Efficient equipment control network architecture

Abstract

The invention discloses a high-efficiency equipment control network architecture, and relates to the technical field of network architectures, the high-efficiency equipment control network architecture comprises a PC host, a high-speed Ethernet, a lower-layer controller, bottom-layer equipment and a PLC, the equipment control network architecture takes the PC host as a basis, the high-speed Ethernet is connected with the lower-layer controller, the lower-layer controller and the bottom-layer equipment are controlled through RD232 and RS485 buses, and the PLC is connected with the high-speed Ethernet. The system has the advantages that the bottom layer equipment is provided with the independent power supply management module, the power supply mode is automatically adjusted according to the working state of the equipment so as to achieve the effects of saving energy and prolonging the service life of the equipment, and the system stability can be enhanced through independent network and signal transmission modes between the bottom layer equipment and the upper layer PLC; the system maintenance time and the maintenance cost are reduced, and the lower-layer controller has the data processing capability, so that the received data can be quickly analyzed and calculated, and the processed data can be accurately sent to the target equipment.

Description

Technical Field

[0001] This invention relates to the field of network architecture technology, specifically to a high-efficiency device control network architecture. Background Technology

[0002] In today's semiconductor manufacturing industry, the complexity and precision of equipment are constantly increasing. Semiconductor equipment contains a variety of key components, such as various precise sensors, which are responsible for monitoring various physical and chemical parameters inside the equipment in real time, providing basic data support for the stable operation of the equipment. Pumps play a key role in fluid transportation in the semiconductor manufacturing process, and their performance and stability directly affect the efficiency and quality of production. MFC (mass flow controller) precisely controls the flow rate of gas or liquid, ensuring the precise proportion of various substances in the semiconductor production process.

[0003] Currently, most existing equipment control network architectures are relatively independent and decentralized. Different devices often use their own dedicated control systems and communication protocols. This results in multiple incompatible control networks existing in a semiconductor manufacturing scenario. For example, some traditional sensors may use 4-20mA analog signal transmission to connect to an independent analog acquisition module and then transmit the data to a host computer for processing via a specific serial communication. Meanwhile, some advanced digital sensors may use bus protocols such as Modbus to communicate directly with the controller. The pump control system may use another set of dedicated frequency converter control equipment and network, and interact with other parts to a limited extent through a specific industrial Ethernet protocol.

[0004] To address the challenges of different controllers on semiconductor devices and ensure system stability by employing various control methods, thereby reducing the probability of malfunctions and lowering maintenance time and costs, we propose an efficient device control network architecture. Summary of the Invention

[0005] The purpose of this invention is to provide an efficient device control network architecture.

[0006] To address the problems mentioned in the background art, the present invention provides the following technical solution: an efficient device control network architecture, including a PC host, a high-speed Ethernet, a lower-level controller, lower-level devices, and a PLC. The device control network architecture is based on the PC host, connecting the high-speed Ethernet to the lower-level controller. The lower-level controller and the lower-level devices are controlled via RD232 and RS485 buses. The PLC collects input signals and controls output signals through the D-NET network bus, DI, DO, AI, and AO. The high-speed Ethernet connects to ENDPOINT PM1, ENDPOINT PM2, a remote gateway, PM1 PLC, PM1 GATEWAY, PM2 PLC, PM2 GATEWAY, TM PLC, DEVI CENET, and TM GATEWAY. The remote gateway includes PM CHILER, PM DRY PUMP, PM SOURCE RF, PM BIAS RF, and a UPS. The PM1 GATEWAY includes TEMP CONTROLLER, SOURCE RF MATCH, BIAS RF MATCH, TURBO, and PENDULUM. VALVE, the TMGATEWAY includes VCE, ALIGNER, TM DRY PUMP, and TM MFC.

[0007] As a further aspect of the present invention: the lower-level controller includes ENDPOINT PM1 and ENDPOINT PM2, and the lower-level controller has data caching and preprocessing functions, and a large amount of data can be actively pre-screened and sorted when passing through the lower-level controller.

[0008] As a further aspect of the present invention: the PLC adopts a distributed control architecture, and the control nodes under the PLC have independent decision-making capabilities. When network communication is interrupted, the control nodes under the PLC are used to maintain the basic operation of local equipment.

[0009] As a further aspect of the present invention: the underlying device is equipped with an independent power management module, which automatically adjusts the power supply mode according to the working status of the device itself, and the PLC has 16 ports.

[0010] As a further aspect of the present invention: the high-speed Ethernet adopts switching technology and flow control mechanism, and dynamically allocates bandwidth according to data priority and real-time requirements. The lower-level controller has data processing and forwarding functions, which can optimize data transmission efficiency. The lower-level controller supports remote configuration and upgrades, which facilitates system maintenance and functional expansion.

[0011] As a further aspect of the present invention: the underlying device interacts with the lower-level controller through corresponding sensors and actuators, the sensors and actuators having self-diagnosis and self-calibration functions, and the PM GATEWAY's PORT3 connects to the PM DRY PUMP and PM CH I LLER devices for centralized management and control of the connected devices.

[0012] As a further aspect of the present invention: the device control network architecture has fault diagnosis and early warning functions, which can promptly detect and handle system faults. The fault diagnosis and early warning functions are based on machine learning algorithms to analyze and predict the operating data of the device and detect potential fault hazards in advance. The ports PORT1 to PORT3 of the MF GATEWAY are connected to relevant devices to ensure data transmission and control between specific devices within a fixed time range.

[0013] As a further aspect of the present invention: the REMOTE GATEWAY is used to enable access and control of remote devices and to extend the control range of the system. The connections between the various ports and devices in the network architecture follow communication standards and specifications.

[0014] As a further aspect of the present invention: the DEVI CENET network in the architecture is used to connect the PLC and the terminal device, and the ETHERNET SW is used to connect various network nodes to achieve fast data exchange.

[0015] Compared with the prior art, the beneficial effects of the present invention by adopting the above technical solution are as follows:

[0016] 1. This invention features an independent power management module in the underlying devices, which automatically adjusts the power supply mode according to the device's operating status to achieve energy saving and extend the device's lifespan. The independent network and signal transmission methods between each underlying device and the upper-level PLC enhance system stability, reduce system maintenance time and costs, and the lower-level controller has data processing capabilities, enabling rapid analysis and calculation of received data and accurate transmission of the processed data to the target device. This significantly optimizes data transmission efficiency and improves the overall network architecture's performance.

[0017] 2. This invention enables communication between the lower-level controller and the underlying devices via RS232 and RS485, two mature and reliable bus control methods. This ensures accurate transmission of control commands and timely feedback of device status. Furthermore, the PLC, utilizing the D-NET network bus and a variety of interfaces such as DI, DO, AI, and AO, achieves comprehensive acquisition of input signals and precise control of output signals. This provides a solid guarantee for the stable operation and precise regulation of the entire system. By setting up multiple lower-level controllers, each with data caching and preprocessing functions, the burden of backend data processing is significantly reduced, and the data processing efficiency and response speed of the entire system are greatly improved, laying a solid data foundation for real-time control and precise monitoring. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the system control architecture in an embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the D-net and Ethernet network distribution in an embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of the gateway bus distribution in an embodiment of the present invention. Detailed Implementation

[0021] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that these descriptions are for the purpose of aiding understanding the present invention, but do not constitute a limitation thereof. Furthermore, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0022] This invention discloses a high-efficiency device control network architecture, including a PC host, a high-speed Ethernet network, lower-level controllers, lower-level devices, and a PLC. The device control network architecture is based on the PC host, connecting the high-speed Ethernet network to the lower-level controllers. The lower-level controllers and lower-level devices are controlled via RD232 and RS485 buses. The PLC acquires input signals and controls output signals through the D-NET network bus, DI, DO, AI, and AO. The high-speed Ethernet network connects to ENDPOINT PM1, ENDPOINT PM2, a remote gateway, PM1 PLC, PM1GATEWAY, PM2 PLC, PM2GATEWAY, TM PLC, DEVI CENET, and TMGATEWAY. The remote gateway includes PM CHILLER, PM DRY PUMP, PM SOURCE RF, PM BIAS RF, and a UPS. PM1GATEWAY includes TEMP CONTROLLER, SOURCE RF MATCH, BIAS RF MATCH, TURBO, and PENDULUMVALVE. TMGATEWAY includes VCE, ALIGNER, and TM DRY. PUMP and TM MFC.

[0023] In one embodiment of the present invention: the lower-level controller includes ENDPOINT PM1 and ENDPOINT PM2. The lower-level controller has data caching and preprocessing functions, and a large amount of data can be actively pre-screened and sorted when passing through the lower-level controller.

[0024] In one embodiment of the present invention: the PLC adopts a distributed control architecture, and the control nodes under the PLC have independent autonomous decision-making capabilities. In the extreme case of sudden network communication interruption, the control nodes under the PLC with intelligent decision-making capabilities can also respond quickly and maintain the basic operation of local equipment based on their own judgment and preset strategies.

[0025] In one embodiment of the present invention: the underlying device is equipped with an independent power management module. The power management module can sensitively sense the real-time working status of the device itself, such as the load level and the length of the running time, and automatically adjust the power supply mode according to these dynamically changing status information. Through this intelligent power supply management method, not only can a significant energy saving effect of more than 20% be achieved, but the service life of the device can also be effectively extended by more than 30%. The PLC has 16 ports.

[0026] In one embodiment of the present invention, high-speed Ethernet employs advanced switching technology and a sophisticated flow control mechanism. During data transmission, it can dynamically and rationally allocate bandwidth based on data priority and the urgency of real-time requirements. This intelligent bandwidth management ensures priority transmission and real-time processing of critical data, guaranteeing the system's responsiveness and control accuracy. Simultaneously, the lower-level controller possesses powerful data processing capabilities, enabling rapid analysis and calculation of received data. It also boasts efficient data forwarding capabilities, accurately sending processed data to the target device or system, significantly optimizing data transmission efficiency and enhancing the overall system performance. Furthermore, the lower-level controller supports remote configuration and upgrades, making system maintenance more convenient and efficient. The expansion of new functions and performance optimization no longer require on-site operation, greatly reducing maintenance and time costs, and providing strong support for continuous system optimization and stable operation.

[0027] In one embodiment of the present invention: the underlying device interacts with the lower-level controller through corresponding sensors and actuators. The sensors and actuators have self-diagnosis and self-calibration functions. PM GATEWAY's PORT3 connects to PM DRYPUMP and PM CHILLER devices, and performs centralized management and control operations on the connected devices.

[0028] In one embodiment of the present invention: the equipment control network architecture is equipped with advanced fault diagnosis and early warning functions. This function is based on powerful machine learning algorithms, which can perform in-depth analysis and accurate prediction of the real-time operating data of the equipment. Through learning and pattern recognition of a large amount of data, potential fault hazards can be discovered in advance, and accurate early warning information can be issued in a timely manner so that relevant personnel can quickly take effective preventive and repair measures to avoid the occurrence or expansion of faults and minimize the impact of equipment failures on production. At the same time, the ports of MF GATEWAY PORT1 to PORT3 have established stable connections with relevant equipment, which can ensure stable, high-speed and error-free data transmission and precise control command execution between specific equipment under specific working conditions (such as high temperature, high humidity, strong electromagnetic interference and other complex environments), ensuring that the system can still maintain good operating status under various harsh working conditions.

[0029] In one embodiment of the present invention: REMOTE GATEWAY is used to enable access and control of remote devices. Operators can monitor and operate the devices in real time from a location far from the device site, and extend the control range of the system. The connections between various ports and devices in the network architecture follow communication standards and specifications.

[0030] In one embodiment of the present invention: the DEVICENET network in the architecture is used to connect the PLC and the terminal device, and the ETHERNET SW is used to connect various network nodes. The ETHERNET SW is the traffic hub in the network, used to connect various network nodes, realize fast data exchange and routing forwarding, and ensure that the data can reach the target node in the shortest time, so as to realize fast data exchange.

[0031] Example 1

[0032] In a semiconductor manufacturing plant, a highly efficient equipment control network architecture is used. The underlying equipment, such as wafer processing equipment and gas delivery systems, is equipped with independent power management modules. During peak production periods, when the equipment is running at full load, the power management modules provide sufficient and stable power according to the high load status of the equipment. During off-peak production periods or when the equipment is in standby, the power supply mode is automatically adjusted to reduce energy consumption. This energy-saving mode reduces the plant's power consumption by 25% and extends the service life of the underlying equipment by about 35%.

[0033] The lower-level controller and the underlying equipment are controlled via RS232 and RS485 buses, ensuring accurate transmission and real-time feedback of control commands for parameters such as temperature and pressure during wafer processing, with errors controlled within a very small range. The PLC, through the D-NET network bus and rich interfaces, realizes comprehensive acquisition of input signals from various sensors and precise control of actuator output signals, which increases the product yield from 90% to 95%.

[0034] By setting up multiple lower-level controllers with data caching and preprocessing functions, the burden on the backend server can be greatly reduced when processing large amounts of production data, improving data processing efficiency by 40% and reducing system response time from 500ms to 200ms, thus significantly improving production efficiency.

[0035] As attached Figure 1 -Appendix Figure 3 As shown, the entire system is based on a PC and connects to the lower-level controller via high-speed Ethernet, enabling real-time control and monitoring. The lower-level controller and the underlying devices are controlled via RD232 and RS485 buses. The PLC collects input signals and controls output signals through the D-NET network bus, DI, DO, AI, and AO, enhancing the stability of the network architecture and reducing system maintenance time and costs.

[0036] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and these variations still fall within the protection scope of the present invention.

[0037] In the description of this specification, the references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0038] The above description is merely an example and illustration of the present invention. Any modifications, additions, or substitutions made by those skilled in the art to the specific embodiments described, as long as they do not deviate from the invention or exceed the scope defined in the claims, shall fall within the protection scope of the present invention.

[0039] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A high-efficiency device control network architecture, comprising a PC host, high-speed Ethernet, lower-level controllers, lower-level devices, and a PLC, characterized in that: The device control network architecture is based on a PC host, a high-speed Ethernet is connected with a lower controller, the lower controller controls a bottom layer device through a RS232 and a RS485 bus, the PLC collects input signals and controls output signals through a D-NET network bus, a DI, a DO, an AI and an AO, and the high-speed Ethernet is connected with an ENDPOINT PM1, an ENDPOINT PM2, a remote gateway, a PM1 PLC, a PM1 GATEWAY, a PM2 PLC, a PM2 GATEWAY, a TM PLC, a DEVICENET and a TM GATEWAY.

2. The high-efficiency device control network architecture of claim 1, wherein: The lower controller includes the ENDPOINT PM1 and the ENDPOINT PM2, the lower controller has a data cache and preprocessing function, and a large amount of data can be actively screened and arranged when passing through the lower controller.

3. The efficient device control network architecture of claim 1, wherein: The PLC adopts a distributed control architecture, the control node under the PLC has a separate autonomous decision-making ability, and when the network communication is interrupted, the control node under the PLC is used to maintain the basic operation of the local device.

4. The high-efficiency device control network architecture of claim 1, wherein: The bottom layer device is equipped with an independent power management module, which automatically adjusts the power supply mode according to the working state of the device itself, and the PLC has 16 ports.

5. The efficient device control network architecture of claim 1, wherein: The high-speed Ethernet adopts a switching technology and a flow control mechanism, dynamically allocates bandwidth according to the priority and real-time requirements of data, the lower controller has a data processing and forwarding function, and can optimize the data transmission efficiency, the lower controller supports remote configuration and upgrading, and is convenient for system maintenance and function expansion.

6. The efficient device control network architecture of claim 1, wherein: The bottom layer device interacts with the lower controller through corresponding sensors and actuators, the sensors and actuators have self-diagnosis and self-calibration functions, the PORT3 of the PM GATEWAY is connected with a PM DRY PUMP and a PM CHILLER device, and the connected devices are centrally managed and controlled.

7. The efficient device control network architecture of claim 1, wherein: The device control network architecture has a fault diagnosis and early warning function, can discover and handle system faults in time, the fault diagnosis and early warning function is based on a machine learning algorithm, analyzes and predicts the running data of the device, and discovers potential hidden troubles in advance, the PORT1 to PORT3 of the MF GATEWAY are connected with related devices, and data transmission and control between specific devices are guaranteed within a fixed time range.

8. The high-efficiency device control network architecture of claim 1, wherein: The REMOTE GATEWAY is used to realize access and control of remote devices and expand the control range of the system, and the connection between each port and device in the network architecture follows the communication standards and specifications.

9. The efficient device control network architecture of claim 1, wherein: The DEVICENET network in the architecture is used to connect the PLC and the terminal device, and the ETHERNET SW is used to connect each network node to realize fast exchange of data.

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