A high-pressure pneumatic control system with precise pressure regulation

Abstract

The application provides a high-pressure pneumatic control system for accurately regulating pressure, and relates to the technical field of high-pressure pneumatic control. The system comprises a gas pressure regulating assembly, a temperature detection unit, a controller, a first gas pressure sensor, and a first valve body. The temperature detection unit is used to obtain the first gas temperature when gas is delivered to the inlet of an execution assembly. The gas cylinder is in communication with a gas supply assembly and the execution assembly. The controller is in communication connection with the first gas pressure sensor, the temperature detection unit, the first valve body, and the gas supply assembly. The controller is configured to determine a compensated control target value according to the first gas temperature and a preset target pressure, and to perform closed-loop regulation on the gas pressure in the gas cylinder with the control target value. When the gas pressure in the gas cylinder reaches the control target value, the first valve body is opened to deliver gas to the execution assembly. The system realizes real-time dynamic compensation for gas temperature changes, and fundamentally improves the high-pressure control accuracy.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of high-pressure pneumatic control, and particularly relates to a high-pressure pneumatic control system for precise pressure regulation. BACKGROUND

[0002] In high-temperature packaging processes such as silver sintering and copper sintering, the accuracy of the pressure provided by the pneumatic control system directly determines the packaging quality. Existing high-pressure pneumatic control technology usually adopts a control logic based on a fixed gas pressure threshold, for example, a fixed target pressure value is set for the gas cylinder, and when the gas pressure in the cylinder reaches the value, the gas is delivered to the execution component. However, such a scheme has a fundamental defect in the high-temperature process scenario:

[0003] It cannot overcome the systematic interference of temperature changes on gas pressure. According to the ideal gas state equation, gas pressure is directly related to temperature. In the high-temperature sintering process, the environment and process heat will significantly heat the pipeline and gas medium, causing the gas temperature to rise, and thus the pressure to change unexpectedly. If a fixed pressure threshold is still used as the control target, the actual gas pressure delivered to the high-temperature execution component and reaching thermal equilibrium will deviate significantly from the target value required by the process. This problem is particularly prominent in 5-20 MPa high-pressure control that pursues ±0.5 MPa or even higher accuracy, and is a key bottleneck that restricts existing technology from meeting high-end packaging needs. SUMMARY

[0004] In view of the above-mentioned defects or deficiencies in the prior art, a high-pressure pneumatic control system for precise pressure regulation is provided, comprising: a gas supply component, a gas pressure regulating component, an execution component, and a controller.

[0005] The gas pressure regulating component comprises a gas cylinder, a first gas pressure sensor, a first valve body, and a temperature detection unit; the temperature detection unit is used to obtain a first gas temperature when the gas is delivered to the inlet of the execution component.

[0006] The gas cylinder is in communication with the gas supply component and the execution component, respectively.

[0007] The controller is in communication connection with the first gas pressure sensor, the temperature detection unit, the first valve body, and the gas supply component, respectively.

[0008] The controller is configured to:

[0009] determine a compensated control target value according to the first gas temperature and a preset target pressure, and perform closed-loop regulation on the gas pressure in the gas cylinder with the control target value;

[0010] When the gas pressure in the gas cylinder reaches the control target value, the first valve body is controlled to open to deliver gas to the execution component.

[0011] According to the technical scheme provided in the application, the controller is specifically configured to:

[0012] According to the first gas temperature, the preset target pressure, and a preset expected stable temperature, the compensated control target value is determined in the following manner:

[0013] So that the gas with the first gas temperature delivered to the execution assembly at the control target value has a pressure equal to the preset target pressure when the expected stable temperature is reached in the execution assembly.

[0014] Preferably, the preset expected stable temperature is lower than the first gas temperature.

[0015] According to the technical scheme provided in the application, the temperature detection unit is arranged at the outlet of the gas storage cylinder or the starting end of the gas supply pipeline, and is used to detect the initial gas temperature of the gas.

[0016] The temperature detection unit is further configured to:

[0017] Based on the initial gas temperature, the ambient temperature parameter, and the heat transfer characteristics of the pipeline between the gas pressure adjusting assembly and the execution assembly, a predicted temperature of the gas delivered to the inlet of the execution assembly is calculated in real time, and the predicted temperature is taken as the first gas temperature.

[0018] According to the technical scheme provided in the application, the execution assembly comprises a gas pressure controller and an execution device.

[0019] The gas pressure controller is connected with the gas pressure adjusting assembly, and comprises a second gas pressure sensor used to detect the pipeline pressure at the inlet thereof.

[0020] The gas pressure controller is configured to take the preset target pressure as a set value, and perform closed-loop feedback control according to the detection value of the second gas pressure sensor, so as to finely adjust the gas pressure delivered to the execution device.

[0021] According to the technical scheme provided in the application, the execution assembly further comprises a second temperature sensor used to detect the current actual temperature inside the execution device.

[0022] The controller is further configured to take the current actual temperature detected by the second temperature sensor as a preset expected stable temperature, and use the preset expected stable temperature to determine the compensated control target value.

[0023] According to the technical scheme provided in the application, the gas pressure controller further comprises a third valve body, a fourth valve body, and a local control unit.

[0024] The third valve body connects the air pressure adjusting assembly and the executing device;

[0025] The fourth valve body connects the executing device and the outside world;

[0026] The local control unit is configured to:

[0027] When the pipeline pressure is lower than the preset target pressure, the third valve body is controlled to be opened and the fourth valve body is controlled to be closed to charge the executing device;

[0028] When the pipeline pressure is higher than the preset target pressure, the third valve body is controlled to be closed and the fourth valve body is controlled to be opened to discharge the executing device.

[0029] According to the technical scheme provided in the application, the controller is further configured to:

[0030] The pressure difference between the two ends of the first valve body when the first valve body is opened is calculated to obtain a physical property parameter of the delivered gas to obtain a throttling temperature change compensation value;

[0031] The controller is specifically configured to:

[0032] If the throttling temperature change compensation value is less than or equal to a first preset threshold value, a compensated control target value is determined according to the first gas temperature and a preset target pressure;

[0033] If the throttling temperature change compensation value is greater than the first preset threshold value, the first gas temperature is corrected by the throttling temperature change compensation value to obtain a second gas temperature; and a compensated control target value is determined according to the second gas temperature and a preset target pressure.

[0034] According to the technical scheme provided in the application, the controller is specifically configured to:

[0035] The pressure difference between the two ends of the first valve body when the first valve body is opened is calculated in real time based on the pressure of the gas storage cylinder detected by the first air pressure sensor, the pressure detected by the second air pressure sensor at the inlet end of the air pressure controller, and a flow resistance model of the pipeline between the first valve body and the air pressure controller;

[0036] The Joule-Thomson coefficient of a specific inert gas used in a silver sintering or copper sintering process corresponding to the current process setting is called from a preset gas property database as the physical property parameter;

[0037] Based on the pressure difference and the physical property parameter, a basic temperature change value is obtained, and then a throttling temperature change compensation value is obtained.

[0038] According to the technical scheme provided in the application, the controller is specifically configured to:

[0039] obtain a current process stage identifier and a process stability index;

[0040] select a target weight configuration strategy from a plurality of preset weight configuration strategies based on the current process stage identifier;

[0041] dynamically adjust a real-time fusion weight within a weight range determined by the target weight configuration strategy according to the process stability index;

[0042] obtain the choke temperature compensation value by weighting and fusing the base temperature change value and a historical optimization compensation value based on the real-time fusion weight;

[0043] wherein the historical optimization compensation value is obtained from a choke temperature compensation value that minimizes a pressure control deviation at a similar process stage of a historical process cycle as the current process stage; and the pressure control deviation is a difference between an actual stable pressure value inside the execution device and the preset target pressure after a complete process action cycle ends.

[0044] According to the technical scheme provided in the application, the gas supply assembly comprises a first gas source device and a pressure boosting device;

[0045] The first gas source device is configured to provide inert gas;

[0046] The pressure boosting device is in communication with the first gas source device and the gas pressure adjusting assembly, and is configured to increase the gas pressure of the inert gas and deliver the inert gas to the gas pressure adjusting assembly;

[0047] The gas pressure adjusting assembly further comprises a safety valve assembly and a first filter;

[0048] The safety valve assembly is installed on a pipeline through which the gas pressure adjusting assembly and the gas supply assembly are in communication;

[0049] The first filter is installed on the pipeline through which the gas pressure adjusting assembly and the gas supply assembly are in communication, and is configured to filter impurities in the gas.

[0050] Compared with the prior art, the application has the beneficial effects that real-time dynamic compensation of gas temperature change is realized, high-pressure control accuracy is fundamentally improved, and a real-time temperature variable is introduced in the control logic. Specifically, the system obtains the real-time temperature (first gas temperature) of the conveying gas at the inlet of the execution assembly through a temperature detection unit, and a controller dynamically calculates a compensated control target value according to the preset target pressure. The value is a dynamic value adjusted according to the real-time temperature, rather than a fixed threshold. The pressure of the gas cylinder is adjusted and the conveying is judged by taking the dynamic value as the target, which means that the system has compensated the pressure deviation caused by the difference between the current gas temperature and the expected state before the gas conveying action occurs. Therefore, even if the temperature of the gas changes after entering the high-temperature execution assembly, the final stable pressure can still accurately meet the preset target. This fundamentally eliminates the main error source of temperature interference, makes it possible to realize stable control with a precision of ±0.5 MPa or even higher under high pressure of 5-20 MPa, and meets the harsh requirements of high-end processes such as silver / copper sintering. BRIEF DESCRIPTION OF DRAWINGS

[0051] Other features, objects and advantages of the application will become more apparent from the following detailed description of non-limiting embodiments made with reference to the accompanying drawings:

[0052] Figure 1 The structural schematic diagram of the high-pressure pneumatic control system for precise regulation and control of pressure provided by the application;

[0053] Figure 2 The schematic diagram of the gas supply assembly provided by the application;

[0054] Figure 3 The schematic diagram of the gas pressure regulating assembly provided by the application;

[0055] Figure 4 The schematic diagram of the execution assembly provided by the application;

[0056] The text annotations in the figure represent:

[0057] 1, gas supply assembly; 2, gas pressure regulating assembly; 3, execution assembly; 4, gas cylinder; 5, first gas pressure sensor; 6, first valve body; 7, first filter; 8, second valve body; 9, first safety valve; 10, gas pressure controller; 11, execution device; 12, third valve body; 13, fourth valve body; 14, second gas pressure sensor; 15, first gas source device; 16, pressure increasing device; 17, first gas source; 18, fifth valve body; 19, second safety valve; 20, third gas pressure sensor; 21, second filter; 22, second gas source device; 23, second gas source; 24, sixth valve body; 25, third safety valve; 26, fourth gas pressure sensor; 27, third filter. DETAILED DESCRIPTION

[0058] The application will be further described below in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely intended for the purpose of interpretation of the application and are not intended to limit the application. In addition, it should be noted that only parts related to the application are shown in the drawings for the purpose of description.

[0059] It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings and embodiments.

[0060] Embodiment 1

[0061] As mentioned in the background art, the present application proposes a high-pressure pneumatic control system for precise pressure regulation, as shown in Figures 1-3 which comprises a gas supply assembly 1, a gas pressure regulating assembly 2, an execution assembly 3 and a controller.

[0062] The gas pressure regulating assembly 2 comprises a gas cylinder 4, a first gas pressure sensor 5, a first valve body 6 and a temperature detection unit; the temperature detection unit is used to obtain a first gas temperature when the gas is delivered to the inlet of the execution assembly 3.

[0063] The gas cylinder 4 is in communication with the gas supply assembly 1 and the execution assembly 3, respectively.

[0064] The controller is in communication connection with the first gas pressure sensor 5, the temperature detection unit, the first valve body 6 and the gas supply assembly 1, respectively.

[0065] The controller is configured to:

[0066] determine a compensated control target value according to the first gas temperature and a preset target pressure, and perform closed-loop regulation on the gas pressure in the gas cylinder 4 with the control target value;

[0067] When the gas pressure in the gas cylinder 4 reaches the control target value, the first valve body 6 is controlled to be opened to deliver gas to the execution assembly 3.

[0068] Specifically, the system contains four core parts in hardware: a gas supply assembly 1, a gas pressure regulating assembly 2, an execution assembly 3 and a central controller. The gas supply assembly 1 is responsible for providing high-pressure inert gas medium, such as high-purity nitrogen, and its output end is connected to the gas pressure regulating assembly 2 through a high-pressure pipeline. The gas pressure regulating assembly 2 is the key part of implementing pressure pre-control, which contains a gas storage cylinder 4, a first gas pressure sensor 5, a first valve body 6 and a temperature detection unit. The gas storage cylinder 4 serves as a gas buffer and pressure stabilizing container, its gas inlet is connected to the gas supply assembly 1, and its gas outlet is connected to the execution assembly 3 through the first valve body 6. The first gas pressure sensor 5 is directly installed on the gas storage cylinder 4, which is used to measure the pressure of the gas in the cylinder in real time, and the measured value is defined as the current gas pressure P_current. The temperature detection unit is a functional unit, and its core task is to provide the key parameter of "the first gas temperature T_current when the gas is delivered to the inlet of the execution assembly 3". The controller, as the brain of the system, is usually implemented by a programmable logic controller, an industrial computer or a special control circuit. It establishes a bidirectional communication connection with the first gas pressure sensor 5, the temperature detection unit, the first valve body 6 and the execution mechanism (such as the boost pump start-stop switch and the regulating valve) in the gas supply assembly 1 through analog signal lines, digital I / O or field bus network, so as to collect all sensor data and send all control commands.

[0069] The working flow of the system starts from the pre-setting of the process parameters, i.e. setting a clear target working pressure P_target in the controller according to the requirements of the packaging process. After the controller is started, it enters the continuous running state. The core control cycle is as follows: first, the controller reads the real-time updated first gas temperature T_current from the temperature detection unit. Then, based on the T_current and the pre-set P_target, it determines a dynamic and compensated control target value, denoted as P_compensated, through internal operation. The specific algorithm for determining P_compensated is an important part of the present application, and the core idea is to make the control target value adaptively adjusted with temperature changes. Then, the controller enters the pressure regulation loop of the gas cylinder 4. It continuously compares the P_current read by the first gas pressure sensor 5 with the calculated P_compensated. If P_current is lower than P_compensated, the controller instructs the gas supply assembly 1 to start or intensify work, filling gas into the gas cylinder 4, so that P_current rises. If P_current reaches or exceeds P_compensated, the controller instructs the gas supply assembly 1 to stop working. This closed-loop regulation process makes the gas pressure in the gas cylinder 4 accurately maintained near the dynamic set point P_compensated. Finally, it is the gas delivery determination and execution step. When the controller confirms that the gas pressure in the gas cylinder 4 has stabilized at P_compensated, it issues an opening instruction to the first valve body 6. The first valve body 6 opens, delivering gas with a pressure exactly equal to P_compensated from the gas cylinder 4 to the downstream execution assembly 3. After delivery is completed or according to the process logic, the controller closes the first valve body 6.

[0070] The technical effect of this scheme is that it first introduces the temperature of the gas before delivery as a decisive feedforward variable into the core logic of high-pressure pneumatic control. Its technical principle is rooted in the proportional relationship between pressure and temperature revealed by the ideal gas state equation. In a high-temperature process environment, the pipeline and gas will be heated. If a fixed pressure value is still used as the delivery reference, the actual pressure of the gas will deviate significantly from the expectation after it enters the high-temperature environment and reaches thermal equilibrium. This scheme actively compensates for the pressure drift that will be caused by subsequent temperature changes of the gas through the logic chain of sensing temperature → dynamically correcting pressure target → delivering according to the corrected target. This makes the final pressure of the system output gas after experiencing actual process temperature changes closer to the pre-set P_target, thereby fundamentally solving the core problem of temperature interference affecting the accuracy of high-pressure pneumatic control, and providing a new system architecture foundation for achieving a control accuracy of ±0.5 MPa or even higher.

[0071] In a preferred embodiment, the controller is specifically configured to:

[0072] According to the first gas temperature, the preset target pressure and a preset expected stable temperature, the compensated control target value is determined in the following way:

[0073] So that the gas with the first gas temperature delivered to the execution assembly 3 at the control target value has a pressure equal to the preset target pressure when it reaches the expected stable temperature inside the execution assembly 3.

[0074] Wherein the preset expected stable temperature is lower than the first gas temperature.

[0075] In this embodiment, the configuration of the controller is more specific. In addition to the preset target pressure P_target, the user or the system also needs to preset an expected stable temperature T_ref. T_ref represents the stable temperature value that the gas is expected to reach and maintain inside the execution assembly 3 (for example, inside the sintering cavity). This is usually a parameter set according to process knowledge, for example, for a specific sintering process, it can be set as the process set temperature or the known cavity steady-state environment temperature. The algorithm of the controller is designed to achieve a specific physical intention. The way it determines P_compensated aims to achieve the following goal: when the gas with pressure P_compensated and temperature T_current is delivered into the execution assembly 3, as the gas exchanges heat with the environment inside the execution assembly 3, its temperature will gradually change from T_current to T_ref; when the temperature change process is completed, the pressure of the gas is expected to be exactly equal to the initially set target value P_target. Limiting the expected stable temperature to be lower than the first gas temperature clarifies the typical application scenario that this embodiment is aimed at: the gas is heated in the delivery pipeline (for example, by environmental heat radiation), the temperature rises to T_current, and after entering the execution assembly 3, it will be cooled to a relatively lower, controllable process stable temperature T_ref.

[0076] To achieve the above goal, the internal operation of the controller is based on a simplified physical model. Assuming that the volume of the gas remains approximately constant (or the change is negligible) from delivery to the process of reaching stability, according to the Charles Law (the pressure of a certain mass of gas is proportional to the thermodynamic temperature when the volume is constant), the core relationship can be derived: P_compensated / T_current = P_target / T_ref. Therefore, when calculating P_compensated, the controller essentially performs the operation of the following principle: P_compensated = P_target × (T_current / T_ref). The temperature here needs to be calculated in thermodynamic temperature (Kelvin scale) to ensure accuracy. The controller obtains T_current in real time, reads P_target and T_ref from memory, and performs the above operation, and the calculation result is the dynamic P_compensated.

[0077] The technical effect of this embodiment is that it promotes temperature compensation from a vague adjustment to an accurate and quantifiable physical calculation. The technical principle directly applies the basic law of thermodynamics, making the compensation process have clear scientific basis and predictability. By explicitly introducing the concept of expected stable temperature and defining the compensation target as reaching P_target when the temperature reaches T_ref, the directionality and purpose of system compensation become extremely clear. This ensures that no matter how T_current fluctuates, the control target P_compensated of the system is automatically calibrated to eventually converge at the process point (T_ref, P_target). This method is particularly suitable for processes with relatively stable and known T_ref, and it makes dynamic compensation theoretically complete, providing a reliable algorithm core for ultra-high precision control and avoiding the over-adjustment or under-adjustment problems that may be caused by empirical compensation.

[0078] In a preferred embodiment, the temperature detection unit is arranged at the outlet of the gas cylinder 4 or the starting end of the gas supply pipeline to detect the initial gas temperature of the gas;

[0079] The temperature detection unit is further configured to:

[0080] Based on the initial gas temperature, the environmental temperature parameter, and the heat transfer characteristics of the pipeline between the gas pressure regulating assembly 2 and the execution assembly 3, the predicted temperature of the gas delivered to the inlet of the execution assembly 3 is calculated in real time, and the predicted temperature is taken as the first gas temperature.

[0081] In this embodiment, the temperature detection unit adopts an architecture of indirect measurement plus model calculation. Its hardware part is a temperature sensor, called initial temperature sensor, which is set at the outlet of the gas cylinder 4 or the beginning of the gas supply pipeline, for directly measuring the initial gas temperature T_initial. This location is usually mild, far away from the high temperature zone of the execution end and the vibration source, which is conducive to the long-term stable operation and maintenance of the sensor. However, T_initial is not equal to the temperature of the gas after flowing through the tens of centimeters or even meters of pipeline to reach the inlet of the execution assembly 3 (i.e. the required T_current). In order to obtain T_current, the temperature detection unit (the calculation function of which can be integrated into the unit itself, or can be realized by the main controller) also contains a software calculation module.

[0082] The working process of the calculation module is as follows: first, continuously collect the T_initial signal sent by the initial temperature sensor. At the same time, the system needs to obtain the environmental temperature parameter, which can be obtained through the environmental temperature sensor installed in the equipment cabinet or near the pipeline. In addition, the system also needs to preset or learn the heat transfer characteristic parameters of the pipeline between the gas pressure regulating assembly 2 and the execution assembly 3. These parameters can be calculated through the thermal conductivity coefficient, pipe diameter, length, thickness of thermal insulation layer, surface radiation coefficient and other physical parameters of the pipeline material, or an equivalent thermal resistance-thermal capacity model or temperature drop coefficient can be fitted through previous experiments (such as installing temperature sensors at both ends of the pipeline for calibration). Subsequently, the calculation module takes T_initial as the starting point, takes the environmental temperature as the reference, and applies the heat transfer model of the pipeline for real-time simulation calculation. For example, in a simplified steady-state model, the pipeline temperature drop can be considered to be proportional to the pipeline length and the environmental temperature difference; in a more detailed dynamic model, it may involve solving distributed parameter heat transfer differential equations. The output of the calculation module is the estimated value of the temperature of the gas after flowing through the entire pipeline to reach the inlet of the execution assembly 3 under the current flow rate, current initial temperature and current environmental temperature, which is the predicted temperature. Finally, the system directly assigns this predicted temperature as the defined first gas temperature T_current, which is provided to the core compensation algorithm of the controller for use.

[0083] This embodiment greatly improves the engineering robustness and reliability of the system while ensuring the accuracy of temperature information. The technical principle is to use heat transfer theory to compensate for the limitations of hardware installation location. By placing the fragile precision temperature sensor in a friendly environment, the effects of high temperature, pollution and mechanical stress on its service life and reading stability are avoided. At the same time, by modeling and compensating for the known, relatively fixed pipeline heat loss through software algorithms, the temperature of the gas reaching the key node can be calculated with acceptable accuracy. This method effectively balances the relationship between measurement accuracy, hardware cost and system reliability. It is particularly suitable for industrial scenarios where the space at the inlet of the execution assembly 3 is narrow, the temperature is extremely high, and it is not convenient to install and maintain sensors. Although the model calculation will introduce some estimation error, for many applications, this estimation value with clear physical meaning is much more reliable and consistent in the long term than the direct measurement value struggling in harsh environments. Therefore, this scheme provides a solid, implementable and easily industrialized implementation path for the temperature compensation idea of the present application.

[0084] In a preferred embodiment, the execution assembly 3 comprises a gas pressure controller 10 and an execution device 11;

[0085] The gas pressure controller 10 is connected to the gas pressure regulating assembly 2; and comprises a second gas pressure sensor 14 for detecting the pipeline pressure at its inlet end;

[0086] The gas pressure controller 10 is configured to use the preset target pressure as a set value, and perform closed-loop feedback control according to the detection value of the second gas pressure sensor 14, to fine-tune the gas pressure delivered to the execution device 11.

[0087] As shown in Figure 4 The execution assembly 3 is composed of two main parts: one is the gas pressure controller 10, and the other is the execution device 11. The gas pressure controller 10 is a relatively independent closed-loop control subsystem, and its inlet is connected to the outlet of the first valve body 6 of the gas pressure regulating assembly 2 through a high-pressure pipeline. On this inlet pipeline, the second gas pressure sensor 14 is integrated and installed, and its only function is to accurately detect the real-time pressure of the gas delivered from upstream, which is called pipeline pressure P_line. The execution device 11 is the component that finally performs the process action, such as a linear cylinder, a booster cylinder or a pressure diaphragm box for applying sintering pressure. Its gas inlet is directly connected to the outlet of the gas pressure controller 10. The gas pressure controller 10 itself has complete feedback control capability, and its core set value is the ultimate goal of the entire system - the preset target pressure P_target.

[0088] The working process of the gas pressure controller 10 is a typical closed-loop negative feedback regulation. It continuously samples P_line measured by the second gas pressure sensor 14 at a high frequency and compares the measurement with the internally stored P_target to calculate the pressure deviation e = P_target - P_line. According to the size and positive or negative of the deviation e, the gas pressure controller 10 quickly adjusts its actuator (for example, a high-speed proportional valve or a pair of precise on-off valves) through its internal drive circuit to change the gas flow through it. Specifically, when P_line is lower than P_target (e > 0), the controller adjusts its internal valve to increase the gas flow from the upstream to the actuator 11 to inflate the actuator 11 to increase the pressure. When P_line is higher than P_target (e < 0), the controller adjusts the valve to allow some gas in the actuator 11 to be discharged to the outside (or low pressure side) to deflate and reduce the pressure. The adjustment process is very fast, aiming to eliminate any small pressure fluctuations and steady-state errors.

[0089] The technical effect of this scheme is to build a hierarchical and clear division of labor high-precision pressure control system. The technical principle is the master-slave control or feedforward-feedback composite control in control theory. In this system, the front stage (gas pressure regulating assembly 2) undertakes the role of coarse adjustment or feedforward compensation, which is mainly responsible for overcoming large-scale and slow-changing systematic disturbances, i.e. the theoretical pressure drift caused by temperature changes, and pre-setting the gas pressure to a compensated value P_compensated close to the target. The rear stage (gas pressure controller 10 of the actuator assembly 3) defined in this embodiment undertakes the role of fine adjustment or feedback fine adjustment. It is located at the final end of the entire gas passage and is adjacent to the actuator 11, so it can perceive the most real and direct pressure state (P_line). It uses local high-speed closed-loop to specifically suppress the residual fluctuations, valve switching impact, and pressure changes caused by internal volume changes of the actuator 11, etc. High-frequency disturbances brought by the front stage delivery. This architecture decouples complex model calculation (temperature compensation) from high-speed real-time adjustment, making the system have both scientific predictability to deal with major disturbances (temperature) and agile correction ability to deal with random disturbances. The final effect is that the actual working pressure inside the actuator 11 is firmly and smoothly locked at the preset target pressure P_target, thereby providing reliable protection for processes such as silver sintering and copper sintering, which have extremely high requirements for the absolute value and stability of the pressure.

[0090] In a preferred embodiment, the actuator assembly 3 further comprises a second temperature sensor for detecting the current actual temperature inside the actuator 11.

[0091] The controller is further configured to use the current actual temperature detected by the second temperature sensor as a preset desired stable temperature for determining the compensated control target value.

[0092] In this embodiment, the execution assembly 3 is additionally provided with a second temperature sensor in addition to the air pressure controller 10 and the execution device 11. The second temperature sensor is directly arranged inside the execution device 11 or in a position closely thermally coupled thereto, such as being installed inside the cylinder wall, the piston end face or the pressure chamber of the execution device 11. Its core function is to directly detect the current actual temperature of the gas inside the execution device 11. This measured temperature value reflects the real thermal state of the gas in the final working position.

[0093] In the working process of the system, the controller (which can be the main controller or a special module cooperating with the air pressure controller 10) will continuously or periodically read the temperature signal sent by the second temperature sensor. In the controller, the preset desired stable temperature T_ref, which is originally a static or empirical parameter for compensation calculation, is now dynamically replaced by the current actual temperature detected by the second temperature sensor in real time. That is to say, the controller no longer relies on a pre-set fixed temperature value that may deviate from the actual situation, but uses the real temperature inside the execution device 11 at the moment as the reference value of the stable temperature that the gas is expected to reach in the compensation algorithm.

[0094] In implementation, whenever a new round of pressure compensation calculation is needed (such as before each time the gas cylinder 4 is filled, or at the beginning of a process cycle), the controller will obtain the latest reading of the second temperature sensor. Then, when performing the calculation using the above-described compensation principle, this reading is directly used as the desired stable temperature in the formula. This makes the generation of the compensation target value P_compensated always dynamically adjusted based on the current actual thermal environment inside the execution device 11.

[0095] The technical effect of the scheme is to realize online closed-loop correction of the temperature compensation reference, thereby significantly improving the adaptability and compensation accuracy of the system to process environment changes. The technical principle is that it partially converts an open-loop, preset model-based feedforward compensation into an adaptive feedforward-feedback composite compensation with real-time feedback. The second temperature sensor provides the most direct process temperature information, eliminating the problem of inaccurate expected stable temperature setting caused by environmental fluctuations, different device preheating states, process heat release changes, and other factors. The controller uses this feedback information to real-time correct the key input of the compensation algorithm, so that the generated control target value always matches the current most real process thermal state. In this way, whether the internal temperature of the execution device 11 is naturally raised due to the process progress or fluctuates due to unexpected interference, the system's pressure pre-compensation can track and make accurate adjustments in real time, ensuring that the final pressure control is not affected by internal temperature drift, and the effectiveness of compensation is improved to a new level, especially suitable for long and variable process.

[0096] In a preferred embodiment, the gas pressure controller 10 further comprises a third valve body 12, a fourth valve body 13, and a local control unit;

[0097] The third valve body 12 connects the gas pressure regulating assembly 2 and the execution device 11;

[0098] The fourth valve body 13 connects the execution device 11 and the outside world;

[0099] The local control unit is configured to:

[0100] When the pipeline pressure is lower than the preset target pressure, control the third valve body 12 to open and the fourth valve body 13 to close to charge the execution device 11;

[0101] When the pipeline pressure is higher than the preset target pressure, control the third valve body 12 to close and the fourth valve body 13 to open to discharge the execution device 11.

[0102] Specifically, the gas pressure controller 10 is mainly composed of three key components in hardware: the third valve body 12, the fourth valve body 13 and the local control unit. The third valve body 12 is connected between the inlet of the gas pressure controller 10 (i.e. the pipeline from the gas pressure regulating assembly 2) and the gas inlet of the execution device 11, acting as a precision gas inlet valve. The fourth valve body 13 is connected between the gas outlet of the execution device 11 (or a dedicated gas outlet) and the external environment (or a low-pressure loop), acting as a precision gas outlet valve. Both of the valve bodies preferably adopt proportional electromagnetic valves or high-speed on-off valves, which can accept electrical signal control to realize continuous or high-frequency on-off regulation of the opening degree. The local control unit is an embedded controller, such as a microprocessor or a special control circuit, which is connected with the drive coils of the third valve body 12 and the fourth valve body 13 and the second gas pressure sensor 14 through signal lines.

[0103] The working logic is strictly defined by the program embedded in the local control unit, which is a typical double-valve interlocking closed-loop control. The local control unit continuously and rapidly samples the pipeline pressure P_line measured by the second gas pressure sensor 14. It compares this real-time pressure value with the preset target pressure P_target and outputs control instructions for the two valve bodies according to the comparison results, with the specific rules as follows: when the detected pipeline pressure P_line is lower than the preset target pressure P_target, the local control unit determines that the execution device 11 needs to be supplemented with gas to raise the pressure. At this time, it outputs control signals to open the third valve body 12 (gas inlet valve) while ensuring that the fourth valve body 13 (gas outlet valve) is closed. In this way, the high-pressure gas in the upstream flows into the execution device 11 through the open third valve body 12, causing the internal pressure to rise. Conversely, when the detected pipeline pressure P_line is higher than the preset target pressure P_target, the local control unit determines that part of the gas in the execution device 11 needs to be released to reduce the pressure. At this time, it outputs control signals to close the third valve body 12 while opening the fourth valve body 13. The excess gas in the execution device 11 is discharged to the outside through the open fourth valve body 13, causing the internal pressure to drop. The local control unit can dynamically adjust the opening degree or switching frequency of the valve bodies according to the size and trend of the pressure deviation, to achieve rapid, smooth and undamped pressure regulation.

[0104] The technical effect of the scheme is to provide a specific, reliable and rapid execution end pressure fine adjustment means. The technical principle is to use a special and local closed loop control circuit, taking the final load pressure as the direct feedback object, and adjusting in two directions through a pair of control direction opposite valves. The symmetric structure design of one-in-one-out makes the system have a direct and efficient correction path no matter facing pressure deviation or pressure deviation, avoiding the asymmetric problem of single valve adjustment. The local control unit is responsible for this high-speed and small-range closed loop, which can cooperate with the main controller responsible for global compensation and coarse adjustment to optimize the system architecture. The whole logic is clear and explicit, and the two valve bodies work together under the management of the local control unit, like a precise pressure balance, constantly adjusting the gas flow in and out, and stably keeping the pressure in the execution device 11 at the target set value, thereby effectively eliminating the influence of small fluctuations of the front stage pressure supply and load changes, which is the key hardware guarantee to realize pressure stability.

[0105] In a preferred embodiment, the controller is further configured to:

[0106] calculate the pressure difference between the two ends of the first valve body 6 when it is opened, obtain the physical property parameters of the delivered gas, and obtain the throttling temperature compensation value;

[0107] The controller is specifically configured to:

[0108] If the throttling temperature compensation value is less than or equal to a first preset threshold, the compensated control target value is determined according to the first gas temperature and the preset target pressure;

[0109] If the throttling temperature compensation value is greater than the first preset threshold, the second gas temperature is obtained by correcting the first gas temperature with the throttling temperature compensation value; and the compensated control target value is determined according to the second gas temperature and the preset target pressure.

[0110] In this embodiment, the algorithm library of the controller is further expanded. In addition to performing main compensation based on the gas temperature, it also configures a special program module to handle the throttling temperature effect. The work of this module is divided into several steps. The first step is to calculate the pressure difference between the inlet side and the outlet side of the first valve body 6 when it is opened, i.e. the pressure difference. At the same time, the specific physical property parameters of the delivered gas are obtained, which describe the characteristics of the temperature change of the gas with pressure when throttling and expanding. Based on the calculated pressure difference and the obtained gas physical property parameters, an estimated value representing the temperature change of the gas caused by the throttling effect is obtained through table lookup or formula calculation, which is called the throttling temperature compensation value. This value can be positive or negative, representing the temperature increase or decrease of the gas after passing through the first valve body 6.

[0111] Subsequently, the controller activates an intelligent judgment and shunt execution logic according to the size of this compensation value. The controller is internally provided with a first preset threshold value, which represents a negligible small temperature change effect. In implementation, the controller compares the calculated throttling temperature change compensation value with the first preset threshold value. If the comparison result shows that the absolute value of the throttling temperature change compensation value is less than or equal to the threshold value, it means that the current throttling effect is very weak, and the temperature change it may bring can be ignored. In this case, the controller decides not to activate this special compensation, but directly uses the original compensation logic, i.e., directly determines the final compensation target value for controlling the gas cylinder 4 according to the first gas temperature obtained from the temperature detection unit and the preset target pressure.

[0112] On the contrary, if the comparison result shows that the absolute value of the throttling temperature change compensation value is greater than the first preset threshold value, it means that the throttling effect is significant and its influence cannot be ignored. At this time, the controller activates the special compensation process. It first uses this throttling temperature change compensation value to correct the first gas temperature obtained from the temperature detection unit. Specifically, the compensation value (regarded as a temperature change amount) is added to the first gas temperature to obtain a new estimated temperature value of the gas after throttling, which is defined as the second gas temperature. Then, the controller no longer uses the original first gas temperature, but uses the corrected second gas temperature to execute the core compensation algorithm in combination with the preset target pressure, so as to determine a new and more accurate compensation target value.

[0113] The technical effect of this scheme lies in that it finely compensates for a dynamic thermodynamic effect, Joule-Thomson effect, which is often ignored in high-pressure gas control, and pushes the control precision to the physical limit. The technical principle is that when high-pressure gas is throttled and expanded through a valve or other narrow channel, its internal energy will change, causing the temperature of the gas to change instantaneously, which is independent of the heat transfer process of the environment. If not considered, the first gas temperature used in the main compensation algorithm is actually not the real temperature of the gas before entering the execution device 11. By adding a sub-compensation loop for this dynamic effect in the feedforward link, the temperature reference input into the main compensation algorithm is pre-corrected. Through threshold judgment, the system only activates this computationally intensive or specific property data requiring compensation when necessary, balancing precision and efficiency. This makes the entire temperature compensation model more complete, considering not only the heat exchange of the gas with the environment in the pipeline, but also its own adiabatic change when passing through the key valve, thereby ensuring the ultimate accuracy of the source data (gas temperature) of the pressure set value compensation, which is crucial for applications that pursue ultimate precision under ultra-high pressure.

[0114] In a preferred embodiment, the controller is specifically configured to:

[0115] Based on the pressure of the gas cylinder 4 detected by the first pressure sensor 5, the pressure detected by the second pressure sensor 14 at the inlet of the pressure controller 10, and the flow resistance model of the pipeline between the first valve body 6 and the pressure controller 10, the pressure difference between the two ends of the first valve body 6 when the first valve body 6 is opened is calculated in real time;

[0116] From the preset gas property database, the Joule-Thomson coefficient of the specific inert gas used in the silver sintering or copper sintering process corresponding to the current process setting is called as the physical property parameter;

[0117] Based on the pressure difference and the physical property parameter, a basic temperature change value is obtained, and then a throttling temperature change compensation value is obtained.

[0118] First, regarding the calculation of the pressure difference between the two ends of the first valve body 6 when the first valve body 6 is opened, it does not depend on the installation of an additional pair of pressure sensors on both sides of the first valve body 6, but uses two pressure monitoring points already existing in the system: one is the first pressure sensor 5 on the gas cylinder 4 of the pressure adjusting assembly 2, and the other is the second pressure sensor 14 on the pressure controller 10 at the inlet of the execution assembly 3. When the first valve body 6 is opened, the pressure measured by the first pressure sensor 5 can approximately represent the valve inlet pressure, and the pressure measured by the second pressure sensor 14 can represent the pressure downstream of the valve outlet. However, due to the flow resistance of the pipeline, there is still a pressure loss between the measurement point of the second pressure sensor 14 and the valve outlet. Therefore, a flow resistance model of the pipeline between the first valve body 6 and the pressure controller 10 is established inside the controller. This model describes the relationship between the pressure drop caused by this section of pipeline and the flow rate at a certain flow rate. In implementation, the controller synchronously reads the pressure values of the first pressure sensor 5 and the second pressure sensor 14, and combines the current estimated gas flow information (which can be estimated according to the valve opening degree, time, etc. Experience data), and uses this flow resistance model to calculate the pipeline pressure drop between the first valve body 6 outlet and the second pressure sensor 14 point in real time. Finally, by subtracting the value of the second pressure sensor 14 from the value of the first pressure sensor 5 and then subtracting the calculated pipeline pressure drop, the real pressure difference between the two ends of the first valve body 6 when the first valve body 6 is opened can be accurately estimated.

[0119] Secondly, regarding the acquisition of the physical property parameters of the delivered gas, the embodiment deeply binds it with specific industrial application scenarios. The system internally maintains a preset gas property database. This database not only stores the general physical parameters of different types of gases, but more importantly, it associates the gas parameters with process settings. For example, in silver sintering or copper sintering processes, nitrogen or argon of specific purity levels is used as the protection and pressure medium. When the operator or the upper computer sets the current process as silver sintering, the controller will automatically call the pre-stored key physical property parameter of the specific inert gas, the Joule-Thomson coefficient, which is specifically used for this process from the database. This coefficient directly quantifies the sensitivity of the temperature of this type of gas to the change in pressure during throttling. In this way, instead of acquiring a general and possibly inaccurate parameter, the most accurate parameter for the current specific process and specific gas is obtained.

[0120] Finally, regarding the obtaining of the basic temperature change value and then the throttling temperature change compensation value, the implementation process is as follows: the controller combines the accurate pressure difference calculated in the previous step with the specific Joule-Thomson coefficient called from the database, and through simple multiplication operation (or table interpolation), the change amount of the gas temperature only due to the throttling effect under theoretical conditions can be calculated, which is the basic temperature change value. This basic temperature change value has a clear physical meaning and high accuracy. On this basis, the system can also further correct or filter this basic value according to historical data, valve characteristic curves or more complex models, and finally generate a throttling temperature change compensation value for subsequent judgment and compensation.

[0121] The technical effect of this scheme lies in that it realizes accurate modeling and compensation of complex dynamic effects in a cost-effective, highly integrated and highly customized way. By reusing existing pressure sensors and combining flow resistance models for soft measurement, high-precision acquisition of key pressure difference parameters is achieved with almost no increase in hardware cost. By establishing a process-gas-property parameter linkage database, the knowledge and experimental data of process experts are solidified into the control system, so that the compensation algorithm can understand the specific application scenario it is in, call the most relevant physical model, and realize the leap from general control to specialized and accurate control. The combination of the two makes the throttling effect compensation a mature module that can run efficiently and reliably in actual industrial equipment, greatly enhancing the performance and competitiveness of the entire system under extreme working conditions.

[0122] In a preferred embodiment, the controller is specifically configured to:

[0123] acquire a current process stage identifier and a process stability indicator;

[0124] select a target weight configuration strategy from a plurality of preset weight configuration strategies based on the current process stage identifier;

[0125] dynamically adjust a real-time fusion weight within a weight range determined by the target weight configuration strategy according to the process stability index;

[0126] weight the base temperature variation value and the historical optimization compensation value based on the real-time fusion weight to obtain the choke temperature variation compensation value;

[0127] wherein the historical optimization compensation value is obtained from a choke temperature variation compensation value that minimizes a pressure control deviation at a similar process stage to the current process stage in a historical process cycle; and the pressure control deviation is a difference between an actual stable pressure value inside the execution device 11 and the preset target pressure after a complete process action cycle.

[0128] Specifically, in the first step, process context information is obtained. The controller receives a current process stage identifier from an upper process management system (such as MES) or a human-machine interface of the device. This identifier is key information representing the process progress, for example, in silver sintering process, it can be defined as preheating stage, heating stage, constant temperature sintering stage and cooling stage. Each stage has different thermodynamic characteristics and gas flow states. At the same time, the controller calculates a process stability index in real time. The index is a quantitative evaluation value, which can be obtained in various ways: for example, the standard deviation of the second gas pressure sensor 14 reading or the second temperature sensor reading in a recent period of time is used to measure the fluctuation degree of pressure or temperature; or the frequency of valve action is monitored to evaluate the adjustment activity of the system. The higher the stability index, the more stable the system runs, and the smaller the instantaneous noise.

[0129] In the second step, the weight strategy is selected based on the process stage. The controller internally pre-stores a weight configuration strategy library, in which a set of initial base temperature variation weight and historical optimization compensation value weight range is defined for each known process stage (such as preheating, heating, constant temperature, cooling). For example, in the heating stage with large changes, the strategy may be set to trust the real-time physical model more (i.e. give the base temperature variation value a higher initial weight); while in the stable constant temperature sintering stage, the strategy may be set to rely more on historical experience data (i.e. give the historical optimization compensation value a higher initial weight). The controller matches and selects the corresponding target weight configuration strategy from the strategy library according to the received current process stage identifier.

[0130] Third step, dynamically adjust the fusion weight according to real-time stability. Within the weight range given by the selected target weight configuration strategy, the controller fine-tunes the weight according to the real-time calculated process stability index. Specifically, when the stability index is good (e.g., small fluctuations), the controller considers that the calculation conditions of the current physical model are ideal, and the calculation results are reliable, so it will appropriately increase the proportion of the real-time fusion weight given to the basic temperature change value within the allowed range; on the contrary, when the stability index is poor (e.g., large fluctuations), the controller considers that there are more disturbances in the field, and the immediate calculation results of the physical model may be disturbed, so it will tend to trust the more smooth and robust historical optimization compensation value, thereby adjusting the weight proportion. This real-time fusion weight is a dynamically floating value within a pre-set framework.

[0131] Fourth step, perform intelligent weighted fusion calculation. The controller performs the final synthesis calculation. It applies the real-time fusion weight determined in the previous step (e.g., 70% trust in the basic temperature change value, 30% trust in the historical optimization compensation value) to two data sources: one is the current basic temperature change value calculated in real time according to the pressure difference and gas properties; the other is the historical optimization compensation value retrieved from the experience library. The so-called historical optimization compensation value is obtained by analyzing a large number of successful process cycle data in the past through machine learning technology. The system records the different throttle temperature change compensation values tried at each process stage and associates them with the final pressure control deviation of the batch. The pressure control deviation refers to the difference between the actual stable pressure in the device 11 after the process and the target pressure. Through analysis, the system can find out which specific compensation value at a certain process stage (e.g., constant temperature sintering stage) most often leads to the smallest final pressure deviation, and this value is refined and stored as the historical optimization compensation value for that stage. Finally, the controller adds the weighted basic temperature change value and the weighted historical optimization compensation value to obtain the final output, highly optimized throttle temperature change compensation value.

[0132] In a preferred embodiment, the gas supply assembly 1 comprises a first gas source device 15 and a pressure boosting device 16;

[0133] The first gas source device 15 is used to provide inert gas;

[0134] The pressure boosting device 16 communicates with the first gas source device 15 and the gas pressure regulating assembly 2, and is used to increase the gas pressure of the inert gas and deliver it to the gas pressure regulating assembly 2;

[0135] The gas pressure regulating assembly 2 further comprises a safety valve assembly and a first filter 7;

[0136] The safety valve assembly is installed on the pipeline through which the gas pressure regulating assembly 2 communicates with the gas supply assembly 1;

[0137] The first filter 7 is installed on the pipeline through which the gas pressure regulating assembly 2 communicates with the gas supply assembly 1, for filtering impurities in the gas.

[0138] Specifically, the first gas source device 15 is a first gas source 17 (e.g. a high-pressure nitrogen cylinder) for storing inert gas. On the connecting pipeline between the first gas source 17 and the pressure boosting device 16, a fifth valve body 18, a second filter 21, a third pressure sensor 20 and a second safety valve 19 are installed in sequence. The fifth valve body 18, as a manual or pneumatic main stop valve, controls the on-off of the pipeline from the first gas source 17 to the downstream. The second filter 21 is used to perform primary filtering on the raw inert gas from the first gas source 17, removing larger particulate impurities. The third pressure sensor 20 is used to monitor the supply pressure at the outlet of the first gas source 17. The second safety valve 19, as a safety device of this branch, automatically releases pressure when the outlet pipeline pressure of the first gas source 17 is abnormally high. The inlet of the pressure boosting device 16 (e.g. a pressure boosting pump) communicates with the outlet pipeline of the first gas source device 15, for receiving and boosting the pressure of the inert gas. In order to drive the pressure boosting device 16, the gas supply assembly 1 can also optionally include a second gas source device 22. The second gas source device 22 includes a second gas source 23 (e.g. a factory gas source) for providing compressed air, and a sixth valve body 24, a third filter 27, a fourth pressure sensor 26 and a third safety valve 25 connected between the second gas source 23 and the driving port of the pressure boosting device 16, for controlling, filtering, monitoring the driving air and ensuring the safety of its pipeline. The outlet of the pressure boosting device 16 is responsible for delivering the boosted high-pressure inert gas to the gas pressure regulating assembly 2.

[0139] The safety valve assembly of the gas pressure regulating assembly 2 includes: the safety valve assembly is installed on the inlet pipeline of the gas pressure regulating assembly 2, and is specifically composed of the second valve body 8 and the first safety valve 9 in parallel. The second valve body 8 (e.g. an electromagnetic relief valve) can actively open and release pressure at a set pressure according to an electrical signal; the first safety valve 9 (e.g. a mechanical safety valve) serves as the final safety guarantee and automatically opens and releases pressure when the pipeline pressure exceeds its mechanical set value. The first filter 7 is also installed on the inlet pipeline, usually downstream of the safety valve assembly, for performing final fine filtering on the high-pressure inert gas about to enter the gas cylinder 4, ensuring the cleanliness of the gas.

[0140] The embodiment builds a high-quality high-pressure gas supply and pretreatment system with complete security level, comprehensive monitoring, and guaranteed cleanliness, and provides a solid and reliable physical foundation for high-precision control algorithms. By setting safety valves (second safety valve 19, second valve body 8, and first safety valve 9) at the first gas source device 15 and the inlet of the gas pressure regulating assembly 2, respectively, and arranging pressure sensors (third gas pressure sensor 20, fourth gas pressure sensor 26) at key nodes, multi-point safety protection and state monitoring of the gas supply link are achieved, greatly improving the overall safety of the system. The hierarchical arrangement of the first filter 7 and the second filter 21 constitutes a two-stage purification system from the gas source to the use, fully meeting the stringent requirements of silver / copper sintering and other processes for the ultra-cleanliness of the gas medium. In combination with the core control algorithm, a high-end pneumatic control system solution is formed, which is controllable throughout the link from gas source preparation, safety processing, precise pressure regulation to final execution.

[0141] The above description is only the preferred embodiment of the present application and the explanation of the applied technical principles. Those skilled in the art should understand that the scope of the application involved in the present application is not limited to the technical solutions formed by the specific combination of the above technical features, and should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the above features are replaced with the technical features disclosed in the present application (but not limited to) with similar functions to form a technical solution.

Claims

1. A high pressure pneumatic control system for precise pressure regulation, characterized in that, The application relates to a gas pressure control system. The system comprises a gas supply assembly (1), a gas pressure regulating assembly (2), an execution assembly (3) and a controller. The gas pressure regulating assembly (2) comprises a gas cylinder (4), a first gas pressure sensor (5), a first valve body (6) and a temperature detection unit, wherein the temperature detection unit is used to obtain a first gas temperature when gas is delivered to an inlet of the execution assembly (3). The gas cylinder (4) is in communication with the gas supply assembly (1) and the execution assembly (3) respectively. The controller is in communication connection with the first gas pressure sensor (5), the temperature detection unit, the first valve body (6) and the gas supply assembly (1) respectively. The controller is configured to: determine a compensated control target value according to the first gas temperature and a preset target pressure, and perform closed-loop regulation on the gas pressure in the gas cylinder (4) according to the control target value; when the gas pressure in the gas cylinder (4) reaches the control target value, control the first valve body (6) to open to deliver gas to the execution assembly (3). The execution assembly (3) comprises a gas pressure controller (10) and an execution device (11). The gas pressure controller (10) is connected with the gas pressure regulating assembly (2) and comprises a second gas pressure sensor (14) used to detect the pipeline pressure at the inlet of the gas pressure controller (10). The gas pressure controller (10) is configured to perform closed-loop feedback control according to the detection value of the second gas pressure sensor (14) with the preset target pressure as a set value, so as to finely adjust the gas pressure delivered to the execution device (11). The controller is further configured to: calculate the pressure difference between the two ends of the first valve body (6) when the first valve body (6) is opened, obtain the physical property parameter of the delivered gas, and obtain a throttling temperature change compensation value; The controller is specifically configured to: if the throttling temperature change compensation value is less than or equal to a first preset threshold, determine a compensated control target value according to the first gas temperature and a preset target pressure; if the throttling temperature change compensation value is greater than the first preset threshold, correct the first gas temperature by the throttling temperature change compensation value to obtain a second gas temperature, and determine a compensated control target value according to the second gas temperature and a preset target pressure; The controller is specifically configured to: based on the pressure of the gas cylinder (4) detected by the first gas pressure sensor (5), the pressure at the inlet of the gas pressure controller (10) detected by the second gas pressure sensor (14) and the flow resistance model of the pipeline between the first valve body (6) and the gas pressure controller (10), the pressure difference between the two ends of the first valve body (6) when the first valve body (6) is opened is calculated in real time; from a preset gas property database, the Joule-Thomson coefficient of a specific inert gas used in silver sintering or copper sintering process corresponding to the current process setting is called as the physical property parameter; based on the pressure difference and the physical property parameter, a basic temperature change value is obtained, and then a throttling temperature change compensation value is obtained.

2. The precision regulated pressure high pressure pneumatic control system of claim 1, wherein, The controller is specifically configured to: determine the compensated control target value according to the first gas temperature, the preset target pressure and a preset expected stable temperature in the following manner: So that the gas with the first gas temperature delivered to the execution component (3) at the control target value reaches the expected stable temperature in the execution component (3) when the pressure thereof is equal to the preset target pressure; Wherein, the expected stable temperature is lower than the first gas temperature.

3. The precision regulated pressure high pressure pneumatic control system of claim 1, wherein, The temperature detection unit is arranged at the outlet of the gas cylinder (4) or the starting end of the gas supply pipeline, and is used for detecting the initial gas temperature of the gas; The temperature detection unit is further configured to: Based on the initial gas temperature, the ambient temperature parameter, and the heat transfer characteristics of the pipeline between the gas pressure adjusting component (2) and the execution component (3), the predicted temperature of the gas delivered to the inlet of the execution component (3) is calculated in real time, and the predicted temperature is taken as the first gas temperature.

4. The precision regulated pressure high pressure pneumatic control system of claim 1, wherein, The execution component (3) further comprises a second temperature sensor for detecting the current actual temperature inside the execution device (11); The controller is further configured to: take the current actual temperature detected by the second temperature sensor as the preset expected stable temperature, and use it to determine the compensated control target value.

5. The precision regulated pressure high pressure pneumatic control system of claim 1, wherein, The gas pressure controller (10) further comprises a third valve body (12), a fourth valve body (13), and a local control unit; The third valve body (12) is connected between the gas pressure adjusting component (2) and the execution device (11); The fourth valve body (13) is connected between the execution device (11) and the outside world; The local control unit is configured to: When the pipeline pressure is lower than the preset target pressure, control the third valve body (12) to open and the fourth valve body (13) to close to charge the execution device (11); When the pipeline pressure is higher than the preset target pressure, control the third valve body (12) to close and the fourth valve body (13) to open to discharge the execution device (11).

6. The precision regulated pressure high pressure pneumatic control system of claim 1, wherein, The controller is specifically configured to: Obtain a current process phase identifier and a process stability index; Based on the current process phase identifier, select a target weight configuration strategy from a plurality of preset weight configuration strategies; Dynamically adjust a real-time fusion weight within a weight range determined by the target weight configuration strategy according to the process stability index; Based on the real-time fusion weight, weight and fuse the basic temperature change value and a historical optimization compensation value to obtain the throttling temperature change compensation value; Wherein, the historical optimization compensation value is obtained by a throttling temperature change compensation value that minimizes a pressure control deviation in a similar process phase to the current process phase in a historical process cycle; the pressure control deviation is the difference between the actual stable pressure value inside the execution device (11) and the preset target pressure after a complete process action cycle.

7. The precision regulated pressure high pressure pneumatic control system of claim 1, wherein, The gas supply component (1) comprises a first gas source device (15) and a pressure boosting device (16); The first gas source device (15) is used for providing inert gas; The pressure boosting device (16) is in communication with the first gas source device (15) and the gas pressure adjusting component (2), and is used for increasing the gas pressure of the inert gas and delivering the inert gas to the gas pressure adjusting component (2); The air pressure regulating assembly (2) further comprises a safety valve assembly and a first filter (7); The safety valve assembly is installed on a pipeline through which the air pressure regulating assembly (2) communicates with the air supply assembly (1); The first filter (7) is installed on a pipeline through which the air pressure regulating assembly (2) communicates with the air supply assembly (1) and used for filtering impurities in the air.

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