P (VDF-TrFE)-based homologous copolymer high-sensitivity-driving integrated device and preparation method thereof

Abstract

The invention discloses a P (VDF-TrFE)-based homologous copolymer high sensitivity and driving integrated device and a preparation method thereof, the sensitivity and driving integrated device comprises an electrostriction layer, a piezoelectric sensing layer and a glue layer, and the glue layer integrates the piezoelectric sensing layer and the electrostriction layer; the piezoelectric sensing layer is consistent with the electrostriction layer in width and smaller than the electrostriction layer in length. When a driving input voltage is applied to the electrostriction layer, an electrostriction layer material is excited by an electric field to deform, deformation of the electrostriction layer induces a piezoelectric sensing layer material to deform, bound charges are generated on the surface of the piezoelectric sensing layer material, and the bound charges are converted through a signal collector to obtain a piezoelectric output voltage signal. Therefore, sensing monitoring of deformation of the electrostriction layer is realized. The problem of inconsistency of traditional separated sensing and driving information is effectively avoided, and the sensing, driving and control stability of the soft robot can be greatly improved.

Description

Technical Field

[0001] This invention belongs to the field of intelligent driving and sensing technology, specifically relating to a P(VDF-TrFE)-based homologous copolymer high-sensitivity driving integrated device, and also relating to a method for preparing the P(VDF-TrFE)-based homologous copolymer high-sensitivity driving integrated device. Background Technology

[0002] In recent years, soft robots have shown broad application prospects in fields such as medical rehabilitation, industrial manufacturing, and service robots due to their ability to adapt to various unstructured environments and their safer interaction with humans. Currently, although soft robot actuation technology has made significant progress, it still faces challenges such as difficulty in increasing actuated displacement and low sensor-actuator coordination efficiency, preventing truly intelligent and precise operation in complex environments. Especially in improving the performance of soft robot actuation, achieving intelligent actuation is a crucial approach. To obtain high sensor-actuator coordination efficiency and actuation stability, the integrated sensor-actuator structure within the soft robot needs a precise match of "strong actuation - high perception" to achieve intelligent actuation.

[0003] As a class of flexible smart materials integrating actuation and sensing, P(VDF-TrFE)-based polymers often employ a single P(VDF-TrFE) series material to simultaneously perform both sensing and actuation functions, or use combinations of dissimilar materials, resulting in performance constraints (such as the inability to simultaneously achieve optimal sensing sensitivity and actuation strain). In designing and fabricating integrated sensing and actuation devices, by selecting a high-voltage P(VDF-TrFE) thin film as the functional material for the piezoelectric sensing layer and a high-electrostrain P(VDF-TrFE-CFE) thin film as the functional material for the electrostrictive layer, compared to actuation based on the inverse piezoelectric effect of a single P(VDF-TrFE), the electrostrictive effect of P(VDF-TrFE-CFE) offers advantages such as large actuation displacement and output force, high strain sensitivity, and no need for pre-polarization treatment. This avoids the contradiction of "strong sensing signal but weak actuation response" in inverse piezoelectric actuation, ultimately achieving high performance in both sensing and actuation. Furthermore, since both are homologous polymers, the adverse effects of integration incompatibility caused by significant differences in the properties of the sensing and driving materials on the performance of the integrated sensing and driving device can be avoided. Summary of the Invention

[0004] The purpose of this invention is to provide a high-sensory-drive integrated device based on P(VDF-TrFE) homologous copolymers, which solves the problems of difficulty in improving driving force and low sensor-drive coordination efficiency in existing soft robots.

[0005] The purpose of this invention is to provide a method for preparing a high-sensitivity integrated device based on P(VDF-TrFE)-based homologous copolymer.

[0006] The technical solution adopted in this invention is: a P(VDF-TrFE) based homologous copolymer high-sensitivity integrated device, the integrated device comprising an electrostrictive layer, a piezoelectric sensing layer and an adhesive layer, wherein the adhesive layer integrates the piezoelectric sensing layer and the electrostrictive layer; the width of the piezoelectric sensing layer is the same as that of the electrostrictive layer and the length is less than that of the electrostrictive layer; The electrostrictive layer comprises, from top to bottom, a passive layer, an electrode layer, a P(VDF-TrFE-CFE) electrostrictive film, and another electrode layer, wherein the electrode layer material is any one of gold, silver, and platinum. The piezoelectric sensing layer includes a P(VDF-TrFE) piezoelectric sensing film, and electrode layers are respectively provided on the upper and lower surfaces of the P(VDF-TrFE) piezoelectric sensing film, with positive and negative electrode wires led out from the upper and lower electrode layers respectively; the electrode layer material is any one of gold, silver and platinum.

[0007] The VDF / TrFE ratio in the P(VDF-TrFE) piezoelectric sensing film is 80 / 20 mol%. The high voltage constant of this component P(VDF-TrFE) ensures sensing accuracy. Electrode layers are respectively provided on the upper and lower surfaces of the P(VDF-TrFE) piezoelectric sensing film. The electrode layer material is any one of gold, silver and platinum. Positive and negative electrode wires are led out from the upper and lower electrode layers respectively.

[0008] The ratio of VDF / TrFE / CFE in the P(VDF-TrFE-CFE) electrostrictive film is 58.59 / 35.4 / 6.01 mol%. The relaxor ferroelectric properties of this component P(VDF-TrFE-CFE) enable low-field, large-strain conditions. Electrode layers are respectively provided on the upper and lower surfaces of the P(VDF-TrFE-CFE) film. The electrode layer material is any one of gold, silver, and platinum. Positive and negative electrode wires are led out from the upper and lower electrode layers respectively. A passive layer is attached to one side of the electrode layer to convert the in-plane stretching of P(VDF-TrFE-CFE) into macroscopic bending deformation.

[0009] When the P(VDF-TrFE)-based homologous copolymer high-sensory-drive integrated device of the present invention is tested for induction-drive synergy, it is fixed to the edge of a table to form a cantilever beam structure; the electrostrictive material in the induction-drive integrated device deforms when excited by the driving voltage, and the piezoelectric material generates a piezoelectric output voltage signal when excited by the deformation of the electrostrictive material.

[0010] The invention is further characterized in that, P(VDF-TrFE-CFE) electrostrictive material does not require prepolarization. Its relaxor ferroelectric properties enable large strain under low electric field. Electrode layers are provided on the upper and lower surfaces of the P(VDF-TrFE-CFE) film, and positive and negative electrode wires are led out from the upper and lower electrode layers respectively. A passive layer is attached to one of the electrode layers to convert the in-plane stretching of P(VDF-TrFE-CFE) into macroscopic bending deformation.

[0011] The adhesive layer is made of any one of the following: low-odor acrylic structural AB adhesive, cyanoacrylate adhesive, and PET high-transparency thin double-sided adhesive.

[0012] The lead wires of the electrostrictive layer and the piezoelectric sensing layer include any one of copper wire, conductive cloth tape, and copper foil tape.

[0013] The passive layer material is a film formed from any one of the polymer materials PI, PVC, PET, and PE.

[0014] The second technical solution adopted in this invention is a method for preparing a high-sensitivity integrated device based on P(VDF-TrFE)-based homologous copolymers, the specific operation steps of which are as follows: Step 1: Fabricate P(VDF-TrFE-CFE) electrostrictive layer and P(VDF-TrFE) piezoelectric sensing layer; Step 2: Fabricate a high-sensitivity integrated device using a low-odor acrylic AB adhesive bonding process; Step 3: Test the induction-drive synergy of the high-induction-drive integrated device.

[0015] Step 1 is as follows: S11: Prepare P(VDF-TrFE) piezoelectric sensing film and P(VDF-TrFE-CFE) electrostrictive film of the same width respectively; the length of P(VDF-TrFE) piezoelectric sensing film is less than the length of P(VDF-TrFE-CFE) electrostrictive film; S12: Gold electrode layers were sputtered onto the upper and lower surfaces of the piezoelectric sensing film and the electrostrictive film respectively using an ion sputtering instrument, with a 1mm blank left at the edge of the film to ensure electrical safety. S13: Select a 0.055mm thick polyimide film as the passive layer and attach it to one of the surface electrode layers of the electrostrictive film to obtain the electrostrictive layer; select a 0.11mm thick conductive cloth tape on the electrode layer as the lead wire of the electrostrictive layer. A copper wire with a diameter of 0.1 mm was selected on the electrode layer of the piezoelectric sensing film as the lead wire of the piezoelectric sensing layer to obtain the piezoelectric sensing layer.

[0016] Step 2 is as follows: S21: Apply a layer of low-odor acrylic structural AB glue to the passive layer at the top region of the electrostrictive layer; S22: Adhere the piezoelectric sensing layer onto the passive layer in the top region of the electrostrictive layer to form an integrated sensing and driving device; S23: Place the sensor-driven integrated device on a flat table and place a heavy object under static pressure for 24 hours to allow the low-odor acrylic structural AB glue to completely dry and cure. S24: Complete the fabrication of the high-sensitivity integrated device.

[0017] The specific method for testing the induction-drive synergy of the integrated induction-drive device in step 3 is as follows: S31: Select a signal generator, a high-voltage amplifier, and an oscilloscope as the relevant testing equipment; S32: Use tape to fix one end of the high-sensitivity drive integrated device to the edge of the table to form a cantilever beam structure; S33: Connect the signal generator to the input interface of the high voltage amplifier, connect the signal output line of the high voltage amplifier to the positive and negative terminals of the electrostriction layer in the integrated induction and drive device, and connect the positive and negative terminals of the piezoelectric sensing layer in the integrated induction and drive device to the oscilloscope. S34: Turn on the signal generator and high-voltage amplifier, and set the sine wave amplitude of the signal generator to 3Vpp and the bias voltage to 1.5V. DC The frequency is adjustable, and the voltage amplitude can be changed by rotating the gain knob of the high-voltage amplifier; turn on the oscilloscope to collect and record the output voltage signal generated by the deformation of the high-sensitivity drive integrated device.

[0018] The beneficial effects of this invention are: The P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device disclosed in this invention integrates piezoelectric materials and electrostrictive materials using an adhesive bonding process. When a driving input voltage is applied to the electrostrictive layer, the electrostrictive material is excited by the electric field and deforms. The piezoelectric material attached to the electrostrictive layer deforms along with the deformation of the electrostrictive material, thereby generating bound charges on its surface. The bound charges are converted by the circuit in the signal acquisition device to obtain the piezoelectric output voltage signal.

[0019] Furthermore, both the piezoelectric sensing layer and the electrostrictive layer are made of P(VDF) material. The TrFE series copolymers have high chemical homology and naturally better interfacial compatibility, which can avoid problems such as delamination and charge loss in the integration of heterogeneous materials, and provide a structural basis for subsequent performance breakthroughs.

[0020] Furthermore, compared to P(VDF) The inverse piezoelectric effect of TrFE is utilized in the integrated inductive and actuated device, which utilizes P(VDF). The electrostrictive effect of TrFE-CFE has advantages such as no need for polarization treatment, low hysteresis effect and no limitation by depolarization temperature.

[0021] Furthermore, the selected P(VDF) The high voltage coefficient of TrFE piezoelectric materials ensures sensing accuracy; the selected P(VDF) The excellent electrostrictive properties of TrFE-CFE relaxor ferroelectric materials enable them to achieve large strain in low electric fields. The integration of the two can achieve high performance in both sensing and actuation, which cannot be achieved by a single material. This solves the problems of difficulty in increasing the driving displacement and low efficiency of sensing-actuation coordination in existing soft robots. Attached Figure Description

[0022] To more clearly illustrate the embodiments of the present invention, the accompanying drawings used in the embodiments of the present invention will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the material structure of each layer of the sensor-drive integrated device of the present invention; Figure 2 This is a piezoelectric output voltage response diagram of the sensor-drive integrated device of the present invention under different driving voltages at the same driving frequency (3Hz); Figure 3 This is a piezoelectric output voltage response diagram of the sensor-drive integrated device of the present invention under different driving frequencies at the same driving voltage (1500V). Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0025] Example 1 This embodiment provides a method for preparing a high-sensitivity integrated device based on P(VDF-TrFE)-based homologous copolymers, including the following steps: The fabrication of the S1 electrostrictive layer and the piezoelectric sensing layer includes the following sub-steps: S11 prepares a 30μm thick P(VDF-TrFE) piezoelectric sensing film with a size of 6mm×9mm and a 6mm×16mm P(VDF-TrFE-CFE) electrostrictive film. S12 uses an ion sputtering instrument to sputter gold electrode layers on the upper and lower surfaces of the thin film, respectively. The size of the electrostrictive layer is 5mm×15mm, and the size of the piezoelectric sensing layer is 5mm×8mm, with a 1mm margin at the edge to ensure electrical safety. The lead wires of the S13 electrostrictive layer are preferably made of conductive cloth tape with a thickness of 0.11mm, which can adhere tightly to irregular surfaces, reduce poor contact, and have good durability and stability. S14 preferably uses a 0.055 mm thick polyimide film as the passive layer of the electrostrictive layer to obtain the electrostrictive layer; The lead wires of the S15 piezoelectric sensing layer are preferably made of lightweight 0.1mm copper wire to avoid increasing the burden on the electrostrictive layer and thus obtain the piezoelectric sensing layer.

[0026] S2: The high-sensitivity integrated device is fabricated using a low-odor acrylic AB adhesive bonding process, including the following sub-steps: S21 applies a layer of low-odor acrylic structural AB glue to the passive layer at the top region of the electrostrictive layer; S22 attaches the piezoelectric sensing layer to the top region of the passive layer in the electrostrictive layer; S23 places the sensor-driven integrated device on a flat table and places a heavy object on it for static pressure for 24 hours, waiting for the low-odor acrylic structural AB glue to completely dry and cure. S24 completed the fabrication of the high-sensitivity integrated device. A schematic diagram of the layered material structure is shown below. Figure 1 As shown; S3: Testing the induction-drive synergy of high-performance integrated induction-drive devices, including the following steps: S31 selects a signal generator, a high-voltage amplifier, and an oscilloscope as the relevant testing equipment; S32 uses tape to fix one end of the high-sensitivity drive integrated device to the edge of the table, forming a cantilever beam structure; The S33 signal generator is connected to the input of the high-voltage amplifier. The output of the high-voltage amplifier is connected to the wires of the electrostriction layer in the integrated inductor-driven device. The wires of the piezoelectric sensing layer in the integrated inductor-driven device are connected to the oscilloscope. S34 turns on the signal generator, high-voltage amplifier, and oscilloscope, and sets the AC voltage signal parameters output by the signal generator: amplitude 3Vpp, bias 1.5V. DC The frequency is adjustable (1-5Hz), which adjusts the gain of the high-voltage amplifier (100-500, in 50 increments). The S35 electrostrictive layer is excited by the driving voltage to deform, and the piezoelectric sensing layer is excited by the deformation of the electrostrictive layer to generate a piezoelectric output voltage signal. The S36 oscilloscope acquires and saves the piezoelectric output voltage; Export the piezoelectric output voltage data from S37, and use Origin plotting software to draw the corresponding output voltage diagram, such as... Figure 2 and Figure 3 As shown.

[0027] refer to Figure 2 It can be seen that as the driving input voltage increases, the piezoelectric output voltage gradually increases. The main reason is that the larger driving input voltage causes the electrostrictive layer to undergo larger deformation, which in turn causes the sensing layer attached to the electrostrictive layer to undergo larger deformation, ultimately generating a larger piezoelectric output voltage. This indicates that the sensor-drive integrated device made of homologous P(VDF-TrFE) based polymer has good voltage response characteristics, that is, the sensing layer in the sensor-drive integrated device can effectively sense the deformation of the electrostrictive layer and provide feedback information.

[0028] refer to Figure 3 It can be seen that as the frequency of the driving input voltage increases, the period of the piezoelectric output voltage decreases, and the voltage signal waveforms appearing within the same time period gradually become denser, indicating that the driving input voltage frequency and the piezoelectric output voltage frequency maintain a good consistency. Furthermore, as the frequency increases, the piezoelectric output voltage generated by the sensing layer increases. This is mainly because the test platform of the integrated sensing and driving device is a cantilever beam structure. As the frequency provided by the signal generator increases, the deformation excitation frequency of the electrostrictive layer approaches the natural frequency of the cantilever beam, resulting in the accumulation of vibration energy and increased deformation, ultimately leading to an increase in piezoelectric output.

[0029] In summary, the P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device proposed in this invention has good voltage and frequency response characteristics, which can promote the multi-functional integration of soft robots and realize intelligent driving, enabling them to better cope with various complex tasks and environmental challenges.

[0030] Example 2 The high-sensitivity integrated device of the present invention, such as Figure 1 As shown, it includes an electrostrictive layer, a piezoelectric sensing layer, and an adhesive layer, wherein the adhesive layer integrates the piezoelectric sensing layer and the electrostrictive layer; the width of the piezoelectric sensing layer is the same as that of the electrostrictive layer, and its length is less than that of the electrostrictive layer; The electrostrictive layer comprises, from top to bottom, a passive layer, an electrode layer, an electrostrictive film, and an electrode layer, wherein the electrode layer material is any one of gold, silver, and platinum. The piezoelectric sensing layer includes a P(VDF-TrFE) piezoelectric sensing film, with electrode layers respectively provided on the upper and lower surfaces of the P(VDF-TrFE) film, and positive and negative electrode wires respectively led out from the upper and lower electrode layers; the electrode layer material is any one of gold, silver and platinum.

[0031] When the high-sensor drive integrated device is tested for sensor-drive synergy, it is fixed to the edge of the table to form a cantilever beam structure; the electrostrictive layer in the sensor-drive integrated device is excited by the driving voltage to generate deformation, and the piezoelectric sensing layer is excited by the deformation of the electrostrictive layer to generate a piezoelectric output voltage signal.

[0032] Example 3 The high-sensitivity integrated device of the present invention includes an electrostrictive layer, a piezoelectric sensing layer, and an adhesive layer, wherein the adhesive layer integrates the piezoelectric sensing layer and the electrostrictive layer; the width of the piezoelectric sensing layer is the same as that of the electrostrictive layer, and the length is less than that of the electrostrictive layer; The electrostrictive layer comprises, from top to bottom, a passive layer, an electrode layer, an electrostrictive film, and an electrode layer, wherein the electrode layer material is any one of gold, silver, and platinum. The piezoelectric sensing layer includes a P(VDF-TrFE) piezoelectric sensing film, with electrode layers respectively provided on the upper and lower surfaces of the P(VDF-TrFE) film, and positive and negative electrode wires respectively led out from the upper and lower electrode layers; the electrode layer material is any one of gold, silver and platinum.

[0033] Example 4 Based on Example 3, the adhesive layer uses any one of the following: low-odor acrylic structural AB adhesive, cyanoacrylate adhesive, and PET high-transparency thin double-sided adhesive.

[0034] The lead wires of the electrostrictive layer and the piezoelectric sensing layer include any one of copper wire, conductive cloth tape, and copper foil tape.

[0035] The passive layer material is a film of any one of the polymer materials selected from PI, PVC, PET, and PE.

[0036] Example 5 The testing method for the sensor-drive synergy performance of the high-performance integrated sensor-drive device of this invention is as follows: (1) Select a signal generator, a high-voltage amplifier, and an oscilloscope as the relevant testing equipment; (2) Fix the lead-out end of the electrostriction layer of the high-sensitivity drive integrated device to the edge of the table with transparent tape to form a cantilever beam structure; (3) Connect the signal generator to the signal input port of the high voltage amplifier, connect the high voltage signal output port of the high voltage amplifier to the positive and negative wires of the electrostrictive layer, and connect the oscilloscope to the positive and negative wires of the piezoelectric sensing layer. (4) Turn on the signal generator, high voltage amplifier and oscilloscope, and set the AC voltage signal parameters output by the signal generator: amplitude 3Vpp, bias 1.5V. DC The frequency is adjustable (1-5Hz), which adjusts the gain of the high-voltage amplifier (100-500, in 50 increments). (5) Use an oscilloscope to collect and save the piezoelectric output voltage.

[0037] Example 6 This embodiment provides a method for preparing a high-sensitivity integrated device based on P(VDF-TrFE)-based homologous copolymers, including the following steps: Fabrication of S1 electrostrictive layer and piezoelectric sensing layer S11 prepares a P(VDF-TrFE) piezoelectric sensing film with a size of 8mm×15mm and a P(VDF-TrFE-CFE) electrostrictive film with a size of 8mm×24mm; S12 screen prints silver electrode layers on the upper and lower surfaces of the piezoelectric sensing film and the electrostrictive film respectively. The size of the electrostrictive layer is 7mm×23mm, and the size of the piezoelectric sensing layer is 7mm×14mm. A 1mm margin is left at the edge to ensure electrical safety. The lead wires of the S13 electrostrictive layer are conductive cloth tape with a thickness of 0.11mm, which can adhere tightly to irregular surfaces, reduce poor contact, and have good durability and stability. S14 selects a 0.05mm thick PVC film electrostrictive layer as the passive layer to obtain the electrostrictive layer; The lead wires of the S15 piezoelectric sensing layer are preferably made of lightweight 0.1mm conductive cloth tape to avoid increasing the burden on the electrostrictive layer and thus obtain the piezoelectric sensing layer.

[0038] S2: The sensor-driven integrated device is fabricated using a cyanoacrylate adhesive bonding process. S21 A preferred cyanoacrylate adhesive is applied to the passive layer in the top region of the electrostrictive layer; S22 adheres the piezoelectric sensing layer to the passive layer in the top region of the electrostrictive layer; S23 Place the sensor-driven integrated device on a flat table and place a heavy object under static pressure for 24 hours to allow the cyanoacrylate adhesive to completely dry and cure; thus completing the preparation of the high-sensitivity sensor-driven integrated device. S3: Testing the induction-drive synergy of high-performance integrated induction-drive devices, including the following steps: S31 selects a signal generator, a high-voltage amplifier, and an oscilloscope as the relevant testing equipment; S32 uses tape to fix one end of the high-sensitivity drive integrated device to the edge of the table, forming a cantilever beam structure; The S33 signal generator is connected to the input of the high-voltage amplifier. The output of the high-voltage amplifier is connected to the wires of the electrostriction layer in the integrated inductor-driven device. The wires of the piezoelectric sensing layer in the integrated inductor-driven device are connected to the oscilloscope. S34 turns on the signal generator, high-voltage amplifier, and oscilloscope, and sets the AC voltage signal parameters output by the signal generator: amplitude 3Vpp, bias 1.5V. DCThe frequency is adjustable (1-5Hz), which adjusts the gain of the high-voltage amplifier (100-500, in 50 increments). The S35 electrostrictive layer is excited by the driving voltage to deform, and the piezoelectric sensing layer is excited by the deformation of the electrostrictive layer to generate a piezoelectric output voltage signal. The S36 oscilloscope acquires and saves the piezoelectric output voltage; Export the piezoelectric output voltage data from S37 and use Origin plotting software to draw the corresponding output voltage diagram.

[0039] The above are only some embodiments of the present invention. For those skilled in the art, any improvements and modifications made to the present invention without departing from the principle of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A high-sensitivity integrated device based on P(VDF-TrFE)-based homologous copolymer, characterized in that, The high-sensitivity integrated device includes an electrostrictive layer, a piezoelectric sensing layer, and an adhesive layer, wherein the adhesive layer integrates the piezoelectric sensing layer and the electrostrictive layer; the width of the piezoelectric sensing layer is the same as that of the electrostrictive layer, and its length is less than that of the electrostrictive layer; The electrostrictive layer comprises, from top to bottom, a passive layer, an electrode layer, a P(VDF-TrFE-CFE) electrostrictive film, and another electrode layer, wherein the electrode layer material is any one of gold, silver, and platinum. The piezoelectric sensing layer includes a P(VDF-TrFE) piezoelectric sensing film, and electrode layers are respectively provided on the upper and lower surfaces of the P(VDF-TrFE) piezoelectric sensing film, with positive and negative electrode wires led out from the upper and lower electrode layers respectively; the electrode layer material is any one of gold, silver and platinum.

2. The P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device according to claim 1, characterized in that, The electrostrictive layer includes a P(VDF-TrFE-CFE) electrostrictive film, with electrode layers respectively provided on the upper and lower surfaces of the P(VDF-TrFE-CFE) electrostrictive film. Positive and negative electrode wires are led out from the upper and lower electrode layers respectively, and a passive layer is attached to one of the electrode layers.

3. The P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device according to claim 2, characterized in that, The adhesive layer is made of any one of the following: low-odor acrylic structural AB adhesive, cyanoacrylate adhesive, and PET high-transparency thin double-sided adhesive.

4. The P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device according to claim 3, characterized in that, The lead wires of the electrostrictive layer and the piezoelectric sensing layer include any one of copper wire, conductive cloth tape, and copper foil tape.

5. The P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device according to claim 2, characterized in that, The passive layer material is a film formed from any one of the polymer materials PI, PVC, PET, and PE.

6. A method for preparing a high-sensitivity integrated device based on P(VDF-TrFE)-based homologous copolymer, characterized in that, The specific operating steps are as follows: Step 1: Fabricate P(VDF-TrFE-CFE) electrostrictive layer and P(VDF-TrFE) piezoelectric sensing layer; Step 2: Fabricate a high-sensitivity integrated device using a low-odor acrylic AB adhesive bonding process; Step 3: Test the induction-drive synergy of the high-induction-drive integrated device.

7. The method for preparing the P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device according to claim 6, characterized in that, Step 1 is as follows: S11: Prepare P(VDF-TrFE) piezoelectric sensing film and P(VDF-TrFE-CFE) electrostrictive film of the same width respectively; the length of P(VDF-TrFE) piezoelectric sensing film is less than the length of P(VDF-TrFE-CFE) electrostrictive film; S12: Gold electrode layers were sputtered onto the upper and lower surfaces of the piezoelectric sensing film and the electrostrictive film respectively using an ion sputtering instrument, with a 1mm blank left at the edge of the film to ensure electrical safety. S13: Select a 0.055mm thick polyimide film as the passive layer and attach it to one of the surface electrode layers of the electrostrictive film to obtain the electrostrictive layer; select a 0.11mm thick conductive cloth tape on the electrode layer as the lead wire of the electrostrictive layer. A copper wire with a diameter of 0.1 mm was selected on the electrode layer of the piezoelectric sensing film as the lead wire of the piezoelectric sensing layer to obtain the piezoelectric sensing layer.

8. The method for preparing the P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device according to claim 7, characterized in that, Step 2 is as follows: S21: Apply a layer of low-odor acrylic structural AB glue to the passive layer at the top region of the electrostrictive layer; S22: Adhere the piezoelectric sensing layer onto the passive layer in the top region of the electrostrictive layer to form an integrated sensing and driving device; S23: Place the sensor-driven integrated device on a flat table and place a heavy object under static pressure for 24 hours to allow the low-odor acrylic structural AB glue to completely dry and cure. S24: Complete the fabrication of the high-sensitivity integrated device.

9. The method for preparing the P(VDF-TrFE)-based homologous copolymer high-sensitivity integrated device according to claim 8, characterized in that, Step 3 is as follows: S31: Select a signal generator, a high-voltage amplifier, and an oscilloscope as the relevant testing equipment; S32: Use tape to fix one end of the high-sensitivity drive integrated device to the edge of the table to form a cantilever beam structure; S33: Connect the signal generator to the input interface of the high voltage amplifier, connect the signal output line of the high voltage amplifier to the positive and negative terminals of the electrostriction layer in the integrated induction and drive device, and connect the positive and negative terminals of the piezoelectric sensing layer in the integrated induction and drive device to the oscilloscope. S34: Turn on the signal generator and high-voltage amplifier, and set the sine wave amplitude of the signal generator to 3Vpp and the bias voltage to 1.5V. DC The frequency is adjustable, and the voltage amplitude can be changed by rotating the gain knob of the high-voltage amplifier; turn on the oscilloscope to collect and record the output voltage signal generated by the deformation of the high-sensitivity drive integrated device.

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