A secure synchronization module is configured to perform a synchronization operation in response to the recipe synchronization transaction; wherein, for each target entity, the following is performed: checking whether there is an existing process recipe in the target entity that conflicts with the synchronization of the at least one target process recipe; if so, backing up the existing process recipe with the synchronization conflict to the recipe allocation management device as the original process recipe only when a synchronization conflict is detected; synchronizing the at least one target process recipe to the target entity; and The log management module is configured to generate a synchronization log associated with the recipe synchronization transaction. The synchronization log records backup information of the original process recipe and its association with the corresponding target entity. The rollback control module is configured to perform a rollback operation based on the synchronization log, restoring the target entity to its pre-synchronization state. The rollback operation includes: responding to a rollback operation instruction, determining at least one target entity to be rolled back and its corresponding original process recipe based on the association between the synchronization log and each target entity and its original process recipe; restoring the determined original process recipe to the corresponding target entity; and, when the recipe synchronization transaction specifies two or more target entities, the rollback operation can select to restore the original process recipe for all or part of the target entities, and can select to restore all or part of the original process recipe under the selected target entities.

13. The process formulation synchronization device according to claim 12, characterized in that, Also includes: The synchronization retry management module is configured to monitor the synchronization result of the at least one target entity, generate a synchronization status report that distinguishes between successful and failed target entities, and, in response to a retry instruction for a failed target entity, re-execute the synchronization operation only for the failed target entity.

14. The process formulation synchronization device according to claim 12, characterized in that, Also includes: The rollback control module is configured to provide a global rollback option if any target entity fails to synchronize after the synchronization operation is completed, and in response to the confirmation instruction for the option, perform a rollback operation on all target entities based on the synchronization log to restore all target entities to their pre-synchronization state.

15. The process formulation synchronization device according to claim 12, characterized in that, Also includes: The rollback control module is configured to monitor the response status of each target entity in real time during the execution of the synchronization operation, and automatically trigger a global rollback when any target entity returns a synchronization failure or timeout, undoing all executed synchronization operations, and restoring all target entities to their pre-synchronization state based on the synchronization log.

16. A formula dispensing and management device, characterized in that, include: processor; as well as Memory, which stores computer programs; The computer program is executed by the processor to perform the process recipe synchronization method as described in any one of claims 1 to 11.

17. A process formulation synchronization system, characterized in that, include: The formula dispensing management device as described in claim 16; as well as At least one semiconductor process device is communicatively connected to the recipe dispensing management device.

18. A computer-readable storage medium, characterized in that, The system stores program instructions that, when executed, perform the process formulation synchronization method as described in any one of claims 1 to 11.

19. A computer program product, characterized in that, It includes a computer program that, when executed by a processor, implements the process formulation synchronization method as described in any one of claims 1 to 11.

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